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WO2009074408A3 - Vakuumpumpe sowie verfahren zum betreiben einer vakuumpumpe - Google Patents

Vakuumpumpe sowie verfahren zum betreiben einer vakuumpumpe Download PDF

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Publication number
WO2009074408A3
WO2009074408A3 PCT/EP2008/065079 EP2008065079W WO2009074408A3 WO 2009074408 A3 WO2009074408 A3 WO 2009074408A3 EP 2008065079 W EP2008065079 W EP 2008065079W WO 2009074408 A3 WO2009074408 A3 WO 2009074408A3
Authority
WO
WIPO (PCT)
Prior art keywords
pump
vacuum pump
operating
chamber
flow channel
Prior art date
Application number
PCT/EP2008/065079
Other languages
English (en)
French (fr)
Other versions
WO2009074408A2 (de
Inventor
Dirk Schiller
Magnus Janicki
Michael Steininger
Michael Hoelzemer
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Dirk Schiller
Magnus Janicki
Michael Steininger
Michael Hoelzemer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh, Dirk Schiller, Magnus Janicki, Michael Steininger, Michael Hoelzemer filed Critical Oerlikon Leybold Vacuum Gmbh
Publication of WO2009074408A2 publication Critical patent/WO2009074408A2/de
Publication of WO2009074408A3 publication Critical patent/WO2009074408A3/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

Eine Vakuumpumpe, insbesondere eine Wälzkolben-Vakuumpumpe, weist einen Pumpenraum (12) auf, der von einem Pumpengehäuse (10) ausgebildet ist. In dem Pumpenraum (12) sind Pumpenelemente (14) angeordnet, die von einem Antriebsmotor angetrieben werden. Durch die Pumpenelemente wird ein Medium vom Pumpeneinlass (18) durch den Pumpenraum (12) und aus diesem durch den Pumpenauslass (20) gepumpt. Zur Vermeidung von Überhitzungen ist ein Strömungskanal (24) vorgesehen, durch den zumindest bedarfsweise Medium vom Pumpenauslass (20) zum Pumpeneinlass (18) zurückgeführt werden kann. In dem Strömungskanal ist eine Ventileinrichtung (30) vorgesehen. Die Ventileinrichtung (30) ist erfindungsgemäß regelbar und hierzu mit einer Regeleinrichtung (52) verbunden. Ferner betrifft die Erfindung ein Verfahren zum Betreiben der Vakuumpumpe.
PCT/EP2008/065079 2007-12-13 2008-11-06 Vakuumpumpe sowie verfahren zum betreiben einer vakuumpumpe WO2009074408A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710060174 DE102007060174A1 (de) 2007-12-13 2007-12-13 Vakuumpumpe sowie Verfahren zum Betreiben einer Vakuumpumpe
DE102007060174.5 2007-12-13

Publications (2)

Publication Number Publication Date
WO2009074408A2 WO2009074408A2 (de) 2009-06-18
WO2009074408A3 true WO2009074408A3 (de) 2009-08-20

Family

ID=40673879

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/065079 WO2009074408A2 (de) 2007-12-13 2008-11-06 Vakuumpumpe sowie verfahren zum betreiben einer vakuumpumpe

Country Status (2)

Country Link
DE (1) DE102007060174A1 (de)
WO (1) WO2009074408A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2489849B1 (de) * 2009-10-14 2015-12-23 Kawasaki Jukogyo Kabushiki Kaisha Motorturboladervorrichtung
JP5763358B2 (ja) * 2011-02-03 2015-08-12 アルバック機工株式会社 真空ポンプ
DE202013000913U1 (de) * 2013-01-30 2014-05-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe insbesondere Wälzkolbenpumpe
DE102013208829A1 (de) * 2013-05-14 2014-11-20 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102013223556A1 (de) * 2013-11-19 2015-05-21 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System sowie Verfahren zum Betreiben eines Vakuumpumpen-Systems
KR20160072962A (ko) * 2014-12-16 2016-06-24 주식회사 우성진공 개선된 구조의 루츠펌프
CN107035692A (zh) * 2016-02-04 2017-08-11 张权 一种基于罗茨泵故障模式的真空系统性能退化测量方法
DE102016223782A1 (de) * 2016-11-30 2018-05-30 Leybold Gmbh Verfahren zum Betreiben eines Vakuumpumpensystems

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2032527A (en) * 1978-10-09 1980-05-08 Leybold Heraeus Gmbh & Co Kg Rotary positive-displacement fluid-machines
US4763636A (en) * 1985-09-30 1988-08-16 Aisin Seiki Kabushiki Kaisha Mechanical supercharger
US4991562A (en) * 1988-09-28 1991-02-12 Aisin Seiki Kabushiki Kaisha Mechanical supercharger system
JP2001164943A (ja) * 1999-12-09 2001-06-19 Tochigi Fuji Ind Co Ltd 流体機械

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH368261A (de) * 1959-04-16 1963-03-31 Balzers Hochvakuum Drehkolbenpumpe des Gebläsetyps
DE1226239B (de) * 1960-11-03 1966-10-06 Leybolds Nachfolger E Betriebsverfahren fuer ein Vakuum-pumpenaggregat
US3989413A (en) * 1975-05-14 1976-11-02 Ingersoll-Rand Company Gas compressor unloading means
DE3238015C2 (de) * 1982-10-13 1986-07-31 Aerzener Maschinenfabrik Gmbh, 3251 Aerzen Roots-Kompressor
DE3911541C1 (de) * 1989-04-08 1990-03-29 Aktiengesellschaft Kuehnle, Kopp & Kausch, 6710 Frankenthal, De
US5127386A (en) * 1990-06-01 1992-07-07 Ingersoll-Rand Company Apparatus for controlling a supercharger
DE19511430A1 (de) * 1995-03-29 1996-10-02 Leybold Ag Umwälzgebläse, Vakuumpumpe oder dergleichen
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
FR2804729B1 (fr) * 2000-02-07 2002-05-10 Air Liquide Procede de mise en oeuvre d'une machine de compression de fluide, installation de traitement de fluide comprenant une telle machine, et application d'une telle installation a la production d'un constituant de l'air
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2032527A (en) * 1978-10-09 1980-05-08 Leybold Heraeus Gmbh & Co Kg Rotary positive-displacement fluid-machines
US4763636A (en) * 1985-09-30 1988-08-16 Aisin Seiki Kabushiki Kaisha Mechanical supercharger
US4991562A (en) * 1988-09-28 1991-02-12 Aisin Seiki Kabushiki Kaisha Mechanical supercharger system
JP2001164943A (ja) * 1999-12-09 2001-06-19 Tochigi Fuji Ind Co Ltd 流体機械

Also Published As

Publication number Publication date
WO2009074408A2 (de) 2009-06-18
DE102007060174A1 (de) 2009-06-25

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