WO2008007787A1 - Method of bonding resins by light irradiation and process for producing resin article - Google Patents
Method of bonding resins by light irradiation and process for producing resin article Download PDFInfo
- Publication number
- WO2008007787A1 WO2008007787A1 PCT/JP2007/064023 JP2007064023W WO2008007787A1 WO 2008007787 A1 WO2008007787 A1 WO 2008007787A1 JP 2007064023 W JP2007064023 W JP 2007064023W WO 2008007787 A1 WO2008007787 A1 WO 2008007787A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- resin
- bonding
- bonded
- resins
- adhering
- Prior art date
Links
- 229920005989 resin Polymers 0.000 title claims abstract description 259
- 239000011347 resin Substances 0.000 title claims abstract description 259
- 238000000034 method Methods 0.000 title claims abstract description 125
- 230000008569 process Effects 0.000 title abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 99
- 238000004519 manufacturing process Methods 0.000 claims description 51
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 27
- 239000000853 adhesive Substances 0.000 claims description 25
- 230000001070 adhesive effect Effects 0.000 claims description 25
- 229920000089 Cyclic olefin copolymer Polymers 0.000 claims description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- 125000000524 functional group Chemical group 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 230000009477 glass transition Effects 0.000 claims description 7
- 229920000515 polycarbonate Polymers 0.000 claims description 7
- 239000004417 polycarbonate Substances 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 125000003277 amino group Chemical group 0.000 claims description 4
- 239000004519 grease Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 claims description 3
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 claims description 3
- 125000003172 aldehyde group Chemical group 0.000 claims description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 3
- 125000003700 epoxy group Chemical group 0.000 claims description 3
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 claims description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 2
- 229910052753 mercury Inorganic materials 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 229910052724 xenon Inorganic materials 0.000 claims description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 2
- 230000004927 fusion Effects 0.000 abstract description 13
- 230000003287 optical effect Effects 0.000 description 12
- 239000003960 organic solvent Substances 0.000 description 12
- 239000011342 resin composition Substances 0.000 description 11
- 239000004205 dimethyl polysiloxane Substances 0.000 description 8
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 8
- 238000004381 surface treatment Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 5
- 229920002050 silicone resin Polymers 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000007429 general method Methods 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- -1 polydimethylsiloxane Polymers 0.000 description 3
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910018557 Si O Inorganic materials 0.000 description 2
- 125000002619 bicyclic group Chemical group 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000000077 Auger electron appearance potential spectroscopy Methods 0.000 description 1
- 239000004831 Hot glue Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 229920006125 amorphous polymer Polymers 0.000 description 1
- 229920006127 amorphous resin Polymers 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000003759 clinical diagnosis Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000004925 denaturation Methods 0.000 description 1
- 230000036425 denaturation Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000007877 drug screening Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 description 1
- 150000002848 norbornenes Chemical class 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000001420 photoelectron spectroscopy Methods 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 239000012262 resinous product Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/05—Particular design of joint configurations
- B29C66/10—Particular design of joint configurations particular design of the joint cross-sections
- B29C66/11—Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
- B29C66/112—Single lapped joints
- B29C66/1122—Single lap to lap joints, i.e. overlap joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
- B29C65/1403—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
- B29C65/1406—Ultraviolet [UV] radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
- B29C65/1429—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the way of heating the interface
- B29C65/1432—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the way of heating the interface direct heating of the surfaces to be joined
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/48—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding
- B29C65/4805—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding characterised by the type of adhesives
- B29C65/483—Reactive adhesives, e.g. chemically curing adhesives
- B29C65/4845—Radiation curing adhesives, e.g. UV light curing adhesives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/02—Preparation of the material, in the area to be joined, prior to joining or welding
- B29C66/024—Thermal pre-treatments
- B29C66/0242—Heating, or preheating, e.g. drying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/02—Preparation of the material, in the area to be joined, prior to joining or welding
- B29C66/026—Chemical pre-treatments
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/02—Preparation of the material, in the area to be joined, prior to joining or welding
- B29C66/028—Non-mechanical surface pre-treatments, i.e. by flame treatment, electric discharge treatment, plasma treatment, wave energy or particle radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/03—After-treatments in the joint area
- B29C66/034—Thermal after-treatments
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/40—General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
- B29C66/41—Joining substantially flat articles ; Making flat seams in tubular or hollow articles
- B29C66/43—Joining a relatively small portion of the surface of said articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/40—General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
- B29C66/41—Joining substantially flat articles ; Making flat seams in tubular or hollow articles
- B29C66/45—Joining of substantially the whole surface of the articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/50—General aspects of joining tubular articles; General aspects of joining long products, i.e. bars or profiled elements; General aspects of joining single elements to tubular articles, hollow articles or bars; General aspects of joining several hollow-preforms to form hollow or tubular articles
- B29C66/51—Joining tubular articles, profiled elements or bars; Joining single elements to tubular articles, hollow articles or bars; Joining several hollow-preforms to form hollow or tubular articles
- B29C66/53—Joining single elements to tubular articles, hollow articles or bars
- B29C66/534—Joining single elements to open ends of tubular or hollow articles or to the ends of bars
- B29C66/5346—Joining single elements to open ends of tubular or hollow articles or to the ends of bars said single elements being substantially flat
- B29C66/53461—Joining single elements to open ends of tubular or hollow articles or to the ends of bars said single elements being substantially flat joining substantially flat covers and/or substantially flat bottoms to open ends of container bodies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/50—General aspects of joining tubular articles; General aspects of joining long products, i.e. bars or profiled elements; General aspects of joining single elements to tubular articles, hollow articles or bars; General aspects of joining several hollow-preforms to form hollow or tubular articles
- B29C66/51—Joining tubular articles, profiled elements or bars; Joining single elements to tubular articles, hollow articles or bars; Joining several hollow-preforms to form hollow or tubular articles
- B29C66/54—Joining several hollow-preforms, e.g. half-shells, to form hollow articles, e.g. for making balls, containers; Joining several hollow-preforms, e.g. half-cylinders, to form tubular articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/80—General aspects of machine operations or constructions and parts thereof
- B29C66/83—General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
- B29C66/832—Reciprocating joining or pressing tools
- B29C66/8322—Joining or pressing tools reciprocating along one axis
- B29C66/83221—Joining or pressing tools reciprocating along one axis cooperating reciprocating tools, each tool reciprocating along one axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
- B29C66/914—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux
- B29C66/9141—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the temperature
- B29C66/91411—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the temperature of the parts to be joined, e.g. the joining process taking the temperature of the parts to be joined into account
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
- B29C66/914—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux
- B29C66/9161—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux
- B29C66/91641—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux the heat or the thermal flux being non-constant over time
- B29C66/91643—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux the heat or the thermal flux being non-constant over time following a heat-time profile
- B29C66/91645—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux the heat or the thermal flux being non-constant over time following a heat-time profile by steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
- B29C65/1496—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation making use of masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
- B29C66/71—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the composition of the plastics material of the parts to be joined
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
- B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
- B29C66/731—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the intensive physical properties of the material of the parts to be joined
- B29C66/7311—Thermal properties
- B29C66/73117—Tg, i.e. glass transition temperature
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
- B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
- B29C66/739—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset
- B29C66/7392—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic
- B29C66/73921—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic characterised by the materials of both parts being thermoplastics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/80—General aspects of machine operations or constructions and parts thereof
- B29C66/83—General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
- B29C66/832—Reciprocating joining or pressing tools
- B29C66/8322—Joining or pressing tools reciprocating along one axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
- B29C66/914—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux
- B29C66/9141—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the temperature
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
- B29C66/919—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
- B29C66/919—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges
- B29C66/9192—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges in explicit relation to another variable, e.g. temperature diagrams
- B29C66/91921—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges in explicit relation to another variable, e.g. temperature diagrams in explicit relation to another temperature, e.g. to the softening temperature or softening point, to the thermal degradation temperature or to the ambient temperature
- B29C66/91941—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges in explicit relation to another variable, e.g. temperature diagrams in explicit relation to another temperature, e.g. to the softening temperature or softening point, to the thermal degradation temperature or to the ambient temperature in explicit relation to Tg, i.e. the glass transition temperature, of the material of one of the parts to be joined
- B29C66/91945—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges in explicit relation to another variable, e.g. temperature diagrams in explicit relation to another temperature, e.g. to the softening temperature or softening point, to the thermal degradation temperature or to the ambient temperature in explicit relation to Tg, i.e. the glass transition temperature, of the material of one of the parts to be joined lower than said glass transition temperature
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/92—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools
- B29C66/924—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force, the mechanical power or the displacement of the joining tools
- B29C66/9241—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force or the mechanical power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2023/00—Use of polyalkenes or derivatives thereof as moulding material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2069/00—Use of PC, i.e. polycarbonates or derivatives thereof, as moulding material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2083/00—Use of polymers having silicon, with or without sulfur, nitrogen, oxygen, or carbon only, in the main chain, as moulding material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
- B29K2995/0018—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds having particular optical properties, e.g. fluorescent or phosphorescent
- B29K2995/0026—Transparent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
- B29K2995/0037—Other properties
- B29K2995/0039—Amorphous
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3425—Printed circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/756—Microarticles, nanoarticles
Definitions
- the present invention relates to a method for adhering a resin by irradiation with light (ultraviolet light), and a method for producing a resin article such as a microchip using the method.
- adhesion by heat fusion or adhesion by application of an organic solvent or an adhesive is generally used. Bonding by thermal fusion is usually performed at a temperature above the glass transition point of the resin.
- a microchip that typically has a structure in which a pair of substrates are bonded to face each other and has a fine flow path formed on the surface of at least one of the substrates has attracted attention.
- the microphone mouth chip is also called a microfluidic device.
- a chip suitable for various applications can be configured by providing regions having various functions such as a reaction region in which a reagent is arranged in a flow path also called a microchannel.
- Typical applications for microchips include gene analysis, clinical diagnosis, drug screening, chemistry, biochemistry, pharmacy, medicine, veterinary analysis, compound synthesis, and environmental measurements. .
- microchips are used for these applications, for example, (1) the amount of samples and reagents required for prayer can be reduced compared to the case of using a conventional analyzer suitable for similar applications. (2) The analysis time can be shortened. (3) Since the chip can be disposable, it is possible to obtain effects such as improvement of safety and measurement accuracy in the medical field.
- a glass substrate has been mainly used for a microchip because it can be easily manufactured and optically detected.
- microchips such as glass substrates are damaged by impacts from the outside and immediately become a problem in terms of weight during transportation and disposal. Therefore, development of a microchip using a resin substrate, which is lightweight but difficult to break and cheaper than a glass substrate, is underway.
- an adhesion method between the resin substrates is important.
- a general resin adhesion method for adhesion between the resin substrates, a general resin adhesion method, for example, heat fusion, can be applied.
- heat fusion since bonding by heat fusion is usually performed at a temperature higher than the glass transition point of the resin, the substrate may be deformed during bonding, and the function as a microchip may be lost.
- the influence of the deformation of the substrate becomes more conspicuous when the width of the flow path is narrowed or when the flow path pattern is complicated, it is difficult to increase the functionality of the microchip by bonding by heat fusion. is there.
- JP 2005-80569 A discloses that a substrate having a fine channel on the surface is coated with an organic solvent on a portion without a channel, and then the substrate and a flat surface are bonded.
- a method for joining microchips is disclosed, in which a substrate having a plurality of layers is fused by overlapping.
- Japanese Unexamined Patent Application Publication No. 2005-257283 (Document 2) describes a production of a microchip in which a polydimethylsiloxane (PDMS) substrate is bonded to a resin substrate (facing substrate) made of a material other than PDMS.
- a method is disclosed. In this manufacturing method, after preparing a PDMS substrate having a fine channel formed on the surface and a facing substrate having an oxide silicon film formed on the surface, the bonding surface of both substrates is modified. Then, the substrates are bonded to each other through the silicon oxide film.
- Examples of the modification treatment of the bonding surface include oxygen plasma treatment, more specifically, oxygen plasma treatment in which excimer ultraviolet light is irradiated in an oxygen atmosphere (for example, literature)
- Japanese Unexamined Patent Application Publication No. 2005-171164 (Reference 3) and Japanese Unexamined Patent Application Publication No. 2004-43662 (Reference 4) disclose the surface of olefin-based resin.
- the surface is activated by irradiating light (in Reference 3, the surface-modifying resin having photopolymerizability is used in combination), and the hot-melt adhesive or UV-curing type is applied to the activated surface.
- a method is disclosed in which a resin composition such as resin is applied and the resin is bonded via the composition.
- the method of Document 2 does not use an organic solvent and an adhesive, and therefore, unlike the method of Document 1, blockage of the flow path and deterioration of the characteristics of the microchip are less likely to occur.
- the method of Document 2 is a method used for bonding to a PDMS substrate that is a silicone resin containing a Si—O bond and having a strong affinity with an oxide silicon film. Bonding between substrates is not possible.
- the present invention is not limited to the bonding between the resin substrates at the time of manufacturing the microchip (that is, not limited to the manufacturing method of the microchip), and the temperature is lower than the bonding by thermal fusion!
- An object of the present invention is to provide an adhesion method capable of adhering resin and resin with high productivity.
- the resin bonding method (first bonding method) of the present invention is a resin bonding method for bonding the first resin and the second resin, and is (I) an adhesive surface. Irradiating the surfaces of the first and second resin with ultraviolet light; and (II) raising the temperature in a state where the surfaces after the irradiation are in contact with each other, thereby using the surfaces as adhesive surfaces. Adhering the first resin and the second resin.
- the resin bonding method of the present invention (second bonding method) viewed from a viewpoint different from the first bonding method is a resin that bonds the first resin and the second resin.
- Adhesive surface A step of irradiating the surfaces of the first and second resin with ultraviolet light; (ii) a step of surface-treating the surface after the irradiation with a silane coupling agent; and (iii) a step after the treatment.
- the bonding method of the present invention can be applied to a method for manufacturing a resin article having a portion where a resin and a resin are bonded. That is, the method for producing a resin article according to the present invention is a method for producing a resin article comprising two or more parts having a resin part, wherein the two or more articles are bonded to each other in the resin part. In this method, the resin parts are bonded together by the bonding method of the present invention.
- the method for producing a resin article of the present invention can be applied to a method for producing various resin articles, for example, microchips. That is, the microchip manufacturing method of the present invention is a microchip manufacturing method including a pair of resin substrates bonded to each other so as to face each other, and having a flow path formed in at least one of the resin substrates. Then, the resin substrates are bonded to each other by the bonding method of the present invention.
- the resin and the resin can be bonded with high productivity at a temperature lower than the bonding by thermal fusion.
- the surface treatment of the surfaces of the first and second resin with the silane coupling agent In this surface treatment, the surfaces of the first and second resins.
- a silane coupling agent layer (typically a monomolecular layer) having a thickness of about several nm is formed.
- a resin layer having a thickness of at least several meters is formed on the surface of the resin. Will be.
- a channel having a width of several / zm is usually formed on the surface thereof.
- the resin to be bonded is a resin substrate used for the microchip
- the flow path is blocked unless an adhesive or a resin composition is applied so as to avoid the flow path.
- the thickness of the silane coupling agent layer formed by the treatment is very small with respect to the size of the flow path. Even if it is not performed, blockage of the channel is unlikely to occur. For this reason, even with the second bonding method, the above-mentioned resin substrates are bonded to each other at a lower temperature than the bonding by thermal fusion. Adhesive with good productivity.
- the bonding method of the present invention is applied to a microchip manufacturing method, that is, in the microchip manufacturing method of the present invention, a pair of resin substrates each having a flow path formed at least on one side are heat-sealed. Since the bonding can be performed at a temperature lower than the bonding by, the deformation of the resin substrate during bonding can be suppressed. In addition, since it is not necessary to apply an organic solvent and a resin composition to the adhesive surface of the substrate, it is possible to make the manufacturing method excellent in productivity, and it is possible to suppress blockage of the flow path and deterioration of the characteristics of the microchip during the manufacturing In addition, if the channel width is narrowed, it becomes easier to cope with the complexity of the channel pattern.
- FIG. 1A is a process chart schematically showing an example of the bonding method of the present invention.
- FIG. 1B is a process diagram schematically showing an example of the bonding method of the present invention.
- FIG. 2 is a schematic diagram showing an example of the bonding method of the present invention.
- FIG. 3A is a process diagram schematically showing an example of the bonding method of the present invention.
- FIG. 3B is a process chart schematically showing an example of the bonding method of the present invention.
- FIG. 3C is a process diagram schematically showing an example of the bonding method of the present invention.
- FIG. 4 is a schematic view showing an example of a method for producing a microchip according to the present invention.
- the surfaces 3a and 3b of the first and second resins 1 and 2 to be bonded surfaces are irradiated with ultraviolet light 4 (step (1 )).
- the surfaces 3a and 3b after ultraviolet light irradiation are heated in a state where they are in contact with each other, so that the surfaces 3a and 3b are used as adhesive surfaces, and the first resin 1 and the first resin 1 Bond 2 of 2 with grease (process ( ⁇ )).
- the reason why the first and second resins are bonded by the steps (1) and (II) is not clear.
- the following principle can be considered: First and second When ultraviolet light is irradiated on the surface of each of the resin, the surface energy (irradiated surface) of the surface irradiated with ultraviolet light in each resin increases (activated) before irradiation with ultraviolet light. Hydroxyl, carbonyl, cal A functional group such as a boxyl group is generated.
- the temperature of the irradiated surfaces of the first and second resins is brought into contact with each other, some bond via the functional group is formed between the irradiated surfaces of the first and second resins. It is considered that the first and second resins are bonded with the irradiated surface as the bonding surface.
- Irradiation with ultraviolet light in the step (I) may be performed based on a general method.
- the force that simultaneously irradiates the first resin 1 with the ultraviolet light 4 and the second resin 2 with the ultraviolet light 4 is applied to each resin separately. May be.
- the wavelength of the ultraviolet light to be irradiated is not particularly limited. For example, if it is 300 nm or less, 200 nm or less is preferable in order to more reliably adhere the resin. Note that ultraviolet rays having a wavelength of 200 nm or less are generally called vacuum ultraviolet rays.
- the light source of the ultraviolet light can be selected without any particular limitation.
- the atmosphere to be irradiated with ultraviolet light is preferably an oxygen-containing atmosphere such as air.
- the irradiated surface of each resin may be oxidized to generate a functional group containing an oxygen atom.
- the shape of the irradiated surface may be controlled by a technique such as masking.
- the temperature increase in step (II) may be performed by increasing the temperature of the entire first and second resins, or only in the vicinity of the irradiated surface in the first and second resins. May be.
- the means for raising the temperature is not particularly limited, and a heater, a heating furnace or the like may be selected as appropriate!
- the temperature of the temperature rise may be, for example, less than the glass transition point of the first and second resins, as long as the first resin and the second resin are not thermally fused. .
- the specific temperature of the temperature rise may be appropriately set according to the types of the first and second resins.
- the first and second resins may be cycloolefin polymers (Japan) described later in the examples.
- ZEONEX33 OR manufactured by ZEON: glass transition point 123 ° C), 80 ° C to 120 ° C may be used! /.
- the irradiation surface may be heated while applying a force 5 in a direction in which the (surface 3a) and the irradiation surface (surface 3b) of the second resin 2 are in close contact with each other. It is usually difficult to make the surface of greaves completely flat For example, since the surface of the resin substrate generally has a warp or the like, the first resin and the second resin are heated by increasing the temperature while applying a force in the above direction. Can be bonded more reliably.
- the magnitude of the force applied in the above direction should be appropriately set according to the shapes of the first and second resins, particularly the shape of the adhesive surface of each of the resins.
- At least one resin selected from the first and second resins may be optically transparent.
- the first and second resins can be bonded without using an organic solvent and a resin composition, so that the at least one resin is optically transparent. Even in this case, it is possible to suppress a decrease in optical transparency of the resin due to adhesion.
- the optically transparent resin is generally an amorphous resin.
- the first and second resins are resins having a bond between at least one element of which carbon, oxygen and nitrogen forces are also selected and carbon in the main chain. Also good.
- one substrate is a polydimethylsiloxane (PDMS) substrate that has a main chain that also has Si—O bonding strength and has a strong and affinity for an acidic silicon film.
- PDMS polydimethylsiloxane
- the first bonding method at least one element selected from carbon, oxygen, and nitrogen force can be bonded to the resin having a bond between carbon and the main chain. Adhesion between rosins that have a binding force is also possible.
- the first and second resins may be other than silicone resins.
- one substrate needs to be a PDMS substrate that is a kind of silicone resin.
- the first bonding method it is possible to bond the non-silicone resins together.
- At least one resin selected from the first and second resins may be at least one selected from a cycloolefin polymer and a polycarbonate.
- cycloolefin polymers were difficult to adhere to each other due to their molecular structure, such as an adhesive having low adhesion to cycloolefin polymers or other resins.
- such a cycloolefin polymer can be bonded.
- the specific structure of the cycloolefin polymer is not particularly limited.
- it is a polymer of a bicyclic cycloolefin (bicyclic cycloolefin polymer) such as norbornenes. May be.
- Bicyclic cycloolefin polymers are generally amorphous polymers and have excellent properties such as optical transparency, low birefringence, high heat resistance, and low hygroscopicity. It is widely used for applications.
- the first and second resins may be the same. That is, according to the first bonding method, the cycloolefin polymers can be bonded to each other.
- the surfaces 3a and 3b of the first and second resins 1 and 2 to be bonded surfaces are irradiated with ultraviolet light 4 (step (i )).
- the surfaces 3a and 3b after the ultraviolet light irradiation are each surface-treated with a silane coupling agent (step (ii)).
- the surfaces 3a and 3b after the surface treatment are heated in a state where they are in contact with each other, so that the surfaces 3a and 3b are used as adhesive surfaces, and the first and second resins 1 and 2 Adhesive with rosin 2 (step (iii)).
- Reference numeral 6 in FIG. 3B denotes the silane coupling agent layer 6 formed on the surfaces 3a and 3b by the surface treatment.
- the irradiated surfaces of the first and second resins after the ultraviolet irradiation are surface-treated with a silane coupling agent.
- a silane coupling agent is usually used to more firmly adhere organic substances such as a coating film to the surface of an inorganic substance containing a key such as glass.
- the present inventors have found that a silane coupling agent can be used in combination with ultraviolet irradiation even in the case of bonding a resin and a resin.
- Irradiation with ultraviolet rays in step (i) may be performed in the same manner as in step (I) of the first bonding method.
- the surface treatment in the step (ii) is performed by applying a silane coupling agent, which may be performed by applying a solution containing a silane coupling agent to the irradiation surfaces of the first and second resins after the ultraviolet irradiation.
- a silane coupling agent which may be performed by applying a solution containing a silane coupling agent to the irradiation surfaces of the first and second resins after the ultraviolet irradiation.
- the application method of the solution that contains it should be based on general methods. If necessary, use a method such as masking to provide a portion on the irradiated surface where the silane coupling agent is applied and a portion where it is not applied!
- the first silane coupling agent applied to the first resin and the second silane coupling agent applied to the second resin have a structure capable of being bonded to each other.
- the silane coupling agent may have functional groups that can be bonded to each other at the terminal.
- the first resin surface is treated with a silane coupling agent (aminosilane) having an amino group at the terminal, and the second resin surface is irradiated. May be surface-treated with a silane coupling agent having a functional group capable of bonding to an amino group at the terminal.
- the bondable functional group include at least one selected from an epoxy group, a carboxyl group, and an aldehyde group.
- Step (m) may be performed in the same manner as step (II) of the first bonding method.
- the types of the first and second resins in the second bonding method may be the same as those in the first bonding method.
- at least one resin selected from the first and second resins May be optically transparent.
- the first and second resins can be bonded without using an organic solvent and a resin composition, and formed on the irradiated surfaces of the first and second resins. Since the silane coupling agent layer to be formed is very thin, it is possible to suppress a decrease in optical transparency of the resin due to adhesion.
- the first and second resins in the second bonding method are resins having a bond between at least one element selected from carbon, oxygen and nitrogen and carbon in the main chain.
- the first and second resin in the second bonding method may be a resin other than silicone resin.
- the same grease can be bonded as in the first bonding method.
- the resin parts of two or more parts included in the article are bonded to each other by the first bonding method or the second bonding method according to the present invention. Just do it.
- first bonding method Specifically, by irradiating the surfaces of the first and second resin portions serving as adhesive surfaces with ultraviolet light and raising the temperature in a state where the irradiated surfaces are in contact with each other, The first resin part and the second resin part are bonded using the surface as an adhesive surface (first bonding method).
- the surfaces of the first and second resin portions to be bonded surfaces are irradiated with ultraviolet light, the irradiated surfaces are surface-treated with a silane coupling agent, and the treated surfaces are mutually bonded.
- second bonding method By raising the temperature in a state of being in contact with the surface, the first and second resin portions are bonded using the surface as an adhesive surface.
- the type of the part having the resin part included in the resin article may be the same as that of the first and second rosins described above. Specifically, it may be at least one selected from a cycloolefin polymer and polycarbonate. Good.
- the resin article is a microchip in the method for manufacturing a resin article of the present invention, that is, in the method for manufacturing a microchip of the present invention, at least one of the fine channels shown in FIG.
- the pair of resin substrates (the first resin substrate 11 and the second resin substrate 12) formed with the above are bonded by the first bonding method or the second bonding method of the present invention. Good.
- the flow path 13 is formed in the first resin substrate 11, the surface 14 of the first resin substrate 11 where the flow path 13 is formed, and the second resin substrate 11.
- a microchip 16 having a flow path 13 is formed by bonding the surface 15 of the fat substrate 12.
- the surfaces of the first and second resin substrates that are to be bonded surfaces are irradiated with ultraviolet light, and the first and second resin substrates are opposed to each other while the first and second resin substrates are opposed to each other.
- first bonding method By heating the surfaces in contact with each other, the first resin substrate and the second resin substrate are bonded using the surface as an adhesive surface.
- the surfaces of the first and second resin substrates to be bonded surfaces are irradiated with ultraviolet light, and the surface after the irradiation is surface-treated with a silane coupling agent, and the first and second resin substrates are subjected to surface treatment.
- the first resin substrate and the second resin substrate are bonded to each other using the surface as a bonding surface by raising the temperature in a state where the surfaces after the treatment are in contact with each other.
- the shape, size, and the like of the resin substrate are not particularly limited as long as the flow path is formed on at least one of the substrates. As shown in FIG. 4, the flow path may be formed on the adhesive surface (irradiation surface) of the resin substrate.
- the channel when a channel is formed on the irradiation surface of the resin substrate, the channel may be irradiated with ultraviolet light.
- the hydrophilicity of the flow path wall surface can be increased by irradiation with ultraviolet light depending on the type of the resin constituting the substrate.
- a general method such as masking can be used to determine whether or not the flow path is irradiated with ultraviolet light.
- a microchip having excellent optical characteristics can be produced. For example, even when optical detection is performed for the purpose of the chip, optical correction performed at the time of detection can be reduced.
- the flow path is connected to the silane coupling agent along with the irradiation surface. May be surface treated.
- the surface of the channel can be modified to make the channel functional. Although it depends on the type of resin constituting the substrate, aminosilane is generally easily modified by modifying the flow path surface.
- an optical component such as a resin lens by bonding the resin components together. Bonding by heat fusion causes distortion in the manufactured resin lens and reduces its optical properties. In addition, in the case of adhesion using an organic solvent-resin composition, these coated materials remain on the adhesion surface and the optical characteristics are deteriorated.
- the resin components constituting the resin lens can be bonded to each other at a temperature lower than that by heat fusion, and an organic solvent and a resin are bonded to the bonding surface. Since the composition does not remain, it is possible to suppress a decrease in optical characteristics of the manufactured lens. In addition, by combining two or more grease parts, it is possible to manufacture optical parts having complicated shapes that were difficult to manufacture.
- a pair of resin substrates 70mm X 20mm, thickness 2mm
- cycloolefin polymer ZONEX330R manufactured by Nippon Zeon Co., Ltd., glass transition point 123 ° C
- Xe excimer lamp (UER20 manufactured by Ushio) — Irradiated with ultraviolet light (wavelength 172 nm) by 172A). Irradiation with ultraviolet light was performed in the atmosphere, the distance between the lamp and the substrate surface was 5 mm, the irradiation intensity was 10 mW / cm 2 , and the irradiation time was 10 minutes.
- the irradiation surface of ultraviolet light is one main surface of each substrate Overall.
- the substrates after the ultraviolet light irradiation are opposed to each other so that the respective irradiation surfaces are in contact with each other, and the force is applied at a pressure of 0.7 MPa in a direction in which the respective irradiation surfaces are in close contact with each other.
- the whole was heated to 100 ° C. and held there for 1 hour.
- Example 2 In the same manner as in Example 1, the surface of each of the pair of resin substrates having the cycloolefin polymer force used in Example 1 was irradiated with ultraviolet light.
- N- (2 aminoethyl) 3 aminopropyltrimethoxysilane (a kind of aminosilane) is used as a silane coupling agent on the irradiated surface of one resin substrate (resin substrate A).
- a EAPS was applied.
- 3-glycidoxy monopropyltrimethoxysilane (GPS) having an epoxy group at the terminal was applied to the irradiated surface of the other resin substrate (resin substrate B).
- the structural formulas of AEAPS and GPS are shown in the following formulas (1) and (2).
- attachment method which can adhere
- the bonding method of the present invention can be applied to various methods for manufacturing a resin article, for example, a microchip manufacturing method.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
- Adhesives Or Adhesive Processes (AREA)
Abstract
A bonding method by which a resin can be bonded to another resin at a lower temperature than in thermal fusion bonding with satisfactory productivity. The method of resin bonding, which is for bonding a first resin to a second resin, comprises a step (I) in which those surfaces of the first and second resins which are bonding surfaces are irradiated with ultraviolet and a step (II) in which the resins are heated while keeping the irradiated surfaces in contact with each other to thereby bond the first resin to the second resin, with those surfaces used as bonding surfaces. This bonding method can be applied, for example, to a process for producing a resin article comprising two or more parts which each has a resinous area and which have been bonded to each other at the resinous areas, and to a process for producing a microchip comprising a pair of resin substrates bonded to each other face-to-face, at least one of the resin substrates having a fine channel formed therein.
Description
明 細 書 Specification
光照射による樹脂の接着方法および樹脂物品の製造方法 Method for bonding resin by light irradiation and method for producing resin article
技術分野 Technical field
[0001] 本発明は、光 (紫外光)照射による樹脂の接着方法、ならびに、この方法を用いた 榭脂物品、例えばマイクロチップ、の製造方法に関する。 TECHNICAL FIELD [0001] The present invention relates to a method for adhering a resin by irradiation with light (ultraviolet light), and a method for producing a resin article such as a microchip using the method.
背景技術 Background art
[0002] 榭脂の接着方法としては、熱融着による接着、あるいは、有機溶剤や接着剤の塗 布による接着が一般的である。熱融着による接着は、通常、榭脂のガラス転移点以 上の温度で行われる。 [0002] As a method for adhering a resin, adhesion by heat fusion or adhesion by application of an organic solvent or an adhesive is generally used. Bonding by thermal fusion is usually performed at a temperature above the glass transition point of the resin.
[0003] 一方、典型的には一対の基板が対向して接着された構造を有し、少なくとも 1つの 上記基板の表面に微細な流路が形成されたマイクロチップが注目されている。マイク 口チップは、マイクロ流体デバイスとも称される。 On the other hand, a microchip that typically has a structure in which a pair of substrates are bonded to face each other and has a fine flow path formed on the surface of at least one of the substrates has attracted attention. The microphone mouth chip is also called a microfluidic device.
[0004] マイクロチップでは、マイクロチャンネルとも呼ばれる流路に、試薬が配置された反 応領域など、各種機能を有する領域を設けることにより、様々な用途に適したチップ を構成できる。マイクロチップの用途としては、遺伝子解析、臨床診断、薬物スクリー ユングなどの化学、生化学、薬学、医学、獣医学の分野における分析、あるいは、化 合物の合成、環境計測などが代表的である。これらの用途にマイクロチップを用いた 場合、例えば、同様の用途に適する従来の分析装置を用いた場合に比べて、(1)分 祈に必要なサンプルおよび試薬の量を低減できる、(2)分析時間を短縮できる、 (3) チップの使い捨てが可能であるため、医療分野などにおいて安全性および測定精度 を向上できる、などの効果を得ることができる。 [0004] In a microchip, a chip suitable for various applications can be configured by providing regions having various functions such as a reaction region in which a reagent is arranged in a flow path also called a microchannel. Typical applications for microchips include gene analysis, clinical diagnosis, drug screening, chemistry, biochemistry, pharmacy, medicine, veterinary analysis, compound synthesis, and environmental measurements. . When microchips are used for these applications, for example, (1) the amount of samples and reagents required for prayer can be reduced compared to the case of using a conventional analyzer suitable for similar applications. (2) The analysis time can be shortened. (3) Since the chip can be disposable, it is possible to obtain effects such as improvement of safety and measurement accuracy in the medical field.
[0005] 従来、マイクロチップには、製造が容易であり、光学的な検出も可能であることから 、主にガラス基板が用いられてきた。しかし、ガラス基板カゝらなるマイクロチップは、外 部からの衝撃により破損しやすぐまた、輸送時、廃棄時などにおける重量が問題と なる。そこで、軽量でありながらガラス基板に比べて破損しにくぐかつ安価である、 榭脂基板を用 、たマイクロチップの開発が進められて 、る。 Conventionally, a glass substrate has been mainly used for a microchip because it can be easily manufactured and optically detected. However, microchips such as glass substrates are damaged by impacts from the outside and immediately become a problem in terms of weight during transportation and disposal. Therefore, development of a microchip using a resin substrate, which is lightweight but difficult to break and cheaper than a glass substrate, is underway.
[0006] 榭脂基板を用いたマイクロチップでは、榭脂基板同士の接着方法が重要となる。
[0007] 榭脂基板同士の接着には、一般的な榭脂の接着方法、例えば熱融着、を応用でき る。しかし熱融着による接着は、通常、榭脂のガラス転移点以上の温度で行われるた め、接着時に基板が変形し、マイクロチップとしての機能が失われることがある。また 、基板の変形の影響は、流路の幅を細くした場合、あるいは、流路パターンを複雑に した場合により顕著となるため、熱融着による接着では、マイクロチップの高機能化が 困難である。 [0006] In a microchip using a resin substrate, an adhesion method between the resin substrates is important. [0007] For adhesion between the resin substrates, a general resin adhesion method, for example, heat fusion, can be applied. However, since bonding by heat fusion is usually performed at a temperature higher than the glass transition point of the resin, the substrate may be deformed during bonding, and the function as a microchip may be lost. In addition, since the influence of the deformation of the substrate becomes more conspicuous when the width of the flow path is narrowed or when the flow path pattern is complicated, it is difficult to increase the functionality of the microchip by bonding by heat fusion. is there.
[0008] 榭脂基板の変形は、より低温での接着により抑制できる。このような接着方法として 特開 2005— 80569号公報 (文献 1)には、表面に微細流路を有する基板における 流路が無い部分に有機溶剤をコートした後、当該基板と、平坦な面を有する基板とを 重ね合わせて融着する、マイクロチップの接合方法が開示されて 、る。 [0008] Deformation of the resin substrate can be suppressed by adhesion at a lower temperature. As such an adhesion method, JP 2005-80569 A (Document 1) discloses that a substrate having a fine channel on the surface is coated with an organic solvent on a portion without a channel, and then the substrate and a flat surface are bonded. A method for joining microchips is disclosed, in which a substrate having a plurality of layers is fused by overlapping.
[0009] 特開 2005— 257283号公報(文献 2)には、ポリジメチルシロキサン(PDMS)基板 と、 PDMS以外の材料カゝらなる榭脂基板 (対面基板)とを接着させる、マイクロチップ の製造方法が開示されている。この製造方法では、表面に微細な流路を形成した P DMS基板と、表面に酸ィ匕シリコン膜を成膜した対面基板とを準備し、双方の基板の 貼り合わせ面を改質処理した後、基板同士を上記酸ィ匕シリコン膜を介して接着させる 。貼り合わせ面の改質処理としては、酸素プラズマ処理、より具体的には酸素雰囲気 下でエキシマ紫外光を照射する酸素プラズマ処理、が例示されている(例えば、文献 [0009] Japanese Unexamined Patent Application Publication No. 2005-257283 (Document 2) describes a production of a microchip in which a polydimethylsiloxane (PDMS) substrate is bonded to a resin substrate (facing substrate) made of a material other than PDMS. A method is disclosed. In this manufacturing method, after preparing a PDMS substrate having a fine channel formed on the surface and a facing substrate having an oxide silicon film formed on the surface, the bonding surface of both substrates is modified. Then, the substrates are bonded to each other through the silicon oxide film. Examples of the modification treatment of the bonding surface include oxygen plasma treatment, more specifically, oxygen plasma treatment in which excimer ultraviolet light is irradiated in an oxygen atmosphere (for example, literature)
2の段落番号 [0017])。 2 paragraph number [0017]).
[0010] また、マイクロチップの製造方法とは直接関係しないが、特開 2005— 171164号 公報 (文献 3)、および特開 2004— 43662号公報 (文献 4)には、ォレフィン系榭脂の 表面に光を照射してこの表面を活性ィヒさせ (文献 3では、光重合性を有する表面改 質用榭脂を併用する)、活性化後の当該表面に、ホットメルト接着剤あるいは紫外線 硬化型榭脂などの榭脂組成物を塗布し、当該組成物を介して榭脂を接着する方法 が開示されている。 [0010] Further, although not directly related to the manufacturing method of the microchip, Japanese Unexamined Patent Application Publication No. 2005-171164 (Reference 3) and Japanese Unexamined Patent Application Publication No. 2004-43662 (Reference 4) disclose the surface of olefin-based resin. The surface is activated by irradiating light (in Reference 3, the surface-modifying resin having photopolymerizability is used in combination), and the hot-melt adhesive or UV-curing type is applied to the activated surface. A method is disclosed in which a resin composition such as resin is applied and the resin is bonded via the composition.
[0011] 文献 1の方法では、流路へ有機溶剤が入り込むと、基板を構成する榭脂の浸食、 変性などが生じ、流路が閉塞したり、マイクロチップの特性劣化などが生じる原因とな るため、流路を避けるように有機溶剤が塗布されている。しかし、このような有機溶剤 の塗布工程は、マイクロチップの生産性を低下させる要因となる他、高機能化などを
目的として流路幅を狭小化したり、流路パターンを複雑ィ匕したマイクロチップの製造 には、その狭小化、複雑ィ匕の程度によっては対応が困難である。 [0011] In the method of Document 1, when an organic solvent enters the flow path, erosion and denaturation of the resin constituting the substrate occur, which may cause the flow path to be blocked and the characteristics of the microchip to deteriorate. Therefore, the organic solvent is applied so as to avoid the flow path. However, this organic solvent application process not only reduces the productivity of microchips, but also improves functionality. For the purpose of manufacturing a microchip with a narrowed flow path width or a complicated flow path pattern, it is difficult to respond depending on the degree of narrowing and complexity.
[0012] 文献 2の方法では、有機溶剤および接着剤を使用しないため、文献 1の方法に比 ベて、流路の閉塞、マイクロチップの特性劣化などが生じにくい。しかし文献 2の方法 は、あくまでも、 Si— O結合を含み、酸ィ匕シリコン膜と強い親和性を有するシリコーン 榭脂である PDMS基板との接着に用いられる方法であり、 PDMS基板以外の榭脂 基板同士の接着はできない。 [0012] The method of Document 2 does not use an organic solvent and an adhesive, and therefore, unlike the method of Document 1, blockage of the flow path and deterioration of the characteristics of the microchip are less likely to occur. However, the method of Document 2 is a method used for bonding to a PDMS substrate that is a silicone resin containing a Si—O bond and having a strong affinity with an oxide silicon film. Bonding between substrates is not possible.
[0013] 文献 3、 4の方法では基板表面への榭脂組成物の塗布が必要であり、流路の閉塞 などが生じるために、当該方法をそのままマイクロチップの製造方法に応用すること は難しい。文献 1と同様に、流路を避けるように榭脂組成物を塗布することも考えられ る力 上述したように、このような塗布工程は、マイクロチップの生産性を低下させる 要因となる他、流路幅の狭小化ゃ流路パターンの複雑ィ匕には対応が困難である。 発明の開示 [0013] In the methods of References 3 and 4, it is necessary to apply the resin composition to the surface of the substrate, and blockage of the flow path occurs. Therefore, it is difficult to directly apply the method to the microchip manufacturing method. . Similar to Reference 1, the force that can be applied to the resin composition so as to avoid the flow path As described above, such an application process is a factor that reduces the productivity of the microchip, If the channel width is narrowed, it is difficult to cope with the complexity of the channel pattern. Disclosure of the invention
[0014] このように、マイクロチップの製造時において、チップの生産性を低下させるとともに 流路の閉塞などの要因ともなる有機溶剤および榭脂組成物の塗布を行うことなぐ熱 融着による接着よりも低い温度において、榭脂基板同士を接着できる樹脂の接着方 法が望まれる。またこのような接着方法は、マイクロチップだけではなぐ様々な榭脂 物品の製造方法への応用が期待される。 [0014] As described above, at the time of manufacturing the microchip, adhesion by thermal fusion without applying the organic solvent and the resin composition that causes the productivity of the chip to be reduced and also causes the blockage of the flow path and the like. A resin bonding method that can bond the resin substrates to each other at a low temperature is desired. In addition, such an adhesion method is expected to be applied to a variety of methods for manufacturing a resinous product, not just a microchip.
[0015] そこで本発明は、マイクロチップの製造時における榭脂基板同士の接着に限られ ず (即ちマイクロチップの製造方法に限られず)、熱融着による接着よりも低い温度に お!、て、生産性よく榭脂と樹脂とを接着できる接着方法の提供を目的とする。 [0015] Therefore, the present invention is not limited to the bonding between the resin substrates at the time of manufacturing the microchip (that is, not limited to the manufacturing method of the microchip), and the temperature is lower than the bonding by thermal fusion! An object of the present invention is to provide an adhesion method capable of adhering resin and resin with high productivity.
[0016] 本発明の榭脂の接着方法 (第 1の接着方法)は、第 1の榭脂と第 2の榭脂とを接着 する樹脂の接着方法であって、(I)接着面となる前記第 1および第 2の榭脂の表面に 紫外光を照射する工程と、(II)前記照射後の前記表面を互いに接触させた状態で昇 温することにより、前記表面を接着面として前記第 1の榭脂と前記第 2の榭脂とを接着 する工程と、を含む。 [0016] The resin bonding method (first bonding method) of the present invention is a resin bonding method for bonding the first resin and the second resin, and is (I) an adhesive surface. Irradiating the surfaces of the first and second resin with ultraviolet light; and (II) raising the temperature in a state where the surfaces after the irradiation are in contact with each other, thereby using the surfaces as adhesive surfaces. Adhering the first resin and the second resin.
[0017] 第 1の接着方法とは別の観点から見た本発明の榭脂の接着方法 (第 2の接着方法) は、第 1の榭脂と第 2の榭脂とを接着する榭脂の接着方法であって、(i)接着面となる
前記第 1および第 2の榭脂の表面に紫外光を照射する工程と、(ii)前記照射後の前 記表面を、シランカップリング剤により表面処理する工程と、(iii)前記処理後の前記 表面を互いに接触させた状態で昇温することにより、前記表面を接着面として前記第 1の榭脂と前記第 2の榭脂とを接着する工程とを含む。 [0017] The resin bonding method of the present invention (second bonding method) viewed from a viewpoint different from the first bonding method is a resin that bonds the first resin and the second resin. (I) Adhesive surface A step of irradiating the surfaces of the first and second resin with ultraviolet light; (ii) a step of surface-treating the surface after the irradiation with a silane coupling agent; and (iii) a step after the treatment. A step of bonding the first and second resins with the surface as an adhesive surface by raising the temperature in a state where the surfaces are in contact with each other.
[0018] 本発明の接着方法は、榭脂と樹脂とが接着された部分を有する榭脂物品の製造方 法への応用が可能である。即ち、本発明の榭脂物品の製造方法は、榭脂部を有する 2以上の部品を含み、前記 2以上の物品が前記榭脂部において互いに接着されてい る榭脂物品の製造方法であって、前記榭脂部同士を、上記本発明の接着方法により 接着する方法である。 [0018] The bonding method of the present invention can be applied to a method for manufacturing a resin article having a portion where a resin and a resin are bonded. That is, the method for producing a resin article according to the present invention is a method for producing a resin article comprising two or more parts having a resin part, wherein the two or more articles are bonded to each other in the resin part. In this method, the resin parts are bonded together by the bonding method of the present invention.
[0019] 本発明の榭脂物品の製造方法は、様々な榭脂物品、例えばマイクロチップ、の製 造方法に適用できる。即ち、本発明のマイクロチップの製造方法は、対向するように 互いに接着された一対の榭脂基板を含み、前記榭脂基板の少なくとも一方に流路が 形成されているマイクロチップの製造方法であって、前記榭脂基板同士を、上記本 発明の接着方法により接着する方法である。 [0019] The method for producing a resin article of the present invention can be applied to a method for producing various resin articles, for example, microchips. That is, the microchip manufacturing method of the present invention is a microchip manufacturing method including a pair of resin substrates bonded to each other so as to face each other, and having a flow path formed in at least one of the resin substrates. Then, the resin substrates are bonded to each other by the bonding method of the present invention.
[0020] 本発明の接着方法によれば、榭脂と樹脂とを、熱融着による接着よりも低い温度に おいて、生産性よく接着できる。 [0020] According to the bonding method of the present invention, the resin and the resin can be bonded with high productivity at a temperature lower than the bonding by thermal fusion.
[0021] なお、第 2の接着方法では、第 1および第 2の榭脂の表面をシランカップリング剤に より表面処理している力 この表面処理では、第 1および第 2の榭脂の表面に厚さ数 nm程度のシランカップリング剤層(典型的には単分子層)が形成される。これに対し て、接着剤、あるいは、文献 3、 4に示す榭脂組成物を榭脂の表面に塗布した場合に は、少なくとも厚さ数 m以上の榭脂層が当該樹脂の表面に形成されることになる。 一方、マイクロチップに用いる榭脂基板では、通常、数/ z m幅の流路がその表面に 形成される。このため、接着する榭脂が上記マイクロチップに用いる榭脂基板である 場合、流路を避けるように接着剤あるいは榭脂組成物を塗布しなければ流路が閉塞 する。これに対して、第 2の接着方法における表面処理では、当該処理により形成さ れるシランカップリング剤層の厚さは流路のサイズに対して非常に小さいため、流路 を避けるように表面処理をしなくとも上記流路の閉塞は生じにくい。このため第 2の接 着方法によっても、上記榭脂基板同士を、熱融着による接着よりも低い温度において
、生産性よく接着できる。 [0021] In the second bonding method, the surface treatment of the surfaces of the first and second resin with the silane coupling agent. In this surface treatment, the surfaces of the first and second resins. A silane coupling agent layer (typically a monomolecular layer) having a thickness of about several nm is formed. On the other hand, when the adhesive or the resin composition shown in References 3 and 4 is applied to the surface of the resin, a resin layer having a thickness of at least several meters is formed on the surface of the resin. Will be. On the other hand, in a resin substrate used for a microchip, a channel having a width of several / zm is usually formed on the surface thereof. For this reason, when the resin to be bonded is a resin substrate used for the microchip, the flow path is blocked unless an adhesive or a resin composition is applied so as to avoid the flow path. On the other hand, in the surface treatment in the second bonding method, the thickness of the silane coupling agent layer formed by the treatment is very small with respect to the size of the flow path. Even if it is not performed, blockage of the channel is unlikely to occur. For this reason, even with the second bonding method, the above-mentioned resin substrates are bonded to each other at a lower temperature than the bonding by thermal fusion. Adhesive with good productivity.
[0022] このような接着方法を榭脂物品の製造方法に応用した場合、即ち、本発明の榭脂 物品の製造方法では、当該物品の種類に応じて様々な効果を得ることができる。 [0022] When such an adhesion method is applied to a method for producing a resin article, that is, the method for producing a resin article of the present invention, various effects can be obtained depending on the type of the article.
[0023] 本発明の接着方法をマイクロチップの製造方法に応用した場合、即ち、本発明の マイクロチップの製造方法では、少なくとも一方に流路が形成された一対の榭脂基板 を、熱融着による接着よりも低い温度で接着できるため、接着時における当該榭脂基 板の変形を抑制できる。また、基板の接着面に有機溶剤および榭脂組成物の塗布 が不要であるため、生産性に優れる製造方法とすることができ、製造時における流路 の閉塞やマイクロチップの特性劣化を抑制できる他、流路幅の狭小化ゃ流路パター ンの複雑化への対応もより容易となる。 [0023] When the bonding method of the present invention is applied to a microchip manufacturing method, that is, in the microchip manufacturing method of the present invention, a pair of resin substrates each having a flow path formed at least on one side are heat-sealed. Since the bonding can be performed at a temperature lower than the bonding by, the deformation of the resin substrate during bonding can be suppressed. In addition, since it is not necessary to apply an organic solvent and a resin composition to the adhesive surface of the substrate, it is possible to make the manufacturing method excellent in productivity, and it is possible to suppress blockage of the flow path and deterioration of the characteristics of the microchip during the manufacturing In addition, if the channel width is narrowed, it becomes easier to cope with the complexity of the channel pattern.
図面の簡単な説明 Brief Description of Drawings
[0024] [図 1A]図 1Aは、本発明の接着方法の一例を模式的に示す工程図である。 FIG. 1A is a process chart schematically showing an example of the bonding method of the present invention.
[図 1B]図 1Bは、本発明の接着方法の一例を模式的に示す工程図である。 FIG. 1B is a process diagram schematically showing an example of the bonding method of the present invention.
[図 2]図 2は、本発明の接着方法の一例を示す模式図である。 FIG. 2 is a schematic diagram showing an example of the bonding method of the present invention.
[図 3A]図 3Aは、本発明の接着方法の一例を模式的に示す工程図である。 FIG. 3A is a process diagram schematically showing an example of the bonding method of the present invention.
[図 3B]図 3Bは、本発明の接着方法の一例を模式的に示す工程図である。 FIG. 3B is a process chart schematically showing an example of the bonding method of the present invention.
[図 3C]図 3Cは、本発明の接着方法の一例を模式的に示す工程図である。 FIG. 3C is a process diagram schematically showing an example of the bonding method of the present invention.
[図 4]図 4は、本発明のマイクロチップの製造方法の一例を示す模式図である。 発明を実施するための最良の形態 FIG. 4 is a schematic view showing an example of a method for producing a microchip according to the present invention. BEST MODE FOR CARRYING OUT THE INVENTION
[0025] 本発明の第 1の接着方法を説明する。 [0025] The first bonding method of the present invention will be described.
[0026] 第 1の接着方法では、図 1Aに示すように、接着面となる第 1の榭脂 1および第 2の 榭脂 2の表面 3a、 3bに紫外光 4を照射する(工程 (1) )。次に、図 1Bに示すように、紫 外光照射後の表面 3a、 3bを互いに接触させた状態で昇温することにより、表面 3a、 3bを接着面として、第 1の榭脂 1と第 2の榭脂 2とを接着する (工程 (Π) )。 [0026] In the first bonding method, as shown in FIG. 1A, the surfaces 3a and 3b of the first and second resins 1 and 2 to be bonded surfaces are irradiated with ultraviolet light 4 (step (1 )). Next, as shown in FIG. 1B, the surfaces 3a and 3b after ultraviolet light irradiation are heated in a state where they are in contact with each other, so that the surfaces 3a and 3b are used as adhesive surfaces, and the first resin 1 and the first resin 1 Bond 2 of 2 with grease (process (Π)).
[0027] 工程 (1)、(II)により、第 1の榭脂と第 2の榭脂とが接着される理由は明確ではない 力 以下に示すような原理が考えられる:第 1および第 2の榭脂の表面に紫外光を照 射すると、各榭脂における紫外光が照射された表面 (照射面)の表面エネルギーが 紫外光照射前よりも増加し (活性化し)、当該照射面に、水酸基、カルボニル基、カル
ボキシル基などの官能基が生じる。ここで、第 1および第 2の榭脂の各照射面を、互 いに接触させた状態で昇温すると、上記官能基を介する何らかの結合が第 1および 第 2の榭脂の照射面間に生じ、当該照射面を接着面として第 1の榭脂と第 2の榭脂と が接着されると考えられる。 [0027] The reason why the first and second resins are bonded by the steps (1) and (II) is not clear. The following principle can be considered: First and second When ultraviolet light is irradiated on the surface of each of the resin, the surface energy (irradiated surface) of the surface irradiated with ultraviolet light in each resin increases (activated) before irradiation with ultraviolet light. Hydroxyl, carbonyl, cal A functional group such as a boxyl group is generated. Here, when the temperature of the irradiated surfaces of the first and second resins is brought into contact with each other, some bond via the functional group is formed between the irradiated surfaces of the first and second resins. It is considered that the first and second resins are bonded with the irradiated surface as the bonding surface.
[0028] 工程 (I)における紫外光の照射は、一般的な手法に基づいて行えばよい。図 1Aで は、第 1の榭脂 1への紫外光 4の照射と、第 2の榭脂 2への紫外光 4の照射とを同時に 行っている力 各榭脂への照射は別々に行ってもよい。 [0028] Irradiation with ultraviolet light in the step (I) may be performed based on a general method. In FIG. 1A, the force that simultaneously irradiates the first resin 1 with the ultraviolet light 4 and the second resin 2 with the ultraviolet light 4 is applied to each resin separately. May be.
[0029] 照射する紫外光の波長は特に限定されないが、例えば 300nm以下であればよぐ 榭脂の接着をより確実に行うためには 200nm以下が好ましい。なお、波長 200nm 以下の紫外線は、一般に、真空紫外線とも呼ばれる。 [0029] The wavelength of the ultraviolet light to be irradiated is not particularly limited. For example, if it is 300 nm or less, 200 nm or less is preferable in order to more reliably adhere the resin. Note that ultraviolet rays having a wavelength of 200 nm or less are generally called vacuum ultraviolet rays.
[0030] 紫外光の光源は特に限定されずに選択でき、例えば、水銀ランプ、キセノンランプ[0030] The light source of the ultraviolet light can be selected without any particular limitation. For example, a mercury lamp, a xenon lamp
、エキシマレーザーまたはエキシマランプを用いればよ 、。 Use an excimer laser or excimer lamp.
[0031] 紫外光を照射する雰囲気は、空気中など、酸素含有雰囲気であることが好ましい。 [0031] The atmosphere to be irradiated with ultraviolet light is preferably an oxygen-containing atmosphere such as air.
第 1および第 2の榭脂の表面に紫外光を照射すると、各榭脂の照射面が酸化される ことで、酸素原子を含む官能基が生じて 、る可能性がある。 When the surfaces of the first and second resin are irradiated with ultraviolet light, the irradiated surface of each resin may be oxidized to generate a functional group containing an oxygen atom.
[0032] 紫外光の照射時には、マスキングなどの手法により、照射面の形状を制御してもよ い。 [0032] During irradiation with ultraviolet light, the shape of the irradiated surface may be controlled by a technique such as masking.
[0033] 工程 (II)における昇温は、第 1および第 2の榭脂全体を昇温することにより行っても よいし、第 1および第 2の榭脂における照射面近傍のみを昇温してもよい。 [0033] The temperature increase in step (II) may be performed by increasing the temperature of the entire first and second resins, or only in the vicinity of the irradiated surface in the first and second resins. May be.
[0034] 昇温の手段は特に限定されず、ヒーター、加熱炉などを適宜選択すればよ!、。 [0034] The means for raising the temperature is not particularly limited, and a heater, a heating furnace or the like may be selected as appropriate!
[0035] 昇温の温度は、例えば、第 1の榭脂と第 2の榭脂とが熱融着しない温度とすればよ ぐ第 1および第 2の榭脂のガラス転移点未満としてもよい。具体的な昇温の温度は、 第 1および第 2の榭脂の種類に応じて適宜設定すればよぐ例えば、第 1および第 2 の榭脂が実施例に後述するシクロォレフィンポリマー(日本ゼオン社製 ZEONEX33 OR:ガラス転移点 123°C)である場合、 80°C〜 120°C程度としてもよ!/、。 [0035] The temperature of the temperature rise may be, for example, less than the glass transition point of the first and second resins, as long as the first resin and the second resin are not thermally fused. . The specific temperature of the temperature rise may be appropriately set according to the types of the first and second resins. For example, the first and second resins may be cycloolefin polymers (Japan) described later in the examples. ZEONEX33 OR manufactured by ZEON: glass transition point 123 ° C), 80 ° C to 120 ° C may be used! /.
[0036] 第 1の接着方法では、工程 (II)において、図 2に示すように、第 1の榭脂 1の照射面 [0036] In the first bonding method, in the step (II), as shown in FIG.
(表面 3a)と、第 2の榭脂 2の照射面 (表面 3b)とが互いに密着する方向に力 5を加え ながら、照射面を昇温してもよい。榭脂の表面を完全な平坦面とすることは通常困難
であり、例えば、榭脂基板の表面には反り等が存在することが一般的であるため、上 記方向に力を加えながら昇温することにより、第 1の榭脂と第 2の榭脂とをより確実に 接着できる。 The irradiation surface may be heated while applying a force 5 in a direction in which the (surface 3a) and the irradiation surface (surface 3b) of the second resin 2 are in close contact with each other. It is usually difficult to make the surface of greaves completely flat For example, since the surface of the resin substrate generally has a warp or the like, the first resin and the second resin are heated by increasing the temperature while applying a force in the above direction. Can be bonded more reliably.
[0037] 上記方向に加える力の大きさは、第 1および第 2の榭脂の形状、特に各々の榭脂に おける接着面の形状に応じて適宜設定すればょ ヽ。 [0037] The magnitude of the force applied in the above direction should be appropriately set according to the shapes of the first and second resins, particularly the shape of the adhesive surface of each of the resins.
[0038] 第 1の接着方法では、第 1および第 2の榭脂から選ばれる少なくとも 1つの樹脂が光 学的に透明であってもよい。第 1の接着方法では、有機溶剤および榭脂組成物を用 いることなく第 1の榭脂と第 2の榭脂とを接着できるため、仮に上記少なくとも 1つの榭 脂が光学的に透明であった場合でも、接着による、当該樹脂の光学的な透明性の低 下を抑制できる。なお、光学的に透明な榭脂とは、一般に、非晶質の榭脂である。 [0038] In the first bonding method, at least one resin selected from the first and second resins may be optically transparent. In the first bonding method, the first and second resins can be bonded without using an organic solvent and a resin composition, so that the at least one resin is optically transparent. Even in this case, it is possible to suppress a decrease in optical transparency of the resin due to adhesion. Note that the optically transparent resin is generally an amorphous resin.
[0039] 第 1の接着方法では、第 1および第 2の榭脂が、炭素、酸素および窒素力も選ばれ る少なくとも 1種の元素と、炭素との結合を主鎖に有する榭脂であってもよい。上述し たように文献 2の方法では、一方の基板が、 Si— O結合力もなる主鎖を有し、酸ィ匕シ リコン膜と強 、親和性を有するポリジメチルシロキサン (PDMS)基板である必要があ る。これに対して第 1の接着方法によれば、炭素、酸素および窒素力 選ばれる少な くとも 1種の元素と、炭素との結合を主鎖に有する榭脂同士を接着でき、主鎖が当該 結合力もなる榭脂同士の接着も可能である。 [0039] In the first bonding method, the first and second resins are resins having a bond between at least one element of which carbon, oxygen and nitrogen forces are also selected and carbon in the main chain. Also good. As described above, in the method of Document 2, one substrate is a polydimethylsiloxane (PDMS) substrate that has a main chain that also has Si—O bonding strength and has a strong and affinity for an acidic silicon film. There is a need. On the other hand, according to the first bonding method, at least one element selected from carbon, oxygen, and nitrogen force can be bonded to the resin having a bond between carbon and the main chain. Adhesion between rosins that have a binding force is also possible.
[0040] 第 1の接着方法では、第 1および第 2の榭脂が、シリコーン榭脂以外の榭脂であつ てもよい。上述したように、文献 2の方法では、一方の基板がシリコーン榭脂の 1種で ある PDMS基板である必要がある。これに対して、第 1の接着方法によれば、シリコ 一ン榭脂以外の榭脂同士を接着できる。 [0040] In the first bonding method, the first and second resins may be other than silicone resins. As described above, in the method of Document 2, one substrate needs to be a PDMS substrate that is a kind of silicone resin. On the other hand, according to the first bonding method, it is possible to bond the non-silicone resins together.
[0041] 第 1の接着方法では、第 1および第 2の榭脂から選ばれる少なくとも 1つの樹脂が、 シクロォレフインポリマーおよびポリカーボネートから選ばれる少なくとも 1つであって もよい。特にシクロォレフインポリマーは、その分子構造上、シクロォレフインポリマー 同士、あるいは、他の樹脂との接着性が低ぐ接着剤などによる接着は困難であった 。第 1の接着方法によれば、このようなシクロォレフインポリマーの接着も可能である。 [0041] In the first bonding method, at least one resin selected from the first and second resins may be at least one selected from a cycloolefin polymer and a polycarbonate. In particular, cycloolefin polymers were difficult to adhere to each other due to their molecular structure, such as an adhesive having low adhesion to cycloolefin polymers or other resins. According to the first bonding method, such a cycloolefin polymer can be bonded.
[0042] シクロォレフインポリマーの具体的な構造は特に限定されず、例えば、ノルボルネン 類のような二環式シクロォレフィンの重合体(二環式シクロォレフィンポリマー)であつ
てもよい。二環式シクロォレフィンポリマーは、一般に、非晶質のポリマーであり、光学 的に透明、低い複屈折率、高い耐熱性、低い吸湿性などの優れた特性を有し、近年 、光学部品などの用途に広く用いられている。 [0042] The specific structure of the cycloolefin polymer is not particularly limited. For example, it is a polymer of a bicyclic cycloolefin (bicyclic cycloolefin polymer) such as norbornenes. May be. Bicyclic cycloolefin polymers are generally amorphous polymers and have excellent properties such as optical transparency, low birefringence, high heat resistance, and low hygroscopicity. It is widely used for applications.
[0043] 第 1の接着方法では、第 1および第 2の榭脂が同一であってもよい。即ち、第 1の接 着方法によれば、シクロォレフインポリマー同士を接着できる。 [0043] In the first bonding method, the first and second resins may be the same. That is, according to the first bonding method, the cycloolefin polymers can be bonded to each other.
[0044] 本発明の第 2の接着方法を説明する。 [0044] The second bonding method of the present invention will be described.
[0045] 第 2の接着方法では、図 3Aに示すように、接着面となる第 1の榭脂 1および第 2の 榭脂 2の表面 3a、 3bに紫外光 4を照射する(工程 (i) )。次に、図 3Bに示すように、紫 外光照射後の表面 3a、 3bを、それぞれ、シランカップリング剤により表面処理する( 工程 (ii) )。次に、図 3Cに示すように、表面処理後の表面 3a、 3bを互いに接触させ た状態で昇温することにより、表面 3a、 3bを接着面として、第 1の榭脂 1と第 2の榭脂 2とを接着する(工程 (iii) )。なお、図 3Bにおける符号 6は、表面処理によって表面 3a 、 3bに形成されたシランカップリング剤層 6である。 [0045] In the second bonding method, as shown in Fig. 3A, the surfaces 3a and 3b of the first and second resins 1 and 2 to be bonded surfaces are irradiated with ultraviolet light 4 (step (i )). Next, as shown in FIG. 3B, the surfaces 3a and 3b after the ultraviolet light irradiation are each surface-treated with a silane coupling agent (step (ii)). Next, as shown in FIG. 3C, the surfaces 3a and 3b after the surface treatment are heated in a state where they are in contact with each other, so that the surfaces 3a and 3b are used as adhesive surfaces, and the first and second resins 1 and 2 Adhesive with rosin 2 (step (iii)). Reference numeral 6 in FIG. 3B denotes the silane coupling agent layer 6 formed on the surfaces 3a and 3b by the surface treatment.
[0046] 第 2の接着方法では、紫外線照射後における第 1および第 2の榭脂の照射面をシラ ンカップリング剤により表面処理する。シランカップリング剤は、通常、ガラスなどのケ ィ素を含む無機物の表面に、塗膜などの有機物をより強固に付着させるために使用 される。本発明者らは、榭脂と樹脂とを接着する場合においても、シランカップリング 剤を紫外線の照射と組み合わせて利用できることを見出した。 [0046] In the second bonding method, the irradiated surfaces of the first and second resins after the ultraviolet irradiation are surface-treated with a silane coupling agent. A silane coupling agent is usually used to more firmly adhere organic substances such as a coating film to the surface of an inorganic substance containing a key such as glass. The present inventors have found that a silane coupling agent can be used in combination with ultraviolet irradiation even in the case of bonding a resin and a resin.
[0047] 工程 (i)における紫外線の照射は、第 1の接着方法の工程 (I)と同様に行えばよい [0047] Irradiation with ultraviolet rays in step (i) may be performed in the same manner as in step (I) of the first bonding method.
[0048] 工程 (ii)における表面処理は、紫外線照射後における第 1および第 2の榭脂の照 射面に、シランカップリング剤を含む溶液を塗布することにより行えばよぐシランカツ プリング剤を含む溶液の塗布方法は一般的な手法に基づけばょ 、。必要に応じて、 マスキングなどの手法により、照射面におけるシランカップリング剤を塗布する部分と 塗布しな!、部分とを設けてもょ 、。 [0048] The surface treatment in the step (ii) is performed by applying a silane coupling agent, which may be performed by applying a solution containing a silane coupling agent to the irradiation surfaces of the first and second resins after the ultraviolet irradiation. The application method of the solution that contains it should be based on general methods. If necessary, use a method such as masking to provide a portion on the irradiated surface where the silane coupling agent is applied and a portion where it is not applied!
[0049] 第 1の榭脂に塗布する第 1のシランカップリング剤と、第 2の榭脂に塗布する第 2の シランカップリング剤とは互いに結合可能な構造を有していればよぐ例えば、各々 のシランカップリング剤の末端に互いに結合可能な官能基を有して 、ればよ 、。
[0050] 具体的には工程 (ii)において、第 1の榭脂の照射面を、末端にアミノ基を有するシ ランカップリング剤 (アミノシラン)により表面処理し、第 2の榭脂の照射面を、末端にァ ミノ基と結合可能な官能基を有するシランカップリング剤により表面処理してもよい。 当該結合可能な官能基としては、例えば、エポキシ基、カルボキシル基およびアル デヒド基力 選ばれる少なくとも 1種が挙げられる。 [0049] It is sufficient that the first silane coupling agent applied to the first resin and the second silane coupling agent applied to the second resin have a structure capable of being bonded to each other. For example, the silane coupling agent may have functional groups that can be bonded to each other at the terminal. [0050] Specifically, in step (ii), the first resin surface is treated with a silane coupling agent (aminosilane) having an amino group at the terminal, and the second resin surface is irradiated. May be surface-treated with a silane coupling agent having a functional group capable of bonding to an amino group at the terminal. Examples of the bondable functional group include at least one selected from an epoxy group, a carboxyl group, and an aldehyde group.
[0051] 工程 (m)は、第 1の接着方法の工程 (II)と同様に行えばよい。 [0051] Step (m) may be performed in the same manner as step (II) of the first bonding method.
[0052] 第 2の接着方法における第 1および第 2の榭脂の種類は、第 1の接着方法と同様で あればよぐ例えば、第 1および第 2の榭脂から選ばれる少なくとも 1つの樹脂が光学 的に透明であってもよい。第 2の接着方法においても、有機溶剤および榭脂組成物 を用いることなく第 1の榭脂と第 2の榭脂とを接着でき、また、第 1および第 2の榭脂の 照射面に形成されるシランカップリング剤層は非常に薄いため、接着による、当該榭 脂の光学的な透明性の低下を抑制できる。 [0052] The types of the first and second resins in the second bonding method may be the same as those in the first bonding method. For example, at least one resin selected from the first and second resins May be optically transparent. In the second bonding method, the first and second resins can be bonded without using an organic solvent and a resin composition, and formed on the irradiated surfaces of the first and second resins. Since the silane coupling agent layer to be formed is very thin, it is possible to suppress a decrease in optical transparency of the resin due to adhesion.
[0053] また、例えば、第 2の接着方法における第 1および第 2の榭脂が、炭素、酸素および 窒素から選ばれる少なくとも 1種の元素と、炭素との結合を主鎖に有する榭脂であつ てもよいし、第 2の接着方法における第 1および第 2の榭脂が、シリコーン榭脂以外の 榭脂であってもよい。第 2の接着方法においても、第 1の接着方法による場合と同様 の榭脂同士を接着できる。 [0053] Also, for example, the first and second resins in the second bonding method are resins having a bond between at least one element selected from carbon, oxygen and nitrogen and carbon in the main chain. Alternatively, the first and second resin in the second bonding method may be a resin other than silicone resin. In the second bonding method, the same grease can be bonded as in the first bonding method.
[0054] 本発明の榭脂物品の製造方法では、当該物品が含む 2以上の部品における各々 の榭脂部同士の接着を、上記本発明の第 1の接着方法または第 2の接着方法により 行えばよい。 [0054] In the method for producing a resin article according to the present invention, the resin parts of two or more parts included in the article are bonded to each other by the first bonding method or the second bonding method according to the present invention. Just do it.
[0055] 具体的には、接着面となる第 1および第 2の榭脂部の表面に紫外光を照射し、前記 照射後の前記表面を互いに接触させた状態で昇温することにより、前記表面を接着 面として前記第 1の榭脂部と前記第 2の榭脂部とを接着する (第 1の接着方法)。ある いは、接着面となる第 1および第 2の榭脂部の表面に紫外光を照射し、前記照射後 の前記表面をシランカップリング剤により表面処理し、前記処理後の前記表面を互い に接触させた状態で昇温することにより、前記表面を接着面として前記第 1の榭脂部 と前記第 2の榭脂部とを接着する (第 2の接着方法)。 [0055] Specifically, by irradiating the surfaces of the first and second resin portions serving as adhesive surfaces with ultraviolet light and raising the temperature in a state where the irradiated surfaces are in contact with each other, The first resin part and the second resin part are bonded using the surface as an adhesive surface (first bonding method). Alternatively, the surfaces of the first and second resin portions to be bonded surfaces are irradiated with ultraviolet light, the irradiated surfaces are surface-treated with a silane coupling agent, and the treated surfaces are mutually bonded. By raising the temperature in a state of being in contact with the surface, the first and second resin portions are bonded using the surface as an adhesive surface (second bonding method).
[0056] 榭脂物品が含む、榭脂部を有する部品の種類は特に限定されない。また、当該榭
脂部を構成する榭脂の種類は、上述した第 1および第 2の榭脂と同様であればよぐ 具体的には、シクロォレフインポリマーおよびポリカーボネートから選ばれる少なくとも 1種であってもよい。 [0056] There are no particular limitations on the type of the part having the resin part included in the resin article. In addition, The type of rosin constituting the fat portion may be the same as that of the first and second rosins described above. Specifically, it may be at least one selected from a cycloolefin polymer and polycarbonate. Good.
[0057] 本発明の榭脂物品の製造方法において当該榭脂物品がマイクロチップである場合 、即ち、本発明のマイクロチップの製造方法では、図 4に例を示す、少なくとも一方に 微細な流路が形成された一対の榭脂基板 (第 1の榭脂基板 11および第 2の榭脂基 板 12)同士の接着を、上記本発明の第 1の接着方法または第 2の接着方法により行 えばよい。なお、図 4に示す例では、第 1の榭脂基板 11に流路 13が形成されており、 第 1の榭脂基板 11における流路 13が形成されている表面 14と、第 2の榭脂基板 12 の表面 15とを接着することにより、流路 13を有するマイクロチップ 16が形成される。 [0057] When the resin article is a microchip in the method for manufacturing a resin article of the present invention, that is, in the method for manufacturing a microchip of the present invention, at least one of the fine channels shown in FIG. The pair of resin substrates (the first resin substrate 11 and the second resin substrate 12) formed with the above are bonded by the first bonding method or the second bonding method of the present invention. Good. In the example shown in FIG. 4, the flow path 13 is formed in the first resin substrate 11, the surface 14 of the first resin substrate 11 where the flow path 13 is formed, and the second resin substrate 11. A microchip 16 having a flow path 13 is formed by bonding the surface 15 of the fat substrate 12.
[0058] 具体的には、接着面となる第 1および第 2の榭脂基板の表面に紫外光を照射し、前 記第 1および第 2の榭脂基板を対向させながら、前記照射後の前記表面を互いに接 触させた状態で昇温することにより、前記表面を接着面として前記第 1の榭脂基板と 前記第 2の榭脂基板とを接着する (第 1の接着方法)。あるいは、接着面となる第 1お よび第 2の榭脂基板の表面に紫外光を照射し、前記照射後の前記表面をシランカツ プリング剤により表面処理し、前記第 1および第 2の榭脂基板を対向させながら、前 記処理後の前記表面を互いに接触させた状態で昇温することにより、前記表面を接 着面として前記第 1の榭脂基板と前記第 2の榭脂基板とを接着する (第 2の接着方法 [0058] Specifically, the surfaces of the first and second resin substrates that are to be bonded surfaces are irradiated with ultraviolet light, and the first and second resin substrates are opposed to each other while the first and second resin substrates are opposed to each other. By heating the surfaces in contact with each other, the first resin substrate and the second resin substrate are bonded using the surface as an adhesive surface (first bonding method). Alternatively, the surfaces of the first and second resin substrates to be bonded surfaces are irradiated with ultraviolet light, and the surface after the irradiation is surface-treated with a silane coupling agent, and the first and second resin substrates are subjected to surface treatment. The first resin substrate and the second resin substrate are bonded to each other using the surface as a bonding surface by raising the temperature in a state where the surfaces after the treatment are in contact with each other. (Second bonding method
) o ) o
[0059] 榭脂基板の形状、サイズなどは、少なくとも一方の基板に流路が形成されている限 り特に限定されない。図 4に示すように、当該流路は、榭脂基板の接着面 (照射面)に 形成されていてもよい。 [0059] The shape, size, and the like of the resin substrate are not particularly limited as long as the flow path is formed on at least one of the substrates. As shown in FIG. 4, the flow path may be formed on the adhesive surface (irradiation surface) of the resin substrate.
[0060] 本発明のマイクロチップの製造方法では、榭脂基板の照射面に流路が形成されて いる場合、当該流路に紫外光を照射してもよい。実施例に後述するように、基板を構 成する榭脂の種類によっては、紫外光の照射により流路壁面の親水性を増大できる 。流路への紫外光の照射の有無は、マスキングなどの一般的な手法を利用できる。 In the microchip manufacturing method of the present invention, when a channel is formed on the irradiation surface of the resin substrate, the channel may be irradiated with ultraviolet light. As will be described later in Examples, the hydrophilicity of the flow path wall surface can be increased by irradiation with ultraviolet light depending on the type of the resin constituting the substrate. A general method such as masking can be used to determine whether or not the flow path is irradiated with ultraviolet light.
[0061] 本発明のマイクロチップの製造方法では、榭脂基板の接着面に有機溶剤および榭 脂組成物が残留しないため、光学的な特性に優れるマイクロチップを製造でき、例え
ば、チップの用途上、光学的な検出を行う場合においても、当該検出時に実施する 光学的な補正を軽減できる。 [0061] In the method for producing a microchip of the present invention, since the organic solvent and the resin composition do not remain on the adhesive surface of the resin substrate, a microchip having excellent optical characteristics can be produced. For example, even when optical detection is performed for the purpose of the chip, optical correction performed at the time of detection can be reduced.
[0062] 第 2の接着方法を用いた本発明のマイクロチップの製造方法では、榭脂基板の照 射面に流路が形成されている場合に、照射面とともに当該流路をシランカップリング 剤により表面処理してもよい。基板を構成する榭脂、あるいは、シランカップリング剤 の種類によっては、流路表面を改質して流路の機能化を図ることができる。基板を構 成する榭脂の種類によっても異なるが、流路表面の改質は、一般に、アミノシランが 行いやすい。 [0062] In the microchip manufacturing method of the present invention using the second bonding method, when a flow path is formed on the irradiation surface of the resin substrate, the flow path is connected to the silane coupling agent along with the irradiation surface. May be surface treated. Depending on the type of the resin or silane coupling agent constituting the substrate, the surface of the channel can be modified to make the channel functional. Although it depends on the type of resin constituting the substrate, aminosilane is generally easily modified by modifying the flow path surface.
[0063] 本発明の製造方法が適用できる榭脂物品としては、マイクロチップ以外にも、榭脂 レンズなどの光学部品などが考えられる。 [0063] As the resin article to which the production method of the present invention can be applied, in addition to the microchip, optical parts such as a resin lens can be considered.
[0064] 従来、榭脂レンズなどの光学部品は、榭脂部品同士の接着による製造は困難であ つた。熱融着による接着では、製造した榭脂レンズに歪みが生じて光学的な特性が 低下する。また、有機溶剤ゃ榭脂組成物による接着では、接着面にこれらの塗布物 が残留して光学的な特性が低下する。 [0064] Conventionally, it has been difficult to manufacture an optical component such as a resin lens by bonding the resin components together. Bonding by heat fusion causes distortion in the manufactured resin lens and reduces its optical properties. In addition, in the case of adhesion using an organic solvent-resin composition, these coated materials remain on the adhesion surface and the optical characteristics are deteriorated.
[0065] これに対して本発明の榭脂物品の製造方法では、榭脂レンズを構成する榭脂部品 同士を熱融着による接着よりも低い温度で接着でき、接着面に有機溶剤および榭脂 組成物が残留しないため、製造するレンズの光学的な特性の低下を抑制できる。ま た、 2以上の榭脂部品の組み合わせにより、従来は製造が困難であった複雑な形状 を有する光学部品の製造が可能となる。 On the other hand, in the method for producing a resin article of the present invention, the resin components constituting the resin lens can be bonded to each other at a temperature lower than that by heat fusion, and an organic solvent and a resin are bonded to the bonding surface. Since the composition does not remain, it is possible to suppress a decrease in optical characteristics of the manufactured lens. In addition, by combining two or more grease parts, it is possible to manufacture optical parts having complicated shapes that were difficult to manufacture.
実施例 Example
[0066] 以下、実施例により、本発明をより詳細に説明する。本発明は、以下に示す実施例 に限定されない。 Hereinafter, the present invention will be described in more detail with reference to examples. The present invention is not limited to the following examples.
[0067] (実施例 1) [0067] (Example 1)
シクロォレフインポリマー(日本ゼオン社製 ZEONEX330R、ガラス転移点 123°C) からなる一対の榭脂基板(70mm X 20mm、厚さ 2mm)の各々の表面に、 Xeエキシ マランプ(ゥシォ電機製、 UER20— 172A)により紫外光 (波長 172nm)を照射した。 紫外光の照射は大気中で行い、ランプと基板表面との距離を 5mm、照射強度を 10 mW/cm2,照射時間を 10分とした。紫外光の照射面は、各々の基板の一方の主面
全体とした。 On each surface of a pair of resin substrates (70mm X 20mm, thickness 2mm) made of cycloolefin polymer (ZEONEX330R manufactured by Nippon Zeon Co., Ltd., glass transition point 123 ° C), Xe excimer lamp (UER20 manufactured by Ushio) — Irradiated with ultraviolet light (wavelength 172 nm) by 172A). Irradiation with ultraviolet light was performed in the atmosphere, the distance between the lamp and the substrate surface was 5 mm, the irradiation intensity was 10 mW / cm 2 , and the irradiation time was 10 minutes. The irradiation surface of ultraviolet light is one main surface of each substrate Overall.
[0068] 紫外光の照射前後における基板表面 (照射面)の X線誘起光電子分光 (XPS)測 定を行ったところ、紫外光を照射する前に比べて照射した後では、 Olsスペクトルに おける酸素力 の信号の増加が顕著であり、また、 Clsスペクトルにおける炭素からの 信号が減少するとともに、酸素と結合状態にある炭素力 の信号 (結合エネルギーに して 290eV近傍)が新たに見られることがわ力つた。この結果から、紫外光の照射に より、基板表面に酸素を含む官能基 (カルボキシル基、アルデヒド基、水酸基など)が 多数形成されたと考えられた。 [0068] The X-ray induced photoelectron spectroscopy (XPS) measurement of the substrate surface (irradiation surface) before and after irradiation with ultraviolet light was performed. After irradiation, the oxygen in the Ols spectrum was compared with that before irradiation with ultraviolet light. The increase in the force signal is remarkable, the signal from carbon in the Cls spectrum decreases, and a new carbon force signal in the state of bonding with oxygen (near 290 eV in terms of binding energy) can be seen. Wow. From this result, it was considered that many functional groups containing oxygen (carboxyl group, aldehyde group, hydroxyl group, etc.) were formed on the substrate surface by irradiation with ultraviolet light.
[0069] 上記 XPS測定とは別に、紫外光の照射前後における基板表面の水滴接触角を、 自動接触角計 (DM500、協和界面科学社製)により測定したところ、当該接触角は 99° 力 19° へと減少し、紫外光の照射により、基板表面の親水性が増大したこと がわかった。 [0069] In addition to the above XPS measurement, the contact angle of water droplets on the substrate surface before and after irradiation with ultraviolet light was measured with an automatic contact angle meter (DM500, manufactured by Kyowa Interface Science Co., Ltd.). It was found that the hydrophilicity of the substrate surface was increased by irradiation with ultraviolet light.
[0070] 次に、紫外光照射後の各基板を、各々の照射面が互いに接した状態になるように 対向させ、各々の照射面が互いに密着する方向に圧力 0. 7MPaで力をカ卩えながら [0070] Next, the substrates after the ultraviolet light irradiation are opposed to each other so that the respective irradiation surfaces are in contact with each other, and the force is applied at a pressure of 0.7 MPa in a direction in which the respective irradiation surfaces are in close contact with each other. While
、全体を 100°Cに昇温し、そのまま 1時間保持した。 The whole was heated to 100 ° C. and held there for 1 hour.
[0071] 次に、全体を室温まで降温させた後に上記力を抜き、基板同士が接着しているか どうかを確認したところ、基板同士は強固に接着しており、破壊することなく両者を引 き剥がすことはできな力つた。 [0071] Next, after the temperature of the whole was lowered to room temperature, the above force was removed and it was confirmed whether the substrates were adhered to each other. The substrates were firmly adhered to each other, and both were pulled without breaking. I couldn't peel it off.
[0072] なお、上記とは別のシクロォレフインポリマー(日本ゼオン社製 ZEONEX480R:ガ ラス転移点 138°C)からなる榭脂基板を用いた場合、および、ポリカーボネート (バイ エル社製:ガラス転移点 210°C)力もなる榭脂基板を用いた場合にぉ 、ても、同様の 結果が得られた。 [0072] In addition, when a resin substrate made of a cycloolefin polymer different from the above (ZEONEX480R manufactured by Nippon Zeon Co., Ltd .: glass transition point 138 ° C) is used, and polycarbonate (manufactured by Bayer Co., Ltd .: glass) Even when a resin substrate having a transition point (210 ° C.) force was used, similar results were obtained.
[0073] また、紫外光の照射時間を 5分とした場合においても、同様の結果が得られた。 [0073] Similar results were obtained when the irradiation time of ultraviolet light was 5 minutes.
[0074] (実施例 2) [Example 2]
実施例 1で用いたシクロォレフインポリマー力 なる一対の榭脂基板の各々の表面 に、実施例 1と同様に紫外光を照射した。 In the same manner as in Example 1, the surface of each of the pair of resin substrates having the cycloolefin polymer force used in Example 1 was irradiated with ultraviolet light.
[0075] 次に、一方の榭脂基板 (榭脂基板 A)の照射面に、シランカップリング剤として、アミ ノシランの 1種である N— (2 アミノエチル) 3 ァミノプロピルトリメトキシシラン (A
EAPS)を塗布した。これとは別に、他方の榭脂基板 (榭脂基板 B)の照射面に、末端 にエポキシ基を有する 3—グリシドキシ一プロピルトリメトキシシラン(GPS)を塗布した 。 AEAPSおよび GPSの構造式を以下の式(1)、(2)に示す。 [0075] Next, N- (2 aminoethyl) 3 aminopropyltrimethoxysilane (a kind of aminosilane) is used as a silane coupling agent on the irradiated surface of one resin substrate (resin substrate A). A EAPS) was applied. Separately, 3-glycidoxy monopropyltrimethoxysilane (GPS) having an epoxy group at the terminal was applied to the irradiated surface of the other resin substrate (resin substrate B). The structural formulas of AEAPS and GPS are shown in the following formulas (1) and (2).
[0076] [化 1] [0076] [Chemical 1]
H2N H 2 N
[0077] [化 2] [0077] [Chemical 2]
[0078] このようにシランカップリング剤により表面処理した榭脂基板 A、 Bを、各々の照射面 [0078] The resin substrates A and B surface-treated with the silane coupling agent in this way are applied to the respective irradiated surfaces.
(表面処理面)が互いに接した状態になるように対向させ、各々の照射面が互いに密 着する方向に圧力 0. 7MPaで力をカ卩えながら、全体を 100°Cに昇温し、そのまま 1 時間保持した。 (Surface treatment surfaces) facing each other and raising the entire surface to 100 ° C while holding the force at a pressure of 0.7 MPa in the direction in which each irradiation surface adheres to each other, It was kept for 1 hour.
[0079] 次に、全体を室温まで降温させた後に上記力を抜き、基板同士が接着しているか どうかを確認したところ、基板同士は接着しており、破壊することなく両者を引き剥が すことはできな力つた。 [0079] Next, after the temperature of the whole was lowered to room temperature, the above force was released and it was confirmed whether the substrates were bonded to each other. The substrates were bonded to each other, and both were peeled off without breaking. I couldn't do it.
[0080] なお、上記とは別のシクロォレフインポリマー(日本ゼオン社製 ZEONEX480R)か らなる樹脂基板を用いた場合、および、実施例 1で用いたポリカーボネートからなる榭 脂基板を用いた場合にも、同様の結果が得られた。 [0080] When a resin substrate made of a cycloolefin polymer (ZEONEX480R manufactured by Nippon Zeon Co., Ltd.) different from the above is used, and when a resin substrate made of the polycarbonate used in Example 1 is used. Similar results were obtained.
[0081] 本発明は、その意図および本質的な特徴力 逸脱しない限り、他の実施形態に適 用しうる。この明細書に開示されている実施形態は、あらゆる点で説明的なものであ つてこれに限定されない。本発明の範囲は、上記説明ではなく添付したクレームによ つて示されており、クレームと均等な意味および範囲にあるすベての変更はそれに含
まれる。 [0081] The present invention can be applied to other embodiments without departing from the intent and essential characteristics thereof. The embodiments disclosed in this specification are illustrative in all respects and are not limited thereto. The scope of the present invention is shown not by the above description but by the appended claims, and all modifications that are equivalent in meaning and scope to the claims are included therein. Be turned.
産業上の利用可能性 Industrial applicability
本発明によれば、熱融着による接着よりも低い温度において、生産性よく榭脂と榭 脂とを接着できる接着方法を提供できる。本発明の接着方法は、様々な榭脂物品の 製造方法に応用でき、例えば、マイクロチップの製造方法に応用できる。
ADVANTAGE OF THE INVENTION According to this invention, the adhesion | attachment method which can adhere | attach resin and resin with high productivity in the temperature lower than the adhesion | attachment by heat sealing | fusion can be provided. The bonding method of the present invention can be applied to various methods for manufacturing a resin article, for example, a microchip manufacturing method.
Claims
請求の範囲 The scope of the claims
[I] 第 1の榭脂と第 2の榭脂とを接着する榭脂の接着方法であって、 [I] A method for adhering a first resin and a second resin,
(I)接着面となる前記第 1および第 2の榭脂の表面に紫外光を照射する工程と、 (I) a step of irradiating ultraviolet light onto the surfaces of the first and second resin that are to be bonded surfaces;
(II)前記照射後の前記表面を互いに接触させた状態で昇温することにより、前記表 面を接着面として前記第 1の榭脂と前記第 2の榭脂とを接着する工程と、を含む榭脂 の接着方法。 (II) The step of bonding the first and second resins using the surface as an adhesive surface by raising the temperature in a state where the surfaces after the irradiation are in contact with each other. A method for adhering rosin.
[2] 前記工程 (II)における前記昇温の温度を、前記第 1の榭脂と前記第 2の榭脂とが熱 融着しな!ヽ温度とする、請求項 1に記載の榭脂の接着方法。 [2] The resin according to claim 1, wherein the temperature of the temperature increase in the step (II) is a temperature at which the first resin and the second resin are not thermally fused together. Bonding method.
[3] 前記工程 (II)における前記昇温の温度を、前記第 1および第 2の榭脂のガラス転移 点未満とする、請求項 1に記載の榭脂の接着方法。 [3] The method of adhering a resin according to claim 1, wherein the temperature of the temperature increase in the step (II) is less than the glass transition point of the first and second resins.
[4] 前記工程 (II)において、 [4] In the step (II),
前記第 1および第 2の榭脂の前記表面が互いに密着する方向に力を加えながら、 前記表面を昇温する、請求項 1に記載の榭脂の接着方法。 2. The method for adhering a resin according to claim 1, wherein the temperature of the surface is increased while applying a force in a direction in which the surfaces of the first and second resins are in close contact with each other.
[5] 前記第 1および第 2の榭脂から選ばれる少なくとも 1つの樹脂が光学的に透明であ る請求項 1に記載の榭脂の接着方法。 5. The method for adhering a resin according to claim 1, wherein at least one resin selected from the first and second resins is optically transparent.
[6] 前記第 1および第 2の榭脂が、炭素、酸素および窒素力 選ばれる少なくとも 1種の 元素と、炭素との結合を主鎖に有する請求項 1に記載の榭脂の接着方法。 6. The method for adhering a resin according to claim 1, wherein the first and second resins have a bond between at least one element selected from carbon, oxygen and nitrogen force and carbon in the main chain.
[7] 前記第 1および第 2の榭脂から選ばれる少なくとも 1つの樹脂が、シクロォレフインポ リマーおよびポリカーボネートから選ばれる少なくとも 1つである請求項 1に記載の榭 脂の接着方法。 7. The resin bonding method according to claim 1, wherein the at least one resin selected from the first and second resins is at least one selected from a cycloolefin polymer and a polycarbonate.
[8] 前記第 1および第 2の榭脂から選ばれる少なくとも 1つの樹脂が、二環式シクロォレ フィンポリマーである請求項 1に記載の榭脂の接着方法。 8. The method of adhering a resin according to claim 1, wherein at least one resin selected from the first and second resins is a bicyclic cyclohexylene polymer.
[9] 前記第 1および第 2の榭脂の種類が同一である請求項 1に記載の榭脂の接着方法 [9] The method of adhering a resin according to claim 1, wherein the types of the first and second resin are the same
[10] 前記紫外光が真空紫外線である請求項 1に記載の榭脂の接着方法。 10. The method for adhering a resin according to claim 1, wherein the ultraviolet light is vacuum ultraviolet light.
[II] 前記紫外光の光源が、水銀ランプ、キセノンランプ、エキシマレーザーまたはエキシ マランプである請求項 1に記載の榭脂の接着方法。 [II] The resin bonding method according to claim 1, wherein the ultraviolet light source is a mercury lamp, a xenon lamp, an excimer laser, or an excimer lamp.
[12] 第 1の榭脂と第 2の榭脂とを接着する榭脂の接着方法であって、
(i)接着面となる前記第 1および第 2の榭脂の表面に紫外光を照射する工程と、[12] A method for adhering a resin to bond a first resin and a second resin, (i) irradiating ultraviolet light onto the surfaces of the first and second resin to be bonded surfaces;
(ii)前記照射後の前記表面を、シランカップリング剤により表面処理する工程と、(ii) a step of surface-treating the surface after the irradiation with a silane coupling agent;
(iii)前記処理後の前記表面を互いに接触させた状態で昇温することにより、前記 表面を接着面として前記第 1の榭脂と前記第 2の榭脂とを接着する工程と、を含む榭 脂の接着方法。 (iii) adhering the first and second resins using the surface as an adhesive surface by raising the temperature in a state where the treated surfaces are in contact with each other.接着 How to bond the resin.
[13] 前記工程 (ii)において、 [13] In the step (ii),
前記第 1の榭脂の前記表面を、末端にアミノ基を有するシランカップリング剤により 表面処理し、 Surface treating the surface of the first resin with a silane coupling agent having an amino group at the end;
前記第 2の榭脂の前記表面を、末端に前記アミノ基と結合可能な官能基を有する シランカップリング剤により表面処理する、請求項 12に記載の榭脂の接着方法。 13. The method for adhering a resin according to claim 12, wherein the surface of the second resin is treated with a silane coupling agent having a functional group capable of binding to the amino group at a terminal.
[14] 前記官能基が、エポキシ基、カルボキシル基およびアルデヒド基力 選ばれる少な くとも 1種である請求項 13に記載の榭脂の接着方法。 14. The resin bonding method according to claim 13, wherein the functional group is at least one selected from an epoxy group, a carboxyl group, and an aldehyde group.
[15] 榭脂部を有する 2以上の部品を含み、 [15] including two or more parts having a grease part,
前記 2以上の部品が前記榭脂部において互いに接着されている榭脂物品の製造 方法であって、 A method of manufacturing a resin article in which the two or more parts are bonded to each other in the resin part,
前記榭脂部同士を、請求項 1に記載の榭脂の接着方法により接着する、榭脂物品 の製造方法。 A method for producing a resin article, wherein the resin parts are bonded together by the resin bonding method according to claim 1.
[16] 前記榭脂部が、シクロォレフインポリマーおよびポリカーボネートから選ばれる少な くとも 1つ力もなる請求項 15に記載の榭脂物品の製造方法。 16. The method for producing a resin article according to claim 15, wherein the resin part has at least one force selected from a cycloolefin polymer and a polycarbonate.
[17] 榭脂部を有する 2以上の部品を含み、 [17] including two or more parts having a resin part,
前記 2以上の部品が前記榭脂部において互いに接着されている榭脂物品の製造 方法であって、 A method of manufacturing a resin article in which the two or more parts are bonded to each other in the resin part,
前記榭脂部同士を、請求項 12に記載の榭脂の接着方法により接着する、榭脂物 品の製造方法。 A method for producing a resin product, wherein the resin parts are bonded together by the resin bonding method according to claim 12.
[18] 前記榭脂部が、シクロォレフインポリマーおよびポリカーボネートから選ばれる少な くとも 1つ力もなる請求項 17に記載の榭脂物品の製造方法。 18. The method for producing a resin article according to claim 17, wherein the resin part has at least one force selected from a cycloolefin polymer and a polycarbonate.
[19] 対向するように互いに接着された一対の榭脂基板を含み、 [19] includes a pair of resin substrates bonded to each other so as to face each other,
前記榭脂基板の少なくとも一方に微細な流路が形成されているマイクロチップの製
造方法であって、 Production of a microchip in which a fine channel is formed in at least one of the resin substrates. Manufacturing method,
前記榭脂基板同士を、請求項 1に記載の榭脂の接着方法により接着する、マイクロ チップの製造方法。 A method for producing a microchip, wherein the resin substrates are bonded together by the resin bonding method according to claim 1.
[20] 前記流路が、前記榭脂基板の接着面に形成されている請求項 19に記載のマイクロ チップの製造方法。 20. The method for manufacturing a microchip according to claim 19, wherein the flow path is formed on an adhesive surface of the resin substrate.
[21] 対向するように互いに接着された一対の榭脂基板を含み、 [21] includes a pair of resin substrates bonded to each other so as to face each other,
前記榭脂基板の少なくとも一方に微細な流路が形成されているマイクロチップの製 造方法であって、 A method of manufacturing a microchip in which a fine channel is formed in at least one of the resin substrates,
前記榭脂基板同士を、請求項 12に記載の榭脂の接着方法により接着する、マイク 口チップの製造方法。 A method for manufacturing a microphone mouth chip, wherein the resin substrates are bonded to each other by the resin bonding method according to claim 12.
[22] 前記流路が、前記榭脂基板の接着面に形成されている請求項 21に記載のマイクロ チップの製造方法。
22. The method for manufacturing a microchip according to claim 21, wherein the flow path is formed on an adhesive surface of the resin substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007800265778A CN101495582B (en) | 2006-07-13 | 2007-07-13 | Method of bonding resins by light irradiation and process for producing resin article |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006-192621 | 2006-07-13 | ||
JP2006192621A JP4919474B2 (en) | 2006-07-13 | 2006-07-13 | Method for bonding resin by light irradiation and method for producing resin article |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008007787A1 true WO2008007787A1 (en) | 2008-01-17 |
Family
ID=38923342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/064023 WO2008007787A1 (en) | 2006-07-13 | 2007-07-13 | Method of bonding resins by light irradiation and process for producing resin article |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4919474B2 (en) |
CN (1) | CN101495582B (en) |
WO (1) | WO2008007787A1 (en) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009084622A1 (en) * | 2007-12-27 | 2009-07-09 | Alps Electric Co., Ltd. | Method for bonding resin by vacuum ultraviolet irradiation, process for producing resin article or microchip using the method, and resin article or microchip produced by the process. |
US8246774B2 (en) | 2007-12-27 | 2012-08-21 | Alps Electric Co., Ltd. | Resin bonding method by photoirradiation, method for producing resin article, resin article produced by the same method, method for producing microchip, and microchip produced by the same method |
US8262834B2 (en) | 2008-04-28 | 2012-09-11 | Hon Hai Precision Industry Co., Ltd. | Method for manufacturing lens |
WO2013108739A1 (en) * | 2012-01-19 | 2013-07-25 | ウシオ電機株式会社 | Method for bonding workpieces, and touch panel |
CN103249480A (en) * | 2010-12-06 | 2013-08-14 | 阿尔卑斯电气株式会社 | Method for manufacturing microchip |
JP2013535541A (en) * | 2010-07-30 | 2013-09-12 | ソニー株式会社 | Polymer compound substrate having glass-like surface, and chip made of said polymer compound substrate |
WO2013175807A1 (en) * | 2012-05-22 | 2013-11-28 | ウシオ電機株式会社 | Method for laminating works and touch panel |
EP2441518A3 (en) * | 2010-10-18 | 2013-12-04 | Sony Corporation | Method and device for thermocompression bonding |
JP2015051542A (en) * | 2013-09-05 | 2015-03-19 | 独立行政法人物質・材料研究機構 | Joining method and joining device |
WO2019221288A1 (en) * | 2018-05-18 | 2019-11-21 | 国立研究開発法人物質・材料研究機構 | Method for manufacturing layered article, layered article, and heated toilet seat device |
EP3488998A4 (en) * | 2016-07-15 | 2020-03-11 | Ushio Denki Kabushiki Kaisha | Substrate bonding method and microchip manufacturing method |
WO2023234414A1 (en) * | 2022-06-02 | 2023-12-07 | センエンジニアリング株式会社 | Method for bonding substrates containing polymers on surfaces thereof, bonding apparatus, and laminate |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5572802B2 (en) | 2007-05-30 | 2014-08-20 | 国立大学法人 香川大学 | Adhesion method and biochemical chip and optical component produced using the same |
WO2009101850A1 (en) * | 2008-02-15 | 2009-08-20 | Konica Minolta Opto, Inc. | Method for manufacturing microchip and microchip |
JP5001203B2 (en) * | 2008-03-18 | 2012-08-15 | アイダエンジニアリング株式会社 | Manufacturing method of microchip having non-adhesive part |
KR20120055489A (en) * | 2009-07-24 | 2012-05-31 | 야스노리 타가 | Joined structure manufacturing method and joined structure |
JP5501918B2 (en) * | 2010-09-30 | 2014-05-28 | 株式会社トプコン | Optical element manufacturing method and optical element produced by the method |
WO2012141293A2 (en) | 2011-04-15 | 2012-10-18 | 東洋紡績株式会社 | Laminate, production method for same, and method of creating device structure using laminate |
JP5224011B2 (en) | 2011-04-15 | 2013-07-03 | 東洋紡株式会社 | LAMINATE, MANUFACTURING METHOD THEREOF, AND DEVICE STRUCTURE MANUFACTURING METHOD USING THE SAME |
JP5152361B2 (en) * | 2011-04-20 | 2013-02-27 | ウシオ電機株式会社 | Work bonding method and bonding apparatus |
US10421844B2 (en) | 2011-05-23 | 2019-09-24 | Ushio Denki Kabushiki Kaisha | Surface treatment method for molded article, and molded article produced from material containing cyclic olefin resin |
WO2013042377A1 (en) * | 2011-09-22 | 2013-03-28 | 国立大学法人東京工業大学 | Method for bonding synthetic resin |
JP2013103456A (en) * | 2011-11-16 | 2013-05-30 | Kyoto Univ | Composite material and method of manufacturing the same |
WO2013191052A1 (en) | 2012-06-20 | 2013-12-27 | 東洋紡株式会社 | Process for producing layered product, layered product, process for producing layered product with device using said layered product, and layered product with device |
EP3037826A4 (en) * | 2013-08-23 | 2017-05-10 | ASAHI FR R&D Co., Ltd. | Microchemical chip and reaction device |
JP6522322B2 (en) * | 2013-12-12 | 2019-05-29 | 株式会社トクヤマ | Method of manufacturing replica mold for nanoimprinting |
JP6018237B2 (en) | 2014-02-14 | 2016-11-02 | アークレイ株式会社 | Chip manufacturing method including microchannel and chip manufactured thereby |
JP6357913B2 (en) * | 2014-06-26 | 2018-07-18 | 日本ゼオン株式会社 | Method for producing surface modified film, method for modifying resin layer, laminate, flexible printed circuit board, and method for producing laminate |
TWI709481B (en) | 2014-08-25 | 2020-11-11 | 日商東洋紡股份有限公司 | Silane coupling agent laminated layer polymer film and its manufacturing method, laminated body and its manufacturing method, and flexible electronic device manufacturing method |
JP6012912B1 (en) * | 2015-02-20 | 2016-10-25 | 信越ポリマー株式会社 | Detection sensor and manufacturing method thereof |
JP6195022B2 (en) | 2015-03-19 | 2017-09-13 | ウシオ電機株式会社 | How to bond workpieces |
JP6728575B2 (en) * | 2015-05-11 | 2020-07-22 | 東洋製罐グループホールディングス株式会社 | Joining method |
JP6112140B2 (en) * | 2015-05-20 | 2017-04-12 | ウシオ電機株式会社 | Work bonding method and light irradiation device |
JP6413951B2 (en) * | 2015-06-26 | 2018-10-31 | 株式会社デンソー | Resin molded body and manufacturing method thereof |
WO2018074059A1 (en) * | 2016-10-17 | 2018-04-26 | 東洋製罐グループホールディングス株式会社 | Bonding method |
JP6531749B2 (en) | 2016-11-21 | 2019-06-19 | ウシオ電機株式会社 | Method of bonding substrates, microchip and method of manufacturing the same |
JP6379323B1 (en) * | 2017-02-03 | 2018-08-22 | ポリプラスチックス株式会社 | Bonding method of resin molded products |
CN108687442B (en) * | 2017-03-30 | 2021-10-01 | 法拉第未来公司 | System and method for welding |
JP6939415B2 (en) | 2017-10-27 | 2021-09-22 | ウシオ電機株式会社 | Microchip |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09220765A (en) * | 1996-02-19 | 1997-08-26 | Three Bond Co Ltd | High frequency thermal bonding method of non-polar resin and its laminate |
JP2003509251A (en) * | 1999-09-23 | 2003-03-11 | アクララ バイオサイエンシーズ, インコーポレイテッド | Method for joining two workpieces made of plastic without using foreign matter |
JP2003286358A (en) * | 2002-03-28 | 2003-10-10 | Sumitomo Bakelite Co Ltd | Substrate for microchip and method for manufacturing the same |
JP3473264B2 (en) * | 1996-04-12 | 2003-12-02 | 旭硝子株式会社 | Laminated body and method for manufacturing the same |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000266932A (en) * | 1999-03-12 | 2000-09-29 | Sekisui Chem Co Ltd | Polarizing plate protection film and polarizing plate using it |
JP4030897B2 (en) * | 2003-03-07 | 2008-01-09 | 株式会社クラレ | Plastic bonding method |
-
2006
- 2006-07-13 JP JP2006192621A patent/JP4919474B2/en active Active
-
2007
- 2007-07-13 CN CN2007800265778A patent/CN101495582B/en not_active Expired - Fee Related
- 2007-07-13 WO PCT/JP2007/064023 patent/WO2008007787A1/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09220765A (en) * | 1996-02-19 | 1997-08-26 | Three Bond Co Ltd | High frequency thermal bonding method of non-polar resin and its laminate |
JP3473264B2 (en) * | 1996-04-12 | 2003-12-02 | 旭硝子株式会社 | Laminated body and method for manufacturing the same |
JP2003509251A (en) * | 1999-09-23 | 2003-03-11 | アクララ バイオサイエンシーズ, インコーポレイテッド | Method for joining two workpieces made of plastic without using foreign matter |
JP2003286358A (en) * | 2002-03-28 | 2003-10-10 | Sumitomo Bakelite Co Ltd | Substrate for microchip and method for manufacturing the same |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8246774B2 (en) | 2007-12-27 | 2012-08-21 | Alps Electric Co., Ltd. | Resin bonding method by photoirradiation, method for producing resin article, resin article produced by the same method, method for producing microchip, and microchip produced by the same method |
WO2009084622A1 (en) * | 2007-12-27 | 2009-07-09 | Alps Electric Co., Ltd. | Method for bonding resin by vacuum ultraviolet irradiation, process for producing resin article or microchip using the method, and resin article or microchip produced by the process. |
US8784973B2 (en) | 2007-12-27 | 2014-07-22 | Alps Electric Co., Ltd. | Resin bonding method by photoirradiation, method for producing resin article, resin article produced by the same method, method for producing microchip, and microchip produced by the same method |
US8262834B2 (en) | 2008-04-28 | 2012-09-11 | Hon Hai Precision Industry Co., Ltd. | Method for manufacturing lens |
JP2013535541A (en) * | 2010-07-30 | 2013-09-12 | ソニー株式会社 | Polymer compound substrate having glass-like surface, and chip made of said polymer compound substrate |
JP2016222913A (en) * | 2010-07-30 | 2016-12-28 | ソニー株式会社 | Polymer compound substrate having glass-like surface and chip manufactured by polymer compound substrate |
US9956722B2 (en) | 2010-10-18 | 2018-05-01 | STRATEC CONSUMABLES GmbH | Method and device for thermocompression bonding |
US8691039B2 (en) | 2010-10-18 | 2014-04-08 | Sony Corporation | Method and device for thermocompression bonding |
EP2441518A3 (en) * | 2010-10-18 | 2013-12-04 | Sony Corporation | Method and device for thermocompression bonding |
CN103249480B (en) * | 2010-12-06 | 2015-07-08 | 阿尔卑斯电气株式会社 | Method for manufacturing microchip |
CN103249480A (en) * | 2010-12-06 | 2013-08-14 | 阿尔卑斯电气株式会社 | Method for manufacturing microchip |
CN104203573A (en) * | 2012-01-19 | 2014-12-10 | 优志旺电机株式会社 | Method for bonding workpieces, and touch panel |
JP2013149072A (en) * | 2012-01-19 | 2013-08-01 | Ushio Inc | Work-piece bonding method and touch panel |
WO2013108739A1 (en) * | 2012-01-19 | 2013-07-25 | ウシオ電機株式会社 | Method for bonding workpieces, and touch panel |
WO2013175807A1 (en) * | 2012-05-22 | 2013-11-28 | ウシオ電機株式会社 | Method for laminating works and touch panel |
JP2015051542A (en) * | 2013-09-05 | 2015-03-19 | 独立行政法人物質・材料研究機構 | Joining method and joining device |
EP3488998A4 (en) * | 2016-07-15 | 2020-03-11 | Ushio Denki Kabushiki Kaisha | Substrate bonding method and microchip manufacturing method |
WO2019221288A1 (en) * | 2018-05-18 | 2019-11-21 | 国立研究開発法人物質・材料研究機構 | Method for manufacturing layered article, layered article, and heated toilet seat device |
JPWO2019221288A1 (en) * | 2018-05-18 | 2021-02-25 | 国立研究開発法人物質・材料研究機構 | Manufacturing method of laminated body, laminated body, and heating toilet seat device |
JP7018223B2 (en) | 2018-05-18 | 2022-02-10 | 国立研究開発法人物質・材料研究機構 | Manufacturing method of laminated body, laminated body, and heating toilet seat device |
WO2023234414A1 (en) * | 2022-06-02 | 2023-12-07 | センエンジニアリング株式会社 | Method for bonding substrates containing polymers on surfaces thereof, bonding apparatus, and laminate |
Also Published As
Publication number | Publication date |
---|---|
CN101495582A (en) | 2009-07-29 |
JP4919474B2 (en) | 2012-04-18 |
JP2008019348A (en) | 2008-01-31 |
CN101495582B (en) | 2012-02-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2008007787A1 (en) | Method of bonding resins by light irradiation and process for producing resin article | |
JP5576040B2 (en) | Resin article peeling method and microchip peeling method | |
US8956494B2 (en) | Method of adhering hard silicone resin, method of adhering substrate having fine structure, and preparation method of micro fluidic device utilizing adhesion method | |
JP4998462B2 (en) | Manufacturing method of resin composite molded body | |
CN101542293B (en) | Microchip substrate bonding method and microchip | |
US8246774B2 (en) | Resin bonding method by photoirradiation, method for producing resin article, resin article produced by the same method, method for producing microchip, and microchip produced by the same method | |
US7901527B2 (en) | Microchip manufacturing method | |
JP4760315B2 (en) | Joining method | |
JP2004325158A (en) | Joining method | |
JP2005257283A (en) | Microchip | |
RU2748273C9 (en) | Nano-imprinted substrate | |
JP5570616B2 (en) | Microchip manufacturing method | |
JP4313682B2 (en) | Method for bonding PDMS substrate to other synthetic resin substrate and method for manufacturing microchip | |
JP2007240461A (en) | Plastic microchip, joining method therefor, and biochip or micro analytical chip using the same | |
JP2013105803A (en) | Joining method and junction material | |
JP5516954B2 (en) | Method for bonding substrates having fine structure and method for manufacturing microfluidic device using the bonding method | |
JP2009069051A (en) | Manufacturing method of microfluid device | |
JP2010243271A (en) | Fine channel device, and method for manufacturing the same | |
WO2018150864A1 (en) | Joined structure manufacturing method and joined structure |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200780026577.8 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 07790803 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
NENP | Non-entry into the national phase |
Ref country code: RU |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 07790803 Country of ref document: EP Kind code of ref document: A1 |