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WO2007063044A2 - Laser fuse structures for high power applications - Google Patents

Laser fuse structures for high power applications Download PDF

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Publication number
WO2007063044A2
WO2007063044A2 PCT/EP2006/068939 EP2006068939W WO2007063044A2 WO 2007063044 A2 WO2007063044 A2 WO 2007063044A2 EP 2006068939 W EP2006068939 W EP 2006068939W WO 2007063044 A2 WO2007063044 A2 WO 2007063044A2
Authority
WO
WIPO (PCT)
Prior art keywords
chip
laser fuse
conductive
laser
level
Prior art date
Application number
PCT/EP2006/068939
Other languages
French (fr)
Other versions
WO2007063044A3 (en
Inventor
Stephen Edward Greco
Erik Leigh Hedberg
Dae-Young Jung
Paul Stephen Mclaughlin
Christopher David Muzzy
Norman Jay Rohrer
Jean Elizabeth Wynne
Original Assignee
International Business Machines Corporation
Ibm United Kingdom Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corporation, Ibm United Kingdom Limited filed Critical International Business Machines Corporation
Priority to KR1020087010738A priority Critical patent/KR101055874B1/en
Priority to CN200680045051XA priority patent/CN101322244B/en
Priority to JP2008542742A priority patent/JP2009517875A/en
Priority to EP06819770.6A priority patent/EP1955373B1/en
Publication of WO2007063044A2 publication Critical patent/WO2007063044A2/en
Publication of WO2007063044A3 publication Critical patent/WO2007063044A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
    • H01L23/5256—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive
    • H01L23/5258—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive the change of state resulting from the use of an external beam, e.g. laser beam or ion beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to the design of a laser fuse for high power applications. More specifically, the present invention relates to a laser fuse that can be used in an integrated circuit (IC) chip for connecting/disconnecting various functional circuits to/from power planes of the IC chip.
  • IC integrated circuit
  • IC integrated circuit
  • the functional circuits containing such IC chips continue to increase in complexity. This increases the opportunity for defective chips resulting from a failed element or a defective conductor.
  • One solution for this problem is to provide redundant circuits or redundant elements on the IC chips. For example, if a primary circuit or element becomes defective, a redundant circuit or element can be used to substitute for that defective circuit or element, which involves logic de-activation of the defective circuit or element and activation of the redundant circuit or element.
  • the un-used circuits or elements are still tied to the power planes of the IC chips and continue to drain power from the IC chips. Such un-used circuits or elements can also cause the chips to be rejected due to violations of predetermined power specifications, especially in low power logic applications.
  • Laser fuses have been used for permanently canceling defective circuits or elements and for custom-modifying/personalizing the IC chips in low power applications, which are typically characterized by low voltage drops (approximately in the order of about 0. IV) and low duty cycle limits (approximately in the order of about 0.001%) .
  • Use of currently available laser fuses in high power applications characterized by high voltage drops (in the order of at least about 2V) and high duty cycles (approximately in the order of at least about 100%) have resulted in reliability failures due to fuse regrowth under high voltage and high duty cycle conditions.
  • the present invention in one aspect, relates to a laser fuse structure, comprising :
  • first and second conductive supporting elements located at a first metal level of an integrated circuit (IC) chip in a spaced-apart relationship
  • first and second connection elements located at a second, different metal level of the IC chip, wherein the first and second conductive support elements are respectively connected to the first and second connection elements by first and second via stacks that each comprises one or more conductive vias extending between the first and second metal levels;
  • first and second metal lines located at the first metal level, wherein the first and second connection elements are respectively connected to the first and second metal lines by third and fourth via stacks that each comprises one or more conductive vias extending between the first and second metal levels.
  • the present invention relates to a method for programming the above-described laser fuse structure, by applying at least one laser beam that has an energy level ranging from about 0.5 ⁇ j to about 2.5 ⁇ j to the conductive fusible link of the laser fuse structure.
  • the present invention relates to an integrated circuit (IC) chip that comprises the above-described laser fuse structure, where the first metal level of the laser fuse structure is the last copper level of the IC chip.
  • IC integrated circuit
  • a further aspect of the present invention relates to an IC chip that comprises a laser fuse that includes a single fusible link or multiple fusible links arranged in parallel and is located at the last metal level of the IC chip. Specifically, one side of the laser fuse is connected to a functional part of the IC chip, and the other side of the laser fuse is connected to a power bus of the IC chip.
  • the present invention relates to a method for programming the above-described IC chip by applying at least one laser beam that has an energy level ranging from about 0.5 ⁇ j to about 2.5 ⁇ j to the laser fuse.
  • Figure 1 shows a top view of an exemplary laser fuse, according to one embodiment of the present invention
  • Figure 2 shows a cross-sectional view of the exemplary laser fuse of Figure 1 ;
  • Figures 3-4 shows top views of various exemplary laser fuses, according to further embodiments of the present invention.
  • Figure 5A shows a photographic view of multiple intact laser fuses, according to one embodiment of the present invention.
  • Figure 5B shows a photographic view of the laser fuses of Figure 5 after being irradiated by laser beams.
  • the present invention provides laser fuse designs that can be readily integrated into the back-end-of-line (BEOL) complementary metal-oxide-semiconductor (CMOS) part of an integrated circuit (IC) chip for connecting/disconnecting various functional components on the IC chip to/from the power planes of the IC chip.
  • the laser fuses of the present invention have sufficiently high current capacity (>. about 30 mA) and are particularly suitable for high power applications.
  • the laser fuses of the present invention each contains one or more conductive fusible links that are located between and supported by two conductive supporting elements at the last copper level in an IC chip.
  • the conductive supporting elements of the laser fuse are electrically connected to out-going wires or metal lines through connection elements that are located at a different metal level, to achieve complete physical separation and isolation of the laser fuse from out-going wires or metal lines.
  • the connection elements can locate at the second last copper level in the IC chip.
  • the connection elements can locate at an aluminum wiring level above the last copper level in the IC chip.
  • the laser fuses of the present invention each is characterized by one or more dimensional parameters, such as the length, width, and thickness of the fusible links contained by the laser fuse and the distance there between, which contribute to the high current capacity and high reliability of the laser fuse and make it particularly suitable for high power applications.
  • Figure 1 shows a top view of a laser fuse structure that contains multiple parallely arranged conductive fusible links 14 and located between and directly connecting first and second conductive support bars 12a and 12b.
  • the first and second conductive support bars 12a and 12b are respectively connected to first and second conductive pads 20a and 20b by first and second via stacks 18a and 18b.
  • the first and second conductive pads 20a and 20b are then respectively connected to first and second metal lines 22a and 22b by third and fourth via stacks 23a and 23b.
  • the conductive fusible links 14, first and second conductive support bars 12a and 12b, and first and second metal lines 22a and 22b are all located at the same metal level, which is referred to as the first metal level herein, while the first and second conductive pads 20a and 20b are located at a different metal level, which is referred to as the second metal level hereinafter.
  • the second metal level can locate either below the first metal level, as shown in Figure 1, or above the first metal level, which is to be shown in Figures 3-4 hereinafter.
  • the first metal level is the last copper level in the IC chip, while the second metal level is the second last copper level below the last copper level.
  • the conductive fusible links 14, the first and second conductive support bars 12a and 12b, the first and second conductive pads 20a and 20b, and the first and second metal lines 22a and 22b all comprise copper or a copper alloy.
  • the first metal level is the last copper level in the IC chip, while the second metal level is the aluminum wiring level above the last copper level.
  • the conductive fusible links 14, the first and second conductive support bars 12a and 12b, and the first and second metal lines 22a and 22b comprise copper or a copper alloy, while the first and second conductive pads 20a and 20b comprise aluminum or aluminum alloy.
  • the conductive fusible links 14 are preferably characterized by one or more dimensional parameters selected from the group consisting of a length of at least about 8 ⁇ m, a width of not more than about 2 ⁇ m, and a thickness of not more than about 2 ⁇ m. More preferably, the conductive fusible links 14 have a length of at least about 12 ⁇ m, a width of not more than about 1 ⁇ m, and a thickness of not more than about 1.5 ⁇ m. Note that conventional laser fuses typically have fusible links that are about 8 ⁇ m long. Therefore, the conductive fusible links 14 of the laser fuse 10 of the present invention are significantly longer than those of the conventional laser fuses.
  • the conductive fusible links 14 are preferably spaced apart from one another by a distance of not more than about 2 ⁇ m, more preferably not more than about 1.5 ⁇ m, and most preferably about 1 ⁇ m.
  • conventional laser fuses in similar thickness range typically have fusible links that are spaced apart from one another by a distance of at least about 6 to 9 ⁇ m. Therefore, the conductive fusible links 14 of the laser fuse 10 of the present invention are spaced apart from one another by a distance that is significantly narrower than that of the conventional laser fuses.
  • one of the first and second metal lines 22a and 22b of the laser fuse is connected to a functional part of the IC chip (not shown) , such as a functional circuit or element, and the other of the first and second metal lines 22a and 22b is connected to a power plane of the IC chip (not shown) .
  • the laser fuse structure of the present invention can be blown by one or more laser beams to disconnect the non-functional part from the power plane of the IC chip, thereby avoiding unnecessary power drain and minimizing the power consumption of the IC chip.
  • the functional part of the IC chip to which the first or second metal line 22a or 22b is connected operates at a high operating current of not less than 30 mA.
  • the laser fuse structure of the present invention has a current capacity of not less than 30 mA, so it can be readily used with the high power functional part of the IC chip. Note that the current is typically limited by the width and number of fuse links .
  • the first and second conductive support bars 12a and 12b provide structural support for the conductive fusible links 14, and also provide electrical connection between the conductive fusible links 14 and the first and second via stacks 18a and 18b. In this manner, the conductive fusible links 14 are no longer directly connected one-to-one with the conductive vias contained in the via stacks 18a and 18b, and the number of conductive vias contained by the first and second via stacks 18a and 18b are no longer limited by the number of conductive fusible links 14.
  • the first and second via stacks 18a and 18b may contain any number of conductive vias, either the same as, or different from, the number of conductive fusible links 14, and the conductive vias can be arranged in any manner, i.e., into a vertical column, a horizontal row, or multiple rows and columns.
  • the conductive vias contained by the via stacks 18a, 18b, 23a, and 23b may comprise any suitable conductive material (s). Preferably, they comprise one or more self-passivated electrically conducting materials selected from the group consisting of Al, W, and combinations thereof.
  • Figure 2 shows a cross-sectional view of the laser fuse of Figure 1.
  • the conductive fusible links 14, the first and second conductive support bars 12a and 12b, and the first and second metal lines 22a and 22b are all located at the first metal level 3, which is the last copper level of the IC chip and which is embedded in the last level inter-level dielectric
  • first and second conductive pads 20a and 20b are located at a second, different metal level 4, which is the second last copper level of the IC chip and which is embedded in the second last ILD layer 2.
  • the conductive vias contained by the via stacks 18a, 18b, 23a, and 23b extend between the first and second metal levels 3 and 4.
  • one or more interstitial cavities are preferably provided at either side or both sides of the conductive fusible links 14. Such one or more interstitial cavities may be provided only in the ILD layer 1, or extend through the ILD layers 1 and 2.
  • Figure 3 shows another laser fuse structure according to an alternative embodiment of the present invention, which contains multiple parallel arranged conductive fusible links 14 located between and directly connecting first and second conductive support bars 12a and 12b.
  • the first and second conductive support bars 12a and 12b are respectively connected to first and second conductive pads 30a and 30b by first and second via stacks 32a and 32b.
  • the first and second conductive pads 30a and 30b are then respectively connected to first and second metal lines 22a and 22b by third and fourth via stacks 33a and 33b.
  • the conductive fusible links 14, first and second conductive support bars 12a and 16b, and first and second metal lines 22a and 22b are all located at the same first metal level, while the first and second conductive pads 30a and 30b are located at a second, different metal level above the first metal level, as shown in Figure 3.
  • Figure 4 shows another laser fuse having a similar structure as the laser fuse of Figure 3, except that the conductive vias in the via stacks 32a, 32b, 33a, and 33b are arranged in a 2x2 square, not in a vertical column as in Figure 3, and that one or more interstitial cavities 34 are provided at both sides of the conductive fusible links 14, so as to prevent or reduce damage to the ILD layer in which the conductive fusible links 14 are embedded during the fuse blowing process.
  • the laser fuse structure of the present invention can be readily blown or deleted by one or more laser beams having an energy level of from about 0.5 ⁇ j to about 2.5 ⁇ j , more preferably from about 0.9 ⁇ j to about 2.3 ⁇ j , and most preferably about 2.0 ⁇ j .
  • the laser beam may contain a single laser spot or multiple laser spots having a diameter ranging from about 1.0 ⁇ m to about 5.0 ⁇ m, more preferably from about 2.0 ⁇ m to about 4.0 ⁇ m, and most preferably about 4.0 ⁇ m.
  • the laser beam contains multiple laser spots
  • such multiple laser spots are preferably spaced apart from one another by a distance ranging from about 0.5 ⁇ m to about 5.0 ⁇ m, more preferably from about 1.0 ⁇ m to about 3.5 ⁇ m, and most preferably about 2.0 ⁇ m.
  • Figures 5A and 5B show the before- and after-programming photographs of multiple laser fuses of the present invention, which are programmed by laser beams that have an energy level of about 1.0 ⁇ j and contain two 4.0 ⁇ m laser spots spaced apart from each other by about 1 ⁇ m.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Fuses (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

The present invention relates to a laser fuse structure for high power applications. Specifically, the laser fuse structure of the present invention comprises first and second conductive supporting elements (12a, 12b) , at least one conductive fusible link (14) , first and second connection elements (20a, 20b) , and first and second metal lines (22a, 22b) . The conductive supporting elements (12a, 12b) , the conductive fusible link (14) , and the metal lines (22a, 22b) are located at a first metal level (3) , while the connect elements (20a, 20b) are located at a second, different metal level (4) and are connected to the conductive supporting elements (12a, 12b) and the metal lines (22a, 22b) by conductive via stacks (18a, 18b, 23a, 23b) that extend between the first and second metal levels (3, 4).

Description

LASER FUSE STRUCTURES FOR HIGH POWER APPLICATIONS
Field of the Invention
The present invention relates to the design of a laser fuse for high power applications. More specifically, the present invention relates to a laser fuse that can be used in an integrated circuit (IC) chip for connecting/disconnecting various functional circuits to/from power planes of the IC chip.
Background of the Invention
The current trend in semiconductor manufacturing is to fabricate integrated circuit (IC) chips having reduced sizes. As such, the functional circuits containing such IC chips continue to increase in complexity. This increases the opportunity for defective chips resulting from a failed element or a defective conductor. One solution for this problem is to provide redundant circuits or redundant elements on the IC chips. For example, if a primary circuit or element becomes defective, a redundant circuit or element can be used to substitute for that defective circuit or element, which involves logic de-activation of the defective circuit or element and activation of the redundant circuit or element. One major disadvantage of the logic de-activation approach is that the defective circuit or element are still tied to the power planes of the IC chips and continue to drain power from the IC chips after the logic de-activation, which can cause functional chips to be rejected due to violations of predetermined power specifications, especially in low power logic applications.
There is therefore a need for physically and permanently canceling the defective circuits and elements and separating them from the power planes of the IC chips.
Further, advances in IC chip manufacturing technology have allowed a continuously increasing number of functionalities to be implemented on a single IC chip, and much effort has been devoted to streamline and reduce IC chip part numbers that have proliferated due to the multitudes of various customer applications. Tremendous cost savings can be realized if a "one-chip-fits-all" model is provided for the IC chip manufacturing process, and custom-modification or "personalization" of the IC chips is carried out post-manufacturing for tailoring the functionalities of the IC chips according to the specific customer application. Currently, the custom-modification or personalization is conducted at the logic level through logic activation and de-activation of various functional circuits or elements. However, after the logic custom-modification or personalization, the un-used circuits or elements are still tied to the power planes of the IC chips and continue to drain power from the IC chips. Such un-used circuits or elements can also cause the chips to be rejected due to violations of predetermined power specifications, especially in low power logic applications.
There is therefore also a need for providing custom-modification or personalization of IC chips at the wafer level so as to completely eliminate the un-used circuits or elements, separate them from the chip power planes, and reduce the overall chip loading.
Laser fuses have been used for permanently canceling defective circuits or elements and for custom-modifying/personalizing the IC chips in low power applications, which are typically characterized by low voltage drops (approximately in the order of about 0. IV) and low duty cycle limits (approximately in the order of about 0.001%) . Use of currently available laser fuses in high power applications characterized by high voltage drops (in the order of at least about 2V) and high duty cycles (approximately in the order of at least about 100%) , on the other hand, have resulted in reliability failures due to fuse regrowth under high voltage and high duty cycle conditions.
It would therefore be advantageous to provide improved laser fuse structures that have high current capability and are suitable for use in high power applications.
Summary of the Invention
The present invention, in one aspect, relates to a laser fuse structure, comprising :
first and second conductive supporting elements located at a first metal level of an integrated circuit (IC) chip in a spaced-apart relationship;
at least one conductive fusible link located at the first metal level between the first and second conductive supporting elements for directly connecting same; first and second connection elements located at a second, different metal level of the IC chip, wherein the first and second conductive support elements are respectively connected to the first and second connection elements by first and second via stacks that each comprises one or more conductive vias extending between the first and second metal levels; and
first and second metal lines located at the first metal level, wherein the first and second connection elements are respectively connected to the first and second metal lines by third and fourth via stacks that each comprises one or more conductive vias extending between the first and second metal levels.
In another aspect, the present invention relates to a method for programming the above-described laser fuse structure, by applying at least one laser beam that has an energy level ranging from about 0.5 μj to about 2.5 μj to the conductive fusible link of the laser fuse structure.
In yet another aspect, the present invention relates to an integrated circuit (IC) chip that comprises the above-described laser fuse structure, where the first metal level of the laser fuse structure is the last copper level of the IC chip.
A further aspect of the present invention relates to an IC chip that comprises a laser fuse that includes a single fusible link or multiple fusible links arranged in parallel and is located at the last metal level of the IC chip. Specifically, one side of the laser fuse is connected to a functional part of the IC chip, and the other side of the laser fuse is connected to a power bus of the IC chip.
In a still further aspect, the present invention relates to a method for programming the above-described IC chip by applying at least one laser beam that has an energy level ranging from about 0.5 μj to about 2.5 μj to the laser fuse.
Other aspects, features and advantages of the invention will be more fully apparent from the ensuing disclosure and appended claims.
Brief Description of the Drawings
The present invention will now be described, by way of example only, with reference to the accompanying drawings in which: Figure 1 shows a top view of an exemplary laser fuse, according to one embodiment of the present invention;
Figure 2 shows a cross-sectional view of the exemplary laser fuse of Figure 1 ;
Figures 3-4 shows top views of various exemplary laser fuses, according to further embodiments of the present invention;
Figure 5A shows a photographic view of multiple intact laser fuses, according to one embodiment of the present invention; and
Figure 5B shows a photographic view of the laser fuses of Figure 5 after being irradiated by laser beams.
Detailed Description of the Invention and Preferred Embodiments Thereof
In the following description, numerous specific details are set forth, such as particular structures, components, materials, dimensions, processing steps and techniques, in order to provide a thorough understanding of the present invention. However, it will be appreciated by one of ordinary skill in the art that the invention may be practiced without these specific details. In other instances, well-known structures or processing steps have not been described in detail in order to avoid obscuring the invention.
It will be understood that when an element as a layer, region or substrate is referred to as being "on" or "over" another element, it can be directly on or over the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly over" another element, there are no intervening elements present. It will also be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may be present. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intervening elements present.
The present invention provides laser fuse designs that can be readily integrated into the back-end-of-line (BEOL) complementary metal-oxide-semiconductor (CMOS) part of an integrated circuit (IC) chip for connecting/disconnecting various functional components on the IC chip to/from the power planes of the IC chip. Moreover, the laser fuses of the present invention have sufficiently high current capacity (>. about 30 mA) and are particularly suitable for high power applications.
Specifically, the laser fuses of the present invention each contains one or more conductive fusible links that are located between and supported by two conductive supporting elements at the last copper level in an IC chip. The conductive supporting elements of the laser fuse are electrically connected to out-going wires or metal lines through connection elements that are located at a different metal level, to achieve complete physical separation and isolation of the laser fuse from out-going wires or metal lines. For example, the connection elements can locate at the second last copper level in the IC chip. Alternatively, the connection elements can locate at an aluminum wiring level above the last copper level in the IC chip.
Further, the laser fuses of the present invention each is characterized by one or more dimensional parameters, such as the length, width, and thickness of the fusible links contained by the laser fuse and the distance there between, which contribute to the high current capacity and high reliability of the laser fuse and make it particularly suitable for high power applications.
Exemplary laser fuses of the present invention will now be illustrated in greater detail by referring to the accompanying Figures 1-5B. Note that in these drawings, which are not drawn to scale, like and/or corresponding elements are referred to by like reference numerals. It is further noted that although a specific number of fusible links and contacts are shown in the exemplary laser fuses shown by such drawings, the present invention is not so limited and is intended to cover laser fuses with any specific number of fusible links and contacts.
Reference is first made to Figure 1, which shows a top view of a laser fuse structure that contains multiple parallely arranged conductive fusible links 14 and located between and directly connecting first and second conductive support bars 12a and 12b. The first and second conductive support bars 12a and 12b are respectively connected to first and second conductive pads 20a and 20b by first and second via stacks 18a and 18b. The first and second conductive pads 20a and 20b are then respectively connected to first and second metal lines 22a and 22b by third and fourth via stacks 23a and 23b.
The conductive fusible links 14, first and second conductive support bars 12a and 12b, and first and second metal lines 22a and 22b are all located at the same metal level, which is referred to as the first metal level herein, while the first and second conductive pads 20a and 20b are located at a different metal level, which is referred to as the second metal level hereinafter. The second metal level can locate either below the first metal level, as shown in Figure 1, or above the first metal level, which is to be shown in Figures 3-4 hereinafter.
In a preferred embodiment of the present invention, the first metal level is the last copper level in the IC chip, while the second metal level is the second last copper level below the last copper level. In this embodiment, the conductive fusible links 14, the first and second conductive support bars 12a and 12b, the first and second conductive pads 20a and 20b, and the first and second metal lines 22a and 22b all comprise copper or a copper alloy.
In an alternative, but equally preferred, embodiment of the present invention, the first metal level is the last copper level in the IC chip, while the second metal level is the aluminum wiring level above the last copper level. In this alternatively embodiment, the conductive fusible links 14, the first and second conductive support bars 12a and 12b, and the first and second metal lines 22a and 22b comprise copper or a copper alloy, while the first and second conductive pads 20a and 20b comprise aluminum or aluminum alloy.
The conductive fusible links 14 are preferably characterized by one or more dimensional parameters selected from the group consisting of a length of at least about 8 μm, a width of not more than about 2 μm, and a thickness of not more than about 2 μm. More preferably, the conductive fusible links 14 have a length of at least about 12 μm, a width of not more than about 1 μm, and a thickness of not more than about 1.5 μm. Note that conventional laser fuses typically have fusible links that are about 8 μm long. Therefore, the conductive fusible links 14 of the laser fuse 10 of the present invention are significantly longer than those of the conventional laser fuses.
Further, the conductive fusible links 14 are preferably spaced apart from one another by a distance of not more than about 2 μm, more preferably not more than about 1.5 μm, and most preferably about 1 μm. Note that conventional laser fuses in similar thickness range typically have fusible links that are spaced apart from one another by a distance of at least about 6 to 9 μm. Therefore, the conductive fusible links 14 of the laser fuse 10 of the present invention are spaced apart from one another by a distance that is significantly narrower than that of the conventional laser fuses.
In a specific embodiment of the present invention, one of the first and second metal lines 22a and 22b of the laser fuse is connected to a functional part of the IC chip (not shown) , such as a functional circuit or element, and the other of the first and second metal lines 22a and 22b is connected to a power plane of the IC chip (not shown) . In this manner, and if the functional part of the IC chip becomes non-functional, the laser fuse structure of the present invention can be blown by one or more laser beams to disconnect the non-functional part from the power plane of the IC chip, thereby avoiding unnecessary power drain and minimizing the power consumption of the IC chip.
Preferably, the functional part of the IC chip to which the first or second metal line 22a or 22b is connected operates at a high operating current of not less than 30 mA. The laser fuse structure of the present invention has a current capacity of not less than 30 mA, so it can be readily used with the high power functional part of the IC chip. Note that the current is typically limited by the width and number of fuse links .
The first and second conductive support bars 12a and 12b provide structural support for the conductive fusible links 14, and also provide electrical connection between the conductive fusible links 14 and the first and second via stacks 18a and 18b. In this manner, the conductive fusible links 14 are no longer directly connected one-to-one with the conductive vias contained in the via stacks 18a and 18b, and the number of conductive vias contained by the first and second via stacks 18a and 18b are no longer limited by the number of conductive fusible links 14.
Correspondingly, the first and second via stacks 18a and 18b may contain any number of conductive vias, either the same as, or different from, the number of conductive fusible links 14, and the conductive vias can be arranged in any manner, i.e., into a vertical column, a horizontal row, or multiple rows and columns. The conductive vias contained by the via stacks 18a, 18b, 23a, and 23b may comprise any suitable conductive material (s). Preferably, they comprise one or more self-passivated electrically conducting materials selected from the group consisting of Al, W, and combinations thereof.
Figure 2 shows a cross-sectional view of the laser fuse of Figure 1. The conductive fusible links 14, the first and second conductive support bars 12a and 12b, and the first and second metal lines 22a and 22b are all located at the first metal level 3, which is the last copper level of the IC chip and which is embedded in the last level inter-level dielectric
(ILD) layer 1. In contrast, the first and second conductive pads 20a and 20b are located at a second, different metal level 4, which is the second last copper level of the IC chip and which is embedded in the second last ILD layer 2. The conductive vias contained by the via stacks 18a, 18b, 23a, and 23b extend between the first and second metal levels 3 and 4.
In order to reduce damage or cracking of the ILD layers during fuse blowing, one or more interstitial cavities (not shown) are preferably provided at either side or both sides of the conductive fusible links 14. Such one or more interstitial cavities may be provided only in the ILD layer 1, or extend through the ILD layers 1 and 2.
Figure 3 shows another laser fuse structure according to an alternative embodiment of the present invention, which contains multiple parallel arranged conductive fusible links 14 located between and directly connecting first and second conductive support bars 12a and 12b. The first and second conductive support bars 12a and 12b are respectively connected to first and second conductive pads 30a and 30b by first and second via stacks 32a and 32b. The first and second conductive pads 30a and 30b are then respectively connected to first and second metal lines 22a and 22b by third and fourth via stacks 33a and 33b. The conductive fusible links 14, first and second conductive support bars 12a and 16b, and first and second metal lines 22a and 22b are all located at the same first metal level, while the first and second conductive pads 30a and 30b are located at a second, different metal level above the first metal level, as shown in Figure 3.
Figure 4 shows another laser fuse having a similar structure as the laser fuse of Figure 3, except that the conductive vias in the via stacks 32a, 32b, 33a, and 33b are arranged in a 2x2 square, not in a vertical column as in Figure 3, and that one or more interstitial cavities 34 are provided at both sides of the conductive fusible links 14, so as to prevent or reduce damage to the ILD layer in which the conductive fusible links 14 are embedded during the fuse blowing process.
The laser fuse structure of the present invention can be readily blown or deleted by one or more laser beams having an energy level of from about 0.5 μj to about 2.5 μj , more preferably from about 0.9 μj to about 2.3 μj , and most preferably about 2.0 μj . The laser beam may contain a single laser spot or multiple laser spots having a diameter ranging from about 1.0 μm to about 5.0 μm, more preferably from about 2.0 μm to about 4.0 μm, and most preferably about 4.0 μm. If the laser beam contains multiple laser spots, such multiple laser spots are preferably spaced apart from one another by a distance ranging from about 0.5 μm to about 5.0 μm, more preferably from about 1.0 μm to about 3.5 μm, and most preferably about 2.0 μm.
Figures 5A and 5B show the before- and after-programming photographs of multiple laser fuses of the present invention, which are programmed by laser beams that have an energy level of about 1.0 μj and contain two 4.0 μm laser spots spaced apart from each other by about 1 μm.
While Figures 1-5B illustratively demonstrate exemplary laser fuse structures, according to specific embodiments of the present invention, it is clear that a person ordinarily skilled in the art can readily modify the laser fuse structures illustrated herein, for adaptation to specific application requirements, consistent with the above descriptions. It should therefore be recognized that the present invention is not limited to the specific embodiment illustrated heremabove, but rather extends in utility to any other modification, variation, application, and embodiment, and accordingly all such other modifications, variations, applications, and embodiments are to be regarded as being within the scope of the invention.

Claims

1. A laser fuse structure, comprising: first and second conductive supporting elements located at a first metal level of an integrated circuit (IC) chip in a spaced-apart relationship; at least one conductive fusible link located at the first metal level between the first and second conductive supporting elements for directly connecting same; first and second connection elements located at a second, different metal level of the IC chip, wherein the first and second conductive support elements are respectively connected to said first and second connection elements by first and second via stacks that each comprises one or more conductive vias extending between the first and second metal levels; and first and second metal lines located at the first metal level, wherein the first and second connection elements are respectively connected to said first and second metal lines by third and fourth via stacks that each comprises one or more conductive vias extending between the first and second metal levels.
2. The laser fuse structure of claim 1, wherein the first metal level is the last copper level of the IC chip.
3. The laser fuse structure of claim 2, wherein the second, different metal level is the second last copper level located underneath the last copper level.
4. The laser fuse structure of claim 2, wherein the second, different metal level is an aluminum wiring level located over the last copper level .
5. The laser fuse structure of claim 1, wherein one of the first and second metal lines is connected to a functional part of the IC chip, and wherein the other of the first and second metal lines is connected to a power plane of the IC chip.
6. The laser fuse structure of claim 5, wherein the functional part of the IC chip has an operating current of not less than 30 mA, and wherein the laser structure is characterized by a current capacity of not less than 30 mA.
7. The laser fuse structure of claim 1, wherein the at least one conductive fusible link is characterized by one or more dimensional parameters selected from the group consisting of a length of at least about 8 μm, a width of not more than about 2 μm, and a thickness of not more than about 2 μm.
8. The laser fuse structure of claim 1, wherein the at least one conductive fusible link is characterized by one or more dimensional parameters selected from the group consisting of a length of at least about 12 μm, a width of not more than about 1 μm, and a thickness of not more than about 1.5 μm.
9. The laser fuse structure of claim 1, comprising multiple conductive fusible links arranged in parallel and spaced apart from one another by a distance of not more than 2 μm.
10. The laser fuse structure of claim 1, comprising multiple conductive fusible links arranged in parallel and spaced apart from one another by a distance of not more than 1.5 μm.
11. The laser fuse structure of claim 1, wherein the conductive vias contained in the first and second via stacks comprise self-passivated electrically conducting material (s) selected from the group consisting of Al, W, and combination thereof.
12. The laser fuse structure of claim 1, wherein the first metal level is embedded in an inter-level insulator layer that contains one or more interstitial cavities at either side or both sides of the at least one conductive fusible link.
13. A method for programming the laser fuse structure of claim 1, comprising applying at least one laser beam having an energy level ranging from about 0.5 μj to about 2.5 μj to the at least one conductive fusible link.
14. An integrated circuit (IC) chip comprising the laser fuse structure of claim 1, wherein the first metal level is the last copper level of the IC chip.
15. An integrated circuit (IC) chip, comprising a laser fuse including a single fusible link or multiple fusible links arranged in parallel, wherein said laser fuse is located at the last metal level of said IC chip, wherein one side of said laser fuse is connected to a functional part of the IC chip, and wherein the other side of said laser fuse is connected to a power bus of the IC chip.
16. The IC chip of claim 15, wherein the functional part of the IC chip has an operating current of not less than 30 mA, and wherein the laser structure is characterized by a current capacity of not less than 30 mA.
17. The IC chip of claim 15, wherein the fusible link(s) of the laser fuse is characterized by one or more dimensional parameters selected from the group consisting of length of at least about 12 μm, a width of not more than about 1 μm, and a thickness of not more than about 1.5 μm.
18. The IC chip of claim 15, wherein the laser fuse comprises multiple fusible links that are arranged in parallel and spaced apart from one another by a distance of not more than 1.5 μm.
19. A method for programming the IC chip of claim 15, comprising applying at least one laser beam having an energy level ranging from about 0.5 μj to about 2.5 μj to the laser fuse.
20. A method of claim 19, wherein the at least one laser beam is applied after the functional part of the IC chip becomes non-functional.
PCT/EP2006/068939 2005-11-30 2006-11-27 Laser fuse structures for high power applications WO2007063044A2 (en)

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KR1020087010738A KR101055874B1 (en) 2005-11-30 2006-11-27 Laser Fuse Architecture for High Power Applications
CN200680045051XA CN101322244B (en) 2005-11-30 2006-11-27 Laser fuse structures for high power applications and fusing method
JP2008542742A JP2009517875A (en) 2005-11-30 2006-11-27 Laser fuse structure for high power applications
EP06819770.6A EP1955373B1 (en) 2005-11-30 2006-11-27 Laser fuse structures for high power applications

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US7701035B2 (en) 2010-04-20
US20070120232A1 (en) 2007-05-31
CN101322244B (en) 2012-01-04
EP1955373B1 (en) 2013-05-29
JP2009517875A (en) 2009-04-30
CN101322244A (en) 2008-12-10
KR101055874B1 (en) 2011-08-09
EP1955373A2 (en) 2008-08-13
WO2007063044A3 (en) 2007-11-08

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