WO2002099324A1

WO2002099324A1 - Four-way valve

Info

Publication number: WO2002099324A1
Application number: PCT/JP2002/005167
Authority: WO
Inventors: Toshihiro Hanada; Wataru Inoue
Original assignee: Asahi Organic Chemicals Industry Co., Ltd.
Priority date: 2001-05-31
Filing date: 2002-05-28
Publication date: 2002-12-12
Also published as: JP2002357274A; JP4721560B2; TW520428B

Abstract

A four-way valve, comprising a body having a main flow passage, a valve chamber, and a pair of branch flow passages and a cylinder body having a piston inserted therein, wherein the valve chamber is allowed to communicate with the main flow passage through a communication port having a valve seat, the branch flow passage is formed so that the lowest part of the inner diameter thereof is flush with the bottom surface of the valve chamber, a rod part having a valve element at the tip thereof is projectedly provided on the lower surface of the piston, the valve element is connected to a diaphragm supported by the body, and a pair of working fluid feed ports for vertically moving the piston are provided in the cylinder body.

Description

Description Four-way valve Technical field

The present invention relates to a four-way valve having a main flow path and a branch flow path, and more particularly to a four-way valve having excellent sealing performance and excellent flow characteristics. Background art

Conventionally, a slurry line in the semiconductor industry ゃ a line that supplies fluid from the main flow path in various chemical liquid lines to prevent problems such as slurry aggregation and sticking and precipitation of crystals. There was a case where a line for washing was provided. As a general method, there were a method of combining two two-way valves and two cheeses as shown in FIG. 7, and a method of combining a three-way valve, two-way valve and cheese as shown in FIG. However, in the former method, the problem that the chemical solution stays in the flow path from the cheese 48 to the two-way valve 50 and the problem that the flow path from the two-way valve 50 to the cheese 49 is not sufficiently cleaned in FIG. was there. Also, in the latter method, the flow path from the three-way valve 60 to the cheese 55 was not sufficiently cleaned, which was a problem.

As a solution to these problems, a four-way valve as shown in Figure 6 has been proposed. According to FIG. 6, reference numeral 38 denotes a main body, which has a main flow path 39 at a lower part and a valve chamber 41 at an upper part. The upper part of the main flow path 39 and the center of the bottom surface of the valve chamber 41 communicate with each other through a communication port 40, and a corner of the opening of the communication port 40 on the valve chamber side is a valve seat part 44. On the side of the body 38, two branch channels 42, 43 are connected so as to communicate with the outer periphery of the bottom surface of the valve chamber 41, respectively. Is provided. Since the main channel 39 and the branch channels 42, 43 are formed at substantially the same height, the branch channels 42, 43 are substantially L-shaped. The valve is opened and closed by pressing and separating the valve body 46 provided at the center of the lower end of the diaphragm 45 from the valve seat 44 by operating the drive unit 47 connected to the upper part of the main body 38. Will be

Figure 9 shows how to use this four-way valve. According to FIG. 9, the fluid stays between the two-way valve 61 and the four-way valve 65 while the two-way valve 61 is closed and the four-way valve 65 is opened to supply and branch the fluid from the main flow path 62. However, if the main flow paths 62 and 62 are closed by the four-way valve 65 and the two-way valve 61 is opened for washing, the retained fluid is pushed downstream and the four-way valve 6 5 and the branch channel 63 can be washed.

However, in such a four-way valve, the branch flow path has an L-shape, so that the flow of fluid is curved and the flow characteristics are poor when the valve is open or closed, and the valve chamber is large because the valve chamber is large. There was also a problem that it took time to completely drain the remaining chemical solution. Further, when cleaning the branch flow path by closing the valve, the diaphragm is pushed upward by the pressure of the cleaning liquid, the valve body and the valve seat are separated, and the cleaning liquid leaks into the main flow path, or There was also a problem when the chemical solution leaked into the branch channel. Disclosure of the invention

The present invention has been made in view of the above problems of the related art, and has as its object to provide a four-way valve having excellent sealing performance and excellent flow characteristics.

In order to achieve the above object, a four-way valve according to the present invention comprises a main body having a main flow passage, a valve chamber, and a pair of branch flow passages, and a biston slidably fitted therein in a sealed state. A cylinder body having a The main flow path is linearly arranged at the lower part of the main body, and the valve chamber is formed by a communication port provided perpendicularly to the main flow path. The branch passage is formed so that the lowermost position of the inner diameter thereof is substantially flush with the bottom surface of the valve chamber, A rod portion slidably supported on the bottom of the cylinder main body protrudes at the center of the lower surface of the cylinder, and a valve body which is pressed into contact with and separated from the valve seat is provided at the tip of the rod portion. The valve body is connected to a diaphragm sandwiched between the main body and the cylinder portion, and a pair of working fluid supply ports for moving the piston up and down is provided on a side surface of the cylinder main body. It is characterized by being provided.

In a preferred embodiment of the present invention, in the four-way valve, a spring is disposed between the upper surface of the piston and the lower surface of the cylinder lid so as to urge the biston downward.

In another preferred embodiment of the present invention, a panel is disposed between the lower surface of the piston and the bottom surface of the cylinder in the four-way valve so as to urge the biston upward.

Further, in the four-way valve, a pair of branch flow paths are provided in a direction orthogonal to the main flow path. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a longitudinal sectional view showing a closed state of the four-way valve of the present invention.

FIG. 2 is a longitudinal sectional view showing an open state of the four-way valve of FIG.

FIG. 3 is a perspective view of the main body of the four-way valve of FIG.

FIG. 4 is a longitudinal sectional view showing a second embodiment of the four-way valve of the present invention. FIG. 5 is a longitudinal sectional view showing a third embodiment of the four-way valve of the present invention. FIG. 6 is a partial cross-sectional view showing a closed state of a conventional four-way valve. FIG. 7 is an external view showing a chemical liquid branch supply line using a two-way valve. FIG. 8 is an external view showing a chemical liquid branch supply line using a three-way valve. FIG. 9 is an external view showing a chemical branch supply line using a four-way valve. BEST MODE FOR CARRYING OUT THE INVENTION

An embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a longitudinal sectional view showing a closed state of the four-way valve of the present invention. FIG. 2 is a longitudinal sectional view showing an open state of the four-way valve of FIG. FIG. 3 is a perspective view of the main body of FIG. FIG. 4 is a longitudinal sectional view showing a second embodiment of the four-way valve of the present invention. FIG. 5 is a longitudinal sectional view showing a third embodiment of the four-way valve of the present invention.

In the figure, reference numeral 1 denotes a main body, which has a main passage 6 at a lower portion, and a valve chamber 8 communicated at an upper portion with a communication port 7 provided perpendicularly to the main flow passage 6. The periphery of the opening is a valve seat 20. The valve chamber 8 is larger than the opening of the communication port 7 and the outer diameter of the valve element 17 (see FIG. 3). When the valve is closed, the cleaning liquid flows through the branch flow paths 9 and 10 to open the valve chamber. Room 8 can be cleaned. A pair of branch passages 9 and 10 communicating with the valve chamber 8 are provided on the upper side surface of the main body 1 in a direction orthogonal to the main passage 6. The branch flow paths 9 and 10 are formed such that the lowermost position of the inner diameter thereof is substantially flush with the bottom surface of the valve chamber 8. The branch flow paths 9 and 10 may be provided in parallel with the main flow path 6, and in this case, the height of the main body 1 needs to be increased. In the present embodiment, a pair of joint portions 30 and 31 in which branch flow paths 9 and 10 are formed are integrally formed to protrude from the upper side surface of the main body 1 (see FIG. 1). . To fix the piping tube 35 to the main body 1, screw the female thread 34 of the cap nut 33 into the male thread 31 provided on the outer periphery of the joint 29, and attach the tip of the joint 29. 3 mated to 2 It is performed by a method of clamping and fixing the end of the pipe tube 35 thus formed. In addition, the structure for piping the four-way valve is not limited to this embodiment, and may be any structure as long as piping is possible.

Reference numeral 2 denotes a cylinder body, which has a cylindrical cylinder portion 11 inside and a cylindrical protrusion 12 on the lower surface, and penetrates the protrusion 12 from the center of the bottom surface of the cylinder portion 11. A through hole 13 is provided. An O-ring 27 is inserted into the inner peripheral surface of the through hole 13. Further, a pair of working fluid supply ports 23 and 24 are provided on the side surface of the cylinder body 2 above and below the cylinder portion 11 respectively.

Reference numeral 3 denotes a cylinder lid, which has a cylindrical projection 14 on the bottom surface of which an O-ring 28 is inserted, and which has an O-ring on the top of the cylinder 11. It is joined to the cylinder body 2 by bolts and nuts (not shown) by being inserted through 28.

Reference numeral 4 denotes a screw having an O-ring 26 fitted on the outer peripheral surface thereof. The O-ring 26 can be slid up and down on the cylinder portion 11 of the cylinder body 2 via the O-ring 26. It is inserted. In the center of the lower end surface, a rod part 15 is provided in the body so as to slidably penetrate through the through hole 13 of the cylinder body 2, and a tip part of the rod part 15 is provided. Is provided with a joint 16 to which the valve element 17 of the diaphragm 5 is joined. Also, an upper gap 21 is formed by the upper surface of the piston 4, the inner peripheral surface of the cylinder portion 11, and the lower surface of the cylinder lid 3, and the lower surface of the piston 4 and the rod portion 15 are formed. A lower gap 22 is formed by the outer peripheral surface and the inner peripheral surface and the bottom surface of the cylinder portion 11.

The diaphragm 5 is provided with a valve element 17 which is pressed into contact with and separated from the valve seat 20 of the valve chamber 8 on the center lower surface, and the valve element 17 is a rod of the piston 4. It is joined to the tip of part 15. A cylindrical film portion 18 is provided on the outer peripheral edge of the diaphragm 5 and further has a cylindrical film portion 1. An annular projecting portion 19 is provided on the outer periphery of the upper end of 8. The cylindrical membrane portion 18 is sandwiched between the inner peripheral surface of the valve chamber 8 of the main body 1 and the outer peripheral surface of the projection 12 of the cylinder main body 2, and the annular projection 19 is formed of a valve chamber. 8 is inserted into the step 25 provided at the upper part of the inner peripheral surface, and is clamped and fixed by the inner peripheral surface of the valve chamber 8 of the main body 1 and the outer peripheral surface of the projection 12 of the cylinder main body 2. . The shape of the diaphragm 7 is not limited to the present embodiment, but may be any shape having a film portion sandwiched between the main body 1 and the cylinder portion 11, and may be a bellows shape or the like.

In the present invention, since the members such as the main body have excellent chemical resistance and little leaching of impurities, polytetrafluoroethylene (hereinafter referred to as PTFE) {tetrafluoroethylene ethylene}. . Fluororesins such as funorolelo anolequinolebininole ether copolymer (hereinafter referred to as PFA) are preferably used, but other plastics or metals such as polyvinyl chloride and polypropylene are not particularly limited. As the material of the diaphragm, a fluororesin such as PTFE or PFA is preferably used, but rubber or metal is not particularly limited.

Next, the operation of the four-way valve of the present embodiment will be described.

FIG. 1 shows the closed state of the valve. At this time, the fluid is flowing through the main flow path 6 and not flowing into the branch flow paths 9 and 10. In this state, when a working fluid (for example, compressed air or the like) is externally injected into the lower space 22 from the working fluid supply port 24, the piston 4 is pushed up by the pressure of the working fluid, so that the piston 4 is pushed up. The port 15 joined to the valve 15 is pulled upward, and the valve element 17 joined to the lower end of the port 15 is also lifted upward away from the valve seat 20. Is in the open state (the state shown in FIG. 2), and the fluid flows out of the main flow path 6 to the branch flow paths 9 and 10. At this time, the pressure loss is small because the fluid flow is straight compared to the conventional valve. And excellent flow characteristics can be obtained.

On the other hand, when the working fluid is injected from the working fluid supply port 23 into the upper space 21 in the state of FIG. 2, the piston 4 is pushed down, and accordingly, the rod 15 and the The valve element 17 connected to the lower end is also pushed down and pressed against the valve seat 20 to close the valve (the state shown in FIG. 1).

When, for example, the cleaning liquid supply valve attached to the two branch flow paths is opened in the closed state of the valve (the state shown in Fig. 1), the fluid remaining in the valve chamber 8 is pushed out by the cleaning liquid, and the other branch flow path is opened. And the branch channel is washed. At this time, since the lowermost position of the inner diameter of the branch flow path is designed so as to be substantially flush with the bottom surface of the valve chamber 8, the flow path is linear, the pressure loss is small, the flow characteristics are excellent, and efficiency is improved The liquid medicine in the valve chamber can be discharged efficiently. Further, compared to the conventional valve, the valve chamber 8 is more compact and the pressure receiving area of the diaphragm 5 is also smaller, so that the diaphragm 5 is hard to be pushed upward even if the pressure of the cleaning liquid increases, and the valve 5 The problem that the cleaning liquid leaks out to the main flow path 6 when the body 17 is separated from the valve seat 20 or the chemical liquid in the main flow path 6 leaks out to the branch flow paths 9 and 10 is unlikely to occur.

FIG. 4 is a longitudinal sectional view showing a second embodiment of the present invention. The difference from the first embodiment is that a panel 36 is arranged in the upper space 21. Biston 4 is pushed down by the resilience of the panel, and the valve is closed. In this state, when a working fluid is externally injected from the working fluid supply port 24 into the lower space 22, the pressure of the working fluid pushes up the piston 4, so that the piston 4 is joined to the lower part. The valve part 15 is lifted upward, the valve element 17 joined to the lower end of the rod part 15 is also lifted upward, and the valve is opened, and the fluid flows from the main flow path 6 to the branch flow path 9, Flows out to 10 At this time, panel 3 6 is compressed However, if the working fluid in the lower gap 22 is discharged, the valve is closed again.

FIG. 5 is a longitudinal sectional view showing a third embodiment of the present invention. The difference from the first embodiment is that a panel 37 is arranged in the lower space 22. Biston 4 is pushed up by the rebound of panel 37, and the valve is open. In this state, when the working fluid is externally injected from the working fluid supply port 23 into the upper space 21, the pressure of the working fluid pushes down the screw 4, so that the port connected thereto is not used. The valve part 15 is pushed down, and the valve element 17 joined to the lower end of the rod part 15 is also pushed down and pressed against the valve seat 20 to close the valve and the main flow of fluid The flow from channel 6 to branch channels 9 and 10 is blocked. At this time, the spring 37 is compressed, but when the working fluid in the upper gap 21 is discharged, the valve is again opened, and the fluid flows from the main flow path 6 to the branch flow paths 9 and 10.

The present invention has a structure as described above, and the use of the structure has the following excellent effects.

(1) When the cleaning liquid flows through the branch flow path when fully closed, the branch flow path is formed into a shape with low pressure loss and excellent flow characteristics, that is, the flow path becomes linear, and remains in the valve chamber. The chemical solution can be efficiently cleaned and discharged, and as a result, the cleaning time of the branch channel can be significantly reduced.

(2) Since the valve chamber is compact and the pressure receiving area of the diaphragm is small, even if the pressure of the cleaning liquid increases, the diaphragm is not easily pushed upward, the valve body and the valve seat are separated, and the cleaning liquid flows to the main flow path. Problems such as leakage or leakage of the chemical in the main flow passage to the branch flow passage are less likely to occur.

(3) When the valve is fully open, the branch flow path is straight and has excellent flow characteristics, allowing more fluid to flow than conventional valves. It can also be used for chemical solutions containing.

(4) The use of fluororesins such as PTFE and PFA as the material of the main body and diaphragm increases chemical resistance and reduces elution of impurities into fluids. It can be suitably used for chemical liquid lines.

Claims

The scope of the claims

1. A main body having a main flow path, a valve chamber, and a pair of branch flow paths, a cylinder main body having a cylinder portion in which a piston is slidably inserted in a sealed state, and a cylinder main body. The main flow path is linearly arranged at the lower part of the main body, and the valve chamber is formed by a communication port provided perpendicularly to the main flow path. The branch passage is formed so that it is communicated with the main flow passage and an edge of the communication opening serves as a valve seat, and the lowermost position of the inner diameter of the branch flow passage is substantially flush with the bottom surface of the valve chamber. At the center of the lower surface of the tongue, a port portion slidably supported on the bottom of the cylinder body is protruded, and a valve body pressed and separated from the valve seat at the tip of the rod portion. The valve body is connected to a diaphragm sandwiched between the main body and the cylinder portion, and A four-way valve, wherein a pair of working fluid supply ports for moving the piston up and down is provided on a side surface of the cylinder body.

2. The four-way valve according to claim 1, wherein a panel is disposed between the upper surface of the biston and the lower surface of the cylinder lid so as to urge the biston downward.

3. The four-way valve according to claim 1, wherein a panel is arranged between the lower surface of the piston and the bottom surface of the cylinder so as to urge the rubber upward.

4. The four-way valve according to any one of claims 1 to 3, wherein a pair of branch flow paths are provided in a direction orthogonal to the main flow path.