USD849662S1 - Cylinder support system - Google Patents
Cylinder support system Download PDFInfo
- Publication number
- USD849662S1 USD849662S1 US29/641,843 US201829641843F USD849662S US D849662 S1 USD849662 S1 US D849662S1 US 201829641843 F US201829641843 F US 201829641843F US D849662 S USD849662 S US D849662S
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- US
- United States
- Prior art keywords
- support system
- cylinder support
- view
- system illustrated
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000007613 environmental effect Effects 0.000 description 1
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Description
In the drawings, the broken lines depict unclaimed environmental subject matter only and form no part of the claimed design.
The cut away portions in the drawings indicate that the appearance of any portion of the article between the cut away lines forms no part of the claimed design.
Claims (1)
- The ornamental design for a cylinder support system, as shown and described.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/641,843 USD849662S1 (en) | 2016-05-21 | 2018-03-26 | Cylinder support system |
| US29/678,488 USD868665S1 (en) | 2016-05-21 | 2019-01-29 | Cylinder support system |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/565,543 USD816010S1 (en) | 2016-05-21 | 2016-05-21 | Cylinder support system |
| US29/640,271 USD840908S1 (en) | 2016-05-21 | 2018-03-13 | Cylinder support system |
| US29/641,843 USD849662S1 (en) | 2016-05-21 | 2018-03-26 | Cylinder support system |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/640,271 Continuation-In-Part USD840908S1 (en) | 2016-05-21 | 2018-03-13 | Cylinder support system |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/678,488 Continuation USD868665S1 (en) | 2016-05-21 | 2019-01-29 | Cylinder support system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD849662S1 true USD849662S1 (en) | 2019-05-28 |
Family
ID=66592451
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/641,843 Active USD849662S1 (en) | 2016-05-21 | 2018-03-26 | Cylinder support system |
| US29/678,488 Active USD868665S1 (en) | 2016-05-21 | 2019-01-29 | Cylinder support system |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/678,488 Active USD868665S1 (en) | 2016-05-21 | 2019-01-29 | Cylinder support system |
Country Status (1)
| Country | Link |
|---|---|
| US (2) | USD849662S1 (en) |
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| US11488854B2 (en) | 2020-03-11 | 2022-11-01 | Asm Ip Holding B.V. | Substrate handling device with adjustable joints |
| US11492703B2 (en) | 2018-06-27 | 2022-11-08 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| US11495459B2 (en) | 2019-09-04 | 2022-11-08 | Asm Ip Holding B.V. | Methods for selective deposition using a sacrificial capping layer |
| US11499226B2 (en) | 2018-11-02 | 2022-11-15 | Asm Ip Holding B.V. | Substrate supporting unit and a substrate processing device including the same |
| US11499222B2 (en) | 2018-06-27 | 2022-11-15 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
| US11515188B2 (en) | 2019-05-16 | 2022-11-29 | Asm Ip Holding B.V. | Wafer boat handling device, vertical batch furnace and method |
| US11515187B2 (en) | 2020-05-01 | 2022-11-29 | Asm Ip Holding B.V. | Fast FOUP swapping with a FOUP handler |
| US11521851B2 (en) | 2020-02-03 | 2022-12-06 | Asm Ip Holding B.V. | Method of forming structures including a vanadium or indium layer |
| US11527400B2 (en) | 2019-08-23 | 2022-12-13 | Asm Ip Holding B.V. | Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane |
| US11527403B2 (en) | 2019-12-19 | 2022-12-13 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
| US11530483B2 (en) | 2018-06-21 | 2022-12-20 | Asm Ip Holding B.V. | Substrate processing system |
| US11530876B2 (en) | 2020-04-24 | 2022-12-20 | Asm Ip Holding B.V. | Vertical batch furnace assembly comprising a cooling gas supply |
| US11551912B2 (en) | 2020-01-20 | 2023-01-10 | Asm Ip Holding B.V. | Method of forming thin film and method of modifying surface of thin film |
| US11551925B2 (en) | 2019-04-01 | 2023-01-10 | Asm Ip Holding B.V. | Method for manufacturing a semiconductor device |
| US11557474B2 (en) | 2019-07-29 | 2023-01-17 | Asm Ip Holding B.V. | Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation |
| USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
| US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
| US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
| US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
| US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
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| US11594600B2 (en) | 2019-11-05 | 2023-02-28 | Asm Ip Holding B.V. | Structures with doped semiconductor layers and methods and systems for forming same |
| USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
| USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
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| US11610774B2 (en) | 2019-10-02 | 2023-03-21 | Asm Ip Holding B.V. | Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process |
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| US11615970B2 (en) | 2019-07-17 | 2023-03-28 | Asm Ip Holding B.V. | Radical assist ignition plasma system and method |
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| US11629407B2 (en) | 2019-02-22 | 2023-04-18 | Asm Ip Holding B.V. | Substrate processing apparatus and method for processing substrates |
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| US11646184B2 (en) | 2019-11-29 | 2023-05-09 | Asm Ip Holding B.V. | Substrate processing apparatus |
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| US11658035B2 (en) | 2020-06-30 | 2023-05-23 | Asm Ip Holding B.V. | Substrate processing method |
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| US11658030B2 (en) | 2017-03-29 | 2023-05-23 | Asm Ip Holding B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
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| US11664199B2 (en) | 2018-10-19 | 2023-05-30 | Asm Ip Holding B.V. | Substrate processing apparatus and substrate processing method |
| US11664245B2 (en) | 2019-07-16 | 2023-05-30 | Asm Ip Holding B.V. | Substrate processing device |
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| US11680839B2 (en) | 2019-08-05 | 2023-06-20 | Asm Ip Holding B.V. | Liquid level sensor for a chemical source vessel |
| USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
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| US11688603B2 (en) | 2019-07-17 | 2023-06-27 | Asm Ip Holding B.V. | Methods of forming silicon germanium structures |
| USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
| US11705333B2 (en) | 2020-05-21 | 2023-07-18 | Asm Ip Holding B.V. | Structures including multiple carbon layers and methods of forming and using same |
| US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
| US11725277B2 (en) | 2011-07-20 | 2023-08-15 | Asm Ip Holding B.V. | Pressure transmitter for a semiconductor processing environment |
| US11725280B2 (en) | 2020-08-26 | 2023-08-15 | Asm Ip Holding B.V. | Method for forming metal silicon oxide and metal silicon oxynitride layers |
| US11735422B2 (en) | 2019-10-10 | 2023-08-22 | Asm Ip Holding B.V. | Method of forming a photoresist underlayer and structure including same |
| US11742189B2 (en) | 2015-03-12 | 2023-08-29 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
| US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
| US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US11767589B2 (en) | 2020-05-29 | 2023-09-26 | Asm Ip Holding B.V. | Substrate processing device |
| US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
| US11781243B2 (en) | 2020-02-17 | 2023-10-10 | Asm Ip Holding B.V. | Method for depositing low temperature phosphorous-doped silicon |
| US11781221B2 (en) | 2019-05-07 | 2023-10-10 | Asm Ip Holding B.V. | Chemical source vessel with dip tube |
| US11804364B2 (en) | 2020-05-19 | 2023-10-31 | Asm Ip Holding B.V. | Substrate processing apparatus |
| US11814747B2 (en) | 2019-04-24 | 2023-11-14 | Asm Ip Holding B.V. | Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly |
| US11823866B2 (en) | 2020-04-02 | 2023-11-21 | Asm Ip Holding B.V. | Thin film forming method |
| US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
| US11823876B2 (en) | 2019-09-05 | 2023-11-21 | Asm Ip Holding B.V. | Substrate processing apparatus |
| US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
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| US11840761B2 (en) | 2019-12-04 | 2023-12-12 | Asm Ip Holding B.V. | Substrate processing apparatus |
| US11873557B2 (en) | 2020-10-22 | 2024-01-16 | Asm Ip Holding B.V. | Method of depositing vanadium metal |
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| USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
| US11887857B2 (en) | 2020-04-24 | 2024-01-30 | Asm Ip Holding B.V. | Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element |
| US11885013B2 (en) | 2019-12-17 | 2024-01-30 | Asm Ip Holding B.V. | Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
| US11885023B2 (en) | 2018-10-01 | 2024-01-30 | Asm Ip Holding B.V. | Substrate retaining apparatus, system including the apparatus, and method of using same |
| US11885020B2 (en) | 2020-12-22 | 2024-01-30 | Asm Ip Holding B.V. | Transition metal deposition method |
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| US11898243B2 (en) | 2020-04-24 | 2024-02-13 | Asm Ip Holding B.V. | Method of forming vanadium nitride-containing layer |
| US11915929B2 (en) | 2019-11-26 | 2024-02-27 | Asm Ip Holding B.V. | Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
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| US11959168B2 (en) | 2020-04-29 | 2024-04-16 | Asm Ip Holding B.V. | Solid source precursor vessel |
| USD1023959S1 (en) | 2021-05-11 | 2024-04-23 | Asm Ip Holding B.V. | Electrode for substrate processing apparatus |
| US11967488B2 (en) | 2013-02-01 | 2024-04-23 | Asm Ip Holding B.V. | Method for treatment of deposition reactor |
| USD1024286S1 (en) * | 2022-02-28 | 2024-04-23 | Cummins Emission Solutions Inc. | Aftertreatment system component with integrated support rods |
| US11976359B2 (en) | 2020-01-06 | 2024-05-07 | Asm Ip Holding B.V. | Gas supply assembly, components thereof, and reactor system including same |
| US11982219B2 (en) | 2017-06-06 | 2024-05-14 | Cummins Emission Solutions Inc. | Systems and methods for mixing exhaust gases and reductant in an aftertreatment system |
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| US11993843B2 (en) | 2017-08-31 | 2024-05-28 | Asm Ip Holding B.V. | Substrate processing apparatus |
| US11996289B2 (en) | 2020-04-16 | 2024-05-28 | Asm Ip Holding B.V. | Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
| US12006572B2 (en) | 2019-10-08 | 2024-06-11 | Asm Ip Holding B.V. | Reactor system including a gas distribution assembly for use with activated species and method of using same |
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| US12020934B2 (en) | 2020-07-08 | 2024-06-25 | Asm Ip Holding B.V. | Substrate processing method |
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| US12040200B2 (en) | 2017-06-20 | 2024-07-16 | Asm Ip Holding B.V. | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus |
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| US12087586B2 (en) | 2020-04-15 | 2024-09-10 | Asm Ip Holding B.V. | Method of forming chromium nitride layer and structure including the chromium nitride layer |
| USD1042544S1 (en) * | 2022-04-21 | 2024-09-17 | Cummins Emission Solutions Inc. | Aftertreatment system |
| USD1042545S1 (en) * | 2022-04-21 | 2024-09-17 | Cummins Emission Solutions Inc. | Aftertreatment system |
| US12107005B2 (en) | 2020-10-06 | 2024-10-01 | Asm Ip Holding B.V. | Deposition method and an apparatus for depositing a silicon-containing material |
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| US12123334B2 (en) | 2020-05-08 | 2024-10-22 | Cummins Emission Solutions Inc. | Configurable aftertreatment systems including a housing |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD881600S1 (en) * | 2018-12-27 | 2020-04-21 | James Brent Jacobs | Fishing rod holder apparatus |
| USD881599S1 (en) * | 2018-12-27 | 2020-04-21 | James Brent Jacobs | Fishing rod holder |
| USD900592S1 (en) * | 2019-04-29 | 2020-11-03 | Hfe International | Mounting bracket |
| US12005773B2 (en) * | 2021-07-28 | 2024-06-11 | Ford Global Technologies, Llc | Vehicle tank mounting assembly |
Citations (67)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US845578A (en) | 1906-05-18 | 1907-02-26 | Austin Jerome Ross | Fastening device for rain-water conductors. |
| US2357148A (en) | 1943-04-14 | 1944-08-29 | Allied Equipment Company | Tank mounting |
| US2410182A (en) * | 1944-10-20 | 1946-10-29 | Prior Fred | Fuel tank mounting |
| US3227410A (en) * | 1964-03-06 | 1966-01-04 | Arrow Mfg & Sales Company | Fuel tank hanger for trucks and vehicles |
| USD244255S (en) * | 1975-09-11 | 1977-05-10 | Snyder Tank Corporation | J-bracket for cylindrical fuel tanks or similar articles |
| USD253091S (en) | 1978-05-10 | 1979-10-09 | Dart Industries Inc. | Combined clip and holder or the like |
| USD273606S (en) | 1981-08-03 | 1984-04-24 | Landry George H | Bracket for mounting liquified petroleum gas tanks |
| USD294994S (en) | 1985-07-25 | 1988-03-29 | Burgett Norma J | Refuse container support |
| US4925235A (en) | 1989-08-25 | 1990-05-15 | Paccar Inc | Cab fairing mounting for truck |
| US5054799A (en) | 1989-08-25 | 1991-10-08 | Paccar Inc. | Cab fairing mounting for truck |
| USRE33934E (en) | 1979-05-08 | 1992-05-26 | Hans Oetiker Ag Maschinen- Und Apparatefabrik | Hose clamp |
| WO1996023721A1 (en) | 1995-02-02 | 1996-08-08 | Thiokol Corporation | Composite conformable pressure vessel |
| US5810309A (en) | 1996-12-26 | 1998-09-22 | New York State Electric & Gas Corporation | Natural gas cylinder mounting assembly for a natural gas vehicle, and the method of installation |
| USD414405S (en) | 1997-11-24 | 1999-09-28 | Tompkins Jeffrey D | Cylindrical holder |
| US5996207A (en) | 1998-05-11 | 1999-12-07 | Honda Of America Mfg., Inc. | Tank installation method |
| US6029989A (en) * | 1997-12-15 | 2000-02-29 | Navistar International Transportation Corp | Vehicle access step assembly |
| US6042071A (en) | 1997-04-07 | 2000-03-28 | Honda Giken Kogyo Kabushiki Kaisha | Fuel cylinder attaching structure in motorcar |
| US6053533A (en) | 1997-11-20 | 2000-04-25 | Navistar International Transportation Corp | Modular fuel tank assembly, vehicle mounting arrangement and method for installation |
| USD442538S1 (en) | 1998-11-16 | 2001-05-22 | Donaldson Company, Inc. | Mounting arrangement for muffler |
| US6257360B1 (en) | 1998-10-27 | 2001-07-10 | The Johns Hopkins University | Compressed gas fuel storage system |
| WO2001068446A1 (en) | 2000-03-17 | 2001-09-20 | Arthur Patrick Agnew | Submersible apparatus for transporting compressed gas |
| US20020005312A1 (en) | 1997-02-10 | 2002-01-17 | Magnus Gollungberg | Fuel tank for a heavy vehicle |
| US6347678B1 (en) | 1997-11-20 | 2002-02-19 | Navistar International Transportation Company | Modular fuel tank assembly, vehicle mounting arrangement and method for installation |
| US20030001059A1 (en) | 2001-06-05 | 2003-01-02 | Daewoo Heavy Industries & Machinery Ltd. | Fuel tank cradle device for forklift trucks |
| US20030029977A1 (en) | 2001-06-21 | 2003-02-13 | Kim Jack T. B. | Cylinder support bracket |
| US6634321B2 (en) | 2000-12-14 | 2003-10-21 | Quantum Fuel Systems Technologies Worldwide, Inc. | Systems and method for storing hydrogen |
| US20060006635A1 (en) | 2003-03-21 | 2006-01-12 | Volvo Lastvagnar Ab | Device for use with liquid container for a vehicle and method for mounting said liquid container |
| US20060061081A1 (en) | 2004-09-10 | 2006-03-23 | Kresse Alfred L Jr | Compressed gas tank carrier assembly |
| US7117896B2 (en) | 2003-08-08 | 2006-10-10 | Bendix Commercial Vehicle System Llc | Air system module including reservoir and mounting structure |
| US20070170180A1 (en) | 2004-02-24 | 2007-07-26 | Hideo Watanabe | On-board gaseous fuel tank module |
| US7305836B2 (en) | 2004-05-19 | 2007-12-11 | Eden Innovations Ltd. | Cryogenic container and superconductivity magnetic energy storage (SMES) system |
| USD591324S1 (en) | 2007-06-19 | 2009-04-28 | Alexander Sukhov | Camera flash bracket |
| US20090114784A1 (en) | 2006-05-17 | 2009-05-07 | Dennis Tam | Fuel tank mounting arrangement and method of mounting a fuel tank |
| US20100320727A1 (en) * | 2009-06-18 | 2010-12-23 | Kenneth Haut | Intermodal tank transport system, components, and methods |
| USD632555S1 (en) | 2010-09-27 | 2011-02-15 | Samuel Sarkissian | Hose clamp |
| USD646214S1 (en) | 2010-03-16 | 2011-10-04 | Sammitr Green Power Co., Ltd. | Bracket design |
| WO2011152733A1 (en) | 2010-05-31 | 2011-12-08 | Ragasco As | Composite pressure container and method of manufacturing the same |
| USD655669S1 (en) | 2010-11-02 | 2012-03-13 | Tony Matijevich | Truck cradle assembly |
| US20130069357A1 (en) | 2011-09-16 | 2013-03-21 | Jason Green | Modification of an industrial vehicle to include a containment area and mounting assembly for an alternate fuel |
| US20130292387A1 (en) * | 2010-07-30 | 2013-11-07 | Ferus Inc. | Transport tank |
| WO2013168080A1 (en) | 2012-05-10 | 2013-11-14 | Hexagon Raufoss As | Composite pressure container and method for production thereof |
| US20130306695A1 (en) | 2012-05-18 | 2013-11-21 | Westport Power Inc. | Arrangement For Mounting A Tank To A Vehicle |
| USD704900S1 (en) | 2013-10-08 | 2014-05-13 | H3R Aviation, Inc. | Fire extinguisher bracket and mount assembly |
| US20140174159A1 (en) | 2011-08-05 | 2014-06-26 | Hack Sung Kim | Pressure-resistant-container gas leakage detecting device for a vehicle to which a discharge tube casing is attached |
| US20140175782A1 (en) | 2012-10-19 | 2014-06-26 | Agility Fuel Systems, Inc. | Systems and methods for mounting a fuel system |
| WO2014149060A1 (en) | 2013-03-22 | 2014-09-25 | International Truck Intellectual Property Company, Llc | High pressure fuel tank |
| USD720655S1 (en) * | 2013-03-14 | 2015-01-06 | Mac LTT, Inc. | Trailer tank with wind deflector |
| US8944469B2 (en) | 2009-08-25 | 2015-02-03 | Surayut Posirisuk | Triple—CNG (Compressed Natural Gas) cylinder mounting device for a vehicle |
| WO2015014517A1 (en) | 2013-07-29 | 2015-02-05 | Comiten Gbr | Tank |
| US20150096977A1 (en) | 2013-10-04 | 2015-04-09 | Quantum Fuel Systems Technologies Worldwide Inc. | Non-Slip Fuel Tank Bracket |
| US9033178B2 (en) | 2007-03-02 | 2015-05-19 | Enersea Transport Llc | Storing, transporting and handling compressed fluids |
| US9057483B2 (en) | 2013-03-15 | 2015-06-16 | Lawrence Livermore National Security, Llc | Threaded insert for compact cryogenic-capable pressure vessels |
| US9145052B2 (en) | 2012-10-17 | 2015-09-29 | Dbg | Vehicle fuel tank mounting assembly and installation method |
| WO2015175842A1 (en) | 2014-05-15 | 2015-11-19 | Quantum Fuel Systems Technologies Worldwide, Inc. | Cooperating tank and rack superstructure |
| US9193261B2 (en) | 2012-03-21 | 2015-11-24 | Agility Fuel Systems, Inc. | Strap guide and tank mounting fixture |
| US9217538B2 (en) | 2012-05-03 | 2015-12-22 | Other Lab, Llc | Conformable natural gas storage |
| US9217519B2 (en) | 2009-08-25 | 2015-12-22 | Aims International, Inc. | Systems and methods for supporting tubular members |
| US9234625B2 (en) | 2012-12-14 | 2016-01-12 | Quantum Fuel Systems Technologies Worldwide Inc. | Concentric is shells for compressed gas storage |
| US9249931B2 (en) | 2013-03-28 | 2016-02-02 | GM Global Technology Operations LLC | Fluid storage tank |
| US9266642B2 (en) | 2008-09-23 | 2016-02-23 | WireTough Cylinders, LLC | Steel wrapped pressure vessel |
| US20160082910A1 (en) | 2014-09-23 | 2016-03-24 | Agility Fuel Systems, Inc. | Bumper bar |
| US20160332514A1 (en) | 2014-05-15 | 2016-11-17 | Quantum Fuel Systems Technologies Worldwide, Inc. | Tanks forming rack superstructure |
| USD782931S1 (en) | 2015-10-09 | 2017-04-04 | Smc Corporation | Sensor mount assembly |
| US20170101003A1 (en) * | 2015-05-03 | 2017-04-13 | Natural Gas Fuel Systems, Inc. | Apparatuses for Mounting Tanks to Vehicles and Related Methods |
| US9756780B2 (en) | 2012-09-06 | 2017-09-12 | Cnh Industrial America Llc | Storage tank mounting arrangement for an agricultural implement |
| US20170334288A1 (en) | 2016-05-21 | 2017-11-23 | Worthington Industries, Inc. | Methods and systems for alternative fuel container support |
| USD819778S1 (en) * | 2014-05-08 | 2018-06-05 | JWF Industries | Vertical fluid storage tank |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6755460B1 (en) * | 2003-02-28 | 2004-06-29 | Paccar Inc. | Vehicle body panel mounting system |
| US20150097364A1 (en) * | 2013-10-08 | 2015-04-09 | EcoDual, Inc. | Hook and Loop Mechanism for Prevention of Fuel Tank Rotation |
| CA2951273C (en) * | 2014-06-12 | 2022-04-12 | Quantum Fuel Systems Llc | Aerodynamic and adjustable efficient back of cab fuel tank housing |
| JP6848834B2 (en) * | 2017-11-29 | 2021-03-24 | トヨタ自動車株式会社 | Tank mounting structure and vehicle |
-
2018
- 2018-03-26 US US29/641,843 patent/USD849662S1/en active Active
-
2019
- 2019-01-29 US US29/678,488 patent/USD868665S1/en active Active
Patent Citations (75)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US845578A (en) | 1906-05-18 | 1907-02-26 | Austin Jerome Ross | Fastening device for rain-water conductors. |
| US2357148A (en) | 1943-04-14 | 1944-08-29 | Allied Equipment Company | Tank mounting |
| US2410182A (en) * | 1944-10-20 | 1946-10-29 | Prior Fred | Fuel tank mounting |
| US3227410A (en) * | 1964-03-06 | 1966-01-04 | Arrow Mfg & Sales Company | Fuel tank hanger for trucks and vehicles |
| USD244255S (en) * | 1975-09-11 | 1977-05-10 | Snyder Tank Corporation | J-bracket for cylindrical fuel tanks or similar articles |
| USD253091S (en) | 1978-05-10 | 1979-10-09 | Dart Industries Inc. | Combined clip and holder or the like |
| USRE33934E (en) | 1979-05-08 | 1992-05-26 | Hans Oetiker Ag Maschinen- Und Apparatefabrik | Hose clamp |
| USD273606S (en) | 1981-08-03 | 1984-04-24 | Landry George H | Bracket for mounting liquified petroleum gas tanks |
| USD294994S (en) | 1985-07-25 | 1988-03-29 | Burgett Norma J | Refuse container support |
| US4925235A (en) | 1989-08-25 | 1990-05-15 | Paccar Inc | Cab fairing mounting for truck |
| US5054799A (en) | 1989-08-25 | 1991-10-08 | Paccar Inc. | Cab fairing mounting for truck |
| WO1996023721A1 (en) | 1995-02-02 | 1996-08-08 | Thiokol Corporation | Composite conformable pressure vessel |
| US5810309A (en) | 1996-12-26 | 1998-09-22 | New York State Electric & Gas Corporation | Natural gas cylinder mounting assembly for a natural gas vehicle, and the method of installation |
| US20020005312A1 (en) | 1997-02-10 | 2002-01-17 | Magnus Gollungberg | Fuel tank for a heavy vehicle |
| US6402198B2 (en) | 1997-02-10 | 2002-06-11 | Volvo Lastvagnar Ab | Fuel tank for a heavy vehicle |
| US6042071A (en) | 1997-04-07 | 2000-03-28 | Honda Giken Kogyo Kabushiki Kaisha | Fuel cylinder attaching structure in motorcar |
| US6347678B1 (en) | 1997-11-20 | 2002-02-19 | Navistar International Transportation Company | Modular fuel tank assembly, vehicle mounting arrangement and method for installation |
| US6053533A (en) | 1997-11-20 | 2000-04-25 | Navistar International Transportation Corp | Modular fuel tank assembly, vehicle mounting arrangement and method for installation |
| USD414405S (en) | 1997-11-24 | 1999-09-28 | Tompkins Jeffrey D | Cylindrical holder |
| US6029989A (en) * | 1997-12-15 | 2000-02-29 | Navistar International Transportation Corp | Vehicle access step assembly |
| US5996207A (en) | 1998-05-11 | 1999-12-07 | Honda Of America Mfg., Inc. | Tank installation method |
| US6257360B1 (en) | 1998-10-27 | 2001-07-10 | The Johns Hopkins University | Compressed gas fuel storage system |
| USD442538S1 (en) | 1998-11-16 | 2001-05-22 | Donaldson Company, Inc. | Mounting arrangement for muffler |
| WO2001068446A1 (en) | 2000-03-17 | 2001-09-20 | Arthur Patrick Agnew | Submersible apparatus for transporting compressed gas |
| US6634321B2 (en) | 2000-12-14 | 2003-10-21 | Quantum Fuel Systems Technologies Worldwide, Inc. | Systems and method for storing hydrogen |
| US20030001059A1 (en) | 2001-06-05 | 2003-01-02 | Daewoo Heavy Industries & Machinery Ltd. | Fuel tank cradle device for forklift trucks |
| US20030029977A1 (en) | 2001-06-21 | 2003-02-13 | Kim Jack T. B. | Cylinder support bracket |
| US20060006635A1 (en) | 2003-03-21 | 2006-01-12 | Volvo Lastvagnar Ab | Device for use with liquid container for a vehicle and method for mounting said liquid container |
| US7117896B2 (en) | 2003-08-08 | 2006-10-10 | Bendix Commercial Vehicle System Llc | Air system module including reservoir and mounting structure |
| US20070170180A1 (en) | 2004-02-24 | 2007-07-26 | Hideo Watanabe | On-board gaseous fuel tank module |
| US7305836B2 (en) | 2004-05-19 | 2007-12-11 | Eden Innovations Ltd. | Cryogenic container and superconductivity magnetic energy storage (SMES) system |
| US20060061081A1 (en) | 2004-09-10 | 2006-03-23 | Kresse Alfred L Jr | Compressed gas tank carrier assembly |
| US20090114784A1 (en) | 2006-05-17 | 2009-05-07 | Dennis Tam | Fuel tank mounting arrangement and method of mounting a fuel tank |
| US9033178B2 (en) | 2007-03-02 | 2015-05-19 | Enersea Transport Llc | Storing, transporting and handling compressed fluids |
| USD591324S1 (en) | 2007-06-19 | 2009-04-28 | Alexander Sukhov | Camera flash bracket |
| US9266642B2 (en) | 2008-09-23 | 2016-02-23 | WireTough Cylinders, LLC | Steel wrapped pressure vessel |
| US20100320727A1 (en) * | 2009-06-18 | 2010-12-23 | Kenneth Haut | Intermodal tank transport system, components, and methods |
| US9217519B2 (en) | 2009-08-25 | 2015-12-22 | Aims International, Inc. | Systems and methods for supporting tubular members |
| US8944469B2 (en) | 2009-08-25 | 2015-02-03 | Surayut Posirisuk | Triple—CNG (Compressed Natural Gas) cylinder mounting device for a vehicle |
| USD646619S1 (en) | 2010-03-16 | 2011-10-11 | Sammitr Green Power Co., Ltd. | Bracket design |
| USD646214S1 (en) | 2010-03-16 | 2011-10-04 | Sammitr Green Power Co., Ltd. | Bracket design |
| USD646618S1 (en) | 2010-03-16 | 2011-10-11 | Sammitr Green Power Co., Ltd. | Bracket design |
| WO2011152733A1 (en) | 2010-05-31 | 2011-12-08 | Ragasco As | Composite pressure container and method of manufacturing the same |
| US20130292387A1 (en) * | 2010-07-30 | 2013-11-07 | Ferus Inc. | Transport tank |
| USD632555S1 (en) | 2010-09-27 | 2011-02-15 | Samuel Sarkissian | Hose clamp |
| USD655669S1 (en) | 2010-11-02 | 2012-03-13 | Tony Matijevich | Truck cradle assembly |
| US20140174159A1 (en) | 2011-08-05 | 2014-06-26 | Hack Sung Kim | Pressure-resistant-container gas leakage detecting device for a vehicle to which a discharge tube casing is attached |
| US20130069357A1 (en) | 2011-09-16 | 2013-03-21 | Jason Green | Modification of an industrial vehicle to include a containment area and mounting assembly for an alternate fuel |
| US9193261B2 (en) | 2012-03-21 | 2015-11-24 | Agility Fuel Systems, Inc. | Strap guide and tank mounting fixture |
| US9217538B2 (en) | 2012-05-03 | 2015-12-22 | Other Lab, Llc | Conformable natural gas storage |
| WO2013168080A1 (en) | 2012-05-10 | 2013-11-14 | Hexagon Raufoss As | Composite pressure container and method for production thereof |
| US20130306695A1 (en) | 2012-05-18 | 2013-11-21 | Westport Power Inc. | Arrangement For Mounting A Tank To A Vehicle |
| US9756780B2 (en) | 2012-09-06 | 2017-09-12 | Cnh Industrial America Llc | Storage tank mounting arrangement for an agricultural implement |
| US9145052B2 (en) | 2012-10-17 | 2015-09-29 | Dbg | Vehicle fuel tank mounting assembly and installation method |
| US9120372B2 (en) | 2012-10-19 | 2015-09-01 | Agility Fuel Systems, Inc. | Systems and methods for mounting a fuel system |
| US20140175782A1 (en) | 2012-10-19 | 2014-06-26 | Agility Fuel Systems, Inc. | Systems and methods for mounting a fuel system |
| US9234625B2 (en) | 2012-12-14 | 2016-01-12 | Quantum Fuel Systems Technologies Worldwide Inc. | Concentric is shells for compressed gas storage |
| USD720655S1 (en) * | 2013-03-14 | 2015-01-06 | Mac LTT, Inc. | Trailer tank with wind deflector |
| US9057483B2 (en) | 2013-03-15 | 2015-06-16 | Lawrence Livermore National Security, Llc | Threaded insert for compact cryogenic-capable pressure vessels |
| WO2014149060A1 (en) | 2013-03-22 | 2014-09-25 | International Truck Intellectual Property Company, Llc | High pressure fuel tank |
| US9249931B2 (en) | 2013-03-28 | 2016-02-02 | GM Global Technology Operations LLC | Fluid storage tank |
| WO2015014517A1 (en) | 2013-07-29 | 2015-02-05 | Comiten Gbr | Tank |
| US20150096977A1 (en) | 2013-10-04 | 2015-04-09 | Quantum Fuel Systems Technologies Worldwide Inc. | Non-Slip Fuel Tank Bracket |
| US9909535B2 (en) * | 2013-10-04 | 2018-03-06 | Quantum Fuel Systems Llc | Non-slip fuel tank bracket |
| USD704900S1 (en) | 2013-10-08 | 2014-05-13 | H3R Aviation, Inc. | Fire extinguisher bracket and mount assembly |
| USD819778S1 (en) * | 2014-05-08 | 2018-06-05 | JWF Industries | Vertical fluid storage tank |
| US20160332514A1 (en) | 2014-05-15 | 2016-11-17 | Quantum Fuel Systems Technologies Worldwide, Inc. | Tanks forming rack superstructure |
| US20170057348A1 (en) | 2014-05-15 | 2017-03-02 | Quantum Fuel Systems Llc | Cooperating tank and rack superstructure |
| WO2015175842A1 (en) | 2014-05-15 | 2015-11-19 | Quantum Fuel Systems Technologies Worldwide, Inc. | Cooperating tank and rack superstructure |
| US9434333B2 (en) | 2014-09-23 | 2016-09-06 | Agility Fuel Systems, Inc. | Bumper bar |
| US20160082910A1 (en) | 2014-09-23 | 2016-03-24 | Agility Fuel Systems, Inc. | Bumper bar |
| US20170101003A1 (en) * | 2015-05-03 | 2017-04-13 | Natural Gas Fuel Systems, Inc. | Apparatuses for Mounting Tanks to Vehicles and Related Methods |
| USD782931S1 (en) | 2015-10-09 | 2017-04-04 | Smc Corporation | Sensor mount assembly |
| US20170334288A1 (en) | 2016-05-21 | 2017-11-23 | Worthington Industries, Inc. | Methods and systems for alternative fuel container support |
| US9908406B2 (en) * | 2016-05-21 | 2018-03-06 | Worthington Industries, Inc. | Methods and systems for alternative fuel container support |
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| US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| US11970766B2 (en) | 2016-12-15 | 2024-04-30 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
| US11001925B2 (en) | 2016-12-19 | 2021-05-11 | Asm Ip Holding B.V. | Substrate processing apparatus |
| US10784102B2 (en) | 2016-12-22 | 2020-09-22 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| US11251035B2 (en) | 2016-12-22 | 2022-02-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| US10867788B2 (en) | 2016-12-28 | 2020-12-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
| US12043899B2 (en) | 2017-01-10 | 2024-07-23 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
| US10655221B2 (en) | 2017-02-09 | 2020-05-19 | Asm Ip Holding B.V. | Method for depositing oxide film by thermal ALD and PEALD |
| US11410851B2 (en) | 2017-02-15 | 2022-08-09 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| US12106965B2 (en) | 2017-02-15 | 2024-10-01 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| US11658030B2 (en) | 2017-03-29 | 2023-05-23 | Asm Ip Holding B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
| US10714335B2 (en) | 2017-04-25 | 2020-07-14 | Asm Ip Holding B.V. | Method of depositing thin film and method of manufacturing semiconductor device |
| US10950432B2 (en) | 2017-04-25 | 2021-03-16 | Asm Ip Holding B.V. | Method of depositing thin film and method of manufacturing semiconductor device |
| US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| US10892156B2 (en) | 2017-05-08 | 2021-01-12 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
| US11848200B2 (en) | 2017-05-08 | 2023-12-19 | Asm Ip Holding B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| US11982219B2 (en) | 2017-06-06 | 2024-05-14 | Cummins Emission Solutions Inc. | Systems and methods for mixing exhaust gases and reductant in an aftertreatment system |
| US12040200B2 (en) | 2017-06-20 | 2024-07-16 | Asm Ip Holding B.V. | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus |
| US11976361B2 (en) | 2017-06-28 | 2024-05-07 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| US10685834B2 (en) | 2017-07-05 | 2020-06-16 | Asm Ip Holdings B.V. | Methods for forming a silicon germanium tin layer and related semiconductor device structures |
| US10734497B2 (en) | 2017-07-18 | 2020-08-04 | Asm Ip Holding B.V. | Methods for forming a semiconductor device structure and related semiconductor device structures |
| US11164955B2 (en) | 2017-07-18 | 2021-11-02 | Asm Ip Holding B.V. | Methods for forming a semiconductor device structure and related semiconductor device structures |
| US11695054B2 (en) | 2017-07-18 | 2023-07-04 | Asm Ip Holding B.V. | Methods for forming a semiconductor device structure and related semiconductor device structures |
| US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
| US11004977B2 (en) | 2017-07-19 | 2021-05-11 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US11802338B2 (en) | 2017-07-26 | 2023-10-31 | Asm Ip Holding B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| US11587821B2 (en) | 2017-08-08 | 2023-02-21 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
| US11417545B2 (en) | 2017-08-08 | 2022-08-16 | Asm Ip Holding B.V. | Radiation shield |
| US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
| US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
| US10672636B2 (en) | 2017-08-09 | 2020-06-02 | Asm Ip Holding B.V. | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
| US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| USD900036S1 (en) | 2017-08-24 | 2020-10-27 | Asm Ip Holding B.V. | Heater electrical connector and adapter |
| US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
| US11069510B2 (en) | 2017-08-30 | 2021-07-20 | Asm Ip Holding B.V. | Substrate processing apparatus |
| US11581220B2 (en) | 2017-08-30 | 2023-02-14 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
| US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| US11993843B2 (en) | 2017-08-31 | 2024-05-28 | Asm Ip Holding B.V. | Substrate processing apparatus |
| US10928731B2 (en) | 2017-09-21 | 2021-02-23 | Asm Ip Holding B.V. | Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same |
| US10844484B2 (en) | 2017-09-22 | 2020-11-24 | Asm Ip Holding B.V. | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| US11387120B2 (en) | 2017-09-28 | 2022-07-12 | Asm Ip Holding B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| US11094546B2 (en) | 2017-10-05 | 2021-08-17 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
| US12033861B2 (en) | 2017-10-05 | 2024-07-09 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
| US10734223B2 (en) | 2017-10-10 | 2020-08-04 | Asm Ip Holding B.V. | Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
| US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
| US12040184B2 (en) | 2017-10-30 | 2024-07-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
| US10734244B2 (en) | 2017-11-16 | 2020-08-04 | Asm Ip Holding B.V. | Method of processing a substrate and a device manufactured by the same |
| US10910262B2 (en) | 2017-11-16 | 2021-02-02 | Asm Ip Holding B.V. | Method of selectively depositing a capping layer structure on a semiconductor device structure |
| US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
| US11682572B2 (en) | 2017-11-27 | 2023-06-20 | Asm Ip Holdings B.V. | Storage device for storing wafer cassettes for use with a batch furnace |
| US11127617B2 (en) | 2017-11-27 | 2021-09-21 | Asm Ip Holding B.V. | Storage device for storing wafer cassettes for use with a batch furnace |
| US11639811B2 (en) | 2017-11-27 | 2023-05-02 | Asm Ip Holding B.V. | Apparatus including a clean mini environment |
| US11501973B2 (en) | 2018-01-16 | 2022-11-15 | Asm Ip Holding B.V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| US12119228B2 (en) | 2018-01-19 | 2024-10-15 | Asm Ip Holding B.V. | Deposition method |
| US11972944B2 (en) | 2018-01-19 | 2024-04-30 | Asm Ip Holding B.V. | Method for depositing a gap-fill layer by plasma-assisted deposition |
| US11393690B2 (en) | 2018-01-19 | 2022-07-19 | Asm Ip Holding B.V. | Deposition method |
| US11482412B2 (en) | 2018-01-19 | 2022-10-25 | Asm Ip Holding B.V. | Method for depositing a gap-fill layer by plasma-assisted deposition |
| USD903477S1 (en) * | 2018-01-24 | 2020-12-01 | Asm Ip Holdings B.V. | Metal clamp |
| US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
| USD913980S1 (en) | 2018-02-01 | 2021-03-23 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
| US11735414B2 (en) | 2018-02-06 | 2023-08-22 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
| US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
| US11685991B2 (en) | 2018-02-14 | 2023-06-27 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| US11387106B2 (en) | 2018-02-14 | 2022-07-12 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| US12173402B2 (en) | 2018-02-15 | 2024-12-24 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| US10731249B2 (en) | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| US11482418B2 (en) | 2018-02-20 | 2022-10-25 | Asm Ip Holding B.V. | Substrate processing method and apparatus |
| US10658181B2 (en) | 2018-02-20 | 2020-05-19 | Asm Ip Holding B.V. | Method of spacer-defined direct patterning in semiconductor fabrication |
| US11939673B2 (en) | 2018-02-23 | 2024-03-26 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
| US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
| US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
| US11398382B2 (en) | 2018-03-27 | 2022-07-26 | Asm Ip Holding B.V. | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
| US12020938B2 (en) | 2018-03-27 | 2024-06-25 | Asm Ip Holding B.V. | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
| US10847371B2 (en) | 2018-03-27 | 2020-11-24 | Asm Ip Holding B.V. | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
| US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
| US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| US10867786B2 (en) | 2018-03-30 | 2020-12-15 | Asm Ip Holding B.V. | Substrate processing method |
| US12025484B2 (en) | 2018-05-08 | 2024-07-02 | Asm Ip Holding B.V. | Thin film forming method |
| US11469098B2 (en) | 2018-05-08 | 2022-10-11 | Asm Ip Holding B.V. | Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures |
| US11056567B2 (en) | 2018-05-11 | 2021-07-06 | Asm Ip Holding B.V. | Method of forming a doped metal carbide film on a substrate and related semiconductor device structures |
| US11908733B2 (en) | 2018-05-28 | 2024-02-20 | Asm Ip Holding B.V. | Substrate processing method and device manufactured by using the same |
| US11361990B2 (en) | 2018-05-28 | 2022-06-14 | Asm Ip Holding B.V. | Substrate processing method and device manufactured by using the same |
| US11837483B2 (en) | 2018-06-04 | 2023-12-05 | Asm Ip Holding B.V. | Wafer handling chamber with moisture reduction |
| US11270899B2 (en) | 2018-06-04 | 2022-03-08 | Asm Ip Holding B.V. | Wafer handling chamber with moisture reduction |
| US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
| US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
| US11530483B2 (en) | 2018-06-21 | 2022-12-20 | Asm Ip Holding B.V. | Substrate processing system |
| US11296189B2 (en) | 2018-06-21 | 2022-04-05 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| US11814715B2 (en) | 2018-06-27 | 2023-11-14 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| US11492703B2 (en) | 2018-06-27 | 2022-11-08 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| US11499222B2 (en) | 2018-06-27 | 2022-11-15 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| US11952658B2 (en) | 2018-06-27 | 2024-04-09 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| US10914004B2 (en) | 2018-06-29 | 2021-02-09 | Asm Ip Holding B.V. | Thin-film deposition method and manufacturing method of semiconductor device |
| US11168395B2 (en) | 2018-06-29 | 2021-11-09 | Asm Ip Holding B.V. | Temperature-controlled flange and reactor system including same |
| US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
| US11923190B2 (en) | 2018-07-03 | 2024-03-05 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US11646197B2 (en) | 2018-07-03 | 2023-05-09 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US10755923B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US10767789B2 (en) | 2018-07-16 | 2020-09-08 | Asm Ip Holding B.V. | Diaphragm valves, valve components, and methods for forming valve components |
| US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
| US10883175B2 (en) | 2018-08-09 | 2021-01-05 | Asm Ip Holding B.V. | Vertical furnace for processing substrates and a liner for use therein |
| US10829852B2 (en) | 2018-08-16 | 2020-11-10 | Asm Ip Holding B.V. | Gas distribution device for a wafer processing apparatus |
| US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| US11804388B2 (en) | 2018-09-11 | 2023-10-31 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| US11274369B2 (en) | 2018-09-11 | 2022-03-15 | Asm Ip Holding B.V. | Thin film deposition method |
| US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
| US11885023B2 (en) | 2018-10-01 | 2024-01-30 | Asm Ip Holding B.V. | Substrate retaining apparatus, system including the apparatus, and method of using same |
| US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| US11414760B2 (en) | 2018-10-08 | 2022-08-16 | Asm Ip Holding B.V. | Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same |
| US10847365B2 (en) | 2018-10-11 | 2020-11-24 | Asm Ip Holding B.V. | Method of forming conformal silicon carbide film by cyclic CVD |
| US10811256B2 (en) | 2018-10-16 | 2020-10-20 | Asm Ip Holding B.V. | Method for etching a carbon-containing feature |
| US11664199B2 (en) | 2018-10-19 | 2023-05-30 | Asm Ip Holding B.V. | Substrate processing apparatus and substrate processing method |
| US11251068B2 (en) | 2018-10-19 | 2022-02-15 | Asm Ip Holding B.V. | Substrate processing apparatus and substrate processing method |
| USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
| USD933455S1 (en) * | 2018-10-25 | 2021-10-19 | Quattro Project Engineering Pty Ltd | Pipe mount |
| US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| US11735445B2 (en) | 2018-10-31 | 2023-08-22 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| US11866823B2 (en) | 2018-11-02 | 2024-01-09 | Asm Ip Holding B.V. | Substrate supporting unit and a substrate processing device including the same |
| US11499226B2 (en) | 2018-11-02 | 2022-11-15 | Asm Ip Holding B.V. | Substrate supporting unit and a substrate processing device including the same |
| US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
| US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
| US11411088B2 (en) | 2018-11-16 | 2022-08-09 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| US11244825B2 (en) | 2018-11-16 | 2022-02-08 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
| US11798999B2 (en) | 2018-11-16 | 2023-10-24 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
| US12040199B2 (en) | 2018-11-28 | 2024-07-16 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
| US11488819B2 (en) | 2018-12-04 | 2022-11-01 | Asm Ip Holding B.V. | Method of cleaning substrate processing apparatus |
| US11769670B2 (en) | 2018-12-13 | 2023-09-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| US11658029B2 (en) | 2018-12-14 | 2023-05-23 | Asm Ip Holding B.V. | Method of forming a device structure using selective deposition of gallium nitride and system for same |
| US11390946B2 (en) | 2019-01-17 | 2022-07-19 | Asm Ip Holding B.V. | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
| US11959171B2 (en) | 2019-01-17 | 2024-04-16 | Asm Ip Holding B.V. | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
| US11171025B2 (en) | 2019-01-22 | 2021-11-09 | Asm Ip Holding B.V. | Substrate processing device |
| US11127589B2 (en) | 2019-02-01 | 2021-09-21 | Asm Ip Holding B.V. | Method of topology-selective film formation of silicon oxide |
| US11251040B2 (en) | 2019-02-20 | 2022-02-15 | Asm Ip Holding B.V. | Cyclical deposition method including treatment step and apparatus for same |
| US11227789B2 (en) | 2019-02-20 | 2022-01-18 | Asm Ip Holding B.V. | Method and apparatus for filling a recess formed within a substrate surface |
| US11615980B2 (en) | 2019-02-20 | 2023-03-28 | Asm Ip Holding B.V. | Method and apparatus for filling a recess formed within a substrate surface |
| US11482533B2 (en) | 2019-02-20 | 2022-10-25 | Asm Ip Holding B.V. | Apparatus and methods for plug fill deposition in 3-D NAND applications |
| US12176243B2 (en) | 2019-02-20 | 2024-12-24 | Asm Ip Holding B.V. | Method and apparatus for filling a recess formed within a substrate surface |
| US11798834B2 (en) | 2019-02-20 | 2023-10-24 | Asm Ip Holding B.V. | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
| US11342216B2 (en) | 2019-02-20 | 2022-05-24 | Asm Ip Holding B.V. | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
| US11629407B2 (en) | 2019-02-22 | 2023-04-18 | Asm Ip Holding B.V. | Substrate processing apparatus and method for processing substrates |
| US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
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| USD843268S1 (en) | Vehicle | |
| USD775374S1 (en) | Railing | |
| USD795334S1 (en) | Semi-circular pedalboard | |
| USD835109S1 (en) | Connector | |
| USD821109S1 (en) | Hanging chair | |
| USD832503S1 (en) | Smoking article | |
| USD831780S1 (en) | Firearm mount | |
| USD874279S1 (en) | Support post for packaging system | |
| USD874278S1 (en) | Support post for packaging system | |
| USD931718S1 (en) | Retainer | |
| USD819349S1 (en) | Hanging chair | |
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