TWI717174B - LC composite parts - Google Patents
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Abstract
LC複合零件1具備:具有磁性之磁性基板21、具有磁性之磁性層22、電感器11、12、17、電容器13~16、及具有磁性之芯部23、24。磁性基板21具有第1面21a、及與第1面為相反側之第2面21b。磁性層22以與磁性基板21之第1面21a對向之方式配置。電感器11、12、17及電容器13~16配置於磁性基板21之第1面21a與磁性層22之間。芯部23、24配置於磁性基板21之第1面21a與磁性層22之間,且連接於磁性層22。於與磁性基板21之第1面21a垂直之方向上,芯部23、24之厚度為磁性層22之厚度之1.0倍以上,於與磁性基板之第1面垂直之方向上,磁性基板之厚度為磁性層之厚度之1.0倍以上,且磁性基板21、磁性層22以及芯部23、24包含磁性金屬粒子及樹脂。The LC composite component 1 includes a magnetic substrate 21 having magnetism, a magnetic layer 22 having magnetism, inductors 11, 12, 17, capacitors 13-16, and cores 23 and 24 having magnetism. The magnetic substrate 21 has a first surface 21a and a second surface 21b opposite to the first surface. The magnetic layer 22 is arranged so as to face the first surface 21 a of the magnetic substrate 21. The inductors 11, 12, 17 and the capacitors 13 to 16 are arranged between the first surface 21 a of the magnetic substrate 21 and the magnetic layer 22. The cores 23 and 24 are arranged between the first surface 21 a of the magnetic substrate 21 and the magnetic layer 22 and connected to the magnetic layer 22. In the direction perpendicular to the first surface 21a of the magnetic substrate 21, the thickness of the cores 23, 24 is more than 1.0 times the thickness of the magnetic layer 22, and in the direction perpendicular to the first surface of the magnetic substrate, the thickness of the magnetic substrate It is 1.0 times or more the thickness of the magnetic layer, and the magnetic substrate 21, the magnetic layer 22, and the cores 23 and 24 include magnetic metal particles and resin.
Description
本發明係關於一種LC複合零件。The present invention relates to an LC composite part.
近年來,對於行動電話、無線LAN通信機器等無線通信機器中使用之電子零件要求進一步小型化、高性能化。於專利文獻1中,揭示了一種LC複合零件,該LC複合零件具備電感器、電容器、磁性層及基板,且該基板、該磁性層及該電感器以特定之位置關係配置,該基板具有規定之厚度及複磁導率。 [先前技術文獻] [專利文獻]In recent years, electronic components used in wireless communication devices such as mobile phones and wireless LAN communication devices have been required to be further reduced in size and performance. In Patent Document 1, an LC composite part is disclosed. The LC composite part includes an inductor, a capacitor, a magnetic layer, and a substrate, and the substrate, the magnetic layer, and the inductor are arranged in a specific positional relationship, and the substrate has a predetermined The thickness and complex permeability. [Prior Technical Literature] [Patent Literature]
[專利文獻1]日本專利特開第2016-006847號公報[Patent Document 1] Japanese Patent Laid-Open No. 2016-006847
[發明所欲解決之問題][The problem to be solved by the invention]
然而,專利文獻1中揭示之LC複合零件於LC複合零件之插入損耗特性方面存在進一步改善之餘地。However, the LC composite component disclosed in Patent Document 1 has room for further improvement in the insertion loss characteristics of the LC composite component.
因此,本發明之目的在於提供一種插入損耗特性進一步提昇之LC複合零件。 [解決問題之技術手段]Therefore, the object of the present invention is to provide an LC composite component with further improved insertion loss characteristics. [Technical means to solve the problem]
本發明之一態樣係關於一種LC複合零件,其具備:具有磁性之磁性基板、具有磁性之磁性層、1個以上之電容器、1個以上之電感器、及具有磁性之1個以上之芯部;上述磁性基板具有第1面及與上述第1面為相反側之第2面,上述磁性層以與上述磁性基板之第1面對向之方式配置,上述1個以上之電感器及上述1個以上之電容器配置於上述磁性基板之第1面與上述磁性層之間,上述芯部配置於上述磁性基板之第1面與上述磁性層之間,且連接於上述磁性層,於與上述磁性基板之第1面垂直之方向,上述芯部之厚度為上述磁性層之厚度之1.0倍以上,於與上述磁性基板之第1面垂直之方向,上述磁性基板之厚度為上述磁性層之厚度之1.0倍以上,上述磁性基板、上述磁性層及上述芯部包含磁性金屬粒子及樹脂。One aspect of the present invention relates to an LC composite part, which has: a magnetic substrate with magnetism, a magnetic layer with magnetism, more than one capacitor, more than one inductor, and more than one core with magnetism Section; The magnetic substrate has a first surface and a second surface opposite to the first surface, the magnetic layer is arranged to face the first surface of the magnetic substrate, the one or more inductors and the One or more capacitors are arranged between the first surface of the magnetic substrate and the magnetic layer, and the core portion is arranged between the first surface of the magnetic substrate and the magnetic layer, and is connected to the magnetic layer. In the direction perpendicular to the first surface of the magnetic substrate, the thickness of the core is 1.0 times or more the thickness of the magnetic layer, and in the direction perpendicular to the first surface of the magnetic substrate, the thickness of the magnetic substrate is the thickness of the magnetic layer 1.0 times or more, the magnetic substrate, the magnetic layer, and the core include magnetic metal particles and resin.
於一態樣中,於與磁性基板之第1面垂直之方向上,磁性基板之厚度可為磁性層之厚度之3.0倍以下。In one aspect, in the direction perpendicular to the first surface of the magnetic substrate, the thickness of the magnetic substrate may be 3.0 times or less the thickness of the magnetic layer.
於一態樣中,磁性金屬粒子之平均長軸徑可為120 nm以下。In one aspect, the average major axis diameter of the magnetic metal particles may be 120 nm or less.
於一態樣中,磁性金屬粒子之平均縱橫比可為1.2~6。In one aspect, the average aspect ratio of the magnetic metal particles may be 1.2-6.
於一態樣中,磁性基板、磁性層及芯部之磁飽和可為90 emu/g以上。In one aspect, the magnetic saturation of the magnetic substrate, the magnetic layer and the core may be above 90 emu/g.
於一態樣中,磁性金屬粒子之縱橫比之CV值可為0.4以下。In one aspect, the CV value of the aspect ratio of the magnetic metal particles may be 0.4 or less.
於一態樣中,磁性金屬粒子可包含選自由Fe、Co及Ni所構成之群中之至少1種作為主成分。 [發明之效果]In one aspect, the magnetic metal particles may include at least one selected from the group consisting of Fe, Co, and Ni as a main component. [Effects of Invention]
根據本發明,提供一種插入損耗特性進一步提昇之LC複合零件。According to the present invention, an LC composite component with further improved insertion loss characteristics is provided.
以下,對本發明之較佳實施形態進行說明。但,本發明不限於以下之實施形態。Hereinafter, preferred embodiments of the present invention will be described. However, the present invention is not limited to the following embodiments.
(LC複合零件) 參照圖1及圖2,對本發明之本實施形態之LC複合零件進行說明。圖1係表示本實施形態之LC複合零件1之構成之立體圖。圖2係表示本實施形態之LC複合零件之構成之剖視圖。(LC composite parts) 1 and 2, the LC composite component of the present embodiment of the present invention will be described. Fig. 1 is a perspective view showing the structure of the LC composite part 1 of this embodiment. Fig. 2 is a cross-sectional view showing the structure of the LC composite part of this embodiment.
LC複合零件1具備:具有磁性之磁性基板21;具有磁性之磁性層22;電感器11、12、17;電容器13~16;具有磁性之芯部23、24;及介電積層體37。The LC composite component 1 includes: a
如圖1及圖2所示,磁性基板21係具有第1面21a、及與第1面為相反側之第2面21b之平板。磁性基板21之與第1面21a垂直之方向之厚度無特別限制,但,例如為使所得之LC複合零件之形狀實用且容易生產,而可為30~200 μm、較佳為40~100 μm。磁性基板21之材料隨後敍述。As shown in Figs. 1 and 2, the
磁性層22係具有第1面22a及第2面22b之平板,且以第2面22b與磁性基板21之第1面21a對向之方式配置。再者,於本說明書中,所謂磁性係指鐵磁性或亞鐵磁性(ferrimagnetism)。磁性層22之材料隨後敍述。The
介電積層體37係配置於磁性基板21之第1面21a與磁性層22(第2面22b)之間。介電積層體37具有如圖2所示地積層而成之複數層介電層31~36。各個介電層31~36包含介電材料。介電材料之例為樹脂、陶瓷。樹脂之例為聚醯亞胺樹脂、苯并環丁烯樹脂、雙馬來醯亞胺三嗪樹脂(BT樹脂)、環氧樹脂及丙烯酸樹脂,陶瓷之例為氮化矽、氧化鋁。The
LC複合零件1呈現長方體形狀,且具有上表面1t、底面1b及4個側面1s。於本實施形態中,LC複合零件1之上表面1t包含磁性基板21之第2面21b。又,LC複合零件1之底面1b包含磁性層22之第1面22a。LC複合零件1係例如以LC複合零件1之底面1b、即磁性層22之第1面22a與安裝基板之上表面對向之方式安裝於安裝基板上。The LC composite part 1 presents a rectangular parallelepiped shape, and has an
電感器11、12、17、電容器13~16及芯部23、24配置於磁性基板21之第1面21a與磁性層22之第2面22b之間、即介電積層體37內。於本實施形態中,各電容器13~16配置於從垂直於第1面21a之方向觀察時不與其它之電感器11、12、17重疊之位置。電感器及電容器用之導體部之材料之例為Cu、Al、Ag。電感器及電容器之詳情隨後敍述。The
芯部23、24分別具有柱形狀,且分別配置於電感器11、12之線圈構造之軸。芯部23、24連接於磁性層22。於本說明書中,所謂「芯部23、24連接於磁性層22」係指芯部23、24直接連接(接觸)於磁性層22之態樣、及芯部23、24與磁性層22雖不直接連接(接觸),但例如經由0.1~10 μm左右之厚度之非磁性(介電質等)層磁性連接之態樣。於圖2中,芯部23、24與磁性層22接觸。芯部之材料隨後敍述。芯部23、24較佳為不直接接觸磁性基板21。即,如圖2所示,於芯部23、24與磁性基板21之間,較佳為設置例如厚度0.1~10 μm左右之非磁性(介電質等)層,但芯部23、24亦可與磁性基板21直接接觸。The
如圖2所示,當將與磁性基板21之第1面21a垂直之方向上之芯部23、24之厚度設為T1,將與磁性基板21之第1面21a垂直之方向上之磁性層22之厚度設為T2時,芯部23、24之厚度T1為磁性層22之厚度T2之1.0倍以上,較佳為1.2倍以上,更佳為2.0倍以上,進而較佳為3.0倍以上。芯部23、24之厚度T1亦可為磁性層22之厚度T2之10倍以下。
藉此,可降低LC複合零件中之未達截止頻率之插入損耗,又,可使超過截止頻率之插入損耗增加。作為其原因,可認為因一面抑制電感器芯之損耗一面電感器之電感變大,電感器中之損耗減少。As shown in FIG. 2, when the thickness of the
根據同樣之觀點,如圖2所示,當與磁性基板21之第1面21a垂直之方向上之磁性基板21之厚度設為T3時,磁性基板21之厚度T3為磁性層22之厚度T2為1.0倍以上,較佳為1.1倍以上,更佳為1.2倍以上。磁性基板21之厚度T3可為磁性層22之厚度T2之3.0倍以下,較佳為2.0倍以下。From the same point of view, as shown in FIG. 2, when the thickness of the
芯部23及24之厚度無特別限定,但例如為使所得之LC複合零件之形狀實用,又,容易製造,而可為30~200 μm,較佳為100~150 μm。再者,芯部23及24之厚度較佳設為電感器11及12之線圈構造之軸方向長度以上。The thickness of the
LC複合零件1之電感器11、12因分別具備芯部23、24,而與LC複合零件1之電感器11、12不具備芯部23、24之情形相比,更能夠增大該電感器之電感。Since the
(磁性基板、磁性層及芯部之材料)
磁性基板21、磁性層22以及芯部23及24包含樹脂及具有磁性之磁性金屬粒子。(Material of magnetic substrate, magnetic layer and core)
The
於本實施形態中,對於磁性金屬粒子之粒徑無特別限制。磁性金屬粒子之平均長軸徑較佳為120 nm以下。In this embodiment, there is no particular limitation on the particle size of the magnetic metal particles. The average major axis diameter of the magnetic metal particles is preferably 120 nm or less.
藉由滿足該情形,一面容易抑制未達截止頻率之LC複合零件之插入損耗,一面容易提昇超過截止頻率之插入損耗。
作為其原因,可認為原因之一亦為例如磁性層22以及芯部23及芯部24中之磁性金屬粒子之填充性提昇,且因獲得較高之磁導率而可增大電感器之電感,同時可抑制電感器之芯部23及24中之渦電流。By satisfying this situation, it is easy to suppress the insertion loss of LC composite parts that do not reach the cutoff frequency, and it is easy to increase the insertion loss beyond the cutoff frequency.
As the reason, one of the reasons can be considered to be, for example, that the filling of the magnetic metal particles in the
根據同樣之觀點,磁性金屬粒子之平均長軸徑更佳為100 nm以下,進而較佳為80 nm以下。於本實施形態中,磁性金屬粒子之平均長軸徑可為30 nm以上。根據同樣之觀點,磁性金屬粒子之平均長軸徑較佳為40 nm以上。又,磁性金屬粒子4之平均短軸徑例如為5~50 nm左右,且可為7~30 nm。From the same viewpoint, the average major axis diameter of the magnetic metal particles is more preferably 100 nm or less, and still more preferably 80 nm or less. In this embodiment, the average major axis diameter of the magnetic metal particles may be 30 nm or more. From the same viewpoint, the average major axis diameter of the magnetic metal particles is preferably 40 nm or more. In addition, the average minor axis diameter of the magnetic metal particles 4 is, for example, about 5 to 50 nm, and may be 7 to 30 nm.
磁性金屬粒子之平均縱橫比較佳為1.2~6。於本實施形態中,平均縱橫比係磁性金屬粒子之長軸徑相對短軸徑之比(縱橫比)之平均值。 當平均縱橫比未達1.2時,則存在形狀各向異性變得過小,自然共振頻率變得相當小,有助於自然共振導致之電感器芯中之損耗變大之可能性。又,當縱橫比超過6時,存在因形狀各向異性變得過大及填充性惡化導致密度降低,而亦有助於磁導率變小,難以增大電感器之電感之可能性。The average aspect ratio of the magnetic metal particles is preferably 1.2-6. In this embodiment, the average aspect ratio is the average value of the ratio (aspect ratio) of the major axis diameter to the minor axis diameter of the magnetic metal particles. When the average aspect ratio is less than 1.2, the shape anisotropy becomes too small, and the natural resonance frequency becomes quite small, which helps increase the loss in the inductor core caused by natural resonance. In addition, when the aspect ratio exceeds 6, there is a possibility that the shape anisotropy becomes too large and the filling property is deteriorated, resulting in a decrease in density, which also contributes to a decrease in magnetic permeability, making it difficult to increase the inductance of the inductor.
根據同樣之觀點,磁性金屬粒子之平均縱橫比較佳為1.3以上且4以下,亦較佳為1.5以上且3以下。再者,縱橫比較佳為2以上。From the same viewpoint, the average aspect ratio of the magnetic metal particles is preferably 1.3 or more and 4 or less, and more preferably 1.5 or more and 3 or less. Furthermore, the aspect ratio is preferably 2 or more.
於本實施形態中,磁性金屬粒子之縱橫比之CV值可為0.4以下。CV表示變異係數,可根據以下式求得。 變異係數(CV)=標準偏差值/平均值In this embodiment, the CV value of the aspect ratio of the magnetic metal particles may be 0.4 or less. CV represents the coefficient of variation, which can be obtained from the following formula. Coefficient of Variation (CV) = standard deviation value/average value
因磁性金屬粒子之縱橫比之CV值為0.4以下而可抑制去磁因數之不均。因自然共振頻率與去磁因數之差(短軸-長軸)成正比,故作為結果,可抑制自然共振頻率之不均,使自然共振尖峰之線寬變窄。因此,可一面降低自然共振引起之電感器芯中之損耗,一面增大電感器之電感,從而可於LC複合零件之未達截止頻率中降低插入損耗,提昇超過截止頻率中之插入損耗。根據同樣之觀點,磁性金屬粒子之縱橫比之CV值較佳為0.3以下。磁性金屬粒子之縱橫比之CV值可為0.10以上。Since the CV value of the aspect ratio of the magnetic metal particles is 0.4 or less, the unevenness of the demagnetization factor can be suppressed. Since the natural resonance frequency is proportional to the difference (short axis-long axis) of the demagnetization factor, as a result, the unevenness of the natural resonance frequency can be suppressed, and the line width of the natural resonance peak can be narrowed. Therefore, while reducing the loss in the inductor core caused by natural resonance, while increasing the inductance of the inductor, the insertion loss can be reduced when the cut-off frequency of the LC composite part is not reached, and the insertion loss beyond the cut-off frequency can be increased. From the same viewpoint, the CV value of the aspect ratio of the magnetic metal particles is preferably 0.3 or less. The CV value of the aspect ratio of the magnetic metal particles can be 0.10 or more.
磁性金屬粒子較佳為包含選自由Fe、Co及Ni所構成之群中之至少1種作為主成分,更佳為包含選自由Fe及Co所構成之群中之至少1種作為主成分。於本說明書中,所謂主成分係指佔據50質量%以上之成分。因磁性金屬粒子包含選自具有較高之磁飽和之Fe、Co及Ni所構成之群中之至少1種作為主成分,故磁性基板21、磁性層22以及芯部23及24可具有較高之磁導率。磁性金屬粒子較佳為包含Fe、Fe及Co或Fe及Ni作為主成分,更佳為包含Fe或Fe及Co作為主成分,尤佳為包含Fe及Co作為主成分。因磁性金屬粒子包含具有較高之磁飽和之Fe、Fe及Co或Fe及Ni作為主成分,故磁性基板21、磁性層22以及芯部23及24可具有較高之磁導率。磁性基板21、磁性層22以及芯部23及24可包含相互不同之磁性金屬粒子,亦可包含同一磁性金屬粒子。所謂主成分係指佔據50質量%以上之成分。藉由如此之組成,亦可使自然共振頻率高頻化。The magnetic metal particles preferably include at least one selected from the group consisting of Fe, Co, and Ni as a main component, and more preferably include at least one selected from the group consisting of Fe and Co as a main component. In this specification, the so-called main component refers to a component that occupies more than 50% by mass. Since the magnetic metal particles contain at least one selected from the group consisting of Fe, Co, and Ni, which have high magnetic saturation, as a main component, the
磁性金屬粒子可具備金屬中心部及覆蓋金屬中心部之氧化金屬物膜。金屬中心部具有導電性,但氧化金屬膜具有絕緣性。藉由磁性金屬粒子具有氧化金屬膜,可獲得磁性金屬粒子間之絕緣性,並且可降低伴隨著粒子間之渦電流產生之磁損耗。The magnetic metal particles may include a metal center and a metal oxide film covering the metal center. The metal center has conductivity, but the oxide metal film has insulation. Since the magnetic metal particles have a metal oxide film, the insulation between the magnetic metal particles can be obtained, and the magnetic loss caused by the eddy current between the particles can be reduced.
於磁性金屬粒子,金屬中心部含有磁性金屬粒子中包含之上述元素作為金屬(0價)。因金屬中心部被氧化金屬膜被覆,故即使於大氣中亦可不被氧化地存在。金屬中心部較佳為Fe、Fe-Ni合金或Fe-Co合金,更佳為Fe或Fe-Co合金,進而較佳為Fe-Co合金。金屬中心部為Fe、Fe-Ni合金或Fe-Co合金之情形時,因磁性金屬粒子之磁飽和提昇而成為較高之磁導率。於磁性金屬粒子,氧化金屬膜包含磁性金屬粒子中包含之元素作為氧化物。In the magnetic metal particles, the metal center contains the above-mentioned elements contained in the magnetic metal particles as a metal (zero valence). Since the center of the metal is covered with an oxide metal film, it can exist without being oxidized even in the atmosphere. The metal center is preferably Fe, Fe-Ni alloy or Fe-Co alloy, more preferably Fe or Fe-Co alloy, and still more preferably Fe-Co alloy. When the metal center is Fe, Fe-Ni alloy, or Fe-Co alloy, the magnetic metal particles have higher magnetic permeability due to the increase in magnetic saturation. For magnetic metal particles, the metal oxide film contains elements contained in the magnetic metal particles as oxides.
於本實施形態中,磁性基板21、磁性層22以及芯部23及24中之磁性金屬粒子之體積比例可分別為例如30~60體積%,較佳為40~50體積%。當磁性金屬粒子之體積比例為30體積%以上時,於磁性基板21、磁性層22以及芯部23及24中容易獲得期望之磁性特性。當磁性金屬粒子之比例為60體積%以下時,加工時之操作變得容易。再者,於本說明書中,磁性基板21、磁性層22以及芯部23及24中之體積比例係除空隙以外之磁性基板21、磁性層22以及芯部23及24所占之比率。In this embodiment, the volume ratio of the magnetic metal particles in the
樹脂係具有電絕緣性之樹脂(絕緣性樹脂),並且係於磁性基板21、磁性層22以及芯部23及24中存位於磁性金屬粒子間,將該等磁性基板21、磁性層22以及芯部23及24結合,磁性金屬粒子間之絕緣性可進而提昇之材料。作為絕緣性樹脂,可列舉例如矽酮樹脂、酚醛樹脂、丙烯酸樹脂、環氧樹脂及其等之硬化物等。該等既可單獨地使用1種,亦可組合2種以上使用。又,亦可視需要,使用偶合劑、分散劑等表面處理劑、熱穩定劑、塑化劑等添加劑等。The resin is an electrically insulating resin (insulating resin), and is stored between the magnetic metal particles in the
於本實施形態中,磁性基板21、磁性層22以及芯部23及24中之樹脂之體積比例可分別為例如40~70體積%,較佳為50~60體積%。當樹脂之體積比例為40體積%以上時,變得容易獲得磁性金屬粒子間之絕緣性及結合力。當樹脂之體積比例為70體積%以下時,即便磁性基板21、磁性層22以及芯部23及24中,亦容易發揮磁性金屬粒子之特性。In this embodiment, the volume ratio of the resin in the
磁性基板21、磁性層22以及芯部23及24之磁飽和無特別限制,但例如可為90 emu/g以上。可藉由磁飽和為90 emu/g以上,而使磁性基板21、磁性層22以及芯部23及24之磁導率提昇。又,可使自然共振頻率高頻化。根據同樣之觀點,磁飽和較佳為100 emu/g以上,更佳為120 emu/g以上。磁飽和亦可為200 emu/g以下。The magnetic saturation of the
參照圖3A~圖3C及圖4A~圖4C,對介電積層體37、電容器13~16及電感器11、12、17之詳細構成進行說明。於本實施形態中,LC複合零件1之介電積層體37具備6個介電層31、32、33、34、35及36。介電層31~36配置於磁性基板21與磁性層22之間,且從磁性基板21之第1面21a側起按該順序配置。介電層31~36各自具有朝向與磁性基板21之第1面21a相同之方向之第1面、及朝向與磁性基板21之第2面21b相同之方向之第2面。再者,於圖3A~圖3C及圖4A~圖4C中,省略了芯部23及24。3A to 3C and 4A to 4C, the detailed configuration of the
圖3A示出介電層31之第1面。於介電層31之第1面,形成有電感器11用之導體部311、及電感器12用之導體部312、電容器13、14用之導體部313、電容器15用之導體部315及電容器16用之導體部316、及端子用導體部31T1、31T2、31T3及31T4。再者,圖3A係以從介電層31之第2面側觀察上述複數個導體部之狀態顯示。上述複數個導體部之圖3A中之配置如下所述。電感器11用之導體部311配置於較左右方向之中心更靠左側之區域。電感器12用之導體部312配置於較左右方向之中心更靠右側之區域。電容器16用之導體部316配置於電感器11用之導體部311及電感器12用之導體部312之間。電容器13、14用之導體部313配置於電感器11用之導體部311及電感器12用之導體部312、以及電容器16用之導體部316之下側之位置。電容器15用之導體部315配置於電容器13、14用之導體部313之下側之位置。端子用導體部31T1配置於左下之角部之附近。端子用導體部31T2配置於右下之角部之附近。端子用導體部31T3配置於左上之角部之附近。端子用導體部31T4配置於右上之角部之附近。FIG. 3A shows the first surface of the
電容器13、14用之導體部313連接於電感器11用之導體部311、電感器12用之導體部312及電容器16用之導體部316之各一端。於圖3A中,以虛線表示2個導體部之交界。亦於此後之說明中使用之與圖3A相同之圖中,以與圖3A同樣之表示方式表示。電感器11用之導體部311及電感器12用之導體部312均為從其一端朝向另一端環狀地延伸之線狀之導體部。The
圖3B示出了介電層32之第1面。於介電層32之第1面,形成有電容器13用之導體部323、電容器14用之導體部324、電容器15用之導體部325A、325B以及電容器16用之導體部326。再者,圖3B係以從介電層32之第2面側觀察上述複數個導體部之狀態表示。上述複數個導體部之圖3B中之配置如下所述。即,電容器16用之導體部326配置於左右方向之大致中央之位置。電容器13用之導體部323及電容器14用之導體部324於電容器16用之導體部326之下側之位置處,從左側按該順序配置。電容器15用之導體部325A及325B於電容器13用之導體部323及電容器14用之導體部324之下側之位置處,從左側按該順序配置。FIG. 3B shows the first side of the
電容器13用之導體部323及電容器14用之導體部324介隔介電層32,而與圖3A所示之電容器13、14用之導體部313對向。圖5中之電容器13包括電容器13、14用之導體部313及電容器13用之導體部323、以及位於該等之間之介電層32之一部分。圖5中之電容器14包括電容器13、14用之導體部313及電容器14用之導體部324、以及位於該等之間之介電層32之一部分。又,電容器15用之導體部325A及325B介隔介電層32,而與圖3A所示之電容器15用之導體部315對向。圖5中之電容器15包括電容器15用之導體部315、325A及325B、以及位於該等之間之介電層32之一部分。又,電容器16用之導體部326介隔介電層32,而與圖3A所示之電容器16用之導體部316對向。圖5中之電容器16包括電容器16用之導體部316及326、以及位於該等之間之介電層32之一部分。The
LC複合零件1包含將介電層32及33貫通之導體部33V1、33V2、33V3、33V4、33V5及33V6。於圖3B中,對導體部33V1~33V6標註影線。於圖3A所示之端子用導體部31T1~31T4、以及電感器11用之導體部311及電感器12用之導體部312,分別連接有導體部33V1~33V6之一端。The LC composite component 1 includes conductor portions 33V1, 33V2, 33V3, 33V4, 33V5, and 33V6 that penetrate the
圖3C示出了介電層33之第1面。於介電層33之第1面,形成有電感器11用之導體部331、電感器12用之導體部332及電感器17用之導體部337、連接用導體部333、334、335A、335B及336、以及端子用導體部33T1、33T2、33T3及33T4。圖3C以從介電層33之第2面側觀察上述複數個導體部之狀態表示。圖3C中之上述複數個導體部之配置如下所述。電感器11用之導體部331配置於較左右方向之中心更靠左側之區域。連接用導體部336配置於電感器11用之導體部331與電感器12用之導體部332之間。連接用導體部333及334於電感器11用之導體部331、電感器12用之導體部332、及連接用導體部336之下側之位置處,從左側按該順序配置。連接用導體部335A、335B於連接用導體部333及334之下側之位置處,從左側按該順序配置。電感器17用之導體部337配置於電感器11用之導體部331及電感器12用之導體部332、以及連接用導體部336之上側之位置。端子用導體部33T1配置於左下之角部之附近。端子用導體部33T2配置於右下之角部之附近。端子用導體部33T3配置於左上之可動部之附近。端子用導體部33T4配置於右上之角部之附近。FIG. 3C shows the first side of the
端子用導體部33T1連接於連接用導體部333及335A之各一端。端子用導體部33T2連接於連接用導體部334及335B之各一端。電感器17用之導體部337連接於連接用導體部336之一端。電感器11用之導體部331及電感器12用之導體部332均為從一端朝向多端環狀地延伸之線狀之導體部。The terminal conductor portion 33T1 is connected to each end of the
電感器11用之導體部331及電感器12用之導體部332、以及端子用導體部33T1~33T4分別配置於從與磁性基板21之第1面21a垂直之方向(與垂直於介電層33之第1面之方向相同)觀察時,與圖3A所示之電感器11用之導體部311、電感器12用之導體部312以及端子用導體部31T1~31T4重疊之位置。連接用導體部333、334、335A、335B及336分別配置於從與磁性基板21之第1面21a垂直之方向觀察時,與圖3B所示之電容器13用之導體部323、電容器14用之導體部324、電容器15用之導體部325A、325B以及電容器16用之導體部326重疊之位置。The
LC複合零件1包含將介電層33貫通之導體部33V7、33V8、33V9、33V10及33V11。於圖3C中,以兩點鏈線表示導體部33V1~33V11。於端子用導體部33T1~33T4、以及電感器11用之導體部331及電感器11用之導體部332,分別連接有導體部33V1~33V6之另一端。於圖3B所示之電容器13用之導體部323、電容器14用之導體部324、電容器15用之導體部325A、325B以及電容器16用之導體部326,分別連接有導體部33V7~33V11之一端。於連接用導體部333、334、335A、335B及336,分別連接有導體部33V7~33V11之另一端。The LC composite component 1 includes conductor portions 33V7, 33V8, 33V9, 33V10, and 33V11 that penetrate the
圖4A示出了介電層34之第1面。於介電層34之第1面,形成有電感器11用之導體部341、電感器12用之導體部342及電感器17用之導體部347、與端子用導體部34T1、34T2、34T3及34T4。圖4A係以從介電層34之第2面側觀察上述複數個導體部之狀態表示。圖4A~圖4C中之複數個導體部之配置如下所述。電感器11用之導體部341配置於較左右方向之中心更靠左側之區域。電感器12用之導體部342配置於較左右方向之中心更靠右側之區域。電感器17用之導體部347配置於電感器11用之導體部341及電感器12用之導體部342之上側之位置。端子用導體部34T1配置於左下之角部之附近。端子用導體部34T2配置於右下之角部之附近。端子用導體部34T3配置於左上之角部之附近。端子用導體部34T4配置於右上之角部之附近。FIG. 4A shows the first side of the
電感器11用之導體部341及電感器12用之導體部342均為從其一端朝向另一端環狀地延伸之線狀之導體部。電感器11用之導體部341、電感器12用之導體部342及電感器17用之導體部347、以及端子用導體部34T1~34T4分別配置於從與磁性基板21之第1面21a垂直之方向(與垂直於介電層34之第1面之方向相同)觀察時,與圖3C所示之電感器11用之導體部331、電感器12用之導體部332及電感器17用之導體部337、以及端子用導體部33T1~33T4重疊之位置。The
LC複合零件1包含將介電層34貫通之導體部34V1、34V2、34V3、34V4、34V5、34V6及34V7。於圖4A中,以兩點鏈線表示導體部34V1~34V7。於圖3C所示之端子用導體部33T1~33T4、以及電感器11用之導體部331、電感器12用之導體部332及電感器17用之導體部337,分別連接有導體部34V1~34V7之一端。於端子用導體部34T1~34T4、以及電感器11用之導體部341、電感器12用之導體部342及電感器17用之導體部347,分別連接有導體部34V1~34V7之另一端。The LC composite component 1 includes conductor portions 34V1, 34V2, 34V3, 34V4, 34V5, 34V6, and 34V7 that penetrate the
圖4B示出了介電層35之第1面。於介電層35之第1面,形成有電感器11用之導體部351、電感器12用之導體部352、電感器17用之導體部357A及357B、以及端子用導體部35T1、35T2、35T3及35T4。再者,圖4B係以從介電層35之第2面側觀察上述複數個導體部之狀態表示。上述複數個導體部之圖4B中之配置如下所述。電感器11用之導體部351配置於較左右方向之中心更靠左側之區域。電感器12用之導體部352配置於較左右方向之中心更靠右側之區域。電感器17用之導體部357A及357B於電感器11用之導體部351及電感器12用之導體部352之上側之位置處,從左側以該順序配置。端子用導體部35T1配置於左下之角部之附近。端子用導體部35T2配置於右下之角部之附近。端子用導體部35T3配置於左上之角部之附近。端子用導體部35T4配置於右上之角部之附近。FIG. 4B shows the first side of the
端子用導體部35T1~35T4分別連接於電感器11用之導體部351、電感器12用之導體部352、電感器17用之導體部357A及357B之一端。電感器11用之導體部351及電感器12用之導體部352均為從其一端朝向另一端環狀地延伸之線狀之導體部。The terminal conductor portions 35T1 to 35T4 are respectively connected to one end of the
電感器11用之導體部351及電感器12用之導體部352、以及端子用導體部35T1~35T4分別配置於從與磁性基板21之第1面21a垂直之方向(與垂直於介電層35之第1面之方向相同)觀察時,與圖4A所示之電感器11用之導體部341及電感器12用之導體部342、以及端子用導體部34T1~34T4重疊之位置。電感器17用之導體部357A及357B配置於從與磁性基板21之第1面21a垂直之方向觀察時,與圖4A所示之電感器17用之導體部347重疊之位置。The
LC複合零件1包含將介電層35貫通之導體部35V1、35V2、35V3、35V4、35V5、35V6、35V7及35V8。於圖4B中,以兩點鏈線表示導體部35V1~35V8。於圖4A所示之端子用導體部34T1~34T4、以及電感器11用之導體部341及電感器12用之導體部342,分別連接有導體部35V1~35V6之一端。於圖4A所示之電感器17用之導體部347連接有導體部35V7及35V8中之各一端。於端子用導體部35T1~35T4、以及電感器用導體部351、352、357A及357B,分別連接有導體部35V1~35V8之另一端。The LC composite component 1 includes conductor parts 35V1, 35V2, 35V3, 35V4, 35V5, 35V6, 35V7, and 35V8 penetrating the
圖4C示出了磁性層22及介電層36、以及將磁性層22及介電層36貫通之端子用導體部41、42、43及44。LC複合零件1包含將磁性層22及介電層36貫通之端子用導體部41、42、43及44。於圖4C中,對端子用導體部41~44標註影線。於圖4B所示之端子用導體部35T1~35T4,分別連接有端子用導體部41~44之一端。4C shows the
繼而,參照圖5之電路圖,對本實施形態之LC複合零件1之電路構成進行說明。於本實施形態中,LC複合零件1具有低通濾波器之功能。如圖5所示,LC複合零件1具備被輸入信號之輸入端子2、輸出信號之輸出端子3、3個電感器11、12及17、以及4個電容器13、14、15及16。Next, referring to the circuit diagram of FIG. 5, the circuit configuration of the LC composite component 1 of the present embodiment will be described. In this embodiment, the LC composite component 1 has the function of a low-pass filter. As shown in FIG. 5, the LC composite component 1 includes an
電感器11之一端、電容器13之一端及電容器15之一端電性連接於輸入端子2。電感器12之一端、電容器14之一端及電容器16之一端電性連接於電感器11之另一端以及電容器13之另一端。電感器12之另一端、電容器14之另一端及電容器15之另一端電性連接於輸出端子3。電感器17之一端電性連接於電容器16之另一端。電感器17之另一端接地連接。One end of the
以下,對圖1、圖2、圖3A~圖3C以及圖4A~圖4C中所示之LC複合零件1之具體構成與圖5中所示之電路構成之關係進一步進行說明。圖5中之輸入端子2包括圖4A~圖4C中之端子用導體部41之另一端。圖5中之輸出端子3包括圖4A~圖4C中之端子用導體42之另一端。圖4A~圖4C中之端子用導體部43及44之各另一端構成圖5中接地連接之接地端子。Hereinafter, the relationship between the specific configuration of the LC composite component 1 shown in FIGS. 1, 2 and 3A to 3C and FIGS. 4A to 4C and the circuit configuration shown in FIG. 5 will be further described. The
圖5中之電感器11包括圖3A~圖3C及圖4A~圖4C中之電感器11用之導體部311、331、341及351、以及導體部33V5、34V5及35V5,且具有線圈構造。如圖2所示,芯部23貫通介電層32~36,位於電感器11用之導體部311、331、341及351以及導體部33V5、34V5及35V5所形成之線圈構造之內周部之內側。電感器11用之導體部311、331、341及351均為沿芯部23之外周延伸之線狀之導體部。The
圖5中之電感器12包括圖3A~圖3C及圖4A~圖4C中之電感器12用之導體部312、332、342及352、以及導體部33V6、34V6及35V6,且具有線圈構造。如圖2所示,芯部24貫通介電層32~36,且位於電感器12用之導體部312、332、342及352、以及導體部33V6、34V6及35V6所形成之線圈構造之內周部之內側。電感器12用之導體部312、332、342及352均為沿芯部24之外周延伸之線狀之導體部。The
圖5中之電感器17包括圖3A~圖3C及圖4A~圖4C中之電感器17用之導體部337、347、357A及357B、以及導體部34V7、35V7及35V8,且具有線圈構造。The
(作用效果) 根據本實施形態之LC複合零件,可一面降低未達截止頻率之低頻信號之插入損耗,一面提昇超過截止頻率之高頻信號之插入損耗。因此,作為低通濾波器之特性優異。尤其適合截止頻率為1.1~1.6 GHz之低通濾波器。截止頻率可定義為-3 dB之點。該LC複合零件除了用作低通濾波器之外,還可用作高通濾波、帶通濾波器。(Effect) According to the LC composite component of this embodiment, it is possible to reduce the insertion loss of low-frequency signals that do not reach the cut-off frequency and increase the insertion loss of high-frequency signals that exceed the cut-off frequency. Therefore, it has excellent characteristics as a low-pass filter. Especially suitable for low-pass filters with cut-off frequency of 1.1 to 1.6 GHz. The cut-off frequency can be defined as the -3 dB point. In addition to being used as a low-pass filter, this LC composite part can also be used as a high-pass filter and band-pass filter.
(製造方法之一例)
繼而,參照圖1,對本實施形態之LC複合零件1之製造方法進行說明。於本實施形態之LC複合零件1中,於包含複數個LC複合零件1之成為磁性基板21之部分之晶片上,形成LC複合零件1之除磁性基板21以外之複數個構成要素。藉此,製作LC複合零件1之排列有複數行零件本體20之基礎構造物。繼而,藉由將該基礎構造物切斷而將複數個零件本體20互相分離。藉此,製造複數個LC複合零件1。(An example of manufacturing method)
Next, referring to FIG. 1, the method of manufacturing the LC composite component 1 of this embodiment will be described. In the LC composite component 1 of the present embodiment, a plurality of constituent elements of the LC composite component 1 other than the
以下,參照圖2、圖3A~圖3C及圖4A~圖4C,以1個LC複合零件1為重點,更詳細地說明本實施形態之LC複合零件1之製造方法。再者,於以下之說明中,為了方便起見,將晶片中成為磁性基板21之部分稱為磁性基板21。於本實施形態之製造方法中,首先,於磁性基板21之上,使用薄膜形成技術,形成複數個介電層及複數個導體部。具體而言,首先,於磁性基板21之第1面21a之上形成介電層31。繼而,於介電層31之上形成圖3A中所示之複數個導體部31T1~31T4、311~316。複數個導體部之形成方法可為形成未被圖案化之導體層之後,藉由使用遮罩進行蝕刻來將導體層圖案化之方法,或者亦可為使用遮罩形成已被圖案化之導體層之方法。作為導體層之形成方法,可使用濺鍍法及鍍覆法等各種薄膜形成法。以下說明之其它複數個導體部之形成方法亦與此相同。Hereinafter, referring to FIGS. 2, 3A to 3C and FIGS. 4A to 4C, focusing on one LC composite part 1, the method of manufacturing the LC composite part 1 of the present embodiment will be described in more detail. In addition, in the following description, for convenience, the part of the wafer that becomes the
繼而,藉由例如濺鍍法等,於介電層31以及導體部31T1~31T4、311~316之上形成介電層32。繼而,於介電層32之上,形成圖3B中所示之電容器用之導體部323、324、325A、325B及326。繼而,形成介電層33。繼而,於介電層32及33形成導體部33V1~33V6用之6個孔,並且於介電層33形成導體部33V7~33V11用之5個孔。繼而,形成圖3B及圖3C中所示之複數個導體部33V1~33V6、331、332、337、333、334、335A、335B、336、33T1、33T2、33T3及33T4。Then, the
繼而,於介電層33及導體部上形成介電層34。繼而,於介電層34形成導體部34V1~34V7用之7個孔。繼而,形成圖4A中所示之複數個導體部341、342、347、34T1、34T2、34T3及34T4。繼而,於介電層34上形成介電層35。繼而,於介電層35形成導體部35V1~35V8用之8個孔。繼而,形成圖4B中所示之複數個導體部351、352、357A、357B,35T1、35T2、35T3及35T4。繼而,於介電層35及導體部上形成介電層36。Then, a
繼而,於介電層36形成端子用導體部41~44用之4個孔。繼而,藉由例如鍍覆法形成圖4C中所示之端子用導體部41~44。Then, four holes for the
繼而,於介電層32~36形成芯部23及24用之2個孔。繼而,以填滿上述2個孔內,且覆蓋端子用導體部41~44之方式,形成隨後成為磁性層22、芯部23及24之備用磁性層。繼而,研磨備用磁性層直至露出端子用導體部41~44為止。藉此,備用磁性層中殘留於芯部23及24用之2個孔內之部分成為芯部23及24,剩餘之部分成為磁性層22。因形成磁性層22、芯部23及24而完成基礎構造物。繼而,以切取複數個零件本體20之方式,將基礎構造物切斷。
再者,為形成芯部23、24及磁性層(備用磁性層)22,塗佈包含上述磁性金屬粒子及樹脂之硬化性組合物且使之硬化即可。Then, two holes for the
本發明不限於上述實施形態,可採用各種變化態樣。
例如,LC複合零件中之電容器、電感器以及芯部之數量分別為1個以上即可。又,電容器、電感器及芯部之形態亦可配合用途適當地變更。又,電感器及電容器之配置亦可任意地變更。例如,當從垂直於第1面21a之方向觀察時,電容器可與其它之電感器重疊。The present invention is not limited to the above-mentioned embodiment, and various changes can be adopted.
For example, the number of capacitors, inductors, and cores in the LC composite part may be one or more. In addition, the shapes of capacitors, inductors, and cores can be appropriately changed according to the application. In addition, the arrangement of inductors and capacitors can also be changed arbitrarily. For example, when viewed from a direction perpendicular to the
又,於磁性層之厚度不均一之情形時,採用平均厚度作為磁性層之厚度即可。於芯部之厚度不均一之情形時,採用平均厚度作為芯部之厚度即可。於LC複合零件具有複數個芯部之情形時,至少一個芯部之厚度與磁性層之厚度滿足上述關係即可。Furthermore, when the thickness of the magnetic layer is not uniform, the average thickness may be used as the thickness of the magnetic layer. When the thickness of the core is not uniform, the average thickness can be used as the thickness of the core. When the LC composite part has a plurality of cores, the thickness of at least one core and the thickness of the magnetic layer may satisfy the above relationship.
又,本實施形態之LC複合零件1之製造方法不限於上述方法。例如,LC複合零件1中之至少磁性基板21與磁性層22之間之複數個介電層及複數個導體部例如可藉由低溫共燒法等而形成。In addition, the manufacturing method of the LC composite component 1 of this embodiment is not limited to the above-mentioned method. For example, at least the plurality of dielectric layers and the plurality of conductor portions between the
以下,藉由實施例對本發明進行更詳細說明,但本發明不限於以下之實施例。Hereinafter, the present invention will be described in more detail with examples, but the present invention is not limited to the following examples.
(實施例1) 藉由以下所示之方法,調整了用於形成磁性基板、磁性層及芯部之硬化性樹脂組合物。即,將硫酸亞鐵及硫酸鈷之水溶液以磁性金屬粒子中之Fe及Co之質量比成為7:3之方式進行調配,並以鹼性水溶液將該等一部分中和。於中和後之水溶液中進行起泡通氣,並攪拌上述水溶液,藉此獲得含Co之針狀之針鐵礦粒子。將過濾水溶液而得之含Co之針鐵礦粒子以離子交換水洗淨乾燥之後,進而於空氣中進行加熱,而獲得含Co之赤鐵礦粒子。(Example 1) The curable resin composition used to form the magnetic substrate, the magnetic layer, and the core was adjusted by the method shown below. That is, an aqueous solution of ferrous sulfate and cobalt sulfate is prepared so that the mass ratio of Fe and Co in the magnetic metal particles becomes 7:3, and these parts are neutralized with an alkaline aqueous solution. Carry out bubbling and aeration in the neutralized aqueous solution, and stir the above aqueous solution to obtain Co-containing needle-shaped goethite particles. The Co-containing goethite particles obtained by filtering the aqueous solution are washed and dried with ion exchange water, and then heated in air to obtain Co-containing hematite particles.
將所得之含Co之赤鐵礦粒子於氫氣氛圍之爐內以550℃之溫度進行加熱。此後,將爐內氛圍切換為氬氣,冷卻至200℃左右。進而,藉由以24小時一面將氧分壓增加至21%一面冷卻至室溫,而獲得具備金屬芯部及氧化金屬膜且以Fe及Co為主成分之磁性金屬粒子。The obtained Co-containing hematite particles were heated at a temperature of 550°C in a furnace in a hydrogen atmosphere. After that, the atmosphere in the furnace was switched to argon and cooled to about 200°C. Furthermore, by cooling to room temperature while increasing the oxygen partial pressure to 21% in 24 hours, magnetic metal particles having a metal core and a metal oxide film and containing Fe and Co as main components are obtained.
於所得之磁性金屬粒子中,以樹脂組合物之硬化物中之磁性金屬粒子之體積比例達到40體積%之方式,添加環氧樹脂及硬化劑,並使用混合輥於室溫下混練,藉此,將樹脂組合物製成漿料狀,從而獲得磁性基板、磁性層及芯部形成用之硬化性之樹脂組合物。
繼而,應用公知之薄膜形成方法,製作圖1~圖5所示之LC複合零件1。此處,使用上述樹脂組合物之硬化物作為磁性基板21、磁性層22及芯部23、24之材料,使用Cu作為電感器11、12、17及電容器13~16之導電材料,使用聚醯亞胺樹脂作為介電層31及33~36之材料,使用氮化矽作為介電層32之材料。芯之厚度為100 μm,磁性層之厚度為50 μm,磁性基板之厚度為60 μm,從厚度方向觀察LC複合零件時之尺寸為650 μm×500 μm。將LC複合零件之截止頻率設為1.2 GHz。In the obtained magnetic metal particles, epoxy resin and hardener are added so that the volume ratio of the magnetic metal particles in the hardened resin composition reaches 40% by volume, and they are mixed at room temperature using a mixing roller, thereby , The resin composition is made into a slurry form to obtain a curable resin composition for magnetic substrate, magnetic layer and core formation.
Then, a well-known thin film forming method is used to produce the LC composite part 1 shown in FIGS. 1 to 5. Here, the cured product of the above resin composition is used as the material of the
(實施例2~7)
除了如表1所示地變更芯部之厚度、磁性層之厚度、磁性基板之厚度以外,以與實施例1同樣之方式製造實施例2~7之LC複合零件。再者,實施例2、6係對應於使芯之厚度變小,一面維持電感器11、12之線圈構造之匝數,一面縮短導體部33V5、34V5及35V5以及導體部33V6、34V6及35V6之長度,縮小線圈構造之軸方向長度。又,實施例4、5係對應於使芯部之厚度變大,一面維持電感器11、12之線圈構造之匝數,一面增長導體部33V5、34V5及35V5以及導體部33V6、34V6及35V6之長度,增加線圈構造之軸方向長度。於任一實施例中,均將芯部23及24之厚度設為電感器11及12之線圈構造之軸方向長度以上。(Examples 2-7)
Except that the thickness of the core, the thickness of the magnetic layer, and the thickness of the magnetic substrate were changed as shown in Table 1, the LC composite parts of Examples 2 to 7 were produced in the same manner as in Example 1. Furthermore,
(實施例8) 除了於中和步驟中,降低鹼性水溶液之中和率,降低氧化步驟中被供給之中和後之金屬(Fe及Co)離子濃度,且如表1所示地變更磁性金屬粒子之平均長軸徑、縱橫比值及CV值以外,以與實施例1同樣之方式,獲得實施例8之LC複合零件。(Example 8) In addition to the neutralization step, the neutralization rate of the alkaline aqueous solution is reduced, and the metal (Fe and Co) ion concentration after the neutralization is supplied in the oxidation step is reduced, and the average length of the magnetic metal particles is changed as shown in Table 1. Except for the shaft diameter, the aspect ratio value, and the CV value, in the same manner as in Example 1, the LC composite part of Example 8 was obtained.
(實施例9) 除了於中和步驟中,提昇鹼性水溶液之中和率,提昇氧化步驟中被供給之中和後之金屬(Fe及Co)離子濃度,且如表1所示地變更磁性金屬粒子之平均長軸徑、縱橫比值及CV值以外,以與實施例1同樣之方式,獲得實施例9之LC複合零件。(Example 9) In addition to the neutralization step, the neutralization rate of the alkaline aqueous solution is increased, the metal (Fe and Co) ion concentration after the neutralization is supplied in the oxidation step is increased, and the average length of the magnetic metal particles is changed as shown in Table 1. Except for the shaft diameter, the aspect ratio value, and the CV value, the LC composite part of Example 9 was obtained in the same manner as in Example 1.
(實施例10) 除了於中和步驟中,提昇鹼性水溶液之中和率,提昇氧化步驟中被供給之中和後之金屬(Fe及Co)離子濃度,且如表1所示地變更磁性金屬粒子之平均長軸徑、縱橫比值及CV值以外,以與實施例1同樣之方式,獲得實施例10之LC複合零件。(Example 10) In addition to the neutralization step, the neutralization rate of the alkaline aqueous solution is increased, the metal (Fe and Co) ion concentration after the neutralization is supplied in the oxidation step is increased, and the average length of the magnetic metal particles is changed as shown in Table 1. Except for the shaft diameter, the aspect ratio value, and the CV value, in the same manner as in Example 1, the LC composite part of Example 10 was obtained.
(實施例11、12) 除了以樹脂組合物之硬化物中之磁性金屬粒子之體積比例分別達到30體積%及50體積%之方式,製備硬化性之樹脂組合物以外,以與實施例1同樣之方式,獲得實施例11、12之LC複合零件。(Examples 11, 12) Except that the curable resin composition was prepared so that the volume ratio of the magnetic metal particles in the cured resin composition reached 30% by volume and 50% by volume, respectively, Example 11 was obtained in the same manner as in Example 1. , 12 LC composite parts.
(實施例13) 除了於磁性金屬粒子之製造中未添加Co,且以樹脂組合物之硬化物中之磁性金屬粒子之體積比例達到50體積%之方式,製備硬化性之樹脂組合物以外,以與實施例1同樣之方式,獲得了實施例13之LC複合零件。(Example 13) Except that Co was not added in the manufacture of magnetic metal particles, and the curable resin composition was prepared so that the volume ratio of the magnetic metal particles in the cured resin composition reached 50% by volume, the same as in Example 1 In this way, the LC composite part of Example 13 was obtained.
(實施例14) 除了於磁性金屬粒子之製造中添加Ni取代Co,且以樹脂組合物之硬化物中之磁性金屬粒子之體積比例達到50體積%之方式,製備硬化性之樹脂組合物以外,以與實施例1同樣之方式,獲得實施例14之LC複合零件。(Example 14) Except that Ni was added to replace Co in the manufacture of magnetic metal particles, and the volume ratio of the magnetic metal particles in the hardened resin composition reached 50% by volume, the curable resin composition was prepared as in Example 1. In the same way, the LC composite part of Example 14 was obtained.
(比較例1)
除了芯部之厚度設為30 μm以外,以與實施例1同樣之方式,獲得比較例1之LC複合零件。再者,對應於使芯部之厚度變小,一面維持電感器11、12之線圈構造之匝數,一面縮短導體部33V5、34V5及35V5以及導體部33V6、34V6及35V6之長度,縮小線圈構造之軸方向長度。即,芯部23及24之厚度設為電感器11及12之線圈構造之軸方向長度以上。(Comparative example 1)
The LC composite part of Comparative Example 1 was obtained in the same manner as in Example 1, except that the thickness of the core was set to 30 μm. Furthermore, in response to reducing the thickness of the core, while maintaining the number of turns of the coil structure of the
[磁性金屬粒子之評價方法] (磁性金屬之尺寸以及縱橫比) 利用透過型電子顯微鏡(TEM)以倍率50萬倍觀察各個實施例及比較例中所得之LC複合零件之磁性層之剖面中之磁性金屬粒子,測定磁性金屬粒子之長軸及短軸方向之尺寸(長軸徑及短軸徑)(nm),求出縱橫比。以同樣方式,觀察200~500個磁性金屬粒子,計算長軸徑、短軸徑以及縱橫比之平均值。磁性金屬粒子之縱橫比之平均值及CV值、以及磁性金屬粒子之長軸徑之平均值於表1中示出。[Evaluation method of magnetic metal particles] (Size and aspect ratio of magnetic metal) Observe the magnetic metal particles in the cross section of the magnetic layer of the LC composite parts obtained in each embodiment and comparative example with a transmission electron microscope (TEM) at a magnification of 500,000 times, and measure the size of the magnetic metal particles in the long axis and short axis directions (Major axis diameter and minor axis diameter) (nm), and find the aspect ratio. In the same way, 200 to 500 magnetic metal particles are observed, and the average value of the major axis diameter, minor axis diameter, and aspect ratio is calculated. The average value of the aspect ratio and the CV value of the magnetic metal particles, and the average value of the major axis diameter of the magnetic metal particles are shown in Table 1.
(磁飽和) 將實施例及比較例所得之樹脂組合物之硬化物加工成1 mm×1 mm×3 mm,使用振動試樣型磁力計(VSM,Tamagawa Seisakusho Co.,Ltd製造),測定加工所得之複合磁體之磁飽和( emu/g)。結果示於表1。(Magnetic saturation) The cured product of the resin composition obtained in the Examples and Comparative Examples was processed into 1 mm×1 mm×3 mm, and the processed composite magnets were measured using a vibrating sample type magnetometer (VSM, manufactured by Tamagawa Seisakusho Co., Ltd.) The magnetic saturation (emu/g). The results are shown in Table 1.
(LC複合零件之插入損耗之最大值及最小值) 使用網路分析儀(N5230A,Keysight Technologies),於各實施例及比較例中所得之LC複合零件中,求出插入損耗之頻率特性。繼而,求出0.824-0.960 GHz中之插入損耗之最大值、及1.648-1.920 GHz中之插入損耗之最小值。結果示於表1。又,表示實施例1、實施例5以及比較例1之插入損耗之頻率特性之特性圖分別於圖6~圖8中示出。(Maximum and minimum insertion loss of LC composite parts) A network analyzer (N5230A, Keysight Technologies) was used to obtain the frequency characteristics of the insertion loss in the LC composite parts obtained in each embodiment and comparative example. Then, find the maximum value of insertion loss in 0.824-0.960 GHz and the minimum value of insertion loss in 1.648-1.920 GHz. The results are shown in Table 1. In addition, characteristic diagrams showing the frequency characteristics of the insertion loss of Example 1, Example 5, and Comparative Example 1 are shown in FIGS. 6 to 8 respectively.
[表1]
根據實施例1~3及5以及比較例1之結果,可知T1/T2為1.0以上之情形(實施例1~3及5)與T1/T2未達1.0之情形(比較例1)相比,插入損耗特性進一步提昇。又,可知於T1/T2為1.0以上之情形時,插入損耗特性以T1/T2為3.0之情形(實施例5)、T1/T2為2.0之情形(實施例1)、T1/T2為1.2之情形(實施例3)、T1/T2為1.0之情形(實施例2)之順序更加提昇。According to the results of Examples 1 to 3 and 5 and Comparative Example 1, it can be seen that the case where T1/T2 is 1.0 or more (Examples 1 to 3 and 5) is compared with the case where T1/T2 is less than 1.0 (Comparative Example 1). The insertion loss characteristics are further improved. In addition, it can be seen that when T1/T2 is 1.0 or more, the insertion loss characteristics are the case where T1/T2 is 3.0 (Example 5), the case where T1/T2 is 2.0 (Example 1), and T1/T2 is 1.2. The order of the case (embodiment 3) and the case where T1/T2 is 1.0 (embodiment 2) is further improved.
1:LC複合零件
1b:底面
1s:側面
1t:上表面
2:輸入端子
3:輸出端子
11, 12, 17:電感器
13~16:電容器
20:零件本體
21:磁性基板
21a:磁性基板之第1面
21b:磁性基板之第2面
22:磁性層
22a:磁性層22之第1面
22b:磁性層22之第2面
23, 24:芯部
31~36:介電層
33V1~33V11, 34V1~34V7, 35V1~35V8:導體部
31T1~31T4, 33T1~33T4, 34T1~34T4, 35T1~35T4, 41~44:端子用導體部
37:介電積層體
311, 312, 331, 332, 337, 341, 342, 347, 351, 352, 357A, 357B:電感器用之導體部
313, 315, 316, 323, 324, 325A, 325B, 326:電容器用之導體部
T1, T2, T3:厚度1: LC
圖1係表示本發明之一實施形態之LC複合零件之構成之立體圖。 圖2係表示本發明之一實施形態之LC複合零件之構成之剖視圖。 圖3A係用於說明本發明之一實施形態之LC複合零件之介電層之構造之說明圖。 圖3B係用於說明本發明之一實施形態之LC複合零件之介電層之構造之說明圖。 圖3C係用於說明本發明之一實施形態之LC複合零件之介電層之構造之說明圖。 圖4A係用於說明本發明之一實施形態之LC複合零件之介電層之構造之說明圖。 圖4B係用於說明本發明之一實施形態之LC複合零件之介電層之構造之說明圖。 圖4C係用於說明本發明之一實施形態之LC複合零件之介電層之構造之說明圖。 圖5係表示本發明之一實施形態之LC複合零件之電路構成之電路圖。 圖6係表示第1實施例之LC複合零件中之插入損耗之頻率特性之特性圖。 圖7係表示第5實施例之LC複合零件中之插入損耗之頻率特性之特性圖。 圖8係表示第1比較例之LC複合零件中之插入損耗之頻率特性之特性圖。Fig. 1 is a perspective view showing the structure of an LC composite part according to an embodiment of the present invention. Fig. 2 is a cross-sectional view showing the structure of an LC composite part according to an embodiment of the present invention. Fig. 3A is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. Fig. 3B is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. Fig. 3C is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. Fig. 4A is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. Fig. 4B is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. Fig. 4C is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. Fig. 5 is a circuit diagram showing the circuit configuration of an LC composite component according to an embodiment of the present invention. Fig. 6 is a characteristic diagram showing the frequency characteristics of the insertion loss in the LC composite part of the first embodiment. Fig. 7 is a characteristic diagram showing the frequency characteristics of the insertion loss in the LC composite part of the fifth embodiment. Fig. 8 is a characteristic diagram showing the frequency characteristics of the insertion loss in the LC composite part of the first comparative example.
1:LC複合零件 1: LC composite parts
1b:底面 1b: bottom surface
1s:側面 1s: side
1t:上表面 1t: upper surface
11,12,17:電感器 11, 12, 17: inductor
13~16:電容器 13~16: Capacitor
20:零件本體 20: Part body
21:磁性基板 21: Magnetic substrate
21a:磁性基板之第1面 21a: The first side of the magnetic substrate
21b:磁性基板之第2面 21b: The second side of the magnetic substrate
22:磁性層 22: Magnetic layer
22a:磁性層22之第1面
22a: the first side of the
22b:磁性層22之第2面
22b: The second side of the
23,24:芯部 23, 24: Core
37:介電積層體 37: Dielectric laminate
42,44:端子用導體部 42,44: Conductor part for terminal
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