TWI388475B - Pellicle container - Google Patents

Description

Dust-proof film assembly storage container

The present invention relates to a storage container for a pellicle for use in manufacturing a semiconductor device, a printed substrate, a liquid crystal display, etc., and more particularly to a large pellicle assembly container used in the manufacture of a liquid crystal display.

In the manufacturing process of semiconductors such as LSI and super LSI, or liquid crystal displays, the semiconductor wafer or the liquid crystal original plate is irradiated with light to create a pattern, but the mask or the initial mask used at this time (hereinafter only If the dust is attached, the dust will absorb light or bend the light. In addition to deforming the transferred pattern and roughening the edges, the substrate will be stained and the size, quality and appearance will be damaged. Wait.

Therefore, such operations are usually carried out in a clean room, but even if it is so often necessary to keep the reticle clean, it is quite difficult. Therefore, a method of performing exposure after attaching a pellicle film member as a dustproof device to a surface of a photomask is generally employed. At this time, the foreign matter is not directly attached to the surface of the photomask, but is attached to the pellicle film assembly, so that the foreign matter on the pellicle film assembly is not transferred to the photomask as long as the focus is on the photomask. Make an impact.

In general, the pellicle is provided with a transparent pellicle film on the upper end surface of the pellicle frame, and an adhesive layer for attaching to the photomask is provided on the lower end surface. Specifically, a good solvent for the pellicle film is applied to the upper end surface of the pellicle frame made of a material such as aluminum, stainless steel or polyethylene, and then the nitrocellulose, cellulose acetate, and fluorine are excellent in light transmittance. A transparent pellicle film made of a resin or the like is air-dried and bonded thereto (Patent Document 1: JP-A-58-219023) or a bonding agent such as an acrylic resin or an epoxy resin (Patent Document 2: USA) Patent No. 4,861,402, Patent Document 3: Japanese Patent Publication No. 63-27707). Then, on the lower end surface of the pellicle frame, an adhesive layer composed of a resin such as polybutylene resin, polyvinyl acetate resin, acrylic resin, or epoxy resin is attached to the photomask. And a release layer (separator) for protecting the adhesive layer, if necessary.

The separator is usually coated with a release agent on a film having a thickness of about 100 to 200 μm such as a PET resin, and then the film is cut into a shape desired by us. The partition portion is formed in a frame shape almost the same as the outer shape of the frame except for being thin, so that it becomes like a soft cord, and it is attached to the adhesive layer in addition to being difficult to thoroughly clean. In the homework, it is also very inconvenient to use.

In addition, the partition must be made of a single piece of raw material sheet without seams, creases, and the like. If the partition has a difference in height such as seams and creases, the shape is transferred to the bonded adhesive layer, which may affect the stability of the bonded mask. It is difficult to manufacture such a large-sized whole sheet of raw material without seams, creases, and the like, and it is difficult to apply the release agent to the entire surface without defects. Therefore, for a large pellicle assembly, particularly a large pellicle having a length of more than 1 m on one side, it is difficult to manufacture the separator.

The separator must have a function of protecting the adhesive layer, and it is peeled off and discarded when the pellicle is used. In order to solve such problems, the separator may not be used. In order to omit the use of the partition, for example, a pellicle assembly container can be used. Usually, the pellicle is housed in the container so that the adhesive layer faces downward (the pellicle container storage container side). Conversely, the adhesive layer is placed on the upper side, and the dust-proof film side is placed on the lower side. However, in this case, the inside of the pellicle is directed upward in the pellicle container storage container, and the portion that is most in need of protection may be contaminated by foreign matter, which is not preferable. In the past, there has been no document which proposes a pellicle pack storage container that can store a pellicle assembly without requiring a partition in storage.

In the prior art, a pellicle assembly frame support is provided in a pellicle assembly container, and a pellicle assembly and a pellicle assembly container which do not require a partition during storage are disclosed (Patent Document 4: JP-A-2009-128635) ). However, when the pellicle frame support is very soft, it is impossible to securely and sufficiently fix the pellicle frame support to the pellicle assembly container by means of a fixing bolt or the like, when the pellicle frame support is hard. There is a problem that vibration, impact, and the like which are generated on the pellicle frame when the mobile pellicle container storage container is not sufficiently absorbed, and the problem cannot be solved.

[Advanced technical literature]

[Patent Literature]

[Patent Document 1] JP-A-58-219023

[Patent Document 2] US Patent No. 4,861,402

[Patent Document 3] Japanese Patent Publication No. 63-27707

[Patent Document 4] Japanese Patent Laid-Open Publication No. 2009-128635

In order to solve the above problems, an object of the present invention is to provide a pellicle pack storage container which uses an adhesive layer protection means other than the partition portion for a pellicle film assembly, particularly a large pellicle film having at least one side longer than 500 mm. (In other words, the separator is not used), the adhesive layer is protected, and the pellicle can be reliably held even during vibration or impact during storage or transportation.

The inventors of the present invention have made efforts to solve the above problems, and as a result, have found that the dustproof film module storage container includes a tray on which a pellicle film member can be placed, and a lid portion that covers the tray and forms a closed space for accommodating the pellicle film assembly together with the tray. The tray comprises: a pellicle assembly frame support that is in contact only with an uncoated adhesive region provided on a portion of the adhesive coated end face of the pellicle frame to support the pellicle assembly; and a retention mechanism And fixing the pellicle frame to the pellicle frame support; further, the pellicle frame support system is composed of a base portion and a buffer portion in contact with the pellicle frame, and is formed by two members having different hardnesses. In the joined body, the adhesive layer can be protected even without using the partition, and the pellicle can be reliably held even during vibration or impact during storage or transportation.

Therefore, the present invention provides the following pellicle assembly container.

Request item 1:

A dustproof film assembly storage container comprising: a tray on which a pellicle assembly can be placed; and a cover portion covering the tray, together with the tray forming an enclosed space for accommodating the pellicle assembly; the tray comprising: a pellicle frame a support body which is only in contact with an uncoated adhesive region provided on a portion of the adhesive coated end face of the pellicle frame, and supports the pellicle assembly; and a holding mechanism which will be a pellicle frame And being fixed to the pellicle frame support; the pellicle frame support system is composed of a base portion and a buffer portion that is in contact with the pellicle frame, and both the base portion and the buffer portion are joined by members having different hardnesses. The base portion of the pellicle frame support is harder than the buffer portion, and the hardness of the cushion portion is measured by a rubber hardness meter TYPE A to be 10 or more and 80 or less.

Request 2:

The pellicle assembly container according to claim 1, wherein the base portion of the pellicle frame support is made of engineering plastic, and the cushion portion of the pellicle frame support is made of rubber or synthetic rubber. .

Request item 3:

The pellicle container storage container according to claim 1 or 2, wherein the hardness of the buffer portion is 10 or more and 60 or less in terms of a rubber hardness meter TYPE A.

Request item 4:

The pellicle assembly container according to any one of the first aspect of the present invention, wherein the base portion of the pellicle frame support and the buffer portion are integrally molded by a dissimilar material molding.

In the pellicle assembly container of the present invention, the adhesive layer can be protected without using a partition, and the pellicle can be reliably held even during vibration or rinsing during storage or transportation. Further, since the partition portion is not used, it is possible to solve the problem that the material of the large-sized separator of the large pellicle unit is difficult to obtain, and in addition to the cost of the partition portion itself, it is possible to save the cleaning operation and paste of the partition portion. The related operations such as the cooperative industry can significantly reduce manufacturing costs. For the above reasons, the utilization value of the present invention in the industry is very high.

According to the present invention, it is possible to provide a dustproof film assembly storage container The dust film assembly is fixed in the storage container so that the adhesive layer does not contact the pellicle container storage container, and the adhesive layer can be protected without using the partition portion, so that the partition portion is not required for storage. Therefore, it is possible to solve the problem that the material of the partition portion of the large pellicle is difficult to obtain. Further, since there is no problem that dust is generated from the partition portion itself during the conveyance or the separation operation of the partition portion, the effect is remarkable from the viewpoint of preventing foreign matter from adhering. Further, in addition to the cost of the partition portion itself, it is possible to save steps related to the washing operation and the bonding work, and it is possible to significantly reduce the manufacturing cost.

In addition, the pellicle frame support system is composed of members having different hardnesses, so that the vibration and the punching of the pellicle assembly during transportation can be effectively absorbed and buffered, especially when the pellicle frame is supported by rubber or synthetic rubber. The rubber or the synthetic rubber absorbs and buffers the vibration and the smashing of the dustproof film assembly during transportation, so that the dustproof film assembly frame or the dustproof film can be effectively prevented from coming into contact with the dustproof film assembly storage container and damaged. Further, if the pellicle frame support system is composed of a base portion and a buffer portion that comes into contact with the pellicle frame, the most suitable members can be used. Further, the molding method of the dissimilar material molding is integrally molded, and the step of joining the base portion and the buffer portion can be saved, and the joining can be made very strong.

Hereinafter, the present invention will be described in detail with reference to the drawings, but the invention is not limited thereto.

Fig. 1 shows an embodiment of a pellicle container storage container according to the present invention. In this case, the pellicle assembly container is in a state in which the pellicle assembly 1 is housed. In Fig. 1, (A) is a plan view, (B) is a cross-sectional view taken along line A-A' in (A), and (C) is a cross-sectional view taken along line BB' in (A). (D) is an enlarged view of a portion surrounded by C in (B), and (E) is a plan view in a state where the lid portion is opened.

As shown in FIG. 1, the pellicle film container of the present invention includes a tray 21 on which a pellicle unit 1 can be placed, and a lid portion 22 that covers the tray 21 and forms a pellicle film assembly together with the tray 21. The enclosed space. The tray and the lid are made of a hard material that is less likely to generate dust, such as a resin or metal such as engineering plastic. The pellicle is made in a manner that matches the shape of the mask, usually four The angle (rectangular or square), the tray also matches the shape and size of the pellicle to accommodate the pellicle assembly. In the pellicle container storage container 2 shown in Fig. 1, the tray 21 is formed in a substantially rectangular shape, and at this time, a bank portion 211 is provided on the inner side of the outer peripheral wall so as to protrude around the entire circumference along the outer peripheral wall.

The lid portion 22 is formed in a shape of a lid covering the tray 21. At this time, the outer peripheral edge portion of the lid portion 22 is formed to be outwardly turned outward and then folded back upward. When the lid portion 22 is placed on the tray 21, the lid formed by folding back is formed. The bottom surface of the portion 22 contacts the top surface between the outer peripheral wall of the tray 21 and the bank portion 211, and the outer peripheral surface of the lid portion 22 formed by the folding contact contacts the inner peripheral surface of the outer peripheral wall of the tray 21, thereby forming the storage pellicle assembly. 1 enclosed space.

As shown in FIG. 1, the pellicle assembly container houses a pellicle assembly 1 having a quadrangular ring shape (rectangular ring shape in FIG. 1) formed of a reticle shape. A pellicle film 12 is stretched on one end surface of the eleven, and an adhesive (adhesive layer) 13 is usually applied to the entire periphery of the pellicle frame 11 on the other end surface. Then, as shown in FIG. 1, an adhesive is provided on a part of the adhesive-coated end surface of the pellicle frame 11 (which may be any of the outer circumferential side, the width direction central portion, and the inner circumferential side). The layer 13 (provided on the inner peripheral side in Fig. 1), the remaining portion is the uncoated region a where the adhesive 13 is not applied.

In the tray of the pellicle assembly container of the present invention, a pellicle frame support is provided in contact with an uncoated adhesive region provided on a portion of the adhesive coated end face of the pellicle frame. To support the pell film assembly. The pellicle frame support body is disposed on the tray, for example, in the case shown in FIG. 1, on the top surface of the tray 21 (in FIG. 1, the projection is provided on the outer peripheral portion of the tray 21). The pellicle frame support 3 is provided on the bank portion 211). The pellicle frame support body is formed to have a sufficient height so that the adhesive layer formed by the adhesive applied to the pellicle frame does not come into contact with the tray. In addition, in FIG. 1, the pellicle frame support body 3 is provided in the bank part 211, but it is not limited by this, and if the bank part 211 is not provided, it can also set directly on the tray 21. High degree of pellicle frame support 3 .

The pellicle frame support 3 is disposed on the inner side of the outer periphery of the tray 21 (for example, on the bank portion 211 shown in FIG. 1) along the entire circumference of the outer periphery or on a portion of the periphery. In Fig. 1, a truncated cone-shaped pellicle frame support 3 is provided in a total of eight at approximately equal intervals in the direction around the tray 21 of the bank portion 211.

In addition, although FIG. 1 exemplifies an embodiment in which eight truncated cone-shaped pellicle frame support members are provided, the position, number, and shape of the pellicle frame support may be based on the contained pellicle assembly or dustproof. The shape of the film component storage container is appropriately set. Basically, the gap between the adhesive layer and the tray of the pellicle container storage container and the pellicle frame support can be surely ensured even if the vibration or the squeezing during transportation causes the pellicle frame to move. When the pellicle frame support is disposed in a portion of the periphery of the tray, the number of the pellicle frame support is not particularly limited. However, in order to stably support the pellicle assembly, the pellicle frame support should be set to three. Above, it is more preferable to set 4 or more.

The uncoated region of the uncoated adhesive of the adhesive-coated end face of the pellicle frame is brought into contact with and placed on the pellicle frame support. In Fig. 1, an adhesive layer 13, an upper surface of a truncated cone-shaped pellicle frame support 3, and a pellicle frame are provided only on the inner peripheral side of the adhesive-coated end face of the pellicle frame 11 The uncoated region a of the uncoated adhesive of the adhesive-coated end face of the 11 is contacted, and the pellicle is supported. At this time, the adhesive layer 13 is not in contact with the pellicle frame support 3 .

Further, in the tray of the pellicle container storage container of the present invention, a holding mechanism for fixing the pellicle frame to the pellicle frame support is provided. For the holding mechanism, for example, a holding mechanism for holding the side surface of the frame or the end surface of the film joining layer side, etc., it is particularly preferable to use a retaining mechanism for inserting a pin into a non-through hole provided on the side surface of the pellicle frame to fix the pellicle frame.

The pellicle assembly 1 shown in Fig. 1 is horizontally formed from the peripheral surface of the pellicle frame 11 (formed from the outer peripheral surface in Fig. 1, but also from the inner peripheral surface) toward the inside of the pellicle frame 11. The direction is set to a predetermined number (in In Fig. 1, a total of four non-through holes 11a are formed in the corner portions of the pellicle frame 11, and the predetermined number corresponds to the number of the pins 41 of the holding mechanism 4 for fixing the holding of the pellicle frame 11 to be described later. The pin 41 of the mechanism 4 can be inserted into the non-through hole 11a.

On the other hand, on the tray 21, a holding mechanism 4 including a pin 41 is provided at a position corresponding to the non-through hole 11a (four positions on the bank portion 211 in Fig. 1). Thereby, it is possible to prevent the pellicle film assembly from moving in the pellicle pack container in the middle of transporting the pellicle. Fig. 1 shows a state in which the pellicle film assembly 1 is fixed in the pellicle assembly container by the holding mechanism 4. The pin 41 can be advanced and retracted in the non-through hole 11a, and the pellicle frame 11 is placed on the pellicle frame support 3, and the pin 41 is inserted into the non-through hole 11a, thereby fixing the pellicle frame 11 to the pellicle. The pellicle assembly 1 can be released from the holding mechanism 4 by pulling out the pin 41 from the non-through hole 11a in the module frame support 3. Further, it is preferable to provide an elastic body such as rubber at the tip end of the pin of the holding mechanism, whereby the fixation can be made more stable.

The pellicle frame support of the pellicle assembly container of the present invention is composed of a base portion and a buffer portion that is in contact with the pellicle frame. Further, the base portion and the buffer portion have different hardnesses and are joined into a joint body. Fig. 2 is an enlarged longitudinal sectional view showing the pellicle frame support 3 of the pellicle assembly container 2 shown in Fig. 1. At this time, the lower portion (the tray 21 side) of the frustum-shaped pellicle frame support 3 is The base portion 31 and the upper portion (that is, the side in contact with the pellicle frame 11) are the buffer portions 32. The base portion of the pellicle frame support is preferably harder than the buffer portion.

The base portion may also be integrally formed with the tray. However, if the position of the pellicle frame support is adjusted in consideration of the size or shape of the pellicle, it is preferable to provide a separate member different from the tray. At this time, the joining of the base portion 31 and the tray 21 must be reliably fixed by a member such as a fixing bolt. Therefore, the base portion 31 is preferably made of a material having sufficient hardness and strength, for example, an engineering plastic. The material of the engineering plastic can be a material that can be smoothly processed on the surface as long as it is not easy to generate dust. For example, ABS (acrylonitrile-butadiene-benzenediene copolymer) or PC (poly) can be used. Carbonate), PI (polyimide), PA (polyamine), PBT (polybutylene terephthalate), PPS (polyphenylene sulfide), PEEK (polyetheretherketone), POM ( Polyoxymethylene), SPS (coordinate polystyrene) and other materials.

On the other hand, since the buffer portion must be capable of absorbing or buffering the vibration or punching of the pellicle frame, it is preferably rubber or synthetic rubber. The material of the rubber or the synthetic rubber may be any material that can smooth the surface thereof, and examples thereof include NBR (nitrile rubber), IR (polyisoprene rubber), and EPDM (ethylene propylene triene rubber). Rubber such as CR (chloroprene rubber), Q (oxygen rubber), SBR (styrene butadiene rubber), BR (butadiene rubber), FKM (fluororubber), IIR (butyl rubber), PS (Polystyrene), PE (polyethylene), PP (polypropylene) or other synthetic rubber [PS, PE, PP and PB (polybutadiene) copolymer] and other materials.

The rubber or synthetic rubber used in the cushioning portion preferably has a hardness of 10 or more and 80 or less, more preferably 10 or more and 60 or less, based on the rubber hardness meter TYPE A. If the hardness is less than 10 by the rubber hardness meter TYPE A, the buffer portion may not support the pellicle frame collapse and may be too soft to be processed. In addition, if the hardness is higher than 80, the buffer portion may be too hard to absorb or buffer the vibration or the punch of the pellicle frame.

In order to impart an antistatic function to the engineering plastics, a surfactant, carbon, metal or metal oxide may be blended in the rubber and the synthetic rubber. Thereby, it is possible to prevent the pellicle film from being electrostatically charged during transportation or when it is taken out from the pellicle container storage container, thereby reducing the risk of foreign matter adhering due to static electricity or damaging the mask pattern when the pellicle is attached.

Further, the bonding between the base portion of the pellicle frame support and the buffer portion can be carried out by using a double-sided tape, a bonding agent, an adhesive or the like, and it is preferable to integrally form the molding by a different material molding method. Since the double-sided tape is cut so as to match the joint surface of the base portion and the buffer portion, it may be difficult to bond the adhesive tape or the adhesive, and the adhesive or the adhesive may generate gas or may overflow the joint surface. In addition, these steps are very elaborate steps and therefore take a lot of time. On the other hand, when molding is performed by molding a different material, the base portion and the buffer portion can be integrally molded at the time of molding in the mold, so that the production time is short and the production is relatively easy.

According to the pellicle assembly container of the present invention, the pellicle can be housed, fixed, and held in the pellicle container storage container without the adhesive layer contacting the tray. Therefore, it is not necessary to provide the partition protecting the adhesive layer, and the use of the partition can be omitted. In addition, since it is not easy to ensure that a whole raw material sheet having no seams, creases, or the like is used as the partition portion, the dustproof film unit storage container of the present invention is particularly suitable for use as a storage body with at least one side length of 500 mm. Above, in particular, a container of a large pellicle assembly of 1000 mm or more, especially 1500 mm or more.

[Examples]

Hereinafter, the present invention will be specifically described by way of examples and comparative examples, but the invention is not limited to the following examples.

[Example 1]

A pellicle assembly 1 as shown in Fig. 3 was produced. That is, the 5000 series aluminum alloy was cut into a pellicle frame 11 having an outer dimension of 1600 mm, a short outer dimension of 1500 mm, a height of 5.8 mm, and a width of 13 mm by mechanical processing, and the surface was subjected to black oxygen aluminum treatment. At four predetermined positions on the outer side surface of the pellicle frame 11, a non-through hole 11a into which the pin 41 of the holding mechanism 4 can be inserted is provided. The pellicle frame was washed with pure water, and after drying, a tantalum-adhesive diluted with toluene was applied by a vertical 3-axis dispenser (manufactured by Shin-Etsu Chemical Co., Ltd., product name: X- 40-3122) as the adhesive layer 13. Further, the cross-sectional shape of the adhesive layer 13 is a semicircle having a width of 4 mm and a height of 1.5 mm. At this time, the width of the pellicle frame was 13 mm, and since the adhesive layer was provided at 4 mm inside, the outer side was an uncoated region a having a width of 9 mm.

Further, a helium-oxygen adhesive (manufactured by Shin-Etsu Chemical Co., Ltd., product name: KR-3700) was diluted with toluene as a dust-proof film adhesive layer (not shown), and applied to a pressure-sensitive adhesive. The opposite side of the end face was dried to a thickness of 0.1 mm, and then heated to 130 ° C to harden it. The pellicle film 12 is coated with a fluororesin (manufactured by Asahi Glass Co., Ltd., product name: Cytop) on a rectangular quartz substrate of 1600 mm × 1700 mm whose surface is polished very smoothly. After the solvent is dried, it is removed from the quartz. The substrate was peeled off to obtain a dust-proof film having a thickness of 4 μm. followed by The pellicle film 12 is attached to the pellicle bonding agent layer, and the unnecessary portion on the outside is cut off by a cutter to complete the pellicle film assembly 1.

In addition, a black antistatic ABS resin (manufactured by TORAY Co., Ltd., product name: Toyolacparel) having a thickness of 5 mm was formed into a tray 21 of the pellicle assembly container 2 shown in Fig. 1 by a vacuum molding method. In the same manner, a black antistatic ABS resin (product name: Toyolacparel, manufactured by Toray Co., Ltd.) having a thickness of 5 mm was produced into a lid portion 22 of the pellicle assembly container 2 by a vacuum molding method. The position of the holding mechanism 4 is adjusted such that the pin 41 of the holding mechanism 4 is fitted into the non-through hole 11a provided in the pellicle frame 11, and then the holding mechanism 4 is joined and fixed to the pellicle container storage container tray 21, the pin 41 is a member obtained by injection molding using ABS resin.

Further, the pellicle frame support 3 is placed at eight positions of the tray 21 of the pellicle container storage container 2 so as to contact only the uncoated region a of the adhesive of the pellicle frame 11. The pellicle frame support 3 is a base portion 31 made of ABS resin, and a PS-(PE/PP/PB) copolymer (manufactured by KURARAY PLASTICS Co., Ltd., product name: Septon KC-596, hardness: The pellicle frame cushioning portion 32, which is formed by measuring 40) of the rubber hardness meter TYPE A, is integrally molded by a dissimilar material molding method, and can be attached to the tray 21. The mold temperature was maintained at 40 ° C during the molding of the different materials, and the cylinder temperature of the molding machine was heated to 190 ° C to carry out molding.

The pellicle container storage container 2 is washed with pure water in a clean room, and after drying, the pellicle frame support is placed so as to contact the uncoated region a of the adhesive of the pellicle frame 11 only. In the body 3, the pellicle assembly is fixed by the holding mechanism 4, and the pellicle assembly 1 is housed in the pellicle assembly container 2.

[Embodiment 2]

The base of the pellicle frame support is made of polycarbonate, and the cushioning part is made of silicone rubber (manufactured by Shin-Etsu Chemical Co., Ltd., product name: KE-1950-10, hardness: 10 measured by rubber hardness meter TYPEA) A pellicle assembly container was produced in the same manner as in Example 1 except that the pellicle was molded, and the pellicle was fixed and housed.

[Example 3]

ABS is used for the base of the pellicle frame support, and PS-(PE/PP/PB) copolymer is used for the buffer (KURARAY PLASTICS CO., LTD., product name: Septon KC-623, hardness: rubber hardness meter TYPE A A pellicle assembly container was produced in the same manner as in Example 1 except that the measurement was carried out by a dissimilar material molding method, and the pellicle assembly was fixed and housed.

[Comparative Example 1]

ABS is used for the base of the pellicle frame support, and a silicone rubber is used for the buffer (manufactured by Shin-Etsu Chemical Co., Ltd., product name: KE-1052A/B, hardness: 1 or less with a rubber hardness meter TYPE A, A dust-proof film module storage container was produced in the same manner as in Example 1 except that the ASKER C was measured to have a size of 10), and the pellicle film assembly was fixed and stored.

[Comparative Example 2]

ABS is used for the base of the pellicle frame support, and silicone rubber is used for the buffer (manufactured by Shin-Etsu Chemical Co., Ltd., product name: KER-2667, hardness: 90 or more with rubber hardness meter TYPE A, with SHORE A dust-proof film module storage container was produced in the same manner as in Example 1 except that the amount of D was measured to be 70%, and the pellicle film assembly was fixed and stored.

The pellicle container storage containers produced in Examples 1 to 3 and Comparative Examples 1 and 2 were evaluated. The evaluation method is as follows. The results are shown in Table 1.

Evaluation item 1 (pneumatic film module retention): The retention of the pellicle frame support to the pellicle assembly (pneumatic membrane module frame) when the pellicle assembly was housed in the pellicle assembly container was visually confirmed.

Evaluation item 2 (adhesion of foreign matter): The pellicle film storage container in which the pellicle is housed is vertically erected, and after maintaining for one minute, the level is restored, and the operation is performed three times in total to visually confirm the pellicle film and the pellicle film. The foreign matter attachment condition of the component frame.

[Table 1]

1‧‧‧Plastic membrane assembly

11‧‧‧Plastic membrane assembly frame

11a‧‧‧non-through holes

12‧‧‧Dust film

13‧‧‧Adhesive (adhesive layer)

2‧‧‧Plastic membrane assembly storage container

21‧‧‧Tray

211‧‧‧Department

22‧‧‧ 盖部

3‧‧‧Plastic membrane module frame support

31‧‧‧ Base Department

32‧‧‧ buffer

4‧‧‧ Keeping institutions

41‧‧ ‧ sales

a‧‧‧Uncoated area of adhesive

A-A’‧‧‧ segment

B-B’‧‧‧ segment

C‧‧‧ bracketing

D-D’‧‧‧ segment

Fig. 1 is a view showing a state in which a pellicle assembly is housed in a pellicle assembly container, in which a (A) is a plan view and (B) is an A along (A). a cross-sectional view of the -A' line segment, (C) is a cross-sectional view along the B-B' line segment of (A), (D) is an enlarged view of the portion enclosed by C in (B), and (E) is the cover portion opened. Top view of the state.

Fig. 2 is a longitudinal sectional view showing an embodiment of a pellicle frame support according to the present invention.

Fig. 3 shows a pellicle film assembly used in the embodiment, (A) is a bottom view seen from the side of the adhesive coated end face, and (B) is a cross-sectional view taken along line D-D' of (A).

1. . . Dust-proof film assembly

11. . . Dust-proof film assembly frame

11a. . . Non-through hole

12. . . Dust film

13. . . Adhesive (adhesive layer)

2. . . Dust-proof film assembly storage container

twenty one. . . tray

211. . . Embankment

twenty two. . . Cover

3. . . PSA module frame support

31. . . Base body

32. . . Buffer section

4. . . Holding mechanism

41. . . pin

a. . . Uncoated area of adhesive

A-A’. . . Line segment

B-B’. . . Line segment

C. . . Enveloping part

Claims (4)

A dustproof film assembly storage container comprising: a tray on which a pellicle assembly can be placed; and a cover portion covering the tray, together with the tray forming an enclosed space for accommodating the pellicle assembly; the tray comprising: a pellicle frame a support body which is only in contact with an uncoated adhesive region provided on a portion of the adhesive coated end face of the pellicle frame, and supports the pellicle assembly; and a holding mechanism which will be a pellicle frame And being fixed to the pellicle frame support; the pellicle frame support system is composed of a base portion and a buffer portion that is in contact with the pellicle frame, and both the base portion and the buffer portion are joined by members having different hardnesses. The base portion of the pellicle frame support is harder than the buffer portion, and the hardness of the buffer portion is measured by a rubber hardness meter TYPE A to be 10 or more and 80 or less. The pellicle assembly container according to the first aspect of the invention, wherein the base portion of the pellicle frame support is formed of an engineering plastic, and the buffer portion of the pellicle frame support is made of rubber or synthetic rubber. form. The dust-proof membrane module storage container according to claim 1 or 2, wherein the hardness of the buffer portion is measured by a rubber hardness meter TYPE A to be 10 or more and 60 or less. The pellicle assembly container according to claim 1 or 2, wherein the base portion and the buffer portion of the pellicle frame support are integrally molded by a dissimilar material.