JP2011034020A - Pellicle storage container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pellicle storage container capable of protecting an adhesive layer without using a separator and surely holding a pellicle even when there is a vibration or an impact during keeping and during transportation. <P>SOLUTION: The pellicle storage container includes a tray for mounting the pellicle and a cover for covering the tray and forming a closed space for housing the pellicle together with the tray. The tray includes a pellicle frame support for supporting the pellicle by being in contact with only an adhesive non-applied area provided on a part of the adhesive applied end face of a pellicle frame, and a holding mechanism for fixing the pellicle frame on the pellicle frame support. The pellicle frame support includes a base body part and a buffer part to be in contact with the pellicle frame, and both are formed by the bonded body of members of different hardness. By this invention, since the pellicle is fixed inside the storage container without letting the adhesive layer be in contact with the pellicle storage container and the adhesive layer is protected even without using a separator, the separator is not needed during keeping. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a pellicle storage container used for manufacturing a semiconductor device, a printed circuit board, a liquid crystal display, and the like, and more particularly to a large pellicle storage container used for manufacturing a liquid crystal display.

  In the manufacture of semiconductors such as LSI and VLSI, and in the manufacture of liquid crystal displays and the like, a pattern is produced by irradiating a semiconductor wafer or liquid crystal master plate with light. A photomask or reticle (hereinafter simply referred to as a photomask) used at this time is used. If the dust adheres to (describe), the dust will absorb light or bend the light, so the transferred pattern will be deformed, the edges will be rough, and the ground will be black. There has been a problem that dimensions, quality, appearance, etc. are impaired.

  For this reason, these operations are usually performed in a clean room, but it is still difficult to keep the photomask clean. Therefore, a method is generally employed in which exposure is performed after a pellicle is attached to the photomask surface as a dust remover. In this case, the foreign matter does not adhere directly to the surface of the photomask but adheres to the pellicle. Therefore, if the focus is set on the pattern of the photomask during lithography, the foreign matter on the pellicle becomes irrelevant to the transfer.

  In general, a pellicle has a transparent pellicle film stretched on the upper end surface of the pellicle frame, and an adhesive layer to be attached to a photomask on the lower end surface. Specifically, a transparent pellicle film made of nitrocellulose, cellulose acetate, fluororesin, etc. that transmits light well is applied to the upper surface of a pellicle frame made of aluminum, stainless steel, polyethylene, etc. Adhere by air-drying (Patent Document 1: Japanese Patent Application Laid-Open No. 58-219023) or adhere with an adhesive such as an acrylic resin or an epoxy resin (Patent Document 2: US Pat. No. 4,861,402, Patent Document 3: Japanese Patent Publication No. 63-27707). Furthermore, the lower end surface of the pellicle frame has an adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin, silicone resin, etc. for mounting on a photomask, and, if necessary, for protecting the adhesive layer. A release layer (separator) was attached.

  As the separator, a separator obtained by applying a release agent on a thin film of about 100 to 200 μm such as PET resin and cutting it into a desired shape is usually used. In addition to the thinness of the film, the separator has a frame shape that is almost the same as the outer shape of the frame, which makes it look like a string and is difficult to clean. There is a problem that handling is extremely inconvenient in operations such as pasting.

  In addition, the separator needs to be manufactured from a single raw material sheet having no seams, creases, and the like. If there is a step such as a seam or a crease in the separator, the shape is transferred to the attached adhesive layer, which may affect the stability of the mask after application. It is difficult to produce a single large raw material sheet without such seams and folds, and it is also difficult to apply a release agent over the entire surface without any defects. Therefore, it has been difficult to manufacture a separator for a large pellicle, particularly for a large pellicle having a side length exceeding 1 m.

  The separator is only required to protect the pressure-sensitive adhesive layer and is peeled off and discarded when the pellicle is used. Therefore, it is not necessary to use the separator in order to solve these problems. In order to omit the use of the separator, for example, a pellicle storage container may be used. In this case, the pellicle is normally stored in the storage container with the adhesive layer facing downward (pellicle storage container side). It is also conceivable to place the pressure-sensitive adhesive layer upward and the pellicle film side downward. However, in this case, the inside of the pellicle film faces upward in the pellicle storage container, and there is a concern that foreign matter may adhere to a portion that should be protected most, which is not preferable. Therefore, so far, there has been hardly proposed a pellicle storage container that can store a pellicle without requiring a separator during storage.

  As a pellicle that does not require a separator during storage and a pellicle storage container, there is a pellicle storage container provided with a pellicle frame support (Japanese Patent Application Laid-Open No. 2009-128635). However, if the pellicle frame support is soft, the pellicle frame support cannot be securely fixed to the pellicle container by screws or the like, or if the pellicle frame support is hard, the pellicle storage container is There was a problem that vibrations and shocks to the pellicle frame generated during movement could not be sufficiently absorbed, and the problem was not solved.

JP 58-219033 US Pat. No. 4,861,402 Japanese Patent Publication No. 63-27707 JP 2009-128635 A

  The present invention has been made to solve the above-described problems. For a pellicle, particularly a large pellicle having at least one side length of 500 mm or more, an adhesive layer protecting means other than a separator, that is, a separator is provided. It is an object of the present invention to provide a pellicle storage container that can protect a pressure-sensitive adhesive layer without being used, and can securely hold a pellicle even when there is vibration or impact during storage or transportation.

  As a result of intensive studies to solve the above problems, the present inventor has a tray on which the pellicle is placed, and a cover that covers the tray and forms a closed space together with the tray to accommodate the pellicle. , A pellicle frame support that supports the pellicle by contacting only the adhesive-unapplied area provided on a part of the adhesive-coated end surface of the pellicle frame, and a holding mechanism that fixes the pellicle frame on the pellicle frame support The pellicle frame support is formed of a base body portion and a buffer portion in contact with the pellicle frame, and both are formed of a joined body of members having different hardnesses. It is seen that the pellicle can be securely held even when there is vibration or impact during storage or transportation, even if it is not used. And were able to complete the present invention.

Accordingly, the present invention provides the following pellicle storage container.
Claim 1:
An adhesive provided with a tray on which a pellicle is placed and a cover that covers the tray and forms a closed space together with the tray to accommodate the pellicle, the tray being provided on a part of the adhesive application end surface of the pellicle frame A pellicle storage container having a pellicle frame support that supports the pellicle by contacting only the uncoated area, and a holding mechanism that fixes the pellicle frame on the pellicle frame support,
A pellicle storage container, wherein the pellicle frame support is composed of a base portion and a buffer portion in contact with the pellicle frame, and both are formed of a joined body of members having different hardnesses.
Claim 2:
2. A pellicle storage container according to claim 1, wherein the base portion of the pellicle frame support is formed of engineering plastic, and the buffer portion of the pellicle frame support is formed of rubber or elastomer.
Claim 3:
The pellicle storage container according to claim 1 or 2, wherein a base portion of the pellicle frame support is formed to be harder than the buffer portion, and the hardness of the buffer portion is 10 or more and 80 or less in the durometer type A.
Claim 4:
The pellicle storage container according to any one of claims 1 to 3, wherein a base portion and a buffer portion of the pellicle frame support are integrally formed by two-color molding.

  The pellicle storage container of the present invention protects the pressure-sensitive adhesive layer without using a separator, and can reliably hold the pellicle even when there is vibration or impact during storage or transportation. Furthermore, since a separator is not used, in particular, the problem of difficulty in obtaining raw materials for a large separator in a large pellicle can be solved, and not only the cost of the separator itself but also related operations such as cleaning and pasting of the separator can be reduced. The manufacturing cost can be greatly reduced. From the above, the industrial utility value is extremely high.

  According to the present invention, the pellicle is fixed in the storage container without contacting the pellicle storage container, and the pressure-sensitive adhesive layer can be protected without using a separator. A pellicle storage container can be provided. Therefore, it is possible to solve the problem that it is difficult to obtain separator raw materials particularly in a large pellicle. In addition, since the generation of dust from the separator itself during transportation or during the separation work of the separator is eliminated, the effect is great from the viewpoint of preventing foreign matter adhesion. Furthermore, not only the cost of the separator itself but also related processes such as a cleaning operation and an attaching operation can be reduced, so that the manufacturing cost can be greatly reduced.

  Also, by combining the pellicle frame support with members having different hardnesses, vibration and impact of the pellicle during transportation can be effectively absorbed and mitigated. In particular, the pellicle frame is supported by rubber or elastomer. In such a case, vibration and impact of the pellicle during transportation can be absorbed and alleviated with rubber or elastomer, and the pellicle frame and pellicle film can be effectively prevented from coming into contact with the pellicle storage container and being damaged. Furthermore, if the pellicle frame support is composed of a base portion and a buffer portion in contact with the pellicle frame, optimum members can be used respectively. Furthermore, by integrally molding by a molding method using two-color molding, the step of joining the base portion and the buffer portion can be omitted, and strong joining can be achieved.

1A and 1B show a pellicle storage container according to an embodiment of the present invention, and show a state where a pellicle is stored in a pellicle storage container, where FIG. 1A is a plan view and FIG. 1B is a cross section taken along line AA ′ in FIG. (C) is a sectional view taken along line BB ′ in (A), (D) is an enlarged view of a portion surrounded by C in (B), and (E) is a plan view in a state where a cover is opened. It is. It is a longitudinal cross-sectional view which shows one Embodiment of the pellicle frame support body of this invention. It is a figure which shows the pellicle used in the Example, (A) is the bottom view seen from the adhesive application end surface side, (B) is sectional drawing in the D-D 'line | wire of (A).

Hereinafter, the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto.
FIG. 1 is a view showing an embodiment of a pellicle storage container according to the present invention. In this case, the pellicle storage container in a state where a pellicle 1 is stored is shown. 1A is a plan view, FIG. 1B is a cross-sectional view taken along the line AA ′ in FIG. 1A, FIG. 1C is a cross-sectional view taken along the line BB ′ in FIG. FIG. 4B is an enlarged view of a portion surrounded by C in FIG. 5B, and FIG. 5E is a plan view of a state in which the cover is opened.

  As shown in FIG. 1, the pellicle storage container of the present invention includes a tray 21 on which the pellicle 1 is placed, and a cover 22 that covers the tray 21 and forms a closed space together with the tray 21 to store the pellicle 1. . The tray and the cover are formed of a hard material that hardly generates dust, for example, a resin such as an engineering plastic or a metal. The pellicle is manufactured according to the shape of the photomask, and is usually a quadrangle (rectangle or square), but the tray is formed according to the shape and size of the pellicle so that the pellicle can be accommodated. In the case of the pellicle storage container 2 shown in FIG. 1, the tray 21 is formed in a substantially rectangular shape, and in this case, a bank portion 211 is provided on the inner periphery of the outer peripheral wall along the outer peripheral wall so as to protrude over the entire periphery. ing.

  The cover 22 is formed in a lid shape that covers the tray 21. In this case, the outer peripheral edge of the cover 22 is folded outward and further upward. When placed, the bottom surface of the cover 22 formed by folding is on the top surface between the outer peripheral wall of the tray 21 and the bank portion 211, and the outer peripheral surface of the cover 22 formed by folding is A closed space for accommodating the pellicle 1 is formed in contact with the inner peripheral surface of the outer peripheral wall.

  In the pellicle storage container, as shown in FIG. 1, a pellicle film 12 is stretched on one end face of a pellicle frame 11 having a rectangular ring shape (in the case of FIG. 1, a rectangular ring shape) formed in accordance with the shape of a photomask. The pellicle 1 to which the pressure-sensitive adhesive (pressure-sensitive adhesive layer) 13 is applied on the entire other periphery of the pellicle frame 11 is accommodated. Then, as shown in FIG. 1, the pressure-sensitive adhesive layer 13 is formed only on part of the pressure-sensitive adhesive application end surface of the pellicle frame 11 (which may be any of the outer peripheral side, the widthwise central portion, and the inner peripheral side) (FIG. 1). In this case, the remaining portion is an uncoated region a where the adhesive 13 is not applied.

  The tray of the pellicle storage container of the present invention is provided with a pellicle frame support that supports the pellicle by contacting only the non-application area of the adhesive provided on a part of the adhesive application end surface of the pellicle frame. . The pellicle frame support is provided on the tray. For example, in the case shown in FIG. 1, the upper surface of the tray 21 (in the case of FIG. 1, on the bank portion 211 protruding from the outer peripheral edge of the tray 21). Further, a pellicle frame support 3 is provided. The pellicle frame support is formed at a height that is sufficiently separated so that the adhesive layer formed of the adhesive applied on the pellicle frame and the tray do not come into contact with each other. In the case of FIG. 1, the pellicle frame support 3 is provided on the bank portion 211, but the present invention is not limited to this, and a necessary height is formed on the tray 21 without forming the bank portion 211. The pellicle frame support 3 may be formed directly.

  The pellicle frame support 3 is provided inside the outer periphery of the tray 21 (for example, on the bank portion 211 as shown in FIG. 1) along the entire outer periphery or a part of the periphery. In the case of FIG. 1, eight truncated cone-shaped pellicle frame supports 3 are provided at substantially equal intervals in the circumferential direction of the tray 21 of the bank portion 211.

  1 illustrates an example in which eight truncated cone-shaped pellicle frame supports are provided. However, the position and number of the pellicle frame supports, and individual shapes thereof are the shapes of the pellicle to be stored and the pellicle storage container. Can be set as appropriate. Basically, the gap between the pressure-sensitive adhesive layer, the tray of the pellicle storage container, and the pellicle frame support should be ensured even if the pellicle frame moves due to vibration or impact during transportation. When the pellicle frame support is provided in part in the circumferential direction of the tray, the number of pellicle frame supports is not particularly limited, but in order to stably support the pellicle, three pellicle frame supports are provided. In particular, it is preferable to provide four or more.

  The pellicle frame support is placed so that only the uncoated area where the adhesive is not applied on the adhesive-coated end face of the pellicle frame is in contact. In the case of FIG. 1, the adhesive layer 12 is formed only on the inner peripheral side of the adhesive application end surface of the pellicle frame 11, and the upper surface of the truncated cone-shaped pellicle frame support 3 is the adhesive application end surface of the pellicle frame 11. The pellicle is supported in contact with the non-coated area a where the pressure-sensitive adhesive is not applied. At this time, the pressure-sensitive adhesive layer 13 and the pellicle frame support 3 are not in contact with each other.

  The tray of the pellicle storage container of the present invention is provided with a holding mechanism for fixing the pellicle frame on the pellicle frame support. The holding mechanism may be, for example, a holding mechanism that clamps the side surface of the frame or the end surface on the side of the film adhesive layer. In particular, a holding mechanism that fixes the pellicle frame by inserting a pin into a non-through hole provided on the side surface of the pellicle frame. A mechanism is preferred.

  The pellicle 1 shown in FIG. 1 is horizontally oriented toward the inside of the pellicle frame 11 from the peripheral surface of the pellicle frame 11 (in the case of FIG. 1, it is formed from the outer peripheral surface, but may be from the inner peripheral surface). A predetermined number of non-through holes 11a into which pins 41 of the holding mechanism 4 for fixing the pellicle frame 11 to be described later are inserted correspond to the number of pins 41 of the holding mechanism 4 (in the case of FIG. 1, the corners of the pellicle frame 11). 4 in total).

  On the other hand, the holding mechanism 4 having the pins 41 is provided on the tray 21 at positions corresponding to the non-through holes 11a (in the case of FIG. 1, four locations on the bank portion 211). Thereby, it is possible to prevent the pellicle from moving in the pellicle storage container during transportation of the pellicle. FIG. 1 shows a state where the pellicle 1 is fixed in the pellicle storage container by the holding mechanism 4. The pin 41 can be moved back and forth in the non-through hole 11a. By placing the pellicle frame 11 on the pellicle frame support 3 and inserting the pin 41 into the non-through hole 11a, the pellicle frame 11 is moved to the pellicle. The pellicle 1 can be released from the holding mechanism 4 by being fixed on the frame support 3 and withdrawing the pin 41 from the non-through hole 11a. Further, an elastic body such as rubber can be provided at the tip of the pin of the holding mechanism, and in this case, more stable fixation is possible, which is preferable.

  The pellicle frame support of the pellicle storage container according to the present invention includes a base portion and a buffer portion in contact with the pellicle frame. And both the base | substrate part and the buffer part are formed with the joined body of the member from which hardness differs. FIG. 2 is an enlarged longitudinal sectional view of the pellicle frame support 3 of the pellicle storage container 2 shown in FIG. 1. In this case, the lower part (tray 21 side) of the truncated cone-shaped pellicle frame support 3 is a base portion 31. The upper part, that is, the side in contact with the pellicle frame 11 is a buffer part 32. The base portion of the pellicle frame support is preferably formed to be harder than the buffer portion.

  The base portion may be integrally formed from the tray. However, since the position of the pellicle frame support can be adjusted in accordance with the size and shape of the pellicle, it is preferably provided as a separate member from the tray. In that case, since the base part 31 needs to be securely fixed by bonding to the tray 21 or screwing, it is preferable to form the base part 31 with a material having hardness and strength, for example, engineering plastic. The material of the engineering plastic may be any material that does not easily generate dust and can be processed smoothly, such as ABS (acrylonitrile butadiene styrene copolymer), PC (polycarbonate), PI (polyimide), PA (polyamide). PBT (polybutylene terephthalate), PPS (polyphenylene sulfide), PEEK (polyetheretherketone), POM (polyacetal), SPS (syndiotactic polystyrene), and the like can be used.

  On the other hand, since it is necessary to absorb and relieve vibration and impact applied to the pellicle frame, the buffer portion is preferably rubber or elastomer. The material of the rubber or elastomer may be any material that can process the surface smoothly. For example, NBR (acrylonitrile butadiene rubber), IR (isoprene rubber), EPDM (ethylene propylene rubber), CR (chloroprene rubber), Q (silicone) Rubber), SBR (styrene butadiene rubber), BR (butadiene rubber), rubber such as FKM (fluorine rubber), IIR (butyl rubber), elastomers such as PS (polystyrene), PE (polyethylene), PP (polypropylene) (Copolymer of PS, PE, PP and PB (polybutadiene)) can be used.

  The rubber or elastomer used for the buffer is preferably a durometer type A having a hardness of 10 or more and 80 or less, and more preferably 10 or more and 60 or less. If the durometer is lower than 10 in durometer type A, the buffer may not be able to support the pellicle frame and may be crushed or too soft and difficult to process. On the other hand, if the hardness is higher than 80, the buffer part may be too hard to absorb or relieve vibration and impact applied to the pellicle frame.

  These engineering plastics, rubbers and elastomers may be blended with a surfactant, carbon, metal, metal oxide or the like for imparting antistatic performance. This prevents the pellicle from being charged during transportation or removal from the pellicle storage container, thereby reducing the possibility of foreign matter adhering due to static electricity or the occurrence of electrostatic breakdown of the mask pattern when the pellicle is attached.

  Further, double-sided tape, an adhesive, an adhesive, or the like may be used for joining the base portion and the buffer portion of the pellicle frame support, but integral molding by two-color molding is more preferable. In double-sided tape, it may be difficult to cut and paste to fit the joint surface between the base and buffer, and with adhesives and pressure-sensitive adhesives, gas may be generated during curing, or it may protrude beyond the joint surface. May be frustrated. Moreover, these processes are very detailed processes and take time. On the other hand, in the case of molding by two-color molding, since the base portion and the buffer portion can be molded as an integral body during molding in the mold, it can be easily manufactured in a short time.

  If the pellicle storage container of the present invention is used, the pressure-sensitive adhesive layer is stored in a fixed and held state in the pellicle storage container without contacting the tray. Therefore, it is not necessary to protect the pressure-sensitive adhesive layer with the separator, and the use of the separator can be omitted. Further, the pellicle storage container of the present invention is not easy to ensure a single raw material sheet without seams, folds, etc. as a separator. At least one side length is 500 mm or more, particularly 1000 mm or more, particularly 1500 mm or more. It is particularly suitable as a container for storing a large pellicle.

  EXAMPLES Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated concretely, this invention is not restrict | limited to the following Example.

[Example 1]
A pellicle 1 as shown in FIG. 3 was produced. That is, as a pellicle frame 11, a 5000 series aluminum alloy having a long side outside dimension of 1600 mm, a short side outside dimension of 1500 mm, a height of 5.8 mm, and a width of 13 mm was cut by machining, and the surface was black anodized. Non-through holes 11 a into which the pins 41 of the holding mechanism 4 are inserted are provided at predetermined four locations on the outer surface of the pellicle frame 11. This pellicle frame is washed with pure water and dried, and then a pressure-sensitive adhesive layer 13 is obtained by diluting a silicone pressure-sensitive adhesive (manufactured by Shin-Etsu Chemical Co., Ltd., product name: X-40-3122) with toluene. It was applied with a robot. The pressure-sensitive adhesive layer 13 had a saddle-shaped cross-sectional shape with a width of 4 mm and a height of 1.5 mm. At this time, since a 4 mm pressure-sensitive adhesive layer is formed on the inner side with respect to a width of 13 mm of the pellicle frame, there is an uncoated region a having a width of 9 mm on the outer side.

  Further, as a pellicle film adhesive layer (not shown), a silicone pressure-sensitive adhesive (manufactured by Shin-Etsu Chemical Co., Ltd., product name: KR-3700) is diluted with toluene so that the thickness after drying becomes 0.1 mm. After coating on the surface opposite to the end face where the adhesive was applied, these were cured by heating to 130 ° C. The pellicle film 12 is obtained by applying a fluororesin (product name: Cytop, manufactured by Asahi Glass Co., Ltd.) on a 1600 mm × 1700 mm rectangular quartz substrate whose surface is polished smoothly, drying the solvent, The pellicle film having a thickness of 4 μm was obtained by peeling off from the substrate. Then, this pellicle film 12 was affixed onto the pellicle film adhesive layer, and an unnecessary portion outside was cut off with a cutter to complete the pellicle 1.

  On the other hand, a black antistatic ABS resin having a thickness of 5 mm (manufactured by Toray Industries, Inc., product name: Toyolac Parrel) was molded by a vacuum molding method to produce a tray 21 of the pellicle storage container 2 as shown in FIG. . Similarly, a cover 22 of the pellicle storage container 2 was prepared by vacuum molding using a black antistatic ABS resin (product name: Toyolac Parel, manufactured by Toray Industries, Inc.) having a thickness of 5 mm. On the pellicle storage container tray 21, the holding mechanism 4 having a pin 41 made by injection molding of ABS resin was positionally adjusted and fitted and fixed so as to fit into the non-through hole 11 a provided in the pellicle frame 11.

  Further, the pellicle frame support 3 was provided at 8 locations on the tray 21 of the pellicle storage container 2 so as to contact only the uncoated area a of the pellicle frame 11. The pellicle frame support 3 includes a base portion 31 made of ABS resin and a PS- (PE / PP / PB) copolymer (manufactured by Kuraray Plastics Co., Ltd., product name: Septon KC-596, hardness: durometer type A And the pellicle frame buffer portion 32 made of 40) as a unitary joined body by two-color molding, and mounted on the tray 21. At the time of two-color molding, the mold temperature was kept at 40 ° C., and the cylinder temperature of the molding machine was heated to 190 ° C. for molding.

  After the pellicle storage container 2 is cleaned and dried with pure water in a clean room, the pellicle frame support 3 is placed so as to contact only the non-applied area a of the pellicle frame 11 with an adhesive. 4, the pellicle was fixed and the pellicle 1 was accommodated in the pellicle storage container 2.

[Example 2]
Except that the base part of the pellicle frame support is polycarbonate and the buffer part is molded by two-color molding with silicone rubber (manufactured by Shin-Etsu Chemical Co., Ltd., product name: KE-1950-10, hardness: 10 with durometer type A). A pellicle storage container was prepared in the same manner as in Example 1, and the pellicle was fixed and stored.

[Example 3]
The base part of the pellicle frame support is ABS, and the buffer part is PS- (PE / PP / PB) copolymer (manufactured by Kuraray Plastics Co., Ltd., product name: Septon KC-623, hardness: 80 with durometer type A). A pellicle storage container was prepared in the same manner as in Example 1, except that the pellicle was fixed and stored.

[Comparative Example 1]
The base part of the pellicle frame support is ABS, the buffer part is silicone gel (manufactured by Shin-Etsu Chemical Co., Ltd., product name: KE-1052A / B, hardness: 1 or less for durometer type A, 10 for Asuka C), two colors A pellicle storage container was prepared in the same manner as in Example 1 except that molding was performed, and the pellicle was fixed and stored.

[Comparative Example 2]
The base part of the pellicle frame support is ABS, the buffer part is silicone rubber (manufactured by Shin-Etsu Chemical Co., Ltd., product name: KER-2667, hardness: 90 or more for durometer type A, 70 for Shore D) by two-color molding Except for the molding, a pellicle storage container was prepared in the same manner as in Example 1, and the pellicle was fixed and stored.

The pellicle storage containers prepared in Examples 1 to 3 and Comparative Examples 1 and 2 were evaluated. The evaluation method is as follows. The results are shown in Table 1.
Evaluation item 1 (pellicle retention): The pellicle (pellicle frame) retention by the pellicle frame support when the pellicle was stored in the pellicle storage container was visually confirmed.
Evaluation item 2 (Adhesion status of foreign matter): Stand the pellicle storage container containing the pellicle vertically, hold it for 1 minute, and then return it to the horizontal position three times to check the adhesion status of the foreign matter to the pellicle membrane and pellicle frame. This was confirmed visually.

1 Pellicle 11 Pellicle frame 11a Non-through hole 12 Pellicle membrane 13 Adhesive (adhesive layer)
2 Pellicle storage container 21 Tray 211 Bank portion 22 Cover 3 Pellicle frame support 31 Base portion 32 Buffer portion 4 Holding mechanism 41 Pin a Adhesive non-application area

Claims (4)

An adhesive provided with a tray on which a pellicle is placed and a cover that covers the tray and forms a closed space together with the tray to accommodate the pellicle, the tray being provided on a part of the adhesive application end surface of the pellicle frame A pellicle storage container having a pellicle frame support that supports the pellicle by contacting only the uncoated area, and a holding mechanism that fixes the pellicle frame on the pellicle frame support,
A pellicle storage container, wherein the pellicle frame support is composed of a base portion and a buffer portion in contact with the pellicle frame, and both are formed of a joined body of members having different hardnesses.   2. A pellicle storage container according to claim 1, wherein the base portion of the pellicle frame support is formed of engineering plastic, and the buffer portion of the pellicle frame support is formed of rubber or elastomer.   The pellicle storage container according to claim 1 or 2, wherein a base portion of the pellicle frame support is formed to be harder than the buffer portion, and the hardness of the buffer portion is 10 or more and 80 or less in the durometer type A.   The pellicle storage container according to any one of claims 1 to 3, wherein a base portion and a buffer portion of the pellicle frame support are integrally formed by two-color molding.

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