TWI382951B - Workpiece handling system - Google Patents

Description

Workpiece handling system

The present invention relates to a technician who transports a workpiece such as a glass substrate.

A substrate represented by a thin plate-shaped glass substrate used for manufacturing a thin display generally accommodates a plurality of substrates in a substrate. At the time of the process, the substrate storage cassettes are taken out one by one and transported to the substrate processing apparatus, and are transported from the substrate processing apparatus to the substrate storage cassette after the processing. In the case of such a device, it is a transport device that must transport the substrate one by one between the substrate storage cassette and the processing device. An apparatus using a roller conveyor is disclosed in Japanese Laid-Open Patent Publication No. 2004-284772, for example.

Here, in the conventional conveyance device, when the substrate is conveyed between the substrate storage cassette and the processing apparatus, the substrate is inclined during transportation. When the substrate reaches the processing device or the substrate storage cassette in an inclined state, there is a case where the substrate cannot be smoothly transferred from the transfer device to the processing device or the substrate storage cassette.

It is an object of the present invention to prevent the workpiece from being tilted during transportation and to transport the workpiece in the positioned state.

According to the present invention, there is provided a workpiece handling system comprising: first and second placing members spanning a square workpiece; and first moving means for moving the first loading member on the first linear track And a second moving means for moving the second placing member on the second linear track parallel to the first linear track, and a control means for individually controlling the first and second moving means, and by the a moving means, the first abutting portion that moves on the first linear orbit with the first mounting member, abuts against an end edge of the workpiece to define a position of the end edge, and the second moving means a second abutting portion that moves on the second linear orbit with the second mounting member and abuts against an end edge of the workpiece to define a position of the end edge; the control means performs: controlling the first And the second moving means is an initial control in which the first and second abutting portions are located at an initial position spaced apart from the width of the workpiece, and the above-mentioned initial position is Between the first and second abutting portions, when the workpiece is placed on the first and second placing members, at least one of the first and second moving means is controlled to be the first and second abutting The distance between the portions is controlled by the positioning of the width of the workpiece, and after the positioning control, the first and second moving means are controlled to be the first and second placing members and the first and second abutting portions. Handling control for walking in the same direction at constant speed.

According to the workpiece conveyance system, the first and second abutting portions abut against the opposite end edges of the workpiece, and the workpiece can be positioned, and the workpiece can be conveyed in the positioned state. Therefore, the workpiece is not tilted during transportation, and the workpiece can be handled in the positioned state.

Moreover, according to the present invention, there is provided a workpiece transport system comprising first and second belt conveyors arranged to be parallel to each other in a belt running direction, wherein the square workpiece is placed across the first and second A workpiece transport system for transporting each endless belt of a belt conveyor, comprising: a control means for individually controlling the first and second belt conveyors, and each of the first and second belts Each of the belts of the conveyor abuts against an end edge of the workpiece to define a contact portion at a position of the end edge; and the control means performs: driving the first and second belt conveyors to be the first Each of the abutting portions of the second belt conveyor is initially controlled at an initial position spaced apart from the width of the workpiece, and the workpiece is placed between the abutting portions located at the initial position. When each of the loop belts is driven, at least one of the first and second belt conveyors is driven to establish a positional control of the width of the workpiece by the distance between the abutting portions, and after the positioning control The first and second belt conveyor to transport become the endless belt traveling in the same direction constant control.

According to the workpiece conveyance system, the abutting portions abut against the opposite end edges of the workpiece, and the workpiece can be positioned, and the workpiece can be conveyed in the positioned state. Therefore, the workpiece is not tilted during transportation, and the workpiece can be handled in the positioned state.

First embodiment Summary of the system

Fig. 1 is a plan view showing a substrate transfer system A according to an embodiment of the present invention, and Fig. 2 is a front view showing a substrate transfer system A. In the present embodiment, an example in which the present invention is applied to a system for transporting a substrate such as a glass substrate will be described. However, the present invention is also applicable to workpiece transportation other than the substrate. The substrate conveyance system A includes two belt conveyor units 10 each including a first belt conveyor 11 and a second belt conveyor 12, and is disposed on the side of the belt conveyor unit 10, and respectively lifts and lowers the substrate. Four lifting units 20 that house the crucibles 100a and 100b (hereinafter collectively referred to as the substrate housing cassettes 100), and two fixed transfer units 30 disposed between the elevating units 20, and are disposed on the transfer unit 30 side. A two-piece lift transfer unit 40. In the figure, X and Y are horizontal directions orthogonal to each other, and Z is a vertical direction.

The substrate transport system A is a substrate storage cassette 100a that is disposed on the side (+X direction) of the first belt conveyor 11 and the second belt conveyor 12 and accommodates a plurality of substrates, and transports the substrate to the first place. The belt conveyor 11 and the side of the second belt conveyor 12 (-Y direction), and the system of the processing device 110 of the substrate is processed. Further, the substrate that has been processed by the processing device 110 is transported from the processing device 110 to the side (+X direction) disposed on the first belt conveyor 11 and the second belt conveyor 12, and the substrate is housed in a plurality of substrates.匣100b system. In addition, FIG. 1 and FIG. 2 show a case where the substrate is housed in the substrate housing 100.

Substrate storage匣

Fig. 3-1 is an external view showing the substrate housing 100. The substrate housing cassette 100 is a housing that can accommodate a plurality of square substrates, and includes a rectangular parallelepiped frame body composed of a plurality of members 101 extending in the vertical direction and a plurality of members 102 and 103 extending in the horizontal direction. Further, as shown in FIG. 3-2, the metal wire 104 is hung between the opposing members 101, and the accommodated substrate is housed on the metal wire 104 in a mounted state. In the present embodiment, the metal wires 104 are arranged at a predetermined pitch in the vertical direction, and the respective substrate grooves are accommodated to form a plurality of segments in the vertical direction. By using the metal wires 104, the interval between the substrates to be accommodated can be reduced, and the storage efficiency of the substrate housing cassette 100 can be improved.

Lifting unit

Referring to Fig. 1, the elevating unit 20 is provided in a pair with respect to one of the substrate housings 100, and the pair of elevating units 20 are disposed to face each other with the substrate housing 100 interposed therebetween in the Y direction. The configuration of the elevating unit 20 will be described below with reference to FIGS. 2 and 4-1. Fig. 4-1 is a partial cross-sectional view showing a configuration of a surface of the substrate housing 100 of the elevation unit 20.

Each of the lifting units 20 includes a pair of pillars 21 that are spaced apart in the X direction, and a plurality of beams 22 that are spanned between the pillars 21 . A rail member 23 is provided on a side surface of the pillar 21 on the side of the substrate housing 100. A sliding member 24 is slidably attached to the rail member 23, and the sliding member 24 is guided to the rail member 23 to move up and down. The support member 25 is placed between the slide members 24 (a partial cutaway view is shown in FIG. 4-1), and the mounting plate 26 on which the substrate accommodation cassette 100 is mounted is fixed to the support member 25. The substrate housing cassette 100 is placed on the mounting plate 26 of the pair of lifting units 20 from both sides in the Y direction.

The upper beam 22 supports a motor 27 having a reducer whose output shaft is coupled to the upper end portion of the ball screw 29 extending in the Z direction. The upper and lower ends of the ball screw 29 are rotatably supported by the upper and lower shaft portions 28, respectively, and the ball screw 29 is rotated by the rotation of the motor 27. The ball screw 29 is screwed with the ball nut 29a, and the ball nut 29a is coupled to the support member 25 via the joint member 29b. Thus, the ball nut 29a is moved up and down along the ball screw 29 by the forward rotation and the reverse rotation of the ball screw 29, and the ball nut 29a, the joint member 29b, the support member 25, the slide member 24, and the mounting plate 26 are moved up and down. The substrate storage cassette 100 is integrally moved up and down.

Transfer unit 30

Referring to FIGS. 1 and 2, the transfer unit 30 is a unit for transferring a substrate between the belt conveyor 10 and the substrate housing 100, and in the present embodiment, by a plurality (here) There are five pieces of the roller conveyor 31, a support member 32 that supports each roller conveyor 31, and a base member 33 that is provided with a support member 32. In the case of this embodiment, each of the roller conveyors 31 is provided with a row of rollers. The roller conveyor 31 is set in the Y direction by the rotation axis of the roller that is rotationally driven by a driving means (not shown) such as a motor, and conveys the substrate placed on the roller in the X direction. 4-2 and 4-3 are operational explanatory views showing the conveyance operation of the substrate by the elevation unit 20 and the transfer unit 30.

Each of the roller conveyors 31 and the support members 32 is disposed below the substrate housing 100 that is moved up and down by the elevation unit 20, and is disposed in the X direction at a predetermined interval so as not to interfere with the member 103 of the substrate accommodation cassette 100. When the substrate to be stored in the substrate storage cassette 100 is transported to the tape conveyor 10, the substrate is transported from the lowermost substrate, and as shown in FIG. 4-3, the substrate storage unit 100 is lowered by the lifting unit 20. The lowermost substrate is stopped at a position placed on each of the roller conveyors 31. The substrate is transported to the belt conveyor unit 10 by rotationally driving the rollers of the roller conveyor 31.

As shown in FIG. 4-4, when the next substrate is transported, the elevating unit 20 is a substrate housing 100 that is further lowered by about a portion, so that the lowermost substrate stops being placed on each of the roller conveyors 31. . The substrate is conveyed to the belt conveyor 10 by rotationally driving the rollers of the roller conveyor 31. Similarly, in the same manner, the roller conveyor 31 sequentially enters the substrate housing 100, and the substrate in the substrate housing 100 is conveyed. When the substrate is transported from the belt conveyor 10 to the substrate storage cassette 100, the operation is reversed. The substrate transfer between the substrate housing cassette 100 and the belt conveyor 10 is performed at a height position (referred to as a transfer height) of the line L connecting the apexes of the rollers of the respective roller conveyors 31.

Transfer unit 40

Referring to FIGS. 1 and 2, the transfer unit 40 is a unit for transferring the substrate between the belt conveyor 10 and the substrate housing 100 together with the transfer unit 30. Further, the transfer unit 40 disposed on the processing device 110 side also performs substrate transfer between the belt conveyor 10 and the processing device 110. In the present embodiment, each of the transfer units 40 includes a plurality of (here, three) roller conveyors 41, a support member 42a that supports each of the roller conveyors 41, and a base member that is vertically provided with the support members 42a. 42b. In the case of this embodiment, each of the roller conveyors 41 is provided with two rows of rollers. The roller conveyor 41 is set in the Y direction by the rotation axis of the roller that is rotationally driven by a driving means (not shown) such as a motor, and conveys the substrate placed on the roller in the X direction.

Each of the roller conveyors 41 and the support members 42a is disposed in the X direction at a predetermined interval so as not to interfere with the belt of the belt conveyor unit 10 described later, and the center roller conveyor 41 is disposed in the center. 10 belt conveyor units. The transfer unit 40 is provided with a lifting function for raising and lowering each of the roller conveyors 41. Figs. 5-1 and 5-2 are explanatory views showing the operation of the transfer unit 40.

The transfer unit 40 is a base member 43 that supports the seat member 42b via a support member 44 that is expandable and contractible. Each of the roller conveyors 41 is movable up and down with respect to the base member 43 together with the support member 42a and the base member 42b, and the base member 43 is provided with a plate cam 45a and a pinion gear fixed to the rotation shaft of the plate cam 45a. 45b, and a rack 45c that meshes with the pinion 45b, and a guide member 45d that guides the movement of the rack 45c, and a cylinder 45e that moves the rack 45c.

The rack 45c has its longitudinal direction disposed in the X direction, and the cylinder 45e is expanded and contracted in the X direction. By the expansion and contraction of the air cylinder 45e, the rack 45c is guided by the guiding member 45d to move in the X direction. The pinion 45b is also rotated by the movement of the rack 45c, and the plate cam 45a is also rotated. The base member 43 is provided with a hole 43a for avoiding interference with the plate cam 45a. A roller 42c that abuts against the circumferential surface of the plate cam 45a is provided on the lower surface of the base member 42b. On the other hand, the roller conveyor 41 moves up and down by the position of the circumferential surface of the plate cam 45a abutted by the roller 42c and the distance of the rotation axis of the plate cam 45a.

Then, when the transfer unit 40 transfers the substrate between the transfer unit 30 and the transfer unit 30, as shown in FIG. 5-1, the line connecting the apexes of the respective rollers passes through the line L indicating the transfer height. The roller conveyor 41 is located at a rising position (hereinafter referred to as a rising position). On the other hand, when the substrate is transferred from the transfer unit 40 to the belt conveyor unit 10 as described below, the rotation of the plate cam 45a by the extension cylinder 45e is as shown in Fig. 5-2. The roller conveyor 41 is lowered at a position where the line connecting the apexes of the respective rollers passes the line L below the line L indicating the above-described transfer height (this position is hereinafter referred to as a descending position). In the case of returning from the Fig. 5-2 to the aspect of Fig. 5-1, the cylinder 45e is contracted. Further, in the present embodiment, such a lifting mechanism is employed, but other lifting mechanisms may of course be employed.

Belt conveyor unit

The belt conveyor unit 10 will be described with reference to Figs. 1, 2, 6-1, and 6-2. Fig. 6-1 is a schematic side view showing the belt conveyor 11, and Fig. 6-2 is a schematic side view showing the belt conveyor 12. As described above, the belt conveyor unit 10 is constituted by the first belt conveyor 11 and the second belt conveyor 12. In the case of the present embodiment, two belts are provided in parallel in the X direction. Conveyor unit 10.

The first belt conveyor 11 includes a drive pulley 11a and a driven pulley 11b, and an endless belt 11c wound around the drive pulley 11a and the drive pulley 11b. For example, the timing belt is used as the endless belt 11c. Belt conveyor.

The drive pulley 11a and the driven pulley 11b are disposed apart from each other in the Y direction, and the traveling direction of the endless belt 11c is set in the Y direction. The drive pulley 11a is coupled to a drive shaft 11e that is pivotally supported by the bearing 11d. In the case of this embodiment, the first belt conveyor 11 of the two-piece belt conveyor unit 10 is driven synchronously. Therefore, each of the drive pulleys 11a is coupled to the common drive shaft 11e. The end of the drive shaft 11e is connected to the output shaft of the motor 13a having the reducer, and is driven by the rotation of the motor 13a so that the two drive pulleys 11a rotate in synchronization. The driven pulley 11b is such that its rotating shaft is axially supported by the bearing 11f and is freely rotatable. The rotation axis of the driven pulley 11b passes between the upper and lower endless belts 12c of the second belt conveyor 12.

Further, the driven pulley 11b (and the driven pulley 12b described below) may be provided with a shaft by a bearing of the tension adjusting mechanism. Fig. 7-1 is a configuration diagram showing an example in which the driven pulley 11b is supported by the bearing of the tension adjusting mechanism; and Fig. 7-2 shows a section along the line III-III in Fig. 7-1. Figure. The driven pulley 11b is pivotally supported by the bearing portion 61. The bearing portion 61 is movably supported in the Y direction by a guide member 62 that extends in the Y direction. End plates 63a, 63b are fixed to both end portions of the guide member 62, and between the end plates 63a, 63b, the shaft 64 is rotatably attached around the core.

The shaft body 64 is a through-bearing portion 61 and also passes through the moving plate 65 that is movably supported by the guide member 62 in the Y direction. A spiral 64a is formed on a part of the circumferential surface of the shaft body 64, and the moving plate 65 is provided with a screw hole (not shown) screwed to the spiral. The shaft body 64 and the bearing portion 61 are freely fitted. A coil spring 66 is disposed between the moving plate 65 and the bearing portion 61, and the spring is constantly spaced apart. Thus, when the shaft body 64 is rotated, the moving plate 65 is moved in the Y direction. When the moving plate 65 is moved to the side of the bearing portion 61, the endless belt 11c can become tight, but the coil spring 66 is disposed between the moving plate 65 and the bearing portion 61, thereby suppressing excessive tension.

In the endless belt 11c, the endless belt 11c is provided with an abutting portion 14a that abuts against the end edge of the substrate to define the end edge position, and a plurality of projections 15a. Fig. 6-3 is an enlarged view showing a portion where the abutting portion 14a and the protruding portion 15a are provided. In the present embodiment, the abutting portion 14a is formed in a substantially rectangular parallelepiped shape and protrudes from the endless belt 11c. The abutting portion 14a is an end edge position on the -Y side of the predetermined substrate. The projections 15a are provided on the endless belt 11c on which the substrate is placed. In the present embodiment, a plurality of the projections are arranged in the Y direction. The protruding portion 15a functions as a mounting member on which a substrate is placed.

The protrusion 15a is formed in a curved shape on the upper surface to reduce the contact area with the substrate to be placed. Further, the upper surface of the projection 15a is preferably smooth. Further, the line connecting the apexes of the respective protrusions 15a is between the line L' and the line L, and the upper surface of the contact portion 14a is lower than the line L (stacking height). The height direction position of the conveyor unit 10 is positioned.

The protruding portion 15a and the abutting portion 14a are moved in a linear orbit in the Y direction by the travel of the endless belt 11c. That is, the first belt conveyor 11 functions as a moving means for moving the projection 15a and the abutting portion 14a on a linear orbit in the Y direction.

The configuration of the second belt conveyor 12 is the same as that of the first belt conveyor 11. In other words, the second belt conveyor 12 includes a drive pulley 12a, a driven pulley 12b, and an endless belt 12c wound around the drive pulley 12a and the driven pulley 12b. The drive pulley 12a and the driven pulley 12b are disposed apart from each other in the Y direction, and the traveling direction of the endless belt 12c is set in the Y direction. That is, the first belt conveyor 11 and the second belt conveyor 12 are disposed such that the running directions of the respective belts 11c and 12c are parallel to each other. Further, the first belt conveyor 11 and the second belt conveyor 12 are relatively displaced from each other in the Y direction, and the positions of the drive pulley 11a and the driven pulley 11b of the first belt conveyor 11 and The positions of the drive pulley 12a and the driven pulley 12b of the two-belt conveyor 12 are reversed in the Y direction.

The drive pulley 12a is coupled to a drive shaft 12e that is pivotally supported by the bearing 12d. Similarly to the case of the first belt conveyor 11, the drive pulleys 12a of the two-piece belt conveyor unit 10 are coupled to the common drive shaft 12e. The end of the drive shaft 12e is connected to the output shaft of the motor 13b having the reducer, and is driven by the rotation of the motor 13b so that the two drive pulleys 12a rotate in synchronization. With this configuration, it is sufficient to provide one drive source (motors 13a, 13b) for each of the plurality of first belt conveyors 11 and the plurality of second belt conveyors 12, respectively. The driven pulley 12b is freely rotated by its rotation shaft being pivotally supported by the bearing 12f. The rotation axis of the driven pulley 12b passes between the upper and lower endless belts 11c of the first belt conveyor 11. In the endless belt 12c, similarly to the first belt conveyor 11, the end belt 14c that is traveling upward is provided with a contact portion 14b that abuts against the edge of the substrate and defines the position of the end edge, and a plurality of protrusions 15b, this is the same as the abutting portion 14a and the protruding portion 15a which are referred to in Fig. 6-3. The contact portion 14b is a position that defines the +Y side edge of the substrate.

The protruding portion 15b and the abutting portion 14b are moved in a linear direction in the Y direction parallel to the linear path on which the protruding portion 15a and the abutting portion 14a move by the running of the annular portion 12c. That is, the second belt conveyor 12 functions as a moving means for moving the protrusion 15b and the abutting portion 14b on a linear orbit in the Y direction.

Subsidy unit

As shown in FIG. 1 and FIG. 6-1 and FIG. 6-2, in the present embodiment, the auxiliary unit 50 is disposed at approximately the middle portion of the belt conveyor unit 10 in the Y direction. The support unit 50 is a support unit 51 and a support shaft 52. Fig. 6-4 is a cross-sectional view taken along line I-I of Fig. 1; and Fig. 6-5 is a cross-sectional view taken along line II-II of Fig. 1. The support portion 51 is a plate having a smooth surface and is supported by the stage 53 via the leg portion 51a. The support portion 51 is disposed on the lower surface of the portion above the endless belts 11c and 12c, and is supported by the portion to support the endless belts 11c and 12c. The support portion 51 may be a shaft or the like instead of a smooth surface plate. The auxiliary shaft 52 is a shaft body that functions as a tension roller, and is supported by the table 53 via the bearing portion 52a. The auxiliary shaft 52 is disposed below the portion of the endless belts 11c and 12c that is traveling below. By pushing this upward, a certain tension occurs in the endless belts 11c, 12c.

Control department

7-3 is a block diagram showing the control unit 70 that controls the substrate transport system A. The control unit 70 includes a CPU 71, a RAM 72, and a ROM 73. A control program or the like of the substrate transfer system A is stored in the ROM 73. The RAM 72 and the ROM 73 can also employ other memory means. An input interface (I/F) 74 is connected to the CPU 71, and various sensors are connected to the input I/F 74. The sensor includes, for example, a sensor that detects the rotation angle or the amount of rotation of each of the motors 13a, 13b, and 27 and the amount of conveyance of the substrate of the roller conveyor. The detection result of various sensors is obtained by the CPU 71 via the input I/F 74.

An output I/F 75 is connected to the CPU, and a motor and a control valve are connected to the output I/F 75. The motor is, for example, a drive motor of each of the motors 13a, 13b, and 27 and the above-described roller conveyor. The control valve is a valve that switches the direction of the air supply to the cylinder 45e. The CPU 71 outputs a control command to each of the actuators connected to the output I/F 75 to cause the substrate transfer system A to operate, for example, in response to the detection results of various sensors connected to the input I/F 74. Further, of course, the first belt conveyor 11 and the second belt conveyor 12 are individually and independently controlled by the control unit 70. A communication I/F 78 is connected to the CPU 71, and data communication with the host computer 80 is performed. The host computer 80 performs various settings, operation commands, and the like for the substrate transport system A.

Action of the substrate handling system

Hereinafter, an operation example of the substrate transfer system A controlled by the control unit 70 will be described with reference to FIGS. 8 to 14 . Here, a case where the substrate is transported one by one from the substrate housing cassette 100a to the processing apparatus 110, and the processed substrate is transported from the processing apparatus 110 to the substrate housing cassette 100b will be described.

First, the first and second belt conveyors 11 and 12 are driven to cause the endless belts 11c and 12c to travel, and the abutting portion 14a of the first belt conveyor 11 and the abutting portion 14b of the second belt conveyor 12 They are located at a position (initial position) that is spaced apart from the width of the substrate (initial control). Fig. 8 is a view showing a state in which the contact portions 14a and 14b are located at the initial positions. In the drawing, P1 is a position in the Y direction indicating the contact surface of the contact portion 14a with respect to the substrate, and P2 is a position in the Y direction indicating the contact surface of the contact portion 14b with respect to the substrate. P1 and P2 are only the compartment distance d1, and the distance d1> is the Y-direction width of the substrate.

Then, the substrate accommodation cassette 100a is lowered by the elevation unit 20 so that the lowermost substrate is stopped at the position placed on each of the roller conveyors 31 of the transfer unit 30. By rotating the rollers of the roller conveyor 31, the substrate is moved in the -X direction and moved to the belt conveyor 10 (Fig. 9). In the transfer unit 40 on the side of the substrate storage cassette 100a, the roller conveyor 41 is placed at the rising position 1 in advance, and the rollers of the roller conveyor 41 are also rotationally driven. Thereby, the substrate is moved from the roller conveyor 31 to the roller conveyor 41, and the substrate is moved to the belt conveyor 10.

When the substrate is moved to the belt conveyor 10, the rollers of the roller conveyors 31 and 41 on the side of the substrate storage cassette 100a are stopped and the roller conveyor 41 is lowered to the lowered position. Thereby, the substrate is placed on the endless belts 11c, 12c of the belt conveyor unit 10. The substrate is moved to a position across each of the endless belts 11c, 12c of the two-piece belt conveyor unit 10, and is carried in the straddle state. In the present embodiment, since the projections 15a and 15b are provided on the endless belts 11c and 12c, the substrate is placed across the projections 15a and 15b.

Thereafter, the first and second belt conveyors 11 and 12 are driven to travel the belt belts 11c and 12c in the opposite directions, so that the distance between the abutting portion 14a and the abutting portion 14b at the initial position is made into a substrate. Width (positioning control). Thereby, the substrate is positioned. Fig. 10 is a view showing a state in which the substrate is positioned. The abutting portion 14a and the abutting portion 14b move from the initial position, and the distance between P1 and P2 is changed from d1 to d2. The distance from the d2 ≒ substrate in the Y direction. When the endless belts 11c and 12c are moved in the opposite directions, the abutting portion 14a abuts against the end edge of the substrate on the -Y side, and the abutting portion 14b abuts against the end edge of the +Y side of the substrate, and the substrate is Slide the projections 15a, 15b. The substrate is gradually sandwiched by the abutting portions 14a and 14b to perform positioning in the Y direction.

Thereafter, the first and second belt conveyors 11 and 12 are driven to move the endless belts 11c and 12c in the same direction (+Y direction) at a constant speed (transport control). Thereby, the substrate is carried in the +Y direction. Fig. 11 is a view showing a state in which a substrate is conveyed. The endless belts 11c and 12c are moved at the same speed in the same direction (+Y direction), and the substrates are held by the abutting portions 14a and 14b and are still conveyed in the positioned state. In the endless belts 11c and 12c, the load in the downward direction is applied by the weight of the substrate, but the support portion 51 supports the ring belts 11c and 12c so as to be bent downward, whereby the substrate can be stably transported.

Thereafter, the roller conveyor 41 of the transfer unit 40 on the processing apparatus 110 side is placed at the lowered position before and after the start of the substrate conveyance. As shown in Fig. 12, when the substrate reaches the transfer unit 40 on the side of the processing apparatus 110, the driving of the first and second belt conveyors 11, 12 is stopped to stop the conveyance of the substrate. Thereafter, the roller conveyor 41 of the transfer unit 40 on the processing apparatus 110 side is raised to the raised position, and the substrate is transferred from the belt conveyor 10 to the roller conveyor 41. After the transfer, the rollers of the roller conveyor 41 are rotationally driven to move the substrate in the -X direction, and the substrate is transferred to the processing apparatus 110 (Fig. 13). By one end, one unit of substrate transport is completed. Further, as shown in FIG. 13, when the substrate is transferred to the processing apparatus 110, the operation of transferring the next substrate from the substrate housing cassette 100a to the belt conveyor unit 10 can be started. In Fig. 13, the belt conveyors 11, 12 are also driven so that the abutting portions 14a, 14b are moved to return to the initial position.

Hereinafter, a case where the processed substrate is transported from the processing apparatus 110 to the substrate storage cassette 100b will be described. First, the roller conveyor 41 of the transfer unit 40 on the processing device 110 side is placed at the raised position. Moreover, the substrate storage cassette 100b is lowered by the elevation unit 20, and the step of the substrate in the storage substrate housing 100b is aligned with the transfer height of the transfer unit 30. Thereafter, the rollers of the roller conveyors 31 and 41 of the transfer units 30 and 40 on the processing device 110 side are rotationally driven, and the substrate is placed in a state of being transportable to the +X direction. As shown in Fig. 14, when the processed substrate is discharged from the processing apparatus 110, the substrate is transported from the transfer unit 40 to the transfer unit 30, and is stored in the substrate storage cassette 100b. As shown in FIG. 14, while the processed substrate is transported from the processing apparatus 110 to the substrate housing cassette 100b, the substrate can be transferred from the substrate housing cassette 100a to the belt conveyor unit 10, and prepared for the processing apparatus 110. Handling.

Advantages of the substrate handling system

According to the substrate transfer system A of the present embodiment, the contact portions 14a and 14b abut against the opposite end edges of the substrate, and the substrate can be positioned in the traveling direction (Y direction) of the endless belts 11c and 12c, and in the positioning state. The substrate can be transported under. Therefore, the substrate can be transported in a positioned state without being tilted during transportation.

In the above-described positioning control, the substrate slides on the endless belts 11c and 12c. However, in the present embodiment, the plurality of projections 15a and 15b are provided on the portion where the substrate is placed, and the substrate is placed on the projection 15a. Since 15b is on, the endless belts 11c and 12c are hardly in contact with the substrate, and the friction between the two can be reduced to prevent the substrate from being injured.

Further, in the above-described embodiment, the transfer units 30 and 40 for transferring the substrates are provided in a direction orthogonal to the traveling direction of the endless belts 11c and 12c of the belt conveyor unit 10, and can be used along the belt conveyor unit. The arrangement of the substrate housing cassette 100 and the processing apparatus 110 is disposed on the side of the longitudinal direction of 10.

Further, when the roller conveyor 41 is configured to be movable up and down, when the roller conveyor 41 is placed at the raised position to transport the substrate, the contact portions 14a and 14b do not interfere with the substrate. Therefore, in the conveyance of a certain substrate, another substrate from the substrate housing cassette 100 or the processing apparatus 110 is placed on the belt conveyor unit 10, and the substrate can be prepared for transfer, and the conveyance efficiency can be improved.

Second embodiment

In the above-described embodiment, when the positioning control is performed, the first and second belt conveyors 11 and 12 are driven to move the endless belts 11c and 12c in the opposite directions, so that the abutting portion 14a located at the initial position abuts. The distance between the portions 14b becomes the width of the substrate. That is, by positioning the substrate in the opposite direction by moving the abutting portion 14a and the abutting portion 14b in the opposite directions, the positioning of the substrate can be performed by moving either one of the substrates closer to the other.

Therefore, at least one of the first and second belt conveyors 11 and 12 is driven to control the positioning of the substrate by controlling one of the abutting portions 14a or 14b to approach the other. Further, in the positioning control, the abutting portions 14a and 14b may be moved in the same direction at different speeds. For example, the abutting portion 14a and the abutting portion 14b are moved from the initial position toward the conveying direction (Y direction) of the substrate, but the moving speed of the abutting portion 14a is the same as the moving speed during the conveyance control, and the abutting portion 14b is The moving speed of the abutting portion 14b is gradually increased to the moving speed during the conveyance control at a speed slower than the moving speed during the conveyance control. Thereby, the distance between the abutting portion 14a and the abutting portion 14b is narrowed, and the distance between the two is narrowed, so that both of them abut against both end edges of the substrate. In this aspect, the substrate can be positioned while the substrate is being transported.

Further, in the above-described embodiment, one substrate is placed across the four endless belts 11c and 12c and transported, and the width of the endless belt is adjusted in accordance with the size of the substrate, and the two loops 11c and 12c are used for transporting. A substrate is also available. That is, there is at least one belt conveyor unit 10, and each control of the above embodiment can be implemented.

Conversely, a configuration using four or more endless belts can be employed. Fig. 15 is a view showing an example in which four belt conveyor units 10 are used. By independently driving the two independent belt conveyor units 10, it is possible to carry two substrates at the same time. Further, all of the four belt conveyor units 10 are synchronously driven, and as shown in Fig. 16, the substrate having a size different from that of the substrate of Fig. 15 can be transported. In other words, the distance between the abutting portions 14a and 14b such as the initial control and the positioning control is appropriately set, and the substrate having different sizes can be transported by the same system.

Third embodiment

In the above embodiment, the belt conveyors 11 and 12 are used as the moving means for moving the projections 15a and 15b and the abutting portions 14a and 14b, but other types of moving means may be used. Hereinafter, an example of use of other types of moving means will be described with reference to FIGS. 17 to 25. In the drawings, the same components as those of the above-described substrate transfer system A will be denoted by the same reference numerals and will not be described. In addition, the control contents of the first embodiment and the second embodiment, the arrangement of the devices, and the like are also applicable to the configuration examples of the third embodiment.

Example 1 of spherical spiral mechanism

Fig. 17 is a plan view showing a substrate transport system B according to another embodiment of the present invention. The substrate conveyance system B is a drive unit 210 having a spherical screw mechanism instead of the belt conveyor unit 10.

The two driving units 210 are composed of a first spherical screw mechanism 211 and a second spherical screw mechanism 212, respectively. The first spherical helical mechanism 211 includes a linear helical shaft 2111 extending in the Y direction, a guiding member 2112, and a moving unit 2113 guided by the guiding member 2112 and moving along the helical axis 2111. The screw shaft 2111 is in a state of being rotatably supported by the bearing 2111a in the vicinity of both end portions thereof.

The second spherical helical mechanism 212 is disposed to be isolated from the first spherical helical mechanism 211 in the X direction, and has the same configuration as the first spherical helical mechanism 211. In other words, the second spherical helical mechanism 212 includes a linear helical shaft 2121 extending in the Y direction and a guiding member 2122, and a moving unit 2123 that is guided by the guiding member 2122 and moves along the helical axis 2121. The screw shaft 2121 is in a state of being rotatably supported by the bearing 2121a in the vicinity of both ends thereof.

A bevel gear 221 is attached to one end of each of the screw shafts 2111 and 2121. The bevel gear 221 is meshed with the bevel gear 222 that is rotationally driven by the motors 223a and 223b, and each of the screw shafts 2111 and 2121 is rotated forward and reversed by the forward rotation and the reverse rotation of the motors 223a and 223b. In the two-piece driving unit 210, each of the spherical screw mechanisms 211 is synchronously controlled by the motor 223a, and each of the spherical screw mechanisms 212 is synchronously controlled by the motor 223b. Further, of course, the spherical screw mechanism 211 and the spherical screw mechanism 212 are individually and independently controlled.

Fig. 18 is a perspective view showing the configuration of the vicinity of the moving units 2113 and 2123. The moving unit 2123 is provided with a support plate 2123a provided on the upper surface of the protrusion 15b and the contact portion 14b, and a pair of support blocks 2123b fixed to the lower end portions of the both ends of the support plate 2123a. The support block 2123b has a spherical nut screwed to the screw shaft 2121 and has a screw shaft 2121. Further, a groove that engages with the guiding member 2122 is formed under the support block 2123b.

Then, when the screw shaft 2121 is rotated, the moving unit 2123 is moved in the +Y direction or the -Y direction by the rotation direction of the screw shaft 2121, and the protrusion portion 15b and the abutting portion 14b are movable on the linear track along the Y direction. .

The moving unit 2113 has the same configuration as the moving unit 2123, and includes the above-described protrusion 15a and the support plate 2113a provided on the upper surface of the abutting portion 14a, and a pair of support blocks 2113b fixed to the lower end portions of the support plate 2113a. . The support block 2113b has a spherical nut screwed to the screw shaft 2111 and has a screw shaft 2111 penetrating therethrough. Further, a groove that engages with the guiding member 2122 is formed under the support block 2123b.

Then, when the screw shaft 2111 is rotated, the moving unit 2113 is moved in the +Y direction or the -Y direction by the rotation direction of the screw shaft 2111, and is parallel along the linear track moving with the protrusion 15b and the abutting portion 14b. The protruding portion 15a and the abutting portion 14a are movable on the linear track in the Y direction.

In the substrate conveyance system B configured as described above, the conveyance control of the substrate similar to the substrate conveyance system A can be performed.

Example 2 of the spherical screw mechanism

Fig. 19 is a plan view showing a substrate conveyance system C according to another embodiment of the present invention. The substrate conveyance system C is a drive unit 310 having a spherical screw mechanism instead of the belt conveyor unit 10. The driving unit 310 is a spherical spiral mechanism that is different from the driving unit 210.

The two-piece driving unit 310 is composed of a first spherical screw mechanism 311 and a second spherical screw mechanism 312, respectively. The first spherical helical mechanism 311 includes a linear helical shaft 3111 extending in the Y direction, a guiding member 3112, and a moving unit 3113 that is guided by the guiding member 3112 and moves along the helical axis 3111. The screw shaft 3111 is fixed at its both end portions by a bearing 3111a. That is, in this example, the screw shaft 3111 is not rotated.

The second spherical helical mechanism 312 is disposed in the X-direction isolation of the first spherical helical mechanism 311, and has the same configuration as the first spherical helical mechanism 311. In other words, the second spherical helical mechanism 312 includes a linear spiral turn 3121 extending in the Y direction, a guiding member 3122, and a moving unit 3123 that is guided by the guiding member 3122 and moves along the helical axis 3121. The screw shaft 3121 is fixed at its both ends by a bearing 3121a.

Fig. 20 is a perspective view showing the configuration of the vicinity of the moving units 3113 and 3123. The moving unit 3123 is provided with a support plate 3123a provided on the upper surface of the protrusion 15b and the contact portion 14b, and a pair of support blocks 3123b fixed to the lower surface of both end portions of the support plate 3123a.

The support block 3123b is composed of a motor 31231 and a sliding portion 31232. The motor 31231 has a cylindrical shape in which the output shaft 31231a has a nut that is screwed to the screw shaft 311 and penetrates the screw shaft 3121. Further, the sliding portion 31232 is fixed to the lower surface of the motor 31231, and is formed with a groove that engages with the guiding member 3122.

Thus, the motors 31231 of the pair of support blocks 3123b are controlled in synchronization with each other. When the output shaft 31231a is rotated, the moving unit 3123 is moved in the +Y direction or the -Y direction by the rotation direction of the output shaft 31231a, and the projection 15b and the abutting portion 14b are movable on the linear track along the Y direction.

The moving unit 3113 has the same configuration as the moving unit 3123, and includes the above-described protrusion 15a and the support plate 3113a provided on the upper surface of the contact portion 14a, and a pair of support blocks 3113b fixed to the lower ends of the support plates 3113a. .

The support block 3113b is composed of a motor 31131 and a sliding portion 31132. The motor 31131 has a cylindrical shape in which the output shaft 31131a has a nut that is screwed to the screw shaft 3111 and penetrates the screw shaft 3111. Further, the sliding portion 31132 is fixed to the lower surface of the motor 31131, and is formed with a groove that is engaged with the guiding member 3112.

Then, the motors 31131 of the pair of support blocks 3113b are mutually controlled in synchronization. When the output shaft 31131a is rotated, the moving unit 3113 moves in the +Y direction or the -Y direction by the rotation direction of the output shaft 31131a, and is in the Y direction parallel to the linear track that moves with the protrusion 15b and the abutment portion 14b. The linear rails can move the protrusions 15a and the abutting portions 14a.

In the substrate transfer system C configured as described above, the transfer control of the substrate similar to the substrate transfer system A can be performed.

Example of the rack-and-pinion mechanism

Fig. 21 is a plan view showing a substrate conveyance system D according to another embodiment of the present invention. The substrate transport system D is a rack-and-pinion mechanism drive unit 410 instead of the belt conveyor unit 10.

The two-piece driving unit 410 is composed of a first rack-pinion mechanism 411 and a second rack-pinion mechanism 412, respectively. The first rack-pinion mechanism 411 includes a linear rack 4111 extending in the Y direction, a guiding member 4112, and a moving unit 4113 that is guided by the guiding member 4112 and moves along the rack 4111.

The second rack-pinion mechanism 412 is disposed in the X-direction isolation of the first rack-pinion mechanism 411, and has the same configuration as the first rack-pinion mechanism 411. In other words, the second rack-pinion mechanism 412 includes a linear rack 4121 extending in the Y direction, a guiding member 4122, and a moving unit 4123 that is guided by the guiding member 4122 and moves along the rack 4121.

Fig. 22 is a perspective view showing the configuration of the vicinity of the moving units 4113 and 4123. The moving unit 4123 is provided with a support plate 4123a provided on the upper surface of the protrusion 15b and the contact portion 14b, and a pair of support blocks 4123b fixed to the lower surfaces of both end portions of the support plate 4123a. The support block 4123b is provided with a motor, and a pinion 4123b' is attached to the output shaft (extending in the -X direction). Further, a groove that engages with the guiding member 4122 is formed on the lower surface of the supporting block 4123b.

Thus, the motors of the pair of support blocks 4123b are controlled in synchronization with each other. When the pinion 4123b' is rotated by the driving of the motors, the moving unit 4123 is moved in the +Y direction or the -Y direction by the rotation direction of the pinion 4123b', and is movable on the linear track along the Y direction. The protruding portion 15b and the abutting portion 14b.

The moving unit 4113 has the same configuration as the moving unit 4123, and includes the above-described protrusion 15a and the support plate 4113a on which the abutting portion 14a is provided, and a pair of support blocks 4113b fixed to the lower ends of the support plates 4113a. . The support block 4113b is provided with a motor, and a pinion gear (not shown) is attached to the output shaft (extending in the +X direction). Further, a groove that engages with the guiding member 4112 is formed on the lower surface of the supporting block 4113b.

Thus, the motors of the pair of support blocks 4113b are controlled in synchronization with each other. When the pinion gear (not shown) is rotated by the driving of the motors, the moving unit 4113 moves in the +Y direction or the -Y direction by the rotation direction of the pinion gear, and is offset along the protrusion portion 15b. The protruding portion 15a and the abutting portion 14a are movable on a linear track in the Y direction in which the linear rails moved by the connecting portion 14b are parallel.

In the substrate conveyance system D configured as described above, the conveyance control of the substrate similar to the substrate conveyance system A can be performed.

Linear motor adoption example

Fig. 23 is a plan view showing a substrate conveyance system E according to another embodiment of the present invention. The substrate conveyance system E is a drive unit 510 including a linear motor instead of the belt conveyor unit 10.

The two drive units 510 are composed of a first linear motor 511 and a second linear motor 512, respectively. The first linear motor 511 includes a linear stator unit 5111 extending in the Y direction and a moving unit 5113 moving along the stator unit 5111.

The second linear motor 512 is disposed to isolate the first linear motor 511 in the X direction. The same configuration as the first linear motor 511. That is, the second linear motor 512 includes a linear stator unit 5121 extending in the Y direction and a moving unit 5123 moving along the stator unit 5121.

A guiding member 513 is disposed between the first linear motor 511 and the second linear motor 512. The guiding member 513 is a movement that guides the moving units 5113, 5123.

Fig. 24 is a perspective view showing the configuration of the vicinity of the moving units 5113 and 5123. Fig. 25 is a cross-sectional view (end surface view) taken along line IV-IV of Fig. 24. The moving unit 5123 is provided with a support plate 5123a provided on the upper surface of the protrusion 15b and the contact portion 14b, and a yoke 5123b fixed to the lower surface of the support plate 5123a. Yoke 5123b is in cross section In the inner surface of the left and right side walls, a plurality of permanent magnets 5123b' are arranged in the longitudinal direction (Y direction) of the yoke 5123b. Further, on the outer surface of one of the left and right side walls of the yoke 5123b, a sliding portion 5123b" that engages a groove formed on the side surface of the guiding member 513 is provided.

The stator unit 5121 is an inverted T-shaped cross section, and a portion extending upward is located at a position inserted into the yoke 5123b, and an armature coil 5121a is provided in a portion extending upward. The armature coil 5121a is arranged in a plurality of longitudinal directions (Y direction) of the stator unit 521.

Then, by sequentially switching the excitation of the complex armature coil 5121a of the stator unit 5121, the moving unit 5123 moves in the +Y direction or the -Y direction as it switches, and is movable on the linear track along the Y direction. The protruding portion 15b and the abutting portion 14b.

The moving unit 5113 has the same configuration as the moving unit 5123, and includes a support plate 5113a on which the protrusion 15a and the contact portion 14a are provided, and a yoke 5113b that is fixed to the lower surface of the support plate 5113a. The yoke 5113b is in cross section In the inner surface of the left and right side walls, a plurality of permanent magnets 5113b' are arranged in the longitudinal direction (Y direction) of the yoke 5113b. Further, on the outer surface of one of the left and right side walls of the yoke 5113b, a sliding portion 5113b" that engages a groove formed on the side surface of the guide member 513 is provided.

The stator unit 5111 is a portion having an inverted T-shaped cross section and extending upward, and is positioned to be inserted into the yoke 5113b, and an armature coil 5111a is provided in a portion extending upward. The armature coil 5111a is arranged in a plurality of longitudinal directions (Y direction) of the stator unit 5111.

Then, by sequentially switching the excitation of the plurality of armature coils 5111a of the stator unit 5111, as the switching state thereof, the moving unit 5113 moves in the +Y direction or the -Y direction, and along the protruding portion 15b and the abutting portion. The linear track in the Y direction in which the linear tracks moved by 14b are parallel can move the projection 15a and the abutting portion 14a.

In the substrate conveyance system E configured as described above, the conveyance control of the substrate similar to the substrate conveyance system A can be performed.

10. . . Belt conveyor unit

11. . . First belt conveyor

12. . . Second belt conveyor

20. . . Lifting unit

twenty one. . . pillar

twenty two. . . Beam

twenty three. . . Rail member

twenty four. . . Sliding member

25,32. . . Pillar member

26. . . Mounting board

27. . . Motor with reducer

29. . . Spherical screw

29a. . . Spherical nut

29b. . . Connecting member

30,40. . . Transfer unit

31,41. . . Roller conveyor

33,34. . . Base member

45a. . . Plate cam

45b. . . gear

45c. . . rack

45d, 62. . . Guide member

45e. . . cylinder

50. . . Subsidy unit

51. . . Support department

52. . . Subsidy axis

53. . . station

61. . . Bearing department

63a, 63b. . . End plate

64. . . Axle body

65. . . Mobile board

66. . . Coil spring

70. . . Control department

71. . . CPU

72. . . RAM

73. . . ROM

74. . . Input interface (I/F)

75. . . Output interface (I/F)

78. . . Communication I/F

80. . . Main computer

100. . . Substrate storage匣

210. . . Drive unit

211. . . First spherical screw mechanism

212. . . Second spherical screw mechanism

A~E. . . Substrate handling system

Fig. 1 is a plan view showing a substrate transfer system A according to an embodiment of the present invention.

Fig. 2 is a front view showing the substrate transfer system A.

Fig. 3-1 is an external view showing the substrate housing 100, and Fig. 3-2 is a view showing an internal configuration of the substrate housing 100.

FIG. 4-1 is a partial cross-sectional view showing a configuration of one side of the lifting unit 20 on the substrate housing 100; FIGS. 4-2 to 4-4 are diagrams showing the substrate of the lifting unit 20 and the transfer unit 30. An operation diagram of the handling operation.

Figs. 5-1 and 5-2 are explanatory views showing the operation of the transfer unit 40.

Fig. 6-1 is a schematic side view showing the belt conveyor 11, Fig. 6-2 is a schematic side view showing the belt conveyor 12, and Fig. 6-3 is a view showing the abutting portion of the endless belt 11c. An enlarged view of a portion of 14a and the projection 15a; a sectional view taken along line I-I of Fig. 1 is shown in Fig. 6-4; and a line II-II is shown along the first figure in Fig. 6-5. Sectional view.

Fig. 7-1 is a configuration diagram showing an example in which the driven pulley 11b is supported by the bearing of the tension adjusting mechanism; and Fig. 7-2 shows a section along the line III-III in Fig. 7-1. FIG. 7-3 is a block diagram showing the control unit 70 that controls the substrate transport system A.

Fig. 8 is an operation explanatory view showing the substrate transfer system A.

Fig. 9 is an explanatory view showing the operation of the substrate transfer system A.

Fig. 10 is an operation explanatory view showing the substrate transfer system A.

Fig. 11 is an explanatory view showing the operation of the substrate transport system A.

Fig. 12 is an operation explanatory view showing the substrate transfer system A.

Fig. 13 is an operation explanatory view showing the substrate transfer system A.

Fig. 14 is an operation explanatory view showing the substrate transfer system A.

Fig. 15 is a view showing another embodiment of the present invention.

Fig. 16 is a view showing another embodiment of the present invention.

Fig. 17 is a plan view showing a substrate transport system B according to another embodiment of the present invention.

Fig. 18 is a perspective view showing the configuration of the vicinity of the moving units 2113 and 2123.

Fig. 19 is a plan view showing a substrate conveyance system C according to another embodiment of the present invention.

Fig. 20 is a perspective view showing the configuration of the vicinity of the moving units 3113 and 3123.

Fig. 21 is a plan view showing a substrate conveyance system D according to another embodiment of the present invention.

Fig. 22 is a perspective view showing the configuration of the vicinity of the moving units 4113 and 4123.

Fig. 23 is a plan view showing a substrate conveyance system E according to another embodiment of the present invention.

Fig. 24 is a perspective view showing the configuration of the vicinity of the moving units 5113 and 5123.

Fig. 25 is a cross-sectional view (end surface view) taken along line IV-IV of Fig. 24.

10. . . Belt conveyor unit

11. . . First belt conveyor

11a. . . Drive pulley

11b. . . Driven pulley

11c. . . Belt

11d. . . Bearing

11e. . . Drive shaft

11f. . . Bearing

12. . . Second belt conveyor

12a. . . Drive pulley

12b. . . Driven pulley

12c. . . Belt

12d. . . Bearing

12e. . . Drive shaft

12f. . . Bearing

13a, 13b. . . motor

14a. . . Abutment

14b. . . Abutment

15a. . . Protrusion

15b. . . Plural protrusion

20. . . Lifting unit

twenty one. . . pillar

twenty two. . . Beam

twenty three. . . Rail member

twenty four. . . Sliding member

25. . . Pillar member

26. . . Mounting board

27. . . Motor with reducer

29b. . . Connecting member

30,40. . . Transfer unit

31,41. . . Roller conveyor

50. . . Subsidy unit

51. . . Support department

52. . . Subsidy axis

102,103. . . Plural component

110. . . Processing device

110b. . . Substrate storage匣

A. . . Control substrate handling system

Claims (11)

A workpiece transporting system comprising: first and second placing members that straddle a square workpiece; and first moving means for moving the first placing member on the first linear orbit, and a second moving means for moving the two placing members on the second linear track parallel to the first linear track, and a control means for individually controlling the first and second moving means, and by the first moving means, The first mounting member moves together on the first linear rail, abuts against an end edge of the workpiece to define a position of the end edge, and the second moving means and the second a second abutting portion that moves on the second linear orbit and abuts against an end edge of the workpiece to define a position of the end edge; the control means performs: controlling the first and second moving means The first and second abutting portions are initially controlled at an initial position spaced apart from the width of the workpiece, and the first and second abutting portions are located at the initial position When the workpiece is placed on the first and second mounting members, at least one of the first and second moving means is controlled to be the distance between the first and second abutting portions to form the workpiece. After the positioning control of the width and the positioning control, the first and second moving means are controlled to be transported at the same speed by the first and second placing members and the first and second abutting portions at the same speed. control. The workpiece handling system according to claim 1, wherein the first and second moving means are provided with a belt conveyor. The workpiece handling system according to claim 1, wherein the first and second moving means are provided with a spherical screw mechanism. The workpiece handling system according to claim 1, wherein the first and second moving means are provided with a rack-and-pinion mechanism. The workpiece handling system according to claim 1, wherein the first and second moving means comprise a linear motor. A workpiece handling system is a first and a second belt conveyor that are arranged to be parallel to each other in a belt running direction, and the square workpiece is placed across each of the first and second belt conveyors A workpiece transport system for carrying the transport, characterized in that the control means for individually controlling the first and second belt conveyors are provided on the respective belts of the first and second belt conveyors Abutting a portion that is located at an end edge of the workpiece to define a position of the end edge; and the controlling means is configured to drive the first and second belt conveyors to be the first and second belt conveyors Each of the abutting portions is initially controlled at an initial position spaced apart from the width of the workpiece, and when the workpiece is placed on each of the abutting portions between the abutting portions at the initial position, Driving at least one of the first and second belt conveyors to achieve a positioning control of a width of the workpiece by a distance between the abutting portions, and driving the first and second belts after the positioning control Each endless belt conveyor to be transported in the same direction constant speed traveling control. The workpiece transfer system according to claim 6, wherein the plurality of projections are provided on the respective end portions of the first and second belt conveyors on which the workpiece is placed. The workpiece handling system according to claim 6, wherein a support portion for supporting the endless belt is provided under each of the endless belts of the first and second belt conveyors. The workpiece handling system according to claim 6, wherein the plurality of first and second belt conveyors are respectively disposed so that the traveling directions of the loops are parallel to each other; and the plurality of first belt conveyors are connected A drive shaft of each of the drive pulleys of the machine, and a drive shaft for connecting the drive pulleys of the plurality of second belt conveyors. The workpiece transfer system according to claim 6, wherein the workpiece is a substrate, and the workpiece transport system is a substrate that is disposed on the side of the first and second belt conveyors and houses the plurality of substrates. a storage cassette, a system disposed between the processing devices that process the substrate, and a system for transporting the substrate from the substrate storage cassette to the side of the first and second belt conveyors; a first transfer means on each of the endless belts of the first and second belt conveyors, and a second shift of transferring the substrate from the respective belts of the first and second belt conveyors to the processing apparatus Means of loading. The workpiece handling system according to claim 10, wherein the plurality of first and second belt conveyors are respectively disposed so that the traveling directions of the loops are parallel to each other; and the first and second transfer means are respectively Each of the belt conveyors is provided with a roller conveyor that is movable up and down and transports the substrate in a direction orthogonal to the traveling direction of the endless belt.