KR100924153B1 - Work transfer system - Google Patents

Abstract

An object of the present invention is to provide a workpiece conveyance system capable of conveying a workpiece in a position where a workpiece such as a substrate is not inclined during transportation. In the workpiece conveyance system of the present invention, the first and second contact portions come in contact with opposite edges of the workpiece, respectively, to perform the positioning of the workpiece, and convey the workpiece in the positioned state. Therefore, the object to be processed can not be inclined during conveyance, and the object to be processed can be conveyed in a positioned state.

Description

Work object transfer system {Work transfer system}

The present invention relates to a technology for conveying a workpiece such as a glass substrate.

Substrates typified by thin glass substrates used in the manufacture of thin displays are generally housed in sheets in a substrate storage cassette. And at the time of the process, it is taken out from a board | substrate storage cassette one by one, and is conveyed to a board | substrate processing apparatus, and after a process, it is carried in from a board | substrate processing apparatus back to a board | substrate storage cassette. In the case of this kind of equipment, a conveying apparatus for conveying the substrates one by one between the substrate storage cassette and the processing apparatus is required. As a conveying apparatus which conveys a board | substrate, the apparatus using the roller conveyor as described in Unexamined-Japanese-Patent No. 2004-284772, for example is proposed.

Here, in the conventional conveying apparatus, when conveying a board | substrate between a board | substrate accommodation cassette and a processing apparatus, a board | substrate may incline during conveyance. When the substrate reaches the processing apparatus or the substrate storage cassette in an inclined state, the substrate may not be smoothly moved from the conveying device to the processing apparatus or the substrate storage cassette.

[Problem to Solve Invention]

An object of the present invention is to convey an object to be processed in a positioned state without inclining the object to be processed during transportation.

[Means for solving the problem]

According to the present invention, the first and second seating members, which are mounted on a rectangular workpiece, are provided with first moving means for moving the first seating member on a first linear track, and the second seating member is moved to the first seat. A second moving means for moving on a second straight track parallel to the linear track, a control means for individually controlling the first and second moving means, and the first moving means controls the first linear track image. A first contact portion which moves together with the first seating member, defines a position of the edge by contacting an edge of the workpiece, and the second linear trajectory image by the second moving means; A second contact portion which moves together with the second seating member and which contacts the edge of the workpiece to define the position of the edge thereof, wherein the control means includes the first and second contact portions facing each other; Initial control for controlling the first and second moving means to be located at an initial position spaced apart from the width of the workpiece, and the first and second seating members between the first and second contact portions at the initial position. Positioning control for controlling at least one of the first and second moving means so that the distance between the first and second contact portions is the width of the workpiece when the workpiece is seated on the workpiece; After positioning control, a conveyance control is performed to control the first and second moving means such that the first and second seating members and the first and second contact portions travel at the same speed in the same direction. A workpiece conveyance system is provided.

According to this workpiece conveyance system, the first and second contact portions are in contact with opposite edges of the workpiece, respectively, and the workpiece can be positioned, and the workpiece can be conveyed in the positioned state. Can be. Therefore, the object to be processed can not be inclined during conveyance, and the object to be processed can be conveyed in a positioned state.

In addition, according to the present invention, the first and second belt conveyors are provided so that the running directions of the belts are parallel to each other, and the rectangular workpieces are seated on the respective belts of the first and second belt conveyors and transported. A to-be-processed object conveying system comprising: control means for individually controlling the first and second belt conveyors, and provided on each belt of the first and second belt conveyors, respectively, in contact with an edge of the object to be processed. A contact portion defining a position of an edge, wherein the control means includes the first and second belt conveyors such that the contact portions of each of the first and second belt conveyors are positioned at an initial position spaced apart from the width of the workpiece. Initial control of driving the object, and when the object is seated on each belt between the contact portions at the initial position. In the positioning control for driving at least one of the first and second belt conveyors so that the distance between the contact portions becomes the width of the object to be processed, and after the positioning control, each belt is operated at the same speed in the same direction. There is provided a workpiece conveyance system characterized by executing conveyance control for driving the first and second belt conveyors to travel.

According to this object conveyance system, the said contact part contacts each opposing edge of the said object, can perform the positioning of the said object, and can convey a process object in the positioned state. Therefore, the object to be processed can not be inclined during conveyance, and the object to be processed can be conveyed in a positioned state.

1 is a plan view of a substrate transfer system A according to an embodiment of the present invention.

2 is a front view of the substrate transfer system A. FIG.

3-1 is an external view of the board | substrate storage cassette 100, and 3-2 is a figure which shows the internal structure of the board | substrate storage cassette 100. As shown in FIG.

4-1 of FIG. 4 is a partially broken view which shows the structure of the side which faces the board | substrate accommodation cassette 100 of the lifting unit 20. As shown in FIG.

4-2 to 4-4 of FIG. 4 are operation explanatory drawing which shows the conveyance operation | movement of the board | substrate by the lifting unit 20 and the transfer unit 30. As shown in FIG.

5-1 and 5-2 of FIG. 5 are operation explanatory drawing of the transfer unit 40. As shown in FIG.

6-1 is a schematic side view of the belt conveyor 11, 6-2 is a schematic side view of the belt conveyor 12, and 6-3 is a contact portion 14a and the projection 15a of the belt 11c. It is an enlarged view of the prepared site | part, 6-4 is sectional drawing along the line II of FIG. 1, and 6-5 is sectional drawing along the line II-II of FIG.

7-1 of FIG. 7 is a block diagram showing an example in which the driven pulley 11b is axially supported by a bearing having a tension adjusting mechanism, 7-2 is a sectional view taken along line III-III of 7-1, 3 is a block diagram of the control part 70 which controls the board | substrate conveyance system A. FIG.

8 is an explanatory diagram of the operation of the substrate transfer system A. FIG.

9 is an explanatory diagram of the operation of the substrate transfer system A. FIG.

10 is an explanatory diagram of the operation of the substrate transfer system A. FIG.

11 is an explanatory diagram of the operation of the substrate transfer system A. FIG.

12 is an explanatory view of the operation of the substrate transfer system A. FIG.

13 is an explanatory diagram of the operation of the substrate transfer system A. FIG.

14 is an explanatory view of the operation of the substrate transfer system A. FIG.

It is a figure which shows another embodiment of this invention.

It is a figure which shows another embodiment of this invention.

It is a top view of the board | substrate conveyance system B which concerns on other embodiment of this invention.

18 is a perspective view showing a configuration near the mobile units 2113 and 2123.

It is a top view of the board | substrate conveyance system C which concerns on other embodiment of this invention.

20 is a perspective view showing a configuration near the mobile units 3113 and 3123.

It is a top view of the board | substrate conveyance system D which concerns on other embodiment of this invention.

22 is a perspective view showing a configuration near the mobile units 4113 and 4123.

It is a top view of the board | substrate conveyance system E which concerns on other embodiment of this invention.

24 is a perspective view showing a configuration near the mobile units 5113 and 5123.

FIG. 25 is a cross-sectional view (end view) taken along the line IV-IV of FIG. 24.

First Embodiment

System Outline

1 is a plan view of a substrate transfer system A according to an embodiment of the present invention, and FIG. 2 is a front view of the substrate transfer system A. FIG. In this embodiment, the example which applied this invention to the system which conveys board | substrates, such as a glass substrate, is demonstrated, but this invention is applicable also to the conveyance of objects other than a board | substrate. The board | substrate conveying system A is arrange | positioned at the side of the belt conveyor unit 10, two belt conveyor units 10 provided with the 1st belt conveyor 11 and the 2nd belt conveyor 12, respectively, and a board | substrate accommodation Four elevating units 20 for elevating the cassettes 100a and 100b (hereinafter, collectively referred to as substrate storage cassettes 100), and two fixed transfer units provided between the elevating units 20 ( 30 and two lifting type transfer units 40 provided on the side of the transfer unit 30. In the drawings, X and Y represent a horizontal direction perpendicular to each other, and Z represents a vertical direction.

The board | substrate conveyance system A is arrange | positioned in the side (+ X direction) of the 1st belt conveyor 11 and the 2nd belt conveyor 12, and the 1st belt is received from the board | substrate accommodation cassette 100a which accommodates several sheets. It is a system arrange | positioned at the side (-Y direction) of the conveyor 11 and the 2nd belt conveyor 12, and conveys a board | substrate to the processing apparatus 110 which processes a board | substrate. The board | substrate which completed the process by the processing apparatus 110 is arrange | positioned from the processing apparatus 110 to the side (+ X direction) of the 1st belt conveyor 11 and the 2nd belt conveyor 12, and accommodates several board | substrates. It is a system conveyed to the board | substrate storage cassette 100b. 1 and 2 show a case where the substrate is not stored in the substrate storage cassette 100.

<Substrate storing cassette>

3-1 of FIG. 3 is an external view of the substrate storage cassette 100. The substrate storage cassette 100 is a cassette capable of storing a plurality of rectangular substrates, and has a rectangular parallelepiped composed of a plurality of members 101 extending in the vertical direction and a plurality of members 102 and 103 extending in the horizontal direction. It has a frame body shaped. As shown to 3-2 of FIG. 3, the wire 104 is laid between the opposing member 101, and the board | substrate accommodated is accommodated in this mounting state on the wire 104. As shown in FIG. In the embodiment, the wires 104 are arranged at a predetermined pitch in the vertical direction, and a slot for accommodating each substrate is formed in multiple stages in the vertical direction. By using the wire 104, the space | interval between the board | substrate to be accommodated can be made small and the storage efficiency of the board | substrate storage cassette 100 can be improved.

<Elevation unit>

Referring to FIG. 1, one pair of lifting units 20 is provided for one substrate storage cassette 100, and one pair of lifting units 20 is spaced apart in the Y direction with the substrate storage cassette 100 interposed therebetween. Are installed to face each other. Hereinafter, the structure of the elevation unit 20 is demonstrated with reference to 4-1 of FIG. 2 and FIG. 4-1 of FIG. 4 is a partially broken view which shows the structure of the side facing the board | substrate accommodation cassette 100 of the lifting unit 20. As shown in FIG.

Each lifting unit 20 includes a pair of struts 21 spaced apart in the X direction, and several girders 22 arranged between the struts 21. The rail member 23 is provided in the side surface of the support | pillar 21 of the board | substrate storage cassette 100 side. The slide member 24 is provided in the rail member 23 so that sliding is possible, and the slide member 24 is guided to the rail member 23, and moves up and down. A supporting member 25 (part of Fig. 4-1 is partially broken) is provided between the slide members 24, and the supporting member 25 has a mounting plate 26 on which a substrate storage cassette 100 is mounted. Is fixed. The substrate storage cassette 100 is seated on the seating plate 26 of the pair of lifting units 20 in both directions in the Y direction.

The upper girder 22 is supported by a motor 27 with a reduction gear, and its output shaft is connected to the upper end of the ball screw 29 extending in the Z direction. The upper and lower ends of the ball screw 29 are supported by the upper and lower shaft support portions 28 so as to be rotatable, and the ball screw 29 rotates by the rotation of the motor 27. The ball nut 29a is screwed to the ball screw 29, and the ball nut 29a is connected to the support member 25 via the connection member 29b. Therefore, the ball nut 29a moves up and down along the ball screw 29 by the forward rotation and the reverse rotation of the ball screw 29, and the ball nut 29a, the connection member 29b, the support member 25, The slide member 24, the seating plate 26, and the board | substrate storage cassette 100 are integrated together, and it raises and falls up and down.

<Transfer unit 30>

Referring to FIGS. 1 and 2, the transfer unit 30 is a unit for transferring a substrate between the belt conveyor unit 10 and the substrate storage cassette 100, and in this embodiment, a plurality of roller conveyors (here five). (31), the support member 32 which supports each roller conveyor 31, and the support member 32 are comprised by the base member 33 in which it was set up. In the case of this embodiment, each roller conveyor 31 is equipped with one row of rollers. In the roller conveyor 31, the rotary shaft center of the roller which is rotationally driven by the drive means which is not shown in figure, such as a motor, is set to a Y direction, and conveys the board | substrate seated on a roller to a X direction. 4-2 to 4-3 of FIG. 4 are operation explanatory drawing which shows the conveyance operation | movement of the board | substrate by the lifting unit 20 and the transfer unit 30. As shown in FIG.

Each roller conveyor 31 and the support member 32 are disposed below the substrate storage cassette 100 which is elevated by the elevating unit 20, and do not interfere with the member 103 of the substrate storage cassette 100. Direction at predetermined intervals. When conveying the board | substrate accommodated in the board | substrate storage cassette 100 to the belt conveyor unit 10, it is conveyed from the lowest board | substrate, and the board | substrate storage cassette is carried out by the lifting unit 20 as shown to 4-3 of FIG. The 100 is lowered and stopped at the position where the bottom substrate is seated on each roller conveyor 31. The substrate is conveyed to the belt conveyor unit 10 by rotationally driving the roller of the roller conveyor 31.

When conveying the next board | substrate, as shown to 4-4 of FIG. 4, the lifting unit 20 lowers the board | substrate storage cassette 100 by about 1 step | paragraph again, and the lowest board | substrate is located on each roller conveyor 31. FIG. Stop at the position seated on The substrate is conveyed to the belt conveyor unit 10 by rotationally driving the roller of the roller conveyor 31. Thereafter, the roller conveyor 31 sequentially enters the substrate storage cassette 100 in the same manner, and the substrate in the substrate storage cassette 100 is conveyed. When the substrate is conveyed from the belt conveyor unit 10 to the substrate storage cassette 100, the opposite operation is performed. The transfer of the substrate between the substrate storage cassette 100 and the belt conveyor unit 10 is performed at a position (called a transfer height) of the height of the line L connecting the vertices of each roller of each roller conveyor 31. .

<Transfer unit 40>

Referring to FIGS. 1 and 2, the transfer unit 40 is a unit for transferring a substrate between the belt conveyor unit 10 and the substrate storage cassette 100 together with the transfer unit 30. In addition, the transfer unit 40 provided on the processing apparatus 110 side transfers the substrate between the belt conveyor unit 10 and the processing apparatus 110. In the present embodiment, each transfer unit 40 includes a plurality (here three) roller conveyors 41, a support member 42a for supporting each roller conveyor 41, and a base on which the support members 42a are installed. The member 42b is provided. In the case of this embodiment, each roller conveyor 41 is equipped with two rows of rollers. In the roller conveyor 41, the rotating shaft center of the roller which is rotationally driven by the drive means not shown, such as a motor, is set to a Y direction, and conveys the board | substrate seated on a roller to a X direction.

Each roller conveyor 41 and the supporting member 42a are arrange | positioned at predetermined intervals in a X direction so that it may not interfere with the belt of the belt conveyor unit 10 mentioned later, and the central roller conveyor 41 is a belt conveyor unit. It is provided between (10). The transfer unit 40 is provided with a lifting function for lifting and lowering each roller conveyor 41. 5-1 and 5-2 of FIG. 5 are operation explanatory drawing of the transfer unit 40. As shown in FIG.

The transfer unit 40 has a base member 43 for supporting the base member 42b through the stretchable support member 44. Each roller conveyor 41 can raise and lower with respect to the base member 43 with the support member 42a and the base member 42b. On the base member 43, a guide for guiding the movement of the rack cam 45a, the pinion 45b fixed to the rotating shaft of the plate cam 45a, the rack 45c engaged with the pinion 45b, and the rack 45c. 45d of members and the air cylinder 45e which moves the rack 45c are provided.

The rack 45c is provided so that the longitudinal direction may face the X direction, and the air cylinder 45e expands and contracts in the X direction. The rack 45c is guided to the guide member 45d by the expansion and contraction of the air cylinder 45e, and moves in the X direction. The pinion 45b rotates by the movement of the rack 45c, and the plate cam 45a also rotates. The base member 43 is provided with a hole 43a for avoiding interference with the plate cam 45a. The lower surface of the base member 42b is provided with a roller 42c in contact with the rim surface of the plate cam 45a, and the position on the edge surface of the plate cam 45a that the roller 42c contacts and the axis of rotation of the plate cam 45a. The roller conveyor 41 moves up and down by the variation of the distance between shims.

However, when the transfer unit 40 moves the board | substrate between the transfer units 30, as shown to 5-1 of FIG. 5, the line L connects the vertices of each roller, and the line shows the transfer height mentioned above. It is in the position (henceforth a raise position) which the roller conveyor 41 rose to the position which passes through. On the other hand, when moving a board | substrate from the conveying unit 40 to the belt conveyor unit 10 as mentioned later, it turns to 5-2 of FIG. 5 by rotation of the plate cam 45a by extending the air cylinder 45e. As shown, the roller conveyor 41 descends to the position which connects the apex of each roller, and the line passes below the line L 'below the line L which shows the above-mentioned conveyance height. Is called). When returning to the state of 5-1 from 5-2 of FIG. 5, the air cylinder 45e is retracted. In this embodiment, although such a lifting mechanism is employ | adopted, it cannot be overemphasized that other lifting mechanisms can also be employ | adopted.

Belt Conveyor Unit

The structure of the belt conveyor unit 10 is demonstrated with reference to 6-1 and 6-2 of FIG. 1, FIG. 2, and 6. FIG. 6-1 is a schematic side view of the belt conveyor 11, and 6-2 is a schematic side view of the belt conveyor 12. As described above, the belt conveyor unit 10 is composed of a first belt conveyor 11 and a second belt conveyor 12. In the present embodiment, two belt conveyor units 10 are spaced apart in the X direction. ) Are provided in parallel.

The 1st belt conveyor 11 is equipped with the drive pulley 11a, the driven pulley 11b, and the endless belt 11c wound around the drive pulley 11a and the driven pulley 11b, for example, It is a belt conveyor using a timing belt as the belt 11c.

The drive pulley 11a and the driven pulley 11b are provided apart from the Y direction, and the running direction of the belt 11c is set to the Y direction. The drive pulley 11a is connected to the drive shaft 11e axially supported by the bearing 11d. In the case of the present embodiment, the first belt conveyors 11 of the two belt conveyor units 10 are driven synchronously. For this reason, each drive pulley 11a is connected to the common drive shaft 11e. The end of the drive shaft 11e is connected to the output shaft of the motor 13a with the reduction gear, and the two drive pulleys 11a rotate synchronously by the rotational drive of the motor 13a. The driven pulley 11b is axially supported by the bearing 11f, and is free to rotate. The rotating shaft of the driven pulley 11b passes between the upper and lower belts 12c of the second belt conveyor 12.

The driven pulley 11b (and the driven pulley 12b described later) may be axially supported by a bearing having a tension adjusting mechanism. 7-1 in FIG. 7 is a block diagram showing an example in which the driven pulley 11b is axially supported by a bearing having a tension adjusting mechanism. FIG. 7-2 in FIG. 7 is a sectional view taken along line III-III of 7-1. The driven pulley 11b is axially supported by the bearing part 61 as a cantilever. The bearing portion 61 is supported to be movable in the Y direction by the guide member 62 extending in the Y direction. End plates 63a and 63b are fixed to both ends of the guide member 62, and the shaft 64 is rotatably provided around the shaft center between the end plates 63a and 63b.

The shaft 64 penetrates the bearing part 61, and also penetrates the moving plate 65 supported by the guide member 62 so that the movement to a Y direction is possible. Screws 64a are provided by cutting edges of a portion of the shaft 64, and the movable plate 65 is provided with screw holes (not shown) for engaging with the screws. The shaft 64 and the bearing part 61 are loose fit. A coil spring 66 is mounted between the moving plate 65 and the bearing portion 61, and is elastically biased so that the two are always spaced apart. Therefore, when the shaft 64 is rotated, the moving plate 65 moves in the Y direction. If the moving plate 65 is moved toward the bearing portion 61, the belt 11c can be further tensioned. However, since the coil spring 66 is mounted between the moving plate 65 and the bearing portion 61, it is excessive. Tension is suppressed.

On the belt 11c which runs above the belt 11c, the contact part 14a and the some protrusion 15a which contact the edge of a board | substrate and define the position of the said edge are provided. 6-3 of FIG. 6 is an enlarged view of the site | part in which the contact part 14a and the protrusion part 15a of the belt 11c were provided. In the case of this embodiment, the contact part 14a has a substantially rectangular parallelepiped shape, and protrudes on the belt 11c. The contact portion 14a defines the position of the -Y side edge of the substrate. The protrusion 15a is provided in the site | part on which the board | substrate rests on the belt 11c, and in this embodiment, it arrange | positions in multiple numbers in the Y direction. This protrusion 15a functions as a mounting member on which a substrate is mounted.

The protruding portion 15a has a rounded upper surface, making the contact area with the substrate to be seated as small as possible. Moreover, it is preferable that the upper surface of the projection part 15a is smooth. The line connecting the vertices of each projection 15a passes between the above-described line L 'and the line L, and the upper surface of the contact portion 14a is positioned at a position lower than the above-described line L (transfer height). The position of the height direction of the belt conveyor unit 10 is positioned so that it may be located.

The projection part 15a and the contact part 14a move on the linear track | orbit in the Y direction by the run of the belt 11c. That is, the 1st belt conveyor 11 functions as a moving means which moves the projection part 15a and the contact part 14a on the linear track | orbit of a Y direction.

The configuration of the second belt conveyor 12 is the same as that of the first belt conveyor 11. That is, the 2nd belt conveyor 12 is equipped with the drive pulley 12a, the driven pulley 12b, and the endless belt 12c wound around the drive pulley 12a and the driven pulley 12b. The drive pulley 12a and the driven pulley 12b are provided apart from the Y direction, and the running direction of the belt 12c is set to the Y direction. That is, the 1st belt conveyor 11 and the 2nd belt conveyor 12 are provided so that the running directions of each belt 11c and 12c may be parallel to each other. The first belt conveyor 11 and the second belt conveyor 12 are arranged to be relatively shifted in the Y direction, and the positions of the driving pulley 11a and the driven pulley 11b of the first belt conveyor 11 are also arranged. The positions of the drive pulley 12a and the driven pulley 12b of the second belt conveyor 12 are reversed in the Y direction.

The drive pulley 12a is connected to the drive shaft 12e axially supported by the bearing 12d. As in the case of the first belt conveyor 11, each drive pulley 12a of the two belt conveyor units 10 is connected to the common drive shaft 12e. The end of the drive shaft 12e is connected to the output shaft of the motor 13b with the reduction gear, and the two drive pulleys 12a rotate synchronously by the rotational drive of the motor 13b. By this structure, what is necessary is just to provide the drive source (motor 13a, 13b) one each in the some 1st belt conveyor 11 and the some 2nd belt conveyor 12, respectively. The driven pulley 12b is axially supported by the bearing 12f, and is free to rotate. The rotating shaft of the driven pulley 12b passes between the upper and lower belts 11c of the first belt conveyor 11. On the belt 12c which runs above the belt 12c, like the 1st belt conveyor 11, the contact part 14b which contacts the edge of a board | substrate and defines the position of the said edge, and the some protrusion 15b They are provided, and they are the same as the contact part 14a and the protrusion part 15a which were referred to at 6-3 of FIG. The contact portion 14b defines the position of the + Y side edge of the substrate.

The projection part 15b and the contact part 14b move on the linear track | orbit of the Y direction parallel to the linear track | orbit which the projection part 15a and the contact part 14a move by the run of the belt 12c. That is, the 2nd belt conveyor 12 functions as a movement means which moves the projection part 15b and the contact part 14b on the linear track | orbit of a Y direction.

<Secondary Unit>

As shown to 6-1 and 6-2 of FIG. 1 and FIG. 6, in this embodiment, the auxiliary unit 50 is provided in the substantially intermediate part of the Y direction of the belt conveyor unit 10. As shown in FIG. The auxiliary unit 50 has a support 51 and an auxiliary shaft 52. 6-4 is a cross-sectional view taken along the line I-I of FIG. 1, and 6-5 of FIG. 6 is a cross-sectional view taken along the line II-II of FIG. The support part 51 is a plate with a smooth surface, and is supported by the base 53 via the leg part 51a. The support part 51 is provided under the part which travels upward among the belts 11c and 12c, and supports the belts 11c and 12c by mounting the said part. This support part 51 can also employ | adopt a shaft etc. instead of the plate with the smooth surface. The auxiliary shaft 52 is a shaft body functioning as a tension roller, and is supported by the pedestal 53 through the bearing portion 52a. The auxiliary shaft 52 is provided under the part which runs downward among the belts 11c and 12c, and raises it upwards, and generate | occur | produces a constant tension in the belts 11c and 12c.

<Control part>

7-3 of FIG. 7 is a block diagram of the control part 70 which controls the board | substrate conveyance system A. As shown in FIG. The control unit 70 includes a CPU 71, a RAM 72, and a ROM 73. The ROM 73 stores a control program of the substrate transfer system A and the like. The RAM 72 and the ROM 73 can also employ other storage means. An input interface (I / F) 74 is connected to the CPU 71, and various sensors are connected to the input I / F 74. It is. As this sensor, the sensor which detects the rotation angle or rotation amount of each motor 13a, 13b, 27, and the conveyance amount of the board | substrate by a roller conveyor is mentioned, for example. The detection results of the various sensors are acquired by the CPU 71 via the input I / F 74.

An output I / F 75 is connected to the CPU 71, and a motor and a control valve are connected to the output I / F 75. The motors are, for example, the motors 13a, 13b, 27 and the drive motor of the roller conveyor described above. The control valve is a valve for changing the supply and the direction of air to the air cylinder 45e. The CPU 71 outputs a control command to each actuator connected to the output I / F 75 according to the detection result of the various sensors connected to the input I / F 74, for example, and transfers the substrate transfer system (A). ). In addition, needless to say, the first belt conveyor 11 and the second belt conveyor 12 are individually controlled independently by the control unit 70. The communication I / F 78 is connected to the CPU 71 and performs data communication with the host computer 80. The host computer 80 performs various settings, operation commands, and the like for the substrate transfer system A. FIG.

<Operation of the substrate conveying system>

Next, with reference to FIGS. 8-14, the operation example of the board | substrate conveyance system A by control of the control part 70 is demonstrated. Here, the case where the board | substrate is conveyed one by one from the board | substrate storage cassette 100a to the processing apparatus 110, and the board | substrate processed by the board | substrate storage cassette 100b from the processing apparatus 110 is demonstrated.

First, the belts 11c and 12c are driven by driving the first and second belt conveyors 11 and 12, and the contact portions 14a of the first belt conveyor 11 and the contact portions of the second belt conveyor 12 ( 14b) is positioned at a position (initial position) spaced apart from the width of the substrate (initial control). 8 shows a state where the contact portions 14a and 14b are positioned at their initial positions. In the figure, P1 represents the position in the Y direction of the contact surface with respect to the substrate of the contact portion 14a, and P2 represents the position in the Y direction of the contact surface with respect to the substrate of the contact portion 14b. P1 and P2 are spaced apart by the distance d1, and are the width in the Y direction of the distance d1> substrate.

Subsequently, the lifting unit 20 lowers the substrate storage cassette 100a and stops at the position where the lowermost substrate is seated on each roller conveyor 31 of the transfer unit 30. By rotating the roller of the roller conveyor 31, a board | substrate is moved to-X direction and it is moved to the belt conveyor unit 10 (FIG. 9). The transfer unit 40 on the side of the substrate storage cassette 100a has previously placed the roller conveyor 41 at the lifted position, and the roller of the roller conveyor 41 is also driven to rotate. As a result, the substrate moves from the roller conveyor 31 to the roller conveyor 41, and the substrate moves on the belt conveyor unit 10.

When the substrate moves on the belt conveyor unit 10, the rotational drive of the rollers of the roller conveyors 31 and 41 toward the substrate storage cassette 100a is stopped, and the roller conveyor 41 is lowered to the lowered position. As a result, the substrate is seated on the belts 11c and 12c of the belt conveyor unit 10. The board | substrate is moved to the position which straddles on each belt 11c, 12c of the two belt conveyor units 10, and is conveyed in this spanned state. In the present embodiment, since the projections 15a and 15b are provided on the belts 11c and 12c, the substrate is mounted on the projections 15a and 15b.

Subsequently, the first and second belt conveyors 11 and 12 are driven to drive the belts 11c and 12c in opposite directions, and the distance between the contact portion 14a and the contact portion 14b at the initial position is determined by Width (positioning control). This positions the substrate. 10 is a diagram illustrating a state in which a substrate is positioned. The contact portion 14a and the contact portion 14b move from the initial position, and the distance between P1 and P2 is changed from d1 to d2. Distance d2 is the width in the Y direction of the substrate. By traveling the belts 11c and 12c in opposite directions, the contact portion 14a contacts the -Y edge of the substrate, the contact portion 14b contacts the edge of the + Y side of the substrate, and the substrate is provided with a protrusion ( Slide 15a, 15b). The substrate is gently fitted to the contact portions 14a and 14b, thereby positioning the Y-direction.

Next, the first and second belt conveyors 11 and 12 are driven to drive the belts 11c and 12c at the same speed in the same direction (+ Y direction) (transfer control). Thereby, a board | substrate is conveyed to + Y direction. 11 is a diagram illustrating a state in which a substrate is conveyed. By traveling the belts 11c and 12c in the same direction (+ Y direction) at the same speed, the substrate is conveyed as it is positioned between the contact portions 14a and 14b. The load is applied downward to the belts 11c and 12c by the weight of the substrate, and is supported by the support part 51, and the belts 11c and 12c are prevented from being bent downward, so that the substrate can be transported stably.

Next, before and after conveyance of a board | substrate is started, the roller conveyor 41 of the transfer unit 40 of the processing apparatus 110 side is positioned in a lowered position. As shown in FIG. 12, when a board | substrate reaches on the transfer unit 40 of the processing apparatus 110 side, driving of the 1st and 2nd belt conveyors 11 and 12 is stopped and conveyance of a board | substrate is stopped. . Then, the roller conveyor 41 of the transfer unit 40 on the processing apparatus 110 side is raised to an elevated position, and the substrate is moved from the belt conveyor unit 10 to the roller conveyor 41. After the transfer, the roller of the roller conveyor 41 is driven to rotate to move the substrate in the −X direction, and the substrate is transferred to the processing apparatus 110 (FIG. 13). The conveyance of the board | substrate of 1 unit is complete | finished by the above. When moving a board | substrate to the processing apparatus 110, as shown in FIG. 13, the operation | movement which moves the next board | substrate from the board | substrate accommodation cassette 100a to the belt conveyor unit 10 can also be started. In FIG. 13, the belt conveyors 11 and 12 are also driven and are moving so that the contact parts 14a and 14b may return to an initial position.

Next, the case where the processing apparatus 110 conveys the substrate processed by the substrate storage cassette 100b will be described. First, the roller conveyor 41 of the conveying unit 40 of the processing apparatus 110 side is located in a raised position. Moreover, the board | substrate storage cassette 100b is lowered by the lifting unit 20, and the stage which accommodates the board | substrate in the board | substrate storage cassette 100b is matched with the conveyance height of the transfer unit 30. FIG. Next, the rollers of the roller conveyors 30 and 40 of the transfer units 30 and 40 on the processing apparatus 110 side are rotationally driven to wait in a state where the substrate can be conveyed in the + X direction. When the processed board | substrate is discharged | emitted from the processing apparatus 110, as shown in FIG. 14, a board | substrate is conveyed to the transfer unit 40-> transfer unit 30, and is accommodated in the board | substrate accommodation cassette 100b. While conveying the board | substrate processed by the board | substrate storage cassette 100b from the processing apparatus 110, as shown in FIG. 14, the board | substrate is moved to the belt conveyor unit 10 from the board | substrate storage cassette 100a, and the processing apparatus 110 is shown. ) Can be prepared for return.

<Benefit of substrate conveying system>

According to the board | substrate conveyance system A of this embodiment, the contact part 14a, 14b contacts each edge which a board | substrate opposes, respectively, and the positioning of the board | substrate of the travel direction (Y direction) of belt 11c, 12c is carried out. It can carry out and can convey a board | substrate in a positioned state. Therefore, a board | substrate can be conveyed in the positioned state, without inclining in the middle of conveyance.

In the above-described positioning control, the substrate slides on the belts 11c and 12c. In the present embodiment, the plurality of protrusions 15a and 15b are provided at the site where the substrate is seated, and the substrates are provided with the protrusions 15a and 12c. Since it is settled on 15b), the belt 11c, 12c and the board | substrate hardly contact, and the friction of both can be reduced and it can prevent that a board | substrate is damaged.

Moreover, in the said embodiment, by providing the transfer units 30 and 40 which move a board | substrate in the direction orthogonal to the running direction of the belt 11c, 12c of the belt conveyor unit 10 along the longitudinal direction of the belt conveyor unit 10, The layout which arrange | positioned the board | substrate storage cassette 100 and the processing apparatus 110 at the side was employable.

Furthermore, by enabling the roller conveyor 41 to be lifted and lowered, the contact portions 14a and 14b do not interfere with the substrate when the roller conveyor 41 is positioned at the raised position to convey the substrate. Accordingly, the substrate storage cassette 100 or the other substrate from the processing apparatus 110 can be disposed on the belt conveyor unit 10 during the transfer of any substrate, and the substrate can be prepared for transfer, thereby increasing the transfer efficiency. .

Second Embodiment

In the above embodiment, in the positioning control, the first and second belt conveyors 11 and 12 are driven to drive the belts 11c and 12c in opposite directions to each other, and the contact portion 14a and the contact portion 14b in the initial position are moved. The distance between them was made into the width | variety of a board | substrate. That is, although positioning of the board | substrate was performed by moving both the contact part 14a and the contact part 14b to the opposite direction, positioning of the board | substrate is possible when it moves so that one may approach the other side.

Accordingly, positioning of the substrate is possible by driving at least one of the first and second belt conveyors 11 and 12 to control one side of the contact portion 14a or 14b to approach the other side. Further, in the positioning control, the contact portions 14a and 14b can also be moved in the same direction at different speeds. For example, although the contact part 14a and the contact part 14b are moved from an initial position to the conveyance direction (Y direction) of a board | substrate, the moving speed of the contact part 14a is made the same as the moving speed at the time of conveyance control, and the contact part 14b Denotes a speed later than the movement speed in the transfer control, and gradually increases the movement speed of the contact portion 14b to the movement speed in the transfer control. As a result, the distance between the two becomes narrow due to the difference in the moving speeds of the contact portion 14a and the contact portion 14b, and soon they are brought into contact with both edges of the substrate. In this system, the substrate can be positioned while carrying the substrate.

Moreover, in the said embodiment, although one board | substrate was seated and conveyed over four belts 11c and 12c, the one board | substrate is adjusted by the two belts 11c and 12c by adjusting the width of a belt according to the size of a board | substrate. You can also make a return. That is, if there is at least one belt conveyor unit 10, each control of the said embodiment can be implemented.

On the contrary, the structure which uses four or more belts can also be employ | adopted. 15 is a diagram illustrating an example using four belt conveyor units 10. Two boards can be conveyed in parallel by driving the belt conveyor unit 10 independently of each other. Moreover, by driving all four belt conveyor units 10 synchronously, as shown in FIG. 16, the board | substrate different from the board | substrate of FIG. 15 (larger) can also be conveyed. That is, by setting the distance between the contact parts 14a and 14b in initial control, positioning control, etc. suitably, there exists an advantage that the board | substrate of a different size can be conveyed by the same system.

Third Embodiment

In the above embodiment, the belt conveyors 11 and 12 are used as the moving means for moving the projections 15a and 15b and the contact portions 14a and 14b, but other kinds of moving means may be used. Hereinafter, with reference to FIGS. 17-25, the example of employ | adopting another kind of moving means is demonstrated. In these drawings, the same components as in the substrate transfer system A described above are denoted by the same reference numerals, and description thereof is omitted. In addition, although not demonstrated in particular, the control content, layout of an apparatus, etc. in the said 1st Embodiment and 2nd Embodiment are applicable also to the structural example of this 3rd Embodiment.

<Adoption example 1 of the ball screw mechanism>

It is a top view of the board | substrate conveyance system B which concerns on other embodiment of this invention. The board | substrate conveyance system B employ | adopts the drive unit 210 provided with the ball screw mechanism instead of the belt conveyor unit 10. As shown in FIG.

The two drive units 210 are each composed of a first ball screw mechanism 211 and a second ball screw mechanism 212. The first ball screw mechanism 211 is a linear screw shaft 2111 and a guide member 2112 extending in the Y direction, and a moving unit 2113 guided by the guide member 2112 and moved along the screw shaft 2111. ). The screw shaft 2111 is rotatably supported by the bearing 2111a near its both ends.

The 2nd ball screw mechanism 212 is spaced apart in the X direction with respect to the 1st ball screw mechanism 211, and is the structure similar to the 1st ball screw mechanism 211. FIG. That is, the second ball screw mechanism 212 is a linear screw shaft 2121 extending in the Y direction and a moving unit guided to the guide member 2122 and the guide member 2122 and moved along the screw shaft 2121 ( 2123). The screw shaft 2121 is rotatably supported by the bearing 2121a near its both ends.

Bevel gears 221 are provided at one end of each of the screw shafts 2111 and 2121, respectively. The bevel gear 221 is engaged with the wheel-shaped cogwheel 222 which is rotationally driven by the motors 223a and 223b. This power failure is reversed. Each ball screw mechanism 211 of the two drive units 210 is synchronously controlled by the motor 223a, and each ball screw mechanism 212 is synchronously controlled by the motor 223b. It goes without saying that the ball screw mechanism 211 and the ball screw mechanism 212 are each independently controlled independently.

18 is a perspective view showing a configuration near the mobile units 2113 and 2123. The moving unit 2123 includes a support plate 2123a having the above-described protrusion 15b and the contact portion 14b provided on an upper surface thereof, and a pair of support blocks 2123b fixed to both bottom surfaces of the support plate 2123a. The support block 2123b has a ball nut screwed to the screw shaft 2121, and the screw shaft 2121 penetrates. In addition, the lower surface of the support block 2123b is provided with a groove to be engaged with the guide member 2122.

Therefore, when the screw shaft 2121 rotates, the moving unit 2123 moves in the + Y direction or the -Y direction by the rotational direction of the screw shaft 2121, and moves the protrusion 15b and the contact portion 14b in the Y direction. It can be moved on the following straight orbit.

The moving unit 2113 has the same configuration as that of the moving unit 2123, and includes a pair of support plates 2113a provided with the protrusions 15a and the contact portions 14a on the upper surface and fixed to both bottom surfaces of the support plates 2113a. And a support block 2113b. The support block 2113b has a ball nut which is screwed to the screw shaft 2111, and the screw shaft 2111 penetrates. In addition, the lower surface of the support block 2123b is provided with a groove to be engaged with the guide member 2122.

However, when the screw shaft 2111 rotates, the moving unit 2113 moves in the + Y direction or the -Y direction by the rotation direction of the screw shaft 2111, and the protrusion 15a and the contact portion 14a are projected portions 15b. ) And the contact portion 14b can be moved on a linear track along the Y direction, parallel to the linear track on which the track 14b moves.

Also in the board | substrate conveyance system B which consists of such a structure, the conveyance control of the board | substrate similar to the board | substrate conveyance system A is possible.

<Application example 2 of ball screw mechanism>

It is a top view of the board | substrate conveyance system C which concerns on other embodiment of this invention. The board | substrate conveyance system C employ | adopts the drive unit 310 provided with the ball screw mechanism instead of the belt conveyor unit 10. As shown in FIG. The drive unit 310 employs a ball screw mechanism of a type different from that of the drive unit 210.

The two drive units 310 are each composed of a first ball screw mechanism 311 and a second ball screw mechanism 312. The first ball screw mechanism 311 is a linear screw shaft 3111 extending in the Y direction and a moving unit 3113 which is guided to the guide member 3112 and the guide member 3112 and moves along the screw shaft 3111. It is provided. The screw shaft 3111 is fixed by the bearing 3111a near the both ends. That is, in this example, the screw shaft 3111 does not rotate.

The 2nd ball screw mechanism 312 is spaced apart in the X direction with respect to the 1st ball screw mechanism 311, and is the structure similar to the 1st ball screw mechanism 311. FIG. That is, the second ball screw mechanism 312 is a linear screw shaft 3121 and guide member 3122 extending in the Y direction, and a moving unit guided to the guide member 3122 and moved along the screw shaft 3121. 3123 is provided. The screw shaft 3121 is fixed by the bearing 3121a near the both ends.

20 is a perspective view showing a configuration near the mobile units 3113 and 3123. The moving unit 3123 includes a support plate 3123a having the above-described protrusion 15b and the contact portion 14b provided on an upper surface thereof, and a pair of support blocks 3123b fixed to both bottom surfaces of the support plate 3123a.

The support block 3123b is composed of a motor 331231 and a sliding portion 31232. The motor 331231 has an output shaft 331231a in a cylindrical shape, has a ball nut screwed into the screw shaft 3121 therein, and the screw shaft 3121 penetrates. In addition, the sliding part 31232 is fixed to the lower surface of the motor 331231, and a groove is engaged with the guide member 3122.

Therefore, each motor 331231 of the pair of support blocks 3123b is synchronously controlled with each other. When the output shaft 331231a rotates, the moving unit 3123 moves in the + Y direction or the -Y direction by the rotation direction of the output shaft 331231a, and moves the protrusions 15b and the contact portions 14b along the Y direction in a straight track. Can be moved in phase.

The moving unit 3113 has the same configuration as that of the moving unit 3123, and the pair of supports fixed to the lower surfaces of both ends of the support plate 3113a and the support plate 3113a provided with the above-described protrusions 15a and contact portions 14a on the upper surface. Block 3113b.

The support block 3113b is composed of a motor 31131 and a sliding portion 31132. The motor 31131 has a cylindrical shape, its output shaft 31131a has a ball nut screwed to the screw shaft 3111 therein, and the screw shaft 3111 penetrates. In addition, the sliding part 31132 is fixed to the lower surface of the motor 31131, and a groove is engaged with the guide member 3112.

However, each motor 31131 of the pair of support blocks 3113b is synchronously controlled with each other. When the output shaft 31131a rotates, the moving unit 3113 moves in the + Y direction or the -Y direction by the rotational direction of the output shaft 31131a, and the protrusions 15a and the contact portions 14a are the protrusions 15b and the contact portions. It is possible to move on the linear track along the Y direction, parallel to the linear track on which the 14b moves.

Also in the board | substrate conveyance system C which consists of such a structure, conveyance control of the board | substrate similar to the board | substrate conveyance system A is possible.

<Adoption example of rack pinion mechanism>

It is a top view of the board | substrate conveyance system D which concerns on other embodiment of this invention. The board | substrate conveyance system D employ | adopts the drive unit 410 provided with the rack pinion mechanism instead of the belt conveyor unit 10. As shown in FIG.

The two drive units 410 are each composed of a first rack-pinion mechanism 411 and a second rack-pinion mechanism 412. The first rack-pinion mechanism 411 includes a linear rack 4111 and a guide member 4112 extending in the Y direction, and a moving unit 4113 guided by the guide member 4112 and moving along the rack 4111. It is provided.

The second rack-pinion mechanism 412 is provided apart from the first rack-pinion mechanism 411 in the X direction, and has the same configuration as the first rack-pinion mechanism 411. That is, the second rack-pinion mechanism 412 includes a linear rack 4121 and a guide member 4122 extending in the Y direction, and a moving unit guided by the guide member 4122 and moving along the rack 4121 ( 4123).

22 is a perspective view showing a configuration near the mobile units 4113 and 4123. The moving unit 4123 includes a support plate 4123a having the above-described protrusion 15b and the contact portion 14b provided on an upper surface thereof, and a pair of support blocks 4123b fixed to both bottom surfaces of the support plate 4123a. The support block 4123b has a motor, and a pinion 4123b 'is attached to the output shaft (extending in the -X direction). The lower surface of the support block 4123b is provided with a groove that engages with the guide member 4122.

Therefore, each motor of the pair of support blocks 4123b is synchronously controlled with each other. When the pinion 4123b 'is rotated by the driving of these motors, the moving unit 4123 moves in the + Y direction or the -Y direction according to the rotation direction of the pinion 4123b', and the protrusion 15b and the contact portion 14b are moved. ) Can be moved on a straight track along the Y direction.

The moving unit 4113 has the same configuration as that of the moving unit 4123, and includes a pair of support plates 4113a provided with the protrusions 15a and the contact portions 14a on the upper surface and fixed to both bottom surfaces of the support plates 4113a. And a support block 4113b. The support block 4113b includes a motor, and a pinion (not shown) is attached to the output shaft (extending in the + X direction). The lower surface of the support block 4113b is provided with a groove that engages with the guide member 4112.

Therefore, each motor of the pair of support blocks 4113b is synchronously controlled with each other. When a pinion (not shown) is rotated by the driving of these motors, the moving unit 4113 moves in the + Y direction or the -Y direction depending on the rotation direction of the pinion, and the projection part 15a and the contact part 14a are projected by the projection part ( 15b) and the contact portion 14b can be moved on a straight track along the Y direction, parallel to the moving straight track.

Also in the board | substrate conveyance system D which consists of such a structure, conveyance control of the board | substrate similar to the board | substrate conveyance system A is possible.

<Application example of linear motor>

It is a top view of the board | substrate conveyance system E which concerns on other embodiment of this invention. The board | substrate conveyance system E employ | adopts the drive unit 510 provided with the linear motor instead of the belt conveyor unit 10. As shown in FIG.

The two drive units 510 are each composed of a first linear motor 511 and a second linear motor 512. The first linear motor 511 includes a linear stator unit 5111 extending in the Y direction and a moving unit 5113 moving along the stator unit 5111.

The second linear motor 512 is provided apart from the first linear motor 511 in the X direction, and has the same configuration as the first linear motor 511. That is, the second linear motor 512 includes a linear stator unit 5121 extending in the Y direction and a moving unit 5123 moving along the stator unit 5121.

A guide member 513 is provided between the first linear motor 511 and the second linear motor 512. The guide member 513 guides the movement of the moving units 5113 and 5123.

24 is a perspective view showing a configuration near the mobile units 5113 and 5123. FIG. 25 is a cross-sectional view (end view) taken along line IV-IV of FIG. 24. The moving unit 5123 includes a support plate 5123a provided with the above-described protrusion 15b and the contact portion 14b on the upper surface, and a yoke 5123b fixed to the lower surface of the support plate 5123a. The cross section of the yoke 5123b has a "c" shape, and a plurality of permanent magnets 5123b 'are arranged in the longitudinal direction (Y direction) of the yoke 5123b, respectively, on the left and right sidewall inner surfaces thereof. Further, on the outer surface of one sidewall of the left and right sidewalls of the yoke 5123b, a sliding portion 5123b "engaging with the groove formed in the side surface of the guide member 513 is provided.

The stator unit 5121 has an inverted T-shape in cross section, and an upper portion of the stator unit 5121 is located at a position to be inserted into the yoke 5123b, and an armature coil 5121a is disposed at the upper portion. It is built in. The armature coil 5121a is arranged in plurality in the longitudinal direction (Y direction) of the stator unit 5121.

Therefore, by sequentially switching the excitation of the plurality of armature coils 5121a of the stator unit 5121, the moving unit 5123 moves in the + Y direction or the -Y direction in accordance with the switching state, so that the protrusions ( 15b) and the contact portion 14b can be moved on a straight track along the Y direction.

The movement unit 5113 is the same structure as the movement unit 5123, and the support plate 5113a with which the protrusion part 15a and the contact part 14a mentioned above were provided in the upper surface, and the yoke 5113b fixed to the lower surface of the support plate 5113a are carried out. ). The cross section of the yoke 5113b has a "c" shape, and a plurality of permanent magnets 5113b 'are arranged in the longitudinal direction (Y direction) of the yoke 5113b on the inner surface of the left and right side walls. Further, on the outer surface of one side wall of the left and right side walls of the yoke 5113b, a sliding part 5113b "engaging with the groove formed in the side surface of the guide member 513 is provided.

The stator unit 5111 has an inverted T-shape in cross section, and an upper portion of the stator unit 5111 is positioned at a position to be inserted into the yoke 5113b, and an armature coil 5111a is disposed at the upper portion. It is built in. The armature coil 5111a is arranged in plural in the longitudinal direction (Y direction) of the stator unit 5111.

Accordingly, by sequentially switching the excitation of the plurality of armature coils 5111a of the stator unit 5111, the moving unit 5113 moves in the + Y direction or the -Y direction in accordance with the switching aspect, so that the protrusions 15a and The contact portion 14a can be moved on a linear track along the Y direction, parallel to the linear track on which the protrusions 15b and the contact 14b move.

Also in the board | substrate conveyance system E which consists of such a structure, conveyance control of the board | substrate similar to the board | substrate conveyance system A is possible.

According to the workpiece conveyance system according to the present invention, the contact portions are in contact with opposite edges of the workpiece, respectively, and the workpiece can be positioned, and the workpiece can be conveyed in the positioned state. . Therefore, the object to be processed can not be inclined during conveyance, and the object to be processed can be conveyed in a positioned state.

Claims (11)

First and second seating members on which a rectangular workpiece is to be placed, First moving means for moving the first seating member on a first linear track, Second moving means for moving the second seating member on a second linear track parallel to the first linear track; Control means for individually controlling the first and second moving means; A first contact portion which moves the first linear trajectory together with the first seating member by the first moving means, contacts with an edge of the workpiece, and defines a position of the edge; And a second contact portion configured to move the second linear trajectory along with the second seating member by the second moving means, to contact the edge of the workpiece and define the position of the edge thereof, The control means, Initial control for controlling the first and second moving means such that the first and second contact portions are positioned at an initial position spaced apart from the width of the workpiece; When the workpiece is seated on the first and second seating members between the first and second contacts in the initial position, the distance between the first and second contacts is equal to the width of the workpiece. Positioning control for controlling at least one of the first and second moving means so that After the positioning control, a conveyance control is performed to control the first and second moving means such that the first and second seating members and the first and second contact portions travel at the same speed in the same direction. Workpiece conveyance system. The method of claim 1, And said first and second moving means comprise a belt conveyor. The method of claim 1, The said 1st and 2nd moving means provided with the ball screw mechanism, The process object conveying system characterized by the above-mentioned. The method of claim 1, And said first and second moving means comprise a rack-pinion mechanism. The method of claim 1, And said first and second moving means comprise a linear motor. A workpiece conveyance system comprising first and second belt conveyors installed so that the running directions of the belts are parallel to each other, and seating and conveying rectangular workpieces on the respective belts of the first and second belt conveyors. As Control means for individually controlling the first and second belt conveyors; It is provided on each belt of the said 1st and 2nd belt conveyor, and is provided with the contact part which contacts the edge of the said process object, and defines the position of the said edge, The control means, Initial control for driving the first and second belt conveyors such that the contact portions of each of the first and second belt conveyors are positioned at an initial position spaced apart from the width of the workpiece; When the workpiece is seated on each belt between the contacts at the initial position, at least one of the first and second belt conveyors is driven such that the distance between the contacts is the width of the workpiece. Positioning control, And a conveyance control for driving the first and second belt conveyors so that each belt travels at the same speed in the same direction after the positioning control. The method of claim 6, And a plurality of protrusions on each of the belts of the first and second belt conveyors, on which a workpiece is to be seated, respectively. The method of claim 6, And a support portion for supporting the belt under each belt of the first and second belt conveyors. The method of claim 6, A plurality of first and second belt conveyors are provided so that the running directions of the belts are parallel to each other, And a drive shaft for connecting each drive pulley of the plurality of first belt conveyors, and a drive shaft for connecting each drive pulley of the plurality of second belt conveyors. The method of claim 6, The object to be processed is a substrate, The processing object conveying system, The substrate storage cassette disposed on the side of the first and second belt conveyors and accommodating several substrates, and disposed on the side of the first and second belt conveyors to process the substrate. A system for conveying a substrate, further comprising: first conveying means for moving said substrate from said substrate storage cassette onto each belt of said first and second belt conveyors; And a second transfer means for transferring the substrate from above each belt of the first and second belt conveyors to the processing apparatus. The method of claim 10, A plurality of first and second belt conveyors are provided so that the running directions of the belts are parallel to each other, The first and second transfer means, respectively, And a roller conveyor provided between the belt conveyors to move up and down, and for transporting the substrate in a direction orthogonal to the traveling direction of the belt.

Images