512072 A7 ______B7 _ _ 五、發明説明（1 ) 【發明所屬之技術領域】 (請先閱讀背面之注意事項再填寫本頁) 本發明係關於：在例如玻璃基板或半導體晶圓等的板 狀被處理物表面上，使阻抗液、顯影液、彩色濾光液等等 的塗布液，從細縫狀的開口部流下而塗布，之細縫型塗布 器之預噴裝置及預噴方法 【以往之技術】 當使用細縫型塗布器連續地將塗布液供給到多數個的 基板表面上時，在塗布作業和塗布作業之間的待機時間中 ，藉由與空氣之間的接觸，會使噴出式噴嘴內的塗布液的 一部分的濃度上升。然後，若是保持在這種狀態下，繼續 塗布下一塊基板的話，由高濃度化的塗布液，有時會造成 縱紋的發生，有時會造成膜中斷狀況的發生。 爲了消除上述的缺點，在習知例中，於待機時係將噴 出式噴嘴浸泡在裝滿洗淨液或塗布液的槽中’在正要塗布 之前，先去除掉貯存在噴出式噴嘴內的塗布液，再來進行 預噴。 經濟部智慧財產局員工消費合作社印製 【發明所欲解決之課題】 如上述將噴出式噴嘴浸泡在裝滿洗淨液的槽中之手段 ，被保持在噴.嘴內的塗布液的濃度會被稀釋掉，會有無法 有效地解決塗膜的厚度變得不均勻的問題。又’使用浸泡 在塗布液中的手段，開始塗布的地方會發生厚膜化，使得 成膜厚度均一性變差。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 4 _ 512072 A7 __ _ _B7_ 五、發明説明（2 ) 又，在正要塗布之前，將貯存在噴出式噴嘴內的塗布 液捨棄不要，來進行預噴時，塗布液會藉由表面張力附著 在噴出式噴嘴前端的廣泛的範圍上，其結果，有時會造成 縱紋的發生，有時會造成膜中斷的狀況的發生等等的問題 ’都是希望能被改善的。 【解決課題之手段】 解決上述課題之本發明，係一種細縫型塗布器之預噴 裝置，其結構爲：被形成有細縫狀噴嘴的細縫型塗布器之 預噴的裝置，具備有：用來保持洗淨液的洗淨槽；和平行 於該洗淨槽被加以配置，並且使其下部浸泡在洗淨槽裡的 洗淨液內，至少上端面被露出成前述細縫型塗布器的噴嘴 可以接近之旋轉滾輪；和用來除去從噴嘴噴出而附著在該 滾輪表面上的塗布液，而朝向旋轉滾輪表面噴出洗淨液之 噴灑式噴嘴。 另，在前述預噴裝置中，係具備：將洗淨槽內的洗淨 液取出淨化後，再度送回洗淨槽之洗淨液循環經路，作爲 相關的結構，可以用來節約洗淨液的使用量。 又，在前述噴灑式噴嘴的上方，且沿著噴灑式噴嘴的 縱長方向上，藉由安裝防止板，可以抑制前述洗淨液的揮 發，及防止從噴灑式噴嘴朝向旋轉滾輪噴出的洗淨液造成 飛散。 再者，作爲洗淨液，若是使用高揮發性有機溶劑的話 ，很快就會乾燥，即使當下一次預噴時，也不會造成不好 —--------衣-- (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -5 - 512072 A7 B7 五、發明説明（3) 的影響。又，藉由在洗淨槽的上方裝設排氣裝置來舒緩地 排氣，可使由噴灑式噴嘴所洗淨的旋轉滾輪的表面更快乾 燥。 使用以上的預噴裝置，使用細縫型塗布器，作爲當正 要將塗布液供給到基板表面時，所實行的預噴方法，使細 縫型塗布器之預噴裝置靠近到前述預噴裝置的回轉滾輪的 上表面上，在該狀態下，若是製作成從噴出式噴嘴將塗布 液朝向旋轉滾輪的上表面噴出的話，噴出式噴嘴內部的塗 布液就會被拉出來，而可以進行良好的預噴。因此，即使 進行連續處理，仍可得到相同品質的塗布膜。 【發明的實施形態】 以下根據附加的圖面，說明本發明的實施形態。在此 ’第1圖係表示附設有關於本發明之預噴裝置之塗部裝置 ’第2圖係沿著第1圖的A - A線的剖面圖，第3圖將預 噴裝置的洗淨槽的部份予以剖面的整體圖，第4圖係預噴 裝置的上視圖。 在第1圖中，C爲塗布裝置，p爲預噴裝置，在本實 施例中，作爲塗布裝置（c )，顯示出利用線性馬達之非 接觸形態之塗布裝置並非僅被限定於此。 首先，塗布裝置（C)，係於基底（1)的上表面， 透過具備有高度調整機構的腳（2 )，裝設有桌（3 )， 又’在基底（1 )的上表面，裝設有上下方向的氣缸單元 (4 ) ’在該氣缸單元（4 )的桿上，裝設有水平平板（ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） I-------衣-- (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -6 - 512072 A7 __________B7 五、發明説明（4 ) 5 ) ’在該水平平板（5 )上，裝設有用來將被處理基板 (W )從桌（3 )處抬舉起來的栓（6 )，再使該栓（6 )對準桌（3 )上的貫通孔（7 )，又，在基底（1 )的 上表面，於左右方向上平行延設有兩條軌道（8 ) 、( 8 )’移動構件（9 )係配置成可沿著該軌道（8 )來移動 。在該移動構件（9 )的下面，則係將跨置軌道（8 )來 作爲浮上手段之空氣軸承（1 〇 )加以固著，由該空氣軸 承（1 0 )，移動構件（9 )會從軌道（8 )(基底（1 ))處浮上。另外，在空氣軸承（1 0 )的兩方的下端上 ，係設有線性軌（1 3 )。 又，在各軌道（8 )的外側上，配置著線性馬達（ 14)。線性馬達（1 4 )，係由與前述軌道（8 )平行 的磁性軌道（1 5 )、和置入該磁性軌道（1 5 )所形成 的空間內之板狀線圏（1 6 )所形成。 又，前述移動構件（9 )處，係立設有支柱（1 7 ) ，在該支柱（1 7 )上係設有上下方向的導向軌道（1 8 )，在前後導向軌道（1 8 )之間，卡合著呈門的形狀的 昇降架（1 9 )，在支柱（1 7 )的內側上，安裝有用來 使昇降架（1 9 )升降之輔助馬達（2 0 ) ’在昇降架（ 1 9 )的下面處，安裝有具備著細縫狀噴嘴孔的塗布元件 (21)，再者，昇降架（1 9 )的一端側上面處’係固 著送液泵（2 3 )，塗布液係從送液泵（2 3 )通過供給 管（2 4 b )供給到塗布元件（2 1 )上。又’廢液槽和 送液泵（2 3 )以及塗布元件（2 1 )之間’分別是用回 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 7 - ---------衣-- (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 512072 A7 B7 五、發明説明（5) 送管（2 5 a ) 、（ 2 5 b )來連接，爲了使塗布液充塡 在送液泵（2 4 )以及塗布元件（2 1 )內，必須進行將 空氣抽成真空的作業。 又’在塗布元件（2 1 )的側面上，被安裝有溝槽感 應器（2 6 )，再以信號線將該溝槽感應器（2 6 )與擴 大益（2 7 )連接起來。512072 A7 ______B7 _ _ V. Description of the invention (1) [Technical field to which the invention belongs] (Please read the precautions on the back before filling out this page) The present invention is about: in the plate-like quilt such as glass substrate or semiconductor wafer On the surface of the object to be treated, coating liquids such as impedance liquid, developing liquid, and color filter liquid flow down through the slit-like openings, and the pre-spraying device and pre-spraying method of the slit-type applicator [Previously Technology] When a coating solution is continuously supplied to a plurality of substrate surfaces using a slit-type applicator, the spray type is caused by contact with air during the standby time between the coating operation and the coating operation. The concentration of a part of the coating liquid in the nozzle increased. Then, if the coating of the next substrate is continued while maintaining this state, the high concentration coating liquid may cause the occurrence of longitudinal striations and the film interruption. In order to eliminate the above-mentioned disadvantages, in the conventional example, the ejection nozzle is immersed in a tank filled with the cleaning liquid or the coating liquid during standby. 'Before coating, remove the stored in the ejection nozzle. The coating liquid is then pre-sprayed. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs [Problems to be solved by the invention] As described above, the method of immersing the ejection nozzle in the tank filled with the cleaning liquid is kept in the spray. When diluted, the problem of uneven thickness of the coating film cannot be effectively solved. In addition, by means of immersion in the coating solution, the film is thickened at the place where the coating is started, and the uniformity of the film thickness is deteriorated. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297mm) _ 4 _ 512072 A7 __ _ _B7_ V. Description of the invention (2) In addition, the coating liquid stored in the ejection nozzle is just before coating Discard it, and when pre-spraying, the coating liquid will adhere to a wide range of the front end of the ejection nozzle by surface tension. As a result, vertical striations may occur, and film interruption may occur. And so on, the issues are all hoped to be improved. [Means for solving problems] The present invention which solves the above-mentioned problems is a pre-spraying device for a slit-type applicator, which is structured as a pre-spraying device for a slit-type applicator formed with a slit-shaped nozzle, which is provided with: : A washing tank for holding the washing liquid; and a washing tank that is arranged parallel to the washing tank, and its lower part is immersed in the washing liquid in the washing tank, and at least the upper end surface is exposed in the aforementioned slit-type coating And a spraying nozzle for removing the coating liquid sprayed from the nozzle and adhering to the surface of the roller, and spraying the cleaning liquid toward the surface of the rotating roller. In addition, the aforementioned pre-spraying device is provided with a cleaning liquid circulation path for removing the cleaning liquid in the cleaning tank and then returning the cleaning liquid to the cleaning tank again. As a related structure, it can be used to save cleaning The amount of fluid used. In addition, by installing a prevention plate above the spray nozzle and in the longitudinal direction of the spray nozzle, the volatilization of the cleaning liquid can be suppressed, and the cleaning sprayed from the spray nozzle toward the rotating roller can be prevented. The liquid caused scattering. In addition, as a cleaning liquid, if a highly volatile organic solvent is used, it will dry quickly, even if it is next pre-sprayed, it will not cause badness ---------- clothing-(Please Please read the notes on the back before filling this page.) Order the paper printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -5-512072 A7 B7 V. Description of the invention ( 3). In addition, an exhaust device is provided above the cleaning tank to release air slowly, so that the surface of the rotating roller cleaned by the spray nozzle can be dried faster. With the above pre-spraying device, a thin-slot type applicator is used as the pre-spraying method implemented when the coating liquid is to be supplied to the substrate surface, so that the pre-spraying device of the fine-slot type applicator is close to the pre-spraying device On the upper surface of the rotary roller, in this state, if the coating liquid is ejected from the ejection nozzle toward the upper surface of the rotary roller, the coating liquid inside the ejection nozzle will be pulled out, which can perform well. Pre-spray. Therefore, even if continuous processing is performed, a coating film of the same quality can be obtained. [Embodiments of the invention] Embodiments of the present invention will be described below with reference to the attached drawings. Here, "the first figure is a coating part device with a pre-spraying device according to the present invention", the second figure is a cross-sectional view taken along line A-A of the first figure, and the third figure is a cleaning of the pre-spraying device The groove part is an overall view in section, and FIG. 4 is a top view of the pre-spraying device. In Fig. 1, C is a coating device, and p is a pre-spraying device. In this embodiment, as the coating device (c), a non-contact coating device using a linear motor is not limited to this. First, the coating device (C) is attached to the upper surface of the base (1), and a table (3) is installed through the feet (2) provided with a height adjustment mechanism. There is a cylinder unit (4) in the up and down direction. 'On the rod of the cylinder unit (4), a horizontal flat plate is installed (this paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) I ---- --- Cloth-- (Please read the notes on the back before filling this page) Order printed by the Intellectual Property Bureau's Consumer Cooperatives of the Ministry of Economic Affairs -6-512072 A7 __________B7 V. Description of the invention (4) 5) 'At this level tablet (5) is provided with a bolt (6) for lifting the substrate to be processed (W) from the table (3), and the bolt (6) is aligned with the through hole (7) on the table (3) Moreover, on the upper surface of the base (1), two rails (8) and (8) 'moving members (9) are parallelly extended in the left-right direction and are arranged to be movable along the rail (8). Below the moving member (9), the straddle rail (8) is used as an air bearing (100) for floating means to be fixed. By the air bearing (1 0), the moving member (9) will be removed from Float on track (8) (base (1)). In addition, linear rails (1 3) are attached to the lower ends of both sides of the air bearing (1 0). A linear motor (14) is arranged on the outside of each track (8). The linear motor (1 4) is formed by a magnetic track (1 5) parallel to the aforementioned track (8) and a plate-shaped coil (1 6) placed in a space formed by the magnetic track (1 5). . In addition, a pillar (1 7) is erected at the moving member (9), and a vertical guide rail (1 8) is provided on the pillar (1 7). A door-shaped lifting frame (19) is engaged with the auxiliary motor (2 0) for lifting the lifting frame (19) on the inner side of the pillar (17). A coating element (21) provided with a slit-shaped nozzle hole is mounted on the lower surface of the liquid crystal pump, and a liquid feed pump (2 3) is fixed to the upper surface of one end side of the lifting frame (19) to apply the coating. The liquid system is supplied from the liquid feeding pump (2 3) to the coating element (2 1) through the supply pipe (2 4 b). And 'between the waste liquid tank and the liquid feeding pump (2 3) and the coating element (2 1)' is the paper size used in this paper. The Chinese National Standard (CNS) A4 specification (210X297 mm) is used. _ 7---- ------ Cloths-(Please read the notes on the back before filling this page) Order printed by the Intellectual Property Bureau of the Ministry of Economic Affairs's Consumer Cooperatives 512072 A7 B7 V. Description of the invention (5) Delivery tube (2 5 a) And (2 5 b), in order to fill the coating liquid in the liquid feeding pump (2 4) and the coating element (2 1), it is necessary to perform an operation of evacuating air. On the side of the coating element (2 1), a groove sensor (2 6) is installed, and the groove sensor (2 6) is connected to the amplification gain (2 7) by a signal line.
在上述中，將塗布液供給到被處理基板（W )，使空 氣從被裝設在空氣軸承（1 〇 )的軌道側處的開口起噴出 ’在使移動構件（9 )從軌道（8 )(基底（1 ))處浮 上的狀態下，將電流的流向以極短的週期連續切換通電到 線性馬達（1 4 )的線圏（1 6 )中，再使移動構件（9 )相對於軌道（8 )(基底（1 ))以非接觸的狀態沿著 軌道（8 )(磁性軌道（1 5 ))持續移動，驅動送液泵 (23) ’將塗布液從細縫狀噴嘴孔朝向被處理基板（W )的表面加以供給。 接著’根據第3及4圖，說明預噴裝置（P )。預噴 裝置（P )，係由貯留洗淨液（L 1 )之貯留部（3 1 ) 、和由其下緣周部與該貯留部（3 1 )的上緣周部接合而 成的側壁部（3 2 )所構成的洗淨槽（3 0 )、和圓筒狀 的滾輪（3 3 )所成的主要部構成的。滾輪（3 3 )係由 不銹鋼、鋁、.鈦等金屬所形成的。又，滾輪（3 3 )的直 徑係被例示爲3 0〜1 0 0 m m，滾輪（3 3 )的上端面 和細縫狀噴嘴孔的噴出孔之間的間隔則製作成2 5〜 3 0 〇 m m。 本紙張尺度適用中國國家榡準（CNS ) A4規格（210X297公釐） · _ (請先閲讀背面之注意事項再填寫本頁) -·裝·In the above, the coating liquid is supplied to the substrate to be processed (W), and air is ejected from the opening provided on the rail side of the air bearing (10), and the moving member (9) is moved from the rail (8). (Base (1)), the current flow direction is continuously switched to the line coil (16) of the linear motor (1 4) in a very short period, and the moving member (9) is relative to the track (8) (Substrate (1)) continuously moves along the track (8) (magnetic track (1 5)) in a non-contact state, and drives the liquid feed pump (23) 'to direct the coating liquid from the slit-shaped nozzle hole toward the substrate. The surface of the processing substrate (W) is supplied. Next, the pre-injection device (P) will be described based on Figs. 3 and 4. The pre-spraying device (P) is a side wall formed by a storage portion (3 1) storing the cleaning liquid (L 1) and a peripheral portion of a lower edge portion thereof and an upper edge portion portion of the storage portion (3 1). The cleaning tank (30) formed by the part (3 2) and the main part formed by the cylindrical roller (3 3). The roller (3 3) is formed of stainless steel, aluminum, titanium, and other metals. The diameter of the roller (3 3) is exemplified as 30 to 100 mm, and the interval between the upper end surface of the roller (3 3) and the discharge hole of the slit-shaped nozzle hole is made 2 5 to 3 0 〇mm. This paper size is applicable to China National Standard (CNS) A4 specification (210X297mm) · _ (Please read the precautions on the back before filling this page)-· Packing ·
、1T 經濟部智慧財產局員工消費合作社印製 512072 A7 B7 五、發明説明（6 ) 用來作爲洗淨液（L 1 )，沸點爲6 5〜1 2 0 °C、 (請先閲讀背面之注意事項再填寫本頁) 蒸氣壓爲1 2〜9 0 m m H g ( 2 〇 t：)的高揮發性有機 溶劑單體，或者是使用被調和成沸點6 5〜1 2 〇它、蒸 氣壓爲1 2〜9 0 m m H g ( 2 0 °C )的混合溶劑。 前述洗淨槽（3 0 )，係就貯留部（3 1 )的紙面垂 直方向上，於相對向的兩側壁（3 1 a ) 、 （ 3 1 b )上 筒狀的滾輪（3 3 )的兩端上係以可旋轉地被軸支撐 住，滾輪（3 3 )係如第3圖所示，被製作成在洗淨槽內 可在其垂直面內旋轉。在滾輪（3 3 )的軸（3 3 a )的 一端上，被安裝有滑輪（3 4 )，該滑輪（3 4 )和馬達 (3 5 )的旋轉軸係利用傳動帶（3 6 )相結合，馬達（ 3 5 )的驅動力會被傳送到滾輪（3 3 )上。 另一方面，在洗淨槽（3 0 )的貯留部（3 1 )內， 被裝滿了有機溶媒等的洗淨液（L 1 )，在其中，滾輪（ 3 3 )的下部係被浸泡在裡面。又，在側壁部（3 2 )的 其中一側的側壁上，被安裝有噴灑式噴嘴（3 7 )。該噴 灑式噴嘴（3 7 )係透過裝設有複式接頭（3 8 )、閥門 經濟部智慧財產局員工消費合作社印製 (3 9 a )的配管（3 9 )，而被連接到回收筒（T )中 ’藉由閥門（3 9 a )的控制，來噴出被貯留在回收筒（ T )中的洗淨液（L 1 )。又，噴灑式噴嘴（3 7 )既可 以用一個噴嘴構成，也可以用多數個短的噴嘴連接起來使 用。若是使用短的噴嘴的話，就易於對應於噴出式噴嘴的 長度變化，又，可以輕鬆地維護該噴嘴。 又，在噴灑式噴嘴（3 7 )所被安裝的側壁的上端部 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇><297公釐） -9 - 512072 A7 一 B7 _____ 五、發明説明（7 ) (請先閲讀背面之注意事項再填寫本頁) 上’被安裝有覆蓋住洗淨槽（3 0 )的上面略半分（第3 圖及第4圖的左右半分）之排氣外蓋（4 0 )。於此排氣 外蓋（4 0 )上被形成有突出於洗淨槽（3 0 )的外部之 排氣口（ 4 1 )，含有被貯蓄在洗淨槽（3 0 )內的洗淨 液的氣體，係通過連接在排氣口（4 1 )之通氣管（4 2 )來加以排出。 又，在貯留部（3 1 )的底部側壁上，裝設有洗淨液 (L 1 )的回收孔（4 3 )。在該回收孔（4 3 )上，所 被連接的配管（4 4 )上係裝設有預噴裝置（P )以及過 濾器（F )，將洗淨液（L 1 )回收到回收筒（T )中。 被回收到回收筒（T )中的洗淨液（L 1 )，會透過配管 (3 8 )再度從噴灑式噴嘴（3 7 )噴到洗淨槽（3 0 ) .內，經循環後再利用。 又，與噴灑式噴嘴（3 7 )的安裝位置相對向的位置 ’也就是側壁的上表面上，以預定的寬度，沿著滾輪（ 經濟部智慧財產局員工消費合作社印製 3 3 )的軸，裝設有伸張出來的上表面外蓋部（4 5 )。 該上表面外蓋部（4 5 )係安裝有液面感應器（4 6 )， 當確認液面在達到預先設定的上限層級之前，會持續洗淨 液（L 1 )的貯留。藉由液面感應器（4 6 )，若偵知其 達到上限的話，如果可用回收筒（T )回收的話就用回收 筒（T )回收，如果不能用回收筒（τ )回收的話就透過 廢液管（4 7 )將該液體送到廢液筒。 如上所述，藉由預噴裝置之預噴，係在等待塗布作業 的空檔的待機狀態下，在要塗布之前預先進行的。換言之 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公餐） λ 512072 A7 B7 五、發明説明（8 ) (請先閲讀背面之注意事項再填寫本頁} ，將塗布元件（2 1 )內的塗布液，在正要塗布之前預先 噴出的動作，一面使多餘的塗布液（L 2 )附著在旋轉的 滾輪（3 3 )上，一面持續進行著。這種預噴動作，係使 塗布元件（2 1 )的噴出口（ 2 2 )以於滾輪（3 3 )的 周面上幾乎無表面張力的程度加以接近，再使從噴出口（ 2 2 )噴出的塗布液（L 2 )附著在前述滾輪（3 3 )的 周面上，藉由滾輪（3 3 )的旋轉拉出塗布液（L 2 )， 再將該塗布液洗淨後除去。 又，從噴灑式噴嘴（3 7 )噴出的洗淨液係對滾輪（ 3 3 )的周面噴出，使附著的塗布液（L 2 )被沖洗乾淨 。此時，在噴灑式噴嘴（3 7 )的上方，由於在沿著噴灑 式噴嘴（3 7 )的縱長方向且較噴灑式噴嘴（3 7 )的前 端突出向滾輪（2 5 )側，安裝防止板（4 8 )，所以可 以防止從噴灑式噴嘴（3 7 )朝向滾輪（3 3 )噴出的洗 淨液的飛散或揮發。 經濟部智慧財產局員工消費合作社印製 又，藉由自排氣口（ 4 1 )排氣，高揮發性有機溶劑 也就是洗淨液，會自滾輪（3 3 )的表面更快地乾燥，而 在進行下一次預噴時，不會產生障礙。 【發明之效果】 根據本發明上述的說明，在旋轉的滾輪下部，設有裝 滿洗淨液的洗淨槽，使細縫狀噴出式噴嘴的開口部接近滾 輪，來進行預噴，由於係使被噴出的塗布液附著在滾輪的 環狀周面，所以噴出式噴嘴的前端部的污染就可以被防止 -11 - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 512072 A7 B7 五、發明説明（9 ) ，又，藉由預噴，即使有由被噴出的塗布液所造成的洗淨 液的污染，由於可以藉由濾淸環來加以循環，所以可以回 復洗淨液所受的污染，並且大幅地減少洗淨液的使用量。‘ 又，由於滾輪係從細縫狀噴出式噴嘴的開口部，使被 噴出的塗布液附著在滾輪的周面上，藉由塗布液的張力， 將塗布液從噴出口拉出來，所以噴出式噴嘴就可以維持在 可以均勻地塗布的狀態，細縫型塗布器就可以在良好的狀 態下轉移到之後的塗布工程。 【圖式之簡單說明】 第1圖係表示附設有關於本發明之預噴裝置之塗部裝 置。 第2圖係沿著第1圖的A - A線的剖面圖。 第3圖將預噴裝置的洗淨槽的部份予以剖面的整體圖 第4圖係預噴裝置的上視圖 (請先閲讀背面之注意事項再填寫本頁} 經濟部智慧財產局員工消費合作社印製 7 9 符號說明】 :基底 :桌 :水平平板 :貫通孔 :移動構件 3 :線性軌 2 :腳 4 :氣缸單元 6 :栓 8 :軌道 1 0 :空氣軸承 1 4 :線性馬達 12 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 512072 Μ Β7 經濟部智慧財產局員工消費合作社印製 五、發明説明（1〇) 1 5 :磁性軌道 1 7 :支柱 1 9 :昇降架 2 1 :塗布元件 2 4 :供給管 2 6 :溝槽感應器 3 0 :洗淨槽 3 2 :側壁部 3 4 :滑輪 3 6 :傳動帶 3 8 :複式接頭 3 9 a :閥門 4 1 :排氣口 4 3 :洗淨液的回收孔 4 5 :上表面外蓋部 4 7 :廢液管 C :塗布裝置 T :回收筒 L 1 :洗淨液 1 6 :線圏 1 8 :導向軌道 2 0 :輔助馬達 2 3 :送液泵 2 5 :回送管 2 7 :擴大器 31:貯留部 3 3 :浪輪 3 5 :馬達 3 7 :噴灑式噴嘴 3 9 :配管 4〇：排氣外蓋 4 2 :通氣管 4 4 :配管 4 6 :液面感應器 4 8 :防止板 Ρ :預噴裝置 W :基板 L 2 :塗布液 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） _ 13 _Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, 512072 A7 B7 V. Description of the invention (6) is used as a cleaning solution (L 1), with a boiling point of 6 5 ~ 1 2 0 ° C, (Please read the first Note: Please fill in this page again) Highly volatile organic solvent monomer with a vapor pressure of 12 to 90 mm H g (2 0t :), or use it to be adjusted to a boiling point of 6 5 to 1 2 0, its vapor pressure It is a mixed solvent of 12 to 90 mm H g (20 ° C). The cleaning tank (30) is a cylindrical roller (3 3) on two opposite side walls (3 1 a) and (3 1 b) in the vertical direction of the paper surface of the storage part (3 1). The two ends are rotatably supported by a shaft, and the roller (3 3) is made to be rotatable in a vertical direction in the washing tank as shown in FIG. 3. On one end of the shaft (3 3 a) of the roller (3 3), a pulley (3 4) is installed, and the rotating shaft system of the pulley (3 4) and the motor (3 5) is combined with a transmission belt (3 6). The driving force of the motor (3 5) will be transmitted to the roller (3 3). On the other hand, the storage portion (3 1) of the cleaning tank (30) is filled with a cleaning solution (L 1) such as an organic solvent, and the lower part of the roller (3 3) is immersed therein. inside. A spray nozzle (3 7) is attached to one side wall of the side wall portion (3 2). The spray nozzle (3 7) is connected to a recovery cylinder (3 9) through a pipe (3 9) equipped with a double joint (3 8) and printed by the employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (3 9 a). T) In the control of the valve (39a), the cleaning liquid (L1) stored in the recovery cylinder (T) is sprayed. In addition, the spray nozzle (37) may be constituted by a single nozzle, or a plurality of short nozzles may be connected and used. If a short nozzle is used, it is easy to respond to the length change of the ejection nozzle, and the nozzle can be easily maintained. In addition, the paper size of the upper end of the side wall where the spray nozzle (3 7) is installed is in accordance with China National Standard (CNS) A4 (21〇 > < 297 mm) -9-512072 A7 B7 _____ 5 、 Explanation of the invention (7) (Please read the precautions on the back before filling in this page) On the top of the 'installed to cover the washing tank (30), a little half (left and right half of Figure 3 and Figure 4) Exhaust cover (40). The exhaust cover (40) is formed with an exhaust port (41) protruding from the outside of the cleaning tank (30), and contains a cleaning liquid stored in the cleaning tank (30). The gas is discharged through a vent pipe (4 2) connected to the exhaust port (4 1). Further, a recovery hole (4 3) of a cleaning solution (L 1) is installed in a bottom side wall of the storage section (3 1). A pre-spraying device (P) and a filter (F) are installed on the connected pipe (4 4) to the recovery hole (4 3), and the cleaning liquid (L 1) is recovered to the recovery cylinder ( T). The cleaning liquid (L 1) recovered in the recovery cylinder (T) will be sprayed from the spray nozzle (37) to the cleaning tank (30) again through the pipe (38), and then circulated again. use. In addition, the position opposite to the installation position of the spray nozzle (3 7), that is, the upper surface of the side wall, has a predetermined width along the axis of the roller (printed by 3 3 of the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs). , An extended upper surface cover portion (4 5) is installed. The upper surface cover part (4 5) is equipped with a liquid level sensor (4 6). When it is confirmed that the liquid level reaches a preset upper limit level, the cleaning liquid (L 1) is continuously stored. With the liquid level sensor (4 6), if it is detected that it has reached the upper limit, if it can be recovered by the recovery cylinder (T), it will be recovered by the recovery cylinder (T), if it cannot be recovered by the recovery cylinder (τ), it will pass through the waste. The liquid pipe (47) sends the liquid to the waste liquid tank. As described above, the pre-spraying by the pre-spraying device is performed in advance in the standby state waiting for the coating operation before the coating is to be performed. In other words, this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 meals) λ 512072 A7 B7 V. Description of the invention (8) (Please read the precautions on the back before filling in this page}, the coated components (2 The coating liquid in 1) is sprayed in advance just before coating, and the excess coating liquid (L 2) is adhered to the rotating roller (3 3) while continuing. This pre-spraying action is The spraying port (2 2) of the coating element (2 1) was brought close to the surface of the roller (3 3) with almost no surface tension, and the coating liquid (L 2) sprayed from the spraying port (2 2) was made close. ) Is attached to the peripheral surface of the roller (3 3), the coating liquid (L 2) is pulled out by the rotation of the roller (3 3), and the coating liquid is washed and removed. The spray nozzle (3 7) The sprayed cleaning liquid is sprayed on the peripheral surface of the roller (33) to wash the attached coating liquid (L2). At this time, above the spray nozzle (37), The spray nozzle (37) is longer than the front end of the spray nozzle (37) and protrudes toward the roller. 2 5) side, the prevention plate (4 8) is installed, so it can prevent the scattering or volatilization of the cleaning liquid sprayed from the spray nozzle (37) toward the roller (33). Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs In addition, by exhausting from the exhaust port (4 1), the highly volatile organic solvent, that is, the cleaning liquid, will dry faster from the surface of the roller (3 3), and during the next pre-spraying, [Effects of the invention] According to the above description of the present invention, a washing tank filled with a washing liquid is provided at the lower part of the rotating roller, and the opening of the slit-shaped ejection nozzle approaches the roller to perform a preliminary operation. Spray, because the sprayed coating liquid adheres to the ring-shaped peripheral surface of the roller, so the pollution of the front end of the spray nozzle can be prevented. -11-This paper size applies the Chinese National Standard (CNS) A4 specification (210X297). (Centi) 512072 A7 B7 5. Description of the invention (9), and by pre-spraying, even if there is contamination of the cleaning liquid caused by the sprayed coating liquid, it can be circulated through the filter ring, so it can be recycled. Recovery of cleaning solution It contaminates and drastically reduces the amount of cleaning liquid used. 'Also, since the roller system is from the opening of the slit-shaped ejection nozzle, the sprayed coating liquid adheres to the peripheral surface of the roller, and the tension of the coating liquid is caused by the tension of the coating liquid. The coating liquid is pulled out from the ejection port, so the ejection nozzle can be maintained in a state that can be uniformly applied, and the slit-type applicator can be transferred to the subsequent coating process in a good state. [Schematic description of the drawing Figure 1 shows a coating unit equipped with a pre-spraying device according to the present invention. Figure 2 is a cross-sectional view taken along line A-A of Figure 1. Figure 3 is an overall view of the section of the cleaning tank of the pre-spraying device. Figure 4 is a top view of the pre-spraying device (please read the precautions on the back before filling this page). Printed 7 9 Symbol description]: Base: Table: Horizontal flat plate: Through hole: Moving member 3: Linear rail 2: Foot 4: Cylinder unit 6: Pin 8: Track 1 0: Air bearing 1 4: Linear motor 12 paper Standards are applicable to Chinese National Standard (CNS) A4 specifications (210X297 mm) 512072 Μ Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (10) 1 5: Magnetic track 1 7: Pillar 19: Lifting frame 2 1: coating element 2 4: supply pipe 2 6: groove sensor 3 0: washing tank 3 2: side wall 3 4: pulley 3 6: transmission belt 3 8: double joint 3 9 a: valve 4 1: row Air port 4 3: Recovery liquid recovery hole 4 5: Upper surface cover portion 4 7: Waste liquid tube C: Coating device T: Recovery cylinder L 1: Cleaning liquid 1 6: Line coil 1 8: Guide rail 2 0: Auxiliary motor 2 3: Liquid feed pump 2 5: Return pipe 2 7: Amplifier 31: Reservoir 3 3: Wave wheel 3 5: Motor 3 7: Spray type spray 3 9: Piping 4 0: Exhaust cover 4 2: Vent pipe 4 4: Piping 4 6: Liquid level sensor 4 8: Prevent plate P: Pre-spray device W: Substrate L 2: Coating liquid (please read the back first) Please note this page before filling in this page) This paper size applies to China National Standard (CNS) Α4 size (210X297 mm) _ 13 _