TW402665B - Vacuum pump - Google Patents

Abstract

To provide a vacuum pump which can refrain the temperature from raising up at air discharge port, even under the huge air volume, the high air flow speed, and the high compression ratio, it could still running continuously. That vacuum pump consists of: a housing 11, rotary shaft 23, 24, being supported at two ends by housing 11; and rotor 21, 22, inside rotary chamber 14 to be unified rotated with the Rotary shafts 23, 24 and to suck the compressed air or fluid into the Rotary chamber 14 from the air suction port 12 and it is discharged out from discharge port 13; an outside pass way 41a, 42a and inside pass way 41b, 42b are formed at one end side of rotary shaft 23, 24 as an individual opening, meanwhile to connect two pass ways internally for Rotors 21, 22 to form a cooling pass way 41, 42.

Description

Ttt [Field of the invention] i Ϊ = related to a vacuum pump, such as a volume transfer type vacuum pump for removing amphoteric fluid mixed with air or other gases. [Previous technique] Pressure pumps and mechanical pumps are used to obtain vacuum exhaust in low-pressure working spaces. Roots, claws, and screw-type volume transfer pumps are commonly used. The side iU: f 'is the air transfer chamber between the casing and the rotor, which communicates from the suction port. The port side reduces its volume at a predetermined compression ratio while reducing the volume (exhaust port Zi port, exhaust. Therefore, due to compression Heat or leakage from the atmospheric side causes the gas in the pump to return to the atmospheric side again. The exhaust port side of the cycle recovery reaches a relatively high temperature. For example: if the vacuum chamber for semiconductor manufacturing is used to exclude the vacuum chamber, and Jiang Φ # 今 量A mechanical booster pump (such as a root pump) is connected to the true booster pump and bypassed to the vacuum chamber for pressure retention: \) Connected to its breast discharge side 'exhaust with the main true air, the following' only work with耩 # π A β;: When the mechanical booster pump and the main vacuum pump are operated in this way, the exhaust of the main vacuum system is: ::: =% temperature, but the semiconductor manufactured is small in size, so it is taken in the shell at 2 up Set the water jacket cooling, the amount of pump is small, [the problem to be solved by the invention] ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Get the set exhaust speed

It is necessary to operate the mechanical pressure booster r-to operate the mechanical section (near the atmospheric pressure) for more than half of the time at the same time. It is hoped that these two series of functions can be combined into a pressure pump and a main vacuum pump. So Greek pump. Large pumping capacity, high compression ratio, multi-stage volumetric type, but when the pump is so large in capacity, due to the large operating obstacles, and most of the power of the vacuum pump 2 = the power required to move is also significantly higher than the temperature of the exhaust port side, The cause of heat generation at the exhaust port side is caused by the sintering between the upper shells or the winding of the rotor bearing to the point where a rise in temperature between the rotor and the outside is prone to be explained in detail. For this reason, the casing on the side of the exhaust port is forced to cool during operation / is exposed to the atmosphere (or is in a high-vacuum state gas transfer chamber at a relatively low temperature, and is relatively surrounded by a small amount of atmosphere at the shaft end. For cooling, let t be the temperature difference of 20 ° t due to the heat conduction on the casing side due to radiation. Therefore, the dilation between the casing and the rotor and the thermal expansion relative to the casing # are the obstacles for the thermal expansion of the rotor and the rotor shaft. The large running state is caused by sintering. Because of this sort of field: the multi-stage volume-type main truth that cuts the length of the pq ancient, * -level reduction, continuous operation of large capacity, high-level contraction μ ^ ai '^ system', and requires long-term continuous operation. The use of $, such as the vacuum exhaust of semiconductor devices to reduce the productivity of the vacuum pump maintenance, the first time ... In view of the above: in order to solve the problem, the purpose is to large-capacity, High-speed :: Vacuum pump capable of continuous operation with f reduction ratio. ^ [Method to solve the problem] In order to achieve the invention of the first patent application scope of f above, the casing has a suction port and an exhaust port, and a rotor housing is formed inside. Room

-仙 2 6 65 V. Description of the invention (3) 丄 Supported on the casing on both the suction port side and the exhaust port side, or supported on the casing at the exhaust port = single side; & Rotor in the aforementioned rotor housing room It rotates integrally with the rotor shaft, draws a compressive fluid into the rotor accommodation chamber from the suction port, and compresses the fluid to be discharged from the exhaust port. Between the casing and the rotor, a rotation of the rotor toward the rotor is formed. Axial direction of the rotor—a vacuum pump for a fluid transfer chamber that is transported on a side, characterized in that the rotor shaft is formed with an outer passage portion and an inner passage portion that extend to the inside of the rotor shaft and open on one side of the axial direction. A cooling passage formed by connecting the two passage portions is folded back inside the rotor. Ming Yin Da Gao Zhen only has the rotor-like wall section in the application section on the entrance side of the passage. The air side is in the empty state as described above. The upper range of the rotor temperature can be folded between the bottom of the shaft and the deep hole of the shaft. It is surrounded by high temperature, and the exhaust inside is cooled as described above. The rotor is inserted inside the cylinder, but the passageway is kept at a relatively low temperature during operation. On the one hand, the rotor becomes compressed from the exhaust port side and the exhaust gas becomes the port side to the rotor. The inner return position enters the rotor shaft and is effectively cooled at the exhaust port side, so the rotor lift can be suppressed to a moderate range. According to the second invention, a deep hole extending in the axial direction of the rotor shaft is formed before the rotor shaft is formed, and an inner cylindrical wall portion is provided, and the bottom of the deep hole is easily connected to the passage portion and the member outside the cooling passage. The slender cold that forms the inner and outer turns is more like the invention in the scope of patent application No. 3, the front passage part and the inner section of the road section are described in _mentioned rotor shaft # 7 八 部 道 之 夕子 轴 outer peripheral surface, and on the rotor shaft and : The opening is due to the two annular liquid passages of the opening, that is, it has nothing to do with the formation of% turn between the double,

Page 6 Reverse pass -4 ^ 24 ^ 5- V. Description of the invention (4) " --- Easy to connect the cooling passage to the external coolant circulation passage, etc. Another example is the invention of claim 4 of the patent scope, which is provided with a temperature sensor that detects the aforementioned casing, rotor, and sub-shafts, and sets a cooling liquid supply and discharge according to the detection temperature of the temperature sensor. The exhaust mechanism of the cooling passage can cool the exhaust port side of the rotor more effectively. [Embodiments of the invention] The following describes preferred embodiments of the present invention with reference to the drawings. Fig. 1 and Fig. 2 show a vacuum pump according to the present invention in a second embodiment. Kobe% pump First, the structure will be described. In FIG. I, a 10-series screw pump (vacuum pump) and a pump casing 11 are provided. The pump casing 11 includes an air inlet 丨 2 and an air outlet 丨 3, and an inner rotor storage chamber 14 connected to the pump. 21 and 22 are rotatably received with a small gap (for example, about 50 # m) outside the chestnut. The male: The male spiral in the helical rotors Π and 22 forms a helical rotation: The helical rotor 22 forms a reverse spiral direction with the rotor 21: Shape: The helical rotor 2 and 22 are tiny in the pump casing u: second-class (Melon) are arranged adjacent to each other in parallel, and the driving mechanism described later is located between the casing 11 and the rotors 21 and 22 to form a majority of spiral fluid transfer chambers (not rotated by the rotors 21 and 22). At this time, when these fluids are not transported), when the tick transfer area is increased, the volume is increased to a predetermined value for suction. The suction of 2 is not connected to the suction port 12 or the exhaust port 13, but at a certain level. The volume or phase decreases the volume, which is transferred from one side of the rotor axis direction of the suction section '13 side, and j is to the exhaust port to the exhaust port.

V. Description of the invention (5) Displacement ... to the minimum value for discharge. Let A 2 栌 1 be coaxial with the rotor shaft 2 3 on both ends in the direction of the protruding axis; and Η the spiral rotor 22 and the turning ends on both ends in the direction of the protruding shaft == up; the bodies are formed separately. The rotor shafts 23 and 24 are supported by the pump housing 11 at two free sides, so that the rotor s and the bearings 26 and 27 have the function of restricting the axial displacement of the rotors 21 and 22 to the housing 11 and the bearings 28 and 29 have allowance. The function of the rotor and displacement of the pump housing 11 in the axial direction (specifically, the rotors 21 and 22 bearing displacement in the axial direction of m-1 are known as displacement due to thermal expansion). 13 ^ 1 Xiao Cheng 28 and 29 are not necessarily required, but the structure in which the bearings 2 6, 27 of the rotor 21 through the exhaust port i are supported on one side by the casing is also possible. The driving mechanism of the 30 series of award-winning spiral rotors 21 and 22 includes a motor and a rotor shaft 23 connected to the male spiral rotor 21; and synchronous gears 32 and 2 are fixed to the rotor shafts 23 and 24, respectively. The synchronizing gears 32 and 33 are combined with each other. 2 The functions of the rotors 21 and 22 are formed in the transmission mechanism housing chamber 15 of the pump housing 11. In addition, J 7 won the cooling mechanism of the cooling rotors 21 and 22 on the mi3 side. The cooling mechanism 40 includes: cooling passage portions 41 and 42 (cooling passages), cooling rotors 21 and 22 passing through one end of the rotor shaft ^ 24 in the axial direction side, that is, the exhaust port 13 side, and the flange portion; the passage connection portion 43 , 44, each cooling channel 42 is connected to the external shaft; and the external cooling liquid supply and exhaust machine secret, by the passage connection portions 43, 44 are connected to the cooling passage portions 41, 42 to return in the rotor 2 1, 2 2 The cooling path circulates the coolant. '

~ 啦 665 V. Description of the invention (6) Specifically, the cooling passage portion 41 formed in the rotor shaft 23 has the outer passage portion 41a and the outer passage portion 41a extending in the vicinity of the end portion of the exhaust port 13 in the rotor axis direction and The inner passage portion 41b serves as a cooling passage that returns to and connects the two passage portions 41a and 41b in the rotor 21. The cooling passage portion 42 is also formed on the rotor shaft. The cooling passage portion 42 extends toward the exhaust axis in the rotor axis direction, and the outer passage portion 42a and the inner passage portion 42b are respectively opened near the end portions and are formed in the rotor 22. The cooling passage connecting the two passage portions 42a and 42b is folded back. In addition, the rotor shafts 23 and 24 form deep holes 23a and 24a in the rotors 21 and 22 with bottom surfaces extending in the axial direction, and cylindrical wall portions 23b and 24b are provided in the deep holes 23a and 24a. The bottoms of 23a and 24a and the cylindrical wall portions 23b and 24b are folded back to connect the outer passages 41a and 42a of the cooling passages 41 and 42 and the inner passages 41b and 42b. Furthermore, the cooling passage portions 42 and the outer passage portions 41a and 42a and the inner passage portions 41b and 42b are opened at predetermined positions separated from each other in the axial direction of the rotor shafts 23 and 24 on the outer peripheral surfaces of the rotor shafts 23 and 24, respectively. . The passage connecting portions 43 and 44 ′ include: each of a pair of annular side wall portions 23 c, 23 d, 24 c, and 24 d. The openings at both ends of the cooling passage portions 41 and 42 are provided on the rotor shafts 23 and 24; each pair of annular seals The members 51, 52, each of the cooling passage portions 41 or 42 and a pair of annular side wall portions 23c, 23d, 24c, or 24d at both ends thereof are arranged on both sides in this axial direction; and most of the elastic members (elastic members), Each ring-shaped seal member 51 or 52 is pressed against the ring-shaped side wall portions 23c, 23d, 24c, and 24d, and further includes a joint housing portion 55, which houses the ring-shaped side wall portions 23c, 23d, and the ring seal around the rotor shaft 23. The member 51 and the spring are all provided in the pump housing; and the joint housing portion 56 ′ receives a ring around the rotor shaft 24.

5. Description of the invention (7) The side wall portions 2 4 c, 2 4 d, the ring-shaped sealing member 5 2 and the spring 5 3 are all provided in the pump casing. In addition, the annular sealing members 51 and 52 include: wear-resistant rings 51a and 52a with peripheral grooves, which are respectively slidably connected to the annular side wall portions 23c, 23d, 24ε, and 24d, or are made of the same hard material; And elastic sealing rings 51b, 52b, and the o-rings of the peripheral grooves of these wear-resistant rings 51a, 52a, etc. 57 and 58 are annular passages formed between the pair of annular side wall portions 23c, 23d, 24c, and 24d and the connector housing portions 55 and 56, respectively, and communicated with the cooling passage portion 41 or both end portions. ~ The cooling mechanism 40 further includes: a temperature sensor that detects at least one of the temperature of the pump casing 丨 丨, the rotor 2 丨, 2 2 and the rotor shaft 2 3, 2 4, such as FIG. 3 (a) or FIG. 3 (b ) Shown temperature sensor 6 1. The temperature sensor 6 丨 detects the temperature of the pump casing 1 1 near the exhaust port 3, and supplies and discharges the cooling liquid supplied and discharged by the cooling liquid supply and discharge mechanism 45 according to the detected temperature through the cooling passage part 41 and '42. ， I cycled at the given route. & The vacuum pump of this embodiment thus constructed drives the male spiral rotor 21 by the drive mechanism 31 and drives the two rotors 21 and 22 synchronously by the transmission gears 32 and 33. The aforementioned suction-side transfer interval increases the volume to a predetermined value to generate an inspiratory effect, the intermediate transfer interval is transferred at a predetermined volume, and the aforementioned discharge 2 transfer interval reduces the volume to generate a discharge effect. In this state, the fluid transfer chamber is continuously opened to the atmosphere side and exhausted on the exhaust port side 13 gradually, but the heat generated by the compression of the exhaust gas and the leakage enter the pump casing from the exhaust port 13 through the exhaust side. The gas inside 丨 is discharged again in a large loss cycle, etc., and the exhaust port 丨 3 side reaches a considerable temperature. Also, due to operation

V. Description of the invention (8) A high vacuum state near the exhaust Dl3 'causes the rotor shaft tb to be low, and the W Mm pump casing 11 can not only radiate heat to the outside air but the pump casing u side is easy to warm the spiral rotors 21, 22 However, the side ends of this embodiment are connected to the rotor 2 and the rotor shafts 23 and 24 enter the rotor shafts 23 and 24 through the cooling passages 41 and 42 of the exhaust ports. 3 t 4 i In essence, the suction rolling port 1 2 is not cooled, only the row and field products are raised. Therefore, it is possible to maintain the rotors 21 and 22 as a whole within the sound range of the side of the exhaust port 13 of the rotors 21 and 22 =: ίίΓ; ΓΓ so that large-capacity, stomach speed, and high waste reduction ratio are not easy to produce yttrium, etc. Vacuum pump that can run continuously for a long time. ， When running at high speed ’can reduce the gap between the rotors 21 and 22 or the outside of the plate: the gap variation of the degree = degree, so you can get the gap of each part, that is, the vacuum pump with good air tightness and good performance. Therefore, when this equipment is used in a vacuum chamber for a vacuum exhaust semiconductor manufacturing device, the suction side of the pump, which easily accumulates solids generated by the reaction of semiconductor manufacturing gas, can be maintained at the required temperature i, which is not easily generated by solids. , Rc), on the one hand, the operation control rotors 21, 22 and = ~ such as temperature = not too large 'do not need to perform frequent overhaul, and can continue to run for a long time and stable. Furthermore, in the present embodiment, deep holes 23a, 24a 'are formed in the rotor shafts 23, 24 on the inside of the rotors 21, 22, and the cylindrical walls 23b, 24b are inserted in the holes, and the deep walls 23a, 24a' extend in the direction of the rotor shaft. And fold back the connection between the bottom of the aforementioned deep holes 23a, 2 "and the inner ends of the cylindrical wall portions 23b, 24b.

Wuming— (9) You 嶋 '' One outside passage sections 41a, 42a and inside passage sections 41b, 42b, so it is easy to form a slender cooling passage 41, 42 with inner and outer turns back with a single member, and it can be destroyed. manufacturing cost. In addition, the outer passage portions 41a, 42a and the inner passage portions 41b, 42b of the cooling passage portions 41, 42 are opened to the rotor shafts 23, 24 in the direction of the rotor shafts 23, 24, and are opened on the outer peripheral surfaces of the rotor shafts 23, 24. Two annular fluid passages are formed between the pump casing 11 and the pump housing 11 so as to communicate with the openings described above. Therefore, it is easy to connect the cooling passage portions 41 and 42 to external coolant circulation passages regardless of the rotation of the rotors 21 and 22. Cooling liquid supply and exhaust mechanism 45. In addition, since the pump casing 11, the rotors 21, 22, and the rotor shafts 23, 24 (, at least one of the degree sensors 6) are provided, and the cold liquid is supplied and discharged to the cooling passage portion 4 according to the detection temperature thereof. The supply and exhaust mechanism 45 in 1, 42 can more effectively cool the rotors 21, 22, rotor shafts, 24 bearing 26, 27, etc. on the side of port 13. Take the effect of the invention according to the invention of this application, because The rotor shaft enters the cooling passage in the rotor vehicle from the end of the exhaust port side to the turning-back position, only inside the exhaust gas, so 'Yes: Yes, it is possible to suppress the temperature rise on the exhaust side of the rotor. The speed and compression ratio are not easy to sinter: so that the cylindrical wall portion can be easily inserted into the inner and outer folding structure by inserting a simple component, that is, the manufacturing cost can be reduced. The slender cooling path of the return can reduce the cost.

The reason is that the two cooling fluid passages between the rotor shaft and the casing are connected to the cooling path of the outer peripheral surface of the sub-shaft, that is, the opening of the volume is independent of the rotation of the rotor. ^ = The passage is connected to the external coolant circulation passage, etc. Set detection temperature; at least one kind of temperature sensor in the shell rotor and the rotor shaft, and supply the cooling liquid to the cooling passage according to the detection temperature, so that the rotor shaft and bearings can be cooled more effectively. [Brief description of the drawings] FIG. 1 is a sectional view of an embodiment of a vacuum pump according to the present invention. FIG. 2 is a sectional view of a main part of the vacuum pump of FIG. 1. FIG. Fig. 3 is a device state diagram of the temperature sensor installed in the vacuum pump of Fig. 1, (a) is a case of detecting the outer peripheral surface temperature of the rotor shaft, and (b) is a case of detecting a case temperature. Description of the drawing number H〇using) Intake α Exhaust 〇 Rotor (Rotor) accommodation chamber Male spiral rotor (rotor) Female spiral rotor (rotor) • • Rotor shaft • • • Deep holes 23b, 24b · 26 > 27 '28 • Cylinder Wall 29 · · · Bearing

402665 V. Description of the invention (11) 30 · · · Drive mechanism 31 · · · Motor 32, 33 · · · Synchronous gear 4 0 · · · Cooling mechanism 41, 42 ··· Cooling passage section (cooling passage) 4 1 a · 4 2 a · · Outer passages 4 1 b, 4 2 b · · · Inner passages 43, 44 · · · Connections 4 5 · · Coolant supply and discharge mechanism

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Claims (1)

-1. A vacuum pump, comprising: a housing having an intake port and an exhaust port, and a rotor receiving chamber is formed inside the rotor shaft; the rotor shaft is supported on the casing or the exhaust port side on both sides of the intake port and the exhaust port side; The rotor is supported on the casing at an early stage; and the rotor is rotated with the rotor shaft in the rotor accommodating chamber, draws a compressive fluid into the rotor accommodating chamber from the suction port, and compresses the fluid to be discharged from the exhaust port. An air pump is formed between the rotor and the rotor to move the fluid to the side of the axial direction of the rotor. The air pump is characterized by: "Ten ten years old" The shaft of the rotor is extended to The inside of the aforementioned rotor shaft is opened at the outer side and the inner passageway at 3 1 ^ to one side, respectively] s just described _ the cooling passage formed by the two inner passages that are folded back into the two passages. 2. As mentioned in the first patent application scope A vacuum pump is formed in the rotor, and the rotor is sleeved in the rotor, and a deep hole extending in the direction of the rotor shaft axis is provided. The deep hole is inserted in the rotor shaft. Inner tubular wall Said cooling passage Μ & folded between the front wall portion connected | passage portion of the outer path and the inner passage portion. • If the patent application scope is ljg, its h / two pumps outside the straight stone road, where the aforementioned cooling passage is turned ::; :: pass; the rotor shaft axis direction is separated to form two two communicating with the opening.刖 Between the labyrinth of the lost rotor and the aforementioned casing Page 15 VI: Shen III Yan 5 4. If the vacuum pump of the scope of patent application No. 1, 2 or 3, which is provided with a temperature sensor that detects at least one of the aforementioned casing, rotor and rotor shaft, and the corresponding The detection temperature of the temperature sensor supplies and discharges the cooling liquid to the supply and discharge mechanism in the cooling passage. Page 16