TW201930171A - Tear film device - Google Patents

Abstract

A tear film device includes is adapted to tear the cover film on the roll-to-roll film in a vacuum environment. The cover film includes a film body and a tab. The tear film device includes a vertical-pull mechanism and a horizontal-pull mechanism. The vertical-pull mechanism includes a tab clamping assembly and a pull-down assembly. The tab clamping assembly is used for clamping the tab. The pull-down assembly is used for pulling the cover film down in the vertical direction. The horizontal-pull mechanism includes a film clamping assembly and a pull-back assembly. The film clamping assembly is used for clamping the film body. The pull-back assembly is used for pulling the film body in the horizontal direction to tear the cover film from the roll-to-roll film.

Description

Tear film device

The present invention relates to a tear film device, and more particularly to a tear film device that can tear a film in two directions.

The conventional organic light-emitting diode process is to form a plurality of semiconductor structural layers of an organic light-emitting diode on a carrier in an atmospheric environment. Then, the semiconductor structure layers are also hermetically covered with a cover film under an atmospheric environment. However, tearing the film under atmospheric conditions tends to cause damage to such semiconductor structural layers. Therefore, it is necessary for those skilled in the art to propose a new technique that can ameliorate the aforementioned problems.

Accordingly, the present invention provides a tear film device which can ameliorate the aforementioned conventional problems.

According to an embodiment of the invention, a tear film device is proposed. The tear film device is adapted to tear a cover film on a continuous web in a vacuum environment. The cover film includes a film body and an ear portion connected to each other. The tear film device includes a vertical pull down mechanism and a horizontal back pull mechanism. The vertical pull down mechanism includes an ear grip assembly and a pull down assembly. The ear grip assembly is used to grip the ears. A pull-down assembly is used to pull the cover film down in a vertical direction. The horizontal back pull mechanism includes a diaphragm clamping assembly and a back pull assembly. The diaphragm clamping assembly is used to hold the membrane body. The rear pull assembly is configured to pull the film body in a first horizontal direction to tear the cover film from the continuous web.

In order to better understand the above and other aspects of the present invention, the following detailed description of the embodiments and the accompanying drawings

Please refer to FIGS. 1A-1C. FIG. 1A is a schematic diagram of a roll-to-roll continuous process apparatus 10 according to an embodiment of the present invention, and FIG. 1B is a schematic view of the tear film device 100 of FIG. 1 (not shown in a continuous manner The coil 20), and FIG. 1C is a schematic view showing the continuous web 20 and the cover film 22 adhered thereto from the viewing angle V1 of FIG. 1A. In order to avoid the complexity of the drawing lines, the drawings of the present application do not have a continuous web 20 and a cover film 22 for each drawing.

The roll-to-roll continuous process apparatus 10 can be applied to a continuous roll-to-roll (R2R) process as one of a semiconductor component such as an organic light-emitting diode. In the present embodiment, the roll-to-roll continuous process apparatus 10 can be applied to a unwinding step of a plasma assisted chemical vapor deposition (PECVD) process. In the unwinding step, the roll-to-roll continuous process apparatus 10 can tear the cover film 22 from the continuous web 20 to expose the semiconductor structure 21 formed on the continuous web 20 for the next step, Such as plasma assisted chemical vapor deposition. The cover film 22 here is, for example, a TD film.

As shown in FIG. 1A, the roll-to-roll continuous process apparatus 10 includes a unwinding box 11, a roller 12, at least one sealing cover 13 and a tear film device 100, wherein the unwinding box 11 has a unwinding chamber 11a, tear film The device 100 is partially disposed within the unwinding cavity 11a. The roller 12 can guide the continuous web 20 through the tear film device 100. As shown in Fig. 1C, one side of the continuous web 20 is formed with a plurality of semiconductor structures 21, such as a layer structure of an organic light emitting diode. The cover film 22 is adhered to the same side of the continuous web 20 to cover and seal the semiconductor structures 21. In this way, the semiconductor structure 21 can be prevented from being damaged by the environment due to exposure when it is outside the unwinding cavity 11a. In an embodiment, the cover film 22 can achieve a water blocking rate less than The specifications are to maintain the reliability of such semiconductor structures 21. When the continuous web 20 enters the unwinding cavity 11a, the tear film device 100 can tear the tear-off cover film 22 from the continuous web 20 to expose the semiconductor structure 21 for the next step of the semiconductor process. . In order to avoid product damage caused by contact with moisture and/or oxygen before the next process, the unwinding chamber 11a is maintained in a vacuum state during the tearing process.

As shown in Fig. 1A, the sealing cover 13 is disposed on the unwinding box 11 to maintain the degree of vacuum of the unwinding chamber 11a.

Further, as shown in FIG. 1C, the cover film 22 includes the connected film body 221 and the opposite first ear portion 222 and second ear portion 223. When the cover film 22 is adhered to the continuous web 20, the first ears 222 and the second ears 223 of the cover film 22 protrude from the sides of the continuous web 20 to allow the tear film device 100 to be held . Since the first ear portion 222 and the second ear portion 223 protrude from the sides of the continuous web 20, the tear film device 100 does not clamp to the continuous web 20 when the ears are held.

As shown in FIG. 1A, the tear film device 100 includes a vertical pull down mechanism 110 and a horizontal back pull mechanism 120. The vertical pull-down mechanism 110 can clamp the first ear portion 222 and the second ear portion 223 to pull the cover film 22 in the vertical direction D1, and then the horizontal back pull mechanism 120 can clamp the film body 221 covering the diaphragm 22, and then The first horizontal direction D21 pulls the film body 221 to tear the cover film 22 from the continuous web 20. As such, the tear film device 100 can tear the cover film 22 from the continuous web 20 in two perpendicular directions.

Please refer to FIGS. 1D~1G and 2A and 2B. FIG. 1D is a schematic diagram of the vertical pull-down mechanism 110 of FIG. 1A, and FIGS. 1E and 1F are enlarged views of the first jaw set 1112 of FIG. 1D. FIG. 1G is a plan view showing the vertical pull-down mechanism 110 of FIG. 1D. The difference between the first F and the first E is only that the connecting plate 1112g is not shown in the first F to show the inclined surface 1112s of the pushing member 1112f and the second elastic member 1112m. 2A is a schematic view showing the connection plate 1112g of the 1Gth image being stopped by the stopper 1112h, and FIG. 2B is a view showing the movement of the first jaw group 1112 and the second jaw group 1113 of FIG. 2A to the clamping position. schematic diagram.

As shown in FIG. 1D, the vertical pull-down mechanism 110 includes an ear clamping component 111 and a pull-down component 112, wherein the ear clamping component 111 is configured to clamp the first ear 222 (shown in FIG. 1C) and the second The ear portion 223 (shown in FIG. 1C) is used to pull the cover film 22 (not shown) in the vertical direction D1.

As shown in FIG. 1D, the ear gripping assembly 111 includes a first stage 1111, a first jaw set 1112, a second jaw set 1113, a first rack 1114, a second rack 1115, and a drive gear 1116. The first jaw group 1112, the second jaw group 1113, the first rack 1114, the second rack 1115, and the driving gear 1116 may be disposed on the first stage 1111 so as to be along the vertical direction D1 with the first stage 1111. Move (shown in Figure 1A).

As shown in FIG. 1D, the first rack 1114 is coupled to the first jaw group 1112 and extends along the second horizontal direction D22, the second horizontal direction D22 and the first horizontal direction D21 (shown in FIG. 1A) and the vertical direction. D1 (shown in Figure 1A) is approximately vertical. The second rack 1115 is coupled to the second jaw group 1113 and extends in the third horizontal direction D23, and the third horizontal direction D23 is substantially parallel but opposite to the second horizontal direction D22. The driving gear 1116 is located between the first rack 1114 and the second rack 1115 and meshes with the first rack 1114 and the second rack 1115. Thus, when the driving gear 1116 rotates, the first rack 1114 can be simultaneously moved (translated) in the second horizontal direction D22 and the second rack 1115 can be moved in the third horizontal direction D23, thereby simultaneously driving the first jaw group 1112. Moving in the second horizontal direction D22 and moving the second jaw group 1113 in the third horizontal direction D23 until the first jaw group 1112 and the second jaw group 1113 are moved to one to clamp the first ear portion 222 and the first The clamping position of the two ears 223.

As shown in FIGS. 1E and 1F, the first jaw group 1112 includes a first jaw 1112a, a second jaw 1112b, a first gear 1112c, a second gear 1112d, a push rod 1112e, a pusher 1112f, a connecting plate 1112g, The stopper 1112h, the first elastic member 1112n (shown in FIG. 1D), the second elastic member 1112m, and the stopper portion 1112p (shown in FIG. 1D). The first jaw 1112a, the second jaw 1112b, the first gear 1112c and the second gear 1112d are pivotally connected to the connecting plate 1112g.

As shown in FIG. 1G, the first rack 1114 is coupled to the pusher 1112f, and when the first rack 1114 is moved in the second horizontal direction D22, the pusher 1112f can be driven to move in the second horizontal direction D22. The first elastic member 1112n connects the front end of the pushing member 1112f with the connecting plate 1112g, so that when the pushing member 1112f moves in the second horizontal direction D22, the first elastic member 1112n can pull the connecting plate 1112g while moving toward the second horizontal direction D22. Further, the first jaw 1112a, the second jaw 1112b, the first gear 1112c, and the second gear 1112d pivotally connected to the connecting plate 1112g are moved together in the second horizontal direction D22 to the second horizontal direction D22 as shown in FIGS. 2A and 2B. Clamping position. Further, the first elastic member 1112n of the 1Gth diagram may be in an initial state (free length state) or in a pre-tensioned state.

As shown in FIGS. 2A and 2B, the stopper 1112h is disposed on the first stage 1111 and located in the moving path of the connecting plate 1112g, and the connecting plate 1112g can be stopped at the clamping position, that is, as shown in FIG. 2B. The advancement of the stopper connecting plate 1112g continues in the second horizontal direction D22.

Please refer to FIG. 3A to FIG. 3E. FIG. 3A is a schematic diagram showing the pushing member 1112f of FIG. 2A continuing to move to the second horizontal direction D22, and FIG. 3B is a view showing the first jaw 1112a and the second clip of the first FIG. The claw 1112b is a schematic view of the clip, and the 3C-3E shows a schematic view of the first jaw 1112a and the second jaw 1112b of FIG. 2B.

As shown in FIG. 3A, the first rack 1114 is coupled to the pushing member 1112f such that even if the connecting plate 1112g is stopped by the stopper 1112h, the first rack 1114 continues to drive the pushing member under the continued driving of the driving gear 1116. The 1112f moves in the second horizontal direction D22 until it is stopped by the stopper 1112p. The stopper portion 1112p is disposed on the first stage 1111 and is located on the moving path of the pushing member 1112f, so that the pushing member 1112f can be stopped.

As shown in FIG. 3B, the push rod 1112e includes a first end 1121e1 and a second end 1121e2. The first end 1121e1 is pivotally connected to the first jaw 1112a. The pusher 1112f has a wedge structure. For example, the pusher 1112f has a bevel 1112s (shown in Figure 1F). When the pushing member 1112f continues to move in the second horizontal direction D22, the inclined surface 1112s pushes the second end 1121e2 of the push rod 1112e upward, thereby driving the first jaw 1112a to rotate until the first jaw 1112a and the second jaw 1112b Pair of clips. When the first jaw 1112a is opposed to the second jaw 1112b, the first ear portion 222 (not shown) is clamped between the first jaw 1112a and the second jaw 1112b.

The second elastic member 1112m connects the second end 1112e2 of the push rod 1112e with the first jaw 1112a. When the second end 1112e2 of the push rod 1112e moves upward, the second elastic member 1112m is compressed and deformed to store the elastic potential energy. When the push rod 1112e is reset (eg, the drive is reversed), the second resilient member 1112m releases the elastic potential energy to assist in resetting the push rod 1112e.

As shown in FIGS. 3B and 3C, the first jaw 1112a and the second jaw 1112b are pivotally connected to the different pivotal points of the connecting plate 1112g (the connecting plate 1112g is shown in FIG. 1E). For example, the first jaw 1112a and the second jaw 1112b respectively include a first pivot 1112j and a second pivot 1112k, wherein the first pivot 1112j and the second pivot 1112k are respectively pivotally connected to the connecting plate 1112g. point. The axis of the first gear 1112c is fixed to the first pivot 1112j such that the first gear 1112c and the first jaw 1112a are concentrically rotatable. The axis of the second gear 1112d is fixed to the second pivot 1112k, so that the second gear 1112d and the second jaw 1112b can be rotated concentrically. In addition, the first gear 1112c is meshed with the second gear 1112d. Thus, when the first gear 1112c rotates, the second gear 1112d can be rotated, and the first jaw 1112a and the second jaw 1112b can be simultaneously rotated to be able to clamp. . As shown in FIG. 3C, when the first jaw 1112a of the first jaw group 1111 is opposed to the second jaw 1112b and the first jaw 1112a of the second jaw group 1113 is opposed to the second jaw 1112b. The first ear portion 222 and the second ear portion 223 of the cover film 22 can be sandwiched, respectively.

As shown in FIG. 3A, the first elastic member 1112n connects the pusher 1112f and the connecting plate 1112g. When the first rack 1114 continues to move the pushing member 1112f to the second horizontal direction D22, since the connecting plate 1112g is stopped by the stopper 1112h, the pushing member 1112f elongates the first elastic member 1112n. The first elastic member 1112n is deformed to store the elastic potential energy. When the ear gripping assembly 111 is reset (when the drive gear 1116 is reversed) to the initial position (as shown in FIG. 1G), the first elastic element 1112n releases the elastic potential energy, helping the pusher 1112f to return to the first position. The initial position shown in the 1G diagram.

In addition, the structure and the operation principle of the second jaw group 1113 are the same as or similar to those of the first jaw group 1112, and details are not described herein again.

As shown in FIGS. 3D and 3E, the ear clamping assembly 111 further includes a first driver 1118, a magnetic fluidizer 1119, a vertical rotating shaft 1120a, and at least one support rod 1120b. The vertical shaft 1120a is coupled to the drive gear 1116. The first driver 1118 can drive the vertical shaft 1120a to rotate to drive the drive gear 1116 to rotate. The first driver 1118 is, for example, a motor. The support rod 1120b connects the first stage 1111 and the pull-down assembly 112, so that the first stage 1111 can be pulled down by the pull-down assembly 112 by the support rod 1120b. The vertical rotating shaft 1120a is bored through the magnetic fluidizer 1119 to maintain the vacuum of the unwinding chamber 11a.

As shown in FIG. 3D, the vertical pull-down mechanism 110 further includes at least one bellows 110A. A plurality of bellows 110A are sleeved on the vertical rotating shaft 1120a and the support rod 1120b. The bellows 110A connects the sealing cover 13 and the first support 1121 of the pull-down assembly 112. The bellows 110A is stretchable to allow a relative amount of movement of the sealing cover 13 and the first support 1121.

Referring to FIG. 4, a schematic diagram of the lower pull assembly 112 moving in the vertical direction D1 of FIG. 3E is illustrated. When the first ear portion 222 and the second ear portion 223 are respectively clamped by the first jaw group 1112 and the second jaw group 1113, the pull-down assembly 112 can be moved in the vertical direction D1 to drive the ear clamping assembly 111 along The vertical direction D1 is moved to tear a portion of the cover film 22 from the continuous web 20 as shown in FIG.

As shown in FIGS. 4 and 3D, the pull-down assembly 112 includes a first support member 1121, a first lead nut 1122, a first vertical lead screw 1123, and a second driver 1124. The first support member 1121 is coupled to the first stage 1111 of the ear grip assembly 111 through the support rod 1120b. The first lead nut 1122 is fixed to the first support member 1121. The first vertical lead screw 1123 is pivotally connected at both ends in the vertical direction D1, and is screwed to the first lead nut 1122 to rotate under the driving of the second driver 1124 and drive the first stage 1111 up and down in the vertical direction D1. mobile. The second driver 1124 is, for example, a motor.

In detail, the second driver 1124 can drive the first vertical lead screw 1123 to rotate through a gear set 1125 (shown in FIG. 3E). The gear set 1125 is, for example, a helical gear set. When the first vertical lead screw 1123 is rotated in place, since the first lead nut 1122 is fixed on the first support member 1121, and the rotation of the first support member 1121 is restrained, the first support member 1121 is replaced by the first lead nut The 1122 drive moves up and down in the vertical direction D1. Since the first stage 1111 is connected to the ear clamping assembly 111 and the first supporting member 1121, when the first supporting member 1121 moves downward in the vertical direction D1, the ear clamping assembly 111 is followed by the vertical direction D1. Move below to peel off part of the cover film 22 downward in the vertical direction D1, as shown in Fig. 4.

Please refer to FIGS. 5A-5D and 6A-6B. FIG. 5A to FIG. 5D are schematic diagrams of the horizontal back pull mechanism 120 of FIG. 1A, and FIGS. 6A-6B illustrate the first clamp rod 1212a and the fifth figure of FIG. The second clamping bar 1212b holds a schematic view of the film body 221 covering the diaphragm 22.

The horizontal back pull mechanism 120 includes a diaphragm clamping assembly 121 for holding the film body 221 covering the diaphragm 22, and a rear pull assembly 125 for the first horizontal direction D21. The film body 221 is pulled to completely tear the cover film 22 from the continuous web 20.

As shown in FIGS. 5A-5C, the diaphragm clamping assembly 121 includes a first clamping seat 1211aa, a second clamping seat 1211b, a first clamping bar 1212a, a second clamping bar 1212b, a transmission set 1213, a first horizontal rotating shaft 1214, Second lead nut 1215a, third lead nut 1215b, fourth lead nut 1215c, fifth lead nut 1215d, first horizontal lead screw 1216a, second horizontal lead screw 1216b, third drive 1217, carrier 1218 and slide 1219 .

As shown in FIG. 5A, the first clamping bar 1212a and the second clamping bar 1212b are respectively disposed on the first clamping seat 1211a and the second clamping seat 1211b to move along with the first clamping seat 1211a and the second clamping seat 1211b. The first clamping bar 1212a and the second clamping bar 1212b are disposed opposite each other, so that the opposite sides of the film body 221 covering the diaphragm 22 can be respectively clamped. The transmission set 1213 is disposed on the carrier 1218. The carrier 1218 is fixed to the slider 1219 to move back and forth along the slider 1219 in the first horizontal direction D21. The two ends of the first horizontal rotating shaft 1214 are respectively connected to the third driver 1217 and the transmission group 1213 in the first horizontal direction D21, so that the first horizontal rotating shaft 1214 can drive the transmission group 1213 to operate under the driving of the third driving 1217. The third driver 1217 is, for example, a motor. When the transmission group 1213 is in operation, the first clamping seat 1211a and the second clamping seat 1211b can be brought close to each other.

The first clamping seat 1211a and the second clamping seat 1211b are connectable through the first horizontal lead screw 1216a and the second horizontal lead screw 1216b. As shown in FIG. 5A, the second lead nut 1215a and the fourth lead nut 1215c are disposed on the first holder 1211a, and the first horizontal lead screw 1216a is screwed to the second lead nut 1215a and the fourth lead nut 1215c to connect the first lead screw 1216a. A holder 1211a and a second holder 1211b. As shown in FIG. 5B, the third lead nut 1215b and the fifth lead nut 1215d are disposed on the second clamping seat 1211b, and the second horizontal lead screw 1216b is screwed to the third guiding nut 1215b and the fifth guiding nut 1215d to connect A holder 1211a and a second holder 1211b.

When the first horizontal rotating shaft 1214 rotates, the drive transmission group 1213 drives the first horizontal lead screw 1216a and the second horizontal lead screw 1216b to rotate at the same time, due to the guide nut (the second guide nut 1215a, the third guide nut 1215b, the third guide) The nut 1215b and the fourth guide nut 1215c) do not move, thereby driving the first holder 1211a and the second holder 1211b to move (translate) in a direction close to each other until the first clamping rod 1212a and the second holder disposed thereon The rod 1212b holds the film body 221 as shown in Figs. 6A and 6B.

As shown in FIG. 6B, the diaphragm clamping assembly 121 further includes two buffer members 1220. The two buffer members 1220 are respectively disposed on the first horizontal lead screw 1216a and the second horizontal lead screw 1216b, and are located between the first clamping seat 1211a and the second clamping seat 1211b. As such, when the first holder 1211a and the second holder 1211b are close to each other until the first clamping bar 1212a is opposed to the second clamping bar 1212b, the first clamping seat 1211a and the second clamping seat 1211b press the buffer member 1220. The cushioning member 1220 can buffer the clamping force of the first clamping bar 1212a and the second clamping bar 1212b to prevent the first clamping bar 1212a and the second clamping bar 1212b from being excessively pressed on the cover film 22.

As shown in FIG. 5A, the horizontal back tensioning mechanism 120 further includes at least one guiding rod 120A. The first clamping seat 1211a and the sliding seat 1218 are slidably disposed on the guiding rod 120A, so that the first clamping seat 1211a and the second clamping seat 1211b connected to the sliding seat 1218 slide relative to the guiding rod 120A with low resistance.

Further, as shown in FIGS. 5A and 5B, the transmission group 1213 is, for example, a gear chain transmission assembly that is disposed on the carrier 1218. The transmission set 1213 includes a plurality of sprockets and chains that are configured to simultaneously drive the rotation of the first horizontal lead screw 1216a and the second horizontal lead screw 1216b. The carrier 1218 is secured to the carriage 1219 for movement with the carriage 1219. The carrier 1218 and the first holder 1211a are not fixed, so that they can move relative to each other. Thus, when the first holder 1211a moves toward the second holder 1211b, the first holder 1211a is not affected by the slide. The restraint of 1219 can smoothly access the second holder 1211b, so that the first clamping bar 1212a and the second clamping bar 1212b can be smoothly clamped.

After the first clamping rod 1212a and the second clamping rod 1212b hold the film body 221, the back pulling assembly 125 of the horizontal back pulling mechanism 120 can pull the film body 221 backward in the first horizontal direction D21 to cover the film 22 The tear is completely removed from the continuous web 20.

Referring to FIGS. 5A and 7 , FIG. 7 is a schematic view showing the cover film 22 of FIG. 6B being pulled back by the pull-back assembly 125 in the first horizontal direction D21. The rear pull assembly 125 includes a second support member 1251, a sixth guide nut 1252, a third horizontal lead screw 1253, and a fourth driver 1254.

The third driver 1217 of the diaphragm clamping assembly 121 is fixed to the second support 1251. The first horizontal shaft 1214 of the clamping assembly 121 is coupled to the third driver 1217 through the second support 1251. As such, when the second support member 1251 moves in the first horizontal direction D21, the third driver 1217 and the first horizontal rotation shaft 1214 can move along the second support member 1251 in the first horizontal direction D21.

As shown in FIG. 5A, the sixth lead nut 1252 is disposed on the second support member 1251. The third horizontal lead screw 1253 is screwed to the sixth lead nut 1252 to drive the diaphragm clamping assembly 121 to move back and forth in the first horizontal direction D21. In detail, the fourth driver 1254 can drive the third horizontal lead screw 1253 to rotate. The fourth driver 1254 is, for example, a motor. Since the sixth guide nut 1252 is fixed to the second support member 1251 and does not move, the second support member 1251 is driven to move back and forth in the first horizontal direction D21. Since the diaphragm clamping assembly 121 and the second supporting member 1251 have no relative motion relationship with each other, when the second supporting member 1251 moves backward in the first horizontal direction D21, the diaphragm clamping assembly 121 can be driven to the first level. The direction D21 is moved rearward to completely tear the cover film 22 from the continuous web 20 as shown in Fig. 7.

In summary, the tear film device 100 of the embodiment of the present invention can provide a vacuum environment, and the tear film action can be completed in a vacuum environment, and the damage to the semiconductor structure 21 formed on the continuous web 20 can be reduced to a minimum. In addition, the tear film device 100 can partially peel the cover film 22 from the continuous web 20 in two perpendicular directions, so that the tear film device 100 can be applied to a vacuum chamber having a limited space or a non-narrow shape. .

After the cover film 22 is completely removed from the continuous web 20, the first driver 1118, the second driver 1124, the third driver 1217, and the fourth driver 1254 can be reversed to return to the initial position (eg, 1A~) The position shown in the 1G diagram). Then, the next cover film 22 adhered to the continuous web 20 is transferred over the vertical pull-down mechanism 110 of the tear-off device 100, and the above steps are repeated to tear off the next cover film 22.

As shown in FIG. 5A, the horizontal back tensioning mechanism 120 further includes at least one guiding rod 120B. The second support member 1251 is slidably disposed on the guide bar 120B, so that the second support member 1251 slides relative to the guide bar 120B with low resistance.

In conclusion, the present invention has been disclosed in the above embodiments, but it is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

10‧‧‧Roll-to-roll continuous process equipment

11‧‧‧Reeling box

11a‧‧‧Rewinding cavity

12‧‧‧Roller

13‧‧‧ Sealing cover

20‧‧‧Continuous coil

21‧‧‧Semiconductor structure

22‧‧‧ Covering diaphragm

221‧‧‧membrane body

222‧‧‧ first ear

223‧‧‧second ear

100‧‧‧Tear film device

13‧‧‧ Sealing cover

110‧‧‧Vertical pull-down mechanism

110A‧‧‧ Bellows

111‧‧‧ Ear clamping assembly

1111‧‧‧First stage

1112‧‧‧First jaw group

1112a‧‧‧First jaw

1112b‧‧‧second jaw

1112c‧‧‧First gear

1112d‧‧‧second gear

1112e‧‧‧Put

1112e1‧‧‧ first end

1112e2‧‧‧ second end

1112f‧‧‧Pushing parts

1112g‧‧‧Connecting plate

1112h‧‧ ‧block

1112j‧‧‧First pivot

1112k‧‧‧second pivot

1112s‧‧‧ Bevel

1113‧‧‧Second jaw set

1114‧‧‧First rack

1115‧‧‧second rack

1116‧‧‧ drive gear

1112n‧‧‧First elastic element

1112m‧‧‧Second elastic element

1112p‧‧‧stop

1118‧‧‧First drive

1119‧‧‧Magnetic fluidizer

1120a‧‧‧Vertical shaft

1120b‧‧‧Support rod

112‧‧‧ Pulldown components

1121‧‧‧First support

1122‧‧‧First lead nut

1123‧‧‧First vertical lead screw

1124‧‧‧second drive

1125‧‧‧ Gear Set

120‧‧‧Horizontal pullback mechanism

120A, 120B‧‧‧ guide rod

121‧‧‧diaphragm clamping assembly

1211a‧‧‧First holder

1211b‧‧‧Second holder

1212a‧‧‧First clamp

1212b‧‧‧Second clamp

1213‧‧‧Drive Group

1214‧‧‧First horizontal shaft

1215a‧‧‧Second guide nut

1215b‧‧‧ third guide nut

1215c‧‧‧ fourth guide nut

1215d‧‧‧ fifth guide nut

1216a‧‧‧First horizontal lead screw

1216b‧‧‧Second horizontal lead screw

1217‧‧‧ third drive

1218‧‧‧ Carrier

1219‧‧‧Slide

1220‧‧‧ cushioning parts

125‧‧‧Back pull assembly

1251‧‧‧second support

1252‧‧‧ sixth guide nut

1253‧‧‧ third horizontal lead screw

1254‧‧‧fourth drive

D1‧‧‧Vertical direction

D21‧‧‧First horizontal direction

D22‧‧‧second horizontal direction

D23‧‧‧ third horizontal direction

V1‧‧ Perspective

FIG. 1A is a schematic diagram of a roll-to-roll continuous process apparatus according to an embodiment of the invention. FIG. 1B is a schematic view of the tear film device of FIG. 1 (the continuous web is not shown). FIG. 1C is a schematic view showing the continuous web and the cover film adhered thereto from the viewing angle V1 of FIG. 1A. FIG. 1D is a schematic diagram showing the vertical pull-down mechanism 110 of FIG. 1A. 1E and 1F are enlarged views of the first jaw set of Fig. 1D. Fig. 1G is a plan view showing the vertical pull-down mechanism of Fig. 1D. FIG. 2A is a schematic view showing that the connecting plate of the 1Gth image is blocked by the stopper. FIG. 2B is a schematic view showing the movement of the first jaw group and the second jaw group of FIG. 2A to the clamping position. FIG. 3A is a schematic view showing that the pushing member of FIG. 2A continues to move in the second horizontal direction. FIG. 3B is a schematic view showing the first jaw and the second jaw of FIG. 1F. 3C~3E are schematic views showing the first jaw and the second jaw of FIG. 2B. Figure 4 is a schematic view showing the third embodiment of the pull-down assembly moving in the vertical direction. 5A-5D are schematic views showing the horizontal back pull mechanism of FIG. 1A. 6A-6B are schematic views showing the first clamping bar and the second clamping bar of the 5D drawing holding the film body of the cover film. FIG. 7 is a schematic view showing the cover film of FIG. 6B being pulled back by the back pull assembly in the first horizontal direction.

Claims (20)

A tear film device, comprising: a vertical pull-down mechanism, comprising: an ear clamping component for clamping the ear; and a pull-down assembly for pulling the cover film down in a vertical direction; and a level a pull-back mechanism comprising: a diaphragm clamping assembly for clamping the film body; and a back pull assembly for pulling the diaphragm in a first horizontal direction to apply the cover film from the continuous The coil is peeled off. The tear film device of claim 1, wherein the tear film device is adapted to tear a cover film on a continuous web in a vacuum environment, the cover film comprising a film body and an ear portion connected. The tear film device of claim 1, wherein the ear portion of the cover film protrudes outward with respect to an edge of the continuous web. The tear film device of claim 1, wherein the ear clamping assembly comprises: a first jaw set; a first rack coupled to the first jaw set and along a second horizontal direction Extending, the second horizontal direction is perpendicular to the first horizontal direction; a second jaw set; and a second rack connected to the second jaw set and extending along a third horizontal direction, the third horizontal direction Parallel to the second horizontal direction but opposite to each other; a driving gear respectively meshes with the first rack and the second rack to drive the first rack to move along the second horizontal direction, thereby driving the first A jaw group moves in the second horizontal direction and drives the second rack to move in the third horizontal direction, thereby driving the second jaw group to move in the third horizontal direction. The tear film device of claim 4, wherein the cover film comprises two ears, the two ears respectively protruding outward relative to opposite edges of the continuous web, the first jaw group and The second jaw set is for clamping the two ears respectively. The tear film device of claim 4, wherein the driving gear is located between the first rack and the second rack to simultaneously drive the first jaw group to move along the second horizontal direction The second jaw group moves in the third horizontal direction. The tear film device of claim 4, wherein the first jaw set comprises: a first jaw; a second jaw; a pusher comprising a first end and a second end, The first end is pivotally connected to the first jaw; and a pushing member has a sloped surface for pushing the second end of the push rod, so that the first end of the push rod pushes the first clip The pawl rotates and is thus clamped to the second jaw. The tear film device of claim 4, wherein the first jaw group further comprises: a connecting plate, the first clamping jaw and the second clamping jaw are pivotally connected to the connecting plate; Located on the moving path of the connecting plate to stop the connecting plate. The tear film device of claim 8, wherein the first jaw and the second jaw are pivotally connected to different pivotal joints of the connecting plate. The tear film device of claim 8, wherein the first jaw group further comprises: a first elastic member connecting the connecting plate and the pushing member; and a second elastic member connecting the first clip a second end of the claw and the push rod; a first gear fixed to the first jaw; and a second gear fixed to the second jaw and engaged with the first gear. The tear film device of claim 4, wherein the ear clamping assembly comprises a first stage, the first carrier carrying the first jaw set, the drive gear and the first rack . The tear film device of claim 1, wherein the pull-down assembly comprises: a first support member connected to the first stage; a first lead nut disposed on the first support member; and a first A vertical lead screw is fixed at both ends along the vertical direction and screwed to the first lead nut to drive the first stage and the first support to move in the vertical direction. The tear film device of claim 1, wherein the pull-down assembly includes a driver that drives the first vertical lead screw via a gear set. The tear film device of claim 1, wherein the film clamping assembly comprises: a first clamping seat; a first clamping bar; disposed on the first clamping seat; a sliding seat; a seat fixed to the sliding seat and configured to be movable relative to the first clamping seat; a transmission set disposed on the carrier; a second clamping seat; a second clamping bar; configured in the second a clamping seat disposed opposite the first clamping bar; and a first horizontal rotating shaft coupled to the transmission group along the first horizontal direction. The tear film device of claim 14, wherein the diaphragm clamping assembly comprises a second guiding nut, a third guiding nut, a fourth guiding nut and a fifth guiding nut, the second guiding nut And the third lead nut is disposed on the first clamping seat, the third guiding nut and the fourth guiding nut are disposed on the second clamping seat; the diaphragm clamping assembly comprises: a first horizontal lead screw, screwing The second lead nut and the fourth lead nut; and a second horizontal lead screw are screwed to the third lead nut and the fifth lead nut; wherein the drive set is used to drive the first horizontal lead screw Rotating and rotating the second horizontal lead screw to drive the first clamping seat and the second clamping seat to approach each other. The tear film device of claim 15, wherein the transmission set is a gear chain drive assembly. The tear film device of claim 14, further comprising a driver for driving the first horizontal shaft to drive the transmission group to operate. The tear film device of claim 1, wherein the back pull assembly comprises: a second support member coupled to the diaphragm clamp assembly; a sixth guide nut disposed on the second support member; And a third horizontal lead screw is screwed to the sixth lead nut to drive the diaphragm clamping assembly to move in the first horizontal direction. The tear film device of claim 18, wherein the back pull assembly further comprises a driver for driving the third horizontal lead screw to rotate. The tear film device of claim 1, wherein the horizontal back pull mechanism further comprises at least one guiding rod.