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TW201500711A - Microchannel heat sink having porous heat-sink elements and its heat-sink approach - Google Patents

Microchannel heat sink having porous heat-sink elements and its heat-sink approach Download PDF

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TW201500711A
TW201500711A TW102121440A TW102121440A TW201500711A TW 201500711 A TW201500711 A TW 201500711A TW 102121440 A TW102121440 A TW 102121440A TW 102121440 A TW102121440 A TW 102121440A TW 201500711 A TW201500711 A TW 201500711A
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heat sink
microchannel
porous
heat
sink
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TW102121440A
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Chinese (zh)
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Tu-Chieh Hung
Wei-Mon Yan
Yu-Xian Huang
Shin-Chi Chan
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Nat Univ Tainan
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Abstract

The present invention relates to a microchannel heat sink having porous heat- sink elements and its heat-sink approach. The microchannel heat sink comprises a base body within which a plurality of microchannels with an axial length located, wherein the microchannels run through the base body. Each of the microchannels includes an entrance end, an exit end, and a channel-shaped space which connects the entrance end and the exit end and has a first side and a second side located thereon. The microchannel heat sink further comprises a plurality of porous heat-sink element being located on the first and second sides of each channel-shaped space and forming a flow channel between two of the porous heat-sink elements. The porous heat-sink elements enhance the local convection of the fluid passing through the channel-shaped space, while the flow channel formed between two of the porous heat-sink elements reduces the pressure drop that needs more output power, so as to improve the heat dissipation efficiency and effect.

Description

具多孔性散熱體之微通道散熱座及其散熱方法Microchannel heat sink with porous heat sink and heat dissipation method thereof

本發明係有關於一種具多孔性散熱體之微通道散熱座及其散熱方法,特別是指藉由多孔性材料使通過之液體局部對流增加,並且於微通道內設計多孔性材料分佈而形成部分流道,藉此降低壓降,避免需要更大的輸出功率,來提升散熱效能之微流道散熱座及其散熱方法。The invention relates to a microchannel heat sink with a porous heat sink and a heat dissipating method thereof, in particular to a partial convection of a liquid passing through a porous material, and a porous material distribution in the microchannel to form a part The flow path, thereby reducing the voltage drop, avoids the need for a larger output power, to improve the heat dissipation performance of the micro flow path heat sink and its heat dissipation method.

隨著科技發展快速,資訊、電子、自動化及網路技術的日趨發展,高整合的微系統將成為現代與未來科技成敗的關鍵,這些技術均應用微電子晶片作為運算的基礎。然而,目前微晶片之製程尺度由0.35μm逐漸降至65nm。在未來,勢必朝向更微小化,隨著電子元件越微小化,其中的晶體密度也將會大幅增加,而往往這些微小化之電子元件隨著所負責運算及儲存的資料越龐大,內部發熱量也隨之增加。同時,隨著電子元件的尺寸越小,組裝密度也逐漸增加,容易導致晶片內部形成更高的熱流密度(預計所產生之熱流密度可能高達1000W/cm2 )。因此,如果晶片運行所產生的熱無法適時移除,必然使內部溫度急遽上升,此現象將影響晶片運作的穩定性和可靠性。過去的研究指出當晶片溫度在70~80℃左右時,溫度每增加1℃,運作的可靠度會下降5%,因此解決微電子設備的散熱問題非常迫切且重要。With the rapid development of technology and the development of information, electronics, automation and network technologies, highly integrated micro-systems will become the key to the success of modern and future technologies, all of which use microelectronics as the basis for computing. However, the current process scale of microchips has gradually decreased from 0.35 μm to 65 nm. In the future, it will inevitably become more miniaturized. As the electronic components become smaller, the density of crystals will increase greatly. Often, the miniaturized electronic components will have more heat as the data they are responsible for computing and storing. It also increases. At the same time, as the size of the electronic component is smaller, the assembly density is also gradually increased, which tends to cause a higher heat flux density inside the wafer (it is expected that the generated heat flux density may be as high as 1000 W/cm 2 ). Therefore, if the heat generated by the operation of the wafer cannot be removed in time, the internal temperature is inevitably increased, which will affect the stability and reliability of the wafer operation. Past research indicates that when the wafer temperature is around 70~80 °C, the reliability of operation will decrease by 5% for every 1 °C increase in temperature. Therefore, it is very urgent and important to solve the heat dissipation problem of microelectronic devices.

現今採用了多種散熱技術來對晶片進行熱管理或散熱,例如風扇、空調、冷版、散熱片、熱接觸面材料等。其中,一般傳統的風扇、空調、冷版僅能滿足熱流密度較小時的散熱需求,隨著高密度組裝的電子零件,前述的散熱方法已經無法負荷更高的熱負荷,有鑑於此,遂有業者研發一種如中華民國專利公告號M430821 之「微通道散熱座」,前述之創作係為一種微通道散熱座,該微通道散熱座內部形成至少一流道,該流道具有一入液口及一出液口,該流道之截面積係自該入液口朝向該出液口漸縮。Various heat dissipation technologies are used today to thermally manage or dissipate wafers, such as fans, air conditioners, cold plates, heat sinks, and thermal contact surfaces. Among them, the conventional fan, air conditioner, and cold plate can only meet the heat dissipation requirement when the heat flux density is small. With the high-density assembled electronic components, the aforementioned heat dissipation method cannot load a higher heat load, and in view of this, Some companies have developed a "microchannel heat sink" such as the Republic of China Patent Bulletin No. M430821. The above-mentioned creation is a microchannel heat sink. The microchannel heat sink has at least a first-class channel inside, and the flow prop has a liquid inlet and a The liquid outlet, the cross-sectional area of the flow channel is tapered from the liquid inlet port toward the liquid outlet.

前案在使用上仍有不足處,其原因在於,前案僅是一漸縮之簡單型槽道,因而形成較大的壓降,當單位熱源溫度過高時,由於漸縮的槽道無法有效增加局部的對流。在固定的輸入泵功下,容易導致散熱效果不佳的問題。There is still a deficiency in the use of the previous case. The reason is that the former case is only a simple type of channel that is tapered, thus forming a large pressure drop. When the temperature of the unit heat source is too high, the tapered channel cannot be formed. Effectively increase local convection. Under the fixed input pump power, it is easy to cause the problem of poor heat dissipation.

有鑑於目前的微通道散熱座於使用上具有前述之缺失,遂有業者研發出一種如中華民國新型專利公告第M442534號「微流道散熱裝置及其散熱座」,前述之創作係為一種微流道散熱裝置,係包含:一散熱座,具有一座體及數輔助散熱體,該座體內部間隔設有數微流道,該數微流道各具有一入口、一出口及一流通空間,該入口及出口皆與該流通空間相連通,該數輔助散熱體設於該數微流道的各該流通空間內,且該數輔助散熱體各形成有複數孔洞;及一流體控制器,以一管路連接該座體,並與該數微流道的各該流通空間相互連通,前述創作能夠降低工作流體通過時所產生的局部邊界層厚度,以增加流體流動的混合性及對流與傳導作用,進而快速帶走熱能並有效提升局部散熱效果。In view of the above-mentioned shortcomings in the use of microchannel heat sinks, a manufacturer has developed a new type of patent publication No. M442534, "Microfluidic heat sink and heat sink", the aforementioned creation is a micro The flow channel heat dissipating device comprises: a heat dissipating block having a body and a plurality of auxiliary heat dissipating bodies, wherein the block body is internally provided with a plurality of micro flow channels, each of the plurality of micro flow channels having an inlet, an outlet and a circulation space. The inlet and the outlet are both connected to the circulation space, the number of auxiliary heat sinks are disposed in each of the flow spaces of the plurality of microchannels, and the plurality of auxiliary heat sinks are each formed with a plurality of holes; and a fluid controller is The pipeline is connected to the seat body and communicates with each of the flow spaces of the plurality of microchannels. The foregoing creation can reduce the thickness of the local boundary layer generated when the working fluid passes, so as to increase the fluidity mixing and convection and conduction. In turn, the heat energy is quickly taken away and the local heat dissipation effect is effectively improved.

此前案在使用上仍有不足處,其原因在於:There are still deficiencies in the use of the previous case, the reasons are:

1、所述之前案雖提供輔助散熱體係為多孔性材料,且填充設置於每個流通空間內,當流體經過時流通空間內之壓降增加,導致流動性下降。1. In the previous case, although the auxiliary heat dissipation system is provided as a porous material, and the filling is disposed in each of the circulation spaces, the pressure drop in the circulation space increases as the fluid passes, resulting in a decrease in fluidity.

2、所述之前案若想降低壓降,需增加流通空間之面積,使微流道散熱座體積增大,而導致設置空間需重新設計。2. If the previous case is to reduce the pressure drop, it is necessary to increase the area of the circulation space, so that the volume of the micro-channel heat sink is increased, and the installation space needs to be redesigned.

3、所述之前案雖提供輔助散熱體設置於微流道中,來增加流體流動的混合性及對流,但液體需流入多孔性材料需要更大的輸出工率來驅動,導致成本上升。3. Although the prior case provides an auxiliary heat sink disposed in the micro flow channel to increase the fluidity mixing and convection, the liquid needs to flow into the porous material to require a larger output rate to drive, resulting in an increase in cost.

爰此,為進一步有效解決傳統的微通道散熱座無法有效增加局部的對流,容易導致散熱效果不佳,以及在微通道散熱座內設置多孔性材料雖然可以增加流體流動的混合性及對流,但液體需流入多孔性材料所造成的壓降,需要更大的輸出功率來驅動,導致成本上升,本發明人致力於研究,提出一種具多孔性散熱體之微通道散熱座,包括有:一座體,內部設置有複數個貫穿之微通道具有一軸向長度,該微通道分別包含有一入口端、一出口端及一通道空間,該入口端連通該通道空間至該出口端,且該通道空間設置有一第一邊及一第二邊;複數個多孔性散熱體,設置於各通道空間之第一邊及第二邊,且於兩多孔性散熱體間形成一流道。Therefore, in order to further effectively solve the traditional microchannel heat sink can not effectively increase the local convection, it is easy to cause poor heat dissipation, and the provision of porous material in the microchannel heat sink can increase the fluid flow mixing and convection, but The pressure drop caused by the liquid flowing into the porous material requires a larger output power to drive, resulting in an increase in cost. The present inventors have made efforts to study and propose a microchannel heat sink having a porous heat sink, including: a body The internal micro-channels have an axial length, and the micro-channels respectively include an inlet end, an outlet end, and a channel space. The inlet end communicates the channel space to the outlet end, and the channel space is set. There is a first side and a second side; a plurality of porous heat sinks are disposed on the first side and the second side of each channel space, and form a first-class track between the two porous heat sinks.

進一步,該複數個微通道係等距離間隔設置於該座體內部。Further, the plurality of microchannels are equidistantly spaced inside the housing.

進一步,該第一邊及該第二邊係為該微通道之內壁,兩多孔性散熱體分別設置於該第一邊及該第二邊,並與該微通道之軸向長度相符合,於兩多孔性散熱體間形成有前述之流道。Further, the first side and the second side are the inner walls of the microchannel, and the two porous heat sinks are respectively disposed on the first side and the second side, and are consistent with the axial length of the microchannel. The aforementioned flow path is formed between the two porous heat sinks.

進一步,該多孔性散熱體係為銅、鋁或鐵燒結成一微小長板塊狀體。Further, the porous heat dissipation system is sintered into copper, aluminum or iron into a minute long plate block.

進一步,該多孔性散熱體之通孔性為0.66,滲透性為2.47e-10 m2Further, the porous heat sink had a hole permeability of 0.66 and a permeability of 2.47e-10 m 2 .

本發明之另一目的係為一種具多孔性散熱體之微通道散熱方法,其包括有:於一熱源體設置有一如請求項1所述之具多孔性散熱體之微通道散熱座;輸送一液體循環於該微通道散熱座之每個通道空間;在該通道空間中使該液體同時通過兩多孔性散熱體及兩多孔性散熱體間形成貫穿之一流道,並將熱源帶離該微通道散熱座;Another object of the present invention is a microchannel heat dissipation method with a porous heat dissipating body, comprising: a microchannel heat sink having a porous heat sink as claimed in claim 1 disposed on a heat source body; The liquid circulates in each of the channel spaces of the microchannel heat sink; in the channel space, the liquid is simultaneously passed through the two porous heat sinks and the two porous heat sinks to form a flow passage therethrough, and the heat source is taken away from the microchannel Heat sink

進一步,係以一流量控制器輸送前述液體循環於該微通道散熱座之每個通道空間;Further, a flow controller is used to transport the liquid to circulate in each channel space of the microchannel heat sink;

進一步,該液體係為水。Further, the liquid system is water.

本發明的功效在於:The effect of the invention is:

1、 本發明藉由流經該通道空間之液體,以對流循環的方式將熱帶走,液體可為水,其黏性低、熱導係數高、成本低,容易取得。1. The present invention moves the tropic by a liquid flowing through the space of the channel, and the liquid can be water. The viscosity is low, the thermal conductivity is high, and the cost is low, which is easy to obtain.

2、本發明之微通道構造簡單,製造技術不複雜。2. The microchannel of the present invention has a simple structure and a manufacturing technique that is not complicated.

3、本發明之多孔性散熱體導熱效果好,熱源能快速傳導至液體,再將熱源帶離微通道散熱座。3. The porous heat sink of the present invention has good heat conduction effect, and the heat source can be quickly conducted to the liquid, and then the heat source is taken away from the microchannel heat sink.

4、本發明之通道空間內兩側分別設置有多孔性散熱體,又於兩多孔性散熱體間形成有流道,使液體分別通過多孔性散熱體及流道,流道部分可避免液體僅通過多孔性散熱體造成壓降增加,導致流動性下降。4. The porous heat dissipating body is respectively disposed on both sides of the channel space of the present invention, and a flow channel is formed between the two porous heat dissipating bodies, so that the liquid passes through the porous heat dissipating body and the flow channel respectively, and the flow channel portion can avoid the liquid only The pressure drop is increased by the porous heat sink, resulting in a decrease in fluidity.

5、本發明之流量控制器,可任意控制工作液體輸出量,提供使用者可根據微通道散熱座內之壓降來進行調整,避免過多的成本浪費。5. The flow controller of the present invention can arbitrarily control the output of the working fluid, and provides the user with the pressure drop in the microchannel heat sink to avoid excessive cost waste.

綜合上述技術特徵,本發明具多孔性散熱體之微通道散熱座及其散熱方法的主要功效,將可於下述實施例清楚呈現。In combination with the above technical features, the main effects of the microchannel heat sink of the present invention having a porous heat sink and the heat dissipation method thereof will be clearly shown in the following embodiments.

目前一般傳統之微通道散熱座如第六圖所述之構造,一般習知微通道散熱座係提供一種可搭配流體循環系統之散熱座(5),該散熱座(5)放置於一熱源體(54)上,該散熱座(5)內部間隔設有數通道空間(53),該通道空間(53)各具有一入口端(51)、一出口端(52),並各以一管路連通該流體循環系統,藉由該通道空間(53)使工作液體流通於此,並帶離該散熱座(5)所吸收之熱源,藉此達到散熱之目的,但此構造僅為簡單之槽道,當工作液體於僅與該通道空間(53)的內壁相互接觸,導致工作液體僅帶走部分之熱源。At present, the conventional microchannel heat sink is constructed as described in the sixth figure. Generally, the microchannel heat sink provides a heat sink (5) that can be matched with a fluid circulation system, and the heat sink (5) is placed in a heat source body. (54) The heat dissipation seat (5) is internally spaced apart by a plurality of passage spaces (53) each having an inlet end (51) and an outlet end (52), each connected by a pipeline. The fluid circulation system circulates the working liquid through the passage space (53) and carries the heat source absorbed by the heat sink (5), thereby achieving the purpose of heat dissipation, but the structure is only a simple channel When the working liquid is in contact with only the inner wall of the passage space (53), the working liquid only takes away part of the heat source.

因此,本發明為解決上述之問題,係提供一種具多孔性散熱體之微通道散熱座及其散熱方法,本發明之第一實施例請參閱第一圖所示,包括有:Therefore, in order to solve the above problems, the present invention provides a microchannel heat sink with a porous heat sink and a heat dissipation method thereof. For the first embodiment of the present invention, please refer to the first figure, including:

一座體(1)及複數個多孔性散熱體(2),該座體(1)內部等距離間隔設置有複數個貫穿之微通道(11),每個微通道(11)延伸有一軸向長度,該微通道(11)設置有一入口端(111)、一出口端(112)及一通道空間(113),該入口端(111)流通該通道空間(113)至出口端(112),該通道空間(113)可供一工作液體(12)流通於此,該工作液體(12)係為水。a body (1) and a plurality of porous heat sinks (2), the base body (1) is internally equidistantly spaced apart by a plurality of microchannels (11) extending through, each microchannel (11) extending an axial length The microchannel (11) is provided with an inlet end (111), an outlet end (112) and a passage space (113), and the inlet end (111) circulates the passage space (113) to the outlet end (112), The passage space (113) is available for a working liquid (12) to be circulated therein, and the working liquid (12) is water.

請在參閱第二圖所示,於該通道空間(113)內壁左右側分別設置有一第一邊(113A)及一第二邊(113B),且取前述兩個多孔性散熱體(2)分別放置於該第一邊(113A)及該第二邊(113B), 並與該微通道(11)之軸向長度相符合,且於兩個多孔性散熱體(2)中間預留有一貫穿之流道(21),該多孔性散熱體(2)具有複數個不規則的孔洞(22)排列,以便工作液體(12)通過時能流竄於其中而降低局部邊界層厚度、增加流體的混合性,進而增加局部的工作流體流速,且該多孔性散熱體(2)係為銅、鋁、矽或鐵等具較佳導熱性之材質。本實施例中該多孔性散熱體(2)的各該複數孔洞(22)較佳通孔性(porosity),即該複數孔洞(22)的加總體積佔該多孔性散熱體(2)總體積的比值,其範圍係為0.55~0.85,滲透性係為8.15e-11~ 2.71e-9米平方,尤其係使該多孔性散熱體(2)的各該複數孔洞(22)之通孔性為0.85,滲透性為2. 71×10 -9 米平方,更能夠快速供該工作液體(12)通過而將熱能帶走,達到較佳散熱之效果。As shown in the second figure, a first side (113A) and a second side (113B) are respectively disposed on the left and right sides of the inner wall of the channel space (113), and the two porous heat sinks (2) are taken. Placed on the first side (113A) and the second side (113B) respectively, and conform to the axial length of the microchannel (11), and a through hole is reserved between the two porous heat sinks (2) The flow channel (21), the porous heat sink (2) has a plurality of irregular holes (22) arranged to flow in the working liquid (12) to reduce the thickness of the local boundary layer and increase the mixing of the fluid. And further increase the local working fluid flow rate, and the porous heat sink (2) is a material having better thermal conductivity such as copper, aluminum, tantalum or iron. In this embodiment, each of the plurality of holes (22) of the porous heat sink (2) preferably has a porosity, that is, a total volume of the plurality of holes (22) occupies the total of the porous heat sink (2). The volume ratio is in the range of 0.55 to 0.85, and the permeability is 8.15e-11 to 2.71e-9 meters square, especially for the through holes of the plurality of holes (22) of the porous heat sink (2). The property is 0.85, and the permeability is 2.71×10 -9 m square. It can quickly pass the working liquid (12) and take away the heat energy to achieve better heat dissipation.

請再參照第三圖及第四圖所示,先將本發明具多孔性散熱體之微通道散熱座貼置於一熱源體(54)表面,該熱源體(54)係為電子元件、半導體等,具有高單位熱負荷之元件,以一流量控制器(4)連通一管路至微通道散熱座之每個通道空間(113),再由該流量控制器(4)調整輸出功率以便輸出適當流速之工作液體(12),該工作液體自流量控制器(4)導出後流進該入口端(111),同時間與該熱源體(3)接觸之微通道散熱座表面將熱導入,該工作液體(12)進入該通道空間(113)後, 該工作液體(12)同時通過左右兩側之該多孔性散熱體(2)及中間貫穿之流道(21),可使該工作液體(12)於多孔性散熱體(2)之複數孔洞(22)流竄,藉此增加該通道空間(113)內之局部對流,能有效帶離該座體(1)及該多孔性散熱體(2)所吸收之熱源,其中,夾於兩多孔性散熱體(2)間之流道,可供該工作流體(12)快速通過該通道空間(113),避免工作流體(12)通過該多孔性散熱體(2)所帶來的壓降,導致流動性下降。Referring to the third and fourth figures, the microchannel heat sink with the porous heat sink of the present invention is first placed on the surface of a heat source body (54), which is an electronic component and a semiconductor. Etc., a component having a high unit heat load, a flow controller (4) is connected to a pipeline to each channel space (113) of the microchannel heat sink, and the flow controller (4) adjusts the output power for output. a working fluid (12) of a suitable flow rate, which is discharged from the flow controller (4) and flows into the inlet end (111), while the microchannel heat sink surface in contact with the heat source body (3) is introduced into the heat. After the working liquid (12) enters the passage space (113), the working liquid (12) can simultaneously pass the porous heat sink (2) on the left and right sides and the flow passage (21) penetrating in the middle to make the working liquid (12) flowing in a plurality of holes (22) of the porous heat sink (2), thereby increasing local convection in the channel space (113), and effectively carrying away the body (1) And a heat source absorbed by the porous heat sink (2), wherein a flow path sandwiched between the two porous heat sinks (2) allows the working fluid (12) to quickly pass through the passage space (113), thereby avoiding The pressure drop caused by the working fluid (12) through the porous heat sink (2) causes a decrease in fluidity.

本發明之具多孔性散熱體之微通道散熱座及其散熱方法如第五圖步驟所示,係於該熱源體上放置微通道散熱座,再以該流量控制器(4)輸送前述液體(12)循環於該微通道散熱座之每個通道空間(113),再回到該流量控制器(4)之一儲水單元(41)完成一次循環步驟,其中,該通道空間(113)中使該液體(12)同時通過兩多孔性散熱體(2)及中間貫穿之流道(21),可使該工作液體(12)於多孔性散熱體(2)之複數孔洞(22)流竄,藉此增加該通道空間(113)內之局部對流,該多孔性散熱體(2)導熱效果好,熱源能快速傳導至液體(12),使其有效帶離該座體(1)及該多孔性散熱體(2)所吸收之熱源,並提供中間之該流道(21),避免工作液體(12)僅通過多孔性散熱體(2)容易使壓降增加,導致流動性下降,導致需要更大的輸出功率、成本增加等問題,使工作液體(12)能穩定流通於該多孔性散熱體(2)的各該通道空間(113)內,達到快速散熱之功效。The microchannel heat sink with a porous heat sink of the present invention and a heat dissipating method thereof are arranged on the heat source body as shown in the fifth step, and the liquid is transported by the flow controller (4) ( 12) circulating in each channel space (113) of the microchannel heat sink, and returning to a water storage unit (41) of the flow controller (4) to complete a cycle step, wherein the channel space (113) The liquid (12) is simultaneously passed through the two porous heat sinks (2) and the flow passage (21) penetrating therethrough, so that the working liquid (12) can flow through the plurality of holes (22) of the porous heat sink (2). Thereby increasing the local convection in the channel space (113), the porous heat sink (2) has good heat conduction effect, and the heat source can be quickly transmitted to the liquid (12), so as to effectively carry away from the seat body (1) and the porous body. The heat source absorbed by the heat sink (2), and providing the flow channel (21) in the middle, to prevent the working liquid (12) from easily increasing the pressure drop only through the porous heat sink (2). The decrease in fluidity leads to problems such as greater output power and increased cost, so that the working fluid (12) can be stably circulated in each of the passage spaces (113) of the porous heat sink (2) to achieve rapid heat dissipation. .

綜合上述實施例之說明,當可充分瞭解本發明之操作、使用及本發明產生之功效,惟以上所述實施例僅係為本發明之較佳實施例,當不能以此限定本發明實施之範圍,即依本發明申請專利範圍及創作說明內容所作簡單的等效變化與修飾,皆屬本發明涵蓋之範圍內。In view of the foregoing description of the embodiments, the operation and the use of the present invention and the effects of the present invention are fully understood, but the above described embodiments are merely preferred embodiments of the present invention, and the invention may not be limited thereto. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt;

(1)‧‧‧座體(1) ‧ ‧ ‧ body

(52)‧‧‧出口端
(11)‧‧‧微通道
(53)‧‧‧通道空間
(111)‧‧‧入口端
(54)‧‧‧熱源體
(112)‧‧‧出口端
(113)‧‧‧通道空間
(113A)‧‧‧第一邊
(113B)‧‧‧第二邊
(12)‧‧‧工作液體
(2)‧‧‧多孔性散熱體
(21)‧‧‧流道
(22)‧‧‧孔洞
(3)‧‧‧熱源體
(4)‧‧‧流量控制器
(41)‧‧‧儲水單元
(5)‧‧‧習知散熱座
(51)‧‧‧入口端
(52) ‧‧‧export end (11)‧‧‧microchannel (53)‧‧‧channel space (111)‧‧ ‧ entrance end (54) ‧‧ ‧ heat source (112) ‧ ‧ exit end (113 )‧‧‧Channel space (113A)‧‧‧1st side (113B)‧‧‧Second side (12)‧‧‧Working liquid (2)‧‧‧Porous heat sink (21)‧‧‧ flow path (22) ‧ ‧ holes (3) ‧ ‧ heat source (4) ‧ ‧ flow controller (41) ‧ ‧ water storage unit (5) ‧ ‧ ‧ known heat sink (51) ‧ ‧ entrance end

[第一圖]係為本發明微通道散熱座之構件局部分解圖。[第二圖]係為本發明微通道散熱座之構件示意圖。[第三圖]係為本發明微通道散熱座之循環流道置示意圖。[第四圖]係為本發明微通道散熱座之工作液體流動示意圖。[第五圖]係為本發明微通道散熱之方法流程圖。[第六圖] 習知微通道散熱座之結構示意圖。[First figure] is a partial exploded view of the components of the microchannel heat sink of the present invention. [Second figure] is a schematic view of the components of the microchannel heat sink of the present invention. [Third image] is a schematic diagram of the circulation flow path of the microchannel heat sink of the present invention. [Fourth figure] is a schematic diagram of the working liquid flow of the microchannel heat sink of the present invention. [Fifth] is a flow chart of the method for dissipating heat of the microchannel of the present invention. [Sixth] Schematic diagram of the conventional microchannel heat sink.

Claims (8)

一種具多孔性散熱體之微通道散熱座,包含:一座體,內部設置有複數個貫穿之微通道具有一軸向長度,該微通道分別包含有一入口端、一出口端及一通道空間,該入口端連通該通道空間至該出口端,且該通道空間設置有一第一邊及一第二邊;複數個多孔性散熱體,設置於各通道空間之第一邊及第二邊,且於兩多孔性散熱體間形成一流道。A microchannel heat sink having a porous heat sink, comprising: a body, wherein a plurality of microchannels are provided with an axial length, the microchannels respectively comprise an inlet end, an outlet end and a channel space, The inlet end communicates with the channel space to the outlet end, and the channel space is provided with a first side and a second side; a plurality of porous heat sinks are disposed on the first side and the second side of each channel space, and The porous heat sink forms a first-class track. 如申請專利範圍第1項所述之具多孔性散熱體之微通道散熱座,其中,該複數個微通道係等距離間隔設置於該座體內部。The microchannel heat sink with a porous heat sink according to claim 1, wherein the plurality of microchannels are disposed at equal intervals in the interior of the body. 如申請專利範圍第1項所述之具多孔性散熱體之微通道散熱座,其中,該第一邊及該第二邊係為該微通道之內壁,兩多孔性散熱體分別設置於該第一邊及該第二邊,並與該微通道之軸向長度相符合,於兩多孔性散熱體間形成有前述之流道。The microchannel heat sink having a porous heat sink according to the first aspect of the invention, wherein the first side and the second side are inner walls of the microchannel, and the two porous heat sinks are respectively disposed on the The first side and the second side are in conformity with the axial length of the microchannel, and the aforementioned flow path is formed between the two porous heat sinks. 如申請專利範圍第1項所述之具多孔性散熱體之微通道散熱座,其中,該多孔性散熱體係為銅、鋁、矽或鐵燒結成一長板塊狀體。The microchannel heat sink with a porous heat sink according to the first aspect of the invention, wherein the porous heat dissipation system is copper, aluminum, tantalum or iron sintered into a long plate block. 如申請專利範圍第1項所述之具多孔性散熱體之微通道散熱座,其中,該多孔性散熱體之通孔性為0.66,滲透性為2.74-10m2The microchannel heat sink having a porous heat sink according to the first aspect of the invention, wherein the porous heat sink has a through hole of 0.66 and a permeability of 2.74-10 m 2 . 一種具多孔性散熱體之微通道散熱方法,包括有:於一熱源體設置有一如第1項所述之具多孔性散熱體之微通道散熱座;輸送一液體循環於該微通道散熱座之每個通道空間;在該通道空間中使該液體同時通過兩多孔性散熱體及兩多孔性散熱體間形成貫穿之一流道,並將熱源帶離該微通道散熱座。A microchannel heat dissipation method with a porous heat sink includes: a microchannel heat sink having a porous heat sink as described in item 1 in a heat source body; and a liquid circulation in the microchannel heat sink Each channel space; in the channel space, the liquid is simultaneously passed through the two porous heat sinks and the two porous heat sinks to form a flow passage therethrough, and the heat source is carried away from the microchannel heat sink. 如申請專利範圍第6項所述之具多孔性散熱體之微通道散熱方法,其中,係以一流量控制器輸送前述液體循環於該微通道散熱座之每個通道空間。The microchannel heat dissipation method with a porous heat sink according to claim 6, wherein a flow controller is used to transport the liquid to each channel space of the microchannel heat sink. 如申請專利範圍第6項所述之具多孔性散熱體之微通道散熱方法,其中,該液體係為水。The microchannel heat dissipation method with a porous heat sink according to claim 6, wherein the liquid system is water.
TW102121440A 2013-06-17 2013-06-17 Microchannel heat sink having porous heat-sink elements and its heat-sink approach TW201500711A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113651288A (en) * 2021-07-07 2021-11-16 北京大学 Method for preparing micro-channel structure with nano through holes on partition wall

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113651288A (en) * 2021-07-07 2021-11-16 北京大学 Method for preparing micro-channel structure with nano through holes on partition wall
CN113651288B (en) * 2021-07-07 2023-10-20 北京大学 Method for preparing micro-channel structure with nano through holes on partition wall

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