201011253 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種量測方法，特別是指一種利用控制 施力條件並結合光學干涉原理及影像分析技術，以精確量測 施力後之實際接觸面積的方法。 【先前技術】 物體表面無論是研磨的多麼光滑，若在顯微鏡下觀察仍 會看到其表面為凹凸不平。以現代之加工技術而言，即使採 用高精密度的研磨機械，金屬表面的粗糙度仍有〇 lum左 右，因此若以肉眼觀察，可看成是整個表面全部接觸但實 際上僅是極少數的尖峰彼此相互接觸。參閱圖丨，為一具有 表面的元件9，該表面具有複數個粗糙部91，外視接觸面 積為該表面的面積，相對於該外視接觸面積，該等粗糙部91 與外界的接觸面積之和即為實際接觸面積，一般而言，實際 接觸面積僅為外視接觸面積的百分之一到萬分之一，並隨負 荷的大小而有所變化。 在如此微小面積承受全部負荷’其單位面積上的壓力非 常大，接觸點將產生塑性變形，接觸點之尖峰被壓潰，使接 ，面更為接近’同時由於分子力作用，以致接觸點發生黏 著。當兩接觸面做相對運動時’黏著部分將被剪斷，此煎斷 所需之作用力’即為摩擦力。因此摩擦力之大小決定於實際 接觸面積》 而—般以電I法量測實際接觸面積，僅能量測一具有粗 °面的物件在不同貞荷條件下，實際接觸Φ積與外觀面積 201011253 之比例，並無法得知實際接觸面積分佈之情況，且以電阻法 進行量測時，不導電之物質即無法量測。 因此如何尋求一不僅可量測金屬材料，非金屬材料之表 實際接觸面積面，且在該量測過程中不需破壞待測物，進而 降低量測成本及改善量測之可重複性，則是在該領域者所欲 解決的課題之一。 【發明内容】 因此，本發明之目的，即在提供一種以光學系統量測實 際接觸面積的之方法。 於是，本發明以光學系統量測實際接觸面積的之方法， 可用來量測並計算一個具有粗糙表面的待測物其表面粗糙部 的實際接觸面積，該方法包含：一準備步驟、一推進步驟、 一影像擷取步驟，及一數據處理步驟。 該準備步驟是先準備一待測物，將該待測物以該粗糙表 面朝向觀測物鏡方向，置放於光學顯微鏡的載物台上，並設 置一光學玻璃平板於該待測物及觀測物鏡之間。該推進步驟 是由該載物台下方施加一垂直於該載物台的正向推力，使該 載物台向該光學顯微鏡觀測物鏡方向靠近，至該待測物的表 面粗糙部實際接觸該光學玻璃平板至設定程度。該影像擷取 步驟是以一影像擷取裝置擷取該待測物與該光學玻璃平板接 觸停止後的實際接觸區的圖像。該數據處理步驟是以一影像 數據處理裝置自該影像擷取裝置擷取的圖像中，計算該實際 接觸區所佔的畫素數乘以解析度的數值，該數值即為該待測 物的粗糙表面實質接觸該光學玻璃平板時的接觸面積，即可 201011253 求得實際接觸面積。 本發明之功效在於：經由一正向推力，使待測物與該光 學玻璃平板接觸’並持續施以該正向推力，當正向推力為不 大於使該㈣部產生塑性變職，魏由影㈣取及數據處 理後即可得到該待測物的粗糙部之實際面積並可經由擷取 之影像同時獲得該粗糙部的實際分布情形。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在以 下配合參考圖式之一個較佳實施例的詳細說明中，將可清楚 的呈現。 實施本發明光學系統量測實際接觸面積的方法時，需先 準備一光學量測系統1。 參閲圖2，該光學量測系統i包括—光學顯微鏡u、一 光源裝置12、一影像擷取裝置13、一推進裝置14，及—數 據處理裝置15。 該光學顯微鏡11包括一置物台m，及一觀測物鏡112, 一介於該置物台111及該觀測物鏡112之間的固定部113， 及一固設於該固定部113的光學玻璃平板114。 該光源裝置12，具有一光源121、—偏極鏡m、一空 間濾波器（Spacial Filter)123、一透鏡組124，及一光纖軟管 125,在本較佳實施例中，該光源m可為氦氖雷射（He NSe Laser)或白光，光源121可經由該偏極鏡122至該空間濾波 器123進行濾除雜波、降低斑點等程序，再經過該透鏡組 124，進入該光纖軟管125中。 201011253 該影像擷取裝置13具有一高速攝影機13ι，將進入該光 纖軟管125的雷射導入該高速攝影機131内可作為觀測光 源。 該推進裝置14包括一擠壓單元141，及一量測單元 142。該擠壓單元141具有一槓桿143，槓桿143 一端連接於 該置物台ill底部，另一端具有一載重部144,於該槓桿143 的兩端之間具有一支點145，可在載重部144放置荷重w， 以槓桿方式施加荷重，帶動連接於該置物台U1底部的一 端，而使該置物台111向觀測物鏡112方向擠壓。於本較佳 實施例中，該槓桿143施加荷重端與該待測物受力端之桿長 比為5 : 1，該載重部144至該支點145的距離為175mm，而 支點145至該連接於該置物台U1底部端的距離為35mm ; 該量測系統142具有一負荷計ΐ4ό及一渦電流位移計 147(eddy current displacement transducer)，可準確量測該擠 壓單元141所施加的動態負荷，其施力方向係垂直於置物台 111方向，該渦電流位移計147可以監控起始擠壓位置；也 可精準的量測到擠壓時的單位時間位移變化量，而推斷出擠 壓速度。 參閱圖2、圖3,本發明光學系統量測實際接觸面積方 法的較佳實施例，是包含了一準備步驟51、一推進步驟52、 一影像擷取步驟53 ’及一數據處理步驟54。 首先，進行該準備步驟51，準備一表面具有複數粗糙部 的待測物2,並將該待測物2事先以超音波震盪清洗後擦乾。 將該待測物2的表面粗糙部朝向光學玻璃平板114的方向， 201011253 並置於該置物台111上。 接著’進行該推進步驟52’經由連接於該底部的推進裝 置施予一正向推力，該推進裝置可藉由調整擠壓位置與擠壓 速度控制該正向推力，將該載有待測物2的置物台ill向該 光學玻璃平板114推擠靠抵’直到該正向推力為不大於使該 粗糙部產生塑性變形為止，因而產生一由該多數粗糙部與該 光學玻璃平板114實際接觸的實際接觸區。 然後’進行該影像擷取步驟53,將該實際接觸區以影像 擷取裝置13的咼速攝影機131進行影像擷取，即可得到一 實際接觸區的靜止圖像。 最後’再進行該數據處理步驟54，將實際接觸區的圖 像經由影像數據處理裝置，量測計算實際接觸面積分佈 之情況，即可得到該等粗糙部的實際面積。在本較佳 實施例中，是將該待測物2與該光學玻璃平板114在靜止接 觸時之實際接觸區的圖像，藉由該影像擷取裝置13擷取， 再經由影像分析軟體獲得在實際接觸區所佔的畫素數P，然 後乘以解析度P，最後即可求得實際接觸面積。 在此，應注意的是，當正向推力過大，會使該等粗糙部 與該光學玻璃平板114的接觸點產生塑性變形，而使得接觸 點的尖峰被壓潰，進而導致量測的接觸面積接近於該粗链表 面的全面積而使量測結果失真，因此，較佳地，該正向力應 為不大於該待測物2產生塑性變形的作用力。 在本較佳實施例中，還可控制不同的正向推力，利用該 負荷計146準確量測該擠壓單元141所施加的動態負荷，並 201011253 使用該渴電流位移計147監控起始擠壓位置，料的量測到 擠壓時的單位時間位移變化量，而推斷出擠壓速度，不僅可 以控制該待測物2緩慢接近該光學玻璃平板114，避免衝撞 效應產生，更可藉此不同的正向推力獲得不同的實際接觸面 積，再使用統計法及curve fitting法進而獲得正向推力與實 際接觸面積之關係式。 綜上所述，本發明以光學量測實際接觸面積之方法藉由 一正向推力，讓待測物的粗糙部與該光學玻璃平板逐漸接 觸，並控制該正向推力，在正向推力不大於粗糙部產生塑性⑩ 變形的條件下，即可量測該粗趟部與該光學玻璃平板的接觸 面積，量測方法簡單，不僅金屬材料，非金屬材料亦可使用， 且在該量測過程中不需破壞待測物，進而降低量測成本及改 善量測之可重複性。另外，亦可於量測時同時得到該粗糙部 的實際分佈情形故確實能達成本發明之目的。 惟以上所述者’僅為本發明之較佳實施例而已，當不能 以此限定本發明實施之範圍，即大凡依本發明申請專利範圍 及發明說明内容所作之簡單的等效變化與修飾，皆仍屬本發 明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一示意圖，說明一表面具有複數個粗糙部的物體； 圖2是一示意圖，說明本發明以光學系統量測實際接觸 面積的之方法中的光學量測系統；及 圖3是一流程圖，說明實施本發明以光學系統量測實際 接觸面積的之方法的較佳實施例。 10 201011253 【主要元件符號說明】 1 光學量測系統 141 擠壓單元 11 光學顯微鏡 142 量測單元 111 置物台 143 槓桿 112 觀測物鏡 144 載重部 113 固定部 145 支點 114 光學玻璃平板 146 負荷計 12 光源裝置 147 渦電流位移計 121 光源 15 影像數據處理裝置 122 偏極鏡 2 待測物 123 空間濾波器 51 步驟 124 透鏡組 52 步驟 125 光纖軟管 53 步驟 13 影像擷取裝置 54 步驟 131 南速攝影機 14 推進裝置 11201011253 IX. Description of the invention: [Technical field of the invention] The present invention relates to a measuring method, in particular to a method for controlling the applied force and combining the principle of optical interference and image analysis technology to accurately measure the applied force The method of actual contact area. [Prior Art] No matter how smooth the surface of the object is, if it is observed under a microscope, the surface will be uneven. In terms of modern processing technology, even with high-precision grinding machinery, the roughness of the metal surface is still about 〇lum, so if it is observed with the naked eye, it can be seen that the entire surface is in full contact but in reality it is only a very small number. The peaks touch each other. Referring to the figure, a surface having an element 9 having a plurality of rough portions 91, the external contact area being the area of the surface, and the contact area of the rough portions 91 with the outside relative to the external contact area And the actual contact area, in general, the actual contact area is only one to one ten thousandth of the external contact area, and varies with the size of the load. In such a small area to withstand the full load 'the pressure per unit area is very large, the contact point will be plastically deformed, the peak of the contact point is crushed, the junction, the surface is closer to 'while due to the molecular force, so that the contact point is adhered . When the two contact faces are moved relative to each other, the adhesive portion will be cut, and the force required for the frying is the friction. Therefore, the magnitude of the friction is determined by the actual contact area. The actual contact area is measured by the electric I method. Only the energy of a workpiece with a rough surface is measured under different load conditions, and the actual contact Φ product and appearance area 201011253 The ratio of the actual contact area distribution is not known, and when measured by the electric resistance method, the non-conductive substance cannot be measured. Therefore, how to find a not only measurable metal material, non-metallic material surface actual contact area surface, and in the measurement process without destroying the object to be tested, thereby reducing the measurement cost and improving the repeatability of the measurement, then It is one of the topics that people in this field want to solve. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a method of measuring an actual contact area with an optical system. Therefore, the method for measuring the actual contact area by the optical system of the present invention can be used for measuring and calculating the actual contact area of the surface roughness of the object to be tested having a rough surface, the method comprising: a preparation step and a step of advancing , an image capture step, and a data processing step. The preparation step is to prepare a test object, the test object is placed on the stage of the optical microscope with the rough surface facing the observation objective lens, and an optical glass plate is disposed on the object to be tested and the observation objective lens. between. The advancing step is to apply a positive thrust perpendicular to the stage under the stage, so that the stage approaches the objective lens of the optical microscope, and the surface roughness of the object to be tested actually contacts the optical Glass plate to the set level. The image capturing step is an image capturing device that captures an image of the actual contact area after the object to be tested is stopped from contacting the optical glass plate. The data processing step is to calculate, by the image data processing device, the image captured by the image capturing device, the number of pixels occupied by the actual contact area multiplied by the resolution value, and the value is the object to be tested. The rough contact surface substantially contacts the contact area of the optical glass plate, and the actual contact area can be obtained by 201011253. The effect of the invention is that the object to be tested is brought into contact with the optical glass plate via a positive thrust and the forward thrust is continuously applied, and when the forward thrust is not greater than the plasticity change of the (four) part, Wei Yuying (4) After the data processing is performed, the actual area of the roughness of the object to be tested can be obtained and the actual distribution of the roughness can be obtained simultaneously through the captured image. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of a preferred embodiment of the accompanying drawings. In carrying out the method of measuring the actual contact area of the optical system of the present invention, an optical measuring system 1 is first prepared. Referring to Fig. 2, the optical measuring system i includes an optical microscope u, a light source device 12, an image capturing device 13, a propulsion device 14, and a data processing device 15. The optical microscope 11 includes a stage m, an observation objective 112, a fixing portion 113 interposed between the stage 111 and the observation objective 112, and an optical glass plate 114 fixed to the fixing portion 113. The light source device 12 has a light source 121, a polarizer mirror m, a spatial filter 123, a lens group 124, and a fiber optic hose 125. In the preferred embodiment, the light source m can be For the He NSe Laser or the white light, the light source 121 can filter the clutter, reduce the speckle, etc. through the polarizer 122 to the spatial filter 123, and then pass through the lens group 124 to enter the optical fiber. In tube 125. 201011253 The image capturing device 13 has a high speed camera 13i, and a laser entering the fiber tube 125 is introduced into the high speed camera 131 as an observation light source. The propulsion device 14 includes a pressing unit 141 and a measuring unit 142. The pressing unit 141 has a lever 143. One end of the lever 143 is connected to the bottom of the table ill, and the other end has a load portion 144. A pair of points 145 are disposed between the two ends of the lever 143 to place a load on the load portion 144. w, the load is applied in a lever manner, and the end connected to the bottom of the stage U1 is driven to press the stage 111 in the direction of the observation objective lens 112. In the preferred embodiment, the ratio of the length of the load applied to the load end of the lever 143 is 5: 1, the distance from the load portion 144 to the fulcrum 145 is 175 mm, and the fulcrum 145 is connected to the connection. The distance from the bottom end of the stage U1 is 35 mm; the measuring system 142 has a load meter ό4ό and an eddy current displacement transducer 147, which can accurately measure the dynamic load applied by the pressing unit 141. The direction of the force is perpendicular to the direction of the stage 111. The eddy current displacement meter 147 can monitor the initial pressing position; and can accurately measure the amount of displacement per unit time during extrusion, and infer the extrusion speed. Referring to Figures 2 and 3, a preferred embodiment of the optical system for measuring the actual contact area of the present invention includes a preparation step 51, a advancement step 52, an image capture step 53' and a data processing step 54. First, the preparation step 51 is performed to prepare a sample 2 having a plurality of rough portions on the surface, and the object to be tested 2 is ultrasonically shaken and washed in advance. The surface roughness of the test object 2 is directed toward the direction of the optical glass plate 114, 201011253 and placed on the stage 111. Then, the 'advancing step 52' is applied with a forward thrust via a propulsion device connected to the bottom, and the propulsion device can control the forward thrust by adjusting the pressing position and the pressing speed, and the object to be tested is loaded The stage ill of 2 pushes against the optical glass plate 114 until the forward thrust is not greater than plastically deforming the roughness, thereby producing a substantial contact between the plurality of roughness and the optical glass plate 114. Actual contact area. Then, the image capturing step 53 is performed, and the actual contact area is image-captured by the idle camera 131 of the image capturing device 13 to obtain a still image of the actual contact area. Finally, the data processing step 54 is performed, and the actual area of the rough portions is obtained by measuring the actual contact area distribution by the image of the actual contact area via the image data processing device. In the preferred embodiment, an image of the actual contact area of the object 2 to be in contact with the optical glass plate 114 is captured by the image capturing device 13 and then obtained by the image analysis software. The pixel number P occupied by the actual contact area is then multiplied by the resolution P, and finally the actual contact area can be obtained. Here, it should be noted that when the forward thrust is too large, the contact points of the rough portions with the optical glass plate 114 are plastically deformed, so that the peak of the contact point is crushed, thereby causing the measured contact area. The measurement result is distorted close to the full area of the surface of the thick chain. Therefore, preferably, the positive force should be a force not greater than plastic deformation of the object 2 to be tested. In the preferred embodiment, different forward thrusts can also be controlled, the dynamic load applied by the pressing unit 141 is accurately measured by the load meter 146, and the initial extrusion is monitored by the 201011253 using the thirst current displacement meter 147. The position and the amount of material are measured to change the displacement per unit time during extrusion, and the extrusion speed is inferred, so that the object to be tested 2 can be controlled not only to slowly approach the optical glass plate 114, but also to avoid collision effects, and thereby different The forward thrust obtains different actual contact areas, and then the statistical method and the curve fitting method are used to obtain the relationship between the forward thrust and the actual contact area. In summary, the present invention measures the actual contact area by optical measurement, and the rough portion of the object to be tested is gradually brought into contact with the optical glass plate by a positive thrust, and the forward thrust is controlled, and the forward thrust is not The contact area of the rough portion with the optical glass plate can be measured under the condition that the roughness is plastic 10 deformation, and the measurement method is simple, not only metal materials but also non-metal materials can be used, and in the measurement process There is no need to destroy the test object, thereby reducing the measurement cost and improving the repeatability of the measurement. In addition, the actual distribution of the roughness can be obtained at the same time in the measurement, so that the object of the present invention can be achieved. However, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention, All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing an object having a plurality of rough portions on a surface; FIG. 2 is a schematic view showing an optical measuring system in the method for measuring an actual contact area by an optical system of the present invention; And Figure 3 is a flow chart illustrating a preferred embodiment of a method of performing an optical system for measuring an actual contact area in accordance with the present invention. 10 201011253 [Description of main component symbols] 1 Optical measuring system 141 Extrusion unit 11 Optical microscope 142 Measuring unit 111 Storage table 143 Lever 112 Observation objective 144 Load unit 113 Fixing part 145 Pivot 114 Optical glass plate 146 Load meter 12 Light source unit 147 eddy current displacement meter 121 light source 15 image data processing device 122 polarizer 2 object to be tested 123 spatial filter 51 step 124 lens group 52 step 125 fiber hose 53 step 13 image capture device 54 step 131 south speed camera 14 push Device 11