200540668 10108twf.doc/006 玖、發明說明： 【發明所屬之技術領域】 本發明主要是關於一種半導體的製造系統，特別是關於 整體保養的排程系統。 【先前技術】 在半導體生產行業中使用的設備是極其昂貴和複雜的。 工程師們爲了確保生產設備的穩定性和可靠性，必須依循標 準操作程序（SOPs)進行預防保養(PM)。由於設備的數量和種 類很多，所以利用人工管理設備保養的效率很低。而且，人 工管理容易發生人爲疏失，而發生設備應保養而未保養的情 況，導致設備的損壞、影嚮生產進度，進而降低了企業的競 爭力。。 爲了對所有的設備執行各種定期或不定期的保養計畫， 管理人員常利用紙本或個人電腦上的應用軟體進行排程規 劃。同時，工程師根據保養計畫進行保養。保養時工程師會 依標準操作程序上所定義的保養項目與表格進行保養。當工 程師完成保養後，他將在PM表上記錄資料，並將PM表送給 管理人員檢查和簽名。最後，工程師將PM表放到文件夾中儲 存並做爲日後的參考記錄\當保養項目的結果失敗時，工程 師將塡寫一份PM0CAP表進行異常處理的追蹤與處置。 許多不想要的特徵和上述人工過程有關。沒有和其他電 腦處理資訊的系統結合，很容易得到影響保養品質的矛盾資 料。而且，人工過程很費時間。大部分設備有一個介面，PC 使用者能夠用該介面和設備交互得到設備的參數。設備的參 數是決定是否進行保養的關鍵因素。保養設備需要工程師接 近設備、記錄參數的時間，而且進一步需要校正人工資料錯 200540668 10108twf.doc/006 誤的時間，比如，這些錯誤可能是工程師在記錄時造成的。 而且，當保養的周期和保養項目的規定發生了變化，管理人 員就需要更新保養計畫和PM表；否則，保養計畫上的資料和 PM表可能相互矛盾。對於管理人員來說，因這樣一個變化重 新人工制定所有保養計畫的效率也是很低的。許多時間和精 力由於生產的需要被投入到人工調整新的保養中。例如，當 一個管理人員想執行一個新的保養計畫時，所有的工程師們 必須在進行保養時立即更新保養狀況。人工管理會在原始計 畫和實際結果間引起矛盾。 爲了確保所有保養都被執行，任何需要不定期保養的設 備必須有效的進行管理。保養可能被遺忘，並且保養計畫可 能沒有被執行。在這些情況下，設備的可靠性和穩定性是得 不到保證的。 而且，人工管理和書面工作浪費了人力和紙張。用人工 管理的職工在記錄保養資料時花費了太多的精力，浪費了太 多的紙張。而且，紙本文件難以保存，查詢和分析。紙本文 件資料不能有效的用來改進以後的保養參數。一個工具被檢 測後，檢測者得到參數，並判斷該工具是否需要保養。因此， 這種不規則的工具保養是沒有排程（Schedule)的。 在現有技術中存在著根據不規則工具即時參數的變化決 定保養日期的需求。參數資訊收集的自動控制、保養日期的 計算和將保養日期登入到保養時程中的進一步的需求也存 在。 【發明目的】 爲了解決上述問題，本發明的目的是提供一種預測保養 日期的方法以及儀器，其中一個以網路爲基礎的、使用者介 200540668 10108twf.doc/006 面友好的、強大的全設備管理系統（TEMS)已經被發明。該系 統和其他電腦資訊系統結合，簡化了保養的過程。透過電子 化的保養流程控管與跨資訊系統間的整合’落實保養的實施 與獲得最佳的保養品質；依設備保養特性的不同，建立完整 的保養管理機制，使設備達到最佳的可靠性、穩定性。藉由 該系統的應用，設備的非週期性保養日期可以藉由每天或幾 天一次的檢測中進行預測與調整。 本發明的另一目的是提供一種預測保養日期的方法以及 儀器，其中爲了降低保養的問題，一個關於預防保養的強大 的、使用者介面友好的管理系統得到了發展。該系統結合其 他資訊系統的資料，應用專業的知識和手法。該系統提供預 防保養的動態預測與自動預警的方式來改善管理效率，使所 有的設備保養均能落實，確保設備的可靠性和穩定性。透過 電子化的保養管理與資料儲存，簡化保養作業流程，減少人 力與紙張的耗費；並藉由系統的整合與分析，提供管理報表 與預警機制，提昇保養資料的應用價値。與自動化連線系統 連結’自動地收集相關設備參數，工程師不需特地前往工廠 紀錄設備相關參數，而能節省抄表時間的浪費與避免資料抄 寫錯誤發生。與設備保養作業規範系統連結，即時獲得正確 的設備預防保養資訊（01、保養表格），確保資料的一致性與 達到最佳的保養品質。 本發明提供了兩種預測保養日期的方法，以及利用上述 方法的儀器。第一種方法是在保養排程程序中引進了一個變 動量，該變動量是藉由在幾天內獲得的一個工具的參數計算 得到的’或者是使用者自己輸入的。然後該方法即可根據目 前獲得的參數和變動量，應用統計的方法，預測及調整設備 200540668 10108twf.doc/006 的非週期性保養日期。 除了不止一個參數追蹤決定保養日期外，第二種方法與 第一種方法相似。每個參數有自己的變動量。保養日期藉由 與每個參數的變動量計算而確定。 本發明的第三實施例提供了一個自動化系統以獲得工具 的資訊和使用該資訊對保養日期進行最好的預測。自動化系 統係應用本發明第一實施例與第二實施例中所述的方法計算 保養日期。自動化系統由一連接單元，一控制器和一資料庫 組成。 此處敍述的任何特徵或綜合特徵，如果該特徵包括在任 何綜合特徵中並不相互矛盾，以及該特徵從上下文、本說明 書與熟悉此技藝者的知識中是明顯的，則都包括在本發明的 範圍內。爲了槪述本發明，此處敍述了本發明的某些特點、 優點和新穎性特徵。當然，並不能理解爲本發明的任何特定 的實施例都必須包含這些特點、優點和新穎性特徵。在下述 的詳細說明和申請專利範圍中，本發明的獨特的優點和特點 是很明顯的。 【實施方式】 現在詳細敍述本發明的較佳實施例和相應圖式中顯示的 實例。在本文的其他地方，相近或相同的標號在圖式和說明 書中用來指示相同或相近的部分。需要指出的是，圖式是簡 化的形式，而不是精確的比例。關於此處的公開，僅僅是爲 了方便和簡單明瞭，方向性的辭彙（如頂部，底部，左邊’右 邊，向上的，向下的，上面的，在…之上，下面的，在…下面， 後面和前面）與相應的圖式結合運用。這些方向性辭彙不應該 以任何方式解釋爲對本發明範圍的限制。 200540668 10108twf.doc/006 儘管此處公開的是特定的實施例，但其應該理解爲是藉 由實例描述這些實施例，而不是對實施例進行限制。儘管是 論述可仿效的實施例，下述詳細敍述的目的應該理解爲包含 所有實施例的修正，替代物和可能落入到附屬的權利要求定 義的發明的範圍和精神的等價物。其應該理解和鑒別爲此時 描述的方法步驟和結構沒有包含半導體生產設備排程保養的 完整的製程流程。本發明可以與現有技術中應用的不同排程 和統計技術進行結合使用，此處包括很多現有成熟的方法步 驟對理解本發明很有必要。通常，本發明在綜合保養排程系 統的領域中具有實用性。然而，爲了例舉的需要，下述說明 是關於半導體生產設備的綜合保養排程系統。特別是請參照 圖式’第1圖爲根據本發明第一實施例預測保養日期的方法 的簡短的流程圖，下述實例1列表說明了該方法的簡單應用。 在實施例的第1圖中，得到了參數的保養値與參數的探測値 之間的差値(S100)，其中參數的探測値從一個工具上得到。參 數可能是迴圈晶片的數量或RF功率—小時(RF watt-hours)的 數量’但是並不限定於此。該工具是可能需要保養的任一設 備。該差値等於保養値減去探測値。差値算出後，進行比較(S102) 以決定差値是否大於或等於預設値。現在，在實例1中，2003/4/2 上的差値(Sl〇〇)取決於uoo減去1〇〇得到1〇〇〇，該値不小於 或等於零。同樣，2003/4/3上的800的差値不小於或等於零。 實例1 :預測一不定期保養 目前値型式：累計形式 參數最大値：1100 參數最小値：900 200540668 10108twf.doc/006 保養項目：1000片的迴圈晶片 曰期 參數値(a) 巨前値(b) 變動量(c) 預測PM日(d) 備註 2003/4/1 10000 0 ΝΑ ΝΑ 保養曰 2003/4/2 To 1〇〇 100 100 2003/4/10 2003/4/3 T0300 300 150 2003/4/7 (900-300)/150=4 2003/4/4 Τ0450 450 150 2003/4/7 (900-450)/150=3 2003/4/5 10550 550 137.5 2003/4/7 (900-550)/137.5=2.5 2003/4/6 10750 750 150 2003/4/7 (900-750)/150=1 2003/4/7 10900 900 150 2003/4/7 (900-900)/150=0 2003/4/8 11050 1050 150 2003/4/8 在這種情況下，目前値 <最大値，預測曰爲今 天。 2003/4/9 11090 0 保養曰 公式1-1 ··變動量= [Σ(目前値(ηΓ目前値(η·υ)] / (曰期⑴一曰 期⑺）； η = 1 — 7 公式1一2 :預測日=日期+ [(最小參數値—目前値）/變 動量] 公式1-3:目前値(„广參數値⑷—參數値(丨astPM) 比如’當差値小於或等於預設値時，保養程序（Sl〇6)需要 立即進行。比如，如果預設値是零，一旦參數的探測値達到 了保養値，工具就需要進行保養。如果差値大於預設値，則 進行保養日期計算(S104)，其中所述的保養日期是藉由將差値 除以多樣性或變動量値後加到目前的日期中來進行預測的。 由於在列舉的實施例中，差値是除以變動量値的，變動量的 値表示的是每單位時間參數的變化。變動量値最少可以藉由 200540668 10108twf.doc/006 兩種方式的其中一種設定。一種方式包括從相應的參數探測 値的資料計算變動量値，其中參數的探測値是從保養日期預 測前的經過一段時間的工具中獲得的。由於目前較佳的資料 是儲存資料’時間的週期爲幾天。儲存的資料可以從上述幾 天的工具中所得的參數中獲得，和/或從先前保養的日期預測 中所得的參數中獲得。另一種方法包括從使用者立即輸入的 資料中計算變動量値。另一種方法包括從與使用者立即輸入 的資料相關聯的儲存資料中計算變動量値。一個統計方法用 於上述所有決定變動量値的方法。例如，如果保養沒有立即 進行，保養日期可以儲存在保養時程中。在實例1中，用公 式1一 1計算變動量値(C欄），用公式1一 2計算預測的保養日 期(d欄），用公式1一 3計算目前値(b欄）。 根據本發明的第二實施例’第1圖也應用於一種藉由追 蹤多項參數以預測保養日期的方法。當應用多個參數時，每 個參數有自己的相關的探測値 '保養値、預設値和變動量値。 探測値是從工具中獲取的參數値。保養値通常是不允許超過 探測値的參數値。參數的保養値和參數的探測値之間的差値 (S100)由所有被追蹤的參數計算得到。預設値決定差値的中斷 點。進行比較(S102)用來決定預先設定的差値的數量是否少於 或等於其相應的預設値。在列舉的實施例中，預先設定的數 是一個因此比較(S102)用來決定每個差値是否少於或等於其預 設値。如果這些差値中的任何一個小於或等於其相應的預設 値，保養程序（S106)就儘快執行。如果所有的差値大於它們各 自的預設値，於是根據各個參數的差値和變動量値來運行保 養日期計算(S104)以預測保養日期。差値除以變動量値，其中 每個變動量値表示的是每單位時間相應參數的變化。 11 200540668 10108twf.doc/006 變動量値可能由上述設定所決定，但是應用在多參數的 上下文中。如本發明所述，變動量値由考慮先前之測量參數 的統計方法所決定，其中該參數是來自於儲存的資料和/或輸 入的目前値。每個變動量値都可以藉由相應的參數的探測値 計算，這些參數從S104預測保養日期的計算前、經過一段時 間後的工具上所獲得。正如目前較佳的資料是儲存的資料， 時間的週期爲幾天。儲存的資料可以從上述經過幾天後的：!： 具上獲得的參數而獲得和/或從先前保養日期計算中獲得的參 數中而獲得。對於輸入的目前値，使用者即刻輸入的資料可 以用於計算變動量値。測量的値可能包括由使用者輸入的自 _ 前的探測値以及先前測量的儲存的資料的綜合。變動量値也 可以從與使用者即刻輸入的資料結合的儲存的資料計算得 到。一旦計算出保養日期，最好保存在保養時程中。 執行本發明的全設備管理系統TEMS(如第27圖所示）的 製程流程代替保養的人工過程(如第26圖所示)有多個優點。 第一個優點是與TEMS結合的其他電腦資訊系統可以確保資 料的一致性和獲得高品質的保養。和設備的自動化系統結合， 該系統可以直接從設備的本身獲得參數。這節約了工程師的 時間’否則其必須到設備處記錄設備的參數；同時消除了人 鲁 工傳輸資料的錯誤。 和標準操作程序(SOP)系統結合，該系統可以確保PM _ ， 上資料和SOP資料的一致性，由此達到了保養的品質。動態 的預測和管理保養計畫可以改善管理的效率和確保保養被執 行。專業的方法和設備的參數的自動收集結合後，TEMS能夠 提供一個解決方案以進行動態預測和管理保養計畫，並能夠 改善管理的效率。 12 200540668 10108twf.doc/006 執行TEMS可以改善設備的生產效率。和定期保養、不 定期保養、異常保養、設備維修、日常保養以及設備的記錄 參數結合，保養管理系統可以監測和管理保養的狀態’因此 降低了設備的損壞，藉由擴展生產的最大量改善了設備的生 產效率。 保養的電腦管理和資料儲存降低了紙本的應用，節約了 員工的時間。TEMS支援監測報告和警告報告的結合和分析儲 存在管理系統的保養資料的特徵，因此改善了保養資料的應 用値。 本發明提出的全設備管理系統能夠監測和控制所有設備 的狀態和保持設備一直運行良好。由於激烈的競爭，半導體 - 生產設備被迫確保有效、經濟的製程工具的排程、使用和保 養。由於TEMS的代替，審核保養行爲和快速查詢設備中所 有工具的所有保養歷史紀錄成爲可能。快速的將管理系統複 製到新設備也成爲可能，其中較舊設備的管理資料可以被新 設備利用。從較舊的設備上獲取的資料可以使新工廠快速、 更有效的啓動。 如第3圖所示，TEMS的子系統包括一個設備管理系統 (EMS)，預防保養管理(PMM)，零件管理系統(PMS)，統計的 程序控制（SPC)系統，警報監測系統(AMS)，攝像監視器系統 (CMS)，故障排除管理系統(TMS)，關鍵性能指示器(KPI)系統 和成本分析系統(CAS)。如第4圖所示，TEMS也可以快速的 獲得規範(01)資訊和從其他01系統(如製造資訊主導裝置(FIM)) 獲取預防保養(PM)項目資訊，以確保保養的有效性。藉由有 效的執行和管理的預防保養以確保設備的可靠性和穩定性， 這樣降低了意外的錯誤發生和從而保證了產品的品質。 13 200540668 10108twf.doc/006 設備管理系統(EMS)的功能包括管理和設定設備的基本資 料，如設備的名稱，設備的位置等等。這個子系統也設定與 設備相關的資料，如設定特殊設備的保養極値(tolerance)或停 止/開始設備保養的排定的計畫。 預防保養管理(PMM)系統具有很多功能。其藉由修正和顯 示設備的保養的排程計畫以管理保養的排程計畫。其也記錄 和顯示定期保養(如第Π圖所示），不定期保養(如第18圖所 示），異常保養、設備維修、日常保養以及失去控制的行爲程 序(OCAP)〇PMM不但適用於記錄或查詢不定期保養的設備參 數，而且適用於每周或每月查詢設備的保養的報告。比如，PM 表能夠從PDA上傳或下載。設備的規範(01)也可以進行查詢， 如同在資訊主導裝置-設備資訊主導裝置(FIM-EIM)系統上一 樣。許多工具需要定期保養。定期保養有一個保養的固定週 期(如每周，每月等等。）和應進行的保養的極値。第5圖顯示 了用於自動排程定期保養的製程流程。隨著保養的週期和極 値，該TEMS系統可以預測需要下一次保養的設備指定部分。 在列舉的實施例中，預測定期保養的公式如下： 公式2 :預測的PM日=最後一次的PM日+極値+使用 者的標準 其中極値在FIM-EIM系統和TEMS系統中進行定義。FIM_ EIM系統中的極値對於全公司是標準値，TEMS系統中的極 値較FIM-EIM系統中的極値嚴格。使用者的標準包括特別對 於指定使用者的項目。例如，如果預測日指向周末，系統就 將依據EQ·設定功能的“假期設定”的値安排周五或周一爲保 養曰。 第6圖顯示了加入新的定期保養的TEMS功能的螢幕截 200540668 10108twf.doc/006 圖。如果新設備加到需要保養的fim-eim(製造資訊主導裝置 -設備資訊主導裝置）系統中，該系統會發送一封電子郵件通 知管理人員將定期保養加到TEMS系統，並設定保養的起始 日期。如果設備的型式從需要保養的FIM-EIM(製造資訊主導 裝置-設備資訊主導裝置）系統中移走，TEMS會自動除去保 養曰期。第29圖顯示了 ADT-13的按季的PM2從FIM-EIM 系統中移走的情況，TEMS系統自動的在PM排程的計畫中停 止預測時程。 第7圖顯示了定期保養修改排程的TEMS的螢幕截圖， 而第8圖顯示了定期保養的排程顯示。當管理人員由於例如 0 是生產需要而修改或取消已排定保養時，TEMS系統的“修改 排程功能”將自動檢測修改的保養日期，看看其是否在允許 的極値內，並如同第24圖相關論述的一樣決定會簽的級別。第 24圖顯示了“會簽級別的設定”功能，其用於定義各種會簽 級別（如，對理事會經理、理事會領導的會簽等等…）。如果會 簽的事件發生，該系統將爲每個功能在指定-會簽者 (assigning-cosigner)螢幕上顯示會簽的級別（該指定一會簽者 (assigning-cosigner)螢幕可以在第30圖的步驟3中看到）。第 鲁 9圖顯示了 PM排程的設備配置，使用者可以設定這些値；該 系統將藉由這些設定値預測和重新安排下一次PM日。使用者 可以臨時停止PM排程和重新啓動PM(臨時停止PM的例子在 第30圖中進行了闡述）。當設備需要花時間修理或由於其他問 題需要停止時，管理人員也可以停止已排定的保養，當問題 解決後，再重新啓動已排定的保養。 第10圖顯示了 TEMS記錄保養日期的螢幕截圖。TEMS 會自動連接到FIM-EIM系統，以得到供工程師保養和記錄的 15 200540668 10108twf.doc/006 保養項目。工程師記錄保養資料後，TEMS利用該資料決定工 具性能是否可接受。如果保養結果顯示不可接受的工具性能， TEMS會產生一個PM OCAP的記錄，用於工程師通知使用者 和管理人員如同第24圖所論述的進行會簽。第31圖顯示了 有一個失敗項目的執行的PM表，該系統爲這個PM表產生了 PM OCAP 記錄。 TEMS可以根據指定給系統的規則預測下一次保養日期。 第32圖顯示了該系統如何從FIM-EIM以及TEMS中決定週期 天數和極値的値。第11圖爲顯示了這樣一個預防保養預測規 則的TEMS螢幕截圖。TEMS也根據上一次的保養日期和週期 預測下一次保養日期。期間的資料可以來自TEMS預防保養 管理(PMM)系統中的使用者設定，來自FIM-EIM系統的使用 者設定，或FIM-EIM系統的預定設定(請參閱第32圖）。 然而對於一些工具，例如，由於工具使用的變化，保養 不能以定期的方式排程。於是，不定期保養的執行可以根據 設備的監測參數是否超過第12圖所示的流程表中其規範(〇1) 的規格。第33圖顯示了 FIM-EIM系統和TEMS系統之間不 定期項目的關係。監測參數(如第33圖中的目前値）可以藉由 電腦中運行的程式或使用者更新。該01儲存在FIM-EIM系統 中0 第13圖顯示了設定不定期保養的配置的TEMS。不定期 保養的過程包括收集設備的參數，預測不定期保養的日期， 以及記錄保養資料。和定期保養執行一樣，TEMS也可以管理 列舉在FIM-EIM系統中從不定期設備保養中加入或移走的工 具族。管理人員能夠設定關於不定期保養的基本資訊，如每 天的變化，變化的方向，設備參數收集的型式。 16 200540668 10108twf.doc/006 第14圖顯示了記錄和顯示不定期保養參數目前値的TEMS 執行。如果收集型式設定爲“自動”，與設備相連的TEMS 可以藉由每天運行的程式自動的收集和保存設備的參數。對 於其他收集型式，使用者可以人工記錄或使用個人數位助理 (PDA)記錄設備參數的目前値，計算不定期保養，並更新 TEMS-PMM資料庫。輸入的參數値可有三種型式的目前値：1) 累計的型式，其中設備參數的値不能重設至零；這種情況下， 設備參數的所有歷史紀錄資料收集在資料庫內’目前値在資 料庫中計算並儲存。（請參照例1)目前値=參數値(last PM)-參 數値㈣rrent)。2)轉換的型式，其中設備參數的目前値必須藉由 籲 預計算轉換；在這種型式中，從設備收集的列資料必須與工 程値進行計算。比如，可以將溫度從。F轉換到°C °目前値= 設備參數的値乘以工程値。3)重設的型式，其中設備參數的目 前値須重設至零。在這種型式中，設備參數在執行的保養後 須重設至零。目前値=設備的參數的値。如果收集的型式是 “自動”，於是自動收集設備參數的程式將根據上述目前値 的型式將實際値轉換到TEMS。 第15圖顯示了爲不定期保養的預測規則的TEMS執行的 _ 螢幕截圖。每個不定期保養日期的預測係在FIM-EIM系統中 藉由使用設備參數的目前値計算保養日期的日常運行程式更 新，以及基於參數的定義的較上限和較下限規格計算保養日 · 期。當資料傾向於參數變化的方向時，如參數每天增加，而 參數在下一天下降，保養已被執行，設備參數的目前値已被 重置。 第16圖顯示了不定期保養的顯示時程的TEMS功能。 TEMS藉由回顧日常參數和找出兩個最接近目前時間之間的期 17 200540668 10108twf.doc/006 間參數的變化方向。TEMS將自動連接到FIM-EIM系統，獲 得給工程師進行保養和記錄的保養項目。與定期保養相似， TEMS利用工程師記錄的保養資料決定工具性能是否可接受。 如果保養結果顯示不可接受的工具性能，TEMS會產生PM OCAP(預防保養失去控制作業程序）記錄，用於工程師通知使 用者和管理人員進行會簽。TEMS於是根據指定給該系統的規 則預測下一次保養日期。 其他的保養型式包括異常保養，維修保養，日常保養， 以及PMOCAP保養。第19圖顯示了異常保養記錄中的TEMS 實施例的螢幕截圖。當設備發生不同於正常的情況，就進行 攀 異常保養，這就是工程師需要藉由定義在FIM-EIM系統中的 下述過程和記錄的維修日期以修理設備。第22圖顯示了修復 保養記錄的TEMS螢幕截圖的實施例。如果下述異常保養的 標準過程不能解決問題，工程師必須記錄保養的全過程和在 修正保養記錄描述遇到的問題。修正的保養資料係被儲存作 爲以後的參考。 第20圖顯示了日常保養記錄的TEMS執行的螢幕截圖。 日常保養不同於定期保養，因爲日常保養需要每天進行，而 | 定期保養在保養可能進行的範圍內有一天或多天的極値。在 _ 一個保養記錄中，日常保養結合特定部門所有設備的所有項 目。第21圖顯示了下載保養項目文件的TEMS執行的螢幕截 ‘ 圖。日常保養記錄可以藉由下載到PDA或以網路爲基礎的介 面存取。完成記錄後，資料將送到管理人員進行會簽。第23 圖顯示了失去控制作業程序（OCAP)的執行。如果任何預防保 養的結果失敗，TEMS會自動建立新的PM的OCAP，並將失 敗的項目儲存到PM的OCAP中。TEMS通知工程師保養失敗 18 200540668 10108twf.doc/006 項目的設備，並將任何矯正的行爲資料記錄到PM的OCAP中。 TEMS也包括會簽的過程，以確保該管理部門確認所有行 爲。在一個較佳的實施例中，每個行爲在TEMS中有一個會 簽的過程。使用者可以會簽文件和查詢文件的會簽歷史紀錄。 第24圖顯示了同意會簽者之層級的設定的TEMS窗口執行。 爲了滿足每個工廠的需求，TEMS支援依據使用者需求之會簽 過程的設定。設定完會簽過程的流程後，該系統在接下來的 會簽過程的流程中會詢問使用者設定合適的會簽者。TEMS從 歷史紀錄資料中產生一系列可能的簽名者，且該歷史紀錄資 料對於每一個使用者相關的以前的會簽者和請求者而言是獨 一無二的。使用者也可以保存每次選擇的會簽者的設定時間。 第25圖顯示了當其他使用者在等待他或她的同意時’通知登 錄系統中的使用者的TEMS執行的螢幕截圖。使用者每次登 錄到TEMS中，TEMS會藉由友好的操作介面通知任何會簽文 件狀態的使用者。除此以外，會簽的子系統可以追蹤和查詢PM 表的歷史紀錄。 TEMS也可以結合在PC伺服器中執行每天/周/月報告的 程式將提供總結資訊的電子郵件送給管理人員。當設備保養 日期遲緩或當保養日期很快將過期，程式也會將通知送給合 適的管理人員。保養狀態的資訊也會送給管理人員。當會簽 者花太多的時間簽署送給的文件時，該資訊也會送去通知會 簽者。 TEMS的另一功能支援兩種型式的可以下載的保養項目的 文件：1)保養的日常項目和2)不定期保養的參數。工程師利用 這個功能下載所需的保養項目到PDA以保持和記錄資料’並 且將保養資料上傳到網路伺服器的資料庫中。除此以外’在 19 200540668 10108twf.doc/006 FIM-EIM系統中敍述了保養表格和保養項目。工程師也須追 蹤這些保養項目並記錄結果。 第2圖是有標準元件的圖表，表示的是根據本發明的第 三實施例預測保養日期的儀器。該儀器由一連接單元206，一 資料庫204, 一 FIM-EIM(製造資訊主導裝置一設備資訊主導 裝置）單元202，以及控制器200組成，其可以設定爲至少與 一個工具相連。爲了獲得參數的探測値，連接單元206將一 個工具連接到儀器。參數的探測値也可以包括多數的參數探 測値，在這種情況下，連接單元206將允許從工具中獲得多 數的探測値。同時，該至少一個工具也可以由多數的工具組 成。在列舉的實施例中，連接單元206是系統自動連接設備， 通過的設備參數可以自動的收集和儲存到第28圖所示的TEMS 系統中。 資料庫204儲存了表示工具每單位時間參數變化的變動 量値。當許多參數被監測時，變動量値可能由多數的變動量 値組成，其中每個參數與自己的變動量値相對應以及多數的 變動量値儲存在資料庫204內。資料庫204也儲存了工具的 至少一個參數的探測値。如果只有一個參數用於保養的追蹤， 資料庫204將保存對於該參數的一部分或所有探測値，其中 此參數具有對於該工具之已記錄的歷史紀錄。如果多個參數 用於衡量保養，資料庫204將會對已追蹤的參數包含一個探 測値的歷史紀錄。資料庫204也可能含有每個參數的預設値。 每個參數的保養値也儲存在資料庫204內。 控制器200根據資料庫204中的變動量値和示例中與第1 圖結合描述的探測値和保養値之間的差値爲工具預測保養日 期。例如，如果保養値減去探測値小於或等於預設値，工具 200540668 10108twf.doc/006 就需要保養。當多數參數爲保養目的而被追蹤時，差値可能 包括多數的差値。控制器200利用差値或多數差値來預測保 養日期。對於這個過程，控制器200從連接單元206獲得探 測値和從資料庫204獲得儲存的探測値來計算保養日期。控 制器200也從連接單元206獲取新的探測値並儲存在資料庫 204 中。 FIM-EIM(製造資訊主導裝置-設備資訊主導裝置）單元 202爲定義保養日期和表格提供了幾個規則，如預先設定的保 養日期和保養表格。FIM-EIM單元202有一個樹形子系統， 該子系統包括一個設備資訊系統，一個預防保養規範(ΡΜ ΟΙ) 和PM表格系統。FIM-EIM單元202與控制器200相連以將 · 保養日期儲存到保養時程中。FIM-EIM單元202也可以尋找 出從控制器200處接收的預測日期的矛盾排程，並盡力有效 的安排保養日期和次數。本發明根據已知的參數利用統計方 法預測工具上發生的變化。因此，保養日期可以被預測，因 而保養時程可以相應的被制定。 綜上所述，本領域的技術人員將能夠理解本發明的方法 可以容易保養排程的形成、特別是對於半導體生產設備的保 φ 養排程的形成。上述實施例已藉由實例提供，本發明並不侷 _ 限於這些實例。考慮到上述的描述對於本領域的技術人員來 說，公開實施例的一定程度上的多種變化和修正不是相互排 ' 斥的。而且，鑒於此處的公開，其他的結合，省略，替代和 修正對於本領域的技術人員是明顯的。相應的，本發明不僅 僅侷限於公開的實施例，而是藉由相關附屬的申請專利範圍 去定義。 【圖式簡單說明】 21 200540668 10108twf.doc/006 第1圖爲依照本發明的預測保養日期的方法的縮略的流 程圖。 第2圖爲依照本發明的預測保養日期的儀器的標準元件 的圖表。 第3圖爲本發明全設備管理系統(TEMS)結構的標準元件 的圖表。 第4圖爲表示製造資訊主導裝置(FIM)系統和TEMS之連 結的圖表。 第5圖爲藉由TEMS自動安排定期保養的處理流程。 第6圖爲加入新的定期保養的TEMS功能的螢幕截圖 (Screenshot) 〇 第7圖爲修改定期保養時程的TEMS功能的螢幕截圖。 第8圖爲安排定期保養的TEMS執行的螢幕截圖。 第9圖爲PM排程的設備配置。 第10圖爲記錄保養日期的TEMS執行的螢幕截圖。 第11圖爲顯示定期保養的預測規則的TEMS執行的螢幕 截圖。 第12圖爲藉由TEMS自動預測不定期保養時程的製程流 程。 第13圖爲設定不定期保養配置的TEMS執行的螢幕截 圖。 第I4圖爲記錄和顯示不定期保養的參數目前値的TEMS 執行的螢幕截圖。 第15圖爲不定期保養預測規則的TEMS執行的營幕截 圖。 第16圖爲不定期保養的顯示時程的TEMS執行的營幕截 22 200540668 10108twf.doc/006 圖。 第17圖爲由管理保養記錄的定期保養系統產生的TEMS 執行的螢幕截圖。 第18圖爲由管理保養記錄的不定期保養系統產生的TEMS 執行的螢幕截圖。 第19圖爲異常保養記錄的TEMS實施例的螢幕截圖。 第20圖爲日常保養記錄的TEMS執行的螢幕截圖。 第21圖爲下載保養項目文件的TEMS執行的螢幕截圖。 第22圖爲修復保養記錄的TEMS執行的螢幕截圖。 第23圖爲失去控制行爲程序(OCAP)的TEMS執行的螢幕 截圖。 第24圖爲同意會簽之各層級的設定的TEMS執行的營幕 截圖。 第25圖爲通知系統中的使用者登錄上網當其他使用者在 等待他或她的同意時的TEMS執行的螢幕截圖。 第26圖爲現有的保養執行的人工管理的製程流程。 第27圖爲藉由TEMS對保養進行自動管理的製程流程。 第28圖爲TEMS系統的結構。 第29圖爲FIM-EIM和TEMS之間在定期保養中的連接 的螢幕截圖。 第30圖爲在TEMS系統中臨時停止一次保養的完整的製 程流程。 第31圖爲PM表和PM OCAP表之間的關係。 第32圖爲從FIM-EIM系統和TEMS系統中如何決定保 養日期的天數和極値。 第33圖爲FIM-EIM和TEMS之間在不定期保養中的連 23 200540668 10108twf.doc/006 接的螢幕截圖。 【圖式標示說明】 S100、S102、S104、S106 ··步驟 200 :控制器 202 :製造資訊主導裝置-設備資訊主導裝置 204 :資料庫 206 ··連接單元 24200540668 10108twf.doc / 006 (1) Description of the invention: [Technical field to which the invention belongs] The present invention is mainly related to a semiconductor manufacturing system, especially a scheduling system for overall maintenance. [Previous Technology] The equipment used in the semiconductor production industry is extremely expensive and complicated. To ensure the stability and reliability of production equipment, engineers must follow standard operating procedures (SOPs) for preventive maintenance (PM). Due to the large number and types of equipment, manual management of equipment maintenance is inefficient. In addition, human management is prone to human error, and equipment should be maintained but not maintained, resulting in damage to the equipment and affecting production progress, thereby reducing the competitiveness of the enterprise. . In order to carry out various regular or irregular maintenance plans for all equipment, managers often use paper or personal computer application software for scheduling. At the same time, the engineer performs maintenance according to the maintenance plan. During maintenance, the engineer will perform maintenance according to the maintenance items and forms defined on the standard operating procedures. When the engineer completes the maintenance, he will record the information on the PM form and send the PM form to the management for inspection and signature. Finally, the engineer stores the PM table in a folder and stores it as a reference record in the future. When the result of the maintenance project fails, the engineer will write a PM0CAP table for tracking and disposal of the abnormal processing. Many unwanted features are related to the artificial processes described above. Without integration with other computer processing information systems, it is easy to obtain conflicting information that affects the quality of maintenance. Moreover, the manual process is time consuming. Most devices have an interface, and PC users can use the interface to interact with the device to get device parameters. The parameters of the equipment are a key factor in deciding whether to perform maintenance. Maintaining the equipment requires engineers to approach the equipment and record the parameters, and further needs to correct manual data errors. 200540668 10108twf.doc / 006 The wrong time, for example, these errors may be caused by the engineer during the recording. Moreover, when the maintenance cycle and maintenance item requirements have changed, the manager needs to update the maintenance plan and PM table; otherwise, the data on the maintenance plan and PM table may contradict each other. It is also inefficient for managers to manually formulate all maintenance plans due to such a change. Much time and effort is invested in manual adjustments for new maintenance due to production needs. For example, when a manager wants to perform a new maintenance plan, all engineers must update the maintenance status immediately when performing maintenance. Manual management can create conflicts between the original plan and actual results. To ensure that all maintenance is performed, any equipment that requires unscheduled maintenance must be effectively managed. Maintenance may be forgotten, and maintenance plans may not be executed. In these cases, the reliability and stability of the equipment cannot be guaranteed. Moreover, manual management and written work waste manpower and paper. Manually managed employees spent too much energy in recording maintenance information and wasted too much paper. Moreover, paper documents are difficult to save, query and analyze. Paper documents cannot be used effectively to improve future maintenance parameters. After a tool is tested, the inspector gets parameters and determines whether the tool needs maintenance. Therefore, this irregular tool maintenance is not scheduled. In the prior art, there is a need to determine a maintenance date based on an instantaneous parameter change of an irregular tool. Further requirements for automatic control of parameter information collection, calculation of maintenance dates, and registration of maintenance dates into the maintenance schedule also exist. [Objective of the Invention] In order to solve the above problems, the purpose of the present invention is to provide a method and an apparatus for predicting the maintenance date, one of which is a web-based, user-friendly 200540668 10108twf.doc / 006 face-friendly, powerful all-device The management system (TEMS) has been invented. The system is integrated with other computer information systems to simplify the maintenance process. Through the integration of electronic maintenance process control and cross-information system, 'implement maintenance and obtain the best maintenance quality; establish a complete maintenance management mechanism according to the different characteristics of equipment maintenance, so that the equipment reaches the best reliability ,stability. With the application of this system, the aperiodic maintenance date of the equipment can be predicted and adjusted by daily inspection or several days of inspection. Another object of the present invention is to provide a method and an apparatus for predicting maintenance dates, in order to reduce maintenance problems, a powerful, user-friendly management system for preventive maintenance has been developed. The system combines information from other information systems and applies professional knowledge and techniques. The system provides preventive maintenance and dynamic prediction and automatic warning methods to improve management efficiency, enable all equipment maintenance to be implemented, and ensure equipment reliability and stability. Through electronic maintenance management and data storage, the maintenance operation process is simplified, and the labor and paper consumption are reduced; through the integration and analysis of the system, management reports and early warning mechanisms are provided to increase the application price of maintenance data. Linking with the automatic connection system ’automatically collects relevant equipment parameters. The engineer does not need to go to the factory to record the equipment-related parameters, which can save the waste of meter reading time and avoid data copying errors. It is connected with the equipment maintenance operation specification system to obtain the correct equipment preventive maintenance information (01, maintenance form) in real time to ensure the consistency of the data and achieve the best maintenance quality. The present invention provides two methods for predicting a maintenance date, and an apparatus using the above method. The first method is to introduce a variable in the maintenance schedule, which is calculated from the parameters of a tool obtained within a few days' or entered by the user. Then, this method can apply the statistical method to predict and adjust the equipment's aperiodic maintenance date based on the parameters and fluctuations currently obtained. 200540668 10108twf.doc / 006. The second method is similar to the first method, except that more than one parameter is followed to determine the maintenance date. Each parameter has its own variation. The maintenance date is determined by calculating the variation with each parameter. A third embodiment of the present invention provides an automated system to obtain tool information and use that information to best predict maintenance dates. The automation system uses the method described in the first and second embodiments of the present invention to calculate the maintenance date. The automation system consists of a connection unit, a controller and a database. Any feature or comprehensive feature described herein is included in the present invention if the feature is included in any comprehensive feature and is not contradictory, and if the feature is obvious from the context, the description, and the knowledge of those skilled in the art In the range. For the purpose of describing the invention, certain features, advantages and novel features of the invention are described herein. Of course, it is not understood that any particular embodiment of the present invention must include these features, advantages, and novelty features. The unique advantages and features of the present invention will be apparent in the following detailed description and the scope of the patent application. [Embodiment] Now, preferred embodiments of the present invention and examples shown in the corresponding drawings will be described in detail. Elsewhere in this document, similar or identical reference numbers are used in the drawings and the description to refer to the same or similar parts. It should be pointed out that the diagram is a simplified form, not an exact scale. The disclosure here is only for convenience and simplicity. The directional vocabulary (such as top, bottom, left ', right, up, down, above, above, below, below ... , Back and front) in combination with the corresponding schema. These directional words should not be construed as limiting the scope of the invention in any way. 200540668 10108twf.doc / 006 Although specific embodiments are disclosed herein, it should be understood that these embodiments are described by way of example rather than limitation. Although discussing exemplary embodiments, the purpose of the following detailed description should be understood to include modifications, alternatives, and equivalents that may fall within the scope and spirit of the invention as defined by the appended claims. It should be understood and identified that the method steps and structures described at this time do not include a complete process flow for the scheduling and maintenance of semiconductor manufacturing equipment. The present invention can be used in combination with different scheduling and statistical techniques applied in the prior art, including many existing and mature method steps are necessary for understanding the present invention. Generally, the present invention has utility in the field of an integrated maintenance scheduling system. However, for illustrative purposes, the following description is about a comprehensive maintenance scheduling system for semiconductor manufacturing equipment. In particular, please refer to the drawing. Fig. 1 is a short flowchart of a method for predicting a maintenance date according to the first embodiment of the present invention. A simple application of the method is illustrated in the following Example 1. In the first figure of the embodiment, the difference 値 between the parameter maintenance 値 and the parameter detection 得到 is obtained (S100), where the parameter detection 値 is obtained from a tool. The parameter may be the number of loop chips or the number of RF watt-hours' but is not limited thereto. This tool is any device that may require maintenance. This rate is equal to maintenance 値 minus detection 値. After the rate is calculated, a comparison is performed (S102) to determine whether the rate is greater than or equal to a preset rate. Now, in Example 1, the difference (S100) on 2003/4/2 depends on uoo minus 100 to get 1,000, which is not less than or equal to zero. Similarly, the rate difference of 800 on 2003/4/3 is not less than or equal to zero. Example 1: Prediction of irregular maintenance at present. Type: Maximum cumulative parameter: 1100 Minimum parameter: 900 200540668 10108twf.doc / 006 Maintenance item: Date parameter of 1000 wafers. (A) Giant front 値 ( b) Change (c) PM day forecast (d) Remarks 2003/4/1 10000 0 ΝΑ ΝΑ Maintenance date 2003/4/2 To 1〇〇100 100 2003/4/10 2003/4/3 T0300 300 150 2003 / 4/7 (900-300) / 150 = 4 2003/4/4 Τ0450 450 150 2003/4/7 (900-450) / 150 = 3 2003/4/5 10550 550 137.5 2003/4/7 (900 -550) /137.5=2.5 2003/4/6 10750 750 150 2003/4/7 (900-750) / 150 = 1 2003/4/7 10900 900 150 2003/4/7 (900-900) / 150 = 0 2003/4/8 11050 1050 150 2003/4/8 In this case, currently 値 < Maximum, forecast is today. 2003/4/9 11090 0 Maintenance formula 1-1 · Change amount = [Σ (current 値 (ηΓcurrent 値 (η · υ)] / (period ⑴ a period ⑺)); η = 1 — 7 formula 1-12: Forecast date = date + [(minimum parameter 値 —current 値) / change amount] Formula 1-3: current 値 („wide parameter 値 ⑷ — parameter 値 (丨 astPM)) such as' When the difference is less than or equal to When setting, the maintenance program (S106) needs to be performed immediately. For example, if the preset value is zero, once the parameter detection value reaches the maintenance value, the tool needs to be maintained. If the difference is greater than the preset value, perform the Maintenance date calculation (S104), wherein the maintenance date is predicted by dividing the rate by the diversity or variation and adding it to the current date. As in the listed embodiment, the rate is Divided by the variable 値, the variable 値 indicates the change of the parameter per unit time. The variable 値 can be set at least in one of two ways: 200540668 10108twf.doc / 006. One method includes detecting from the corresponding parameter The data of 变动 is used to calculate the change amount 値, where the detection of parameters 从 is from maintenance Obtained in a tool after a period of time before the period of prediction. Because the current best data is stored data, the period of time is several days. The stored data can be obtained from the parameters obtained from the tools of the above days, and / or Obtained from the parameters obtained from the previous maintenance date forecast. Another method involves calculating the amount of change from the data entered immediately by the user. Another method involves calculating the change from the stored data associated with the data entered immediately by the user. Measure. A statistical method is used for all of the above methods to determine the amount of change. For example, if maintenance is not performed immediately, the maintenance date can be stored in the maintenance schedule. In Example 1, use Equation 1 to 1 to calculate the amount of change. (Column C), using Formula 1-12 to calculate the predicted maintenance date (Column d), and using Formula 1 to 3 to calculate the current 値 (Column B). According to the second embodiment of the present invention, 'Figure 1 is also applied to A method to track multiple parameters to predict the maintenance date. When multiple parameters are applied, each parameter has its own relevant detection 値 'maintenance', presets, and changes The detection 値 is a parameter 从 obtained from the tool. The maintenance 値 is usually a parameter 超过 that is not allowed to exceed the detection 値. The difference between the parameter maintenance 値 and the parameter detection 値 (S100) is calculated from all tracked parameters The preset rate determines the breakpoint of the rates. The comparison (S102) is used to determine whether the number of preset rates is less than or equal to its corresponding preset rate. In the listed embodiment, the preset number is A comparison (S102) is used to determine whether each rate is less than or equal to its preset rate. If any of these rates is less than or equal to its corresponding preset rate, the maintenance program (S106) is executed as soon as possible. If all the differences are larger than their respective preset values, then the maintenance date calculation (S104) is run to predict the maintenance dates based on the differences and variation amounts of the various parameters. Rate is divided by the amount of change 値, where each amount of change 値 represents the change in the corresponding parameter per unit time. 11 200540668 10108twf.doc / 006 The amount of change 値 may be determined by the above settings, but it is used in the context of multiple parameters. According to the present invention, the amount of change 値 is determined by a statistical method that takes into account previous measurement parameters, where the parameter is the current 来自 from the stored data and / or input. Each change amount 値 can be calculated by detecting the corresponding parameters 这些, which are obtained from the tool before S104 calculation of the predicted maintenance date and after a period of time. Just as the currently better data is stored data, the period of time is several days. The stored data can be obtained from the parameters mentioned above after several days:!: And / or from the parameters obtained from the calculation of the previous maintenance date. For the current input 値, the data entered by the user immediately can be used to calculate the change 値. The measured radon may include a combination of previous probes entered by the user and stored data from previous measurements. The amount of change 値 can also be calculated from the stored data combined with the data entered immediately by the user. Once the maintenance date has been calculated, it is best to keep it in the maintenance schedule. The process flow for implementing the TEMS (as shown in FIG. 27) of the total equipment management system of the present invention instead of the manual process for maintenance (as shown in FIG. 26) has several advantages. The first advantage is that other computer information systems combined with TEMS can ensure the consistency of the information and obtain high-quality maintenance. Combined with the equipment's automation system, the system can obtain parameters directly from the equipment itself. This saves the engineer's time, otherwise he must go to the equipment to record the parameters of the equipment; meanwhile, it eliminates the error of manual transmission of data. Combined with the standard operating procedure (SOP) system, this system can ensure the consistency of the PM_, and SOP data, thereby achieving the quality of maintenance. Dynamic forecasting and management of maintenance plans can improve management efficiency and ensure that maintenance is performed. Combining professional methods with automatic collection of equipment parameters, TEMS can provide a solution to dynamically predict and manage maintenance plans, and improve management efficiency. 12 200540668 10108twf.doc / 006 Implementing TEMS can improve equipment productivity. Combined with regular maintenance, irregular maintenance, abnormal maintenance, equipment maintenance, daily maintenance, and the recorded parameters of the equipment, the maintenance management system can monitor and manage the status of the maintenance, thus reducing equipment damage and improving the maximum amount by expanding production Production efficiency of equipment. Maintenance computer management and data storage reduce paper applications and save staff time. TEMS supports the combination of monitoring reports and warning reports and analyzes the characteristics of maintenance data stored in the management system, thus improving the application of maintenance data 値. The whole equipment management system proposed by the present invention can monitor and control the status of all equipment and keep the equipment running well. Due to fierce competition, semiconductor-production equipment is being forced to ensure the scheduling, use, and maintenance of efficient and economical process tools. Thanks to the replacement of TEMS, it is possible to review maintenance activities and quickly query all maintenance history records of all tools in the equipment. It is also possible to quickly copy the management system to the new equipment, in which the management data of the older equipment can be used by the new equipment. Data from older equipment can enable new plants to start up more quickly and efficiently. As shown in Figure 3, the subsystems of TEMS include an equipment management system (EMS), preventive maintenance management (PMM), parts management system (PMS), statistical program control (SPC) system, alarm monitoring system (AMS), Camera Monitor System (CMS), Troubleshooting Management System (TMS), Key Performance Indicator (KPI) system and Cost Analysis System (CAS). As shown in Figure 4, TEMS can also quickly obtain regulatory (01) information and preventive maintenance (PM) item information from other 01 systems (such as manufacturing information-led equipment (FIM)) to ensure the effectiveness of maintenance. Through effective implementation and management of preventive maintenance to ensure the reliability and stability of the equipment, this reduces the occurrence of unexpected errors and thus guarantees the quality of the product. 13 200540668 10108twf.doc / 006 The functions of the equipment management system (EMS) include basic information for managing and setting equipment, such as the name of the equipment, the location of the equipment, and so on. This subsystem also sets equipment-related data, such as setting maintenance tolerances for specific equipment or scheduling / stopping equipment maintenance schedules. The preventive maintenance management (PMM) system has many functions. It manages the maintenance schedule by modifying and displaying the maintenance schedule of the equipment. It also records and displays regular maintenance (as shown in Figure Π), non-scheduled maintenance (as shown in Figure 18), abnormal maintenance, equipment repair, routine maintenance, and out of control behavior program (OCAP). 0PMM is not only suitable for Record or query equipment parameters for unscheduled maintenance, and it is suitable for weekly or monthly reports on equipment maintenance. For example, PM tables can be uploaded or downloaded from a PDA. The equipment specification (01) can also be queried, as it is on the FIM-EIM system. Many tools require regular maintenance. Periodic maintenance has a fixed period of maintenance (such as weekly, monthly, etc.) and extremely limited maintenance. Figure 5 shows the process flow for automatic scheduled periodic maintenance. With maintenance intervals and extremes, the TEMS system can predict the designated part of the equipment that will require the next maintenance. In the listed embodiments, the formula for predicting regular maintenance is as follows: Formula 2: Predicted PM Day = Last PM Day + Pole + User's Criteria Where Pole is defined in the FIM-EIM system and the TEMS system. The poles in the FIM_ EIM system are standard for the entire company. The poles in the TEMS system are stricter than the poles in the FIM-EIM system. User criteria include items that are specific to a given user. For example, if the forecast day points to the weekend, the system will arrange the Friday or Monday as the maintenance day according to the “Holiday setting” of the EQ · setting function. Figure 6 shows a screenshot of the new regular maintenance TEMS feature 200540668 10108twf.doc / 006. If the new equipment is added to the fim-eim (Manufacturing Information Leading Device-Equipment Information Leading Device) system that requires maintenance, the system will send an email to notify the manager to add regular maintenance to the TEMS system and set the start of maintenance date. If the type of equipment is removed from the FIM-EIM (Manufacturing Information Leader-Equipment Information Leader) system that requires maintenance, TEMS will automatically remove the maintenance date. Figure 29 shows the seasonal removal of PM2 from the FIM-EIM system for ADT-13. The TEMS system automatically stops the predicted time schedule in the PM scheduling plan. Figure 7 shows a screenshot of TEMS for regular maintenance modification schedule, and Figure 8 shows the schedule display for regular maintenance. When the management personnel modify or cancel the scheduled maintenance because, for example, 0 is a production requirement, the "Modification Schedule Function" of the TEMS system will automatically detect the modified maintenance date to see if it is within the allowable range, as it is The same figure discussed in Figure 24 determines the level of countersign. Figure 24 shows the “Setting of Countersignature Level” function, which is used to define various countersignature levels (for example, the board manager, the board leader's countersignature, etc.). If a signing event occurs, the system will display the signing level on the assigning-cosigner screen for each function (the assigning-cosigner screen can be found in step 3 in Figure 30) see). Figure 9 shows the equipment configuration of PM schedule. Users can set these settings. The system will use these settings to predict and reschedule the next PM day. The user can temporarily stop the PM schedule and restart the PM (an example of temporarily stopping the PM is illustrated in Figure 30). When the equipment needs time to repair or it needs to stop due to other problems, the management can also stop the scheduled maintenance and restart the scheduled maintenance when the problem is solved. Figure 10 shows a screenshot of TEMS recording maintenance dates. TEMS will automatically connect to the FIM-EIM system to obtain 15 200540668 10108twf.doc / 006 maintenance items for maintenance and recording by the engineer. After the engineer records the maintenance information, TEMS uses the information to determine whether the tool performance is acceptable. If the maintenance results show unacceptable tool performance, TEMS will generate a PM OCAP record for the engineer to notify the user and management to perform a countersignature as discussed in Figure 24. Figure 31 shows the PM table for an execution of a failed project, and the system generated a PM OCAP record for this PM table. TEMS can predict the next maintenance date based on the rules assigned to the system. Figure 32 shows how the system determines the number of days and poles from FIM-EIM and TEMS. Figure 11 is a screenshot of TEMS showing such a preventive maintenance prediction rule. TEMS also predicts the next maintenance date based on the previous maintenance date and cycle. Period data can come from user settings in the TEMS Preventive Maintenance Management (PMM) system, user settings from the FIM-EIM system, or scheduled settings from the FIM-EIM system (see Figure 32). For some tools, however, maintenance cannot be scheduled on a regular basis due to changes in tool use. Therefore, the execution of unscheduled maintenance can be based on whether the monitoring parameters of the equipment exceed its specification (〇1) in the flow chart shown in Figure 12. Figure 33 shows the relationship of irregular projects between the FIM-EIM system and the TEMS system. The monitoring parameters (such as the current frame in Figure 33) can be updated by programs running on the computer or by the user. This 01 is stored in the FIM-EIM system. 0 Figure 13 shows the TEMS setting for the configuration of irregular maintenance. The process of irregular maintenance includes collecting equipment parameters, predicting the date of irregular maintenance, and recording maintenance data. Like regular maintenance execution, TEMS can also manage the list of tool families added or removed from unscheduled equipment maintenance in the FIM-EIM system. Managers can set basic information about irregular maintenance, such as daily changes, the direction of change, and the type of equipment parameter collection. 16 200540668 10108twf.doc / 006 Figure 14 shows the current TEMS implementation for recording and displaying irregular maintenance parameters. If the collection type is set to "Automatic", the TEMS connected to the device can automatically collect and save the parameters of the device by running the program every day. For other collection types, the user can manually record or use a personal digital assistant (PDA) to record the current parameters of the device, calculate irregular maintenance, and update the TEMS-PMM database. The input parameters can have three types of current ones: 1) cumulative types, in which the device parameters cannot be reset to zero; in this case, all historical records of the device parameters are collected in the database 'currently' in Calculated and stored in the database. (Please refer to Example 1) At present 値 = parameter 値 (last PM) -parameter 値 ㈣rrent). 2) The type of conversion, in which the current parameters of the equipment parameters must be converted by pre-calculation; in this type, the column data collected from the equipment must be calculated with the engineering data. For example, you can change the temperature from. F to ° C ° Currently 値 = device parameter 设备 multiplied by engineering 値. 3) The reset type, in which the current parameters of the equipment must be reset to zero. In this version, the machine parameters must be reset to zero after performing maintenance. Currently 値 = 値 of the device's parameters. If the collection type is "Automatic", the program for automatically collecting the device parameters will convert the actual 値 to TEMS according to the current 値 type described above. Figure 15 shows a screenshot of TEMS performed for the prediction rules for irregular maintenance. The forecast of each unscheduled maintenance date is updated in the FIM-EIM system by using the current parameters of the equipment parameters to calculate daily maintenance program updates, and the maintenance date and period are calculated based on the upper and lower specifications of the parameter definition. When the data tends to the direction of parameter change, for example, the parameter increases every day, and the parameter decreases the next day, maintenance has been performed, and the current parameter of the equipment has been reset. Figure 16 shows the TEMS function that displays the time schedule for irregular maintenance. TEMS reviews the daily parameters and finds out the direction of change of the parameters between the two periods closest to the current time 17 200540668 10108twf.doc / 006. TEMS will be automatically connected to the FIM-EIM system, and maintenance items will be maintained and recorded by the engineer. Similar to regular maintenance, TEMS uses maintenance information recorded by engineers to determine whether tool performance is acceptable. If the maintenance results show unacceptable tool performance, TEMS will generate a PM OCAP (Preventive Maintenance Loss of Control Procedure) record, which is used by engineers to notify users and management to perform a countersign. TEMS then predicts the next maintenance date based on the rules assigned to the system. Other maintenance types include abnormal maintenance, maintenance, daily maintenance, and PMOCAP maintenance. Figure 19 shows a screenshot of a TEMS example from an abnormal maintenance record. When the equipment is out of normal condition, perform abnormal maintenance. This is the engineer needs to repair the equipment by the following process and recorded maintenance date defined in the FIM-EIM system. Figure 22 shows an example of a TEMS screen shot for repair maintenance records. If the standard maintenance procedure described below does not solve the problem, the engineer must record the entire maintenance process and describe the problems encountered in the revised maintenance record. The revised maintenance data is stored for future reference. Figure 20 shows a screenshot of the TEMS implementation of the daily maintenance record. Routine maintenance is different from regular maintenance, because daily maintenance needs to be performed daily, and | regular maintenance is extremely effective for one or more days to the extent that maintenance is possible. In _ one maintenance record, daily maintenance combines all items for all equipment in a particular department. Figure 21 shows a screenshot of the TEMS execution of the downloaded maintenance project file. Daily maintenance records can be accessed by downloading to a PDA or a web-based interface. After the record is completed, the information will be sent to the management for countersigning. Figure 23 shows the execution of the Out of Control Procedure (OCAP). If the result of any preventive maintenance fails, TEMS will automatically create a new PM's OCAP and store the failed project in the PM's OCAP. TEMS notifies the engineer of the maintenance failure 18 200540668 10108twf.doc / 006 The equipment of the project and records any corrective action data into PM's OCAP. TEMS also includes a countersign process to ensure that the management confirms all actions. In a preferred embodiment, each activity has a signature process in TEMS. Users can sign documents and query the document's signature history. Figure 24 shows the implementation of the TEMS window for the level of consent of the signatory. In order to meet the needs of each factory, TEMS supports the setting up of a signing process based on user needs. After setting up the process of the signing process, the system will ask the user to set the appropriate signer in the process of the subsequent signing process. TEMS generates a series of possible signers from historical records, and the historical records are unique to each user's previous signatories and requesters. The user can also save the set time of each selected signatory. Figure 25 shows a screen shot of the TEMS execution being notified to the user in the login system while another user is waiting for his or her consent. Every time a user logs in to TEMS, TEMS will notify any user who will sign the document status through a friendly operation interface. In addition, the countersigned subsystem can track and query the history of PM tables. TEMS can also run daily / weekly / monthly reports in a PC server and send e-mails providing summary information to management. The program will also send a notification to the appropriate management personnel when the equipment maintenance date is slow or when the maintenance date will soon expire. Information on maintenance status is also sent to management. When the signatory spends too much time signing the documents, the information is also sent to notify the signatory. Another function of TEMS supports two types of files for downloadable maintenance items: 1) routine items for maintenance and 2) parameters for irregular maintenance. The engineer uses this function to download the required maintenance items to the PDA to maintain and record the data 'and upload the maintenance data to the database of the web server. In addition, the maintenance form and maintenance items are described in 19 200540668 10108twf.doc / 006 FIM-EIM system. The engineer must also track these maintenance items and record the results. Fig. 2 is a diagram with standard components showing an apparatus for predicting a maintenance date according to a third embodiment of the present invention. The instrument consists of a connection unit 206, a database 204, a FIM-EIM (manufacturing information master device-equipment information master device) unit 202, and a controller 200, which can be set to be connected to at least one tool. In order to obtain a parameter detection probe, the connection unit 206 connects a tool to the instrument. The parameter probes can also include most parameter probes. In this case, the connection unit 206 will allow the majority of probes to be obtained from the tool. At the same time, the at least one tool may be composed of a plurality of tools. In the enumerated embodiment, the connection unit 206 is an automatic connection device of the system, and the passed device parameters can be automatically collected and stored in the TEMS system shown in FIG. 28. The database 204 stores a change amount 表示 indicating a change in the parameter of the tool per unit time. When many parameters are monitored, the amount of change 値 may consist of a majority of changes 其中, where each parameter corresponds to its own amount of change 以及 and the majority of changes 値 are stored in the database 204. The database 204 also stores probes for at least one parameter of the tool. If there is only one parameter for maintenance tracking, the database 204 will save a part or all of the probes for that parameter, where this parameter has a recorded history for the tool. If multiple parameters are used to measure maintenance, database 204 will include a history of probes for tracked parameters. The database 204 may also contain presets for each parameter. Maintenance parameters for each parameter are also stored in the database 204. The controller 200 predicts the maintenance date based on the amount of change 値 in the database 204 and the difference between the detection 値 and maintenance 中 described in the example in combination with FIG. 1 as the tool. For example, if maintenance 値 minus detection 値 is less than or equal to the preset 値, tool 200540668 10108twf.doc / 006 requires maintenance. When most parameters are tracked for maintenance purposes, rates may include most rates. The controller 200 uses the rating or majority rating to predict the maintenance date. For this process, the controller 200 obtains the probes from the connection unit 206 and the stored probes from the database 204 to calculate the maintenance date. The controller 200 also acquires the new sound card from the connection unit 206 and stores it in the database 204. The FIM-EIM (Manufacturing Information Leading Device-Equipment Information Leading Device) unit 202 provides several rules for defining maintenance dates and tables, such as preset maintenance dates and maintenance tables. The FIM-EIM unit 202 has a tree-like subsystem, which includes an equipment information system, a preventive maintenance specification (PM 00), and a PM table system. The FIM-EIM unit 202 is connected to the controller 200 to store the maintenance date in the maintenance schedule. The FIM-EIM unit 202 can also find the contradictory schedule of the predicted date received from the controller 200, and try to effectively arrange the maintenance date and frequency. The present invention uses statistical methods to predict changes that occur on the tool based on known parameters. Therefore, the maintenance date can be predicted and the maintenance schedule can be set accordingly. In summary, those skilled in the art will be able to understand that the method of the present invention can easily maintain the formation of a schedule, especially the formation of a maintenance schedule for a semiconductor production equipment. The above embodiments have been provided by examples, and the present invention is not limited to these examples. In view of the foregoing description, to those skilled in the art, various changes and modifications to a certain extent of the disclosed embodiments are not mutually exclusive. Moreover, in view of the disclosure herein, other combinations, omissions, substitutions, and modifications will be apparent to those skilled in the art. Accordingly, the present invention is not limited only to the disclosed embodiments, but is defined by the scope of the related attached patent application. [Brief description of the drawings] 21 200540668 10108twf.doc / 006 Fig. 1 is a simplified flowchart of a method for predicting a maintenance date according to the present invention. Fig. 2 is a diagram of standard components of an instrument for predicting a maintenance date according to the present invention. Figure 3 is a diagram of the standard components of a total equipment management system (TEMS) structure of the present invention. Fig. 4 is a diagram showing the connection between the Manufacturing Information Leading Device (FIM) system and TEMS. Figure 5 shows the processing flow for automatic scheduled maintenance by TEMS. Figure 6 is a screenshot of the TEMS function with the new regular maintenance. Figure 7 is a screenshot of the TEMS function with the regular maintenance schedule modified. Figure 8 is a screen shot of TEMS implementation scheduled for regular maintenance. Figure 9 shows the equipment configuration for PM scheduling. Figure 10 is a screen shot of TEMS performed with the maintenance date recorded. Figure 11 is a screen shot of TEMS implementation showing the forecast rules for regular maintenance. Fig. 12 is a process flow for automatically predicting irregular maintenance time by TEMS. Figure 13 is a screen shot of TEMS performed with an unscheduled maintenance configuration. Figure I4 is a screen shot of the current TEMS implementation that records and displays parameters for irregular maintenance. Figure 15 is a screen shot of TEMS performed by irregular maintenance forecast rules. Figure 16 is a screenshot of the TEMS performed by the scheduler showing irregular maintenance 22 200540668 10108twf.doc / 006. Figure 17 is a screen shot of TEMS performed by a regular maintenance system that manages maintenance records. Figure 18 is a screen shot of TEMS performed by the irregular maintenance system that manages maintenance records. Figure 19 is a screenshot of a TEMS example of an abnormal maintenance record. Figure 20 is a screen shot of TEMS performed on a daily maintenance record. Figure 21 is a screen shot of TEMS execution for downloading the maintenance project file. Figure 22 is a screen shot of the TEMS repair repair record. Figure 23 is a screen shot of the TEMS implementation of the Out of Control Behavior Program (OCAP). Figure 24 is a screenshot of the TEMS implementation of the various levels of the agreement. Figure 25 is a screen shot of TEMS performed by a user in the notification system logging on to the Internet while other users are waiting for his or her consent. FIG. 26 is a process flow of manual management of a conventional maintenance execution. Fig. 27 is a process flow for automatically managing maintenance by TEMS. Figure 28 shows the structure of the TEMS system. Figure 29 is a screen shot of the connection between FIM-EIM and TEMS during regular maintenance. Figure 30 shows the complete process flow for temporarily stopping a maintenance in the TEMS system. Figure 31 shows the relationship between the PM table and the PM OCAP table. Figure 32 shows how to determine the number of days and poles of the maintenance date from the FIM-EIM system and the TEMS system. Figure 33 shows the connection between FIM-EIM and TEMS during unscheduled maintenance. 23 200540668 10108twf.doc / 006 Screenshot taken. [Illustration of diagrams] S100, S102, S104, S106 ··· Step 200: Controller 202: Manufacturing Information Leading Device-Equipment Information Leading Device 204: Database 206 ·· Connection Unit 24