200533462 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於例如使用線切割放電加工機來加工工件 時’用來保持工件並且調整其姿勢的工件保持用虎鉗，更 詳言之是關於一種改良成可對所保持的工件之姿勢更正確 地進行微調的工件保持用虎鉗。 Φ 【先前技術】 過去，使用線切割放電加工機來加工工件時是使用一 種固定在工件台上的工件保持用虎鉗來保持工件並且調整 其姿勢（例如，參照日本專利公開公報昭和58年第40228 號、以及曰本新型公告公報平成7年第1 3 929號）。 若要針對這種工件保持用虎鉗的構造及功能，參照第 1 1圖至第1 5圖加以槪略說明，則工件保持用虎鉗1具 有：利用螺栓固定在未圖示之公件台上的固定板2 ;以及 Φ 相對於此固定板2保持些微的間隙並且彼此平行而延伸， 而且相對於固定板2支持成可自由傾動狀態的基板3。 基板3具有：配設在其一端側的工件把持用的固定顎 4 ;與此固定顎4相對向，並且在基板3的滑動部3 a嵌合 成可自由滑動狀態的可動顎5 ;可定位而固定在滑動部3 a 的母螺紋構件6 ;以及螺合在此母螺紋構件6的螺桿7。 因此’藉由在配合所要保持的工件的尺寸使母螺紋構 件6定位而固定之後，在固定顎4與可動顎5之間配設工 件，並且鎖緊螺桿7，可穩固地保持工件。 200533462 (2) 此外，藉由在從基板3的上面貫穿的大徑插通孔3 b 以及貫設在固定板2的小徑插通孔2a內插通螺栓，並將 此螺栓螺合在工件台，可將固定板2固定在工件台上。 另一方面，如第11圖及第12圖所示，用來將基板3 相對於固定板2支持成可自由傾動狀態的傾動支持機構 1 〇是配設在固定顎4的附近。 此傾動支持機構1 〇是如第1 3圖及第1 4圖所示具 春 有：從固定板2的下面壓入的螺帽構件1 1 ;在貫設於基 板3的貫穿孔3 c內從上方插入而與螺帽構件n螺合的螺 栓構件12，以及介裝在與插入孔3c同軸凹設在基板3之 上面的魚眼孔3 d的底面與螺栓構件1 2的頭部1 2 a之間的 複數片彈簧墊圏1 3。 而且’螺帽構件1 1之凸球面狀的上面丨丨a以及與插 入孔3 c同軸凹設在基板3之下面的凹球面狀的滑動面3 e 是抵接成可自由滑動的狀態。 φ 因此，基板3不會因爲彈簧墊圈13的向下彈力而浮 起，而可相對於固定板2傾動。 另一方面’用來調整基板3相對於固定板2之X軸 周圍的傾動角度的X軸周圍傾角調整機構2()是如第n 圖及第1 2圖所示，配設在相對於固定顎4比傾動支持機 構1 〇又更朝Y軸方向離開的位置。 此X軸周圍傾角調整機構20是如第1 3圖所示具 有：在貫設於基板3的插入孔3 f內從上方插入而與貫設 在固定板2的母螺紋2l3螺合的螺栓構件2 1 ;以及相對於 -6- 200533462 (3) 此螺栓構件21於X軸方向對稱配設在固定板2與基板3 之間的一對螺旋彈簧2 2、2 3。 而且，螺栓構件2 1之頭部2 1 a的下面是抵接於與插 入孔3 f同軸凹設在基板3之上面的魚眼孔3 g的底面。 因此，鬆開螺栓構件2 1時，基板3會因爲螺旋彈簧 22、23的向上彈力而相對於固定板2朝上方位移，基板3 會在X軸周圍朝順時針方向傾動。 φ 相對於此，鎖緊螺栓構件21時，基板3會抵抗螺旋 彈簧22、23的向上彈力而被推動至下方，基板3會在X 軸周圍朝逆時針方向傾動。 亦即’藉由調整X軸周圍傾角調整機構20之螺栓構 件2 1的鎖緊量，可對基板3相對於固定板2之X軸周圍 的傾動角度進行微調。 同樣地’用來調整基板3相對於固定板2之Y軸周 圍的傾動角度的Y軸周圍傾角調整機構3 0是如第1 1圖 φ 及第1 2圖所示，配設在比傾動支持機構10更朝X軸方 向離開的位置。 此Y軸周圍傾角調整機構3 0是如第14圖所示具 有：在貫設於基板3的插入孔3 h內從上方插入而與貫設 在固定板2的母螺紋2 b螺合的螺栓構件3 1 ;以及相對於 此螺栓構件3 1於X軸方向對稱配設在固定板2與基板3 之間的一對螺旋彈簧3 2、3 3。 而且’螺栓構件3 1之頭部3 1 a的下面是抵接於與插 入孔3 h同軸凹設在基板3之上面的魚眼孔3丨的底面。 200533462 (4) 因此，鬆開螺栓構件3 1時’基板3會因爲螺旋彈簧 3 2、3 3的向上彈力而相對於固定板2朝上方位移，基板3 會在Y軸周圍朝逆時針方向傾動。 相對於此，鎖緊螺栓構件3 1時，基板3會抵抗螺旋 彈簧3 2、3 3的向上彈力而被推動至下方，基板3會在Y 軸周圍朝順時針方向傾動。 亦即，藉由調整Y軸周圍傾角調整機構3 0之螺栓構 φ 件3 1的鎖緊量，可對基板3相對於固定板2之Y軸周圍 的傾動角度進行微調。 再者，用來調整基板3相對於固定板2之Z軸周圍的 傾動角度的Z軸周圍傾角調整機構40是如第1 1圖及第 1 2圖所示，配設在從母螺紋構件6朝Y軸方向離開的位 置。 此Z軸周圍傾角調整機構4 0是如第1 5圖所示具有： 插入在基板3之下面所凹設的圓形孔3j內而可在Z軸周 # 圍自由轉動的中空圓柱狀保持器4 1 ;嵌合在此保持器4 1 內而可在Y軸周圍自由轉動的圓柱狀母螺紋構件42 ;螺 合在此母螺紋構件42並且朝γ軸方向延伸，然後使其球 狀頭部4 3 a抵接於凹設在固定板2之前面的凹球面2c的 螺栓構件43 ;以及與此螺栓構件43同軸收容在基板3之 魚眼孔2 d內的複數片彈簧墊圈4 4。 因此，鎖緊螺栓構件4 3時，基板3會抵抗彈簧墊圈 4 4的推彈力而朝γ軸方向的前方位移，基板3會朝z軸 周圍的順時針方向傾動。 -8- 200533462 (5) 相對於此，鬆開螺栓構件4 3時，基板3會因爲彈簧 墊圈44而被推動至Y軸方向的後方，基板3會在z軸周 圍朝逆時針方向傾動。 亦即，藉由調整Z軸周圍傾角調整機構4 0之螺栓構 件43的鎖緊量，可對基板3相對於固定板2之z軸周圍 的傾動角度進行微調。 然而，上述習知工件保持用虎鉗1當中的X軸周圍 ^ 傾角調整機構2 〇是使螺栓構件2 1之頭部2 1 a的下面直接 與基板3之魚眼孔3 g的底面接觸的構造。 因此，如第1 3圖（b)所示，當基板3相對於固定板2 傾動時，如第1 6圖放大而顯示，只有螺栓構件2 1之頭部 2 1 a的下面的角部2 1 b會抵接於魚眼孔3 g的底面。 因此，爲了調整基板3相對於固定板2之X軸周圍 的傾動角度而鎖緊螺栓構件21時，會因爲作用於螺栓構 件2 1的頭部2 1 a與魚眼孔3 g的底面之間的摩擦力而產生 φ 基板3相對於固定板2之Z軸周圍的傾動，因此有時必須 使用Z軸周圍傾角調整機構4 0來進行Z軸周圍之傾動角 > 度的再調整。 同樣地，習知工件保持用虎鉗1當中的γ軸周圍傾 角調整機構3 0是使螺栓構件3 1之頭部a的下面直接與基 板3之魚眼孔3 i的底面接觸的構造。 因此，如第14圖（b)所示，當基板3相對於固定板2 傾動時，只有螺栓構件3 1之頭部3 1 a的下面的角部3 1 b 會抵接於魚眼孔3 i的底面。 - 9- 200533462 (6) 因此，爲了調整基板3相對於g 的傾動角度而鎖緊螺栓構件21時， 件3 1的頭部3 1 a與魚眼孔3 i的底面 基板3相對於固定板2之Z軸周圍的 使用Z軸周圍傾角調整機構40來進 度的再調整。 φ 【發明內容】 因此，本發明之目的在於解決上 問題點，並且提供一種不會發生基板 周圍的傾動，而可正確對基板相對於 及γ軸周圍的傾動進行微調的工件保 達成上述目的之本發明第1樣態 用來保持並固定要進行線切割之工件 有： • 固定在工件台的固定板； 配設成相對於前述固定板保持間 板； 相對於前述固定板而將前述基板 自由傾動的支持機構；以及 調整相對於前述固定板的前述基 機構。 而且，前述傾角調整機構具有： 朝向從前述固定板離開的方向彈 ]定板2之Y軸周圍 會因爲作用於螺栓構 之間的摩擦力而產生 傾動，因此有時必須 行Z軸周圍之傾動角 述習知技術所具有的 相對於固定板之Z軸 固定板之X軸周圍 持用虎銷。 的工件保持用虎鉗是 的虎鉗，其特徵爲具 隙並且平行延伸的基 支持成可在三軸周圍 板之傾角的傾角調整 推前述基板的彈推手 -10- 200533462 (7) 段； 具有螺合在前述固定板的螺紋、鎖入前述螺紋時會抵 抗前述彈推手段的推彈力而推動前述基板的卡合面，使前 述基板朝前述固定板側位移的卡合部、以及前述卡合部當 中與前述卡合面相對向並且延伸的相對向面的螺絲構件； 在前述相對向面及前述卡合面的任一方之側形成其中 心位於前述螺紋之軸線上的球面的球面形成手段； • 介裝在前述相對向面及前述卡合面的任另一方之側與 前述球面之間的複數個轉動體；以及 保持前述複數個轉動體，俾使前述複數個轉動體位於 朝前述螺紋之軸線周圍延伸的圓上的轉動體保持手段。 亦即，第1樣態的工件保持用虎鉗由於是在螺絲構件 的相對向面與基板的卡合面之間介裝有複數個轉動體，因 此爲了調整基板相對於固定板的傾角而使螺絲構件旋轉 時’可使螺絲構件與基板之間所產生的摩擦大幅減少。 φ 而且，藉由組合螺絲構件的相對向面及基板的卡合面 的任一方之側所形成的球面以及任另一方之側，可使複數 個轉動體位移至由螺絲構件的相對向面與基板的卡合面之 間的相對角度所決定的預定位置，因此複數個轉動體全部 都會經常與球面及相對向面或卡合面接觸，而不會像習知 工件保持用虎鉗當中的螺絲構件一樣，只有其相對向面的 一點抵接於基板的卡合面，螺絲構件推動基板使其朝固定 板側位移的力會分散傳達至複數個部位。 因此，即使爲了在與固定板之上面平行而延伸的軸線 -11 - 200533462 (8) (X軸、Y軸）周圍調整基板相對於固定板的傾角而鎖緊螺 絲構件，也可藉由螺絲構件與基板之間所產生的摩擦力來 防止基板在相對於固定板之上面垂直而延伸的軸線（Ζ軸） 周圍轉動，因此可極爲正確地對基板相對於固定板的傾角 進行微調。 而且’本發明第2樣態的工件保持用虎鉗是在第1樣 態的工件保持用虎鉗當中， φ 前述球面是形成在前述螺絲構件的相對向面， 前述轉動體保持手段是具有相對於前述螺紋的軸線位 於同軸時，與前述軸線同軸而朝圓周方向延伸的轉動凹 槽’而且在前述卡合面上可相對於前述螺紋的軸線朝半徑 方向位移之於前述軸線的周圍延伸成環狀的轉動凹槽形成 構件， 前述轉動體是在前述球面上及前述轉動凹槽上轉動。 亦即’在第2樣態的工件保持用虎鉗當中，當基板相 # 對於固定板傾斜時，延伸成環狀的轉動凹槽形成構件會由 順著形成在螺絲構件之相對向面的球面的轉動體所引導而 在基板的卡合面上位移，因此所有的轉動體都會經常與球 面及轉動凹槽接觸。 而且’本發明第3樣態的工件保持用虎鉗是在第1樣 態的工件保持用虎鉗當中， 前述球面是形成在前述螺絲構件的相對向面， 前述轉動體保持手段是相對於前述螺紋的軸線位於同 軸時’在與前述軸線同軸並且垂直朝圓周方向延伸的一個 -12- 200533462 (9) 圓上’等間隔地朝圓周方向保持前述複數個轉動體，而且 相對於前述螺紋的軸線可朝半徑方向位移之於前述軸線的 周圍延伸成環狀的轉動體保持構件， 前述轉動體是在前述球面上及前述卡合面上轉動。 亦即，第3樣態的工件保持用虎鉗是將第1樣態之工 件保持用虎鉗當中的轉動凹槽形成構件置換成轉動體保持 構件。 φ 因此，當基板相對於固定板傾斜時，延伸成環狀的轉 動體保持構件會由順著形成在螺絲構件之相對向面的球面 的轉動體所引導，相對於螺絲構件的軸線朝半徑方向位 移，因此所有的轉動體都會經常與球面及卡合面接觸。 而且，本發明第4樣態的工件保持用虎鉗是在第1樣 態的工件保持用虎鉗當中， 前述球面是形成在可在前述卡合面上滑動而相對於前 述螺紋的軸線朝半徑方向位移之於前述軸線周圍延伸成環 • 狀的球面形成構件， 前述轉動體保持手段是相對於前述螺紋的軸線同軸並 且垂直朝圓周方向延伸之凹設在前述相對向面的轉動凹 槽， 前述轉動體是在前述球面上及前述轉動凹槽上轉動。 亦即’在第4樣態的工件保持用虎鉗當中，當基板相 對於固定板傾斜時，延伸成環狀的球面形成構件會順著保 持在凹設於螺絲構件之相對向面的轉動凹槽的轉動體而在 基板的卡合面上位移，因此所有的轉動體會經常與球面及 -13 - 200533462 (10) 轉動凹槽接觸。 而且，本發明第5樣態的工件保持用虎鉗是在第1樣 態的工件保持用虎鉗當中， 前述球面是形成在可在前述卡合面上滑動而相對於前 述螺紋的軸線朝半徑方向位移之於前述軸線周圍延伸成環 狀的球面形成構件， 前述轉動體保持手段是相對於前述螺紋的軸線位於同 φ 軸時，在與前述軸線同軸並且垂直朝圓周方向延伸的一個 圓上’等間隔地朝圓周方向保持前述複數個轉動體，而且 外嵌於前述螺紋而無法朝半徑方向位移之於前述軸線周圍 延伸成環狀的轉動體保持構件， 前述轉動體是在前述球面上及前述相對向面上轉動。 亦即’第5樣態的工件保持用虎鉗是在第4樣態的工 件保持用虎鉗當中，將凹設在螺絲構件之相對向面的轉動 凹槽置換成轉動體保持構件。 • 因此，當基板相對於固定板傾斜時，延伸成環狀的球 面形成構件會順著保持在外嵌於螺絲構件的螺紋而無法朝 半徑方線位移之延伸成環狀的轉動體保持構件的轉動體在 '基板的卡合面上位移，因此所有的轉動體都會經常與球面 及卡合面接觸。 而且，本發明第6樣態的工件保持用虎鉗當中，前述 球面爲朝向螺絲構件之螺紋突出的凸球面。 而且，本發明第7樣態的工件保持用虎鉗當中，前述 球面爲朝向螺絲構件之螺紋凹入的凹球面。 -14- 200533462 (11) 此外，複數個轉動體最好是具有相等外徑的球體。 再者，爲了將在轉動凹槽上轉動的轉動體等間隔朝圓 周方向並列，亦可並用轉動體保持構件。 【實施方式】 以下，參照第1圖至第10圖，針對本發明之工件保 持用虎鉗的各實施形態加以詳細說明。 此外，以下的說明當中，在同一部分是使用同一符號 而省略重複的說明，同時將與固定板之上面平行，且可動 顎滑動的方向稱爲X軸方向，將與固定板之上面平行， 並且垂直於X軸的方向稱爲Y軸方向，將垂直於固定板 之上面的方向稱爲Z軸方向。 第1實施形態 首先，參照第1圖至第4圖，針對第1實施形態的工 φ 件保持用虎鉗加以詳細說明。 第1圖所示之第1實施形態的工件保持用虎鉗1 00與 第1 1圖所示的習知工件保持用虎鉗1同樣具有：利用螺 栓固定在未圖示之工件台上的固定板2 ;以及相對於此固 定板2保持些微的間隙並且彼此平行而延伸，而且相對於 固定板2支持成可自由傾動狀態的基板3。 基板3具有：配設在其一端側的工件把持用的固定顎 4 ;與此固定顎4相對向，並且在基板3的滑動部3 a嵌合 成可自由滑動狀態的可動顎5 ;可定位而固定在滑動部3 a -15- 200533462 (12) 的母螺紋構件6 ;以及螺合在此母螺紋構件6的螺桿7。 因此’藉由在配合所要保持的工件的尺寸使母螺紋構 件6定位而固定之後，在固定顎4與可動顎5之間配設工 件，並且鎖緊螺桿7，可穩固地保持工件。 而且，如第1圖所示，用來將基板3相對於固定板2 支持成可自由傾動狀態的傾動支持機構1 〇是配設在固定 顎4的附近。 φ 此傾動支持機構1 0是如第2圖及第3圖所示具有： 從固定板2的下面壓入的螺帽構件n ;在貫設於基板3 的貫穿孔3 c內從上方插入而與螺帽構件n螺合的螺栓構 件12;以及介裝在與插入孔3c同軸凹設在基板3之上面 的魚眼孔3d的底面與螺栓構件12的頭部12a之間的複數 片彈簧墊圈1 3。 而且，螺帽構件1 1之凸球面狀的上面1 1 a以及與插 入孔3 c同軸凹設在基板3之下面的凹球面狀的滑動面3 e φ 是球面嵌合成可自由滑動的狀態。 因此，基板3不會因爲彈簧墊圈1 3的向下彈力而從 螺帽構件1 1浮起，而可相對於固定板2傾動。 另外，用來調整基板3相對於固定板2之X軸周圍 的傾動角度的X軸周圍傾角調整機構5 0X是如第1圖所 示，配設在相對於固定顎4比傾動支持機構1 0又更朝Y 軸方向離開的位置。 同樣地，用來調整基板3相對於固定板2之Y軸周 圍的傾動角度的Y軸周圍傾角調整機構50Y是如第1圖 -16- 200533462 (13) 所示’配設在比傾動支持機構i 〇更朝X軸方向離開的位 置。 此外，這些X軸周圍傾角調整機構5 0X及Y軸周圍 傾角調整機構 5 0Y的構相同，因此以下的說明並不在參 照符號附上X及Y而加以說明。 第2圖至第4圖所示的傾角調整機構5 0是對應於申 請專利範圍第2項，具有朝向從固定板2離開的方向彈推 φ 基板3的一對螺旋彈簧（彈推手段）54、55。 傾角調整機構5 〇具有螺絲構件5丨，該螺絲構件5 ! 具有：螺合在固定板2的螺紋5 1 a ;鎖入此螺紋5 1 a時會 抵抗一對螺旋彈簧5 4、5 5的推彈力而推動基板3的卡合 面3 k，使其朝固定板2側位移的卡合部5 1 b ;以及此卡合 部5 1 b當中與卡合面3 k相對向的相對向面5 1 c。 而且，在螺絲構件5 1的相對向面5 1 c凹設有其中心 C位於螺紋5 1 a的軸線C 1上，而且其半徑爲R之於螺紋 φ 5 1 a側爲凹狀的球面5 1 d。 傾角調整機構5 0具有在軸線C 1周圍延伸成環狀的轉 β 動凹槽形成構件5 2，該轉動凹槽形成構件5 2在卡合面3 k •上具有與螺紋5 1 a的軸線C 1同軸時，與軸線C1同軸並 且垂直朝圓周方向延伸的轉動凹槽52a，而且在卡合面3k 上可相對於螺紋5 1 a的軸線朝半徑方向位移。 而且，傾角調整機構5 0具有介裝在凹球面5 1 d與轉 動凹槽52a之間共計12個的鋼製滾珠（轉動體）53。此 外，這些滾珠5 3彼此極爲接近，而且在朝圓周方向延伸 -17- 200533462 (14) 的轉動凹槽5 2 a上大致等間隔地朝圓周方向並列。 再者’在螺絲構件5 1的螺紋5 1 a外嵌有彈簧擋圏 (circlip ) 56，以免從固定板2卸下螺絲構件51時，延 伸成環狀的轉動凹槽形成構件52及滾珠53從螺絲構件 5 1脫落。 使上述螺絲構件5 1旋轉而將其螺紋5 1 a鎖入固定板 2的母螺紋2 b時’鋼製滾珠5 3會在凹球面5 1 d上及轉動 φ 凹槽52a上轉動，而且其卡合部51b會朝固定板2側推動 基板3 ’因此可使基板3例如在X軸周圍朝逆時針方向傾 動。 相對於此，使螺絲構件5 1旋轉而鬆開其螺紋5 1 a 時，基板3會因爲一對螺旋彈簧54、55的推彈力而從固 定板2離開，因此可使基板3例如在X軸周圍朝順時針 方向傾動。 此時，如第4圖（b)所示，當基板3相對於固定板2 # 傾斜時，延伸成環狀的轉動凹槽形成構件52會由順著凹 設在螺絲構件5 1之相對向面5 1 c的凹球面5 1 d的滾珠5 3 引導，在基板3的卡合面3k上位移。 > 若要更詳細說明，則延伸成環狀的轉動凹槽形成構件 5 2的軸線會與相對於卡合面3 k垂直延伸並且通過凹球面 5 1 d之中心C的直線S 1同軸。 因此，即使基板3相對於固定板2傾斜，所有的滾珠 5 3還是會繼續經常與凹球面5 1 d及轉動凹槽5 2 a接觸。 亦即，在本第1實施形態的工件保持用虎鉗100當 -18- 200533462 (15) 中，爲了調整基板3相對於固定板2的傾角而使螺絲構件 5 1旋轉時，所有的滾珠5 3會經常在凹球面5 1 d及轉動凹 槽5 2 a上轉動，因此可使螺絲構件5 1與基板3之間所產 生的摩擦大幅減少。 而且，即使基板3相對於固定板2傾斜，所有的滾珠 5 3還是會繼續經常與凹球面5 1 d及轉動凹槽5 2 a接觸， 因此不會像習知工件保持用虎鉗1當中的螺絲構件21 — φ 樣，只有其相對向面2 1 a的一點2 1 b抵接於基板3的卡合 面3 k，螺絲構件5 1推動基板3使其朝固定板2側位移的 力會分散傳達至複數個部位。 因此，即使爲了調整基板3相對於固定板2之X軸 或Y軸周圍的傾角而鎖緊螺絲構件5 1，也可藉由螺絲構 件5 1與基板3之間所產生的摩擦力來防止基板3朝Z軸 周圍轉動，因此可極爲正確地對基板3相對於固定板2的 傾角進行微調。 第2實施形態 ’ 接下來，參照第5圖，針對對應於申請專利範圍第3 - 項之第2實施形態的工件保持用虎鉗的傾角調整機構加以 詳細說明。 本第2實施形態當中的傾角調整機構60是將上述第 1實施形態之傾角調整機構5 0當中的轉動凹槽形成構件 5 2置換成轉動體保持構件6 3。 若要具體加以說明，則此傾角調整機構6 0具有螺絲 •19- 200533462 (16) 構件6 1 ’該螺絲構件61具有：螺合在固定板2的螺紋 6 1 a ;鎖入此螺紋6 1 a時會抵抗未圖示之一對螺旋彈簧的 推彈力而推動基板3的卡合面3 k，使基板3朝固定板2 側位移的卡合部6 1 b ;以及此卡合部6 1 b當中與卡合面3 k 相對向的相對向面6 1 c。 而且，在螺絲構件6 1的相對向面6 1 c凹設有其中心 C位於螺紋6 1 b的軸線C 1上，而且其半徑爲R之於螺紋 φ 6 1 a側爲凹狀的球面6 1 d。 而且，在螺絲構件61的凹球面61 d與基板3的卡合 面3k之間介裝有共計12個的鋼製滾珠62。這些滾珠62 是保持在由合成樹脂製，並且延伸成環狀的轉動體保持構 件6 3的各凹洞內，然後等間隔地朝圓周方向並列。 此外，此轉動體保持構件6 3的內徑比螺絲構件6 1之 螺紋（軸部）6 1 a的外徑大，而可相對於螺紋6〗a的軸線c i 朝半徑方向位移。 φ 因此，如第5圖（a)所示當基板3相對於固定板2平 行延伸時，保持在延伸成環狀的轉動體保持構件6 3的滾 珠6 2會位在相對於螺紋6 1 a的軸線c 1垂直延伸的平面上 與軸線C 1同軸的一個圓上。 相對於此，如第5圖（b)所示當基板3相對於固定板2 傾斜時，延伸成環狀的轉動體保持構件6 3會由順著螺絲 構件6 1之凹球面6 1 d的滾珠6 2所引導，而在基板3的卡 合面3 k上相對於螺紋6 1 a的軸線c 1朝半徑方向位移。 若要更詳細說明’則延伸成環狀的轉動體保持構件 -20 - 200533462 (17) 6 3的軸線是與相對於卡合面3 k垂直延伸並且通過凹球面 6 1 d之中心C的直線S 1同軸。 因此，即使基板3相對於固定板2傾斜，所有的滾珠 62還是會繼續經常與凹球面61d及卡合面3k接觸。 亦即，在本第2實施形態之工件保持用虎鉗的傾角調 整機構60當中，爲了調整基板3相對於固定板2之傾角 而使螺絲構件61旋轉時，所有的滾珠6 2都會在凹球面 φ 6 1 d及卡合面3 k上轉動，因此可使螺絲構件6 1與基板3 之間所產生的摩擦大幅減少。 而且，即使基板3相對於固定板2傾斜，所有的滾珠 62還是會繼續與凹球面61d及卡合面3k接觸，因此不會 像習知工件保持用虎鉗1當中的螺絲構件2 1 —樣，只有 其相對向面2 1 a的一點2 1 b抵接於基板3的卡合面3 k， 螺絲構件6 1推動基板3使其朝固定板2側位移的力會分 散傳達至複數個部位。 φ 因此，即使爲了在X軸或Y軸周圍調整基板3相對 於固定板2之傾角而鎖緊螺絲構件6 1，也可藉由螺絲構 ^ 件6 1與基板3之間所產生的摩擦力來防止基板3在Z軸 '周圍轉動，因此可極爲正確地對基板3相對於固定板2的 傾角進行微調。 再者，在本第2實施形態的傾角調整機構60當中， 由於省略了前述轉動凹槽形成構件5 2，因此可縮小基板3 之卡合面3 k到螺絲構件6 1之卡合部6 1 b的上面的尺寸。 而且，所有的滾珠62都是由轉動體保持構件63所保 -21 - 200533462 (18) 持，因此即使從固定板2卸下螺絲構件61，滾珠6 2也不 會脫落而散亂。 第3實施形態 接下來，參照第6圖，針對對應於申請專利範圍第4 項之第3實施形態的工件保持用虎鉗的傾角調整機構加以 詳細說明。 φ 第6圖所示的傾角調整機構7 0當中的螺絲構件7 1具 有：螺合在固定板2的螺紋71 a ;鎖入此螺紋71 a時會抵 抗一對螺旋彈簧（未圖示）的推彈力而推動基板3的卡合面 3 k，使基板3朝固定板2側位移的卡合部7 1 b ;以及此卡 合部71b當中與卡合面3k相對向的相對向面71c。 而且，在螺絲構件7 1的相對向面7 1 c凹設有相對於 螺紋7 1 a之軸線C 1同軸並且垂直朝圓周方向延伸的轉動 凹槽7 1 d。 # 此外，此傾角調整機構7 0具有配設在基板3的卡合 面3 k上之於螺絲構件7 1的螺紋7 1 a周圍延伸成環狀的球 面形成構件72。 而且’在此球面形成構件72形成有位於與螺紋7 1 a 之軸線C 1同軸的位置時，其中心c是在螺紋7 1 a的軸線 C 1上’而且其半徑爲R之與螺絲構件7 1之相對向面7 ；l c 相對向的凸球面7 2 a。 而且，在螺絲構件7 1的轉動凹槽7 1 d與球面形成構 件72的凸球面72a之間介裝有共計12個的鋼製滾珠 -22- 200533462 (19) 再者’在螺絲構件7 1的螺紋7 1 a外嵌有彈簧擋圈 74 ’以免從固定板2卸下螺絲構件7 1時，延伸成環狀的 球面形成構件72及滾珠73從螺絲構件7 1脫落。 因此’如第6圖（a)所示當基板3相對於固定板2平 行延伸時’延伸成環狀的球面形成構件72是與螺紋7 1 a 的軸線C 1同軸，所有的滾珠7 3是與轉動凹槽7丨d及凸球 _ 面7 2 a接觸。 相對於此，如第6圖（b)所示當基板3相對於固定板2 傾斜時，由於凸球面72會順著保持在轉動凹槽7 1 d的滾 珠7 3 ’因此延伸成環狀的球面形成構件72會在基板3的 卡合面3 k上相對於螺紋7 1 a的軸線C 1朝半徑方向位移， 因此所有的滾珠73會繼續與轉動凹槽71d及凸球面72a 接觸。 亦即，在本第3實施形態之工件保持用虎鉗的傾角調 Φ 整機構7〇當中，爲了調整基板3相對於固定板2的傾角 而使螺絲構件7 1旋轉時，所有的滾珠73會在轉動凹槽 7 1 d及凸球面72a上轉動，因此可使螺絲構件7 1與基板3 之間所產生的摩擦大幅減少。 而且’即使基板3相對於固定板2傾斜，所有的滾珠 7 3也會繼續與轉動凹槽7 1 d及凸球面7 2 a接觸，因此不 會像習知工件保持用虎鉗1當中的螺絲構件2 1 —樣，只 有其相對向面21 a的一點21 b抵接於基板3的卡合面 3 k，螺絲構件7丨推動基板3使其朝固定板2側位移的力 -23- 200533462 (20) 會分散傳達至複數個部位。 因此，即使爲了在X軸或γ軸周圍調整基板3相對 於固定板2的傾角而鎖緊螺絲構件7 1，也可藉由螺絲構 件7 1與基板3之間所產生的摩擦力來防止基板3在z軸 周圍轉動’因此可極爲正確地對基板3相對於固定板2的 傾角進行微調。 φ 第4實施形態 接下來，參照第7圖，針對對應於申請專利範圍第5 項之第4實施形態的工件保持用虎鉗的傾角調整機構加以 詳細說明。 本第4實施形態當中的傾角調整機構8 0是取代上述 第3實施形態之傾角調整機構γ 〇當中的轉動凹槽7〗d而 設置轉動體保持構件8 4。 若要具體加以說明，則是第7圖所示的傾角調整機構 • 8 0當中的螺絲構件8 1具有：螺合在固定板2的螺紋 8 1a ;鎖入此螺紋8ia時會抵抗一對螺旋彈簧（未圖示）的 推彈力而推動基板3的卡合面3 k，使基板3朝固定板2 側位移的卡合部8 1 b ;以及此卡合部8 1 b當中與卡合面3k 相對向，並且相對於螺紋8 1 a的軸線垂直延伸的相對向面 8 1 c 〇 而且，此傾角調整機構8 0具有配設在基板3之卡合 面3 k上之於螺絲構件8 1的螺紋8 1 a周圍延伸成環狀的球 面形成構件8 2。 -24- 200533462 (21) 而且，在此球面形成構件8 2形成有位於與螺紋8 1 a 之軸線C 1同軸的位置時，其中心C是在螺紋8 1 a的軸線 C 1上’而且其半徑爲R之與螺絲構件8 1之相對向面8 1 c 相對向的凸球面8 2 a。 而且，在螺絲構件8 1的相對向面8 1 c與球面形成構 件 82的凸球面82a之間介裝有共計12個的鋼製滾珠 83 ° φ 這些滾珠83是保持在合成樹脂製，並且延伸成環狀 的轉動體保持構件8 4的各凹洞內，然後等間隔地朝圓周 方向並列。 此外，此延伸成環狀的轉動體保持構件84是外嵌在 螺絲構件8 1的螺紋8 1 a或軸部分，因而無法相對於螺紋 8 1 a的軸線C 1朝半徑方向位移。 因此’如第7圖（a)所示當基板3相對於固定板2平 行延伸時，延伸成環狀的球面形成構件82是與軸線c 1同 Φ 軸’所有的滾珠8 3是與螺絲構件8 1的相對向面8 1 c及凸 球面8 2 a接觸。 相對於此’如第7圖（b)所示當基板3相對於固定板2 傾斜時，由於凸球面82會順著保持在轉動體保持構件84 的滾珠8 3，因此延伸成環狀的球面形成構件8 2會在基板 3的卡合面3 k上相對於螺紋8〗a的軸線c 1朝半徑方向位 移’因此所有的滾珠8 3會繼續與相對向面8丨c及凸球面 8 2 a接觸。 亦即’在本第4實施形態之工件保持用虎鉗的傾角調 -25- 200533462 (22) 整機構8 0當中，爲了調整基板3相對於固定板2的傾角 而使螺絲構件8 1旋轉時，所有的滾珠8 3會在相對向面 8 1 c及凸球面8 2 a上轉動，因此可使螺絲構件8 1與基板3 之間所產生的摩擦大幅減少。 而且，即使基板3相對於固定板2傾斜，所有的滾珠 83也會繼續與相對向面81c及凸球面82a接觸，因此不 會像習知工件保持用虎鉗1當中的螺絲構件2 1 —樣，只 φ 有其相對向面21 a的一點2 1 b抵接於基板3的卡合面 3 k，螺絲構件8 1推動基板3使其朝固定板2側位移的力 會分散傳達至複數個部位。 因此，即使爲了在X軸或Y軸周圍調整基板3相對 於固定板2的傾角而鎖緊螺絲構件8 1，也可藉由螺絲構 件81與基板3之間所產生的摩擦力來防止基板3在Z軸 周圍轉動’因此可極爲正確地對基板3相對於固定板2的 傾角進行微調。 第5實施形態 接下來，參照第8圖，並且針對第5實施形態之工件 '保持用虎鉗當中的傾角調整機構90加以說明。 此傾角調整機構90是將前述第1實施形態之傾角調 整機構5 0當中的螺絲構件5 1置換成螺絲構件9 1。 若要具體加以說明，則是螺絲構件9 1具備有：具有 螺合在固定板2的螺紋9 1 a ;鎖入此螺紋9 1 a時會抵抗一 對螺旋彈簧（未圖示）的推彈力而推動基板3的卡合面3k， -26- 200533462 (23) 使基板3朝固定板2側位移的卡合部9 1 b ;以及此卡合部 9 1 b當中與卡合面3 k相對向，並且相對於螺紋9 1 a的軸 線垂直延伸的相對向面9 1 c的螺絲構件5 1。 而且，在螺絲構件91的相對面9 1 c凸設有其中心C 位於螺紋91 b的軸線C1上，而且其半徑爲R之於螺紋 5 1 a側爲凸狀的凸球面9 1 d。 因此，此傾角調整機構9 0也會以與前述第1實施形 φ 態之傾角調整機構5 0完全相同的方式動作。 第6實施形態 接下來，參照第9圖，並且針對第6實施形態之工件 保持用虎鉗當中的傾角調整機構1 1 〇加以說明。 此傾角調整機構1 1 0是將前述第3實施形態之傾角調 整機構7 〇當中的球面形成構件72置換成球面形成構件 1 1 1 〇 # 若要加以具體說明，則是此球面形成構件1 1 1具有配 設在基板3的卡合面3 k上之於螺紋7 1 a的軸線C 1周圍延 伸成環狀的球面形成構件72。 而且，在此球面形成構件1 1 1形成有位於與螺紋7 a 之軸線C1同軸的位置時’其中心是在螺紋7 1 a的軸線c 1 上’而且其半徑爲R之與螺絲構件7 1之相對向面7 1 c相 對向的凸球面1 1 1 a。 因此，此傾角調整機構1 1 0也會以與前述第3實施形 態之傾角調整機構7 0完全相同的方式動作。 -27- 200533462 (24) 第7實施形態 接下來，參照第1 〇圖，並且針對第7實施形態的工 件保持用虎鉗加以說明。 第1 〇圖所示之第7實施形態的工件保持用虎鉗 120、125是設計成在Y軸周圍調整所保持的工件W之傾 角時，使在工件W所產生的Y軸方向的位移量成爲最 • 小。 右要加以具體說明’則是在第10圖（a)所示的工件保 持用虎鉗1 2 0當中，當基板3相對於固定板2位於平行的 基準位置時，X軸周圍傾角調整機構5 0 X當中的螺絲構件 5 1之半徑R1的凹球面5 1 d的中心Q 1、以及傾動支持機 構1 〇當中的螺帽構件1 1之半徑R2的凸球面1 1 a的中心 Q2都是在與Y軸平行而延伸的基準線Η上。 因此，調整基板3之Υ軸周圍的傾角時，基板3會 Φ 在與Υ軸平行而延伸的基準線Η的周圍傾動，使保持在 基板3的工件w之Υ軸方向的位移變成零，因此可極爲 正確地進行工件W的傾角調整。 再者，在第10圖（b)所示的工件保持用虎鉗125當 中，傾動支持機構1 5也改變了。 若要加以具體說明，則是此傾動支持機構丨5具有： 從固定板2的上面壓入的螺帽構件1 2 1 ;在貫設於基板3 的貫穿孔3 c內從上方插入而螺合在螺帽構件1 2 1的螺栓 構件1 2 :以及介裝在與插入孔3 c同軸凹設在基板3之上 -28- 200533462 (25) 面的魚眼孔3 d的底面與螺栓構件1 2的頭部1 2a之間的複 數片彈簧墊圈1 3。 因此，螺帽構件1 2 1之凸球面狀的上面1 2 1 a以及與 插入孔3 c同軸凹設在基板3之下面的凹球面狀的滑動面 3 e是抵接成可自由滑動的狀態，基板3並不會因爲彈簧 墊圈1 3的向下彈力而浮起，而可相對於固定板2傾動。 而且，螺帽構件1 2 1之半徑R3的凸球面狀1 2 1 a的中 φ 心Q3是在與Y軸平行而延伸的基準線Η上。 再者，X軸周圍傾角調整機構60Χ當中的螺絲構件 6 1之半徑R4的凹球面6 1 d的中心Q4是在上述基準線Η 上，而且半徑R4的値與上述螺帽構件1 2 1之凸球面1 2 1 a 的半徑R3相等。 因此，螺絲構件6 1之凹球面6 1 d的頂點6 1 e與螺帽 構件1 2 1之凸球面1 2 1 a的頂點1 2 1 b，自基準線Η的距離 皆相等。 φ 因此，調整基板3之Υ軸周圍的傾角時，基板3會 在與Υ軸平行而延伸的基準線Η周圍傾動，使保持在基 板3的工件W之Υ軸方向的位移變成零，因此可極爲正 •確地進行工件W的傾角調整。 以上已針對本發明之工件保持用虎鉗的各實施形態加 以詳細說明，但本發明並不限定於上述實施形態，當然可 進行各種的變更。 例如’在上述各實施形態是使用滾珠作爲轉動體，但 當然亦可使用滾針或滾錐等。 -29 - 200533462 (26) 【圖式簡單說明】 第1圖是第1實施形態之工件保持用虎鉗的要部剖開 斜視圖。 第2圖是沿著第1圖中之A-剖開線的側面剖面圖。 第3圖是沿著第1圖中之B _剖開線的正面剖面圖。 第4圖是將第1圖中所顯示的傾角調整機構放大而顯 0 示的縱剖面圖。 第5圖是將第2實施形態之傾角調整機構放大而顯示 的縱剖面圖。 第6圖是將第3實施形態之傾角調整機構放大而顯示 的縱剖面圖。 第7圖是將第4實施形態之傾角調整機構放大而顯示 的縱剖面圖。 第8圖是將第5實施形態之傾角調整機構放大而顯示 φ 的縱剖面圖。 第9圖是將第6實施形態之傾角調整機構放大而顯示 的縱剖面圖。 第1 〇圖是第7實施形態之工件保持用虎鉗的側面剖 面圖。 第1 1圖是習知工件保持用虎鉗的斜視圖。 第1 2圖是第1 1圖所示之工件保持用虎鉗的平面圖。 第1 3圖是沿著第1 2圖中之C -剖開線的側面剖面 圖。 -30 - 200533462 (27) 第1 4圖是沿著第1 2圖中之D -剖開線的正面剖面 圖。 第1 5圖是沿著第1 2圖中之E -剖開線的側面剖面 圖。 第1 6圖是習知傾角調整機構的縱剖面圖。 【主要元件符號說明】200533462 (1) Nine, [Explanation of the Invention] [Technical Field to which the Invention belongs] The present invention relates to a workpiece holding vise for holding and adjusting the posture of a workpiece when machining the workpiece using a wire-cut electric discharge machine, More specifically, the present invention relates to a workpiece holding vise which is improved so that the posture of the held workpiece can be finely adjusted more accurately. Φ [Prior art] In the past, When machining a workpiece using a wire-cut electrical discharge machine, a workpiece holding vise fixed to the workpiece table is used to hold the workpiece and adjust its posture (for example, Refer to Japanese Patent Publication No. 40228 of Showa 58 And this new announcement bulletin No. 1 3,929 of 2007). In order to maintain the structure and function of the vise for such workpieces, Refer to Figures 11 to 15 for a brief description. The workpiece holding vise 1 has: The fixing plate 2 is fixed on the male part table (not shown) using bolts; And Φ maintains a slight gap with respect to this fixed plate 2 and extends parallel to each other, The base plate 3 is supported in a tiltable state with respect to the fixed plate 2. The substrate 3 has: A fixed jaw 4 for holding a workpiece at one end thereof; Opposite this fixed jaw 4, And the sliding part 3 a of the substrate 3 is fitted into the movable jaw 5 in a freely sliding state; Positionable and fixed to the female threaded member 6 of the sliding portion 3 a; And a screw 7 screwed into the female screw member 6. Therefore, after the female screw member 6 is positioned and fixed in accordance with the size of the workpiece to be held, A work piece is arranged between the fixed jaw 4 and the movable jaw 5, And lock the screw 7, Holds the workpiece firmly. 200533462 (2) In addition, By inserting bolts into the large-diameter insertion hole 3 b penetrating from the upper surface of the substrate 3 and the small-diameter insertion hole 2 a penetrating the fixing plate 2, And screw this bolt on the workbench, The fixing plate 2 can be fixed on the work table. on the other hand, As shown in Figures 11 and 12, A tilt support mechanism 10 for supporting the substrate 3 with respect to the fixed plate 2 in a freely tiltable state is disposed near the fixed jaw 4. This tilting support mechanism 10 is as shown in Figs. 13 and 14. Nut member 1 1 pressed in from under the fixing plate 2; A bolt member 12 inserted from above into the through hole 3 c formed in the base plate 3 and screwed with the nut member n, A plurality of spring pads 圏 13 are interposed between the bottom surface of the fish-eye hole 3 d coaxially recessed on the upper surface of the base plate 3 and the head 1 2 a of the bolt member 12. Further, the convex spherical surface of the 'nut member 11 1a and the concave spherical sliding surface 3e which is coaxially recessed with the insertion hole 3c below the substrate 3 are in contact with each other in a freely slidable state. φ Therefore, The base plate 3 will not float due to the downward elastic force of the spring washer 13, Instead, it can be tilted relative to the fixed plate 2. On the other hand, the X-axis peripheral tilt adjustment mechanism 2 () for adjusting the tilt angle of the substrate 3 relative to the X-axis periphery of the fixed plate 2 is shown in the nth and twelfth figures. It is arranged at a position farther from the fixed jaw 4 in the Y-axis direction than the tilt support mechanism 10. The X-axis peripheral tilt adjustment mechanism 20 is as shown in FIG. 13 and has: A bolt member 21 is inserted from above into the insertion hole 3f provided in the base plate 3 and screwed with the female thread 2113 provided in the fixed plate 2. And -6- 200533462 (3) a pair of helical springs 2 of the bolt member 21 disposed symmetrically between the fixing plate 2 and the base plate 3 in the X-axis direction 2, twenty three. and, The lower surface of the head 2 1 a of the bolt member 21 is the bottom surface of the fish eye hole 3 g which is coaxially recessed on the upper surface of the base plate 3 coaxially with the insertion hole 3 f. therefore, When loosening the bolt member 21, The base plate 3 will be The upward elastic force of 23 is displaced upward with respect to the fixed plate 2, Substrate 3 will tilt clockwise around the X axis. In contrast to this, When tightening the bolt member 21, The substrate 3 will resist the coil spring 22, 23's upward elasticity is pushed down, The substrate 3 will tilt counterclockwise around the X axis. That is, ‘by adjusting the locking amount of the bolt member 21 of the tilt adjustment mechanism 20 around the X axis, The tilt angle of the substrate 3 relative to the X axis around the fixed plate 2 can be finely adjusted. Similarly, the Y-axis peripheral tilt adjustment mechanism 30 for adjusting the tilting angle of the substrate 3 relative to the Y-axis periphery of the fixed plate 2 is shown in FIG. 11 and FIG. 12 and FIG. It is disposed at a position away from the tilt support mechanism 10 in the X-axis direction. This Y-axis inclination adjustment mechanism 3 0 is as shown in FIG. 14 and has: A bolt member 3 1 inserted from above in an insertion hole 3 h provided in the base plate 3 and screwed with a female thread 2 b provided in the fixed plate 2; And a pair of coil springs 3 arranged symmetrically in the X-axis direction with respect to this bolt member 3 1 between the fixing plate 2 and the base plate 3 2 3 3. The lower surface of the head 3 1 a of the 'bolt member 31 is the bottom surface of the fish-eye hole 3, which is coaxially recessed on the upper surface of the substrate 3 coaxially with the insertion hole 3 h. 200533462 (4) Therefore, When the bolt member 3 is loosened, the 'substrate 3 will be damaged by the coil spring 3 2, The upward elastic force of 3 3 is displaced upward relative to the fixed plate 2, Substrate 3 will tilt counterclockwise around the Y axis. In contrast, When tightening the bolt member 31, The base plate 3 will resist the coil spring 3 2. 3 3's upward elasticity is pushed down, The substrate 3 is tilted clockwise around the Y axis. that is, By adjusting the locking amount of the bolt structure φ piece 31 of the tilt adjustment mechanism 3 0 around the Y axis, The tilt angle of the substrate 3 relative to the Y axis around the fixed plate 2 can be fine-tuned. Furthermore, The Z-axis peripheral tilt adjustment mechanism 40 for adjusting the tilting angle of the substrate 3 relative to the Z-axis around the fixed plate 2 is shown in FIG. 11 and FIG. 12. It is arranged at a position separated from the female screw member 6 in the Y-axis direction. This Z-axis peripheral tilt adjustment mechanism 40 has as shown in Fig. 15: A hollow cylindrical holder 4 1 inserted in a circular hole 3j recessed below the base plate 3 and rotatable around the Z axis; A cylindrical female threaded member 42 fitted in this holder 4 1 and rotatable around the Y axis; Screwed into this female threaded member 42 and extending in the γ-axis direction, Then make its spherical head 4 3 a abut the bolt member 43 recessed on the concave spherical surface 2c of the front surface of the fixing plate 2; And a plurality of spring washers 44 which are coaxially housed in the fisheye hole 2 d of the base plate 3 with the bolt member 43. therefore, When tightening the bolt member 4 3, The base plate 3 will move forward in the γ-axis direction against the pushing force of the spring washer 4 4. The substrate 3 is tilted clockwise around the z-axis. -8- 200533462 (5) In contrast, When loosening the bolt member 4 3, The base plate 3 is pushed to the rear in the Y-axis direction by the spring washer 44. The substrate 3 is tilted counterclockwise around the z-axis. that is, By adjusting the locking amount of the bolt member 43 of the Z-axis peripheral tilt adjustment mechanism 40, The tilt angle of the substrate 3 relative to the z-axis around the fixed plate 2 can be fine-tuned. however, Around the X-axis in the conventional workpiece holding vise 1 ^ The inclination adjustment mechanism 2 0 is a structure in which the lower surface of the head 2 1 a of the bolt member 21 is directly in contact with the bottom surface of the fisheye hole 3 g of the substrate 3. therefore, As shown in Figure 13 (b), When the substrate 3 is tilted relative to the fixed plate 2, As shown in Figure 16 enlarged, Only the lower corner 2 1 b of the head 2 1 a of the bolt member 2 1 abuts against the bottom surface of the fish eye hole 3 g. therefore, When the bolt member 21 is locked in order to adjust the tilting angle of the base plate 3 relative to the X-axis around the fixed plate 2, Due to the friction between the head 2 1 a of the bolt member 21 and the bottom surface of the fisheye hole 3 g, a tilt of the φ substrate 3 relative to the Z axis of the fixed plate 2 is generated. Therefore, it is sometimes necessary to use the Z-axis tilt adjustment mechanism 40 to perform the tilt angle around the Z-axis > Degree of adjustment. Similarly, The conventional y-axis tilt adjustment mechanism 30 in the conventional work holding vise 1 has a structure in which the lower surface of the head a of the bolt member 31 is directly in contact with the bottom surface of the fisheye hole 3 i of the base plate 3. therefore, As shown in Figure 14 (b), When the substrate 3 is tilted relative to the fixed plate 2, Only the lower corner 3 1 b of the head 3 1 a of the bolt member 3 1 abuts against the bottom surface of the fisheye hole 3 i. -9- 200533462 (6) Therefore, When the bolt member 21 is locked in order to adjust the tilting angle of the substrate 3 with respect to g, The head 3 1 a of the member 31 and the bottom surface of the fisheye hole 3 i are around the Z axis of the base plate 3 with respect to the fixed plate 2. The Z axis peripheral tilt adjustment mechanism 40 is used to readjust the progress. φ [Summary of the Invention] Therefore, The purpose of the present invention is to solve the above problems, And provide a way to prevent tilting around the substrate, The workpiece that can finely adjust the tilt of the substrate relative to and around the γ axis can be achieved. The first aspect of the present invention that achieves the above purpose is used to hold and fix the workpiece to be wire-cut: • Fixing plate fixed on the worktable; Arranged to hold the intermediate plate relative to the aforementioned fixed plate; A support mechanism for tilting the substrate freely with respect to the fixing plate; And adjusting the aforementioned base mechanism with respect to the aforementioned fixing plate. and, The aforementioned tilt angle adjustment mechanism has: Bounce in the direction away from the fixed plate] The Y-axis around the fixed plate 2 will tilt due to the friction between the bolt structures, Therefore, it is sometimes necessary to perform the tilting angle around the Z-axis. The Z-axis with respect to the fixed plate is described with respect to the fixed plate. The pin is held around the X-axis of the fixed plate. The work piece holding vise is a vise, It is characterized in that the bases with gaps and extending in parallel are supported to adjust the inclination of the inclination of the plate around the three axes. The pusher for pushing the aforementioned substrate -10- 200533462 (7); Having threads screwed onto the fixing plate, When the thread is locked, the engaging surface of the substrate is pushed against the pushing force of the pushing means, An engaging portion for displacing the aforementioned substrate toward the fixed plate, And an oppositely facing screw member of the engaging portion that is opposite to and extends from the engaging surface; A spherical surface forming means for forming a spherical surface centered on the axis of the thread on either side of the facing surface and the engaging surface; • a plurality of rotating bodies interposed between the opposite side and any other side of the engaging surface and the spherical surface; And keeping the aforementioned plurality of rotating bodies, (2) The rotating body holding means for positioning the plurality of rotating bodies on a circle extending around the axis of the thread. that is, In the first aspect of the work holding vice, a plurality of rotating bodies are interposed between the opposing surface of the screw member and the engaging surface of the substrate. Therefore, when the screw member is rotated in order to adjust the inclination of the substrate with respect to the fixing plate, the friction generated between the screw member and the substrate can be greatly reduced. φ Moreover, A spherical surface formed on either side of the opposing surface of the screw member and the engagement surface of the substrate, and either side, The plurality of rotating bodies can be displaced to a predetermined position determined by the relative angle between the facing surface of the screw member and the engaging surface of the substrate, Therefore, all of the plurality of rotating bodies will often contact the spherical surface and the facing surface or the engaging surface. Instead of the screw members in the conventional work holding vise, Only one point on the opposite side abuts the engaging surface of the substrate. The force by which the screw member pushes the substrate and displaces it toward the fixed plate side is distributed to a plurality of locations. therefore, Even if the axis extends parallel to the top of the fixed plate -11-200533462 (8) (X axis, Y axis) around the adjustment of the tilt angle of the substrate relative to the fixed plate to lock the screw member, The frictional force generated between the screw member and the substrate can also be used to prevent the substrate from rotating around an axis (Z axis) extending perpendicular to the upper surface of the fixed plate. Therefore, it is possible to finely adjust the tilt angle of the substrate with respect to the fixed plate. Moreover, the workpiece holding vise according to the second aspect of the present invention is among the workpiece holding vise according to the first aspect. φ The spherical surface is formed on the opposite surface of the screw member, When the rotation body holding means is coaxial with respect to the axis of the thread, A rotating groove ', which is coaxial with the axis and extends in the circumferential direction, and which is displaceable in a radial direction with respect to the axis of the thread on the engaging surface, and which forms a ring-shaped rotation groove extending around the axis, The rotating body rotates on the spherical surface and the rotating groove. That is, ‘in the second aspect of the work holding vise, When the substrate phase is tilted with respect to the fixed plate, The rotating groove forming member extending in a ring shape is guided by a spherical rotating body formed on the opposite surface of the screw member, and is displaced on the engaging surface of the substrate. Therefore, all rotating bodies will often contact the spherical surface and the rotating groove. In addition, the third aspect of the present invention is a workpiece holding vise, among the first aspect of the work holding vice, The spherical surface is formed on an opposite surface of the screw member, When the rotation body holding means is positioned coaxially with respect to the axis of the thread, the -12-200533462 (9) on the circle that is coaxial with the axis and extends perpendicularly in the circumferential direction is held at a regular interval in the circumferential direction. body, Furthermore, the rotating body holding member extending in a ring shape around the axis is radially displaceable with respect to the axis of the thread, The rotating body rotates on the spherical surface and the engaging surface. that is, In the third aspect of the work holding vise, the rotating groove forming member in the first working part holding vise is replaced with a rotating body holding member. φ Therefore, When the substrate is tilted relative to the fixed plate, The rotating body holding member extended into a ring shape is guided by a rotating body formed along a spherical surface formed on the opposite side of the screw member, Radial displacement with respect to the axis of the screw member, Therefore, all rotating bodies will often contact the spherical surface and the engaging surface. and, The fourth aspect of the present invention is a workpiece holding vice, which is among the first aspect of the workpiece holding vice. The spherical surface is a spherical surface-forming member that is formed on the engaging surface that can slide in the radial direction with respect to the axis of the thread and extend in a ring shape around the axis. The rotating body retaining means is a rotating groove provided in the opposite surface coaxially with respect to the axis of the thread and extending vertically in the circumferential direction. The rotating body rotates on the spherical surface and the rotating groove. That is, ‘in the fourth aspect of the work holding vise, When the substrate is tilted relative to the fixed plate, The spherical surface forming member extended in a ring shape is displaced on the engaging surface of the substrate along the rotating body held in the rotating groove recessed on the opposite surface of the screw member, Therefore, all rotating bodies will often contact the spherical surface and the -13-200533462 (10) rotating groove. and, The fifth aspect of the workpiece holding vise of the present invention is the first aspect of the workpiece holding vise. The spherical surface is a spherical surface forming member that is formed on a sliding surface that is displaceable in a radial direction with respect to an axis of the thread and extends in a ring shape around the axis. When the rotating body holding means is located on the same φ axis with respect to the axis of the thread, The aforementioned plurality of rotating bodies are held in a circumferential direction at equal intervals on a circle coaxial with the aforementioned axis and extending perpendicularly in the circumferential direction, Moreover, the rotating body holding member which is embedded in the thread and cannot be displaced in the radial direction around the axis extends in a ring shape, The rotating body rotates on the spherical surface and the opposite surface. That is to say, the fifth aspect of the workpiece holding vice is among the fourth aspect of the workpiece holding vice. The rotating groove recessed in the opposite surface of the screw member is replaced with a rotating body holding member. • Therefore, When the substrate is tilted relative to the fixed plate, The spherical body forming member extended in a ring shape is held along the thread externally embedded in the screw member and cannot be displaced in a radial direction. The rotating body of the rotating body holding member is displaced on the engagement surface of the substrate. Therefore, all rotating bodies will often contact the spherical surface and the engaging surface. and, In the vise for holding a workpiece according to the sixth aspect of the present invention, The spherical surface is a convex spherical surface protruding toward the screw of the screw member. and, In the seventh aspect of the present invention, a workpiece holding vise, The aforementioned spherical surface is a concave spherical surface recessed toward the thread of the screw member. -14- 200533462 (11) In addition, The plurality of rotating bodies are preferably spheres having an equal outer diameter. Furthermore, In order to align the rotating bodies rotating on the rotating grooves at equal intervals in the circumferential direction, The rotating body holding member may be used in combination. [Embodiment] The following, Referring to Figures 1 to 10, Each embodiment of the workpiece holding vise according to the present invention will be described in detail. In addition, In the description below, In the same part, the same symbol is used and repeated descriptions are omitted. At the same time it will be parallel to the top of the fixed plate, And the direction in which the movable jaw slides is called the X-axis direction, Will be parallel to the top of the fixing plate, And the direction perpendicular to the X axis is called the Y axis direction, The direction perpendicular to the upper surface of the fixed plate is referred to as the Z-axis direction. First Embodiment First, Referring to Figures 1 to 4, A detailed description will be given of the vise holding tool for the first embodiment. The workpiece holding vise 100 according to the first embodiment shown in FIG. 1 is the same as the conventional workpiece holding vise 1 shown in FIG. 11: Use bolts to fix the fixing plate 2 on the workpiece table (not shown); And maintain a slight gap with respect to this fixed plate 2 and extend parallel to each other, The base plate 3 is supported in a tiltable state with respect to the fixed plate 2. The substrate 3 has: A fixed jaw 4 for holding a workpiece at one end thereof; Opposite this fixed jaw 4, And the sliding part 3 a of the substrate 3 is fitted into the movable jaw 5 in a freely sliding state; Female threaded member 6 which can be positioned and fixed on the sliding part 3 a -15- 200533462 (12); And a screw 7 screwed into the female screw member 6. Therefore, after the female screw member 6 is positioned and fixed in accordance with the size of the workpiece to be held, A work piece is arranged between the fixed jaw 4 and the movable jaw 5, And lock the screw 7, Holds the workpiece firmly. and, As shown in Figure 1, A tilt support mechanism 10 for supporting the base plate 3 with respect to the fixed plate 2 in a freely tiltable state is disposed near the fixed jaw 4. φ This tilt support mechanism 10 has as shown in Figures 2 and 3: The nut member n pressed from below the fixing plate 2; A bolt member 12 inserted from above and inserted into the through hole 3 c of the substrate 3 and screwed with the nut member n; A plurality of spring washers 13 are interposed between the bottom surface of the fisheye hole 3d coaxially recessed on the substrate 3 with the insertion hole 3c and the head portion 12a of the bolt member 12. and, The convex spherical upper surface 1 1 a of the nut member 11 and the concave spherical sliding surface 3 e φ recessed coaxially with the insertion hole 3 c on the lower surface of the base plate 3 are spherically fitted so as to be freely slidable. therefore, The base plate 3 does not float from the nut member 1 1 due to the downward elastic force of the spring washer 13. Instead, it can be tilted relative to the fixed plate 2. In addition, The X-axis peripheral tilt adjustment mechanism 5 0X for adjusting the tilt angle of the substrate 3 relative to the X-axis periphery of the fixed plate 2 is shown in FIG. 1, It is arranged at a position farther from the fixed jaw 4 in the Y-axis direction than the tilt support mechanism 10. Similarly, The Y-axis peripheral tilt adjustment mechanism 50Y for adjusting the tilt angle of the substrate 3 with respect to the Y-axis periphery of the fixed plate 2 is shown in Fig. 1-16-200533462 (13). A position away from the X axis. In addition, These X-axis peripheral tilt adjustment mechanisms 50 0X and Y-axis peripheral tilt adjustment mechanisms 50 0Y have the same structure, Therefore, the following description does not include X and Y in the reference symbols. The tilt adjustment mechanism 50 shown in Figs. 2 to 4 corresponds to the second item of the patent application scope. There are a pair of coil springs (spring pushing means) 54 which springs the φ substrate 3 in a direction away from the fixed plate 2; 55. The inclination adjustment mechanism 5 has a screw member 5 丨, The screw member 5! have: 5 1 a screwed on the fixing plate 2; When locked into this thread 5 1 a, it will resist a pair of coil springs 5 4. 5 5 pushing the elastic force to push the engaging surface of the substrate 3 3 k, An engaging portion 5 1 b which is displaced toward the fixing plate 2 side; And the facing surface 5 1 c of the engaging portion 5 1 b opposite to the engaging surface 3 k. and, The center C of the screw member 5 1 is located on the opposite surface 5 1 c of the screw member 5 on the axis C 1 of the thread 5 1 a. Moreover, the radius is R and the spherical surface 5 1 d is concave on the side of the thread φ 5 1 a. The inclination adjustment mechanism 50 has a rotating β moving groove forming member 5 2 extending in a ring shape around the axis C 1, When the turning groove forming member 5 2 is coaxial with the axis C 1 of the thread 5 1 a on the engaging surface 3 k •, A rotating groove 52a coaxial with the axis C1 and extending vertically in the circumferential direction, Moreover, the engaging surface 3k can be displaced in a radial direction with respect to the axis of the thread 5 1 a. and, The reclining mechanism 50 has a total of 12 steel balls (rotating bodies) 53 interposed between the concave spherical surface 5 1 d and the turning groove 52a. In addition, These balls 5 3 are very close to each other, Furthermore, the rotation grooves 5 2 a extending in the circumferential direction -17- 200533462 (14) are juxtaposed in the circumferential direction at approximately equal intervals. Moreover, a spring stop 56 (circle) 56 is externally embedded in the thread 5 1 a of the screw member 5 1. When removing the screw member 51 from the fixing plate 2, The rotation groove forming member 52 and the ball 53 extended in a ring shape fall off from the screw member 51. When the above-mentioned screw member 51 is rotated to lock its thread 5 1 a into the female thread 2 b of the fixing plate 2, the steel ball 5 3 will rotate on the concave spherical surface 5 1 d and the rotation φ groove 52a. Moreover, the engaging portion 51b pushes the substrate 3 'toward the fixed plate 2 side, so that the substrate 3 can be tilted counterclockwise around the X axis, for example. In contrast, When the screw member 5 1 is rotated to loosen its thread 5 1 a, The base plate 3 will be 55 pushes away from the fixed plate 2, Therefore, the substrate 3 can be tilted in a clockwise direction around the X axis, for example. at this time, As shown in Figure 4 (b), When the substrate 3 is inclined relative to the fixed plate 2 #, The rotating groove forming member 52 extending in a ring shape is guided by a ball 5 3 which is concavely provided on a concave spherical surface 5 1 d of the opposite surface 5 1 c of the screw member 5 1. Displacement on the engaging surface 3k of the substrate 3. > For more details, Then, the axis of the rotating groove forming member 52 extending in a ring shape is coaxial with the straight line S 1 extending perpendicularly to the engaging surface 3 k and passing through the center C of the concave spherical surface 5 1 d. therefore, Even if the substrate 3 is inclined with respect to the fixed plate 2, All the balls 5 3 will continue to be in constant contact with the concave spherical surface 5 1 d and the rotating groove 5 2 a. that is, In the work holding vise 100 of the first embodiment -18- 200533462 (15), When the screw member 51 is rotated in order to adjust the inclination of the substrate 3 with respect to the fixing plate 2, All the balls 5 3 will often rotate on the concave spherical surface 5 1 d and the rotating groove 5 2 a. Therefore, the friction generated between the screw member 51 and the substrate 3 can be greatly reduced. and, Even if the substrate 3 is inclined with respect to the fixed plate 2, All the balls 5 3 will continue to be in constant contact with the concave spherical surface 5 1 d and the rotating groove 5 2 a. Therefore, it will not look like the screw member 21 — φ in the conventional work holding vise 1, Only a point 2 1 b of the opposite surface 2 1 a abuts the engaging surface 3 k of the substrate 3, The force by which the screw member 51 pushes the substrate 3 to displace it toward the fixing plate 2 is distributed to a plurality of locations. therefore, Even if the screw member 5 1 is locked in order to adjust the inclination of the base plate 3 relative to the X-axis or Y-axis around the fixed plate 2, The frictional force generated between the screw member 51 and the substrate 3 can also be used to prevent the substrate 3 from rotating around the Z axis. Therefore, it is possible to finely adjust the inclination angle of the substrate 3 with respect to the fixed plate 2. Second Embodiment ’Next, Referring to Figure 5, The inclination adjustment mechanism of a work holding vise corresponding to the second embodiment corresponding to the third to third aspects of the patent application will be described in detail. The inclination adjustment mechanism 60 in the second embodiment replaces the rotating groove forming member 5 2 in the inclination adjustment mechanism 50 in the first embodiment described above with a rotating body holding member 63. To be specific, Then the inclination adjustment mechanism 60 has screws • 19- 200533462 (16) member 6 1 ′ The screw member 61 has: Screw thread 6 1 a on the fixing plate 2; When this thread 6 1 a is locked, it will push the engaging surface 3 k of the substrate 3 against the pushing force of a coil spring not shown. An engaging portion 6 1 b for displacing the substrate 3 toward the fixing plate 2 side; And the facing surface 6 1 c of the engaging portion 6 1 b opposite to the engaging surface 3 k. and, The center surface C of the screw member 6 1 is recessed on the axis C 1 of the thread 6 1 b. Moreover, the radius is R and the spherical surface 6 1 d is concave on the side of the thread φ 6 1 a. and, A total of 12 steel balls 62 are interposed between the concave spherical surface 61 d of the screw member 61 and the engaging surface 3 k of the substrate 3. These balls 62 are held in a synthetic resin, And extending into the recesses of the ring-shaped rotating body holding member 63, Then, they are juxtaposed in the circumferential direction at equal intervals. In addition, The inner diameter of the rotating body holding member 63 is larger than the outer diameter of the screw (shaft portion) 6a of the screw member 61, Instead, it can be displaced radially with respect to the axis c i of the thread 6a. φ Therefore, As shown in FIG. 5 (a), when the substrate 3 extends parallel to the fixed plate 2, The balls 62 held by the rotating-body holding member 6 3 extending in a ring shape are located on a plane coaxial with the axis C 1 on a plane extending perpendicularly to the axis c 1 of the thread 6 1 a. In contrast, As shown in FIG. 5 (b), when the substrate 3 is inclined with respect to the fixed plate 2, The rotating body holding member 63, which is extended into a ring shape, is guided by the balls 6 2 that follow the concave spherical surface 6 1 d of the screw member 61, On the other hand, the engaging surface 3 k of the substrate 3 is displaced in a radial direction with respect to the axis c 1 of the screw 6 1 a. To explain in more detail, 'the rotating body holding member extended into a ring shape-20-200533462 (17) 6 The axis of 3 is a straight line extending perpendicular to 3 k with respect to the engaging surface and passing through the center C of the concave spherical surface 6 1 d S 1 is coaxial. therefore, Even if the substrate 3 is inclined with respect to the fixed plate 2, All the balls 62 will continue to be in constant contact with the concave spherical surface 61d and the engaging surface 3k. that is, In the inclination adjustment mechanism 60 of the work holding vise according to the second embodiment, When the screw member 61 is rotated in order to adjust the inclination of the substrate 3 with respect to the fixing plate 2, All the balls 6 2 will rotate on the concave spherical surface φ 6 1 d and the engaging surface 3 k. Therefore, the friction generated between the screw member 61 and the substrate 3 can be greatly reduced. and, Even if the substrate 3 is inclined with respect to the fixed plate 2, All the balls 62 will continue to contact the concave spherical surface 61d and the engaging surface 3k. Therefore, it is not the same as the screw member 2 1 in the conventional workpiece holding vise 1. Only a point 2 1 b of the opposite surface 2 1 a abuts the engaging surface 3 k of the substrate 3, The force by which the screw member 61 pushes the substrate 3 and displaces it toward the fixing plate 2 is distributed to a plurality of locations. φ Therefore, Even in order to adjust the inclination of the substrate 3 with respect to the fixing plate 2 around the X-axis or Y-axis, the screw member 61 is locked, The frictional force generated between the screw member 61 and the substrate 3 can also be used to prevent the substrate 3 from rotating around the Z axis. Therefore, it is possible to finely adjust the inclination angle of the substrate 3 with respect to the fixed plate 2. Furthermore, In the reclining mechanism 60 of the second embodiment, Since the aforementioned turning groove forming member 52 is omitted, Therefore, the size of the engaging surface 3 k of the substrate 3 to the upper surface of the engaging portion 6 1 b of the screw member 61 can be reduced. and, All the balls 62 are held by the rotating body holding member 63 -21-200533462 (18), Therefore, even if the screw member 61 is removed from the fixing plate 2, The ball 6 2 does not fall off and scatter. Third Embodiment Next, Referring to Figure 6, The inclination adjustment mechanism of the work holding vise corresponding to the third embodiment corresponding to item 4 of the scope of patent application will be described in detail. φ The screw member 7 1 of the tilt adjustment mechanism 70 shown in FIG. 6 has: 71 a screwed on the fixing plate 2; When this thread 71 a is locked, it will push the engaging surface 3 k of the substrate 3 against the pushing force of a pair of coil springs (not shown), An engaging portion 7 1 b for displacing the substrate 3 toward the fixing plate 2 side; And the facing surface 71c facing the engaging surface 3k among the engaging portions 71b. and, The opposite surface 7 1 c of the screw member 7 1 is concavely provided with a rotation groove 7 1 d coaxial with the axis C 1 of the thread 7 1 a and extending vertically in the circumferential direction. # Also, This inclination adjustment mechanism 70 has a spherical surface forming member 72 which is arranged on the engagement surface 3k of the base plate 3 and extends around the thread 7 1a of the screw member 7 1 in a ring shape. Further, when the spherical surface forming member 72 is formed at a position coaxial with the axis C 1 of the thread 7 1 a, Its center c is on the axis C 1 of the thread 7 1 a ′, and its radius R is the opposite surface 7 of the screw member 7 1; l c Convex convex surface 7 2 a. and, A total of 12 steel balls are interposed between the turning groove 7 1 d of the screw member 7 1 and the convex spherical surface 72 a of the spherical surface forming member 72-22- 200533462 (19) Furthermore, the thread of the screw member 7 1 7 1 a Spring retaining ring 74 'is fitted to prevent the screw member 7 1 from being removed from the fixing plate 2. The spherical surface forming member 72 and the ball 73 extended in a ring shape fall off from the screw member 71. Therefore, as shown in FIG. 6 (a), when the base plate 3 extends parallel to the fixed plate 2, the spherical surface forming member 72 extending in a ring shape is coaxial with the axis C 1 of the thread 7 1 a All the balls 7 3 are in contact with the turning groove 7 丨 d and the convex ball _ surface 7 2 a. In contrast, As shown in FIG. 6 (b), when the substrate 3 is inclined with respect to the fixed plate 2, Since the convex spherical surface 72 follows the ball 7 3 ′ held in the rotation groove 7 1 d, the spherical surface forming member 72 extending into a ring shape will be on the engaging surface 3 k of the substrate 3 with respect to the axis C of the thread 7 1 a 1 displacement in the radial direction, Therefore, all the balls 73 will continue to contact the rotating groove 71d and the convex spherical surface 72a. that is, In the inclination adjustment Φ adjustment mechanism 70 of the work holding vise of the third embodiment, When the screw member 71 is rotated to adjust the inclination of the substrate 3 with respect to the fixing plate 2, All the balls 73 will rotate on the rotating groove 7 1 d and the convex spherical surface 72 a. Therefore, the friction generated between the screw member 71 and the substrate 3 can be greatly reduced. Moreover, even if the substrate 3 is inclined with respect to the fixed plate 2, All the balls 7 3 will continue to contact the rotating groove 7 1 d and the convex spherical surface 7 2 a. Therefore, it is not the same as the screw member 2 1 in the conventional workpiece holding vise 1. Only one point 21 b of the opposite surface 21 a abuts the engaging surface 3 k of the substrate 3, The force by which the screw member 7 丨 pushes the substrate 3 and displaces it toward the fixing plate 2 -23- 200533462 (20) is spread to a plurality of locations. therefore, Even in order to adjust the inclination of the substrate 3 with respect to the fixing plate 2 around the X-axis or the γ-axis, the screw member 7 1 is locked, The frictional force generated between the screw member 71 and the substrate 3 can also be used to prevent the substrate 3 from rotating around the z-axis', so that the inclination of the substrate 3 with respect to the fixed plate 2 can be finely adjusted with great accuracy. φ Fourth Embodiment Next, Referring to Figure 7, The inclination adjustment mechanism of the work holding vise corresponding to the fourth embodiment corresponding to the fifth aspect of the patent application will be described in detail. The inclination adjustment mechanism 80 in the fourth embodiment is provided with a rotating body holding member 84 instead of the rotation groove 7d in the inclination adjustment mechanism γ0 in the third embodiment. To be specific, The tilt adjustment mechanism shown in Figure 7 • The screw member 8 1 of 80 has: Screw thread 8 1a on the fixing plate 2; When locked into this thread 8ia, it will push the engaging surface 3k of the substrate 3 against the pushing force of a pair of coil springs (not shown), An engaging portion 8 1 b for displacing the substrate 3 toward the fixing plate 2 side; And the engaging portion 8 1 b is opposite to the engaging surface 3k, And the opposite surface 8 1 c extending perpendicular to the axis of the thread 8 1 a This inclination adjustment mechanism 80 has a spherical surface forming member 82 which extends around a thread 8 1 a of the screw member 8 1 disposed on the engaging surface 3 k of the base plate 3. -24- 200533462 (21) Moreover, When the spherical surface forming member 8 2 is formed at a position coaxial with the axis C 1 of the thread 8 1 a, Its center C is a convex spherical surface 8 2 a on the axis C 1 ′ of the thread 8 1 a and its radius R is opposite to the facing surface 8 1 c of the screw member 8 1. and, A total of 12 steel balls 83 ° φ are interposed between the opposing surface 8 1 c of the screw member 8 1 and the convex spherical surface 82 a of the spherical surface forming member 82. These balls 83 are made of synthetic resin. And each of the recesses extending into a ring-shaped rotating body holding member 84, Then, they are juxtaposed in the circumferential direction at equal intervals. In addition, The rotating body holding member 84 extending in a ring shape is a thread 8 1 a or a shaft portion which is externally fitted to the screw member 8 1. Therefore, it cannot be displaced radially with respect to the axis C 1 of the thread 8 1 a. Therefore, as shown in FIG. 7 (a), when the substrate 3 extends parallel to the fixed plate 2, The spherical surface forming member 82 extending in a ring shape is in the same Φ axis as the axis c 1. All the balls 8 3 are in contact with the facing surface 8 1 c and the convex spherical surface 8 2 a of the screw member 8 1. On the other hand, as shown in FIG. 7 (b), when the substrate 3 is inclined with respect to the fixed plate 2, Since the convex spherical surface 82 follows the ball 8 3 held by the rotating body holding member 84, Therefore, the spherical surface forming member 8 2 extending in a ring shape will be displaced in a radial direction with respect to the axis c 1 of the thread 8 on the engaging surface 3 k of the substrate 3 '. Therefore, all the balls 8 3 will continue to face the opposite surface 8丨 c is in contact with the convex spherical surface 8 2 a. That is, in the adjustment of the inclination angle of the vise for holding a workpiece in the fourth embodiment -25- 200533462 (22) The entire mechanism 8 0, When the screw member 81 is rotated to adjust the inclination of the substrate 3 with respect to the fixing plate 2, All the balls 8 3 will rotate on the opposite surface 8 1 c and the convex spherical surface 8 2 a. Therefore, the friction generated between the screw member 81 and the substrate 3 can be greatly reduced. and, Even if the substrate 3 is inclined with respect to the fixed plate 2, All the balls 83 will continue to contact the opposing surface 81c and the convex spherical surface 82a. Therefore, it is not the same as the screw member 2 1 in the conventional workpiece holding vise 1. Only φ has a point 2 1 b with its facing surface 21 a abutting on the engaging surface 3 k of the substrate 3, The force by which the screw member 81 pushes the substrate 3 toward the fixing plate 2 is dispersed and transmitted to a plurality of locations. therefore, Even if the screw member 8 1 is locked in order to adjust the inclination of the substrate 3 with respect to the fixing plate 2 around the X-axis or Y-axis, It is also possible to prevent the substrate 3 from rotating around the Z axis by the frictional force generated between the screw member 81 and the substrate 3 ', so that the inclination of the substrate 3 with respect to the fixed plate 2 can be finely adjusted with great accuracy. Fifth Embodiment Next, Referring to Figure 8, The inclination adjustment mechanism 90 in the workpiece 'holding vise of the fifth embodiment will be described. This inclination adjustment mechanism 90 replaces the screw member 51 with the screw member 91 in the inclination adjustment mechanism 50 in the first embodiment. To be specific, The screw member 9 1 is provided with: Has a thread 9 1 a screwed on the fixing plate 2; When this thread 9 1 a is locked, it will push the engaging surface 3k of the substrate 3 against the pushing force of a pair of coil springs (not shown), -26- 200533462 (23) An engaging portion 9 1 b for displacing the substrate 3 toward the fixing plate 2 side; And the engaging part 9 1 b is opposite to the engaging surface 3 k, And the screw member 5 1 of the opposite surface 9 1 c extending perpendicularly with respect to the axis of the thread 9 1 a. and, The center C of the screw member 91 is protruded on the axis C1 of the thread 91 b. Moreover, the convex spherical surface 9 1 d whose radius is R is convex on the thread 5 1 a side. therefore, This inclination adjustment mechanism 90 also operates in exactly the same manner as the inclination adjustment mechanism 50 in the φ state of the first embodiment described above. Sixth Embodiment Next, Referring to Figure 9, The inclination adjustment mechanism 1 10 in the work holding vise according to the sixth embodiment will be described. This inclination adjustment mechanism 1 1 0 replaces the spherical formation member 72 in the inclination adjustment mechanism 7 in the third embodiment described above with a spherical formation member 1 1 1 〇 # To be specific, This spherical surface forming member 1 1 1 has a spherical surface forming member 72 which extends around the axis C 1 of the thread 7 1 a on the engagement surface 3 k of the substrate 3 and extends in a ring shape. and, When the spherical surface forming member 1 1 1 is formed at a position coaxial with the axis C1 of the thread 7 a, its center is on the axis c 1 of the thread 7 1 a, and the radius thereof is opposite to that of the screw member 7 1. The facing surface 7 1 c is a convex spherical surface 1 1 1 a opposite to each other. therefore, This inclination adjustment mechanism 1 1 0 also operates in exactly the same manner as the inclination adjustment mechanism 70 in the third embodiment. -27- 200533462 (24) Seventh Embodiment Next, Referring to FIG. 10, A description will be given of a vise for holding a workpiece in the seventh embodiment. Work holding vise 120 of the seventh embodiment shown in FIG. 10, 125 is designed to adjust the inclination of the held workpiece W around the Y axis, Minimize the amount of displacement in the Y-axis direction of the workpiece W. The specific description on the right is in the workpiece holding vise 1 2 0 shown in Fig. 10 (a). When the substrate 3 is located in a parallel reference position relative to the fixed plate 2, Center of the X-axis inclination adjustment mechanism 5 0 The center of the concave spherical surface 5 1 d of the radius R1 of the screw member 5 1 in the X Q 1, And the center Q2 of the convex spherical surface 1 1 a of the radius R2 of the nut member 11 in the tilt support mechanism 10 is on the reference line 延伸 extending parallel to the Y axis. therefore, When adjusting the inclination around the Z axis of the substrate 3, The substrate 3 will tilt around the reference line Η extending parallel to the Υ axis, So that the displacement in the y-axis direction of the workpiece w held on the substrate 3 becomes zero, Therefore, the inclination adjustment of the workpiece W can be performed very accurately. Furthermore, Among the workpiece holding vise 125 shown in FIG. 10 (b), The tilt support mechanism 15 has also changed. To be specific, It is this tilt support agency 5 with: The nut member 1 2 1 pressed in from the top of the fixing plate 2; Bolt member 1 2 inserted from above and screwed into nut member 1 2 1 in through hole 3 c formed in substrate 3: And a plurality of spring washers interposed between the bottom surface of the fish-eye hole 3 d coaxially recessed on the base plate 3 with the insertion hole 3 c -28- 200533462 (25) surface and the head 1 2 a of the bolt member 12 1 3. therefore, The convex spherical top surface 1 2 1 a of the nut member 1 2 1 and the concave spherical sliding surface 3 e recessed coaxially with the insertion hole 3 c below the substrate 3 are in a state of being in contact with each other so as to be able to slide freely. The base plate 3 does not float due to the downward elastic force of the spring washer 1 3, Instead, it can be tilted relative to the fixed plate 2. and, The center φ center Q3 of the convex spherical surface 1 2 1 a of the radius R3 of the nut member 1 2 1 is on a reference line 延伸 extending parallel to the Y axis. Furthermore, The center Q4 of the concave spherical surface 6 1 d of the radius R4 of the screw member 6 1 in the X-axis peripheral tilt adjustment mechanism 60X is on the above-mentioned reference line ，, Further, 値 of the radius R4 is equal to the radius R3 of the convex spherical surface 1 2 1 a of the nut member 1 2 1. therefore, Vertex 6 1 e of concave spherical surface 6 1 d of screw member 6 1 and vertex 1 2 1 b of convex spherical surface 1 2 1 of nut member 1 2 1 The distances from the reference line Η are all equal. φ Therefore, When adjusting the inclination around the Z axis of the substrate 3, The substrate 3 tilts around a reference line 延伸 extending parallel to the Υ axis, So that the displacement in the y-axis direction of the workpiece W held on the substrate 3 becomes zero, Therefore, the inclination adjustment of the workpiece W can be performed extremely accurately. The embodiments of the workpiece holding vise according to the present invention have been described in detail above. However, the present invention is not limited to the above embodiments. Of course, various changes can be made. For example, in each of the above embodiments, a ball is used as a rotating body. However, it is also possible to use a needle or a cone. -29-200533462 (26) [Brief description of the drawings] Fig. 1 is a perspective view of the main part of the vise for holding a workpiece according to the first embodiment. Fig. 2 is a side sectional view taken along a line A-section in Fig. 1. Fig. 3 is a front cross-sectional view taken along a line B_ in Fig. 1. Fig. 4 is a longitudinal sectional view showing the tilt adjustment mechanism shown in Fig. 1 in an enlarged manner. Fig. 5 is a longitudinal sectional view showing an enlarged reclining mechanism of the second embodiment. Fig. 6 is a longitudinal sectional view showing an enlarged reclining mechanism of the third embodiment. Fig. 7 is a longitudinal sectional view showing an enlarged reclining mechanism of the fourth embodiment. Fig. 8 is a longitudinal cross-sectional view showing the tilt adjustment mechanism of the fifth embodiment in an enlarged manner and showing φ. Fig. 9 is a longitudinal sectional view showing an enlarged reclining mechanism of the sixth embodiment. Fig. 10 is a side sectional view of a work holding vise according to a seventh embodiment. FIG. 11 is a perspective view of a conventional workpiece holding vise. Fig. 12 is a plan view of the work holding vise shown in Fig. 11. Fig. 13 is a side sectional view taken along a line C-section in Fig. 12. -30-200533462 (27) Fig. 14 is a front cross-sectional view taken along a line D-cut in Fig. 12. Fig. 15 is a side sectional view taken along the line E-section in Fig. 12. Fig. 16 is a longitudinal sectional view of a conventional reclining mechanism. [Description of main component symbols]
1 工件保持用虎鉗 2 固定板 2a 插通孔 2b 母螺紋 2 c 凹球面 2d 魚眼孔 3 基板 3a 滑動部 3b 插通孔 3c 插入孔 3d 魚眼孔 3e 滑動面 3f 插入孔 3g 魚眼孔 3h 插入孔 3i 魚眼孔 3j 圓形孔 -31 - 200533462 (28) 3k 卡合面 4 固定顎 5 可動顎 6 母螺紋構件 7 螺桿 10 傾動支持機構 11 螺帽構件 • 11a 凸球面 12 螺栓構件 12a 頭部 13 彈簧墊圈 15 傾動支持機構 20 X軸周圍傾角調整機構 21 螺栓構件 21a 頭部 • 21b 角部 22 螺旋彈簧 23 螺旋彈簧 30 Y軸周圍傾角調整機構 3 1 螺栓構件 3 1a 頭部 3 1b 角部 32 螺旋彈簧 33 螺旋彈簧 -32- 200533462 (29) 40 Z軸周圍傾角調整機構 4 1 保持器 42 母螺紋構件 43 螺栓構件 43a 球狀頭部 44 彈簧墊圈 50 傾角調整機構 • 50X X軸周圍傾角調整機構 50 Y Y軸周圍傾角調整機構 5 1 螺絲構件 5 1a 螺紋 5 lb 卡合部 5 1c 相對向面 5 1 d 凹球面 52 轉動凹槽形成構件 • 52a 轉動凹槽 53 滾珠（轉動體） 54 螺旋彈簧（彈推手段） 55 螺旋彈簧（彈推手段） 56 彈簧擋圈 60 傾角調整機構 6 1 螺絲構件 6 1a 螺紋（軸部） 61b 卡合部 -33- 200533462 (30) 6 1c 相對向面 6 1 d 凹球面 6 1 e 頂點 62 滾珠 63 轉動體保持構件 70 傾角調整機構 7 1 螺絲構件 • 7 1a 螺紋 71b 卡合部 7 1c 相對向面 7 1 d 轉動凹槽 72 球面形成構件 72a 凸球面 73 滾珠 74 彈簧擋圈 • 80 傾角調整機構 8 1 螺絲構件 8 1a 螺紋 8 1b 卡合部 8 1c 相對向面 82 球面形成構件 82a 凸球面 83 滾珠 84 轉動體保持構件 -34 200533462 (31) 90 傾角調整機構 9 1 螺絲構件 9 1a 螺紋 9 1b 卡合部 9 1c 相對向面 9 1 d 凸球面 100 工件保持用虎鉗 • 110 傾角調整機構 111 球面形成構件 111a 凸球面 120 工件保持用虎鉗 12 1 螺帽構件 12 1a 凸球面 12 1b 頂點 125 工件保持用虎鉗 -351 Vise for workpiece holding 2 Fixing plate 2a Insertion hole 2b Female thread 2 c Concave spherical surface 2d Fish eye hole 3 Substrate 3a Slide 3b Insertion hole 3c Insertion hole 3d Fish eye hole 3e Sliding surface 3f Insertion hole 3g Fish eye hole 3h Insertion hole 3i Fisheye hole 3j Round hole -31-200533462 (28) 3k engagement surface 4 fixed jaw 5 movable jaw 6 female threaded member 7 screw 10 tilting support mechanism 11 nut member 11a convex spherical surface 12 bolt member 12a Head 13 Spring washer 15 Tilt support mechanism 20 X-axis tilt adjustment mechanism 21 Bolt member 21a Head • 21b Corner 22 Coil spring 23 Coil spring 30 Y-axis tilt adjustment mechanism 3 1 Bolt member 3 1a Head 3 1b Angle Part 32 Coil Spring 33 Coil Spring-32- 200533462 (29) 40 Z-axis around-angle adjustment mechanism 4 1 Holder 42 Female threaded member 43 Bolt member 43a Spherical head 44 Spring washer 50 Inclination adjustment mechanism • 50X X-axis around angle Adjusting mechanism 50 YY axis around tilt adjustment mechanism 5 1 Screw member 5 1a Thread 5 lb Joint 5 1c Opposite surface 5 1 d Concave spherical surface 52 Rotating groove forming member 52a Rotating groove 53 Ball (rotating body) 54 Coil spring (spring pushing means) 55 Coil spring (spring pushing means) 56 Spring retaining ring 60 Inclination adjustment mechanism 6 1 Screw member 6 1a Thread (shaft portion) 61b Engaging portion -33- 200533462 (30) 6 1c Opposite facing surface 6 1 d Concave spherical surface 6 1 e Vertex 62 Ball 63 Rotating body holding member 70 Inclination adjustment mechanism 7 1 Screw member • 7 1a Thread 71b Engagement part 7 1c Opposite face 7 1 d Rotating groove 72 Spherical surface forming member 72a Convex spherical surface 73 Ball 74 Spring retaining ring • 80 Angle adjustment mechanism 8 1 Screw member 8 1a Thread 8 1b Engaging portion 8 1c Opposing surface 82 Spherical surface forming member 82a Convex spherical surface 83 Ball 84 Rotating body holding member -34 200533462 (31) 90 Inclination adjustment mechanism 9 1 Screw member 9 1a Thread 9 1b Engaging portion 9 1c Opposing surface 9 1 d convex spherical surface 100 vise for workpiece holding 110 tilt adjustment mechanism 111 spherical surface forming member 111a convex ball 120 of the workpiece 121 with the nut member holding vise 12 1a 12 1b vertex of the convex spherical surface 125 of the workpiece holding vise -35