Nothing Special   »   [go: up one dir, main page]

TW200511148A - Defect display apparatus - Google Patents

Defect display apparatus

Info

Publication number
TW200511148A
TW200511148A TW093119098A TW93119098A TW200511148A TW 200511148 A TW200511148 A TW 200511148A TW 093119098 A TW093119098 A TW 093119098A TW 93119098 A TW93119098 A TW 93119098A TW 200511148 A TW200511148 A TW 200511148A
Authority
TW
Taiwan
Prior art keywords
display apparatus
image data
defect display
inspection condition
display
Prior art date
Application number
TW093119098A
Other languages
Chinese (zh)
Other versions
TWI340356B (en
Inventor
Takaaki Onishi
Shuji Akiyama
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200511148A publication Critical patent/TW200511148A/en
Application granted granted Critical
Publication of TWI340356B publication Critical patent/TWI340356B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Image Processing (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Processing Or Creating Images (AREA)
  • Image Analysis (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

Store each original image data of a glass substrate in an image storage part 6, and manually or automatically configuring the image data after modifying an inspection condition of each defect inspection class or comparison for each defective part G1 ~ G6 with an inspection condition modification part 9, display the inspected result on a screen of a display device 3.
TW093119098A 2003-06-30 2004-06-29 Defect display apparatus TWI340356B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003187854A JP4079841B2 (en) 2003-06-30 2003-06-30 Defect display device

Publications (2)

Publication Number Publication Date
TW200511148A true TW200511148A (en) 2005-03-16
TWI340356B TWI340356B (en) 2011-04-11

Family

ID=33549735

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093119098A TWI340356B (en) 2003-06-30 2004-06-29 Defect display apparatus

Country Status (5)

Country Link
JP (1) JP4079841B2 (en)
KR (1) KR100791195B1 (en)
CN (1) CN100476416C (en)
TW (1) TWI340356B (en)
WO (1) WO2005001455A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007071678A (en) * 2005-09-07 2007-03-22 Hitachi High-Technologies Corp Inspection system
JP2008033306A (en) * 2006-07-03 2008-02-14 Olympus Corp Defect correcting device
JP4956077B2 (en) * 2006-07-19 2012-06-20 株式会社メック Defect inspection apparatus and defect inspection method
JP4843399B2 (en) * 2006-07-31 2011-12-21 株式会社日立ハイテクノロジーズ Inspection apparatus and inspection method
JP4913838B2 (en) * 2008-04-14 2012-04-11 日東電工株式会社 Optical display device manufacturing system and optical display device manufacturing method
CN102937594B (en) * 2012-11-02 2015-01-21 上海华力微电子有限公司 Defect detecting system and method
CN103489817B (en) * 2013-09-30 2016-01-27 上海华力微电子有限公司 defect detecting system and method
CN103809309B (en) * 2014-01-22 2016-07-06 北京京东方显示技术有限公司 Substrate detection equipment and method
CN103792705B (en) * 2014-01-28 2017-02-01 北京京东方显示技术有限公司 Detecting method and detecting device for detecting substrate defects
KR20180052246A (en) * 2016-11-10 2018-05-18 (주) 지펙케이앤디 Manually or automatically brightness controlling display device by sensor value setting of illuminance sensor
CN107040725B (en) * 2017-05-15 2021-04-30 惠科股份有限公司 Coordinate correction method of image acquisition device and image acquisition device
CN110132979A (en) * 2019-05-05 2019-08-16 东方电气集团东方锅炉股份有限公司 A kind of analysis method of metal material microscopic defect

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192943A (en) * 1983-04-15 1984-11-01 Hitachi Ltd Defect inspecting device repetitive pattern
JPH07119704B2 (en) * 1986-03-18 1995-12-20 オムロン株式会社 Board inspection equipment
JP2647502B2 (en) * 1989-06-30 1997-08-27 株式会社日立製作所 Pattern comparison inspection method and apparatus
JPH0357241A (en) * 1989-07-26 1991-03-12 Hitachi Ltd Automatic external-appearance inspection apparatus
JPH0776757B2 (en) * 1990-12-14 1995-08-16 インターナショナル・ビジネス・マシーンズ・コーポレイション Optical inspection device
JPH05172548A (en) * 1991-12-25 1993-07-09 Honda Motor Co Ltd Data output method and work surface inspection device
JPH0614959U (en) * 1992-06-01 1994-02-25 エヌオーケー株式会社 Image processing device
JP2710527B2 (en) * 1992-10-21 1998-02-10 大日本スクリーン製造株式会社 Inspection equipment for periodic patterns
JPH08219721A (en) * 1995-02-14 1996-08-30 Sony Corp Image processor
JP2981434B2 (en) * 1997-01-27 1999-11-22 株式会社日立製作所 Pattern defect detection method and apparatus
JP3288613B2 (en) * 1997-09-25 2002-06-04 株式会社クボタ Defect detection device and defect removal device
JPH11346308A (en) * 1998-06-02 1999-12-14 Olympus Optical Co Ltd Image reader for transparent original
JP2000193594A (en) * 1998-12-24 2000-07-14 Hitachi Ltd Circuit pattern inspecting method and its device
JP2000188075A (en) * 1998-12-22 2000-07-04 Hitachi Ltd Inspection method and inspection device for circuit pattern
JP4588138B2 (en) * 1999-07-23 2010-11-24 株式会社日立製作所 Circuit pattern inspection device
JP3869588B2 (en) * 1999-09-01 2007-01-17 株式会社日立製作所 Circuit pattern inspection device
JP2001141601A (en) * 1999-11-11 2001-05-25 Sony Corp Method and system for evaluating/sorting display or imaging device
JP2001156135A (en) * 1999-11-29 2001-06-08 Hitachi Ltd Method and device for sorting defective image and manufacturing method of semiconductor device using them
JP2001256480A (en) * 2000-03-09 2001-09-21 Hitachi Ltd Automatic picture classifying method and its device
JP2002228606A (en) * 2001-01-31 2002-08-14 Hitachi Ltd Electron beam circuit pattern inspecting method and apparatus therefor

Also Published As

Publication number Publication date
WO2005001455A1 (en) 2005-01-06
JP2005024312A (en) 2005-01-27
CN1813185A (en) 2006-08-02
CN100476416C (en) 2009-04-08
KR100791195B1 (en) 2008-01-02
JP4079841B2 (en) 2008-04-23
KR20060031645A (en) 2006-04-12
TWI340356B (en) 2011-04-11

Similar Documents

Publication Publication Date Title
TW200511148A (en) Defect display apparatus
TWI319576B (en) Device and method for determining a defective area on an optical media
HK1030485A1 (en) Apparatus and method for performing a defect leakage screen test for memory devices.
EP1540654A4 (en) Disc with temporary disc definition structure (tdds) and temporary defect list (tdfl), and method of and apparatus for managing defect in the same
IL161087A0 (en) Method and its apparatus for classifying defects
IL154676A0 (en) Method and its apparatus for classifying defects
AU2003274543A1 (en) Inspecting method and apparatus for a led matrix display
EP1756541A4 (en) An apparatus and method for testing flexible packages for defects
AU2003254036A8 (en) Methods and apparatus for an interactive media display
WO2004079406A3 (en) Inspection apparatus for detecting defects in transparent substrates
AU2003264963A1 (en) Method of and apparatus for managing disc defects in disc, and disc on which defects are managed
NO20056158L (en) System and procedure for electronic presentations
HK1074254A1 (en) Display panel inspection apparatus and inspection method
WO2007079344A3 (en) Methods and systems for binning defects detected on a specimen
WO2006049953A3 (en) Inspection system and method for identifying surface and body defects in a glass sheet
EP1618560A4 (en) Method and apparatus for managing defects in recording media, and a defect managed recording medium obtained using the same method
AU2003276405A1 (en) A method of and apparatus for testing for integrated circuit contact defects
AU2003237501A1 (en) Photomask and method for repairing defects
SG119174A1 (en) Method and apparatus for inspecting display base plate
AU2001272266A1 (en) Apparatus and method for associating voxel information with display positions
AU2003234496A1 (en) Method and apparatus for soft defect detection in a memory
EP1677098A4 (en) Surface defect inspecting method and device
EP1806577A4 (en) Device and method for inspecting scratch on cell external case
AUPS190002A0 (en) Optical testing method and apparatus
EP1555550A4 (en) Polarizer, method for manufacturing the same, optical film and image display

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees