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SG26394G - A superconducting thin film and a method for preparing the same - Google Patents

A superconducting thin film and a method for preparing the same

Info

Publication number
SG26394G
SG26394G SG1995906418A SG1995906418A SG26394G SG 26394 G SG26394 G SG 26394G SG 1995906418 A SG1995906418 A SG 1995906418A SG 1995906418 A SG1995906418 A SG 1995906418A SG 26394 G SG26394 G SG 26394G
Authority
SG
Singapore
Prior art keywords
preparing
same
thin film
superconducting thin
superconducting
Prior art date
Application number
SG1995906418A
Other languages
English (en)
Inventor
Hideo Itozaki
Saburo Tanaka
Nobuhiko Fujita
Shuji Yazu
Tetsuji Jodai
Original Assignee
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries
Publication of SG26394G publication Critical patent/SG26394G/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/81Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
    • H10D62/815Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW]
    • H10D62/8171Doping structures, e.g. doping superlattices or nipi superlattices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/14Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
    • H10F77/146Superlattices; Multiple quantum well structures
    • H10F77/1468Doped superlattices, e.g. N-I-P-I superlattices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/811Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H10H20/812Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0408Processes for depositing or forming copper oxide superconductor layers by sputtering
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • H10N60/0632Intermediate layers, e.g. for growth control
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661Processes performed after copper oxide formation, e.g. patterning
    • H10N60/0716Passivating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/305Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/3408Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers characterised by specially shaped wells, e.g. triangular
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/922Static electricity metal bleed-off metallic stock
    • Y10S428/9265Special properties
    • Y10S428/93Electric superconducting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
    • Y10S505/702Josephson junction present

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Laminated Bodies (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
SG1995906418A 1987-07-17 1988-07-18 A superconducting thin film and a method for preparing the same SG26394G (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP17860187 1987-07-17
JP23127487 1987-09-16

Publications (1)

Publication Number Publication Date
SG26394G true SG26394G (en) 1995-09-01

Family

ID=26498735

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1995906418A SG26394G (en) 1987-07-17 1988-07-18 A superconducting thin film and a method for preparing the same

Country Status (6)

Country Link
US (1) US5447908A (ja)
EP (1) EP0299879B1 (ja)
JP (1) JP2664066B2 (ja)
DE (1) DE3889989T2 (ja)
HK (1) HK73795A (ja)
SG (1) SG26394G (ja)

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* Cited by examiner, † Cited by third party
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EP0298866B1 (en) * 1987-07-06 1996-05-01 Sumitomo Electric Industries Limited A superconducting thin film and a method for preparing the same
JP2557486B2 (ja) * 1987-08-20 1996-11-27 住友電気工業株式会社 超電導セラミックス長尺体の製造方法および超電導セラミックス長尺体
JP2666337B2 (ja) * 1988-03-30 1997-10-22 セイコーエプソン株式会社 高温超伝導体のコンタクト構造
JPH0286014A (ja) * 1988-06-17 1990-03-27 Sumitomo Electric Ind Ltd 複合酸化物超電導薄膜と、その成膜方法
JP2524827B2 (ja) * 1988-11-29 1996-08-14 財団法人生産開発科学研究所 積層薄膜体及びその製造法
JP2830977B2 (ja) * 1989-12-29 1998-12-02 キヤノン株式会社 記録媒体とそれを用いる記録方法及び記録・再生装置
DE19544697C1 (de) * 1995-11-30 1996-07-11 Abb Research Ltd Metall-Keramik-Kompositwerkstoff und Verfahren zu dessen Herstellung
CA2212473C (en) 1996-08-08 2001-12-11 Sumitomo Electric Industries, Ltd. Method for preparing layered structure including oxide superconductor thin film
JP3881732B2 (ja) * 1996-10-16 2007-02-14 財団法人国際超電導産業技術研究センター 酸化物超電導体複合体の製造方法
US6136682A (en) * 1997-10-20 2000-10-24 Motorola Inc. Method for forming a conductive structure having a composite or amorphous barrier layer
JP4031732B2 (ja) * 2003-05-26 2008-01-09 京セラ株式会社 静電チャック
US9653398B1 (en) * 2015-12-08 2017-05-16 Northrop Grumman Systems Corporation Non-oxide based dielectrics for superconductor devices
DE102017102377B4 (de) * 2017-02-07 2019-08-22 Schott Ag Schutzverglasung, thermisches Prozessaggregat und Verfahren zur Herstellung einer Schutzverglasung
WO2019160572A2 (en) 2017-05-16 2019-08-22 PsiQuantum Corp. Gated superconducting photon detector
WO2019160573A2 (en) 2017-05-16 2019-08-22 PsiQuantum Corp. Superconducting signal amplifier
US10276504B2 (en) 2017-05-17 2019-04-30 Northrop Grumman Systems Corporation Preclean and deposition methodology for superconductor interconnects
WO2018232332A1 (en) * 2017-06-15 2018-12-20 PsiQuantum Corp. Niobium-germanium superconducting photon detector
US10566516B2 (en) 2017-07-28 2020-02-18 PsiQuantum Corp. Photodetector with superconductor nanowire transistor based on interlayer heat transfer
US10374611B2 (en) 2017-10-05 2019-08-06 PsiQuantum Corp. Superconducting logic components
US10461445B2 (en) 2017-11-13 2019-10-29 PsiQuantum Corp. Methods and devices for impedance multiplication
WO2019157077A1 (en) 2018-02-06 2019-08-15 PsiQuantum Corp. Superconducting photon detector
US10972104B2 (en) 2018-02-14 2021-04-06 PsiQuantum Corp. Superconducting logic components
WO2019213147A1 (en) 2018-05-01 2019-11-07 PsiQuantum Corp. Photon number resolving superconducting detector
US10984857B2 (en) 2018-08-16 2021-04-20 PsiQuantum Corp. Superconductive memory cells and devices
US10573800B1 (en) 2018-08-21 2020-02-25 PsiQuantum Corp. Superconductor-to-insulator devices
US11101215B2 (en) 2018-09-19 2021-08-24 PsiQuantum Corp. Tapered connectors for superconductor circuits
US11719653B1 (en) 2018-09-21 2023-08-08 PsiQuantum Corp. Methods and systems for manufacturing superconductor devices
US10944403B2 (en) 2018-10-27 2021-03-09 PsiQuantum Corp. Superconducting field-programmable gate array
US11289590B1 (en) 2019-01-30 2022-03-29 PsiQuantum Corp. Thermal diode switch
US11569816B1 (en) 2019-04-10 2023-01-31 PsiQuantum Corp. Superconducting switch
US11009387B2 (en) 2019-04-16 2021-05-18 PsiQuantum Corp. Superconducting nanowire single photon detector and method of fabrication thereof
US11380731B1 (en) 2019-09-26 2022-07-05 PsiQuantum Corp. Superconducting device with asymmetric impedance
US11585695B1 (en) 2019-10-21 2023-02-21 PsiQuantum Corp. Self-triaging photon detector
US11994426B1 (en) 2019-11-13 2024-05-28 PsiQuantum Corp. Scalable photon number resolving photon detector

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JPS5897880A (ja) * 1981-12-07 1983-06-10 Hitachi Ltd 超電導薄膜機能素子の接続端子用突起電極
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Also Published As

Publication number Publication date
US5447908A (en) 1995-09-05
JPH01163058A (ja) 1989-06-27
EP0299879A3 (en) 1989-08-30
EP0299879A2 (en) 1989-01-18
DE3889989T2 (de) 1994-12-01
HK73795A (en) 1995-05-19
DE3889989D1 (de) 1994-07-14
EP0299879B1 (en) 1994-06-08
JP2664066B2 (ja) 1997-10-15

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