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SG11201702178TA - Probe unit - Google Patents

Probe unit

Info

Publication number
SG11201702178TA
SG11201702178TA SG11201702178TA SG11201702178TA SG11201702178TA SG 11201702178T A SG11201702178T A SG 11201702178TA SG 11201702178T A SG11201702178T A SG 11201702178TA SG 11201702178T A SG11201702178T A SG 11201702178TA SG 11201702178T A SG11201702178T A SG 11201702178TA
Authority
SG
Singapore
Prior art keywords
probe unit
probe
unit
Prior art date
Application number
SG11201702178TA
Inventor
Yoshio Yamada
Kohei Hironaka
Original Assignee
Nhk Spring Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nhk Spring Co Ltd filed Critical Nhk Spring Co Ltd
Publication of SG11201702178TA publication Critical patent/SG11201702178TA/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02Contact members
    • H01R13/22Contacts for co-operating by abutting
    • H01R13/24Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2421Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means using coil springs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R2201/00Connectors or connections adapted for particular applications
    • H01R2201/20Connectors or connections adapted for particular applications for testing or measuring purposes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
SG11201702178TA 2014-09-19 2015-09-18 Probe unit SG11201702178TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014191972 2014-09-19
PCT/JP2015/076789 WO2016043327A1 (en) 2014-09-19 2015-09-18 Probe unit

Publications (1)

Publication Number Publication Date
SG11201702178TA true SG11201702178TA (en) 2017-04-27

Family

ID=55533363

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201702178TA SG11201702178TA (en) 2014-09-19 2015-09-18 Probe unit

Country Status (4)

Country Link
US (1) US10082525B2 (en)
JP (1) JP6522634B2 (en)
SG (1) SG11201702178TA (en)
WO (1) WO2016043327A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018181216A1 (en) * 2017-03-30 2018-10-04 日本発條株式会社 Probe holder and probe unit
CN108649361A (en) * 2018-05-03 2018-10-12 京东方科技集团股份有限公司 A kind of subconnector
US11150269B2 (en) * 2019-08-15 2021-10-19 Mpi Corporation Probe head for high frequency signal test and medium or low frequency signal test at the same time
TWI831293B (en) * 2022-07-14 2024-02-01 中華精測科技股份有限公司 Chip testing socket
IT202200026178A1 (en) * 2022-12-21 2024-06-21 Technoprobe Spa Measuring head for an electronic device testing equipment

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09312185A (en) 1996-05-22 1997-12-02 Nippon Konekuto Kogyo Kk Rolling probe connector for printed circuit board
US5945836A (en) * 1996-10-29 1999-08-31 Hewlett-Packard Company Loaded-board, guided-probe test fixture
US6838898B2 (en) * 2002-01-17 2005-01-04 Di/Dt, Inc. Apparatus and method for testing high current circuit assemblies
JP3090255U (en) 2002-05-24 2002-11-29 志成 呉 Probe structure
WO2007066382A1 (en) * 2005-12-06 2007-06-14 Unitechno Inc. Double end displacement type contact probe
JP4916717B2 (en) * 2005-12-27 2012-04-18 日本発條株式会社 Conductive contact holder and conductive contact unit
KR101013172B1 (en) * 2006-04-28 2011-02-10 니혼 하츠쵸 가부시키가이샤 Conductive contact holder
JP2010175371A (en) * 2009-01-29 2010-08-12 Yokowo Co Ltd Inspection socket
JP5229104B2 (en) 2009-05-15 2013-07-03 富士通株式会社 Socket probe, integrated circuit socket and electronic device
WO2011013731A1 (en) 2009-07-30 2011-02-03 株式会社ヨコオ Contact probe and socket
KR101415722B1 (en) * 2010-06-25 2014-07-25 니혼 하츠쵸 가부시키가이샤 Contact probe and probe unit
JP5827554B2 (en) * 2011-12-05 2015-12-02 株式会社日本マイクロニクス Probe assembly for power semiconductor device inspection and inspection apparatus using the same
JP5987447B2 (en) * 2012-04-23 2016-09-07 株式会社デンソー Inspection device
JP6107234B2 (en) * 2013-03-01 2017-04-05 山一電機株式会社 Inspection probe and IC socket including the same

Also Published As

Publication number Publication date
WO2016043327A1 (en) 2016-03-24
JP6522634B2 (en) 2019-05-29
US10082525B2 (en) 2018-09-25
JPWO2016043327A1 (en) 2017-06-29
US20170299631A1 (en) 2017-10-19

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