KR101013172B1 - Conductive contact holder - Google Patents

Abstract

SUMMARY OF THE INVENTION The present invention provides a conductive contact holder capable of responding to a high frequency signal by a simple and easy assembly, and at the same time, increasing integration and miniaturization of an inspection object. An insulating holder member formed of an insulating material and having a first insertion hole for directly inserting a signal conductive contact for inputting and outputting a signal to and from a circuit structure over approximately the entire length thereof; And a conductive block member having a second insertion hole for contactably inserting a part of the contactor.

Description

Conductive Contact Holder {CONDUCTIVE CONTACT HOLDER}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conductive contact holder for receiving a conductive contact for use in conduction inspection of circuit structures such as semiconductor integrated circuits.

When conducting a conduction inspection of a semiconductor integrated circuit such as an IC chip, a conductive contact unit for accommodating a plurality of conductive contacts in a predetermined position is used corresponding to the installation pattern of the external connection electrode of the semiconductor integrated circuit. This conductive contact unit is provided with the conductive contact holder formed using the insulating member in order to accommodate a some conductive contact.

By the way, in recent years, in order to realize high-speed computation processing, the semiconductor integrated circuit has a structure that operates by an electric signal (high frequency signal) having a high frequency of about several hundred megahertz (MHz) to several hundred gigahertz (GHz). It has been. In addition, high integration and miniaturization of semiconductor integrated circuits are also proceeding remarkably.

In such a situation, it is desirable to make the outer diameter as small as possible for the conductive contact that can cope with the high frequency signal and can be used for the inspection of the highly integrated and miniaturized semiconductor integrated circuit. At the same time, assembly was also difficult. Conventionally, as a technique for solving this problem, the technique of providing the pipe-shaped member which has insulation around the electroconductive contactor is disclosed (for example, refer patent document 1 and 2).

[Patent Document 1]

Japanese Patent Application Laid-Open No. 2001-99889

[Patent Document 2]

Japanese Patent Application Laid-Open No. 2005-49163

However, in the above-described prior art, the pipe member provided around the conductive contact is also made narrower so as to have a diameter of up to several hundred micrometers at most, so that such a thinned pipe member is manufactured. It was difficult. Moreover, even if such a thin pipe member can be manufactured, there is a possibility that the pipe member is deformed when the pipe member is assembled to the holder substrate, and it is hard to say that the difficulty of assembly is eliminated.

SUMMARY OF THE INVENTION The present invention has been made in view of the above, and an object of the present invention is to provide a conductive contact holder capable of responding to a high frequency signal by a simple and easy assembly and capable of coping with high integration and miniaturization of inspection objects.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject and achieve the objective, the conductive contact holder which concerns on this invention is a signal conductive contact which inputs and outputs a signal with respect to a circuit structure, and an earth conductive contactor which supplies earth potential to the said circuit structure. A conductive contact holder for accommodating a conductive material comprising: an insulating holder member formed of an insulating material, the insulating holder member having a first insertion hole for directly inserting the signal conductive contact member over approximately the entire length, and formed of a conductive material; It is characterized by including the conductive block member which has a 2nd insertion hole which inserts a part of contactor so that contacting is possible.

In the conductive contact holder according to the present invention, the insulating holder member includes first and second holder members stacked in the longitudinal direction of the first insertion hole, and the conductive block member is formed as described above. It is located between the first holder member and the second holder member.

In the conductive contact holder according to the present invention, a part of the conductive block member is exposed on the surface of the conductive contact holder.

Moreover, the conductive contact holder which concerns on this invention is formed of the conductive material in the said invention, and has the recessed part which inserts the edge part of the 2nd earth conductive contact which is shorter in total length than the said conductive contact for earth, And a conductive hollow block member having a hollow portion in which the conductive block member can be disposed, wherein at least a part of the first insertion hole forming portion of the conductive block member and the insulating holder member is disposed in the hollow portion. do.

In the conductive contact holder according to the present invention, a part of the conductive hollow block member is exposed on the surface of the conductive contact holder.

Moreover, in the said invention, the electroconductive contact holder which concerns on this invention is characterized in that the said electroconductive block member has a recessed part which inserts the edge part of the said 2nd earth | wire conductive contact.

The conductive contact holder according to the present invention is characterized in that the insulating holder member and the conductive hollow block member are fixed to each other by using at least one of a screw and an adhesive.

According to the present invention, an insulating holder member is formed of an insulating material and has a first insertion hole for directly inserting a signal conductive contact for inputting and outputting a signal to and from a circuit structure over approximately the entire length, and is formed of a conductive material. By providing a conductive block member having a second insertion hole for contacting a portion of the earth-conductive contactor, the simple and easy assembly makes it possible to cope with high-frequency signals and to increase the integration and miniaturization of the inspection object. It is possible to provide a conductive contact holder that is also compatible.

1 is an exploded perspective view showing a conductive contact holder configuration according to an embodiment of the present invention;

2 is a partial cross-sectional view showing a configuration of a main portion of a conductive contact holder according to one embodiment of the present invention;

3 is a partially enlarged view of FIG. 2;

4 is a diagram showing a state at the time of inspection using the conductive contact holder according to the embodiment of the present invention;

5 is a diagram showing a configuration example in the case where the conductive block member and the conductive hollow block member are connected;

6 is a diagram showing the configuration of a conductive contact holder according to a first modification of an embodiment of the present invention;

7 is a diagram showing the configuration of a conductive contact holder according to a second modification of an embodiment of the present invention;

It is a figure which shows the structure of the electroconductive contact holder which concerns on the 3rd modified example of one Embodiment of this invention.

[Description of Drawings]

1, 9, 10, 11: conductive contact holder

2, 2-2, 2-3, 3, 3-2, 3-3, 3-4: holder member

2a, 3a: abutting portion 2b, 3b: substrate portion

2c, 3c: protrusion

4, 4-2, 4-3, 5, 5-2, 45: block member

6: conductive contact for signal

7, 8: earth conductive contact

21, 22, 31, 32, 33, 36, 41: insertion hole

21a, 22a, 31a, 32a, 33a: small diameter

Large diameter part: 21b, 22b, 31b, 32b, 33b

23, 24, 34, 35, 51: screw hole

42, 52: recess 45a: first member

45b: second member 45c: connecting portion

61, 62, 71, 72, 81, 82: needle-shaped member

61a, 62a, 71a, 72a, 81a, 82a: flange portion

63, 73, 83: spring member

63a, 73a, 83a: tightly wound portion

63b, 73b, 83b: coarse wound

91, 92: screw 100: semiconductor integrated circuit

101, 102: electrode for connection 200: circuit board

201, 202, 203: electrode

EMBODIMENT OF THE INVENTION Hereinafter, the best form (henceforth "embodiment") for implementing this invention with reference to an accompanying drawing is demonstrated. Note that the drawings are schematic, and that the relationship between the thickness and width of each part, the ratio of the thickness of each part, and the like may be different from those in the real world. Of course, this other part may be included.

1 is an exploded perspective view showing the configuration of a conductive contact holder according to an embodiment of the present invention. 2 is a longitudinal cross-sectional view which shows the principal part of the conductive contact holder which concerns on this embodiment, and FIG. 3 is a partially enlarged view of FIG. The conductive contact holder 1 shown in Figs. 1 to 3 constitutes at least a part of the conductive contact unit for inspecting the electrical characteristics of a predetermined circuit structure represented by a semiconductor integrated circuit such as an IC chip. A plurality of conductive contacts, which transmit and receive electrical signals and the like between the circuit and the circuit board on which the inspection circuit is mounted, are accommodated and held in accordance with a predetermined pattern. When the conductive contact holder 1 is used for inspection of a semiconductor integrated circuit, a guide member (not shown) for preventing the positional shift of the semiconductor integrated circuit is arranged around the outer circumference of the upper surface side of FIG. The circuit board provided with the test circuit is provided in the bottom surface side of the inside, and comprises a socket-shaped conductive contact unit as a whole. In addition, in FIG. 2, the part of the conductive contact which the conductive contact holder accommodates is abbreviate | omitted, and is described.

Hereinafter, the configuration of the conductive contact holder 1 will be described in detail. The conductive contact holder 1 is formed using an insulating material such as a synthetic resin material having a high insulating property, and is formed between two holder members 2 and 3 stacked in the plate thickness direction and the holder members 2 and 3. It is located in the, and provided with two block members (4, 5) formed of a conductive material. One of the holder members 2 and 3 is the first holder member, the other is the second holder member, and constitutes the insulating holder member as a whole.

The holder member 2 is in contact with the abutting portion 2a in contact with the corresponding portion of the other holder member 3 and the upper surfaces of the block members 4 and 5, and the holder member 3 or the block member ( It has a board | substrate part 2b which exposes one end part of the some electroconductive contact inserted into 4), and the protrusion part 2c which protrudes in the surface which opposes the holder member 3 among the surfaces of the board | substrate part 2b. In the substrate portion 2b, a plurality of insertion holes 21 and 22 for inserting a plurality of conductive contacts are formed in accordance with a predetermined pattern, respectively. In addition, the holder member 2 is provided with a screw hole 23 (four in FIG. 1) for inserting the screw 91 fastened to the holder member 3 and the holder member 3 via the block member 4. ) And screw holes 24 (8 in Fig. 1) for inserting the screw 92 to be fastened to each other. In addition, in FIG. 1, in order to simplify a base material, although the screw 91 and the screw 92 are described one by one, in fact, the screw 91 or 92 suitable for each of the screw holes 23 and 24 is installed, of course. to be.

The plurality of insertion holes 21 are provided in such a manner that each of the opening surfaces has a substantially matrix shape in the vicinity of the center portion of the substrate portion 2b, and has a hole shape having stages having different diameters in the penetrating direction. That is, the insertion hole 21 is composed of a small diameter portion 21a having an opening facing the upper end surface of the conductive contact holder 1 and a large diameter portion 21b having a larger diameter than the small diameter portion 21a. Is done. In addition, the plurality of insertion holes 22 are provided so that each of the opening surfaces surrounds the periphery of the insertion hole 21 to form a substantially square shape. Similarly to the insertion hole 21, the stages having different diameters along the penetrating direction are provided. It is shaped like a hole. That is, the insertion hole 22 consists of the small diameter part 22a and the large diameter part 22b.

The holder member 3 includes abutting portion 3a which abuts on abutting portion 2a of the holder member 2, a substrate portion 3b on which the block members 4 and 5 are mounted, and a substrate portion 3b. Has a projection (3c) protruding from the surface of the surface of the surface) facing the holder member (2). In the substrate portion 3b, a plurality of insertion holes 31 and 32 for inserting a plurality of conductive contacts are formed in a predetermined pattern, respectively, and a plurality of insertion holes 31 and 32 are inserted into the holder member 2 or the block member 5, respectively. One end of the conductive contact of the surface is exposed to the bottom surface side. At the edge end of the board | substrate part 3b, the insertion hole 33 which inserts the electrically conductive contact inserted into the block member 5 mounted above it is formed in multiple numbers.

In addition, the holder member 3 is provided with a screw hole 34 (four in FIG. 1) for inserting the screw 91 to be fastened to the holder member 3 and the holder member 3 via the block member 4. ) And screw holes 35 (8 in Fig. 1) for inserting the screw 92 to be fastened to each other.

The insertion hole 31 formed in the board | substrate part 3b has the small diameter part 31a which has an opening in the bottom face side of the conductive contact holder 1, and the large diameter part whose diameter is larger than this small diameter part 31a ( 31b). Similarly, the insertion hole 33 formed in the board | substrate part 3b also consists of the small diameter part 33a and the large diameter part 33b. Moreover, the insertion hole 32 formed in the projection part 3c consists of the small diameter part 32a and the large diameter part 32b. 2 and 3, the diameters of the large diameter portions 31b and 32b are the same as the diameters of the large diameter portions 21b and 22b, respectively.

The upper surface of the projection part 3c is in contact with the bottom surface of the projection part 2c of the holder member 2 at the time of assembly. The formation pattern of the insertion hole 32 corresponds to the formation pattern of the insertion hole 22 in the board | substrate part 2b of the holder member 2. Therefore, at the time of assembly, there exists a thing which coaxially communicates with each other by the insertion hole 22 and the insertion hole 32, and these communicating insertion holes 22 and 32 transmit and receive an electrical signal among the conductive contacts. A first insertion hole is formed in which the signal conductive contact 6 is inserted directly without passing through the other member over approximately the entire length. In this sense, the projections 2c and 3c form at least part of the first insertion hole forming portion.

In addition, the diameters of the projections 2c and 3c depend on various conditions such as the materials of the holder members 2 and 3 and the block members 4 and 5, the diameter of the conductive contacts, the plate thickness of the conductive contact holder 1, and the like. What is shown in FIG. 2 etc. is only an example to the last.

As the insulating material constituting the holder members 2, 3, it is preferable to use a resin material having good sliding properties, machinable ceramics, Teflon (registered trademark) and the like. Thereby, the sliding resistance at the time of the stretching operation of the conductive contact can be lowered, and the operation of the conductive contact can be smoothed.

Next, the structure of the block members 4 and 5 is demonstrated. The block member 4 has an insertion hole 41 formed of a conductive material, forming an approximately rectangular parallelepiped shape, and having an opening surface arranged so as to form the same pattern as the opening surface of the insertion hole 2l. The insertion hole 41 is combined with the insertion hole 21 of the holder member 2 and the insertion hole 3l of the holder member 3 to form an axis parallel to the plate thickness direction of the conductive contact holder 1. Communicate with In this way, the insertion holes 21, 31, and 41 which make up a set insert the earth-conductive contact 7 which supplies an earth potential among the electroconductive contacts. Therefore, the insertion hole 41 formed in the block member 4 is not different from the second insertion hole for inserting a part of the earth-conductive contact 7 in contact with each other, and in this sense, the block member 4 is a conductive block. It is absent.

On the other hand, the block member 5 has a substantially U-shaped upper and lower surfaces, and a block member 4 having the above-described configuration is disposed in the hollow portion. In the gap between the block member 4 and the block member 5, the projection part 2c of the holder member 2 and the projection part 3c of the holder member 3 are fitted so that the end faces of each other may abut. The block member 5 is formed with a recess 52 having an opening surface at a position opposite to the insertion hole 33 formed in the holder member 3. In the recess 52, an earth conductive contact 8 having a shorter overall length than the above-described earth conductive contact 7 is inserted. Therefore, the block member 5 is formed of a conductive material and has a recess for inserting the end of the earth conductive contact 8 which is the second earth conductive contact, and at the same time, the hollow part capable of arranging the block member 4. The branch is a conductive hollow block member.

In the block member 5, the screw holes 51 (8 in FIG. 1) for inserting the screw 92 to fasten with the holder members 2 and 3 correspond to the screw holes 24 and 35. FIG. It is formed in.

As the conductive materials constituting the block members 4 and 5, conductive materials having high strength and heat resistance and small thermal expansion coefficients, for example, low thermal expansion metals such as Invar and Kovar (registered trademark), semiconductors, ceramics, and glass Etc. can be used.

In addition to the function of improving the strength of the conductive contact holder 1, the block members 4 and 5 having the above-described configuration include electromagnetic waves generated and radiated when an electrical signal passes through the conductive contacts, or electromagnetic waves propagated from the outside. (A) has an electromagnetic shielding function to prevent reaching other conductive contacts; In order to sufficiently exhibit such an electromagnetic shielding function, it is more preferable that the volume resistivity of the block members 4 and 5 is as small as 1 to 100 占 Ωm.

Next, the structure of the conductive contact which the conductive contact holder 1 accommodates is demonstrated. The conductive contacts to be applied in this embodiment include a signal conductive contact 6 for inputting / outputting an electric signal for inspection or supplying power, an earth conductive contact 7 for supplying an earth potential to an inspection object, and an earth conductivity It is largely distinguished from the earth-conductive contact 8 (FIG. 2 earth-contact) which is shorter than the contactor 7 in total length.

The signal conductive contact 6 includes the needle-shaped member 61 in contact with the connecting electrode of the semiconductor integrated circuit to be inspected, the needle-shaped member 62 in contact with the electrode of the circuit board, and the needle-shaped members 61 and 62. It is provided between the spring member 63 for freely connecting the two needle-shaped members (61, 62). These needle-shaped members 61 and 62 and the spring member 63 have the same axis, and during the inspection, the spring member 63 is stretched in this axial direction to mitigate the impact on the connecting electrode of the semiconductor integrated circuit. .

The tip end of the needle-shaped member 61 has a plurality of pawls at the tip so as to reliably hold a connecting electrode (for example, a spherical shape) of a semiconductor integrated circuit positioned at the top during inspection. It forms a shape projecting in the direction. At the other end of the needle-shaped member 61, a flange portion 61a which abuts on the end of the spring member 63 is provided. The flange portion 61a contacts the stepped portion that forms the boundary between the large diameter portion 22b and the small diameter portion 22a of the insertion hole 22, thereby retaining the holder member 3 of the signal conductive contact 6. It prevents from falling out.

The needle-shaped member 62 has a sharp tip which abuts on an electrode on a circuit board. The needle-shaped member 62 is movable in the axial direction by the elastic action of the spring member 63, is biased in the electrode direction by the elastic force of the spring member 63, and the contact resistance is reduced. It can be contacted with the electrode of a circuit board. This needle-shaped member 62 also contacts the stepped portion that forms the boundary between the large diameter portion 32b and the small diameter portion 32a of the insertion hole 32, so that the holder member 3 of the conductive conductor for signal 6 is connected. A flange portion 62a is provided to prevent the falling off from the pipe.

The spring member 63 is a tightly wound portion 63a on the needle-shaped member 61 side and a coarse portion 63b on the needle-shaped member 62 side. The end portion of the tightly wound portion 63a abuts the flange portion 61a, while the end portion of the coarse portion portion 63b abuts the flange portion 62a, and the needle-shaped members 61 and 62 and the spring member ( 63) is joined by fitting by a coiling force of a spring, soldering, or welding.

The earth conductive contact 7 includes needle members 71 and 72 and a spring member 73 which freely stretches the needle members 71 and 72. The needle member 71 has a needle member 61, the needle member 72 has a needle member 62, and the spring member 73 has a spring member 63, each having the same configuration. For this reason, the flange parts 71a and 72a are provided in the needle-shaped members 71 and 72, respectively, and the fall-off prevention function from the conductive contact holder 1 of the earth-conductive contact 7 is performed.

The ground conductive contact 8 includes two needle-shaped members 81 and 82 which form substantially the same shape, and a spring member 83 which freely stretches and connects the needle-shaped members 81 and 82 to each other. It is inserted in the groove part formed by the insertion hole 33 of 3b, and the recessed part 52 of the block member 5. As shown in FIG. Flange portions 81a and 82a are formed at the respective basic ends of the needle-shaped members 81 and 82, respectively. In addition, the spring member 83 has a close winding portion 83a and a coarse winding portion 83b. In addition, the needle-like member located above the ground conductive contact 8 must have the same configuration as that of the needle-shaped member 81 because its tip portion is in contact with the bottom surface of the recess 52. none.

In order to manufacture the conductive contact holder 1 having the above configuration, first, various insertion holes or screw holes are formed in the holder members 2 and 3 and the block members 4 and 5. In this case, the insulating material or the conductive material constituting the base material is subjected to any one of drilling, etching, and punching molding, or processing using any one of laser, electron beam, ion beam, wire discharge, and the like.

As described above, when assembling after forming the various insertion holes and the screw holes, the block members 4 and 5 are held by the holder members 2 and 3, and the screws 91 and 92 are used. Tighten the set part. At this time, the block member 4 is disposed in the hollow portion of the block member 5, and the side surface is surrounded by the protrusion 2c of the holder member 2 and the protrusion 3c of the holder member 3. Since the position is fixed, it is not necessary to fasten the block member 4 and the other member by screws or the like. Alternatively, the holder members 2 and 3 and the block members 4 and 5 may be assembled by using an appropriate adhesive instead of the screws 91 and 92. In addition, the conductive contact holder 1 may be assembled by using a screw and an adhesive together. In addition to screws and adhesives, the holder members 2 and 3 and the block member 5 may be fastened by using fastening members such as resin rivets, press-fit pins or snap fits.

By the way, when assembling the conductive contact holder 1, it is necessary to position the block members 4 and 5 and the holder members 2 and 3. In order to perform this positioning, a positioning hole communicating with each other coaxially is formed with respect to the block member 4 and the holder members 2 and 3, and a positioning pin is inserted into this positioning hole. After the positioning is performed, fastening is performed using the screws 91 and 92, whereby positioning with higher accuracy can be performed.

FIG. 4 is a diagram showing a state when inspection is performed using the conductive contact holder 1 having the above configuration, and the conductive contact holder 1 is an enlarged cross-sectional view of the same portion as in FIG. 3. On the upper side of the conductive contact holder 1, the semiconductor integrated circuit 100 to be inspected is mounted, and a spherical connection electrode 101 is connected to the tip of the needle-shaped member 61 of the conductive contact 6 for signal. On the other hand, the electrode 102 for connection similarly having a spherical shape is in contact with the tip of the needle-shaped member 71 of the ground conductive contact 7. The electrode 201 of the circuit board 200 is in contact with the tip of the needle-shaped member 62 of the signal conductive contact 6, and the electrode 202 of the circuit board 200 is connected to the earth conductive contact 7. The electrode 203 of the circuit board 200 is in contact with the tip of the needle-shaped member 82 of the earth conductive contact 8.

In the state shown in FIG. 4, the spring members 63, 73 and 83 are contracted in the axial direction, but at the time of contraction, slight deflection occurs in the direction orthogonal to the axial direction (horizontal direction in FIG. 4). In this case, the spring member 73 is in direct contact with the block member 4, so that the earth-conductive contactor 7 is electrically connected to the block member 4, and the earth potential and the block supplied by the earth-conductive contactor 7 are supplied. The potential of the member 4 becomes equal. In addition, since the tip of the needle-shaped member 81 is in contact with the block member 5, the earth conductive contact 8 for earth has a ground potential and a block member 5 supplied by the earth conductive contact 8. The potential of is also the same. As a result, a strong ground is formed around the signal conductive contact 6, so that cross-talk between adjacent signal conductive contacts 6 can be reduced. Therefore, the loss of the signal transmitted between the semiconductor integrated circuit 100 and the circuit board 200 can be suppressed, and the electrical characteristics of the conductive contact holder 1 can be improved. In addition, what is necessary is just to make the thickness of the block members 4 and 5 into an appropriate thickness according to the electrical characteristic calculated | required with respect to the conductive contact holder 1.

By the way, according to the arrangement pattern of the signal conductive contact 6, it is also possible to set it as the structure which connected the conductive block member and the conductive hollow block member previously. 5 is a diagram showing an example of the configuration of such a block member. The block member 45 shown in the figure includes a first member 45a corresponding to the block member 4 (conductive block member) in FIG. 1 and a block member 5 (conductive hollow block member) in FIG. The connecting part which consists of the equivalent 2nd member 45b, the same conductive material as the 1st member 45a, and the 2nd member 45b, and connects and connects the 1st member 45a and the 2nd member 45b. Has 45c. In the first member 45a, an insertion hole 451 for inserting the ground conductive contact 7 is provided. In addition, the screw holes 452 (8 in Fig. 5) correspond to the screw holes 24, 35 in order to insert the screws 92 for fastening with the holder members 2, 3 to the second member 45b. It is formed in the position to make. When the conductive contact holder is formed using the block member 45, the notch which can be fitted with the connecting portion 45c is provided in the protrusion 2c of the holder member 2 or the protrusion 3c of the holder member 3. Will be formed.

In addition, the ground conductive contacts 7 and 8 have a very small structure due to the high integration and miniaturization of the semiconductor integrated circuit 100, so that their volume can be neglected with respect to the volumes of the block members 4 and 5. Therefore, it can be regarded that the variation value of the potential of the block members 4 and 5 caused by the electric charges given from the ground conductive contacts 7 and 8 is approximately zero. In other words, the potential of the ground conductive contacts 7 and 8, that is, the potential of the block members 4 and 5, is stably maintained at the earth potential.

According to one embodiment of the present invention described above, an insulating holder member formed of an insulating material and having a first insertion hole for directly inserting a signal conductive contact for inputting and outputting a signal to a circuit structure over approximately the entire length thereof; By providing a conductive block member formed of a conductive material and having a second insertion hole for inserting a part of the earth-conductive contact member into contact with the earth, it is possible to cope with high frequency signals by a simple and easy assembly. A conductive contact holder that can cope with high integration and miniaturization of an inspection object can be provided.

Further, according to the present embodiment, since the insertion hole for inserting the signal conductive contact member is directly formed in the insulating holder member, even when the pitch of the conductive contact is narrow to several hundred micrometers or less, the coaxial structure can be easily formed. . Therefore, it is not necessary to provide an insulating pipe member as in the conventional example, and manufacturing cost can be reduced.

In addition, the thickness of the axial direction in which the conductive contacts of the block members 4 and 5 are inserted is arbitrary, and it can also be set to the same grade as the thickness of the conductive contact holder 1, for example. In this case, the electromagnetic wave can be shielded more strongly with respect to the signal conductive contact 6.

In the above description, the signal conductive contact 6 is described without distinguishing between the electrical contact conductive contact and the power supply conductive contact. However, the diameter of the conductive contact for power supply is larger than the diameter of the electrical contact conductive contact point in view of the electric current. In some cases, larger ones are preferable. In such a case, the insertion hole may be formed so that the diameter of the insertion hole for inserting the conductive contact for electrical signal and the diameter of the insertion hole for inserting the conductive contact for power is different according to the wiring pattern to be inspected.

In addition, the outer diameter of the ground conductive contact 7 can be made larger than the outer diameter of the signal conductive contact 6. This is because the earth conductive contact 7 does not have to perform impedance matching of characteristic impedance, and the outer diameter can be made as large as possible after considering strength, durability, and further, electrical conductivity.

Moreover, said conductive contact is an example to the last, and it is possible to apply this embodiment also to the various conductive contacts conventionally known.

In addition, in this embodiment, although the case where a conductive contact unit is used for the test | inspection of a semiconductor integrated circuit was assumed, what is applicable also to the package board | substrate in which the semiconductor chip was mounted as an inspection object, or the high density probe unit used for the wafer level test | inspection is used. Of course.

(Variation)

Hereinafter, the modification of the conductive contact which concerns on this embodiment is demonstrated. 6 is a diagram illustrating a configuration of main parts of the conductive contact holder according to the first modification of the present embodiment. The conductive contact holder 9 shown in the drawing has a block member 4-2 in which the earth-conductive contact 8 having the shorter electric length inserts the earth-conductive contact 7 with the longer electric field (conductive). And a block member). In this case, the insertion hole 36 for inserting the earth-conductive contact 8 into the holder member 3-2 is formed, and the tip of the earth-conductive contact 8 is inserted into the block member 4-2. An insertable recess 42 is formed. According to the conductive contact holder 9 having such a configuration, it is possible to form a stronger ground.

FIG. 7: is a figure which shows the structure of the principal part of the conductive contact holder which concerns on the 2nd modified example of this embodiment. In the conductive contact holder 10 shown in the drawing, a part of the outer edge of the block member 4-3 (conductive block member) into which the ground conductive contact 7 is inserted is located near the signal conductive contact 6. It extends and protrudes in the plate | board thickness direction, and is exposed to the surface of the said electroconductive contact holder 10. As shown in FIG. In this case, the holder members 2-2 and 3-3 have shapes which can be fitted with portions where the block members 4-3 are exposed to the outside, respectively. According to the electroconductive contact holder 10 which has such a structure, an electromagnetic wave can be shielded more reliably. Further, depending on the configuration of the semiconductor integrated circuit or the circuit board to which the conductive contact holder 10 is to be connected, an insulating film for preventing short circuits may be provided in a portion exposed to the outside of the block member 4-3.

8 is a diagram showing the configuration of the main portion of the conductive contact holder according to the third modification of the present embodiment. In the conductive contact holder 11 shown in the drawing, a part of the outer edge of the block member 4-3 is exposed to the surface of the conductive contact holder 11 and the earth conductive contact 8 is inserted therein. A part of the inner edge of the block member 5-2 (the conductive hollow block member) also extends in the plate thickness direction in the vicinity of the signal conductive contact 6 and is exposed to the surface of the conductive contact holder 11. . Therefore, the holder members 2-3 and 3-4 have shapes which can be fitted with portions where the block members 4-3 and 5-2 are exposed to the outside, respectively. According to the electroconductive contact holder 11 which has such a structure, like the said electroconductive contact holder 10, an electromagnetic wave can be shielded more reliably. Also in this modification, the insulating film for short circuit prevention is provided in the part exposed to the exterior of the block members 4-3 and 5-2 according to the structure of the semiconductor integrated circuit or the circuit board which are the connection object of the conductive contact holder 11. There is a case.

In addition, in FIG. 6 thru | or 8, the code | symbol same as FIG. 3 etc. is attached | subjected about the part which has the structure same as the conductive contact holder 1 which concerns on this Embodiment 1. In addition, in FIG.

As is apparent from the foregoing description, the present invention may include various embodiments not described herein, and various design changes and the like may be made without departing from the technical idea specified by the claims. It is possible.

As described above, the conductive contact unit according to the present invention is suitable for accommodating conductive contacts used for conduction inspection of circuit structures such as semiconductor integrated circuits.

Claims (7)

A conductive contact holder for receiving a signal conductive contact for inputting and outputting a signal to a circuit structure and an earth conductive contact for supplying an earth potential to the circuit structure. An insulating holder member formed of an insulating material and having two holder members stacked in the plate thickness direction, the insulating holder member having a first insertion hole for directly inserting the signal conductive contacts over approximately the entire length thereof; It is formed of a conductive material, has a second insertion hole for inserting a part of the earth-contact conductive contact therein, and is held by the two holder members and at least one of the fastening member and the adhesive. A conductive block member assembled to the insulating holder member; A conductive hollow block member formed of a conductive material and having a hollow portion in which the conductive block member can be disposed; and at least a portion of the first insertion hole formed in the insulating holder member and the conductive block member on which the conductive block member is disposed. A conductive contact holder, characterized in that provided. The method of claim 1, A portion of the conductive block member is exposed on the surface of the conductive contact holder. The method according to claim 1 or 2, The conductive hollow block member has a concave portion for inserting an end portion of a second ground conductive contact whose length is shorter than that of the ground conductive contact. The method of claim 3, wherein A portion of the conductive hollow block member is exposed on the surface of the conductive contact holder. The method of claim 3, wherein The conductive block member has a concave portion for inserting an end of the second ground conductive contact member. delete delete

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