KR20140099559A - Bonding apparatus and method for controlling same - Google Patents

Abstract

An object of the present invention is to provide a joining apparatus and a control method thereof that can efficiently perform positioning and joining of a work using a turntable, and are inexpensive and small. The joining device for joining the pair of works S1 and S2 includes a turntable 1 that intermittently rotates in accordance with a plurality of positions and a plurality of rotatable members 1b provided on the turntable 1 to hold the work S1 and S2 A positioning unit 300 provided in the holding unit 2 for positioning the work S1 and a work S2 in the holding unit 2 are pressed against the work S1 And a pressing device 5 for joining the pressing member 5 and the pressing member 5 to each other. The driving unit 400 for driving the positioning unit 300 is provided so as to be detachable from the positioning unit 300 independently of the turntable 1.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a bonding apparatus,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0002] The present invention relates to a joining apparatus in which a liquid crystal module and a plate-like work such as a cover panel are bonded to each other, and a control method thereof.

Generally, a liquid crystal panel is constituted by laminating a liquid crystal module, a protective sheet for protecting the surface, and a touch panel for operation. These liquid crystal modules, protective sheets and touch panels (hereinafter referred to as workpieces) are provided in the case of the liquid crystal module. In order to avoid contact with the liquid crystal glass due to deformation of the protective panel or the touch panel, .

However, when an air layer is interposed between a liquid crystal module, a protective sheet, a touch panel or the like (hereinafter referred to as a work), the visibility of the display surface is lowered due to reflection of external light. In order to cope with this, bonding is performed so that a layer for covering between works is formed by an adhesive material such as a double-faced tape or an adhesive.

Therefore, in manufacturing the liquid crystal panel, it is necessary to provide a bonding apparatus for preparing and bonding such an adhesive material to at least one of the workpieces. Further, in order to prevent bubbles or the like from being mixed between the works to be bonded, it is preferable to perform bonding in vacuum. Therefore, it is also necessary to provide a vacuum chamber or the like in the bonding apparatus.

As such a technique for joining a work, for example, those disclosed in Patent Documents 1 to 3 have been proposed. The technique described in Patent Documents 1 and 2 is a method of bonding a work in a vacuum. The technique described in Patent Document 3 is a technique for performing sequential processing while moving by a turntable rotating intermittently in order to efficiently perform joining.

Japanese Patent Application Laid-Open No. 2004-170974 Japanese Patent Application Laid-Open No. 2004-170975 Japanese Patent No. 3595125

However, in order to precisely position the work, it is preferable to provide an X-Y-? Table capable of displacing the plane in the orthogonal direction (X-Y direction) and the rotational direction (? Direction). However, such an X-Y-? Table is large if it includes a driving source for driving it. Therefore, when the X-Y-theta table is mounted on the turntable, the entire apparatus becomes large-sized, and the processing of the power source and the control line becomes complicated. Further, when the entire X-Y- &thetas; table including the driving source and the like is accommodated in the vacuum chamber and the sealing is secured, the vacuum chamber becomes large. This enlargement ultimately increases the manufacturing cost of the device.

SUMMARY OF THE INVENTION The present invention has been proposed in order to solve the problems of the related art as described above, and its main object is to provide a joining apparatus and a joining apparatus which can efficiently perform positioning and joining of a work using a turntable, And to provide a control method.

Another object of the present invention is to provide a joining apparatus capable of realizing stable operation and capable of joining with high accuracy without mixing of bubbles or dust, and a control method thereof.

In order to achieve the above object, according to the present invention, there is provided a joining apparatus for joining a pair of works constituting a display device, comprising: a turntable rotating intermittently in accordance with a plurality of positions; A positioning unit provided in the holding device for positioning at least one of the pair of workpieces; and a pressing mechanism for pressing at least one of the pair of workpieces in the holding device, And a driving unit for driving the positioning unit is provided so as to be detachable from the turntable independently of and with the positioning unit.

In the present invention as described above, when the turntable is rotated, the holding device can be separated from the driving portion and moved in accordance with the rotation of the turntable. Therefore, it is not necessary to mount the driving part on the turntable, and the power supply and the control line become unnecessary. Further, since a plurality of holding devices can be mounted, it is possible to achieve high-speed and efficient bonding. Further, since only one drive unit is required to be provided in one place, it can be constructed at a low cost. In addition, since the bonding can be performed on the holding device after the positioning, highly accurate bonding can be performed.

Another aspect is characterized in that at least one position of the turntable is detachably provided with a peeling apparatus for peeling the peeling paper of the double-sided tape adhered to at least one of the workpieces.

According to the invention as described above, since the peeling device is detachably attached to the turntable, it is possible to replace other types of devices for preparing the adhesive material, for example, as in the case of an adhesive applicator, .

In another aspect of the present invention, at least one position of the turntable is provided with a peeling apparatus for peeling the peeling paper of the double-faced tape adhered to at least one work, wherein the peeling apparatus comprises a peeling head for pushing the peeling paper to the peeling paper, A peeling head for peeling off the adhesive tape from the peeling head and a peeling head for peeling the peeling head from the peeling head in a direction different from the longitudinal direction of the peeling head, And a converting unit for converting a feeding direction of the adhesive tape so that the feeding is performed.

In the above-described invention, since the supply direction of the adhesive tape from the supply unit is different from the longitudinal direction of the adhesive tape in the peeling head, the device space in the longitudinal direction can be reduced.

According to another aspect of the present invention, there is provided a guide member for guiding the movement of the adhesive tape between the feeding portion and the peeling head and between the peeling head and the winding portion, and in correspondence with the position of the work for peeling the peeling paper, And a plurality of units having different arrangements of the peeling head and the guide member are exchangeable.

According to the invention as described above, the supplying section can be arranged at a position different from the longitudinal direction of the adhesive tape in the peeling head by the converting section. Therefore, it is possible to cope with peeling-off of the release paper to the workpiece at another position by preparing a plurality of units different in the arrangement of the peeling head and the guide member without changing the supply portion and the winding portion.

According to another aspect of the present invention, at least one position of the turntable is provided with a detection device for detecting three corners of a square in a pair of work pieces, and the midpoint of the two points constituting both ends of the diagonal line of the rectangle, A tilt calculating section for calculating a tilt of the work based on two points constituting the sides of the rectangle; and a tilt calculating section for calculating a control amount of the positioning section based on the center of gravity and the tilt And a positioning operation unit for performing a positioning operation.

According to another aspect of the present invention, there is provided a turntable comprising: a turntable rotating intermittently in accordance with a plurality of positions; a holding device provided in the turntable to hold a pair of works constituting the display device; And a pressing device for pressing a pair of works by pressing at least one of the pair of works in the holding device so as to be controlled by a computer or an electronic circuit Wherein the computer or the electronic circuit includes a detection unit, a center-of-gravity calculation unit, a slope calculation unit, and a positioning calculation unit, Wherein the center-of-gravity calculating unit detects three corners of a quadrangle in the pair of works, and the center-of-gravity calculator calculates center points of two points constituting both ends of the diagonal line of the rectangle, And the inclination calculating section calculates the inclination of the work based on the two points constituting the sides of the rectangle and the position calculating section calculates the inclination of the work based on the center of gravity and the inclination, Is calculated.

In the above-described invention, since the center of gravity and inclination of a pair of workpieces are calculated by detecting three points of each square, and the amount of positioning can be determined, the processing burden can be minimized and accurate positioning can be performed .

According to another aspect of the present invention, there is provided a detecting device for detecting the position of a pair of workpieces in at least one position of the turntable, the detecting device comprising: a first camera for picking up one of the workpieces; And a second camera inserted into the first camera and capturing an image of the other work, wherein a reflection portion is provided on a surface of the second camera facing the first camera.

According to the above invention, even when the work has a curvature or the like, the irradiation light from the first camera can be reflected by the reflecting surface of the second camera and can be received by the first camera, have.

According to another aspect of the present invention, the pressing device has a vacuum chamber capable of receiving a portion for holding the work in the positioning portion independently from the driving portion.

In the above invention, since the vacuum chamber for vacuum bonding accommodates the portion for holding the work in the positioning portion of the holding device and does not need to accommodate the driving portion, the vacuum chamber can be downsized.

According to another aspect of the present invention, there is provided a vacuum cleaner comprising: a suction part provided with a vent path communicating with a vacuum source, for vacuum-adsorbing one work to the positioning part; and a valve for switching the vent path to the vacuum source side and the vacuum chamber side .

According to the above-described invention, when the vacuum chamber is evacuated to vacuum, by switching the valve, the vent path for vacuum adsorption of the work can be set to the same pressure as in the vacuum chamber, have.

According to another aspect of the present invention, there is provided a vacuum chamber comprising: a vacuum system provided in the vacuum chamber; a storage unit storing a voltage value and a plurality of polynomial approximation expressions for calculating a pressure corresponding thereto; and a voltage value and a polynomial approximation expression stored in the storage unit An equation selecting unit for selecting a polynomial approximate expression corresponding to the voltage value from the vacuum system on the basis of the selected polynomial approximate expression and a pressure calculating unit for calculating the pressure based on the selected polynomial approximate expression.

According to another aspect of the present invention, there is provided a turntable comprising: a turntable rotating intermittently in accordance with a plurality of positions; a holding device provided in the turntable to hold a pair of works constituting the display device; A pressing device for pressing the at least one of the pair of works in the holding device so as to join the pair of works; and a positioning device provided in the positioning device, A vacuum chamber in which a portion for holding the work in the vacuum chamber is accommodated independently from the drive portion and a vacuum system provided in the vacuum chamber are controlled by a control device to perform a bonding operation Wherein the control device includes a storage unit, an expression selecting unit, and a pressure calculating unit, wherein the storage unit stores the voltage value And a plurality of polynomial approximation expressions for calculating a corresponding pressure, wherein the expression selecting unit selects, based on the voltage value and the polynomial approximation expression stored in the storage unit, a polynomial approximation corresponding to the voltage value from the vacuum system And the pressure calculation unit calculates the pressure based on the selected polynomial approximation formula.

According to the above invention, since a proper polynomial approximate expression is selected in accordance with the voltage value detected by the vacuum system, it is possible to calculate the pressure with high precision with a low-order approximate function. In addition, since it is always necessary to carry out an arithmetic operation using a single simple function, the processing burden is reduced.

According to another aspect of the present invention, a protective member is provided on a surface of the elastic member in contact with the work on at least one of the positioning portion and the pressing portion, wherein a porous sheet is adhered to the elastic member.

According to the invention as described above, since the protective member is formed by bonding the porous sheet to the elastic member, it is possible to prevent the work from adhering to the elastic member while absorbing the impact to the work at the time of bonding.

Another aspect is characterized in that at least one position of the turntable is detachably provided with a coating device for applying an adhesive to at least one of the workpieces.

According to the invention as described above, since the applicator is detachably attached to the turntable, it is possible to replace the other type of apparatus for preparing the adhesive material, so that it is possible to cope with various products.

INDUSTRIAL APPLICABILITY As described above, according to the present invention, it is possible to provide a joining apparatus and a control method thereof that can efficiently perform positioning and joining of a work using a turntable, and are inexpensive and small.

Further, according to the present invention, it is possible to provide a joining apparatus capable of realizing stable operation, free from mixing of bubbles and dust, and capable of joining with high precision, and a control method thereof.

1 is a schematic plan view showing an overall configuration of an embodiment of the present invention;
Fig. 2 is a longitudinal sectional view showing the holding device in the embodiment of Fig. 1; Fig.
3 is a perspective view showing a holding part and a suction part in the holding device of Fig.
Fig. 4 is a longitudinal sectional view showing the positioning section in the embodiment of Fig. 1; Fig.
Fig. 5 is a plan view showing positioning in the X direction and Y direction in the positioning unit of Fig. 4; Fig.
Fig. 6 is a plan view showing positioning in the direction of? In the positioning portion of Fig. 4; Fig.
Fig. 7 is a longitudinal sectional view showing the unlocking state of the lock portion in the positioning portion of Fig. 4; Fig.
FIG. 8 is a longitudinal sectional view showing a lock state in FIG. 7; FIG.
9 is a plan view of Fig.
Fig. 10 is a vertical cross-sectional view illustrating the adsorption of the pressed portion in the embodiment of Fig. 1; Fig.
11 is a longitudinal sectional view showing the adsorption opening state of the pressed portion of Fig.
FIG. 12 is a longitudinal sectional view showing the three-way valve A of FIG. 10 and the three-way valve B of FIG. 11;
Fig. 13 is a side view showing a peeling apparatus (first unit) in the embodiment of Fig. 1; Fig.
Fig. 14 is a plan view of Fig. 13; Fig.
Fig. 15 is a rear view of Fig. 13; Fig.
16 is a side view showing a peeling apparatus (second unit) in the embodiment of Fig.
FIG. 17 is an explanatory view showing peeling by the peeling apparatus of FIG. 13; FIG.
Fig. 18 is an explanatory view showing peeling by the peeling apparatus of Fig. 16; Fig.
19 is an explanatory view showing the peeling (A) (B) on the lower side and the peeling (C) (D) on the upper side by the conventional peeling apparatus.
20 is a perspective view showing the detection device in the embodiment of Fig. 1; Fig.
Fig. 21 is a side view showing the detection device of Fig. 20; Fig.
Fig. 22 is an explanatory view showing the reception of the coaxial incident illumination in the detection device of Fig. 20; Fig.
Fig. 23 is a longitudinal sectional view showing the ascent of the vacuum chamber of the pressing device in the embodiment of Fig. 1; Fig.
24 is a longitudinal sectional view showing the lowering of the vacuum chamber of the pressing device of Fig.
Fig. 25 is a vertical cross-sectional view showing the lowering of the pressing head of the pressing device of Fig. 23; Fig.
FIG. 26 is a functional block diagram showing the control device of the embodiment of FIG. 1; FIG.
Fig. 27 is a functional block diagram showing the vacuum calculation unit of Fig. 26; Fig.
28 is a flowchart showing a positioning procedure in the embodiment of Fig. 1;
29 is an explanatory diagram showing a positioning procedure in the embodiment of Fig. 1; Fig.
30 is a flowchart showing a bonding sequence in the embodiment of Fig.
31 is an explanatory diagram showing a table showing a relationship between a detection voltage and a pressure by a conventional vacuum system;
Fig. 32 is an explanatory diagram showing a graph of the table of Fig. 31; Fig.
33 is an explanatory diagram showing a graph showing the relationship between the detected voltage and the pressure by the vacuum system in the present embodiment.
34 is an explanatory diagram showing (1) division of the graph of FIG. 33;
FIG. 35 is an explanatory diagram showing the division (2) in the graph of FIG. 33; FIG.
FIG. 36 is an explanatory diagram showing the (3) division of the graph of FIG. 33; FIG.
37 is a schematic plan view showing an embodiment in the case of using an apparatus for applying an adhesive of the present invention.
38 is a longitudinal sectional view showing an example of another detecting device.
39 is a longitudinal sectional view showing an example of another detecting device.
40 is a perspective view showing an example of a work to be joined;
FIG. 41 is an explanatory view showing an example of alignment in FIG. 40; FIG.
FIG. 42 is an explanatory diagram showing a positioning procedure in the embodiment of FIG. 40; FIG.

Next, embodiments of the present invention (hereinafter referred to as embodiments) will be described in detail with reference to the drawings.

[A. Configuration]

[One. Overall configuration]

First, the overall configuration of a bonding apparatus (hereinafter referred to as " this apparatus ") of the present embodiment will be described. As shown in Fig. 1, the present apparatus has four holding devices 2 mounted on a turntable 1. In Fig. The turntable 1 is configured to intermittently rotate by the index mechanism 11 in accordance with the injection taking-out position 1A, the adhesive preparation position 1B, the positioning position 1C, and the vacuum bonding position 1D have.

The holding device 2 is a device for holding the work S1 and the work S2 so as to face each other up and down as shown in Fig. 2 and Fig. In the present embodiment, for example, a rectangular substrate such as a liquid crystal module and a cover panel is used as the work S1 and S2. In the works S1 and S2, detection marks M1 and M2 are formed corresponding to four vertexes of a virtual rectangle or a square. The holding device 2 has a positioning portion 300 for aligning the positions of the workpieces S1 and S2 and the like.

In the adhesive preparation position 1B, a peeling apparatus 3 or a coating apparatus is detachably provided. As shown in Figs. 13 to 15 and Fig. 17, the peeling apparatus 3 is configured to peel off the double-faced tape T1 previously adhered to the work S1 (regardless of the material such as a peeling sheet) . The application device is a device for applying an adhesive to the work S1 (not shown). As a coating apparatus, a well-known apparatus can be used.

As shown in Figs. 20 and 21, the positioning position 1C is provided with a detection device 4 for detecting the position of the work S1 and S2. The positioning amount of the work S1 with respect to the work S2 in the positioning section 300 is determined based on the value detected by the detection device 4. [

In the vacuum bonding position 1D, as shown in Figs. 2 and 23 to 25, a pressing device 5 is provided. The pressing device 5 can press the work S2 toward the work S1 in the reduced pressure space in the vacuum chamber 51 so that they can be joined together.

[2. Holding device]

Next, the details of each part will be described. 2 to 9, the holding device 2 includes a holding part 100, a supporting part 200, a positioning part 300, a driving part 400, a suction part 500, And a lock portion 350.

[2-1. Maintenance section]

As shown in Fig. 3, the holding portion 100 is a substantially U-shaped frame holding the left and right edges of the work S2.

[2-2. Housewives]

The support portion 200 is a columnar member of two lines erected in the vertical direction. The holding portion 100 is supported by the holding portion 200 so as to be able to move up and down. At the initial position, the holding part 100 is located above the work S1 and keeps the work S2 in the horizontal direction. When the welding is performed, the holding device 100 is pressed downward by the pressing device 5 together with the work S2 so that the work S1 and the work S2 are joined.

[2-3. Positioning portion]

4, the positioning unit 300 includes a positioning unit 310, an X-axis unit 320, a Y-axis unit 330, and a Y-axis unit 330 supported by a mount 1a fixed to the turntable 1, axis portion 340, and the like.

[2-3-1. Arrangement part]

The arrangement unit 310 has an X-Y-? Table 311, a shaft portion 312, a movable base 313, a bellows 314, a pulley 315, and the like.

The X-Y-theta table 311 is a horizontal table for positioning the work S1. The X-Y-? Table 311 is provided so as to be movable in the straight line direction (X direction and Y direction) orthogonal to the horizontal plane and to be rotatable (? Direction) about the shaft portion 312.

The shaft portion 312 is a vertical columnar member. The upper end of the shaft portion 312 is rotatably connected to the X-Y- [theta] table 311. [ The lower end of the shaft portion 312 passes through the turntable 1 and is fixed to the movable base 313. [ The movable base 313 is provided so as to be movable in the X-axis and Y-axis directions by the X-axis portion 320 and the Y-axis portion 330, as described later.

Between the movable base 313 and the turntable 1, a bellows 314 covering the shaft portion 312 is attached. The mounting end of the bellows 314 is airtight. Since the bellows 314 is flexible, the bellows 314 is flexibly displaced while keeping the airtightness in accordance with the movement of the movable base 313. The pulley 315 is fixed to the X-Y- &thetas; table 311. [ The pulley 315 is provided with a timing belt 343 to be described later.

[2-3-2. X axis part]

The X-axis portion 320 has a rotation axis 321, an eccentric roller 322, an armature 323, and the like. The rotating shaft 321 is a member in the vertical direction that can be rotated by the driving unit 400. The eccentric roller 322 is attached to the upper end of the rotation shaft 321. 5, the eccentric roller 322 is inserted into a Y-direction groove 313a formed in the movable base 313. The eccentric roller 322 is inserted into the Y-

The eccentric roller 322 can move the movable stand 313 in the X direction by pressing the inner wall of the groove 313a in accordance with the rotation of the rotating shaft 321. [ At this time, together with the movable base 313, the shaft portion 312 and the X-Y-? Table 311 move in the X direction.

The armature 323 is attached to the lower end of the rotation shaft 321. The armature 323 is detachably provided to the clutch 420 described later. The armature 323 is connected to the clutch 420 so that the driving shaft 400 can drive the rotating shaft 321. [

[2-3-3. Y axis part]

The Y-axis portion 330 has a rotating shaft 331, an eccentric roller 332, an armature 333, and the like. The rotating shaft 331 is a member in the vertical direction that can be rotated by the driving unit 400. The eccentric roller 332 is attached to the upper end of the rotating shaft 331. 5, the eccentric roller 332 is inserted into the groove 313b in the X direction formed on the movable base 313. The eccentric roller 332 is inserted into the X-

The eccentric roller 332 can move the movable base 313 in the Y direction by pressing the inner wall of the groove 313b in accordance with the rotation of the rotating shaft 331. [ At this time, together with the movable base 313, the shaft portion 312 and the X-Y-? Table 311 move in the Y direction.

The armature 333 is attached to the lower end of the rotating shaft 331. The armature 333 is detachably provided to the clutch 430 to be described later. The armature 323 is connected to the clutch 430 so that the driving shaft 400 can drive the rotating shaft 331. [

[2-3-4. theta]

The θ-axis portion 340 has a phase rotation shaft 341, a pulley 342, a timing belt 343, a bellows coupling 344, a lower rotation shaft 345, an armature 346, and the like. The phase rotation shaft 341 is a member in the vertical direction, and a pulley 342 is fixed to the upper end thereof. A timing belt 343 is provided on the pulley 342. 6, when the phase rotation shaft 341 rotates, the rotation is transmitted to the pulley 315 through the timing belt 343, so that the X-Y-? Table 311 rotates.

The lower end of the phase rotation shaft 341 is connected to the upper end of the bellows coupling 344. The bellows coupling 344 is a connecting member composed of a flexible bellows which absorbs displacement in the X and Y directions. A lower rotating shaft 345 is connected to the lower end of the bellows coupling 344. The lower rotary shaft 345 is a member in the vertical direction, and the rotation thereof is transmitted to the phase rotary shaft 341 through the bellows coupling 344.

The armature 346 is attached to the lower end of the lower rotary shaft 345. The armature 346 is detachably provided to the clutch 440 to be described later. The armature 346 is connected to the clutch 420 so that the lower rotating shaft 345 and the upper rotating shaft 341 can be driven by the driving unit 400. [

[2-4. Driving unit]

The driving unit 400 includes a fixed table 410, clutches 420, 430, and 440, motors 450, 460, and 470, and the like. The fixed table 410 is a table fixed to the lower portion of the turntable 1. [ The clutches 420, 430, and 440 are fixed at positions corresponding to the X axis portion 320, the Y axis portion 330, and the θ axis portion 340 of the fixed table 410. Motors 450, 460, and 470 that transmit rotation are connected to the clutches 420, 430, and 440, respectively.

When the coils 421, 431 and 441 are energized, the clutches 420, 430 and 440 are energized by the magnetic fluxes generated between the rotors 422, 432 and 442 and the armatures 323, 333 and 346 And the armatures 323, 333, and 346. Accordingly, the driving force of the motors 450, 460, and 470 can be transmitted to the X axis part 320, the Y axis part 330, and the θ axis part 340.

[2-5. Lock part]

As shown in Figs. 4 and 7 to 9, the lock portion 350 includes a brake plate 351, a brake 352, an elevation shaft 353, a spring 354, a pressed portion 355, A cylinder 356, and the like. The brake plate 351 is, for example, a spring steel plate fixed to the movable base 313. [ The brake 352 is a member that locks the movable base 313 by pressing the brake plate 351 between the brake pedal 351 and a part of the base table 1a. On the contact surface of the brake 352 with the brake plate 351, a non-slip member such as a rubber lining is provided.

The lifting shaft 353 is installed so as to be able to ascend and descend through the base table 1a. A brake 352 is attached to the upper end of the lifting shaft 353. The spring 354 is a pressing member such as a spring that presses the lifting shaft 353 downward. The to-be-pressed portion 355 is attached to the lower end of the lifting shaft 353. The cylinder 356 is a means for releasing the lock by being fixed to the stationary table 410 and pressing the on-pressurized portion 355 thereon. The lock portion 350 shown in the figure corresponds to the X axis portion 320. Lock portions of the same structure are provided corresponding to the Y axis portion 330 and the θ axis portion 340 .

[2-6. Absorption part]

As shown in Figs. 10 and 11, the adsorption section 500 has an adsorption plate 510, a three-way valve 520, an adsorption pump 530 (see Fig. 26), and the like. The adsorption plate 510 is fixed on the X-Y-theta table 311. On the suction plate 510, a protective member 511 having a sheet made of a polyurethane porous film adhered to the surface of an elastic member such as rubber is attached. A suction hole (not shown) is formed in the suction plate 510 and the protection member 511. This suction hole is connected to one end of the pipe 512 through a vent path formed in the suction plate 510.

The three-way valve 520 is fixed to the turntable 1. The three-way valve 520 has an inner tube portion 521, an upper valve 522, a lower valve 523, a rod 524, a pressed portion 525, and the like. The inner tube portion 521 is a tube that is continuous in the vertical direction. The inner tube portion 521 penetrates the turntable 1 and protrudes to the upper surface side and the lower surface side thereof.

The other end of the pipe 512 described above is connected to the inner tube portion 521 protruded toward the upper surface side of the turntable 1. [ Accordingly, the suction hole of the X-Y-? Table 311 and the inner tube portion 521 communicate with each other through the ventilation path. One end of a pipe 526 is connected to a side surface of the inner tube portion 521 protruding toward the lower surface of the turntable 1. [ The other end of the pipe 526 is connected to an adsorption pump 530 for causing a vacuum. On the other hand, even if the turntable 1 rotates, the suction pump 530 and the pipe 526 are connected via a rotary joint (not shown) so that the communication between the suction pump 530 and the pipe 526 is ensured.

The upper valve 522 is a valve that opens and closes the upper end of the inner tube portion 521 by moving up and down. The lower valve 523 is a valve that opens and closes the communication with the adsorption pump 530 by raising and lowering the inside of the tube portion 521. The rod 524 is installed so as to be able to move up and down in the inner tube portion 521. The rod 524 connects the upper valve 522 and the lower valve 523. The to-be-pressed portion 525 is provided at the lower end of the rod 524. The to-be-pressed portion 525 is urged upward by the urging portion 527 constituted by a cylinder or the like. The pressing portion 527 is fixed to the fixing table 410.

The three-way valve 520 connects the line connecting the suction hole and the suction pump 530, as shown in Fig. 12 (A), when the work S1 is sucked Reference). As shown in Fig. 12B, when the pushing portion 525 at the lower end of the rod 524 is pushed up by the pushing portion 527, the ventilation path is switched, and the upper valve 522 And the lower valve 523 is closed so that the adsorption hole and the periphery (in the vacuum chamber 51) are at the same atmospheric pressure and the communication with the adsorption pump 530 is abolished (see black arrows).

[3. Peeling device]

The peeling apparatus 3 is a device for peeling the peeling paper F of the double-sided tape T1 adhered to the work S1 or the work S2 to the peeling tape T2. As shown in Figs. 13 to 15, the peeling apparatus 3 has a feeding section 31, a converting section 32, a peeling section 33, a winding section 34, and the like.

The supply unit 31 has a delivery reel 31a and a reel rotating mechanism 31b (see Fig. 26). The delivery reel 31a is a reel around which the adhesive tape T2 to be fed is wound. The reel rotating mechanism 31b is a mechanism for controlling a brake of a delivery reel 31a (not shown). As shown in Fig. 14, the converting unit 32 is a pin or roller for converting the advancing direction of the adhesive tape T2 from the supplying unit 31 to a right angle.

The peeling section 33 has a peeling head 33a, a cylinder 33b, guide rollers 33c to 33e, and the like. The peeling head 33a is a roller which is pressed against the release paper F on the work S1 by pressing the adhesive tape T2 supplied from the supply section 31 from the back surface of the adhesive surface. The peeling head 33a is inclined to start the pressing of the adhesive tape T2 from the end of the work S1. The cylinder 33b is a mechanism for moving the peeling head 33a in the forward direction (leftward direction in the figure), and at the time of operation, the braking of the supply portion 31a is released and the adhesive tape T2 can be taken out . The guide rollers 33c to 33e are rollers for guiding the movement of the adhesive tape T2 from the converting portion 32 to the peeling head 33a and from the peeling head 33a to the winding portion 34 ).

The winding portion 34 has a winding reel 34a, a reel lifting mechanism 34b, a reel rotating mechanism 34c (see Fig. 26), and the like. The take-up reel 34a is a reel for winding the adhesive tape T2 from the peeling head 33a. The axis of this take-up reel 34a is set in a direction orthogonal to the axis of the supply part 31. [ The reel lifting mechanism 34b is a mechanism for lifting up the reel 34a by, for example, rotating a feed screw. The reel rotating mechanism 34c has a driving source (not shown) and controls the rotation and braking of the take-up reel 34a.

On the other hand, the peeling apparatus 3 described above is mounted with a first unit U1 for peeling off the release paper F from the work S1 on the lower side. 16, the first unit U1 of the peeling apparatus 3 is replaceable with the second unit U2 for peeling the release paper F from the work S2 on the upper side Respectively.

13 and 17, the first unit U1 is configured such that the adhesive tape T2 from the converting unit 32 is supplied from below the peeling head 33a, passes through the upper side, Guide rollers 33c to 33e are installed so as to be guided to the reel 34a. In the first unit U1, the guide roller 33e converts the advancing direction of the adhesive tape T2 passed through the peeling head 33a downward.

On the other hand, in the second unit U2, as shown in Figs. 16 and 18, the adhesive tape T2 from the converting portion 32 is supplied from the upper side of the peeling head 33a, passes through the lower side Guide rollers 33f and 33g are provided so as to be guided to the take-up reel 34a. In the second unit U2, the guide roller 33g converts the advancing direction of the adhesive tape T2 passed through the peeling head 33a downward.

In addition, the first unit U1 and the second unit U2 are installed so as to be able to move up and down by the cylinder 35. [ The first unit U1 can press the adhesive tape T2 at the peeling head 33a against the release paper F of the work S1 at the time of descent. The second unit U2 can push the adhesive tape T2 on the peeling head 33a against the release paper F of the work S2 at the time of the rise.

The peeling by the peeling apparatus 3 is carried out as follows. That is, as shown in Figs. 17A and 18A, the peeling head 33a is moved forward by the cylinder 33b and the adhesive tape T2 is taken out from the supply portion 31a The first unit U1 is lowered by the cylinder 35 or the second unit U2 is raised so that the adhesive tape T2 is pushed against the release paper F and the reel rotating mechanisms 31b, Up reel 34a is lowered by the reel lifting mechanism 34b in a state where the rotation of the feed reel 31a and the take-up reel 34a is stopped.

17 (B) and 18 (B), the adhesive tape T2 is pulled downward and the peeling head 33a pulls the adhesive tape T2 off the paper F. As a result, And retracts. Thus, the release paper F is adhered to the adhesive tape T2 and peeled off from the work S1 or the work S2.

[4. Detection device]

20 and 21, the detecting device 4 includes two CCD cameras 41 and 42, arms 45 and 46 for supporting them, a camera driving mechanism 49 (see Fig. 26), and the like Lt; / RTI > The CCD camera 41 disposed at the upper side is a camera for photographing the corner of the work S2 at the upper side or the mark M2 with the lens surface facing downward (first camera). The CCD camera 42 disposed on the lower side is a camera for imaging the corner of the work S1 or the mark M1 on the lower side with the lens surface facing downward (second camera).

The camera driving mechanism 49 has a driving source (not shown) and is a mechanism for driving the arms 45 and 46 (for example, an X-Y axis driving mechanism). The arm 45 is installed in such a manner that the CCD camera 41 can be inserted into and removed from the upper side of the work S2 by moving in the horizontal direction (forward and backward left and right directions) by the camera driving mechanism 49. Likewise, the arm 46 is also installed so as to be able to move the CCD camera 42 in and out of the upper side of the work S1 by moving in the horizontal direction (front-back, left-right direction)

Each of the CCD cameras 41 and 42 is a camera that picks up an object to be detected by detecting reflected light of a built-in light source (coaxial incident illumination). The imaging of each of the CCD cameras 41 and 42 is controlled by the imaging control unit 662 as described later. The upper surface of the lower CCD camera 42 is provided with a reflecting surface 42a for reflecting light from the upper CCD camera 41. [ The reflective surface 42a can be a simple member such as an aluminum tape.

[5. Compression device]

The pressing device 5 has a vacuum chamber 51, a pressing head 52, a lifting mechanism 53, a cylinder 54, and the like as shown in Figs. 2 and 23 to 25. The vacuum chamber 51 is a chamber for covering and sealing the holding device 2 on the turntable 1. [ The pressure head 52 is provided in the vacuum chamber 51 and presses the work S2 downward.

The elevating mechanism 53 is a mechanism for elevating and lowering the vacuum chamber 51 together with the pressing head 52 by a driving source or the like (not shown). The cylinder 54 is a mechanism for moving the pressing head 52 up and down by the advancing and retreating driving rod. The pressure head 52 is provided with a protective member 52a to which a sheet made of a polyurethane porous film is adhered to the surface of the rubber.

The vacuum chamber 51 is connected to a vacuum pressure reducing pump 55 through a pipe, and a vacuum system 56 for detecting the pressure inside the vacuum chamber 51 is provided (see FIG. 26).

[6. controller]

Switches, power supplies, and the like of the components such as the turntable 1, the holding device 2, the peeling device 3, the detecting device 4, the pressing device 5, (6). The control device 6 can be configured by realizing the following respective functions by, for example, a dedicated electronic circuit or a computer operating with a predetermined program.

Hereinafter, this control device 6 will be described with reference to Fig. 26 which is a functional functional block diagram. On the other hand, an output device such as a switch, a touch panel, a keyboard, an input device such as a mouse for operating the control device 6, a display for confirming the state of the control device 6, a lamp, It is omitted.

That is, the control apparatus 6 includes a table control unit 610, a storage unit 620, a timing control unit 630, an input / output interface 640, a peeling control unit 650, a position detection unit 660, a positioning control unit 670 ), A vacuum controller 680, and the like.

[6-1. Table control section]

The table control unit 610 is means for controlling the intermittent rotation operation of the index mechanism 11. [

[6-2. Memory section]

The storage unit 620 is a means for storing various settings and data such as an operation timing, an arithmetic expression, and an arithmetic result.

[6-3. Timing control section]

The timing control unit 630 is means for controlling the operation timing of each unit at a preset timing.

[6-4. I / O Interface]

The input / output interface 640 is a means for controlling the conversion and input / output of signals between the respective units to be controlled.

[6-5. Peeling control section]

The peeling controller 650 is a means for controlling the operation of the peeling apparatus 3. [ The peeling control unit 650 has a head control unit 651, a rotation control unit 652, an elevation control unit 653, and the like.

The head control unit 651 is means for controlling the cylinder 33b for driving the peeling head 33a and the cylinder 35 for driving the first unit U1 or the second unit U2. The rotation control unit 652 is means for controlling the reel rotation mechanism 31b of the supply unit 31 and the reel rotation mechanism 34c of the reel unit 34. [ The elevation control unit 653 is means for controlling the reel-up and elevating mechanism 34b.

[6-6. Position detector]

The position detection unit 660 is a means for controlling the detection device 4. The position detecting unit 660 has a camera driving unit 661, an imaging control unit 662, a three-point extracting unit 663, a center of gravity calculating unit 664, a tilt calculating unit 665, and the like. The camera driving unit 661 is means for controlling the camera driving mechanism 49 for moving the arms 45 and 46. The image pickup control section 662 is means for controlling the image pickup by the CCD cameras 41 and 42.

The three-point extraction unit 663 is means for extracting three points of the corners of the works S1 and S2 or the marks M1 and M2 from the image picked up by the CCD cameras 41 and 42. [ The center of gravity calculating section 664 is means for calculating the center of gravity from the point extracted by the three-point extracting section 663. The inclination calculating section 665 is means for calculating the inclination from the point extracted by the three-point extracting section 663.

[6-7. Positioning Control Section]

The positioning control unit 670 is means for controlling the positioning unit 300. [ The positioning control unit 670 has a clutch control unit 671, a positioning calculation unit 672, a motor control unit 673, and the like. The clutch control section 671 controls the energization of the coils 421, 431 and 441 so that the armatures 323, 333 and 346 and the clutches 420, 430 and 440 are detachable. On the other hand, the clutch control section 671 also locks the lock section 350 by operating the cylinder 356 in synchronization with the energization of the coils 421, 431, and 441. Based on the center of gravity and inclination of the work S1 and S2 calculated by the center-of-gravity calculating section 664 and the tilt calculating section 665, the positioning calculating section 672 calculates the position of the XY- .

[6-8. Vacuum control unit]

The vacuum control unit 680 is a means for controlling the adsorption unit 500 and the pressing device 5. The vacuum control unit 680 includes a chamber control unit 681, a decompression control unit 682, a vacuum calculation unit 683, a valve control unit 684, a compression control unit 685, and a suction control unit 686. The chamber control unit 681 is means for controlling the lifting mechanism 53 for lifting and lowering the vacuum chamber 51. [

The depressurization control unit 682 is means for controlling the depressurization pump 55 depressurizing the inside of the vacuum chamber 51. The vacuum calculation unit 683 is means for calculating the pressure in the vacuum chamber 51 based on the detection value of the vacuum system 56.

The vacuum calculation unit 683 has a voltage determination unit 683a, a formula selection unit 683b, a pressure calculation unit 683c, and the like as shown in Fig. The voltage determination unit 683a is a unit for determining where in the voltage range set in the storage unit 620 the analog output (voltage value) from the vacuum system 56 is. The expression selecting unit 683b selects the polynomial approximate expression according to the voltage range determined by the voltage determining unit 683a based on the voltage range set in the storage unit 620 and the polynomial approximate expression corresponding thereto to be. The pressure calculating unit 683c is means for calculating the pressure value based on the determined voltage value and the selected polynomial approximate expression.

The valve control unit 684 is means for controlling the pressing unit 527 for switching the opening and closing of the three-way valve 520 based on the calculation result of the vacuum calculation unit 683. The compression control unit 685 is means for controlling the cylinder 54 that moves the pressure head 52 up and down. The adsorption control unit 686 is means for controlling the adsorption pump 530 for adsorbing the work S1 on the adsorption plate 510. [

Here, an example of calculation by the above described vacuum calculation unit 683 will be described with reference to Figs. 31 to 36. Fig. That is, the case where the analog output from the general vacuum system and the instruction pressure have the relationship shown in Fig. 31 is considered. In this case, as a method of deriving the pressure from the analog value, there is a method in which a table (analog data table) as shown in Fig. 31 is stored in advance in the storage device and the table and the current analog value are sequentially compared. However, in this method, it is necessary to sequentially search for the corresponding data, which increases the processing program and increases the processing time.

Next, there is a method in which the amount of change between each data in the table is regarded as being linear, and arithmetic processing is performed. However, in order to improve the precision of the pressure derivation result, if the number of data in the table stored in the storage device is increased, the processing in the arithmetic processing device is delayed. On the contrary, if the number of data is suppressed, the precision of the pressure derivation result becomes worse, but the arithmetic processing becomes faster. In other words, the precision and the computation processing time are in opposition to each other.

As another method, there is a method of calculating by using a polynomial approximation expression. However, when the table is complex, if a polynomial approximation expression satisfying the necessary precision is set, the difference of the approximate functions is also increased, and it takes a lot of time to perform the arithmetic processing. For example, in the case of graphing the above table, as shown in Fig. 32, the relationship between the voltage and the pressure is nonlinear, and it is difficult to form a polynomial approximation expression capable of obtaining high accuracy on the warp. On the other hand, Fig. 32 corresponds to Figs. 33 to 36, but a semilog graph is used in order to display the pressure range broadly.

In the present embodiment, the table is divided into a plurality of arbitrary sections, and a polynomial approximate expression corresponding to each section is established. Then, one of the polynomial approximation expressions is selected in accordance with the detected voltage value, and a pressure calculation operation is performed.

For example, when the analog detection voltage value from the vacuum gauge 56 and the pressure commanded by the analog detection voltage value have the relationship of the graph of Fig. 33, the range of the voltage value is divided into the following three categories.

(1) 0 V or more to less than 3 V

(2) More than 3 V to less than 8 V

(3) 8 V or more to 10 V or less

Then, the following three polynomial approximate expressions are set in correspondence with the ranges (1) to (3).

(a) PL = -36.837V3 + 320.94V2-1104.9V + 1724.7 [Pa]

(b) Pm = -0.8021V3 + 23.787V2-240.08V + 832.07 [Pa]

(c) Ph = -0.6572V3 + 21.162V2-231.87V + 859.72 [Pa]

The polynomial approximation of each range is a precision satisfying the cubic function sufficiently. That is, as shown in Fig. 34, when a graph serving as a reference in the range of (1) is compared with a graph of the calculation result, the line becomes almost coincident. This is also true in the ranges of (2) and (3) shown in Figs.

On the other hand, as shown in Fig. 27, the storage unit 620 stores therein a valve pressure value which is a threshold value for switching the three-way valve 520 from the valve control unit 684, 52 are set to be a threshold value for lowering the pressure. Therefore, when the pressure value calculated by the pressure calculation unit 683c is the valve pressure value, the three-way valve 520 is switched, and when the pressure value is the pressure value, the pressure head 52 is lowered.

[B. Action]

The operation of the present embodiment having the above-described configuration is as follows. On the other hand, a method for controlling the joining apparatus in the order described below and a computer program for operating the control apparatus are also an aspect of the present invention.

[One. Mounting of work]

First, mounting of the workpieces S1 and S2 to the holding device 2 will be described. On the other hand, one side of the double-sided tape T1 is adhered to the work S1. At this time, the release paper F is adhered to the other surface of the double-sided tape T1.

That is, in the injection taking-out position 1A shown in Fig. 1, as shown in Figs. 2 to 4, the worker places the work S1 on the attracting plate 510 on the protective member 511. At this time, the adsorption control unit 686 operates the adsorption pump 530 to adsorb the work S1 by the adsorption holes of the adsorption plate 510 and the protection member 511. [ Further, the worker sets the work S2 on the holding portion 100. Then, On the other hand, it is also possible to automatically insert a work that has been handled or the like by a supply mechanism such as an autoloader, instead of inputting a workpiece by a human hand.

[2. Peeling of flake]

As described above, the holding device 2 holding the workpieces S1 and S2 comes to the adhesive material preparation position 1B by the rotation of the turntable 1. Here, the peeling apparatus 3 peels off the peeling paper F of the work S1. That is, as shown in Figs. 13 and 17A, the head control section 651 drives the cylinder 33b to move the peeling head 33a forward, and drives the cylinder 35 1 unit U1 is lowered so that the peeling adhesive tape T2 is brought into contact with the edge of the release paper F of the double-sided tape T1 of the work S1.

The rotation control unit 652 controls the reel rotation mechanisms 31b and 34c to cause the raising and lowering control unit 653 to rotate the reel raising and lowering mechanism 34b in a state in which the feed reel 31a and the take- So that the take-up reel 34a is lowered. Then, the peeling head 33a is retracted while the adhesive tape T2 is pulled downward. At this time, as shown in Fig. 17B, the release paper F with which the adhesive tape T2 is in contact is peeled off from the double-faced tape T1.

The rotation control unit 652 controls the rotation of the take-up reel 34a by operating the reel-up and down mechanism 34b while rotating the take-up reel 34a by operating the reel- Thereby returning the release paper F to the state of peeling from the next work S1.

Although the case where the release paper F is peeled off from the lower work S1 using the first unit U1 has been described above, it is also possible to use the second unit U2 to remove the upper work S2 , The basic operation procedure is the same (see Figs. 18 (A) and 18 (B)).

[3. Positioning of work]

The holding device 2 holding the workpieces S1 and S2 comes to the positioning position 1C by the rotation of the turntable 1. [ At this time, the to-be-pressed portion 355 is pressed by the cylinder 356 of the lock portion 350, whereby the lock of the positioning portion 300 is released (all of the X, Y, and θ axes). Then, the position detection by the detecting device 4 and the positioning by the positioning unit 300 are performed. This sequence will be described below with reference to the flow chart in Fig. 28 with reference to Figs. 20 to 22 and Fig.

[3-1. Position detection]

The camera driving unit 661 moves the arms 45 and 46 by operating the camera driving mechanism 49. 20 and 21, the CCD camera 41 moves to the upper side of the work S2 and the CCD camera 42 moves between the work S1 and the work S2 101).

Then, the CCD cameras 41 and 42 sequentially stop at the corners of the works S1 and S2 or the positions corresponding to the marks M1 and M2 (step 102). The imaging control unit 662 causes the CCD cameras 41 and 42 to successively pick up the corners of the work S1 and the work S2 or the marks M1 and M2 in step 103. The picked-up image is input to the control device 6 (step 104).

On the other hand, when the work S2 is normal at the time of imaging, as reflected from the work S2 due to coaxial incident illumination is returned to the CCD camera 41 as shown in Fig. 22 (A) The image can be taken without any problem. However, as shown in Fig. 3, the work S2 is not adsorbed on the adsorption plate 510 like the work S1, but is held in the air by the holding unit 100. [ 22 (B), curvature and distortion of the work S2 are liable to occur. In this case, the possibility that the reflected light from the work S2 does not return to the CCD camera 41 .

In this embodiment, even in such a case, as shown in Fig. 22C, the light from the CCD camera 41 is reflected by the reflecting surface 42a attached to the CCD camera 42, The image is returned to the CCD camera 41, so that the image can be captured. On the other hand, when the marks M1 and M2 are to be detected, it is preferable that a portion corresponding to the marks M1 and M2 in the work S2 has light transmitting portions for receiving reflected light .

The three-point extraction unit 663 extracts at least three points of the corner of the work S1 or the identification mark M1 from the picked-up image in the same manner as described above (step 105) And three points of the corner of the work S2 or the mark M2 corresponding thereto are extracted (step 106). On the other hand, the processing for extracting points from an image can be realized by a conventional general image processing technique, and a description thereof will be omitted.

As shown in Fig. 29A, the center of gravity calculating section 664 calculates the center of gravity of two diagonal points among three points (points surrounded by circles of one dotted line) of each of the works S1 and S2, (G1, G2) of the center coordinates (S1, S2) (step 107). The slope calculating section 665 calculates the slope of the straight line connecting two points on the long side or the short side among the three points of each of the works S1 and S2 as the slope of the work S1 and S2 (step 108) .

Subsequently, the positioning calculation unit 672 in the positioning control unit 670 calculates the amount of movement of the work S1 so that the center of gravity of both workpieces S1 and S2 coincides with the inclination (step 109). In other words, the amount of movement in the X-Y direction (the amount of rotation of the rotation shafts 321 and 331) for aligning the center of gravity is calculated, and the amount of rotation in the? Direction (the amount of rotation of the lower rotation shaft 345) for calculating the tilt is calculated.

The clutch control section 671 connects the rotors 422, 432 and 442 to the armatures 323, 333 and 346 by energizing the coils 421, 431 and 441 (step 110). Then, the motor control unit 673 operates the motors 450, 460 and 470 to rotate the rotating shafts 321 and 331 and the lower rotating shaft 345 (step 111). The motors 450, 460, and 470 stop when the rotary shafts 321 and 331 and the lower rotary shaft 345 rotate by the calculated amount of rotation (step 112).

The clutch control section 671 operates the cylinder 356 of the lock section 350 to release the pressing on the portion to be pressed 355 to lower the brake 352 by the urging force of the spring 354 , And the brake plate 351 is interposed therebetween (step 113). This is performed almost simultaneously with respect to all the X, Y, and θ axes. The clutch control section 671 stops energization of the coils 421, 431 and 441 and stops the energization of the X axis section 320, the Y axis section 330 and the θ axis section 340 by the clutches 420 to 440, (400).

Thus, the position of the X-Y-theta table 311 is adjusted so that the positions of both workpieces S1 and S2 match. For example, when the work S1 or S2 is deviated as shown in Fig. 29A, the center of gravity G1 or G2 is moved by the movement in the X and Y directions, as shown in Fig. 29 (B) And as shown in Fig. 29 (C), the inclination can be made to coincide with the rotation.

On the other hand, in the case where a detection object such as a corner or a mark has little fluctuation per work, when two diagonal points are detected, alignment can be made by aligning the center of gravity and the inclination of the diagonal line. Therefore, in the present embodiment as well, two diagonal points of the work S1 and S2 are detected, and the centers of gravity G1 and G2 of the workpieces S1 and S2 are aligned by the movement in the X and Y directions, . Thus, the burden of the arithmetic processing can be reduced.

[4. Vacuum bonding]

Then, the holding device 2 holding the workpieces S1 and S2 comes to the vacuum bonding position 1D by the rotation of the turntable 1. Then, the vacuum bonding is performed by the pressing device 5. This procedure will be described with reference to Figs. 2, 10 to 12, and 23 to 25 in accordance with the flowchart of Fig.

23 and 24, the chamber control unit 681 lowers the vacuum chamber 51 by closing the elevating mechanism 53 to seal the periphery of the holding apparatus 2 (step < RTI ID = 0.0 > 201). Then, the decompression control unit 682 operates the decompression pump 55 to decompress the inside of the vacuum chamber 51 (step 202).

The vacuum gauge 56 outputs the detected voltage value to the control device (step 203). In the vacuum computing unit 683, the voltage determining unit 683a determines which of the above-described (1) to (3) voltage values detected by the vacuum gauge 56 is within the above range (step 204). Based on the determination result, the formula selecting unit 683b selects a polynomial approximate expression (steps 205-1 to 3-3). The pressure calculating unit 683c calculates the pressure based on the detected voltage value and the selected polynomial approximate expression (step 206).

When the calculated pressure value is judged to be equal to or lower than a predetermined valve pressure (step 207), the valve control section 684 raises the pressure section 527 to cause the pressure-receiving section 525 ). As a result, as shown in Figs. 11 and 12B, the rod 524 of the three-way valve 520 rises, the upper valve 522 opens the upper end of the inner tube portion 521, The lower valve 523 is closed (step 208). As a result, the pressure inside the adsorption plate 510 and the inside of the vacuum chamber 51 becomes the same, and the ejection from the suction hole is prevented.

When the calculated pressure value is judged to be equal to or lower than the predetermined pressing pressure (step 209), the compression control unit 685 operates the cylinder 54 as shown in Fig. 25, 52 are lowered, and the work S2 is pressed against the work S1 (step 210). Thereafter, the decompression control unit 682 stops the decompression pump 55 (step 211), and the chamber control unit 681 raises the pressure head 52 and the vacuum chamber 51 to open to the atmosphere 212, 213).

[5. Take out of work]

As described above, when the holding device 2 holding the joined workpieces S1 and S2 comes into the injection taking-out position 1A by the rotation of the turntable 1, the worker places the work S1 and S2 And is taken out from the holding portion 100. On the other hand, this operation can also be automated by a delivery mechanism or the like.

[C. effect]

According to the present embodiment as described above, the following effects can be obtained. That is, the supply of the pair of workpieces S1 and S2 can be performed at one position, and the workpieces S1 and S2 after the bonding can also be taken out at the same position, so that the work space is reduced.

Since the peeling head 33a is inclined in the peeling apparatus 3, the peeling of the peeling paper F can be reliably released since the peeling of the peeling head 33a can start to press the adhesive tape T2 from the ends of the works S1 and S2 . Further, the peeling head 33a is inclined, and the feeding portion 31 is separated from the longitudinal direction of the adhesive tape T2 in the peeling portion 33 by the converting portion 32, Since the moving direction is upward and downward, the required space in the depth direction can be reduced. The advantage of such a peeling apparatus 3 is that the take-up reel L1, the feed reel L2 and the peeling head L3 are arranged as shown in Figs. 19A to 19D, (L1) is configured to move in the longitudinal direction of the adhesive tape T2.

The peeling apparatus 3 is configured such that peeling of the release paper F from the lower work S1 and removal of the release paper F from the upper work S2 are carried out by exchanging the units U1, It is possible to easily cope with peeling. The advantage of such a peeling apparatus 3 is that the conventional example for the lower work S1 shown in Figs. 19A and 19B and the conventional example for the lower work S1 shown in Figs. 19C and 19D, The arrangement of the take-up reel L1 and the feed reel L2 must be changed in the conventional example for the work S2 of the work S2. On the other hand, by employing an apparatus equipped with the rollers 33c to 33g shown in Figs. 17 and 18, it is possible to replace the adhesive tape T2 as shown in Fig. 17 or Fig. 18 , It is possible to cope with the upper peeling and the lower peeling.

Further, since the peeling apparatus 3 has an independent structure that can be attached to and detached from the joining apparatus, a transfer apparatus or the like becomes unnecessary, thereby preventing attachment of dust or the like. In addition, since the peeling apparatus 3 and the application apparatus can be exchanged, it is possible to cope with various products.

The X-Y-? Table 311 on the turntable 1 can be separated from the motors 450, 460, and 470 by the clutches 420, 430, and 440 and can be moved as they are. Therefore, it is not necessary to mount a driving source or the like on the turntable 1, power source and control line are unnecessary, and stable operation can be realized by a simple structure. Further, since the holding device 2 can be mounted on the turntable 1 in multiple units, it is possible to achieve high-speed and efficient bonding.

Since the drive source and the like may be provided only at one place, the drive source and the like can be constructed at low cost. Further, since the X-Y-theta table 311 is miniaturized, the XY-θ table 311 can be easily accommodated in a vacuum, and prevention of mixing of bubbles and the like can be easily achieved. Further, since the works S1 and S2 can be joined on the X-Y-theta table 311 after the positioning, highly accurate bonding can be performed.

In particular, since the detection device 4 performs the detection of the center of gravity and inclination of the work S1 and S2 at three points, accurate detection can be performed with the minimum processing burden. Even when the work S1 or S2 has curvature or the like, the irradiation light from the CCD camera 41 side is reflected by the reflecting surface 42a of the CCD camera 42, so that accurate detection can be performed . Therefore, high-precision bonding based on accurate detection becomes possible.

Vacuum bonding can be performed at one position on the turntable 1, thereby making it possible to save space. Further, since it is not necessary to determine the position in the vacuum chamber 51, the device can be simplified to a small size. In addition, when depressurizing the inside of the vacuum chamber 51, the adsorption line in the adsorption section 500 can be blocked by the three-way valve 520 and the same pressure as in the vacuum chamber 51 can be obtained, It is possible to prevent the work S1 from falling off due to the ejection from the hole, thereby realizing stable operation. Further, since it is switched by the single three-way valve 520, it can be manufactured in a small size and inexpensively.

When detecting the pressure in the vacuum chamber 51, an appropriate approximate expression corresponding to the voltage value is selected to calculate the pressure, so that a high precision pressure calculation can be performed with a low-order approximate function. In addition, since it is always necessary to perform an arithmetic operation by a single simple function, the burden of processing is alleviated.

A porous sheet adhered to the elastic member is used as the protective member 511 of the suction unit 500 and the protective member 52a of the pressing device 5 so that the shock to the workpieces S1 and S2 is absorbed Adhesion of the work S1 and S2 to the protective members 511 and 52a can be prevented, and stable bonding can be realized. In addition, compared with the case where the surface of the rubber is roughened by machining, it is good in slipperiness and does not wear well. In addition, it is inexpensive compared to the case of performing low energy irradiation treatment of rubber. In addition, when deteriorated, it becomes easier to replace the sheet as compared with the case of replacing the entire rubber.

[D. Other Embodiments]

The present invention is not limited to the above-described embodiments. For example, as described above, in the case of using an apparatus for applying an adhesive instead of the peeling apparatus, all materials available now or in the future can be used as the adhesive. It is also possible to irradiate an electromagnetic wave of a broad width from the outside or to cure by applying a temperature change like a thermosetting resin, such as an ultraviolet curing type or a radiation curing type resin. As the application device, a well-known device as described above can be used. For example, an inkjet coating apparatus, a screen printing apparatus, a squeegee coating apparatus, a dispensing nozzle coating apparatus, and the like can be considered, but the present invention is not limited thereto.

In the case of applying the adhesive by the application device, it is possible to consider setting the curing position 1E of the adhesive as the stop position of the turntable 1, as shown in Fig. In this case, a device for irradiating electromagnetic waves, a device for heating, or the like is provided in the curing position 1E, and when the work after joining comes to the curing position 1E, the adhesive is cured by irradiating or heating the electromagnetic wave .

The detailed configuration of the peeling apparatus is not limited to that shown in the above embodiment. For example, the peeling head may be configured so as to be capable of moving the adhesive tape while being pushed against the peeling paper, and the driving mechanism may be of a structure capable of being separated from the peeling paper. Also, the position and number of the guide rollers can be freely set. In addition, the angle of conversion of the conversion section is not limited to a right angle as long as the delivery section is at an angle away from the longitudinal direction of the adhesive tape of the separation head. On the other hand, as the peeling apparatus, other well-known apparatuses may be applied.

Any well-known attaching and detaching member for attaching and detaching the positioning unit and the driving unit can be applied. For example, a mechanical clutch that does not depend on the excitation of the coil may be used. If the coupling member and the bellows are also of a connecting member having a structure permitting the displacement of the shaft, all known methods can be applied.

The material, thickness, and hardness of the protective member are also free. For example, as the pressure head side, a sheet made of a polyurethane porous film is attached to a urethane rubber having a hardness of 40, and a sheet made of a polyurethane porous film bonded to a urethane rubber having a hardness of 80 But the present invention is not limited thereto.

The number of cameras in the detection apparatus is not limited to the above-mentioned number. Only one horizontal, two horizontal, or three horizontal to four, may be sequentially moved upward and downward. In addition, it is also possible to move forward and backward two by two up and down. It is also possible to make three to four images in the up and down directions, and simultaneously image three points on the top and bottom. First, when two points of the diagonal line are picked up and there is a point that can not be extracted from this point, another point may be picked up. Three images may be extracted from three images that can be extracted or have good images after imaging four images. As the number of cameras increases, the mechanism for driving the camera can be simplified, and imaging can be performed at a high speed.

As shown in Fig. 38, the lower CCD camera 42 is configured so that the light from the light source can be irradiated up and down by a prism, and the light irradiated to the upper side is irradiated to the upper CCD camera 41 May receive light. As shown in Fig. 39, the lower CCD camera 42 can irradiate the light from the light source up and down so that it can pick up and down, and the upper light is reflected by the reflection surface 42a May be used. As the material of the reflecting surface, metal, glass, resin or the like can be considered, but any material may be used as long as it can reflect the irradiation light. Further, the reflecting surface may be formed integrally with the case of the camera.

The cover to be bonded is a typical example of a cover panel and a liquid crystal module (a display panel and a backlight are laminated), but is widely applicable as an apparatus for bonding elements constituting a display device. Therefore, the present invention can also be applied to a case of bonding the touch panel and the liquid crystal module.

The detection object for positioning can be appropriately changed in accordance with the mode of the work. For example, as shown in Fig. 40, when the work S2 as the cover panel is bonded to the work S1 as the liquid crystal module, the corner of the frame H printed on the work S2 It is possible. In this case, as shown in Fig. 41, it is preferable to position the side of the work S1 (or the displayable area, hereinafter the same) and the sides of the frame H to coincide with each other. Particularly, since the side of the frame H is a part viewed by the user who purchased the product, if the frame H is inclined with respect to the work S1, there is a high possibility that the frame H becomes a defective product.

In order to prevent this, positioning by three-point detection is more effective than positioning by two-point detection for the following reason. That is, since the size and shape of the frame H are formed by printing or the like, there is a case where the work S2 varies every time. For example, as shown in Fig. 42 (A), when the shapes of the work S1 and the frame H do not coincide with each other, two diagonal points are detected and the center of gravity and the slope of the diagonal line The frame H is positioned in an inclined state with respect to the work S1 as shown in Figure 42 (B).

On the other hand, when three points are detected and the inclination of the center of gravity and the long side are made to coincide with each other, as shown in Fig. 42 (C), the sides of the work S1 and the frame H are parallel . This eliminates the situation in which the frame H viewed by the user who purchased the product tilts with respect to the displayable area, thereby preventing the occurrence of defective products.

1: turntable 1a:
2: retaining device 3: peeling device
4: Detection device 5: Compression device
6: control device 11: index mechanism
31: Supply unit 31a:
31b, 34c: Reel rotating mechanism 32:
33: peeling section 33a: peeling head
33b, 35, 54, 356: cylinders 33c to 33g: guide rollers
34: winding section 34a:
34b: Reel lifting mechanism 41, 42: CCD camera
42a: reflection surface 45, 46: arm
49: camera driving mechanism 51: vacuum chamber
52: pressure head 52a, 511: protective member
53: lifting mechanism 55: decompression pump
56: Vacuum system 100:
200: support part 300: positioning part
310: Arrangement section 311: XY-θ table
312, 320, 330, 340: shaft portion 313:
313a, 313b: groove 314: bellows
315: pulley 321, 331:
322, 332: eccentric roller 323, 333, 346: armature
341: phase rotation shaft 342: pulley
343: timing belt 344: bellows coupling
345: lower rotating shaft 350:
351: Brake plate 352: Brake
353: lifting shaft 354: spring
355, 525: to-be-pressed portion 400:
410: fixed table 420, 430, 440: clutch
421, 431, 441: Coils 422, 432, 442: Rotor
450, 460, 470: motor 500: suction part
510: suction plate 512, 526: piping
520: three-way valve 521:
522: upper valve 523: lower valve
524: Load 527:
530: Adsorption pump 610: Table control unit
620: storage unit 624:
630: Timing control unit 640: Input / output interface
650: peeling control section 651: head control section
652: rotation control section 653:
660: position detection unit 661: camera driving unit
662: image pickup control section 663: three point extracting section
664: Weight center calculating section 665: Tilt calculating section
670: Positioning control section 671:
672: Position calculation unit 673:
680: Vacuum controller 681: Chamber controller
682: Decompression control section 683: Vacuum operation section
683a: Voltage judging unit 683b:
683c: Pressure calculation section 684: Valve control section
685:

Claims (12)

A bonding apparatus for bonding a pair of works constituting a display apparatus,
A turntable which intermittently rotates in accordance with a plurality of positions,
A plurality of holding devices provided in the turntable for holding a pair of works,
A positioning unit provided in the holding device for positioning at least one of the pair of works;
A pressing device for pressing at least one of the pair of works in the holding device to join the pair of works,
Wherein the pressing device has a vacuum chamber capable of accommodating a portion for holding a work in the positioning portion,
A vacuum system for outputting a voltage value corresponding to the pressure in the vacuum chamber,
A storage unit for storing a plurality of polynomial approximate expressions for calculating voltage values and pressure values corresponding thereto,
An equation selecting unit for selecting a polynomial approximate expression corresponding to the voltage value output from the vacuum system based on the voltage value and the polynomial approximate expression stored in the storage unit,
Based on the selected polynomial approximate expression, a pressure calculation unit
And a sealing member for sealing the sealing member. The joining apparatus according to claim 1, wherein the storage section stores a polynomial approximation expression for each section of the voltage value divided into a plurality of sections. 2. The apparatus according to claim 1,
An adsorption plate having a vent path connected to a vacuum source,
A suction hole provided in the suction plate so as to communicate with the ventilation path and vacuum-adsorbing one of the work pieces to the suction plate by the vacuum source;
A valve for switching the state in which the vent path is in communication with the vacuum source and a state in which the vent path is in communication with the vacuum chamber;
Wherein the holding device has a holding portion for holding the other work at a position facing the work on the suction plate. 4. The bonding apparatus according to claim 3, further comprising a valve control section for controlling opening and closing of the valve based on the pressure value calculated by the pressure calculating section. The joining apparatus according to claim 4, further comprising: a valve pressure value storage section for storing a valve pressure value for which the valve control section is a threshold value for switching the valve. 4. The valve according to claim 3,
An inner tube portion in the vertical direction,
A rod provided in the inner tube so as to be able to move up and down,
A valve provided in the rod for opening and closing the communication between the vacuum source and the ventilation path by raising and lowering the rod,
And a valve provided in the rod for opening and closing the communication between the vacuum chamber and the ventilation path by raising and lowering the rod,
And a sealing member for sealing the sealing member. [7] The apparatus of claim 6, further comprising: a fixed table provided independently of the turntable;
And a pressing portion provided on the fixing table and adapted to switch the valve by pressing. The joining apparatus according to claim 3, wherein a protective member is provided on a surface of the adsorption plate which is in contact with the work, to which a porous sheet is adhered to the elastic member. A turntable for intermittently rotating in accordance with a plurality of positions; a holding device provided in the turntable for holding a pair of works constituting a display device; and a holding device provided in the holding device, A pressing device that presses at least one of a pair of works in the holding device to couple the pair of works to each other; and a pressing device provided in the pressing device, And a vacuum chamber provided in the vacuum chamber are controlled by a control device so as to join the pair of works to each other,
The control device includes a storage unit, an expression selecting unit, and a pressure calculating unit,
Wherein the storage unit stores a plurality of polynomial approximate expressions for calculating a voltage value and a pressure value corresponding thereto,
Wherein the expression selecting unit selects a polynomial approximate expression corresponding to the voltage value output from the vacuum system based on the voltage value and the polynomial approximation expression stored in the storage unit,
Wherein the pressure calculating unit calculates a pressure value based on the selected polynomial approximate expression. The control method of a bonding apparatus according to claim 9, wherein the storage unit stores a polynomial approximation expression for each section of the voltage value divided into a plurality of sections. 10. The vacuum degassing apparatus according to claim 9, wherein the joining apparatus comprises: a suction section having a vent path communicated with a vacuum source and a vacuum chamber, for vacuum-adsorbing a work opposite to the work in the positioning section; A valve for switching the state in which the vent path is in communication with the vacuum chamber, and a valve control unit for controlling the valve,
Wherein the valve control unit controls opening and closing of the valve based on the pressure value calculated by the pressure calculation unit. The vacuum cleaner according to claim 11, wherein the valve control unit controls the valve unit so that, when the pressure value calculated by the pressure calculation unit is a valve pressure value that becomes a threshold value stored in advance, Wherein the control means controls the valve.

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