KR102672523B1 - 노즐 세정 장치, 노즐 세정 방법 및 도포 장치 - Google Patents
노즐 세정 장치, 노즐 세정 방법 및 도포 장치 Download PDFInfo
- Publication number
- KR102672523B1 KR102672523B1 KR1020220012263A KR20220012263A KR102672523B1 KR 102672523 B1 KR102672523 B1 KR 102672523B1 KR 1020220012263 A KR1020220012263 A KR 1020220012263A KR 20220012263 A KR20220012263 A KR 20220012263A KR 102672523 B1 KR102672523 B1 KR 102672523B1
- Authority
- KR
- South Korea
- Prior art keywords
- nozzle
- discharge
- unit
- coating liquid
- recovery
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 146
- 239000011248 coating agent Substances 0.000 title claims abstract description 143
- 238000004140 cleaning Methods 0.000 title claims description 102
- 238000000034 method Methods 0.000 title claims description 23
- 239000007788 liquid Substances 0.000 claims abstract description 161
- 238000011084 recovery Methods 0.000 claims abstract description 95
- 239000000758 substrate Substances 0.000 claims description 52
- 230000008569 process Effects 0.000 claims description 14
- 238000007599 discharging Methods 0.000 claims description 12
- 238000012423 maintenance Methods 0.000 description 12
- 230000007246 mechanism Effects 0.000 description 12
- 239000011521 glass Substances 0.000 description 5
- 230000037303 wrinkles Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- 230000010354 integration Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000004210 ether based solvent Substances 0.000 description 1
- 239000010438 granite Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000003094 microcapsule Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/52—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter for removal of clogging particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
- B05B15/555—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids discharged by cleaning nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Coating Apparatus (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Cleaning By Liquid Or Steam (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021029987A JP7279096B2 (ja) | 2021-02-26 | 2021-02-26 | ノズル洗浄装置、ノズル洗浄方法および塗布装置 |
| JPJP-P-2021-029987 | 2021-02-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20220122492A KR20220122492A (ko) | 2022-09-02 |
| KR102672523B1 true KR102672523B1 (ko) | 2024-06-07 |
Family
ID=82974505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020220012263A KR102672523B1 (ko) | 2021-02-26 | 2022-01-27 | 노즐 세정 장치, 노즐 세정 방법 및 도포 장치 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7279096B2 (zh) |
| KR (1) | KR102672523B1 (zh) |
| CN (1) | CN114950809B (zh) |
| TW (1) | TWI826870B (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024044924A (ja) * | 2022-09-21 | 2024-04-02 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板洗浄装置および基板洗浄方法 |
| CN117123406B (zh) * | 2023-10-26 | 2024-01-02 | 山东金泰高温材料有限公司 | 用于石灰窑内衬快速修补的喷射设备及内衬快速修补方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005205329A (ja) | 2004-01-23 | 2005-08-04 | Tokyo Electron Ltd | 塗布装置 |
| JP2006167508A (ja) * | 2004-12-13 | 2006-06-29 | Toray Ind Inc | 塗布用ダイの清掃方法および清掃装置並びにディスプレイ用部材の製造方法および製造装置 |
| KR100708314B1 (ko) * | 2005-11-04 | 2007-04-17 | 세메스 주식회사 | 노즐 처리 유닛 및 방법, 그리고 상기 유닛을 가지는 기판처리 장치 |
| JP2013071033A (ja) | 2011-09-27 | 2013-04-22 | Dainippon Screen Mfg Co Ltd | ノズル洗浄装置および該ノズル洗浄装置を備えた塗布装置 |
| JP2020037092A (ja) | 2018-09-06 | 2020-03-12 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置および基板処理方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3306838B2 (ja) * | 1993-12-14 | 2002-07-24 | 東レ株式会社 | カーテンフローコータの口金の清掃方法およびカラーフィルタ用塗膜の製造方法 |
| JPH10216598A (ja) * | 1997-02-04 | 1998-08-18 | Toray Ind Inc | 塗布方法および塗布装置並びにカラーフィルターの製造方法および製造装置 |
| JP4091372B2 (ja) * | 2002-07-16 | 2008-05-28 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| JP2006075687A (ja) * | 2004-09-08 | 2006-03-23 | Seiko Epson Corp | 液滴吐出装置、ヘッドのクリーニング方法、電気光学装置の製造方法、電気光学装置および電子機器 |
| JP2010240550A (ja) * | 2009-04-03 | 2010-10-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
| JP2011177707A (ja) * | 2010-02-08 | 2011-09-15 | Toray Ind Inc | 塗布方法および塗布装置並びにディスプレイ用部材の製造方法 |
| JP5766990B2 (ja) * | 2011-03-23 | 2015-08-19 | 東レエンジニアリング株式会社 | 塗布装置 |
| JP2014176812A (ja) * | 2013-03-15 | 2014-09-25 | Dainippon Screen Mfg Co Ltd | ノズル洗浄装置、塗布装置、ノズル洗浄方法、および塗布方法 |
| CN103286030B (zh) * | 2013-06-28 | 2016-08-31 | 深圳市华星光电技术有限公司 | 一种狭缝喷嘴清洁装置 |
| JP6537243B2 (ja) * | 2013-11-22 | 2019-07-03 | キヤノン株式会社 | 液体吐出装置、液体吐出装置の制御方法、インプリント装置および部品の製造方法 |
| JP6783105B2 (ja) * | 2016-09-16 | 2020-11-11 | 株式会社Ｓｃｒｅｅｎホールディングス | ノズル洗浄方法、塗布装置 |
| JP6337184B2 (ja) * | 2017-06-22 | 2018-06-06 | 株式会社Ｓｃｒｅｅｎホールディングス | ノズル洗浄装置、塗布装置、ノズル洗浄方法、および塗布方法 |
-
2021
- 2021-02-26 JP JP2021029987A patent/JP7279096B2/ja active Active
- 2021-11-16 CN CN202111353549.5A patent/CN114950809B/zh active Active
- 2021-11-25 TW TW110143934A patent/TWI826870B/zh active
-
2022
- 2022-01-27 KR KR1020220012263A patent/KR102672523B1/ko active IP Right Grant
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005205329A (ja) | 2004-01-23 | 2005-08-04 | Tokyo Electron Ltd | 塗布装置 |
| JP2006167508A (ja) * | 2004-12-13 | 2006-06-29 | Toray Ind Inc | 塗布用ダイの清掃方法および清掃装置並びにディスプレイ用部材の製造方法および製造装置 |
| KR100708314B1 (ko) * | 2005-11-04 | 2007-04-17 | 세메스 주식회사 | 노즐 처리 유닛 및 방법, 그리고 상기 유닛을 가지는 기판처리 장치 |
| JP2013071033A (ja) | 2011-09-27 | 2013-04-22 | Dainippon Screen Mfg Co Ltd | ノズル洗浄装置および該ノズル洗浄装置を備えた塗布装置 |
| JP2020037092A (ja) | 2018-09-06 | 2020-03-12 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置および基板処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20220122492A (ko) | 2022-09-02 |
| JP2022131177A (ja) | 2022-09-07 |
| CN114950809B (zh) | 2024-02-23 |
| CN114950809A (zh) | 2022-08-30 |
| TWI826870B (zh) | 2023-12-21 |
| JP7279096B2 (ja) | 2023-05-22 |
| TW202233307A (zh) | 2022-09-01 |
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