KR101683467B1 - Particular matter sensor and exhaust gas purification system using the same - Google Patents

Abstract

Provided are a particle matter sensor, capable of reducing a response time of capacitance, and an exhaust gas purification system using the same. According to an embodiment of the present invention, the particle matter sensor includes: an insulation substrate; a first electrode formed to be exposed on the upper surface of the insulation substrate and including a first ground connection electrode and multiple separation electrodes electrically not connected to the first ground connection electrode; a second electrode installed in the insulation substrate to correspond to the multiple separation electrodes and including multiple second ground connection electrodes electrically connected to each other; and a heater unit heating the first electrode and the second electrode by being arranged in the insulation substrate. The first ground connection electrode is extended in a first direction and is connected to a first electric terminal. The first ground connection electrode also includes multiple extension units separated from each other. Each of the multiple separation electrodes includes: a sensing unit individually arranged between the multiple first extension units and having a first area; and a capacity unit connected to the sensing unit and having a second area wider than the first area. When the particle matters are deposited between the first ground connection electrode and the sensing unit, the separation electrode is electrically connected to the first ground connection electrode. Therefore, the particle matter sensor can measure the capacitance between the first electrode and the second electrode.

Description

TECHNICAL FIELD [0001] The present invention relates to a particulate matter sensor and an exhaust gas purification system using the particulate matter sensor,

The present invention relates to a particulate matter sensor and an exhaust gas purification system using the same.

Generally, there is a growing interest in a post-treatment apparatus for purifying exhaust gas as the exhaust regulation is further strengthened. Particularly, regulations on Particulate Matter (PM) for diesel vehicles are becoming more stringent.

Specifically, regulations on exhaust pollutants contained in exhaust gas are gradually increasing due to demands of comfortable environment of human beings due to air pollutants and environmental regulations of each country, and various exhaust gas filtration methods have been studied as countermeasures thereto have.

Accordingly, a post-treatment technique for treating the exhaust gas has been proposed, and the above-described post-treatment technique includes an oxidation catalyst, a nitrogen oxide catalyst, and an exhaust gas reduction device through a smoke filtering device.

The most efficient and practical approach to reduce the particulate matter among the oxidation catalyst, the nitrogen oxide catalyst, and the soot filter apparatus as described above is an exhaust gas reduction apparatus using a soot filter apparatus.

A particulate matter sensor (PM sensor) is mounted at the downstream end of the DPF filter to diagnose whether the exhaust gas abatement apparatus is malfunctioning.

Here, the resistance type particulate matter sensor (PM sensor) includes a plurality of external electrodes disposed on the surface in parallel, particulate matter is deposited between the external electrodes, and the particulate matter PM It is possible to easily detect the particulate matter passing through the exhaust gas particulate filter and escaping to the downstream side by measuring the change in the electrical conductivity of the sensor by forming a current.

In addition, the electrostatic capacity type is composed of a plurality of external electrodes arranged in parallel on the surface, a plurality of internal electrodes arranged in the up / down direction with a plurality of external electrodes, and an area of the particulate matter deposited between the external electrodes And the capacitance between the external electrode and the internal electrode is measured by using the distance between the external electrode and the internal electrode, it is possible to easily detect the particulate matter passing through the exhaust gas particulate filter and escaping to the downstream side.

In the resistance type and capacitive type particulate matter sensors, the response time of the initial current formed between the external electrodes can be determined according to the speed at which the particulate phase is settled between the external electrodes.

However, since the resistance method and the volumetric capacitance type particulate matter sensor according to the related art are formed with a width larger than the width of the external electrode between the external electrodes, the response time of the initial current due to the deposition of particles is very slow .

In addition, since the area of the external electrode is formed to be smaller than the width between the external electrodes, there is a problem that the sensitivity of detecting capacitance between the external electrode and the internal electrode is low.

Japanese Patent Laid-Open No. 2009-85959 (published on April 23, 2009)

An object of the present invention is to provide a particulate matter sensor capable of shortening a response time of an electrostatic capacity and an exhaust gas purification system using the particulate matter sensor.

According to an aspect of the present invention, there is provided a particulate matter sensor comprising: an insulating substrate; A first electrode formed on the upper surface of the insulating substrate and including a first ground electrode and a plurality of spaced apart electrodes electrically connected to the first ground electrode; A second electrode disposed inside the insulating substrate so as to correspond to the plurality of spacing electrodes and including a plurality of second ground electrodes electrically connected to each other; And a heater disposed inside the insulating substrate and heating the first electrode and the second electrode, wherein the first ground electrode is connected to the first electrical connection terminal and extends in the first direction, Wherein each of the plurality of spaced apart electrodes includes a sensing unit having a first area and a second sensing unit disposed between the plurality of first extending units and connected to the sensing unit, Wherein when the particulate matter is deposited between the first ground electrode and the sensing unit, the spacing electrode is electrically connected to the first ground electrode, and thereby the first electrode and the second electrode Can be measured.

The first ground electrode may include a second extending portion connected to the plurality of first extending portions and extending in a second direction and a second extending portion extending in the first direction from the second extending portion and connected to the first electrical connecting terminal And a third extension.

In this case, the first direction may be the width direction of the insulating substrate, and the second direction may be the length direction of the insulating substrate.

In this case, the plurality of first extending portions may be spaced apart from and parallel to the third extending portions, and the intervals between adjacent first extending portions may be equal to each other.

At this time, the first ground electrode may be formed to surround the plurality of spacing electrodes.

At this time, the plurality of spacing electrodes extend in the longitudinal direction of the insulating substrate and may be arranged in parallel with each other.

In this case, each of the sensing unit and the capacitor unit may have a rectangular shape extending in the extending direction of the insulating substrate.

In this case, the second area of the capacitor may be at least twice the first area of the sensing part.

At this time, the width of the capacitance portion may be wider than the width of the sensing portion.

In this case, the length in the extending direction of the first extending portion may correspond to the length in the extending direction of the sensing portion.

At this time, any one of the plurality of second ground electrodes may be electrically connected to the second electrical connection terminal.

The first and second electrical connection terminals may be formed on the other side of the upper surface of the insulating substrate.

In this case, a dielectric layer may be disposed between the first electrode and the second electrode.

At this time, a via hole for electrically connecting the second electrode to the second electrical connection terminal may be formed inside the insulating substrate.

According to another aspect of the present invention, there is provided an exhaust manifold comprising: an exhaust manifold; An exhaust gas particulate filter that removes particulates contained in the exhaust gas discharged from the exhaust manifold, and a particulate matter filter that is provided on an exhaust gas pipe connected to the exhaust gas particulate filter and passes through the exhaust gas particulate filter, Wherein the particulate matter sensor comprises: an insulating substrate; A first electrode formed on the upper surface of the insulating substrate and including a first ground electrode and a plurality of spaced apart electrodes electrically connected to the first ground electrode; A second electrode disposed inside the insulating substrate so as to correspond to the plurality of spaced apart electrodes and including a plurality of second ground electrodes electrically connected to each other, and a second electrode disposed inside the insulating substrate, the first electrode and the second electrode being heated Wherein the first grounding electrode comprises a plurality of first extending portions connected to the first electrical connecting terminal and extending in a first direction and spaced from each other, wherein each of the plurality of spacing electrodes comprises a plurality of first And a capacitance portion connected to the sensing portion and having a second area larger than the first area, the sensing portion having a first area and a second sensing area disposed between the first ground electrode and the sensing part, The spacing electrode is electrically connected to the first ground electrode, so that the distance between the first electrode and the second electrode An exhaust gas purification system for measuring capacitance is provided.

The particulate matter sensor used in the exhaust gas purifying system according to an embodiment of the present invention has an advantage that the area of the first electrode portion on the upper surface of the insulating substrate through which electric power passes is widened even if the particulate matter is accumulated on the upper surface of the insulating substrate, The electrostatic capacity value between the second electrode unit inside the first electrode unit insulating substrate having a wider electric area can be amplified.

In the particulate matter sensor according to an embodiment of the present invention, the area of the capacitance portion of the spacing electrode, which substantially changes the electrostatic capacitance of the particulate sensor, is formed larger than the area of the sensing portion, And the detection sensitivity of the electrostatic capacity between the first electrode portion and the second electrode portion inside the insulating substrate can be increased.

In the particulate matter sensor according to an embodiment of the present invention, the area of the sensing part of the spacing electrode is formed smaller than the area of the capacitance part, and the first extensions of the first electrode are disposed between the sensing parts, The space between the sensing unit and the first electrode is widened so that the response time required for changing the capacitance between the first electrode unit and the second electrode unit including the electrically isolated electrodes can be shortened.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing the overall configuration of an exhaust gas purifying system for a diesel engine for a vehicle. FIG.
2 is a perspective view schematically showing a particulate matter sensor according to an embodiment of the present invention.
3 is an exploded perspective view of the particulate matter sensor of Fig.
4 is an enlarged plan view of part A of Fig.
FIG. 5A is a plan view showing the first electrode of FIG. 3, and FIG. 5B is a plan view of the second electrode of FIG. 3. FIG.
6 is a sectional view taken along the line BB 'of FIG.
7 is a sectional view taken along the CC 'direction in FIG.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art to which the present invention pertains. The present invention may be embodied in many different forms and is not limited to the embodiments described herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

1, a turbine 130 may be installed in an exhaust manifold 120 of an engine 110, and a turbocharger 140 interlocked with the turbine 130 may be installed in the exhaust manifold 120 of the engine 110 The compressed air can be passed through the cooler 150 and sent to an intake manifold (not shown), and a part of the combustion exhaust discharged from the exhaust manifold 120 flows through the valve 160 and the cooler, (Not shown).

A diesel oxidation catalyst (not shown) and an exhaust gas particulate filter 170 are installed in the exhaust pipe 180 connected to the exhaust manifold 120 to treat the combustion exhaust gas. That is, while the combustion exhaust gas discharged to the exhaust pipe 180 passes through the diesel oxidation catalyst (not shown) on the upstream side, hydrocarbon (HC), carbon monoxide (CO) and nitrogen monoxide NO of unburned fuel can be oxidized Particulate matter (PM) composed of soot, soluble organic component (SOF) and inorganic component can be collected while passing through the exhaust gas particulate filter 170 on the downstream side.

The diesel oxidation catalyst (not shown) can raise the exhaust temperature by oxidation combustion of the supplied fuel or oxidize and remove the SOF component in the particulate matter when the exhaust gas particulate filter 170 is forcibly regenerated. In addition, NO 2 produced by the oxidation of NO can be used as an oxidizing agent for the particulate matter deposited in the downstream exhaust gas particulate filter 170, thereby enabling continuous oxidation.

The exhaust gas particulate filter 170 may be formed with a plurality of fine holes passing through a cell wall for partitioning the gas flow path and can capture particulate matter in the exhaust gas introduced into the exhaust gas particulate filter 170. It may be configured as a continuous regenerative diesel particulate filter in which the diesel oxidation catalyst and the exhaust gas particulate filter 170 are integrated.

A differential pressure sensor 190 may be installed in the exhaust pipe 180 to monitor the amount of particulate matter deposited in the diesel particulate filter 170. The differential pressure sensor 190 is connected to the upstream side and the downstream side of the exhaust gas particulate filter 170 and can output a signal corresponding to the differential pressure between the upstream and downstream sides thereof.

In addition, a temperature sensor (not shown) is provided upstream of the diesel oxidation catalyst and upstream and downstream of the exhaust gas particulate filter 170, and the respective exhaust temperatures can be monitored.

Based on these outputs, the control circuit (not shown) monitors the catalytic active state of the diesel oxidation catalyst and the particulate matter trapping state of the diesel particulate filter 170. When the particulate matter trapping amount exceeds the allowable amount, The regeneration control for burning and removing can be performed.

The particulate matter sensor 200 is installed on an outlet side exhaust pipe 182 connected to the other side of the exhaust gas particulate filter 170 and can detect particulate matter passing through the exhaust gas particulate filter 170 and escaping to the downstream side .

2 and 3, the particulate matter sensor 200 of the present invention may include an insulating substrate 210, a first electrode unit 220, a second electrode unit 230, and a heater unit 240 have.

3, the insulating substrate 210 may be formed by laminating the first to fourth insulating layers 212, 214, 216, and 218 in parallel with each other, and may be formed of a glass material, a ceramic material, , Or a heat-resistant insulator such as titanium dioxide.

The first electrode unit 220 may be exposed on the upper surface of the insulating substrate 210.

Specifically, the first electrode unit 220 may include a first electrode 221, a first electrode lead 222d, and a first electrical connection terminal 226.

The first electrode 221 may include a first ground electrode 222 and a spacing electrode 224.

The first ground electrode 222 may include a plurality of first extending portions 222a, a second extending portion 222b, and a third extending portion 222c.

The plurality of first extensions 222a may be spaced apart from each other in the width direction of the insulating substrate 210 on one side of the upper surface of the insulating substrate 210 and may have a rectangular shape extending in the longitudinal direction of the insulating substrate 210, Shape.

At this time, the plurality of first extending portions 222a may be connected to each other by the second extending portion 222b.

The second extending portion 222b may extend in the width direction of the insulating substrate 210 to electrically connect the plurality of first extending portions 222a to each other.

Referring to FIG. 4, a pair of third extending portions 222c extend along the longitudinal direction of the insulating substrate 210 at both ends of the second extending portion 222b extending in the width direction.

At this time, one of the pair of third extension parts 222c may be formed in a straight line shape, and the other one of the third extension parts 222c may be bent so as to be connected to the first electrode lead 222d.

The first extending portion 222a is connected to the first electrical connecting portion 222b formed on the other side of the insulating substrate 210 by the second extending portion 222b, the third extending portion 222c and the first electrode lead 222d, And may be electrically connected to the terminal 226.

The second extending portion 222b and the third extending portion 222c of the first grounding electrode 222 may be disposed outside the spacing electrode 224 to be described later, 1 grounding electrode 222. In this embodiment,

The spacing electrode 224 is an electrode that is not electrically connected to the first ground electrode 222 and is arranged in the longitudinal direction of the insulating substrate 210. Referring to FIG. 4, the first extending portions 222a are disposed between the plurality of spacing electrodes 224.

At this time, the plurality of spacing electrodes 224 are not electrically connected to each other, and particles are deposited in the space 228 formed between the spacing electrode 224 and the first extending portion 222a, 1 extended portion 222a of the first housing 222a.

In this case, according to an embodiment of the present invention, each of the plurality of spacing electrodes 224 may include a sensing unit 224a and a capacitance unit 224b.

The sensing portion 224a is a rectangular electrode portion disposed adjacent to the first extending portion 222a and having a first area. In this case, the sensing portion 224a may be disposed in parallel with the first extending portion 222a so as to have a length corresponding to the extending direction of the first extending portion 222a.

The sensing portion 224a may be spaced apart from the first extending portion 222a by a predetermined distance and a space 228 in which particulate matter is accumulated may be formed between the first extending portion 222a and the sensing portion 224a.

Accordingly, particles can be deposited in the space 228, so that the sensing unit 224a and the first extension 222a, which are not electrically connected, can be electrically connected.

On the other hand, the capacitor portion 224b is electrically connected to the sensing portion 224a and extends from the extending direction end portion of the sensing portion 224a. Referring to FIG. 4, the first extension 222a may not be located between the capacitors 224b. The capacitor portion 224b may be formed as a rectangular electrode portion extending in the longitudinal direction of the insulating substrate 210. [

Accordingly, when the sensing unit 224a is electrically connected to the first extension unit 222a, the capacitor unit 224b is electrically connected to the first extension unit 222a, It is possible to increase the capacitance between the spacing electrode 224 including the capacitor portion 224b electrically connected to the first extension portion 222a and the second electrode 232 inside the insulating substrate.

According to one embodiment of the present invention, in order to increase the capacitance between the spacing electrode 224 and the second electrode 232, the area of the capacitance portion 224b is designed to be larger than that of the sensing portion 224a .

More specifically, the area of the capacitor portion 224b may be formed to be wider than the area of the sensing portion 224a. Particularly, the area of the capacitor portion 224b is formed to be twice or more the area of the sensing portion 224a .

4, the width of the capacitance portion 224b may be wider than the width of the sensing portion 224a in order to make the area of the capacitance portion 224b wider than that of the sensing portion 224a have.

When the area of the capacitance portion 224b is formed wider than the area of the sensing portion 224a as described above, the capacitance formed between the capacitance portion 224b of the separation electrode 224 and the second electrode 232 can be increased At the same time, the detection sensitivity of capacitance can be increased.

In the meantime, as in the particulate matter sensor according to the embodiment of the present invention, the area of the sensing portion 224a is formed smaller than the area of the capacitor portion 224b, and the first extending portion 222a When the second extending portion 222b is disposed adjacent to the sensing portion 224a, a space where particulate matter can accumulate between the sensing portion 224a and the first ground electrode 222 is increased The distance between the sensing unit 224a and the first ground electrode 222 can be narrowed. Accordingly, the response time required for the capacitance between the spacing electrode 224 and the second electrode 232 to change after the spacer electrode 224 is electrically connected to the first ground electrode 222 can be shortened.

Referring to FIGS. 2 and 3, the second electrode unit 230 may be spaced apart from the first electrode unit 220 in the insulating substrate 210.

Specifically, the second electrode unit 230 may include a second electrode 232, a second electrode lead 234, and a second electrical connection terminal 236.

The second electrode 232 may include a plurality of second ground electrodes 242a corresponding to the spacing electrodes 224. [ Specifically, the plurality of second ground electrodes 232a may be spaced apart from each other in a rectangular shape in the insulating substrate 210.

In this case, the plurality of second ground electrodes 232a may be electrically connected to each other, and one of the plurality of second ground electrodes 242a, for example, the second ground electrode 242a located at the rightmost side as viewed in FIG. 5b, Can be electrically connected to the second electrical connection terminal (246) through the second electrode lead (244).

At this time, the first electrical connection terminal 226 and the second electrical connection terminal 246 may be formed on the other side of the upper surface of the insulating substrate 210.

The second electrical connection terminal 246 and the second electrode lead 234 are electrically connected to each other to electrically connect the second electrical connection terminal 246 formed on the other side of the upper surface of the insulating substrate 210 with the second electrode lead 234, A first via hole 212a and a second via hole 214a are formed in the first insulating layer 212 and the second insulating layer 214 between the first insulating layer 212 and the second insulating layer 214, respectively.

A dielectric layer 219 having a dielectric constant may be disposed between the first ground electrode 222 and the plurality of second ground electrodes 232a.

The dielectric layer 219 is formed on the dielectric layer 224 of the first electrode portion 220 and the second electrode 224 of the second electrode portion 220 so as to realize a smooth capacitance property between the spacing electrode 224 and the plurality of second ground electrodes 232a. May be formed between the plurality of second ground electrodes 232a of the electrode unit 230, and may be formed of a ceramic material.

3, the plurality of spacing electrodes 224 and the plurality of second ground electrodes 232a are disposed to be spaced apart from the insulating substrate 210 by a predetermined distance, Direction in a direction parallel to the first direction.

The plurality of spacing electrodes 224 and the plurality of second grounding electrodes 232a may be arranged in parallel in the longitudinal direction of the insulating substrate 210 and may correspond to each other in the width direction of the insulating substrate 210 Lt; / RTI >

At this time, the width of the plurality of second ground electrodes 232a may be the same as the width of the capacitance portion 224b among the spacing electrodes 224. [

Particulate matter may be deposited in the space 228 between the sensing portion 224a of the adjacent spacing electrode 224 and the first extending portion 222a.

6, particulate matter is deposited from the first space 228a of the spaces 228 between the sensing portion 224a and the first extension portion 222a, and then the entire space 228a ). ≪ / RTI >

As the particulate matter is accumulated in the space 228, the sensing unit 224a and the first extending unit 222a are electrically connected to each other, and the sensing unit 224a and the first extending unit 222a are gradually connected to each other The area to be electrically connected can be widened.

A specific capacitance measurement method will be described later with reference to Figs. 6 and 7. Fig.

The heater 240 is for heating the first electrode 221 and the second electrode 232 and the dielectric layer 219 and is disposed inside the insulating substrate 210 such as a third insulating layer 216 and the fourth insulating layer 218. In this case,

More specifically, the heater 240 may be positioned on the inner lower side of the insulating substrate 210 so as to be spaced apart from the first electrode 221 and the second electrode 232 in parallel.

At this time, both ends of the heater 240 may be electrically connected to the third electric connection terminal 252 and the fourth connection terminal 254 on the fourth insulation layer 218 of the insulating substrate 210.

At this time, when the heater 240 heats the first electrode 221, particulate matter deposited on the first electrode 221 can be removed.

In addition, since the exhaust gas downstream of the exhaust gas particulate filter (170 in FIG. 1) is at a high temperature of about 300 ° C or higher and about 650 ° C or higher in heating the heater, the general metal is likely to be oxidized when used as a heater, (240) may be formed of a material which is not easily oxidized at a high temperature.

6 and 7, a particulate matter sensor 200 having the above-described configuration will be described. The particulate matter P1 flowing into the outlet-side exhaust pipe 182 through the exhaust gas particulate filter (170 in FIG. 1) The particulate matter P1 passes through the sensing unit 224a of the separation electrode 224 and the particulate matter sensor 200 as shown in FIG. And may be deposited on the space 228 formed between the first extensions 222a.

Specifically, the sensing unit 224a and the first extending unit 222a may be electrically connected to each other by the particulate matter deposited between the sensing unit 224a and the first extending unit 222a.

Accordingly, the area of the sensing unit 224a through which the electricity passes can be widened, and the capacitor unit 224b integrally formed with the sensing unit 224a can be electrically connected.

Accordingly, the electrostatic capacity between the spacing electrode 224 and the second electrode 232 is changed.

7, the capacitance between the capacitor portion 224b and the second electrode 232 can be measured by the following Equation 1. < EMI ID = 1.0 >

 C =? W / t (Equation 1)

In Equation 1, W is the area of the capacitance portion 224b of the separation electrode electrically connected to the first ground electrode, and t is the distance from the capacitance portion 224b to the second electrode 232, 220 and the second electrode unit 230 can be measured.

Here, the area of the capacitance portion 224b of the spacing electrode 224 is formed wider than the area of the sensing portion 224a.

Therefore, the particulate matter sensor according to the embodiment of the present invention corresponds to the area of the capacitance portion as well as the area of the sensing portion, which is increased when the one sensing portion is electrically connected to the first grounding electrode. The capacitance between the second electrode 232 and the second electrode 232 can be increased by connecting the sensing unit 224a to the first ground electrode 222 electrically.

The particulate matter sensor according to an exemplary embodiment of the present invention may be configured such that the area of the capacitance portion 224b of the spacing electrode 224 that changes the electrostatic capacitance with the second ground electrode 232 is larger than the area of the sensing portion 224a The response time required for changing the capacitance between the spacing electrodes 224 and the second grounding electrode 232 can be shortened and thus the change in the capacitance can be increased.

In addition, the particulate matter sensor according to an embodiment of the present invention may have a configuration in which the area of the sensing portion 224a of the spacing electrode is smaller than the area of the capacitor portion 224b, and the first grounding electrode 222 is interposed between the sensing portions 224a. Since the number of contacts between the sensing unit 224a and the first ground electrode 222 connected by the particulate matter is increased due to the arrangement of the first extension portions 222a of the first ground electrode 232 and the second extension electrode 222a of the second ground electrode 232, It is possible to shorten the response time required for the change of the capacitance between the electrodes.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

100: exhaust gas purification system 110: engine
120: exhaust manifold 130: turbine
140: Turbocharger 150: Cooler
160: valve (160) 170: exhaust gas particulate filter
180: Exhaust pipe 182: Exhaust pipe
190: differential pressure sensor 200: particulate matter sensor
210: insulating substrate 220: first electrode part
222: first ground electrode 222a: first extending portion
222b: second extension part 222c: third extension part
224: Separation electrode 224a:
224b: Capacitor section 226: First electrical connection terminal
230: second electrode part 232: second electrode
234: second electrode lead 236: second electrical connection terminal
240: heater part

Claims (15)

An insulating substrate;
A first electrode formed on the upper surface of the insulating substrate and including a first ground electrode and a plurality of spaced apart electrodes electrically connected to the first ground electrode;
A second electrode disposed inside the insulating substrate so as to correspond to the plurality of spacing electrodes and including a plurality of second ground electrodes electrically connected to each other; And
And a heater unit disposed inside the insulating substrate and heating the first electrode and the second electrode,
The first ground electrode includes a plurality of first extending portions connected to the first electrical connecting terminal and extending in the width direction of the insulating substrate and spaced apart from each other,
Each of the plurality of spacing electrodes includes a sensing unit having a first area and a second sensing unit, the sensing unit having a first area and a second area, each of the plurality of spacing electrodes being disposed between the plurality of first extending units,
When particulate matter is deposited between the first ground electrode and the sensing unit, the spacing electrode is electrically connected to the first ground electrode, thereby measuring the capacitance between the first electrode and the second electrode Particulate matter sensor. The method according to claim 1,
The first ground electrode
A second extending portion connected to the plurality of first extending portions and extending in the longitudinal direction of the insulating substrate; And
And a third extension extending from the second extension in the width direction of the insulating substrate and connected to the first electrical connection terminal. delete 3. The method of claim 2,
Wherein the plurality of first extensions are spaced parallel to and spaced apart from the third extensions and the gaps between adjacent first extensions are formed to be equal to each other. The method according to claim 1,
Wherein the first ground electrode is formed to surround the plurality of spacing electrodes. The method according to claim 1,
Wherein the plurality of spacing electrodes extend in a longitudinal direction of the insulating substrate and are arranged in parallel with each other. The method according to claim 1,
Wherein each of the sensing unit and the capacitance unit has a rectangular shape extending in the extending direction of the insulating substrate. The method according to claim 1,
Wherein the second area of the capacitance portion is at least twice the first area of the sensing portion. The method according to claim 1,
Wherein a width of the capacitance portion is larger than a width of the sensing portion. The method according to claim 1,
Wherein a length in the extending direction of the first extending portion corresponds to a length in the extending direction of the sensing portion. The method according to claim 1,
And one of the plurality of second ground electrodes is electrically connected to the second electrical connection terminal. 12. The method of claim 11,
Wherein the first and second electrical connection terminals are formed on the other side of the upper surface of the insulating substrate. The method according to claim 1,
And a dielectric layer positioned between the first electrode and the second electrode. 12. The method of claim 11,
And a via hole for electrically connecting the second ground electrode to the second electrical connection terminal is formed inside the insulating substrate. An exhaust manifold;
An exhaust gas particulate filter for removing particulates contained in the exhaust gas discharged from the exhaust manifold,
And a particulate matter sensor disposed on an exhaust pipe connected to the exhaust gas particulate filter and detecting particulate matter passing through the exhaust gas particulate filter and flowing downstream,
The particulate matter sensor
An insulating substrate;
A first electrode formed on the upper surface of the insulating substrate and including a first ground electrode and a plurality of spaced apart electrodes electrically connected to the first ground electrode;
A second electrode disposed inside the insulating substrate so as to correspond to the plurality of spacing electrodes and including a plurality of second ground electrodes electrically connected to each other; And
And a heater unit disposed inside the insulating substrate and heating the first electrode and the second electrode,
The first ground electrode includes a plurality of first extensions connected to the first electrical connection terminals and extending in the width direction of the insulating substrate and spaced apart from each other,
Wherein each of the plurality of spaced electrodes includes a sensing unit having a first area and a second sensing unit, the capacitive unit being disposed between the plurality of first extending units and having a second area larger than the first area,
When particulate matter is deposited between the first ground electrode and the sensing unit, the spacing electrode is electrically connected to the first ground electrode, thereby measuring the capacitance between the first electrode and the second electrode , Exhaust gas purification system.

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