KR101258251B1 - Transferring robot control system to provent damage of substrate and method for controlling thereof - Google Patents

Abstract

The present invention is to prevent damage to the substrate when loading and unloading the substrate to the cassette using a transfer robot, a cassette having a plurality of slots (slot) that can accommodate the substrate on both side walls, and a cassette A transfer robot that loads or unloads a substrate by entering a teaching position to be transferred, and a plurality of slots installed in a slot of a cassette to detect movement of the transfer robot when entering a cassette to transfer a substrate. Displacement robot controller which detects the position of each slot of the cassette through two displacement sensors and the displacement sensors and detects the teaching position to the cassette, and then controls the movement of the transfer robot according to the teaching position to prevent breakage of the substrate. Provides a substrate damage prevention transfer robot system comprising a and a control method thereof.

Displacement Robot, Cassette, Displacement Sensor, Teaching Position

Description

Transfer robot control system to provent damage of substrate and method for controlling Technical}

1 is a schematic diagram showing a transfer robot system according to the prior art.

2 is a view showing a state in which a substrate is stored in a cassette using a conventional transfer robot.

3 is a diagram illustrating a shaking phenomenon of the transfer robot.

4 is a view showing a substrate break prevention robot robot system according to an embodiment of the present invention.

FIG. 5 is a plan view cut along the line VV ′ shown in FIG. 4.

6 is a front view of a cassette according to an embodiment of the present invention.

7 is a side view of a cassette according to an embodiment of the present invention.

8 is a view for explaining the operation of storing the substrate in the cassette using the transfer robot of the present invention.

9 is an overall flowchart illustrating a control method of a transfer robot system according to an embodiment of the present invention.

10 and 11 are detailed flowcharts of FIG. 9.

DESCRIPTION OF THE REFERENCE NUMERALS (S)

100; cassette 150; loader

110a, 110-1,110-2,110- (m-1), 110-m; slot

200; robot robot 210; support

220; rotating part 230; robot arm

300; displacement sensor 400; substrate

310,312,314,316,318; first sensor

310a, 312a, 314a, 316a, 318a; light emitting unit

310b, 312b, 314b, 316b, 318b;

340,342,344,346,348; second sensor

500; now the robot controller

The present invention relates to a transfer robot system used in the manufacture of a liquid crystal display device, and in particular, a substrate damage prevention transfer robot system for preventing a breakage of the substrate when loading and unloading the substrate into the cassette using the transfer robot and using the same. It relates to a control method.

In general, the liquid crystal display device forms a liquid crystal layer having anisotropic dielectric constant between the upper substrate and the lower substrate, and adjusts the intensity of the electric field formed in the liquid crystal layer to change the molecular arrangement of the liquid crystal material, thereby providing a transparent insulating substrate. A display device expresses a desired image by adjusting the amount of light transmitted.

Such a liquid crystal display includes a process of manufacturing an upper substrate, a process of manufacturing a lower substrate, a process of bonding an upper substrate and a lower substrate, a process of forming a liquid crystal layer between two bonded substrates, and then sealing and repairing the substrate. And a process of manufacturing a liquid crystal display module by attaching a backlight or the like to the liquid crystal panel and mounting a driving circuit.

As described above, since the manufacturing process of the liquid crystal display device is connected to different unit processes and the equipment for performing each unit process is different, a robot carrying the substrate of the liquid crystal display device with these devices, and the substrate There is a need for a cassette for accommodating this.

1 is a schematic view showing a transfer robot system according to the prior art, Figure 2 is a view showing a state in which a substrate is housed in a cassette using a conventional transfer robot, Figure 3 is a view showing the shaking phenomenon of the transfer robot.

First, referring to FIG. 1, a transfer robot system according to the related art includes a cassette 10 for accommodating and transporting a substrate 16, a loader 11 on which the cassette 10 is placed, and a substrate 16 on the cassette 10. ) And a transfer robot controller (not shown) for controlling the operation of the transfer robot 12, and the transfer robot 12 for accommodating or taking out the accommodated substrate (16).

A plurality of slots 10a are formed in both walls of the cassette 10 to accommodate the substrate 16.

The transfer robot 12 is composed of a support 13, a rotation 14, and two robot arms 15, and a robot arm 15 is connected to the rotation 14. The transfer robot 12 is capable of adjusting the height can accommodate or take out the substrate 16 in the slot (10a) of the desired position.

That is, when the substrate 16 is to be stored in the cassette 10, when the substrate 16 is loaded into the robot arm 12 and the rotating unit 14 is rotated, the rotational movement of the rotating unit 14 is performed by the robot arm ( 12, the robot arm 12 moves to the position where the substrate 16 is to be transferred (hereinafter, referred to as a 'teaching position') (teaching position) and then moves forward into the cassette 10. Therefore, the substrate 16 is loaded on the slot 10a to be loaded.

On the contrary, when the substrate 16 is to be taken out from the cassette 10, the robot arm 15 is inserted below the substrate 16 to be unloaded and then raised to raise the substrate 16 to the robot arm ( 15), then reverse and move to the designated teaching position.

The transfer robot controller (not shown) stores the optimum position in advance while performing the transfer test of the transfer robot 12 at an initial setting, and checks the operation state of the transfer robot 12 and the information of the substrate 16 before the transfer. It is responsible for reporting to the control system.

Therefore, the transfer robot system according to the prior art checks the information of the substrate in the transfer robot controller (not shown) when the cassette 10 is seated at a predetermined position, and if there is no abnormality in the information, the transfer robot 12 immediately uses the transfer robot 12. You will work on the transfer.

At this time, the teaching position is input in advance to control the movement of the transfer robot 12. During the input process, the teacher directly uses a measuring instrument to maximize the distance to the surrounding interference. Done.

By the way, the conventional transfer robot system operating in this way can not be precise teaching (teaching) because the teaching position is set with a different reference for each teacher.

In addition, as shown in FIGS. 2 and 3, when the substrate is bent in a bent state, the cassette 10 is not correctly seated at a predetermined position, or is twisted or excited by a predetermined angle, or the degree of shaking of the robot arm 15 ( d) and when the previously input teaching position does not coincide with the actual teaching position due to a software or hardware problem, when the transfer operation is performed, a collision occurs between the cassette 10 and the substrate 16 and thus the substrate ( 16) there is a problem that is broken.

Therefore, the technical problem to be achieved by the present invention is to provide a substrate break prevention robot system that detects the movement of the robot arm through the sensor to prevent damage to the substrate when loading and unloading the substrate using the transfer robot. .

Another object of the present invention is to provide a control method for preventing breakage of a substrate by using the transfer robot system described above.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not intended to limit the invention to the precise form disclosed. It can be understood.

In order to achieve the above technical problem, a substrate damage preventing transfer robot system according to an embodiment of the present invention includes a cassette having a plurality of slots (slot) capable of accommodating substrates on both side walls, and teaching to transfer to a cassette. Transfer robot loading and unloading the substrate by entering the positioning position, a plurality of displacement sensors installed in the slot of the cassette to detect the movement of the transfer robot when entering the cassette to transfer the substrate And a transfer robot controller for detecting the position of each slot of the cassette through the displacement sensors and at the same time detecting the teaching position to the cassette, and controlling the movement of the transfer robot according to the teaching position to prevent breakage of the substrate. It features.

In the substrate damage prevention robot system according to an embodiment of the present invention, the displacement sensors are the first sensor for detecting the position of the upper and lower slots and each slot of the cassette by detecting the movement of the transfer robot, and the transfer When the robot enters into the cassette, it is preferable to include a second sensor for sensing the linearity of the transfer robot.

In the substrate break prevention robot system according to an embodiment of the present invention, the first sensor is preferably installed in the upper and lower sides of the front end of the cassette, respectively.

In the substrate damage preventing transfer robot system according to an embodiment of the present invention, it is preferable that at least four first sensors are provided.

In the substrate break prevention robot system according to an embodiment of the present invention, the second sensor is preferably installed in the upper and lower sides of the rear end of the cassette both sides.

In the substrate damage preventing transfer robot system according to an embodiment of the present invention, the second sensor is preferably installed equal to the height of the first sensor.

In the substrate damage preventing robot system according to an embodiment of the present invention, it is preferable that at least four or more second sensors are provided.

In the substrate damage preventing robot system according to an embodiment of the present invention, the first sensor and the second sensor includes a light emitting unit for emitting light to the outside, and a light receiving unit for receiving the light emitted from the light emitting unit; It is preferable to detect the teaching position of the transfer robot according to the presence or absence of light received by the light receiving unit.

In the substrate damage preventing transfer robot system according to an embodiment of the present invention, the light emitting unit and the light receiving unit are respectively attached to upper and lower slots adjacent to each other in the cassette, and between the light emitting unit and the light receiving unit of the transfer robot. It is preferred that the robot arm can be inserted.

In the substrate damage preventing robot system according to an embodiment of the present invention, when the number of slots of the cassette is m, the first and second slots in front of both sides of the cassette, (m- 1) The light emitting unit and the light receiving unit may be installed in one-to-one correspondence with each of the 1 st slot and the m th slot.

In the substrate damage preventing robot system according to an embodiment of the present invention, when the number of slots of the cassette is m, the second sensor may include the first slot and the second slot at the rear ends of both sides of the cassette (m- 1) The light emitting unit and the light receiving unit may be installed in one-to-one correspondence with each of the 1 st slot and the m th slot.

According to another aspect of the present invention, there is provided a control method of a substrate damage preventing transfer robot system, including a first step of entering a robot arm of a transfer robot into a cassette, and an upper side and a lower side of the cassette. A second step of detecting the position of the upper and lower slots of the cassette and the position of each slot by detecting the movement of the robot arm by using the displacement sensors, and a third step of primarily moving the robot arm to the top of the cassette. A fourth step of detecting movement by the upper displacement sensor, a fifth step of finely adjusting the robot arm to move to the teaching position secondary to the cassette, and a sixth step of loading or unloading the substrate at the teaching position; It is characterized by.

In the control method of the substrate damage prevention transfer robot system according to an embodiment of the present invention, the second step is to move the transfer robot to the upper side of the cassette to sense the position by an upper displacement sensor, and the transfer robot Detecting the position by the lower displacement sensor, detecting the position of the upper and lower slots of the cassette through the position sensed by the upper displacement sensor and the lower displacement sensor, and the detection. It is preferable to include the step of detecting the position of each slot by the position of the upper and lower slots of the cassette.

In the control method of the substrate damage prevention robot system according to an embodiment of the present invention, in the 14th step, detecting the current teaching position of the robot arm through a displacement sensor installed in the front end from the upper displacement sensor, and It is preferable to include the step of sensing the straightness of the robot arm through a displacement sensor installed at the rear end in the upper displacement sensor.

Specific details of other embodiments are included in the detailed description and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. Like reference numerals refer to like elements throughout.

Hereinafter, with reference to the accompanying drawings will be described in detail a substrate damage prevention robot system according to a preferred embodiment of the present invention.

4 is a view showing a substrate damage preventing transfer robot system according to an embodiment of the present invention, Figures 5 to 7 are a plan view, a front view, a side view of a cassette according to an embodiment of the present invention, Figure 8 is It is a figure for demonstrating operation | movement which accommodates a board | substrate in a cassette using the transfer robot of this invention.

First, referring to FIG. 4, a substrate damage preventing transfer robot system according to an embodiment of the present invention includes a cassette 100 and a cassette 100 provided with a plurality of slots 110a on both side walls. When entering the teaching position (teaching position) to transfer to the transfer robot 200, loading or unloading (loading) the substrate 400, when entering the cassette 100 to transfer the substrate 400 Displacement by detecting the position of each slot 110a through a plurality of displacement sensors 300 installed in the slot 110a of the cassette 100 and the displacement sensors 300 to detect the movement of the robot 200. It includes a transfer robot controller 500 for controlling the movement of the robot 200.

Substrate damage prevention transfer robot system according to an embodiment of the present invention having such a configuration by using the displacement sensor 300 to measure the teaching position of the transfer robot 200 previously measured with a different reference for each instructor Integrate and accurately measure to minute values to provide accurate teaching locations.

In more detail, the displacement sensors 300 are installed at both the upper and lower sides of the cassette 100 in front of the cassette 100 to detect the movement of the transfer robot 200 as shown in FIGS. 5 to 7, respectively. The first sensor 310 and the rear end of the cassette 100 includes a second sensor 340 installed on both sides of the upper and lower sides to sense the straightness of the transfer robot 200, respectively.

The first sensor 310 basically detects the position of the slot 110-1 at the top of the cassette 100 through the displacement sensors 312 and 314 installed on the cassette 100, and the lower side of the cassette 100. The position of the slot 110-m at the bottom of the cassette 100 is sensed by the displacement sensors 316 and 318 installed in the cassette 100. Accordingly, the upper and lower sizes of the cassette 100, more precisely the position of the upper and lower slots 110-1, 110-m, and each slot 110-1, 110-2, ..., 110- (m-1), 110 Up to -m) can be detected.

In addition, the first sensors 312, 314, 316, and 318 primarily detect the position of the transfer robot 200 and move based on the detected position before moving to the transfer position of the transfer robot 200 to the transfer position to the cassette 100. It can be a standard of location.

The first sensors 312, 314, 316, and 318 may include light emitting parts 312a, 314a, 316a and 318a for emitting light to the outside, and light receiving parts 312b and 314b for receiving light emitted from the light emitting parts 312a, 314a, 316a and 318a. And 316b and 318b, it is preferable that the upper and lower slots adjacent to each other are installed perpendicular to each other as shown.

For example, when the number of slots vertically provided in the cassette 100 is m, the light emitting units 312a, 314a, 316a, 318a and the light receiving units 31b, 31b4, 316b, 318b of the first sensor 312, 314, 316, 318 are provided. The first slot 110-1 and the second slot 110-2, the (m-1) th slot 110- (m-1) and the mth slot 110-m in front of the cassette 100. The two sides are installed in one-to-one correspondence.

The first sensors 312 and 314 installed on both sides of the first slot 110-1 and the second slot 110-2 are upper portions of the cassette 100, and the first teaching of the cassette 100 in which the substrate can be stored. The location will be detected.

The first sensors 316 and 318 provided at both sides of the (m-1) th slot 110- (m-1) and the mth slot 110-m are substrates on the cassette 100 as lower portions of the cassette 100. This will detect the last teaching position that can be stored.

Accordingly, the detected positions of the upper and lower slots of the cassette 100, the number of slots 110-1, 110-2, ..., 110- (m-1), 110-m arranged in the transverse direction, and the slots 110- The teaching position of the transfer robot 200 can be detected based on the interval between 1,110-2, ..., 110- (m-1), 110-m.

The second sensors 342, 344, 346, and 348 are installed to have the same height as one-to-one with the first sensors 312, 314, 316, and 318 at the rear end of the cassette 100 to detect the straightness of the robot arm 230 of the transfer robot 200.

If the robot arm 230 of the transfer robot 200 enters the cassette 100, the linearity may be dropped according to the shaking degree of the robot arm 230, resulting in breakage of the substrate. The second sensors 342, 344, 346 and 348 According to this it is possible to prevent the breakage of the substrate due to the shaking phenomenon of the robot arm (230).

Like the first sensors 312, 314, 316, and 318, the second sensors 342, 344, 346, and 348 also emit light from outside of the light emitting units 342a, 344a, 346a, and 348a and light emitted from the light emitting units 342a, 344a, 346a and 348a. It consists of light-receiving parts 342b, 344b, 346b, and 348b which receive light, and are respectively installed perpendicularly to each other in upper and lower slots adjacent to each other. That is, they are installed at the same height as the first sensors 312, 314, 316, and 318.

At this time, the upper and lower positions of the light emitting parts 342a, 344a, 346a and 348a and the light receiving parts 342b, 344b, 346b and 348b are related to whether the light emitting parts 342a, 344a, 346a and 348a are located above or below. The light emitting units 342a, 344a, 346a, 348a and the light receiving units 342b, 344b, 346b, 348b may be located anywhere without maintaining a vertical relationship. The same is true of the first sensors 312, 314, 316 and 318 described above.

For example, when the number of slots provided in the cassette 100 in the transverse direction is m, the light emitting parts 342a, 344a, 346a, 348a and the light receiving parts 342b, 344b, 346b and 348b constituting the second sensors 342, 344, 346 and 348. ) Is the first slot (100-1) and the second slot (110-2), (m-1) th slot (110- (m-1)) and m-th slot (110-m) at the rear end of the cassette 100 ) It is installed on both sides in one-to-one correspondence.

Thus, each of the first sensors 312, 314, 316, 318 and the second sensors 342, 344, 346, 348 have at least four or more displacement sensors as shown.

Referring to FIG. 7, each of the first and second sensors 310 and 340 disposed on the upper side and the lower side is equal to the interval between the upper and lower slots in which the interval P between the light emitting unit and the light receiving unit is adjacent to each other, and is expressed in decimal units. It can be detected accurately.

Each of the first and second sensors 310 and 340 positioned on the upper side and the lower side is spaced apart by a distance enough to detect the left and right widths of the substrate in a pair of left and right as shown in FIGS. 5 and 6. It is preferable to install.

The transfer robot 200 is composed of a support portion 210, a rotation part 220 and two robot arms 230, the robot arm 230 is connected to the rotation part 220. The transfer robot 200 can adjust the height to accommodate or take out the substrate 400 in the slot (100a) of the desired position.

The transfer robot controller 500 stores the optimum position in advance while performing the transfer test of the transfer robot 200 at the initial setting of the transfer robot 200, checks the operation state of the transfer robot 200 and the information of the substrate (), and then controls the upper level control system. To report to.

That is, the displacement sensors 312 and 314 provided on the upper side of the cassette 100 detect the positions of the upper slits 110-1 and 110-2 of the cassette 100, and the displacement sensors provided on the lower side of the cassette 100 ( The positions of the upper and lower slots of the cassette 100 are detected by detecting the positions of the lower slits 110-(m-1, 110-m) of the cassette 100 through the 316 and 318, and the slots 110-1, 110-2, Based on the number of floors of ..., 110- (m-1), 110-m and the spacing between slots 110-1,110-2, ..., 110- (m-1), 110-m, The positions of 110-1,110-2, ..., 110- (m-1) and 110-m are detected and stored in advance, and accurate teaching during the transfer of the transfer robot 200 based on the stored data. To provide.

Therefore, the substrate damage preventing transfer robot system according to an embodiment of the present invention made as described above is made of a transfer operation as shown in FIG.

8 (a) is a view showing an operation of detecting the movement of the transfer robot by moving the transfer robot to the upper side of the cassette, Figure 8 (b) is a teaching position after detecting the movement in (a) 2 is a diagram illustrating an operation of entering into a cassette by moving to.

When loading the substrate as shown in (a) of FIG. 8, the robot arm 230 is first moved to the upper side of the cassette 100 to move the robot robot through displacement sensors 312 and 314 provided at an upper front end thereof. Detecting that the current position of the 200 is the position of the first slot 110-1, the robot arm 230 enters the cassette 100 and enters the robot arm 230 through the displacement sensors 342 and 344 provided at the upper rear end. Detects straightness.

Subsequently, as shown in (b) of FIG. 8, secondly, after moving to the corresponding teaching position based on the position of the first slot 110-1, the slot 100 is moved forward into the cassette 100. The substrate is loaded at -2, ..., 110- (m-1), 110-m).

On the contrary, when unloading the substrate, as in the case of loading, the robot arm 230 is first moved upward to detect the reference position of the transfer robot 200 through the displacement sensors 312 and 314 provided at the upper front end. In addition, the robot arm 230 enters the cassette 100 to detect whether the robot arm 230 goes straight through the displacement sensors 342 and 344 provided at the upper rear end.

Subsequently, the robot arm 230 is finely adjusted to the position detected by the displacement sensors 312 and 314 provided at the upper front end, that is, the position of the slot to be unloaded from the position of the first slot 110-1, and correspondingly. The substrate is moved to the teaching position of the slot and then advanced into the cassette 100 to unload the substrate.

As described above, the transfer operation using the substrate damage prevention transfer robot system according to an embodiment of the present invention, primarily moves the robot arm 230 to the position of the uppermost slot, and then secondly the displacement sensor of the upper side The robot arm 230 is moved to the correct teaching position by finely adjusting the position sensed by the 312 and 314 as the reference position to the position of the slot to be transferred therefrom.

An operation follow for this will be described in detail later.

According to the above, when loading or unloading the substrate 400, by setting the teaching position with reference to the value detected by the displacement sensor 300 at the position of the cassette 100 actually placed, It is possible to prevent the possibility that the substrate 400 is damaged by warpage, shaking of the robot arm 230, mistakes of the instructor, or other criteria for each instructor.

Hereinafter, a method of controlling the transfer robot system according to an embodiment of the present invention will be described in detail.

9 is an overall flowchart illustrating a control method of a robot robot system according to an embodiment of the present invention, Figures 10 and 11 are detailed flowcharts of FIG.

As shown in the control method of the transfer robot system according to an embodiment of the present invention, as the first step S1, by operating the transfer robot 200 to enter the robot arm 230 into the cassette 100.

Next, in step S2, the position of the slot is detected through the first sensors 312, 314, 316, and 318 provided on the upper and lower sides of the displacement sensors 300 of the cassette 100.

In this step, as shown in FIG. 10, the first arm 110-1 of the cassette 100 is moved by moving the robot arm 2330 upward so as to be sensed by a displacement sensor provided at the upper side, that is, the first sensors 312 and 314. ) And detect the position of the last slot (110-m) of the cassette 100 through the first sensor (316,318) provided on the lower side in the same manner (S21, S22).

Thereafter, the positions of the upper and lower slots of the cassette 100 are detected at the same time based on the positions detected from the upper first sensors 312 and 314 and the lower first sensors 316 and 318. (S23, S24). The position of each slot can be easily detected only by knowing the number of slots and the interval between slots in which the layered layer is formed in the cassette 100.

Thereafter, the detected data information is stored in the transfer robot controller 500 and returned (S25).

Next, in step S3, when the substrate 400 is to be transferred, the robot arm 230 is operated to primarily move to the reference position. At this time, the reference position is preferably the first slot 110-1 previously stored in the previous step S2, more specifically, the first teaching position that can accommodate the substrate.

Next, in step S4, by again detecting the movement of the robot arm 230 moved to the upper side through the upper first sensor, thereby accurately teaching (teaching) the position of the robot arm 230.

In other words, as shown in FIG. 11, the current position of the robot arm 230 is detected through the first sensors 312 and 314 provided at the front end, and the detected position is the same as the first teaching position where the substrate can be accommodated. The robot arm 230 is a reference position to move to the teaching position when moving (S41).

Thereafter, the robot arm 230 enters the cassette 100 to detect whether the robot arm 230 goes straight through the second sensors 342 and 344 provided at the rear end (S42). If the deflection occurs due to the shaking of the robot arm 230 or the weight of the substrate, the robot arm 230 may not be detected by the second sensors 342 and 344 at the rear end thereof.

If it is detected through the second sensors 342 and 344 at the rear end, the linearity is maintained and returned in the cassette 100.

Next, in operation S5, the robot arm 230 is secondarily moved to the corresponding teaching position by performing a fine adjustment based on the position sensed by the first sensors 312 and 314.

Next, in step S6, the substrate is prevented from being broken by loading or unloading the substrate into the moved slot.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, You will understand.

Therefore, it should be understood that the above-described embodiments are provided so that those skilled in the art can fully understand the scope of the present invention. Therefore, it should be understood that the embodiments are to be considered in all respects as illustrative and not restrictive, The invention is only defined by the scope of the claims.

According to a preferred embodiment of the present invention made as described above, when loading or unloading a substrate, the warping phenomenon of the substrate or the robot arm by checking the teaching position to be transferred by fine adjustment based on the position of the first slot of the cassette The substrate can be transferred stably regardless of the shaking phenomenon.

In addition, by using a displacement sensor in the teaching position of the transfer robot, which has been set with different standards for each instructor in the related art, it is possible to provide a precise teaching position by unifying the reference and accurately measuring the minute value.

In addition, when a breakage of the substrate occurs, it is possible to quickly cope with the cause can be quickly identified, thereby reducing the time required for work.

Claims (14)

A cassette having a plurality of slots for storing a substrate on both side walls; A transfer robot that enters a teaching position to transfer to the cassette and loads or unloads the substrate; A plurality of displacement sensors installed in slots of the cassette to detect movement of the transfer robot when entering the cassette to transfer the substrate; And The transfer robot controller detects the slot position of the cassette through the displacement sensors and at the same time detects the teaching position to the cassette, and then controls the movement of the transfer robot according to the teaching position to prevent breakage of the substrate. Including, The displacement sensors A first sensor which detects a movement of the transfer robot and detects positions of upper and lower slots and positions of each slot of the cassette, and And a second sensor for detecting the linearity of the transfer robot when the transfer robot enters into the cassette. delete The method of claim 1, The first sensor is a substrate break prevention robot system, characterized in that the upper and lower sides are respectively installed in the front end of the cassette. The method of claim 3, Substrate damage prevention robot system, characterized in that provided with at least four first sensor. The method of claim 1, The second sensor Substrate damage prevention transfer robot system, characterized in that installed in the upper and lower sides at the rear end of the cassette both sides, respectively. The method of claim 5, The second sensor Substrate break prevention robot system, characterized in that installed equal to the height of the first sensor. The method of claim 5, Substrate break prevention robot system, characterized in that provided with at least four second sensor. The method of claim 1, The first sensor and the second sensor A light emitting unit that emits light to the outside; Including a light receiving unit for receiving the light emitted from the light emitting unit, Substrate break prevention robot system, characterized in that for detecting the teaching position of the transfer robot according to the presence or absence of light received by the light receiving unit. 9. The method of claim 8, The light emitting portion and the light receiving portion And a robot arm of the transfer robot is inserted between the upper and lower slots adjacent to each other in the cassette, so that the robot arm of the transfer robot can be inserted between the light emitting unit and the light receiving unit. 9. The method of claim 8, The first sensor If the number of slots of the cassette is m, the light emitting unit and the light receiving unit are installed in a one-to-one correspondence with the first slot and the second slot, and the (m-1) th slot and the mth slot in front of both sides of the cassette. Substrate damage prevention transfer robot system, characterized in that. 9. The method of claim 8, The second sensor When the number of slots of the cassette is m, the light emitting portion and the light receiving portion correspond to the first and second slots, and the (m-1) th and mth slots, respectively, at the rear ends of the cassette. Substrate damage prevention transfer robot system, characterized in that. A first step of introducing the robot arm of the transfer robot into the cassette; Detecting a position of the upper and lower slots of the cassette and the position of each slot by detecting the movement of the robot arm by displacement sensors provided at upper and lower sides of the cassette; A third step of primarily moving the robot arm to the top of the cassette; Detecting a movement of the robot arm by an upper displacement sensor; A fifth step of finely adjusting the robot arm to secondly move to the teaching position to the cassette; And And a sixth step of loading or unloading the substrate in the teaching position. The method of claim 12, The second step Moving the transfer robot to an upper side of the cassette to sense a position by an upper displacement sensor; Moving the transfer robot to the lower side of the cassette to sense a position by a lower displacement sensor; Detecting the position of the upper and lower slots of the cassette through the position sensed by the upper displacement sensor and the lower displacement sensor; and And detecting the position of each slot by the position of the upper and lower slots of the detected cassette. The method of claim 12, The fourth step is Detecting a current teaching position of the robot arm through a displacement sensor installed at a front end of the upper displacement sensor; And controlling the straightness of the robot arm through a displacement sensor installed at a rear end of the upper displacement sensor.

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