KR101039069B1 - Plasma processing unit for air cleaning and and sterilizing - Google Patents

Abstract

PURPOSE: A plasma processing apparatus for air cleaning and sterilization is provided to ionize oxygen in the air into plasma, thereby purifying the air without generating harmful secondary products. CONSTITUTION: A plasma processing apparatus for air cleaning and sterilization comprises a case(10) in which a cover(30) is installed and a slit-type gap(32) is formed in a part of the cover to restrict the generation of static pressure, a plasma generator(20) comprising a first electrode and a second electrode which is formed in a cylindrical net type and applied with power through a power supply bar fixed to the case, an inclined guide, and a catalyst.

Description

Plasma processor for air cleaning and sterilization {PLASMA PROCESSING UNIT FOR AIR CLEANING AND AND STERILIZING}

The present invention relates to an air cleaning and sterilizing plasma processor, and more particularly, to generate a uniform and highly efficient plasma while suppressing ozone generation using a dielectric and a reticulated electrode, and to effectively purify and remove harmful gases by using the same. An improved air cleaner and sterilizing plasma processor is disclosed.

In general, a plasma is a locally ionized gas in which electricity flows, and is composed of ions, electrons, neutral particles, and radicals, and refers to a fourth material state having properties different from gases, liquids, and solids.

Such a plasma can be obtained by applying a high temperature or an electric field, and is extremely chemically or physically responsive.

Because of the characteristics of the plasma has been useful in the field of cleaning, surface modification, etc. mainly to change the surface energy of various materials such as metals, polymers, nylon and the like to increase the bonding strength.

Recently, a number of patents have been developed in various forms, including the air purification field, for example, home use, commercial use, and industrial large-scale facilities through a number of patents, including Published Patent No. 2005-0050300. have.

In particular, harmful gases generated during the manufacturing process of semiconductors, LCDs, OLEDs, etc. are consumed a lot of costs for their treatment, but the treatment efficiency is not high compared to the investment cost. It is true.

For example, it causes environmental pollution, in particular global warming, which is derived from perfluorinated compound (PFC) -based process gases used in etching or deposition processes in semiconductor manufacturing processes. This is a known situation. In addition, closures due to various harmful gases including VOC are well known.

To prevent this, manufacturing facilities such as semiconductors, LCDs, OLEDs, etc. are equipped with a cleaning or chemical liquid facility (Gas or Wet Scrubber) to purify various toxic gases, acid gases, flammable gases, and exhaust process gases generated during the manufacturing process. It is usually treated by combustion cracking, catalytic cracking and plasma cracking.

In this case, the combustion cracking method is a method of burning and harming harmful gases generated during the process, which is excellent in terms of safety and processing efficiency, but a separate facility for treating the secondary products such as NOx, SOx, and wastewater is generated during the combustion process. Has the disadvantage that it is necessary; Catalytic decomposition is a method of passing perfluorinated compound gas through water and then introducing it into a tube filled with a catalyst heated to 300 to 800 ° C to decompose by a catalyst in an air and water environment. Complete treatment of gas or wastewater is difficult, and the development of catalysts for each harmful gas characteristic has to be preceded, the treatment of unknown mixed gas is impossible, and the catalysts must be replaced periodically; In the plasma decomposition method, the perfluorinated compound gas is processed by changing the harmful gas into a material that can easily process the harmful gas by using a high temperature and a low temperature plasma, and a large unit is required, and as the size of the plasma reactor increases according to the processing capacity of the plasma, Significantly reduced density and energy has the disadvantage that the treatment efficiency is significantly reduced.

In particular, ozone generated in the case of plasma treatment provides strong sterilization power, but if it exceeds a certain amount, indoor air purification causes fatal harm to the human body. Therefore, great care is required, and it is not easy to control because it is regulated by environmental laws. There is also.

In addition, the introduction of such a plasma treatment method can not be applied directly to the existing air conditioning system, etc., because it requires a separate structural improvement for installation, there is also a disadvantage that the initial equipment cost increases.

The present invention completely solves the above-mentioned problems in the prior art, in particular, a structural problem that is difficult to use gas purification DBD (Dielectric Barrier Discharge) discharge as a versatile air purification plasma module, as disclosed in Patent Publication No. 2005-0050300. Low cost and high efficiency treatment is possible, it is possible to suppress ozone and generate uniform plasma while harmless to human body, and clean up 20 kinds of harmful gases easily and safely with oxygen anion and completely remove odor. Its main purpose is to provide an air cleaning and sterilizing plasma processor that can be easily and easily installed without injuring the structure of an existing air conditioning system by being easy to integrate into an existing air conditioning system.

The present invention provides a means for achieving the above object, and a case having an inlet for introducing a flow fluid and a discharge port for purifying the discharged fluid after purification; A cylindrical glass tube vertically fixed to one side wall of the case and having a closed end and an open other end to be installed perpendicularly to a flow direction of an inflowing flow fluid, and used as a dielectric material; a cylindrical member inserted into the glass tube 1 electrode, an end cap for sealing the open end of the glass tube, a connecting rod fixed to the end cap and extending into the glass tube, in the case of DC + power is applied, fixed to the end of the connecting rod and of the first electrode A cylindrical plasma generator comprising a connection terminal arranged in a truncated conical shape in elastic contact with an inner circumferential surface, and fixed to an outer circumferential surface of the glass tube, and including a second electrode to which power is applied; An inclined guide protruding obliquely on a case which is a position directly below the plasma generator so as to upwardly flow the fluid introduced through the inlet to the shaded portion of the plasma generator; Plasma processor for air cleaning and sterilization which is installed on the bottom surface of the discharge port side of the case and consists of a catalyst body that decomposes ozone, and purifies the fluid flowing by using streamer plasma generated during corona discharge between two charged electrodes. To; A cover is provided to cover the front surface of the case, and a slit-shaped gap is formed in a part of the upper and lower width directions so as to suppress the generation of static pressure therein; The discharge port is covered with an aluminum material or covered with a chromium-plated material in the injected plastic, the edge surface is formed to be inclined upward along the edge of the discharge port; The second electrode is formed into a network welded along a welding line after drying in a cylindrical shape, and the -power applied to the second electrode is made through a power supply bar fixed to a case, and the power supply bar is formed of the second electrode. It is elastically disposed on the welding line, the joint portion of the first electrode and the welding line of the second electrode is provided with an air cleaning and sterilizing plasma processor, characterized in that disposed at 180 degrees to each other.

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According to the present invention, the air purification function can be excellently effected without making harmful secondary products by ionizing oxygen existing in the air without using any chemicals and ionizing it to have a high dissociation energy in a plasma form. have.

In addition, since the structure is simple and easy to install, the initial investment is inexpensive, and the cylindrical shape can maximize the processing capacity for the size, and can be widely applied over both high concentration and low concentration, so that an excellent deodorizing efficiency can be obtained.

In addition, it is easy to carry and convenience for use is increased.

1 is an exemplary view showing a case and a plasma generator of a plasma processor according to the present invention.
2 is an exemplary plan view of a plasma processor in accordance with the present invention.
3 is an exemplary exploded perspective view of a plasma generator constituting a plasma processor according to the present invention.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment according to the present invention.

As shown in Figures 1 to 3, the present invention includes a case (10).

In this case, the case 10 is preferably anodized to improve the efficiency.

In addition, the inside of the case 10 is an unstable inorganic oxygen peroxide (O- ² ₂ ) that is a streamer plasma generated by corona discharge of the plasma generator 20 and radical peroxide organically generated by the influence thereof. Or a flow path for exiting after being purified by O ^- ₂ .

That is, the discharge port 12 is formed in the lower front end of the case 10, the inlet 14 is formed in the upper portion.

Here, the discharge port 12 is particularly preferably zoomed to suppress the generation of VOC by removing the reactivity by using a material that is covered with aluminum or plated with plastic chromium plating.

In particular, the discharge port 12 should be formed to be inclined upwardly along the edge of the discharge port 12 as shown in the enlarged example, in order to evenly disperse the discharged air as far as possible to evenly distributed to a long distance Also, to minimize interference with surrounding objects.

In addition, the cover 30 is provided on the upper side of the discharge port 12, the slit-shaped gap 32 is formed in a portion of the upper and lower width of the cover 30. This gap 32 is to smooth the flow by preventing the static pressure is applied when the air flows in the interior.

In addition, a plasma generator 20 is mounted in the case 10, which is a space between the discharge port 12 and the inlet 14.

Therefore, the fluid on the duct (D) introduced through the inlet 14 is introduced into the inlet 14 and then passed through the plasma generator 20 to be discharged through the outlet 12 after the harmful components are decomposed and purified. .

At this time, the plasma generator 20 is arranged in a direction orthogonal to the fluid flowing through the side wall of the case 10, the inclined guide (G) is formed on the case 10 directly below the plasma generator (20).

The inclined guide (G) is provided in order to prevent the discharged immediately after reacting only with the side facing the plasma generator 20 of the cylindrical shape when the flowing fluid flows by blowing pressure, the inclined guide (G) It is to create a rising flow of the fluid through) to ensure that the fluid flow sufficiently reacts with the opposing surrounding air that does not face the plasma generator (20).

To this end, the inclined guide (G) needs to have a certain inclination angle, preferably 30 to 50 °, and most preferably formed of 45 °.

In addition, the catalyst body 16 is installed toward the discharge port 12 at intervals from the inclined guide G.

The catalyst body 16 promotes the decomposition of ozone to suppress the ozone generated during plasma generation to the outside of the case 10 as much as possible.

In this case, the catalyst body 16 has a form in which manganese dioxide is charged in the housing.

Since manganese dioxide not only has a catalytic action but is a kind of oxidant, the oxidizing power oxidizes organic matter when there is an organic material, and itself is reduced to manganese oxide and then oxidized to manganese dioxide by ozone. Ozone decomposition treatment using is very effective.

Of course, platinum powder may be used as the catalyst charged in the catalyst body 16 in addition to manganese dioxide.

Herein, the substrate of manganese dioxide is usually made of any one of aluminum material, ceramic material, titanium material, and paper material, and is manufactured in a triangular, quadrangular, circular, or honeycomb (honeycomb) shape so that the static pressure is as low as possible. It is preferred to be configured to hook.

At this time, the substrate is limited to such a material because it is usually in the form of sprinkling manganese powder when the coating of manganese dioxide, the adhesive strength of other materials are inferior.

In addition, an installation hole 18 may be formed on one side wall of the case 10 to fix the plasma generator 20, and to apply -power to the plasma generator 20 around the installation hole 18. Power supply bar (B) is installed.

At this time, the + power supply is connected to one end of the plasma generator 20, that is, the center of the end cap 300 (see FIG. 4) to be described later penetrating the installation hole 18.

In particular, the power supply bar (B) is to be placed in contact with the welding line 410 of the second electrode 400 (see Fig. 4) provided on the outer peripheral surface of the plasma generator 20 to increase the corona discharge efficiency. This is more preferable.

This is to increase the dischargeability by using the phenomenon that charges toward the spire, artificially formed a plurality of the welding line 410, if necessary, and a plurality of the power supply bar (B) in a cylindrical shape to correspond It may be modified to achieve high efficiency.

Meanwhile, as shown in FIG. 4, the plasma generator 20 includes a glass tube 100 that acts as a dielectric to increase capacitance.

Here, the dielectric (Dielectric Substance) refers to one of the insulating material to increase the relative capacity as the electric field is reduced by the electric polarization (polarization) when applying the electric field.

In the present invention, using the glass tube 100 as a dielectric, while maintaining the best flow of the current while increasing the capacitance and increase the work-factor (work-factor) the avalanche (avalanch effect) to penetrate the barrier of the glass tube 100 Can be maximized.

In particular, all parts mounted inside the glass tube 100 including the glass tube 100 should be completely removed from grease, and should be used in a sufficiently washed state with a detergent (surfactant) for this purpose. This is to prevent the problem of discoloration due to oxidation during discharge, resulting in shortening of lifespan and reduction of efficiency.

In addition, the glass tube 100 is preferably one end is closed, the other end is formed in an open cylindrical shape.

In addition, the first electrode 200 having a circular sheet form is embedded in the glass tube 100.

The first electrode 200 is a plate-shaped conductor, and after the conductor is dried, the boundary line is jointed to form a cylindrical shape, and a plurality of holes 210 are formed.

In this case, the hole 210 is responsible for maximizing corona discharge to promote streamer plasma generation.

In other words, the charge area is increased while the charge is partially concentrated to increase the electron generation efficiency, so that the corona discharge is increased but the arc discharge is suppressed, and the streamer plasma can be induced smoothly.

In addition, in order to promote streamer plasma generation together with the hole 210, the first electrode 200 is more preferably formed of an aluminum material as a conductor.

In particular, aluminum is selected because it is easy to process into a cylindrical shape and its price is low.

In addition, the connection terminal 220 is connected to the inner circumferential surface of the first electrode 200.

The connection terminal 220 has a substantially truncated conical shape and is disposed in a stable elastic contact with the inner circumferential surface of the first electrode 200 to enable a smooth electricity supply.

In addition, the connection terminal 220 is fixed to the connection rod 230 by a fixing bolt 240.

At this time, the connection rod 230 is a rod-shaped conductor, made of aluminum material.

In addition, the open end of the glass tube 100 is sealed by an end cap 300, the end of the connection rod 230 is a connection bolt (not shown) in the center of the end cap 300 Bolt is fixed, and + power is applied to the connecting bolt.

Herein, the + and-power sources described are merely examples of DC cases, and the applied voltage does not necessarily need to be DC.

In addition, the end cap 300 is preferably formed of a silicon material without acid (acid), it is more preferable to have a non-flammable / flame retardant to ensure safety during corona discharge.

In addition, when the glass tube 100 is closed by the end cap 300, when argon (Ar) gas is filled in the inside, a stable streamer plasma may be generated more efficiently.

Also in this case, the fluid filled in the glass tube 100 is preferably an inert gas, and argon is particularly preferable among them, and may be filled with air.

In addition, it is particularly preferable that the fixing bolt 240 and the connection bolt 250 described above are all made of stainless steel to prevent the occurrence of rust so that a defect does not occur during power supply.

Finally, the second electrode 400 is provided on the outer circumferential surface of the glass tube 100.

The second electrode 400 is a mesh electrode having a mesh shape, and is preferably formed of stainless steel.

In this case, the second electrode 400 is welded along the welding line 410 to form a cylindrical shape. In particular, when power is applied to the welding line 410, the electron activity is concentrated and the electron generation is increased, thereby increasing the processing efficiency. This has the feature of being improved.

Here, in order to increase the efficiency of avalanche generation, it is particularly preferable that the joint part of the first electrode 200 and the welding line 410 of the second electrode 400 are arranged at 180 ° to each other.

The plasma processor of the present invention having such a configuration has the following operational relationship.

That is, the fluid flowing through the inlet 14 is purified by the streamer plasma generated by the corona discharge and the inorganic oxygen peroxide, which is the radical peroxide that is then induced.

At this time, + power is applied to the first electrode 200, the voltage stepped up to approximately 3000V through the transformer is intermittently applied, and-power is connected to the second electrode 400 having a network structure.

Then, the first electrode 200 and the second electrode 400 are charged with each other with the glass tube 100 as a dielectric interposed therebetween.

In this state, the energy injected by the high voltage forms an avalanche inside the glass tube 100, which is a barrier, such as a semiconductor phenomenon, and the generated electrons penetrate the glass tube 100 barrier due to the heat energy of the electrons, and the glass tube 100. ) Is radiated toward the second electrode 400 outside.

At this time, the streamer plasma is formed while the corona discharge occurs.

In other words, the electrons of the generated avalanche are discharged to attract oxygen molecules in the surroundings, and the generated electrons have energy that the oxygen molecules can easily absorb.

Thus, the oxygen molecule is converted into an unstable inorganic oxygen peroxide (O- ² ₂ ) or O ^- ₂ , which is a radical peroxide obtained by obtaining two electrons generated.

Since the inorganic oxygen peroxide is formed radially around the glass tube 100, a large amount is instantaneously generated over a large area.

They inhibit ozone generation and neutralize and destroy cell membranes such as pathogens, viruses, and bacteria through radical action, decompose volatile organic compounds (VOCs), and change substances such as methane into water and carbon dioxide. In this case it will decompose into water and traces of sulfuric acid.

In particular, it has an excellent effect on the removal of odors, it is possible to completely remove by disintegrating and extinguished rather than collecting more than 20 known odors.

As a result, the plasma processor according to the present invention will lead to the indoor and outdoor air quality purification, improvement, as well as to reduce the facility investment cost in the air conditioning design accordingly.

In addition, the plasma processor according to the present invention is very environmentally friendly because it decomposes and removes odors and harmful substances by only ionizing oxygen present in the air without using any chemicals, and kills bacteria, pathogens and bacteria. .

In addition, the fluid flowing through the inclined guide (G) flows in the form of a sweep (swip) to the rear of the cylindrical glass tube 100, the processing efficiency is rapidly increased.

Furthermore, when the purified fluid is discharged through the discharge port 12, since the ozone is almost completely discharged by the manganese dioxide which is the catalyst body 16, the ozone is completely removed from the discharge fluid. No harm to the human body. In other words, even when ozone is discharged, the amount is very small, and thus, even if accumulated for a long time, it does not reach a degree that is harmful to the human body.

Conventionally, since only the ozone level contained in the discharged fluid is regulated, since there is a time when ozone is decomposed when it is in a closed space for a long time, it frequently accumulates and causes considerable harm to the human body. It can be solved.

[Experimental Example]

For the performance test of the plasma processor according to the present invention, the present invention is installed at the Pyeongtaek Jangdang Sewage Treatment Plant at the request of the Pyeongtaek-si and the Environmental Facilities Management Corporation, and the tests approved by the Industrial Pollution Research Institute designated by the Environmental Facilities Management Corporation. The operation was carried out as in [Example 1], and the result was confirmed.

In particular, the experimental results confirmed that all materials containing hydrocarbons can be decomposed into water and carbon dioxide through the plasma generator according to the present invention.

For example, the types of gases to be decomposed and their decomposition forms are briefly listed as follows.

(1) Hydrogen Sulfide: 2H ₂ S → 2H ₂ O + 2SO ₄

(2) Ammonia: 4NH ₃ → 2N ₂ + 6H ₂ O

(3) Formaldehyde: CH ₂ O → H ₂ O + CO ₂

(4) Methyl tertiary butyl ether (MTBE): C ₅ H ₁₂ O → 5CO ₂ + 6H ₂ O

(5) Benzene: C ₆ H ₆ → CO ₂ + 3H ₂ O

(6) Toluene: C ₆ H ₅ CH ₃ (C ₇ H ₈ ) → 7CO ₂ + 4H ₂ O

(7) Ethylbenzene: C ₂ H ₅ C ₆ H ₅ → 8CO ₂ + 5H ₂ O

(8) Xylenes: C ₆ H ₄ (CH ₃ ) ₂ → 8CO ₂ + 5H ₂ O

(9) Isopropylbenzene (Cumene): C ₆ H ₅ C ₃ H ₇ → 9CO ₂ + 6H ₂ O

(10) Naphthalene: C ₁₀ H ₈ → 10CO ₂ + 4H ₂ O

(11) Fluorene: C ₁₃ H ₁₀ → ₁₃ CO ₂ + 5H ₂ O

(12) Phenanthrene: C ₁₄ H ₁₀ → ₁₄ CO ₂ + 5H ₂ O

Hexane: C ₆ H ₁₄ → 6CO ₂ + 7H ₂ O

Terpineol: C ₁₀ H ₁₈ O → ₁₀ CO ₂ + 9H ₂ O

In addition, it is possible to decompose all VOC containing Hydro Carbon, that is, H _X C _Y.

[Example 1]

As described in the reference, the plasma processor (in the experimental example, denoted as SONA) according to the present invention was verified, and it was confirmed that there was a significant effect.

In addition, if you attach the test report which measured before and after installation at the same place, it is as follows.

[Before installation]

[after installing]

As another example, the results were applied to "Yeoncheon Food Waste Recycling Facility (Management: Continental Machinery)" located at 253 Ganparis, Jeongok-gun, Yeoncheon-gun, Gyeonggi-do.

[Example 2]

As described above, the plasma processor according to the present invention is expected to be very useful for purifying indoor and outdoor air quality.

10 case 12 discharge port
14 inlet port 16 catalyst body
18: installation hole 20: plasma generator
100: glass tube 200: first electrode
210: hole 220: connection terminal
230: connection rod 240: fixing bolt
300: end cap 400: second electrode
410: welding line B: power supply bar
G: Incline Guide

Claims (5)

A case 10 having an inlet 14 for introducing a flow fluid and a discharge port 12 for purifying and discharging the introduced fluid; A cylindrical glass tube 100 and fixed to one side wall of the case 10 and having one end closed and the other end opened so as to be installed perpendicularly to the flow direction of the flow fluid flowing therein, the glass tube 100 being used as a dielectric material. 100 is inserted into the cylindrical first electrode 200, the end cap 300 for sealing the open end of the glass tube 100, is fixed to the end cap 300 and extends into the glass tube 100 In the case of DC, a connection rod 230 to which + power is applied, a connection terminal 220 fixed to an end of the connection rod 230 and disposed in a truncated cone shape in elastic contact with an inner circumferential surface of the first electrode 200, A cylindrical plasma generator 20 fixed to an outer circumferential surface of the glass tube 100 and including a second electrode 400 to which power is applied; An inclined guide G protruding obliquely on the case 10 which is a position directly below the plasma generator 20 so as to flow the fluid introduced through the inlet 14 up to the shaded portion of the plasma generator 20; ; It is composed of a catalyst body 16 which is installed on the bottom surface of the discharge port 12 side of the case 10 and decomposes ozone, and flows using streamer plasma generated during corona discharge occurring between two charged electrodes. In the air purifier and sterilization plasma processor for purifying;
The case 10 is provided with a cover 30 to cover the front surface, the upper and lower width portion of the cover 30 is formed with a slit-shaped gap 32 is configured to suppress the generation of static pressure inside;
The discharge port 12 is covered with an aluminum material or covered with a chromium-plated material in the injected plastic, the edge surface is formed to be inclined upward along the edge of the discharge port 12;
The second electrode 400 is formed into a network welded along the welding line 410 after drying in a cylindrical shape, and the -power applied to the second electrode 400 is a power supply bar fixed to the case 10 (B). The power supply bar (B) is arranged to be in elastic contact with the welding line 410 of the second electrode 400, rolled in a cylindrical shape to form the first electrode 200 to weld both ends. The joint part, which is a welding line, and the welding line 410 of the second electrode 400 are disposed at 180 ° to each other. delete delete delete delete

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