KR100892757B1 - Apparatus and method for treating substrates - Google Patents

Abstract

An apparatus and a method for treating substrates are provided to form the air current blocking fume regardless of the rotational direction of the rotation rod by changing the spiral direction of the wing portions of the brush cleaner part. A cleaning chamber(110) provides the process space for performing the substrate washing process. A plurality of shafts(120), the first spin transmitter(130), a plurality of rotation drivers(160), a belt(170), the second spin transmitter(180), and a brush cleaner part(190) are arranged in the process space. Each shaft comprises a rotation roller(121a) and a plurality of support rollers(121b). The first spin transmitter comprises a plurality of first magnets(131). The first spin transmitter is rotated by the torque delivered from the second spin transmitter. A rotary motor(150) is located adjacent to the rotation driver. The rotary motor provides the torque to the rotation drivers. The rotation driver which is adjacent to the rotary motor is connected to the belt. The second spin transmitter comprises a plurality of second magnets(181).

Description

Substrate processing apparatus and method {APPARATUS AND METHOD FOR TREATING SUBSTRATES}

TECHNICAL FIELD The present invention relates to an apparatus for processing a substrate, and more particularly, to a substrate processing apparatus and a method for cleaning a substrate or the like used for manufacturing a wafer or a flat panel display element.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. Such an information processing apparatus has a display panel which displays predetermined information. Until now, a cathode ray tube monitor has been mainly used as a display panel. However, in recent years, the use of flat panel displays such as liquid crystal displays (LCDs), which are light and occupy small spaces, is rapidly increasing with the rapid development of technology.

Such a flat panel display panel is subjected to various cleaning processes in its manufacturing process. The cleaning process is a process for removing contaminants such as particles and the like deposited on the substrate, and is performed to minimize the loss of circuit elements such as thin film transistors and the like to improve the yield.

In general, since the cleaning process injects the chemical liquid onto the substrate to clean the substrate, a large amount of fume is generated in the process. Since the fume diffuses in the chamber in which the cleaning process is performed, the fume is adsorbed onto the cleaned substrate and causes staining of the substrate.

An object of the present invention is to provide a substrate processing apparatus capable of improving the cleaning efficiency of a substrate.

It is also an object of the present invention to provide a method of treating a substrate using the substrate processing apparatus described above.

A substrate processing apparatus according to one feature for realizing the above object of the present invention comprises a transfer member and a brush cleaning unit.

The transfer member has a substrate mounted thereon, and transfers the substrate. The brush cleaning unit is provided on the transfer member to face the substrate, and forms a air flow through rotation to clean the substrate. Specifically, the brush cleaning unit has a rod shape extending in one direction, provided on a rotating rod rotating about a central axis, and an outer circumferential surface of the rotating rod, and forming the air flow by the rotational force of the rotating rod. And a plurality of airflow forming portions which constantly form the airflow regardless of the rotational direction of the rotary rod.

The air flow forming portion includes a body portion and a plurality of wings. The body portion has a ring shape, surrounds the rotating rod, and rotates with the rotating rod. The wing parts are disposed on the outer circumferential surface of the body part, and the position thereof is adjusted corresponding to the rotation direction of the rotation rod, and forms the airflow through the rotation of the rotation rod.

Further, the substrate processing method according to one feature for realizing the above object of the present invention is as follows. First, the substrate is placed on the transfer member and moved horizontally. A brush cleaning unit having a plurality of wings forming an air stream is disposed on the substrate. The air is formed through the rotation of the brush cleaner to clean the substrate. Here, the direction of the air flow is adjusted by adjusting the positions of the plurality of wings according to the rotation direction of the brush cleaning unit.

According to the present invention described above, the substrate processing apparatus can change the spiral direction of the wings of the brush cleaning portion, it is possible to form an air flow blocking the fume irrespective of the rotation direction of the rotary rod. Accordingly, the substrate processing apparatus can improve the cleaning efficiency of the substrate and the yield of the product.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

1 is a plan view showing a substrate processing apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the substrate processing apparatus 100 according to the present invention may include a cleaning chamber 110, a plurality of shafts 120, a first rotation transfer unit 130, a rotation motor 150, and a plurality of rotation drivers ( 160, the belt 170, the second rotation transfer unit 180, and the brush cleaner 190.

Specifically, the cleaning chamber 110 provides a process space in which a cleaning process of the substrate 10 is performed. The plurality of shafts 120, the first rotation transmission unit 130, the plurality of rotation driving units 160, the belt 170, the second rotation transmission unit 180, and the brush three are disposed in the process space. Government 190 is deployed.

The shafts 120 are arranged in parallel to each other and spaced apart from each other by a predetermined distance. Each shaft 121 includes a rotating roller 121a and a plurality of support rollers 121b. The rotary roller 121a extends in a direction orthogonal to a direction in which the shafts 120 are disposed to have a rod shape, and rotate in one direction by the plurality of rotation drivers 160. The rotary roller 121a is inserted into the plurality of support rollers 121b. The support rollers 121b are spaced apart from each other in the longitudinal direction of the rotary roller 121a, have a ring shape, and rotate together with the rotary roller 121a.

The substrate 10 is disposed on the shafts 120 to face the shafts 120, and a lower surface thereof is supported by the support rollers 121b. The substrate 10 is horizontally moved in the direction in which the shafts 120 are disposed by the rotational movement of the support roller 121b.

One end of the rotary roller 121a is provided with the first rotation transfer part 130. The first rotation transmission unit 130 includes a plurality of first magnets 131 and rotates by receiving a rotation force from the second rotation transmission unit 180. The rotational force of the first rotation transmission unit 130 is transmitted to the corresponding rotation roller 121a so that the rotation roller 121a rotates, and thus, the substrate 10 seated on the shafts 120. It is moved horizontally.

On the other hand, the rotary motor 150 is located adjacent to the rotation drive unit 160, and provides a rotational force to the rotation drive unit 160. That is, the belt 170 is provided for each of the rotary motor 150 and the rotary driving unit adjacent to the rotary motor 150, and two rotary driving units adjacent to each other to connect the rotary driving unit adjacent to the rotary motor 150. Connecting the two adjacent rotation drive. Accordingly, the rotational force of the rotational motor 150 is sequentially transmitted from the rotational drive adjacent to the rotational motor 150 to the next rotational drive to rotate the rotational drive 160.

The plurality of rotation drivers 160 are spaced apart from each other and arranged in parallel, and are located in one-to-one correspondence with the plurality of shafts 120. Each rotation drive unit 161 includes a rotation shaft 161a and a pulley 161b. The rotating shaft 161a extends in the same direction as the rotating roller 121a of the shaft 121 and has a rod shape. The pulley 161b is provided at the first end of the rotation shaft 161a.

Among the pulleys of the rotation drivers 160, the pulley adjacent to the rotation motor 150 is connected to the rotation motor 150 by the belt 170 to receive a rotation force from the rotation motor 150. In addition, two pulleys adjacent to each other are also connected by a belt to receive the rotational force from the rotary motor 150. The rotational force of the pulley 161b is transmitted to the corresponding rotation shaft 161a so that the rotation shaft 161a rotates.

The second rotation transmission unit 180 is provided at the second end of each of the rotation shafts 161a, and the second rotation transmission unit 180 receives the rotational force from the rotation shaft 161a. The second rotation transmission unit 180 is located in one-to-one correspondence with the first rotation transmission unit 130 and faces the first rotation transmission unit 130 with the blocking wall 20 therebetween. Here, the blocking wall 20 substantially separates the space in which the substrate 10 is processed by the chemical liquid from the space in which the rotation driving units 160 are located, thereby separating the chemical liquid from the rotation driving units 160. To prevent it from entering into the provided area.

The second rotation transmission unit 180 includes a plurality of second magnets 181 and forms an attraction force with the first magnets 131 embedded in the first rotation transmission unit 130. The second rotation transmission unit 180 transmits a rotational force to the first rotation transmission unit 130 by using a magnetic force formed between the first magnets 131 and the second magnets 181. .

Accordingly, the first rotation transmission unit 130 rotates, and the rotational force of the first rotation transmission unit 130 is transmitted to the corresponding shaft 120 to rotate the shaft 120.

Meanwhile, the brush cleaner 190 is provided on the shafts 120. The brush cleaning unit 190 forms an airflow to block fumes generated during the cleaning process of the substrate 10 using the chemical liquid.

In detail, the brush cleaner 190 is disposed on the substrate 10 to face the substrate 10 during the process. The brush cleaner 190 includes a rotating rod 191, a plurality of airflow forming units, and a motor 193. The rotary rod 191 extends in the same direction as the rotary roller 121a, has a rod shape, and rotates about a central axis. One end of the rotary rod 191 is coupled to the motor 193 to rotate in a clockwise or counterclockwise direction by driving the motor 193.

The rotary rod 191 is inserted into the plurality of airflow forming portions, and the airflow forming portions rotate together with the rotary rod 191. The airflow forming portions are spaced apart from each other in the longitudinal direction of the rotary rod 191, and forms the airflow by the rotation of the rotary rod 191 to prevent the fume from being seated on the substrate 10. .

FIG. 2 is a perspective view showing the airflow forming portion shown in FIG. 1, FIG. 3 is a plan view showing the body portion shown in FIG. 2, FIG. 4 is a perspective view showing the wing portion shown in FIG. 2, and FIG. 5 is shown in FIG. 2. It is a cross-sectional view showing a state in which the wing portion is inserted into the body portion.

2 to 3, the air flow forming portion 192 includes a body portion 192a and a plurality of wings. The body portion 192a has a ring shape, surrounds the outer circumferential surface of the rotation rod 191, and rotates together with the rotation rod 191. The outer circumferential surface of the body portion 192a is formed with a plurality of insertion grooves into which the plurality of wing portions are inserted.

The plurality of insertion grooves are formed to be spaced apart from each other along the outer peripheral surface of the body portion 192a, each insertion groove 91 has an 'X' shape.

The wings are spaced apart from each other, and are disposed spirally on the outer circumferential surface of the body portion 192a. Each wing 192b has a plate shape. As shown in FIG. 5, the lower end of the wing 192b is inserted into the insertion groove 91 and fixed to the body 192a. The lower ends of the wing portions 192b are provided with protrusions 92a and 29b on both sides, respectively, to improve the coupling force with the body portion 192a. In one example of the present invention, the wing 192b is made of a resin material.

As such, the wing 192b protrudes from the outer circumferential surface of the body 192a, thereby forming the airflow by the rotation of the body 192a. The fume formed on the upper surface of the substrate 10 is guided by the air flow and exhausted to the outside of the region where the substrate 10 is located.

In addition, the position of the wing 192b corresponding to the rotation direction of the rotary rod 191 (see FIG. 1) is changed. That is, since the insertion groove 91 is formed in an 'X' shape, when viewed in a state in which the outer circumferential surface of the body portion 192a is perpendicular to the ground, the first slanted in the first direction with respect to the ground The spiral part SD1 may be divided into a second spiral part SD2 that is inclined in a second direction opposite to the first direction and crosses the first spiral part SD1. The wing portion 192a is inserted into any one of the first and second spiral portions SD1 and SD2, and the insertion grooves have the same insertion grooves into which the wing portion 192b is inserted. The wing portions are changed in the spiral direction according to the spiral portion into which the wing portions 192b are inserted, and the air flow is formed according to the spiral direction of the wing portions and the rotation direction of the rotary rod 191.

As such, the air flow forming part 192 may change the position of the wing part 192b in the insertion groove 91, and thus, the spiral direction of the wing parts according to the rotation direction of the rotation rod 191. Can be changed. Accordingly, the brush cleaning unit 190 may form an air flow suitably for the environment of the current process regardless of the rotation direction of the rotary rod 191. Therefore, the substrate processing apparatus 100 may improve the utilization efficiency of the brush cleaning unit 190, and may improve the process efficiency.

In addition, the air flow forming portion 192 further includes a plurality of screws for improving the coupling force between the body portion 192a and the wing portion 192b.

6 is a cross-sectional view showing the positional relationship between the screw and the blade shown in FIG.

2 and 6, each screw 192c is provided corresponding to the wing 192b. The screw 192c is connected to one side of the body portion 192a, and a fastening groove 93 into which the screw 192c is inserted is formed at one side of the body portion 192a. The fastening groove 93 is formed in one-to-one correspondence with the first and second spiral parts SD1 and SD2 (see FIG. 3). Accordingly, two fastening grooves 93 are formed in the body portion 192a corresponding to one insertion groove 91.

One end of the wing portion 192b is in contact with an edge of the body portion 192a and is positioned on the same line as a side surface of the body portion 192a provided with the screw 192c. The head portion of the screw 192c presses one end of the wing portion 192b to fix the wing portion 192b to the body portion 192a. In one example of the present invention, the other end of the wing 192b is spaced apart from an edge of the body 192a.

Hereinafter, a process of forming the air flow in the brush cleaner 190 will be described in detail with reference to the accompanying drawings.

7 is a view illustrating a process of processing a substrate by the substrate processing apparatus shown in FIG. 1.

2 and 7, first, the substrate 10 is seated on the shafts 120, and the shafts 120 are rotated in one direction to horizontally move the substrate 10. Let's do it.

The substrate 10 is cleaned using the chemical liquid, and the chemically treated substrate 10 is moved to the lower portion of the brush cleaner 190 by the shafts 120.

The rotary rod 191 of the brush cleaning unit 190 rotates in a predetermined direction, ie, in a clockwise direction RD1 and a counterclockwise direction RD2 by the driving of the motor 193. The wing 192b of the brush cleaner 190 is inserted into one of the first and second spiral parts SD1 and SD2 according to the rotational direction of the rotary rod 191 to adjust the spiral direction.

The wings form the air flow as the rotary rod 191 rotates to prevent the fume formed in the cleaning chamber 110 from being seated on the substrate 10. Accordingly, the brush cleaner 190 prevents the substrate 10 from being contaminated by the fume.

Although described with reference to the embodiments above, those skilled in the art will understand that the present invention can be variously modified and changed without departing from the spirit and scope of the invention as set forth in the claims below. Could be.

1 is a view showing a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view illustrating the airflow forming unit illustrated in FIG. 1.

3 is a plan view illustrating the body part illustrated in FIG. 2.

4 is a perspective view showing the wing portion shown in FIG.

5 is a cross-sectional view showing a state in which the wing portion shown in Figure 2 is inserted into the body portion.

6 is a cross-sectional view showing the positional relationship between the screw and the blade shown in FIG.

7 is a view illustrating a process of processing a substrate by the substrate processing apparatus shown in FIG. 1.

Explanation of symbols on the main parts of the drawings

100 substrate treating apparatus 110 cleaning chamber

120: shaft 130: first rotation transmission portion

150: rotation motor 160: rotation drive unit

170: belt 180: second rotational transmission part

190: brush cleaning unit

Claims (10)

delete A transfer member on which a substrate is seated and which transfers the substrate; And Is provided on the upper portion of the transfer member facing the substrate, and includes a brush cleaning unit for cleaning the substrate by forming an air flow through the rotation, The brush cleaning unit, A rotating rod extending in one direction and having a rod shape and rotating about a central axis; And It is provided on the outer circumferential surface of the rotary rod, and forms the air flow by the rotational force of the rotary rod, and includes a plurality of air flow forming portion for constantly forming the air flow regardless of the rotation direction of the rotary rod, The air flow forming unit, A body portion having a ring shape and surrounding the rotating rod and rotating together with the rotating rod; And And a plurality of wing parts disposed on an outer circumferential surface of the body part, the positions of which are adjusted in correspondence to the rotation direction of the rotation rod, to form the air flow through the rotation of the rotation rod. The method of claim 2, The wing portion has a plate shape and protrudes from the outer circumferential surface of the body portion, And the wing portions are arranged in a spiral shape on an outer circumferential surface of the body portion. The method of claim 3, Spiral direction of the wing portion is characterized in that the substrate processing apparatus is changed corresponding to the rotation direction of the rotating rod. The substrate processing apparatus of claim 4, wherein the body portion has a plurality of insertion grooves formed by partially removing an outer circumferential surface to insert one end of the wing portions. The substrate processing apparatus of claim 5, wherein the insertion groove has an 'X' shape. The method of claim 6, The air flow forming portion further includes a screw fastened to the side of the body portion to fix the wing portion to the body portion, The head portion of the screw supports the side end of the blade portion. The substrate processing apparatus of claim 2, wherein the wing part is made of a resin material. Mounting the substrate on the transfer member and horizontally moving the substrate; Disposing a brush cleaner having a plurality of wings forming an air stream on the substrate; And Forming the airflow through the brush cleaning unit to clean the substrate; And controlling the position of the plurality of wings according to the rotational direction of the brush cleaning unit to adjust the direction of the airflow. The method of claim 9, The plurality of wings are disposed facing the substrate to be arranged in a spiral along the outer circumferential surface of the brush cleaning portion, The spiral direction of the wing portion is changed to correspond to the direction of rotation of the brush cleaning unit.

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