JPWO2008120518A1 - TCP handling equipment - Google Patents

Abstract

The carrier tape 5 on which a plurality of TCPs are formed is conveyed, the carrier tape 5 is pressed against the probe cards 8a and 8b having the plurality of probes 81 electrically connected to the test head 10, and the TCP test pad Is connected to the probe 81 of the probe card 8a, 8b, so that two probe cards 8a, 8b are provided in correspondence with the two TCPs subjected to the test simultaneously in the TCP handler 2 which can sequentially apply the TCP to the test. A moving device 7a, 7b that can move the probe card 8a, 8b is provided for each probe card 8a, 8b. According to the TCP handler 2, contact mistakes can be reduced when a plurality of TCPs are tested simultaneously.

Description

  The present invention summarizes devices manufactured by TCP (Tape Carrier Package) and COF (Chip On Film) (hereinafter, TCP, COF, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC devices. Is related to a TCP handling device used for testing.

  In the manufacturing process of electronic components such as IC devices, an electronic component testing apparatus that tests the performance and functions of the finally manufactured IC devices and devices in its intermediate stage is necessary. In the case of TCP, A test apparatus for TCP is used.

  A test apparatus for TCP is generally composed of a tester body, a test head, and a TCP handling apparatus (hereinafter also referred to as “TCP handler”). This TCP handler transports a carrier tape on which a plurality of TCPs are formed on a tape (including the concept of film; the same applies hereinafter), and the carrier tape is attached to a probe of a probe card that is electrically connected to a test head. Is pressed, and a test pad of TCP is brought into contact with the probe, whereby a plurality of TCPs are sequentially subjected to a test.

  In order to perform an efficient and accurate test using such a TCP handler, it is necessary to make sure that the TCP test pad and each probe of the probe card are in contact with each other. It is necessary to match.

  Conventionally, as a method for aligning the TCP and the probe, a method of moving the carrier tape in the XY direction together with the pusher and clamp or contact press (Patent Documents 1 to 3), and a method of moving the probe card in the XY direction (Patent Document 4). , 5) is known.

  By the way, in recent TCP handlers, a plurality of, for example, two TCPs are simultaneously subjected to the test in order to improve the test efficiency. Since the plurality of TCPs are formed on the same tape, it is not possible to move each TCP individually and align it with the probe. Further, since the probes on the probe card are fixed, the probes cannot be moved individually corresponding to each TCP.

Therefore, in the above case, conventionally, alignment is performed with reference to only one TCP, and contact is performed with the expectation that the other TCP will be aligned.
No. 6-2271 JP-A-9-92695 JP-A-8-29484 JP-A-10-185996 JP 2002-181888 A

  For this reason, there are cases where contact mistakes frequently occur with respect to TCP that has been aligned as expected as described above, and contact cannot always be made with high reliability.

  The present invention has been made in view of such a situation, and an object of the present invention is to provide a TCP handling device capable of reducing contact mistakes when a plurality of TCPs are tested simultaneously.

  In order to achieve the above object, the present invention conveys a carrier tape on which a plurality of TCPs are formed, and presses the carrier tape against a measuring unit having a plurality of connection terminals electrically connected to a test head. Then, a TCP handling device capable of sequentially applying TCP to a test by connecting an external terminal of the TCP to the connection terminal of the measurement unit, and the measurement unit is n so that a plurality of TCPs can be tested simultaneously. (N is an integer greater than or equal to 2) provided, and a measuring unit moving device capable of moving the measuring unit is provided for each of at least (n-1) measuring units of the n measuring units. A TCP handling device is provided (Invention 1).

  In addition, since the measuring unit moving device is provided “at least (n−1) of n measuring units”, each of the n measuring units, that is, each of all measuring units. A measuring unit moving device may be provided.

  According to the said invention (invention 1), one measurement part can be fixed and all the other measurement parts can be moved independently, or all the measurement parts can be moved independently. In the former case, the carrier tape is moved relative to the fixed measurement unit, the TCP corresponding to the measurement unit is aligned, and the measurement unit provided with the measurement unit moving device is independent. By moving them, it is possible to individually align the TCPs subjected to the test at the same time. In the latter case, it is possible to individually align each TCP to be tested at the same time by moving each measuring unit independently by the measuring unit moving device without having to move the carrier tape. . Thereby, the external terminal of each TCP and the connection terminal of each measurement part can be made to contact reliably, and reduction of a contact mistake can be aimed at.

  In the above invention (Invention 1), the TCP handling device is provided with n pushers so as to correspond to the respective measurement units, and each of the pushers is independently approached and separated from the measurement unit. It is preferable that this is possible (Invention 2).

  When there are a plurality of measurement parts, there are many differences in the height of their connection terminals, but as in the above invention (Invention 2), separate pushers are individually moved for each measurement part, By appropriately adjusting the amount of movement according to the height of the connection terminal, the TCP can be pressed against the connection terminal of each measurement unit with an optimum contact pressure.

  In the above inventions (Inventions 1 and 2), the TCP handling device moves the pusher unit in the direction of the carrier tape surface, and includes a pusher unit having one or a plurality of pushers that can approach and separate from the measurement unit. It is preferable that the position of the carrier tape with respect to the measurement unit can be adjusted by the movement of the pusher unit by the pusher unit moving device (Invention 3).

  According to the above invention (invention 3), when n-1 measuring unit moving devices are provided for n measuring units, the TCP positioning with respect to the fixed measuring unit is performed by the pusher unit. It can be done automatically and easily by movement. Moreover, even when n measuring unit moving devices are provided for n measuring units, depending on the positional deviation pattern, the entire position of the carrier tape is moved by the pusher unit. Can be combined.

  In the said invention (invention 1-3), the said TCP handling apparatus is equipped with the imaging device which can image | photograph the predetermined site | part of the said carrier tape, and the predetermined site | part of the said measurement part, Based on the amount of positional deviation between the external terminal of the TCP and the connection terminal of the measuring unit, the measuring unit is moved by the measuring unit moving device based on the amount of positional deviation, and the connection to the external terminal of the TCP It is preferable to align the terminals (Invention 4).

  According to the said invention (invention 4), the position alignment of the connection terminal with respect to the external terminal of TCP can be simply performed by the image process using an imaging device.

  In the above invention (Invention 4), the pusher unit may be moved by the pusher unit moving device (Invention 3) when the connection terminal is aligned with the external terminal of the TCP (Invention 5). .

  In the said invention (invention 4 and 5), it is preferable to provide the said imaging device multiple (invention 6). According to this invention, since it is possible to photograph a plurality of TCP / measurement units at the same time, it is possible to shorten the processing time related to the acquisition of the displacement amount.

  In the above invention (Invention 6), it is preferable that the plurality of imaging devices can be moved to a desired position independently or in conjunction with each other by a moving device (Invention 7). According to this invention, it is possible to photograph a plurality of external terminals at positions remote from the TCP and connection terminals at positions far from the measurement unit. Thereby, the positional deviation amount between the TCP and the measurement unit can be obtained with better accuracy, and the alignment between the TCP and the measurement unit can be performed more accurately. Further, by moving each of the plurality of imaging devices, the amount of movement can be smaller than in the case of moving one imaging device, so that it is possible to shorten the processing time for acquiring the positional deviation amount.

  In the said invention (invention 4-7), the said imaging device may be insertable between the said carrier tape and the said measurement part (invention 8). According to this invention, the visual field of the imaging device is not obstructed by other members or the like, and the predetermined part of the carrier tape and the predetermined part of the measurement unit can be reliably imaged. Further, since the tip of the connection terminal (contact surface with the test pad) that cannot be photographed from below can be photographed directly, position information of the tip of the connection terminal can be obtained with high accuracy. Furthermore, since the predetermined part of the carrier tape can be photographed from a close position, the position information (coordinate data) can be acquired with high accuracy. The imaging device may be provided inside or below the test head as in the past.

  In the said invention (invention 1-8), between the said measurement part and the said test head, the interface member for electrically connecting both is provided, The said measurement part and the said interface member are They may be electrically connected via flexible lead wires (Invention 9). According to this invention, each measuring unit can move without being hindered by the lead wires.

  Moreover, in the said invention (invention 1-8), between the said measurement part and the said test head, the interface member for electrically connecting both is provided, The said interface member is the said measurement part. The n interface members may be independently movable together with the measurement unit by the measurement unit moving device (invention 10).

  According to the said invention (invention 10), since each measurement part and the interface member corresponding to it move integrally, it is not necessary to provide a flexible lead wire among them. Therefore, even if the imaging device is provided on the top of the test head, the field of view of the imaging device is not disturbed by the lead wires. In addition, since the height of the measurement unit can be set to the same as the conventional one, the design change of the handler can be minimized.

  According to the TCP handling device of the present invention, when a plurality of TCPs are tested simultaneously, the measurement unit can be individually moved and aligned with the TCP, so that contact errors can be reduced.

It is a front view which shows the TCP test apparatus using the TCP handler which concerns on one Embodiment of this invention. It is a top view of the probe card used with the TCP handler concerning the embodiment. It is a front view of a pusher unit and a test head upper part in the TCP handler according to the embodiment. It is a front view of a pusher unit and a test head upper part in a TCP handler concerning other embodiments. FIG. 5 is a side view of a pusher unit, a probe card, and a camera in the TCP handler shown in FIG. 4. It is a front view of a pusher unit and a test head upper part in a TCP handler according to another embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... TCP test apparatus 2 ... TCP handler 3 ... Pusher unit 30a, 30b ... Pusher 5 ... Carrier tape 6b, 6b '... 2nd camera (imaging apparatus)
7a, 7b ... clamp (measuring unit moving device)
8a, 8b ... Probe card (measurement unit)
81: Probe (connection terminal)
9, 9a, 9b ... interface member 91 ... lead wire 10 ... test head

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to an embodiment of the present invention, and FIG. 2 is a plan view of a probe card used in the TCP handler according to the embodiment. FIG. 3 is a front view of the pusher unit and the upper part of the test head in the TCP handler according to the embodiment.

  The TCP test apparatus 1 includes a tester main body (not shown), a test head 10 electrically connected to the tester main body, and a TCP handler 2 provided on the upper side of the test head 10.

  The TCP handler 2 sequentially attaches a plurality of TCPs formed on the carrier tape 5 to the test. In this embodiment, as an example, two TCPs are attached to the test at the same time. However, the present invention is not limited to this, and for example, four or more TCPs may be simultaneously subjected to the test.

  The TCP handler 2 includes an unwinding reel 21 and a take-up reel 22, and a carrier tape 5 before the test is wound on the unwinding reel 21. The carrier tape 5 is unwound from the unwinding reel 21 and is wound around the winding reel 22 after being subjected to the test.

  Between the unwinding reel 21 and the take-up reel 22, three spacer rolls 23 a, 23 b, and 23 c are provided that bridge the protective tape 51 peeled from the carrier tape 5 from the unwinding reel 21 to the take-up reel 22. ing. Each spacer roll 23a, 23b, 23c is vertically movable so that the tension of the protective tape 51 can be adjusted.

  A tape guide 24a, an unwinding limit roller 25a, an in-side sub sprocket 25b, and an in-side guide roller 25c are provided below the unwinding reel 21, and the carrier tape 5 unwound from the unwinding reel 21 is While being guided by the tape guide 24a, it is conveyed to the pusher unit 3 through the unwinding limit roller 25a, the in-side sub sprocket 25b, and the in-side guide roller 25c.

  A tape guide 24b, a take-up limit roller 25f, an out-side sub-sprocket 25e, and an out-side guide roller 25d are provided below the take-up reel 22, and the carrier tape 5 after being subjected to the test is After being guided by the tape guide 24b through the side guide roller 25d, the out-side sub sprocket 25e, and the take-up limit roller 25f, the take-up reel 22 is wound.

  A pusher unit 3 that is movable in the Z-axis direction is provided between the in-side guide roller 25c and the out-side guide roller 25d.

  On the other hand, as shown in FIGS. 1 and 3, two probe cards 8 a and 8 b are provided via an interface member 9 below the pusher unit 3 and above the test head 10. The interface member 200 is also called, for example, HiFix, test head chassis, test fixture, or top plate.

  As shown in FIG. 2, the two probe cards 8a and 8b in the present embodiment have a semicircular shape in plan view, but the present invention is not limited to this. Each probe card 8a, 8b is provided corresponding to each of the two TCPs subjected to the test at the same time, and includes a plurality of probes 81, respectively. The probes 81 of the probe cards 8a and 8b are provided in an arrangement corresponding to the arrangement of test pads (external terminals) included in one TCP. Each probe 81 is electrically connected to the tester body via the interface member 9 and the test head 10.

  As shown in FIGS. 1 to 3, the probe card 8a is held by the clamp 7a, and the probe card 8b is held by the clamp 7b. The clamps 7a and 7b can be moved around the X-axis direction, the Y-axis direction, and the Z-axis by drive mechanisms (not shown). Accordingly, the probe card 8a can be moved around the X axis direction, the Y axis direction and the Z axis by the clamp 7a, and the probe card 8b can be moved around the X axis direction, the Y axis direction and the Z axis by the clamp 7b. It is possible.

  As described above, since the two probe cards 8a and 8b can be moved independently of each other, they can be individually aligned with respect to each TCP subjected to the test. Therefore, each TCP test pad and the probe 81 of each probe card 8a, 8b can be reliably brought into contact with each other, and contact errors can be reduced.

  Each probe card 8a, 8b is electrically connected to the interface member 9 via a flexible lead wire 91. Therefore, the probe cards 8a and 8b can move without being hindered by the lead wire 91.

  As shown in FIGS. 1 and 3, the pusher unit 3 is provided on the pusher frame 36, the two pushers 30a and 30b attached to the pusher frame 36, and the front side of the pushers 30a and 30b (left side in FIG. 1). The tension sprocket 35a and the main sprocket 35b provided on the rear stage side (right side in FIG. 1) of the pushers 30a and 30b are provided.

  Each of the pushers 30a and 30b includes a pusher main body portion 33 into which the ball screw 32 is screwed, a servo motor 31 that can rotate the ball screw 32, and a suction plate 34 provided at the lower end portion of the pusher main body portion 33. And.

  The pusher main body 33 of each pusher 30a, 30b is attached to the pusher frame 36 via a linear motion guide 37 in the Z-axis direction, and is driven up and down while being guided by the linear motion guide 37 by driving the servo motor 31. It can move in the direction (Z-axis direction). That is, each pusher 30a, 30b is individually movable in the Z-axis direction. The suction plate 34 is connected to a negative pressure source (not shown) and can hold the carrier tape 5 by suction.

  Here, the pusher 30a presses the TCP on the carrier tape 5 against the probe card 8a, and the pusher 30b presses the TCP on the carrier tape 5 against the probe card 8b. When two probe cards 8a and 8b are manufactured and provided in the handler 2 as described above, even a slight difference is often caused in the needle height of the probe 81 in each probe card 8a and 8b. In this case, when the carrier tape 5 is pressed with one pusher, there is a problem that a contact mistake occurs with respect to the probe 81 of the probe card with the lower contact pressure or the probe 81 of the probe card with the higher contact pressure is deformed. May occur. However, as in the present embodiment, separate pushers 30a and 30b are used for the probe cards 8a and 8b so as to be individually movable in the Z-axis direction, and the position of the lower end of movement of each pusher 30a and 30b is set to the needle. By appropriately adjusting according to the height, the carrier tape 5 can be pressed against the probes 81 of the probe cards 8a and 8b with an optimum contact pressure. That is, by using the two pushers 30a and 30b, it is possible to absorb the difference in needle height between the probe cards 8a and 8b.

  A pusher stage 4 is provided on the back side of the pusher frame 36 (see FIG. 5). According to the pusher stage 4, the pusher unit 3 can be moved around the X-axis direction, the Y-axis direction, and the Z-axis. Therefore, the pusher unit 3 is moved as described above while the pushers 30a and 30b of the pusher unit 3 are sucking and holding the carrier tape 5 by the suction plate 34, whereby the carrier tape 5 is moved in the X-axis direction, Y The position of the TCP on the carrier tape 5 and the probe 81 can be aligned by moving in the axial direction or around the Z axis.

  As shown in FIGS. 1 and 3, the first camera 6 a is on the front side of the pusher unit 3 (left side in FIG. 1), the second cameras 6 b and 6 b ′ are on the top of the test head 10, and the rear stage side of the pusher unit 3. A third camera 6c is provided on each (right side in FIG. 1).

  A mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c. The mark punch 26a is one in which one or a plurality of holes are formed at a predetermined position for the corresponding TCP based on the test result, and the reject punch 26b is a TCP that is determined to be a defective product as a result of the test. It is something that punches out.

  Each camera 6a, 6b, 6b ', 6c displays an image captured by these cameras on a display device (not shown) so that the operator can visually recognize the image. The display device includes an image processing unit and a monitor that displays images taken by the cameras 6a, 6b, 6b ', and 6c.

  Among the above cameras, the first camera 6a and the third camera 6c are for judging the presence or absence of TCP on the carrier tape 5 and the position and number of holes by the mark punch 26a. On the other hand, the second cameras 6 b and 6 b ′ are for acquiring positional deviation information between the TCP and the probe 81.

  In the present embodiment, two second cameras 6b and 6b ′ are provided, and one second camera 6b photographs the probe 81 of the probe card 8a and the corresponding TCP test pad or alignment mark, and the other The second camera 6b 'captures the probe 81 of the probe card 8b and the corresponding TCP test pad or alignment mark.

  Each of the second cameras 6b and 6b ′ can acquire the positional information (coordinate data) of the probe 81 and the test pad or the alignment mark from the captured image, and thereby calculate the positional deviation amount between the probe 81 and the TCP. it can.

  The two second cameras 6b and 6b ′ are mounted on the camera stages 61 and 61 ′, respectively, and can be moved in the vertical and horizontal directions (X-axis and Y-axis directions) in plan view by the actuators of the camera stages 61 and 61 ′. It has become. The second cameras 6b and 6b 'move in the vertical and horizontal directions (X-axis and Y-axis directions) in a plan view, so that the plurality of test pads at the TCP remote positions and the probes at the remote positions of the probe cards 8a and 8b. 81 can be photographed. As a result, the amount of positional deviation between the TCP test pad and the probe 81 of the probe card 8a, 8b can be obtained with better accuracy, and the alignment between the TCP test pad and the probe 81 of the probe card 8a, 8b can be adjusted. It can be done more accurately.

  The camera stages 61 and 61 'may move the second cameras 6b and 6b' independently of each other, or may move the second cameras 6b and 6b 'in conjunction with each other. In the case of interlocking, for example, the second cameras 6b and 6b ′ can move in parallel to photograph the test pads at the corresponding positions of the two TCPs and the probes 81 at the corresponding positions of the probe cards 8a and 8b, respectively. .

  Note that the second cameras 6b and 6b 'can change the focal position, and thereby can focus on both the probe 81 and the test pad or the alignment mark, which are imaging targets.

  As described above, by providing a plurality of second cameras 6b and 6b ′, position information can be acquired for two TCP / probe cards at the same time, and the amount of movement of the second cameras 6b and 6b ′ is small. Therefore, it is possible to shorten the processing time related to the acquisition of position information. However, only one second camera may be provided due to space problems and cost.

  Here, in the present embodiment, a flexible lead wire 91 exists between the probe cards 8a and 8b and the interface member 9, but in some cases, this lead wire 91 provides a field of view of the second cameras 6b and 6b ′. May interfere. In such a case, the second cameras 6 b and 6 b ′ may be provided so as to be inserted between the carrier tape 5 and the probe 81. By providing the second cameras 6b and 6b ′ in this way, the probe 81 and the TCP test pad or alignment mark can be photographed by the second cameras 6b and 6b ′ without disturbing the visual field by the lead wire 91. it can.

  In the example shown in FIG. 4 and FIGS. 5A and 5B, the second cameras 6b and 6b ′ are attached to the distal ends of the arms 63 extending from the camera stages 62 and 62 ′, respectively. The actuators 62 and 62 'can move in the vertical and horizontal directions (X-axis-Y-axis directions) in plan view. 5A shows the second camera 6b, 6b 'withdrawn, and FIG. 5B shows the second camera 6b, 6b' inserted.

  The second cameras 6b and 6b 'can simultaneously photograph the upper side and the lower side of the second cameras 6b and 6b'. Therefore, as shown in FIG. 5B, when the second cameras 6b and 6b ′ are inserted between the carrier tape 5 and the probe 81, the TCP test pads or alignment are performed by the second cameras 6b and 6b ′. The mark and the tip of the probe 81 can be photographed simultaneously. According to the second cameras 6b and 6b ′, the tip portion of the probe 81 (contact surface with the test pad) that cannot be photographed from below can be photographed directly, so that the position information of the tip portion of the probe 81 is highly accurate. Can be obtained at. Further, since a TCP test pad or alignment mark can be photographed from a close position, the position information (coordinate data) can be acquired with high accuracy.

  The second cameras 6b and 6b ′ can photograph the upper side (carrier tape 5) and the lower side (probe 81) at the same time. However, the present invention is not limited to this, and the camera itself is inverted. By doing this or by switching the optical path in the camera, the camera may be capable of shooting the upper side (carrier tape 5) and the lower side (probe 81), or the upper side (carrier tape 5). A camera for photographing the camera and the lower side (probe 81) may be provided.

  Next, an example of the alignment operation of the TCP handler 2 will be described. This alignment operation may be an operation during the actual operation of the TCP handler 2 or may be an operation at the time of initial setting before the actual operation.

  The TCP handler 2 images the test pads or alignment marks of the two TCPs transported to the test position by the second cameras 6b and 6b ′ and also images the probes 81 of the corresponding probe cards 8a and 8b. , Get their coordinate data. Then, the positional deviation amount between each TCP test pad and the probe 81 is calculated, and the probe card 8a is moved by the clamp 7a and the probe card 8b is moved by the clamp 7b so that the positional deviation amount is not more than a predetermined amount. Let

  As described above, by independently moving the two probe cards 8a and 8b, the two TCPs can be individually aligned with each other even if the two TCPs have different displacement directions. It can be carried out. Therefore, each TCP test pad and the probe 81 of each probe card 8a, 8b can be reliably brought into contact with each other, and contact errors can be reduced.

  If the two TCPs have the same positional deviation direction, the pusher unit 3 is moved by the pusher stage 4 to move the entire carrier tape 5 before the probe cards 8a and 8b are moved. May be. Thereafter, the probe cards 8a and 8b may be moved as necessary.

  The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

  For example, in the above embodiment, both the clamps 7a and 7b holding the probe cards 8a and 8b are movable. However, the present invention is not limited to this, and one clamp 7a (or The clamp 7b) may be movable, and the other clamp 7b (or clamp 7a) may be fixed.

  In this case, first, the pusher unit 3 and the carrier tape 5 are moved by the pusher stage 4, and one of the two TCPs is aligned with the probe 81 of the fixed probe card 8b (or probe card 8a). I do. Next, in consideration of the amount of movement, the probe card 8a (or probe card 8b) is moved by the movable clamp 7a (or clamp 7b), and the probe card 8a (or probe card) for the remaining one TCP is moved. Alignment with the probe 81 in 8b) is performed.

  In such a configuration, although the amount of movement of the probe card is larger than that in the above embodiment and the processing time becomes longer, the handler 2 can be simplified to save space and reduce costs.

  Further, a plurality of interface members may be provided corresponding to the number of probe cards, and may be moved together with the probe cards by a moving device. For example, as shown in FIG. 6, an interface member 9a is provided for the probe card 8a, an interface member 9b is provided for the probe card 8b, and the probe card 8a and the interface member 9a are gripped by the clamp 7a and are not shown. The probe card 8b and the interface member 9b are gripped by a clamp 7b and can be moved around the X axis direction, the Y axis direction, and the Y axis direction by a drive mechanism (not shown). It may be movable around the Z axis.

  According to such a configuration, the probe card 8a and the interface member 9a, and the probe card 8b and the interface member 9b move together, so a flexible lead wire is provided between the probe cards 8a and 8b and the interface members 9a and 9b. There is no need to provide it. Therefore, the field of view of the second cameras 6b and 6b 'provided on the top of the test head 10 is not obstructed by the lead wires. Further, the height of the probe cards 8a and 8b can be set to the same as the conventional one, and further, the conventional clamp can be used, so that the design change of the handler can be minimized.

  Moreover, in the said embodiment, although the number of the apparatus (clamp) which moves a probe card and a probe card was two, this invention is not limited to this, For example, three, four, three, or more It may be an integer.

  The present invention is useful for accurately aligning the probe of the probe card and the TCP test pad at the time of initial setting or actual operation of the TCP handling apparatus.

Claims (10)

Transporting the carrier tape on which a plurality of TCPs are formed, pressing the carrier tape against the measurement unit having a plurality of connection terminals electrically connected to the test head, and connecting the external terminals of the TCP to the measurement unit A TCP handling device capable of sequentially subjecting TCP to a test by connecting to a terminal,
In order to be able to test a plurality of TCPs simultaneously, the measurement unit is provided with n (n is an integer of 2 or more),
A TCP handling device, wherein a measuring unit moving device capable of moving the measuring unit is provided for each of at least (n-1) measuring units of the n measuring units.   The TCP handling device includes n pushers so as to correspond to the respective measurement units, and each of the pushers can be independently approached and separated from the measurement unit. The TCP handling device according to claim 1. The TCP handling device includes a pusher unit having one or a plurality of pushers that can be moved toward and away from the measuring unit, and a pusher unit moving device that can move the pusher unit in the direction of the carrier tape surface. And
The TCP handling device according to claim 1, wherein the position of the carrier tape with respect to the measurement unit can be adjusted by the movement of the pusher unit by the pusher unit moving device. The TCP handling device includes an imaging device capable of imaging a predetermined portion of the carrier tape and a predetermined portion of the measurement unit,
Based on the image photographed by the imaging device, the amount of positional deviation between the external terminal of the TCP and the connection terminal of the measurement unit is obtained,
The position of the said connection terminal with respect to the external terminal of TCP is performed by moving the said measurement part with the said measurement part movement apparatus based on the said amount of positional offsets, The Claim 1 characterized by the above-mentioned. TCP handling device.   5. The TCP handling device according to claim 4, further comprising: moving the pusher unit by the pusher unit moving device according to claim 3, when aligning the connection terminal with respect to the external terminal of the TCP.   The TCP handling device according to claim 4, comprising a plurality of the imaging devices.   The TCP handling device according to claim 6, wherein the plurality of imaging devices can be moved to a desired position independently or in conjunction with each other by a moving device.   The TCP handling device according to any one of claims 4 to 7, wherein the imaging device can be inserted between the carrier tape and the measurement unit. Between the measurement unit and the test head, an interface member for electrically connecting both is provided,
The TCP handling device according to claim 1, wherein the measurement unit and the interface member are electrically connected via a flexible lead wire. Between the measurement unit and the test head, an interface member for electrically connecting both is provided,
N interface members are provided corresponding to the measurement units;
9. The TCP handling device according to claim 1, wherein each of the interface members can be independently moved together with the measurement unit by the measurement unit moving device. 10.

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