JPWO2007077621A1 - TCP handling device - Google Patents

Abstract

When the carrier tape 5 is provided with a plurality of alignment marks 52 for each predetermined TCP, and the position information of the TCP to be tested is specified, the camera 6b is used to identify the first alignment mark 521 related to the TCP. When the image recognition of the first alignment mark 521 is not performed, the other alignment marks 522 to 524 related to the TCP are arranged so that the image recognition of any one of the alignment marks 52 can be performed. TCP handler 2 that sequentially tries image recognition.

Description

  The present invention summarizes devices manufactured by TCP (Tape Carrier Package) and COF (Chip On Film) (hereinafter, TCP, COF, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC devices. Is related to a TCP handling device used for testing.

  In the manufacturing process of electronic components such as IC devices, an electronic component testing apparatus that tests the performance and functions of the finally manufactured IC devices and devices in its intermediate stage is necessary. In the case of TCP, A test apparatus for TCP is used.

  A test apparatus for TCP is generally composed of a tester body, a test head, and a TCP handling apparatus (hereinafter also referred to as “TCP handler”). This TCP handler transports a carrier tape on which a plurality of TCPs are formed on a tape (including the concept of film; the same applies hereinafter), and the carrier tape is attached to a probe of a probe card that is electrically connected to a test head. Is provided, and a plurality of TCPs are sequentially subjected to a test by contacting the external terminals of the TCP with the probe.

  Here, one or a plurality of positioning marks (alignment marks) are provided for each TCP on the carrier tape, the TCP position is specified based on the alignment mark, and the TCP probe card is identified. Positioning is performed. Specifically, the camera recognizes a predetermined alignment mark related to the TCP to be tested, acquires position information of the alignment mark, specifies TCP positional deviation information based on the position information of the alignment mark, and Based on the positional deviation information, positional deviation correction for the TCP probe card is performed as necessary.

  However, depending on the type of carrier tape and the reflection condition of the carrier tape surface, or due to contamination of the carrier tape, the camera may not be able to recognize the image of the alignment mark.

  If the camera cannot recognize the alignment mark in this way, the operator pauses the test equipment to change the brightness of the light illuminating the carrier tape or change the camera settings. It was necessary to remove the dirt on the carrier tape. There has been a problem that the throughput of the test is lowered due to the temporary stop of the test apparatus and the work by the operator.

  The present invention has been made in view of such a situation, and an object of the present invention is to provide a TCP handling device that can reduce the frequency of stopping the test device and improve the throughput of the test.

  In order to achieve the above object, first, the present invention conveys a carrier tape on which a plurality of TCPs are formed, presses the carrier tape against a contact portion electrically connected to a test head, A TCP handling device capable of sequentially subjecting a plurality of TCPs to a test by bringing an external terminal into contact with a contact terminal of the contact part, and recognizing a specific figure having a predetermined shape on the carrier tape, An image pickup apparatus capable of acquiring position information of a specific figure is provided, and in identifying the position information of the TCP to be tested, the first specific figure related to the TCP is tried to recognize an image, A TCP hand characterized by trying image recognition of another specific graphic related to the TCP when image recognition of the specific graphic is not possible Providing packaging apparatus (invention 1).

  Examples of the “specific graphic having a predetermined shape” include, but are not limited to, alignment marks, specific external terminals (test pads) of TCP, corners of packages, and the like. . When only the alignment mark is adopted as the specific figure, a plurality of alignment marks are attached on the carrier tape for each predetermined TCP (may be every one or plural). There is a need.

  According to the above invention (Invention 1), even when image recognition of the first specific graphic is not possible, image recognition of another specific graphic may be possible, so that only one specific graphic is image recognized. Compared to the case, the frequency of stopping the test apparatus can be reduced to improve the test throughput.

  In the above invention (Invention 1), when the first specific figure cannot be recognized, the image recognition is sequentially performed for the plurality of specific figures related to the TCP so that any specific figure can be recognized. May be tried (Invention 2).

  In the above inventions (Inventions 1 and 2), positional information of the specific graphic is obtained by image recognition of the specific graphic, and a positional shift of the TCP to be tested with respect to the contact portion based on the acquired positional information of the specific graphic It is preferable to specify information and perform misalignment correction on the contact portion of the TCP based on the identified misalignment information (Invention 3).

  In the above invention (Invention 3), the TCP handling device is a tape moving device capable of minutely moving the carrier tape pressed against the contact portion and / or a contact portion moving device capable of minutely moving the contact portion. It is preferable that position deviation correction of the TCP with respect to the contact portion is performed by the tape moving device and / or the contact portion moving device (Invention 4).

  Secondly, the present invention conveys a carrier tape on which a plurality of TCPs are formed, presses the carrier tape against a contact part electrically connected to a test head, and contacts an external terminal of the TCP with the contact part. A TCP handling apparatus capable of sequentially applying a plurality of TCPs to a test by bringing them into contact with a terminal, and recognizing a specific figure having a predetermined shape on the carrier tape and acquiring position information of the specific figure An image pickup apparatus capable of performing image recognition and trying image recognition for a plurality of specific figures related to the TCP so that image recognition of two or more specific figures can be performed when specifying the position information of the TCP to be tested A TCP handling device is provided (Invention 5).

  According to the above invention (Invention 5), even when image recognition of a specific graphic is not possible, image recognition of another specific graphic may be possible. As compared with, the test apparatus can be stopped less frequently and the test throughput can be improved. Moreover, according to the said invention (invention 5), since the positional information on two or more specific figures can be acquired as much as possible from among a plurality of specific figures, by using the average value of these positional information, Positioning with respect to the contact part of TCP can be made more accurate. Furthermore, it is also possible to calculate the amount of positional deviation in the θ rotation direction by acquiring position information of two or more specific figures.

  In the said invention (invention 5), the positional information of two or more specific figures is acquired by the image recognition of the said specific figure, the average value of the acquired positional information of the two or more specific figures is calculated, and the calculated specific The positional deviation information for the contact portion of the TCP to be tested is identified based on the average value of the positional information of the figure, and the positional deviation correction for the TCP contact portion is performed based on the identified positional deviation information. Preferred (Invention 6).

  In the said invention (invention 5), the positional information of two or more specific figures is acquired by the image recognition of the said specific figure, Based on the acquired positional information of the two or more specific figures, the said contact of TCP of test object It is preferable that the positional deviation amount around the vertical axis with respect to the portion is specified, and the positional deviation correction with respect to the contact portion of the TCP is performed based on the identified positional deviation amount around the vertical axis (Invention 7).

  In the above inventions (Inventions 6 and 7), the TCP handling device is a tape moving device capable of minutely moving the carrier tape pressed against the contact portion and / or a contact portion capable of minutely moving the contact portion. It is preferable that a moving device is further provided, and that the positional deviation correction of the TCP with respect to the contact portion is performed by the tape moving device and / or the contact portion moving device (Invention 8).

  In the above invention (Invention 5), when image recognition of two or more specific figures is not possible, the carrier tape is pressed against the contact part without correcting the TCP position, and the TCP external terminal is connected to the contact terminal of the contact part. It is also possible to check that all external terminals of the TCP are connected to the corresponding contact terminals of the contact part by performing a contact check (Invention 9). According to this invention (invention 9), even when the image of two or more specific figures cannot be recognized, the external terminal of the TCP can be brought into contact with the contact terminal of the contact portion without correcting the position of the TCP. There is.

  According to the TCP handling apparatus of the present invention, the test apparatus can be stopped less frequently and the test throughput can be improved.

1 is an overall front view of a test apparatus for TCP including a TCP handler according to an embodiment of the present invention. It is a side view of a pusher unit in the TCP handler according to the embodiment. It is a top view of the pusher stage in the TCP handler concerning the embodiment. It is a top view of the probe card stage in the TCP handler which concerns on the same embodiment. It is a front view of the probe card stage in the TCP handler which concerns on the same embodiment. It is a flowchart explaining the main operation | movement of the TCP handler which concerns on the embodiment. It is a flowchart explaining the main operation | movement of the TCP handler which concerns on the embodiment. It is a flowchart explaining the main operation | movement of the TCP handler which concerns on the embodiment. It is a flowchart explaining the main operation | movement of the TCP handler which concerns on the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Test apparatus for TCP 10 ... Test head 2 ... TCP handler 21 ... Unwind reel 22 ... Take-up reel 3 ... Pusher unit 5 ... Carrier tape 50 ... TCP
52, 521, 522, 523, 524 ... Alignment marks 6a, 6b, 6c ... Camera 7 ... Probe card stage 8 ... Probe card 81 ... Probe (contact terminal)

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1 is an overall front view of a test apparatus for TCP including a TCP handler according to an embodiment of the present invention, and FIG. 2 is a side view of a pusher unit in the TCP handler according to the embodiment. FIG. 4 is a plan view of a pusher stage in the TCP handler according to the embodiment, FIG. 4 is a plan view of a probe card stage in the TCP handler according to the embodiment, and FIG. 5 is a TCP handler according to the embodiment. FIG. 6 to FIG. 9 are flowcharts for explaining the main operation of the TCP handler according to the embodiment.

  First, the overall configuration of a TCP test apparatus including a handler according to an embodiment of the present invention will be described.

  As shown in FIG. 1, a test apparatus 1 for TCP includes a tester main body (not shown), a test head 10 electrically connected to the tester main body, and a TCP handler 2 provided on the upper side of the test head 10. Is done.

  The TCP handler 2 conveys the carrier tape 5 to subject each TCP formed on the carrier tape 5 in a line along the longitudinal direction to the test sequentially. The carrier tape may be one in which TCPs are formed in an array of two rows or a plurality of rows along the longitudinal direction.

  In this embodiment, as shown in FIG. 4, for each TCP in the carrier tape 5, one alignment mark 52 is provided in the vicinity of each corner of the rectangular TCP, for a total of four. The four alignment marks 52 are referred to as a first alignment mark 521, a second alignment mark 522, a third alignment mark 523, and a fourth alignment mark 524, respectively.

  Note that the TCP handler 2 of the present embodiment applies TCP to the test one by one, but two or more TCPs may simultaneously apply to the test. In this case, the TCP handler 2 applies to the test at the same time. A plurality of alignment marks 52 need only be provided for a plurality of TCPs.

  The TCP handler 2 includes an unwinding reel 21 and a take-up reel 22. A carrier tape 5 before the test is wound on the unwinding reel 21, and the carrier tape 5 is unwound from the unwinding reel 21 and conveyed so as to be wound on the winding reel 22 after being subjected to the test. Is done.

  Between the unwinding reel 21 and the take-up reel 22, three spacer rolls 23 a, 23 b, and 23 c are provided that bridge the protective tape 51 peeled from the carrier tape 5 from the unwinding reel 21 to the take-up reel 22. It has been. Each spacer roll 23a, 23b, 23c can be moved up and down so that the tension of the protective tape 51 can be adjusted.

  A tape guide 24a, an unwinding limit roller 25a, an in-side sub sprocket 25b, and an in-side guide roller 25c are provided below the unwinding reel 21, and the carrier tape 5 unwound from the unwinding reel 21 is While being guided by the tape guide 24a, it is conveyed to the pusher unit 3 through the unwinding limit roller 25a, the in-side sub sprocket 25b, and the in-side guide roller 25c.

  A tape guide 24b, a take-up limit roller 25f, an out-side sub-sprocket 25e, and an out-side guide roller 25d are provided below the take-up reel 22, and the carrier tape after being subjected to the test in the pusher unit 3 is provided. 5 is wound around the take-up reel 22 while being guided by the tape guide 24b through the out-side guide roller 25d, the out-side sub-sprocket 25e, and the take-up limit roller 25f.

  A pusher unit 3 is provided between the in-side guide roller 25c and the out-side guide roller 25d. A first camera 6 a is provided on the front side of the pusher unit 3 (left side in FIG. 1), and a second camera 6 b is provided on the lower side of the pusher unit 3 (inside a probe card stage 7 described later). A third camera 6c is provided on the rear stage side (right side in FIG. 1). A mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c.

  The mark punch 26a is one in which one or a plurality of holes are formed at a predetermined position for the corresponding TCP based on the test result, and the reject punch 26b is a TCP that is determined to be a defective product as a result of the test. It is something that punches out. The mark punch 26a and the reject punch 26b can be individually controlled so as not to operate.

  Each camera 6a, 6b, 6c is connected to an image processing device (not shown). The first camera 6a and the third camera 6c are for judging the presence or absence of TCP on the carrier tape 5 and the position and number of holes by the mark punch 26a. The second camera 6b captures images after recognizing the alignment mark 52 on the carrier tape 5, the external terminal of the TCP (hereinafter also referred to as “test pad”) and the tip of the probe 81, and detects them. Position information is acquired, and a photographed image is displayed on a monitor (not shown) so that an operator can grasp the contact status. The image processing apparatus can calculate the amount of displacement of the TCP with respect to the probe 81 based on the position information of each part acquired by the second camera 6b.

  The second camera 6b is mounted on the camera stage 61, and can be moved in the vertical and horizontal directions (X-axis / Y-axis direction) and in the vertical direction (Z-axis direction) in plan view by an actuator of the camera stage 61. . Accordingly, the second camera 6b can photograph all of the first to fourth alignment marks 521, 522, 523, and 524 on the carrier tape 5.

  As shown in FIGS. 1 and 2, a servo motor 31 capable of rotating the ball screw 32 is attached to a frame (pusher frame) 36 of the pusher unit 3 via a bracket 361. A pusher main body 33 to which the ball screw 32 is screwed is attached via two linear motion guides (hereinafter referred to as “LM guides”) 37 extending in the Z-axis direction. When the servo motor 31 is driven, the pusher body 33 moves in the vertical direction (Z-axis direction) while being guided by the LM guide 37.

  At the lower end of the pusher body 33, there is provided a suction plate 34 that is connected to a negative pressure source (not shown) and sucks and holds the carrier tape 5 by suctioning the TCP. Yes.

  A tension sprocket 35a is provided on the front side (left side in FIG. 1) of the pusher main body 33, and a main sprocket 35b is provided on the rear side (right side in FIG. 1) of the pusher main body 33.

  As shown in FIGS. 2 and 3, the pusher stage 4 is installed on the back side of the pusher body 33 in the pusher frame 36 so as to be placed on the base 38, and is a turntable for the pusher stage 4. The top table 48 is fixed to the pusher frame 36.

  On the base 40 of the pusher stage 4, a servo motor 41a for rotating a ball screw 42a having an axis in the X-axis direction, a servo motor 41b for rotating a ball screw 42b having an axis in the Y-axis direction, and a Y-axis direction A servo motor 41c that rotates a ball screw 42c having a shaft is provided, and the servo motor 41b and the servo motor 41c are located at both ends on the base 40, respectively.

  A sliding block 44a that is guided by LM guides 43a and 43a in the X-axis direction and that can slide in the X-axis direction is screwed into the ball screw 42a. A sliding plate 46a is attached to the sliding block 44a via a Y-axis LM guide 45a so as to be slidable in the Y-axis direction. A rotating member 47a having a roller ring inside is fixed to the upper side of the sliding plate 46a, and the rotating member 47a is rotatably attached to the top table 48.

  A sliding block 44b that is guided by LM guides 43b and 43b in the Y-axis direction and is slidable in the Y-axis direction is screwed into the ball screw 42b. A sliding plate 46b is attached to the sliding block 44b so as to be slidable in the X-axis direction via an LM guide 45b in the X-axis direction. A rotating member 47b having a roller ring inside is fixed on the upper side of the sliding plate 46b, and the rotating member 47b is rotatably attached to the top table 48.

  A sliding block 44c that is guided by LM guides 43c, 43c in the Y-axis direction and that can slide in the Y-axis direction is screwed into the ball screw 42c. A sliding plate 46c is attached to the sliding block 44c so as to be slidable in the X-axis direction via an LM guide 45c in the X-axis direction. A rotating member 47c having a roller ring inside is fixed on the upper side of the sliding plate 46c, and the rotating member 47c is rotatably attached to the top table 48.

  In the pusher stage 4 having such a configuration, the servo motor 41a is driven to slide the sliding block 44a, the sliding plate 46b, and the sliding plate 46c in the X-axis direction, so that the top table 48 is moved to the X direction. It can be moved in the axial direction. In addition, the top table 48 is moved in the Y-axis direction by driving the servo motor 41b and the servo motor 41c to slide the sliding block 44b, the sliding block 44c, and the sliding plate 46a in the same Y-axis direction. be able to. Furthermore, the servo motor 41a is driven to slide the sliding block 44a in the X-axis direction, and the servo motor 41b and the servo motor 41c are driven so that the sliding block 44b and the sliding block 44c are mutually connected to the Y axis. The top table 48 can be rotated about its vertical axis by sliding in the opposite direction and rotating each rotating member 47a, 45b, 45c. According to the pusher stage 4, the pusher unit 3 can be moved in the X-axis-Y-axis directions and rotated around the vertical axis.

  The pusher stage 4 can be moved in a shorter time than the probe card stage 7. However, since the pusher stage 4 moves the TCP while the carrier tape 5 is sucked and held, the amount of movement in the X-axis and Y-axis directions and the rotational movement is small, but it can be used practically.

  On the other hand, on the lower side of the pusher unit 3 and on the upper part of the test head 10, as shown in FIG. 4, a probe card provided with a large number of probes (contact terminals) 81 that can come into contact with a TCP test pad. A probe card stage 7 on which 8 is mounted is installed. Here, the probe card stage 7 includes a type that can be moved and controlled by a motor drive mechanism and a type that has only a manual adjustment function. In this embodiment, the probe card stage 7 has a motor drive mechanism.

  4 and 5, on the base 71 of the probe card stage 7, a servo motor 711 that rotates a ball screw 712 having an axis in the X-axis direction, and four LM guides 713 in the X-axis direction, Is provided. On these four LM guides 713, rectangular X bases 72 are provided that are guided by the LM guides 713 so as to be slidable in the X-axis direction. A threaded portion 721 into which a ball screw 712 is threaded is formed on one side of the X base 72.

  On the X base 72, a servo motor 722 for rotating a ball screw 723 having an axis in the Y-axis direction and two LM guides 724 in the Y-axis direction are provided. On these two LM guides 724, a rectangular Y base 73 is provided that is slidably guided in the Y-axis direction by the LM guides 724. A threaded portion 731 into which a ball screw 723 is threaded is formed on one side of the Y base 73.

  On the Y base 73, a servo motor 732 that rotates a ball screw 733 having an axis in the Y-axis direction and a connection ring 734 that rotatably supports the card ring 735 are provided. A part of the card ring 735 is formed with a threaded portion 736 into which the ball screw 733 is threaded. The probe card 8 having a plurality of probes 81 is detachably attached to the card ring 735 by four pins 82.

  Each probe 81 of the probe card 8 is electrically connected to the tester body via the test head 10, and is below the probe card 8 and inside the probe card stage 7. Is located.

  In the probe card stage 7 having such a configuration, by driving the servo motor 711, the X base 72, and hence the probe card 8, can be moved in the X-axis direction, and by driving the servo motor 722, The Y base 73 and thus the probe card 8 can be moved in the Y-axis direction. Further, by driving the servo motor 732 to rotate the ball screw 733 and moving the screwing portion 736, the card ring 735 and the probe card 8 can be rotated around the vertical axis.

  In the test apparatus described above, the pusher unit 3 presses the carrier tape 5 conveyed to the probe card stage 7 against the probe card 8 on the test head 10 while adsorbing and supporting the carrier tape 5. Then, the TCP on the carrier tape 5 comes into contact with the probe 81 of the probe card 8. In this state, first, a minute direct current is applied to each IC terminal, and a contact check is performed by measuring the presence or absence of a current flowing in the TCP internal circuit (for example, a protective diode) and a voltage value. The electrical contact with the probe 81 and the presence or absence of a short between adjacent pins are confirmed. Thereafter, a test signal from the tester body is applied to the TCP, and a response signal read from the TCP is sent to the tester body through the test head 10. Based on this response signal, TCP performance, test, etc. are tested, and pass determination (non-defective product determination) or fail determination (failure determination) is performed for TCP.

Next, the usage method and operation of the TCP handler 2 will be described.
When the TCP handler is used, it is necessary to make initial settings before the TCP handler 2 is actually operated. That is, when the TCP type and the probe card 8 are changed accordingly, the reference of the pusher stage 4 and the probe card stage 7 so that the TCP test pad and the probe 81 of the corresponding probe card 8 are in contact with each other. The position needs to be determined and registered (this position is referred to as “registered position”).

  For example, an operator manually selects a plurality of (for example, three) probes 81 and corresponding test pads to determine a rough position, and then uses the second camera 6b and the image processing apparatus. The reference position is determined and registered by moving the pusher stage 4 and / or the probe card stage 7 by manual control or automatic control so that each probe 81 is positioned as centrally as possible in each test pad. If desired, the rough position may be determined by automatic control instead of manual operation.

  At this time, the position coordinates of a predetermined target in the field of view of the second camera 6b are also registered. In the present embodiment, the position coordinates of the first to fourth alignment marks 521, 522, 523, and 524 on the carrier tape 5 are registered. At this time, the position coordinates of the first to second alignment marks 521 and 522 or the position coordinates of the first to third alignment marks 521, 522 and 523 may be registered.

  Next, the operation of the TCP handler 2 during actual operation will be described with reference to the flowcharts of FIGS. In this embodiment, the probe card stage 7 moves the probe card 8 to the registration position registered in the initial setting to be in a fixed state, and corrects misalignment performed before each test of TCP that is sequentially transferred. The fine adjustment is performed by the pusher stage 4 for fine adjustment. However, this fine adjustment is also possible by a method of finely moving the probe card stage 7 instead of the pusher stage 4.

[Until misalignment calculation-Use two alignment marks]
First, a description will be given of a case where positional deviation correction is performed using two alignment marks 52 among the first to fourth alignment marks 521, 522, 523, and 524.

  Whether to use two alignment marks 52 among the first to fourth alignment marks 521, 522, 523, and 524 or to use one alignment mark 52 as will be described later for correcting the misalignment. May be arbitrarily selected according to the setting of the TCP handler 2.

  When the TCP handler 2 starts the main operation, the pusher stage 4 and the probe card stage 7 move to the registration position registered in the initial setting (step S101). From this point on, it is necessary to correct a slight misalignment caused by the transfer system for each TCP and others. Next, the carrier tape 5 is moved by rotating the main sprocket 35b and the tension sprocket 35a by a predetermined angle, and the first TCP is conveyed to a predetermined position below the suction plate 34 (step S102).

  When the TCP is conveyed to the lower side of the suction plate 34, the servo motor 31 of the pusher unit 3 is driven to move the suction plate 34 downward through the pusher main body 33. Here, since the tension sprocket 35a applies a predetermined tension to the carrier tape 5 by applying a torque in the direction opposite to the traveling direction of the carrier tape 5, the carrier tape 5 is in a state in which there is no slack, and the carrier tape 5 The positional accuracy of the tape 5 is improved. The suction plate 34 sucks the carrier tape 5 to hold and fix the TCP, and then descends to the photographing position (step S103).

  Next, the second camera 6b moves to a position corresponding to the first alignment mark 521 related to the first TCP on the carrier tape 5 by the camera stage 61, and tries image recognition of the first alignment mark 521. (Step S104). When the image of the first alignment mark 521 can be recognized (step S105-Yes), the second camera 6b captures the first alignment mark 521 (step S106) and performs image processing on the obtained image data. Send to device.

  Subsequently, the second camera 6b is moved to a position corresponding to the second alignment mark 522 by the camera stage 61, and tries image recognition of the second alignment mark 522 (step S107). When the image of the second alignment mark 522 can be recognized (step S108—Yes), the second camera 6b captures the second alignment mark 522 (step S109), and the obtained image data is subjected to image processing. Send to device.

  The image processing apparatus calculates an average value of the two alignment marks 52 based on the obtained positional information, and obtains information on the positional deviation (the direction of the positional deviation (X-axis direction, Y-axis direction,. (θ rotation direction) and positional deviation amount ΔD) are obtained by calculation (step S110).

  If the image of the first alignment mark 521 cannot be recognized in step S105 (step S105-No), the second camera 6b is moved to a position corresponding to the second alignment mark 522 by the camera stage 61. Then, the image recognition of the second alignment mark 522 is tried (step S111). When the image of the second alignment mark 522 can be recognized (step S112—Yes), the second camera 6b captures the second alignment mark 522 (step S113) and performs image processing on the obtained image data. Send to device.

  Subsequently, the second camera 6b is moved to a position corresponding to the third alignment mark 523 by the camera stage 61, and tries image recognition of the third alignment mark 523 (step S114). When the image of the third alignment mark 523 can be recognized (step S115—Yes), the process proceeds to step S109.

  If the image of the third alignment mark 523 cannot be recognized in step S115 (step S115-No), the second camera 6b is moved to a position corresponding to the fourth alignment mark 524 by the camera stage 61. Then, the image recognition of the fourth alignment mark 524 is tried (step S116). If the image of the fourth alignment mark 524 can be recognized (step S117—Yes), the process proceeds to step S109.

  If the image of the fourth alignment mark 524 cannot be recognized in step S117 (step S117-No), the TCP handler 2 temporarily stops its operation (step S118). Then, the operator performs predetermined operations such as confirmation of the alignment mark 52, removal of dirt on the alignment mark 52, change of the brightness of light shining on the carrier tape 5, change of setting of the second camera 6b, and the like.

  If the image of the second alignment mark 522 cannot be recognized in step S108 (step S108-No), the second camera 6b is moved to a position corresponding to the third alignment mark 523 by the camera stage 61. Then, the image recognition of the third alignment mark 523 is tried (step S119). If the image of the third alignment mark 523 can be recognized (step S120—Yes), the second camera 6b captures the third alignment mark 523 (step S121), and image processing is performed on the obtained image data. Send to device.

  The image processing apparatus calculates an average value of the two alignment marks 52 based on the obtained positional information, and obtains information on the positional deviation (the direction of the positional deviation (X-axis direction, Y-axis direction,. (θ rotation direction) and positional deviation amount ΔD) are obtained by calculation (step S122).

  If the image of the third alignment mark 523 cannot be recognized in step S120 (step S120-No), the second camera 6b is moved to a position corresponding to the fourth alignment mark 524 by the camera stage 61. Then, the image recognition of the fourth alignment mark 524 is tried (step S123). If the image of the fourth alignment mark 524 can be recognized (step S124-Yes), the process proceeds to step S121.

  If the image of the fourth alignment mark 524 cannot be recognized in step S124 (step S124-No), the TCP handler 2 temporarily stops its operation (step S125).

  If the image of the second alignment mark 522 cannot be recognized in step S112 (step S112-No), the second camera 6b is moved to a position corresponding to the third alignment mark 523 by the camera stage 61. Then, the image recognition of the third alignment mark 523 is tried (step S126). When the image of the third alignment mark 523 can be recognized (step S127-Yes), the second camera 6b captures the third alignment mark 523 (step S128) and performs image processing on the obtained image data. Send to device.

  Subsequently, the second camera 6b is moved to a position corresponding to the fourth alignment mark 524 by the camera stage 61, and tries to recognize the image of the fourth alignment mark 524 (step S129). When the image of the fourth alignment mark 524 can be recognized (step S130-Yes), the second camera 6b captures the fourth alignment mark 524 (step S131), and image processing is performed on the obtained image data. Send to device.

  The image processing apparatus calculates an average value of the two alignment marks 52 based on the obtained positional information, and obtains information on the positional deviation (the direction of the positional deviation (X-axis direction, Y-axis direction,. (θ rotation direction) and positional deviation amount ΔD) are obtained by calculation (step S132).

  When the image of the third alignment mark 523 could not be recognized at step S127 (step S127-No), and when the image of the fourth alignment mark 524 could not be recognized at step S130 (step S130-No). In step S133, the TCP handler 2 temporarily stops its operation.

  In the above example, when the image of at least two alignment marks 52 cannot be recognized, the operation of the TCP handler 2 is temporarily stopped. However, the present invention is not limited to this. If only the image of one alignment mark 52 can be recognized even if the image of the alignment mark 52 cannot be recognized, the positional deviation information for the TCP probe 81 is obtained based on the position information of the one alignment mark 52. You may make it ask. This operation may be arbitrarily selected by setting the TCP handler 2.

[Until misalignment calculation-Use one alignment mark]
Next, a description will be given of a case where positional deviation correction is performed using one alignment mark 52 among the first to fourth alignment marks 521, 522, 523, and 524.

  Steps S201 to S203 are the same as steps S101 to S103. After the operation of step S203, the second camera 6b is moved to a position corresponding to the first alignment mark 521 related to the first TCP on the carrier tape 5 by the camera stage 61, and the first alignment mark 521 is moved. Image recognition is tried (step S204). When the image of the first alignment mark 521 can be recognized (step S205—Yes), the second camera 6b captures the first alignment mark 521 (step S206), and the obtained image data is subjected to image processing. Send to device.

  Based on the obtained positional information of one alignment mark 52, the image processing apparatus obtains positional deviation information (positional deviation direction (X-axis direction / Y-axis direction) and positional deviation amount ΔD) with respect to the TCP probe 81. Obtained by calculation (step S207).

  If the image of the first alignment mark 521 cannot be recognized in step S205 (step S205—No), the second camera 6b is moved to a position corresponding to the second alignment mark 522 by the camera stage 61. Then, the image recognition of the second alignment mark 522 is tried (step S208). If the image of the second alignment mark 522 can be recognized (step S209—Yes), the second camera 6b captures the second alignment mark 522 (step S210), and image processing is performed on the obtained image data. Send to device. Then, the image processing apparatus executes step S207.

  When the image of the second alignment mark 522 cannot be recognized in step S209 (step S209-No), the second camera 6b is moved to a position corresponding to the third alignment mark 523 by the camera stage 61. Then, the image recognition of the third alignment mark 523 is tried (step S211). When the image of the third alignment mark 523 can be recognized (step S212—Yes), the second camera 6b captures the third alignment mark 523 (step S213) and performs image processing on the obtained image data. Send to device. Then, the image processing apparatus executes step S207.

  If the image of the third alignment mark 523 cannot be recognized in step S212 (step S212—No), the second camera 6b is moved to a position corresponding to the fourth alignment mark 524 by the camera stage 61. Then, the image recognition of the fourth alignment mark 524 is tried (step S214). If the image of the fourth alignment mark 524 can be recognized (step S215-Yes), the second camera 6b captures the fourth alignment mark 524 (step S216) and performs image processing on the obtained image data. Send to device. Then, the image processing apparatus executes step S207.

  If the image of the fourth alignment mark 524 cannot be recognized in step S215 (step S215-No), the TCP handler 2 temporarily stops the operation (step S217).

  In addition, although said example demonstrated the case where the position coordinate of the 1st-4th alignment mark 521,522,523,524 was registered, the position of the 1st-2nd alignment mark 521,522 is demonstrated. When only the coordinates are registered, the operation of the TCP handler 2 is temporarily stopped at the stage where the image of the second alignment mark 522 could not be recognized in step S209, and the first to third alignment marks 521, 522 When only the position coordinates of 523 are registered, the operation of the TCP handler 2 is temporarily stopped when the image of the third alignment mark 523 cannot be recognized in step S212.

[After misalignment calculation]
First, in the positional deviation amount ΔD obtained in step S110, step S122, step S132, or step S207, when it is determined that the positional deviation correction is not necessary (step S301-No), the process proceeds to step S303 described later. skip. This skip can improve test throughput. Secondly, when it is determined that the positional deviation correction is necessary (step S301-Yes), the pusher stage 4 is driven to perform the positional deviation correction (step S302).

  To align the position by correcting the displacement, the servomotors 41a, 41b, 41c of the pusher stage 4 are driven to move the top table 48 and eventually the pusher unit 3, and the carrier tape 5 sucked by the suction plate 34 is used. A method is used in which X is moved in the X axis-Y axis direction and / or rotated around the vertical axis. The servo motors 711, 722, and 732 of the probe card stage 7 are driven to move the X base 72, the Y base 73, or the card ring 735, and the probe card 8 is moved in the X axis-Y axis direction and / or around the vertical axis. Although it is possible to use a method of rotating in the (θ rotation direction), the pusher stage 4 can be moved and controlled in a shorter time than the probe card stage 7, and therefore it is advantageous to move the pusher stage 4 from the viewpoint of throughput. It is.

  Next, the servo motor 31 of the pusher unit 3 is driven to move the suction plate 34 further downward in the Z-axis direction via the pusher main body 33. The suction plate 34 that has sucked the carrier tape 5 descends to the contact position and presses the TCP against the probe 81 of the probe card 8 (step S303).

  After the pressing, if desired, the suction plate 34 may be slightly swayed (scribed) back and forth and left and right, or ultrasonic vibration may be applied to the suction plate 34 as desired. Further, at this stage, if desired, a process for obtaining a slight contact deviation amount at the time of contact with respect to the positional deviation correction amount at the time of non-contact by photographing the positional relationship between the probe 81 and the test pad in the contact state is added. May be. Since this additional processing can be performed in parallel with the test execution, the throughput is not affected. Further, by adding the obtained minute contact deviation amount to the positional deviation correction amount after the next time, a more stable contact can be realized.

  When the TCP test pad contacts the probe 81, first, a minute direct current is applied to each test pad, and the presence / absence and voltage value of the current flowing through the TCP internal circuit (for example, a protective diode) are measured. It is confirmed whether or not the test pad is in electrical contact and whether or not there is a short between adjacent pins (contact check) (step S304). When a contact failure occurs in the contact check, the suction plate 34 is slightly swung (scribed) back and forth, left and right in the contact state, ultrasonic vibration is applied to the suction plate 34, or the pusher main body 33. Move up and down to perform re-contact operation. If contact failure occurs again due to this, it is determined that the TCP is defective. Here, it is assumed that it is difficult to confirm whether or not the contact resistance value at the time of contact is larger than an allowable resistance value that can be normally tested.

  Thereafter, as a test execution, a test signal is applied from the tester body to the TCP through the test head 10, and a response signal read from the TCP is sent to the tester body through the test head 10 (step S305). As a result, the performance, function, etc. of the TCP are tested, and the non-defective product, defective product, rank classification, etc. are determined for the TCP. When the TCP determined to be non-defective is transported to the position of the mark punch 26a, the mark punch 26a is given a non-defective mark, and the TCP determined to be defective is transported to the position of the reject punch 26b. When it is done, it will be punched out by the reject punch 26b. The mark punch 26a and the reject punch 26b may not be operated depending on the operation mode.

  If it is determined in the test execution that a contact failure has occurred (step S306-Yes), first, the operator should adjust the position of the probe 81 while watching the monitor by manual operation. (Step S307a).

  Secondly, a retest can be automatically performed (step S307b). In this case, the test pad number information related to the determination of the defective product is received from the tester body, and the amount of misalignment is obtained for the test pad corresponding to the information and the surrounding test pads, and the obtained amount of misalignment is normal. If the contact region is out of contact, the contactor is once brought into a non-contact state, the pusher stage 4 is moved in a direction for correcting the positional deviation, and then brought into a contact state and the test is executed again. By this retest, TCP may be judged as a non-defective product. In addition, the extraction of the test pad which may be in contact failure is obtained based on the test result and the result of the contact check.

  When the TCP test is completed as described above, the servo motor 31 of the pusher unit 3 is driven, and the suction plate 34 is moved in the Z-axis upward direction via the pusher main body 33 to be in the initial state (step S308). . When the probe card stage 7 is applied to misalignment correction, it is returned to the registered position. Then, the suction plate 34 stops the suction of the carrier tape 5 to release the carrier tape 5 and further moves in the Z-axis upward direction (step S309).

  Thereafter, the TCP handler 2 determines whether or not the tested TCP is the last device (step S310). If it is determined that the TCP is the last device (step S310-Yes), the main operation is performed. finish. On the other hand, if it is determined that it is not the last device (step S310-No), the process returns to step S102.

  According to the TCP handler 2 operating as described above, even when the image recognition of some alignment marks 52 on the carrier tape 5 is not possible, the image recognition of other alignment marks 52 may be possible. Compared with the case where only a single alignment mark 52 is recognized, the frequency of stopping the test apparatus can be reduced and the test throughput can be improved.

  Further, in the case of recognizing two alignment marks 52 from the first to fourth alignment marks 521, 522, 523, and 524, by using the average value of the position information of the two alignment marks 52, The positioning of the TCP with respect to the probe 81 can be made more accurate, and by acquiring the position information of the two alignment marks 52, it is possible to correct the positional deviation in the θ rotation direction.

  The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

  For example, a plurality of TCPs are simultaneously subjected to the test, and the first to fourth alignment marks 521, 522, 523, and 524 are provided for the plurality of TCPs, and the first to fourth alignment marks are performed in the same manner as described above. You may make it perform image recognition of 521,522,523,524.

  Further, instead of the alignment mark 52, other usable graphics, such as other marks, specific test pads of TCP, corners of the package, and the like may be image-recognized.

  In the case of an apparatus configuration including at least one setting condition changing means among setting conditions (light quantity, emission color) of a light source used for illumination for the carrier tape 5 and camera setting conditions (light receiving sensitivity, etc.) May add processing for changing setting conditions and retrying. That is, in each step where the second camera 6b tries to recognize the image of the alignment mark 52, if the image of the alignment mark 52 cannot be recognized, a process for changing the setting condition and trying image recognition again is added. May be.

  In steps S133 and S217 described above, the TCP handler 2 temporarily stops its operation, but the following processing may be added as desired. That is, even when the positional deviation information cannot be obtained, the contact check is performed after the TCP is pressed against the probe 81 in the current state without the positional deviation correction. As a result, information on the result of contact normality and contact failure is obtained. When the contact is normal, the test operation can be continued as it is, and the frequency of suspension can be reduced, so that the test throughput can be improved. On the other hand, when a contact failure is detected, the TCP or probe card 8 is moved in the X-axis / Y-axis direction by a desired amount or slightly moved in the binary search form, and the contact check is sequentially executed to perform the best movement. By searching for the position, the position where the contact is normal can be obtained. Accordingly, the test can be continued and the frequency of suspension can be reduced, so that the test throughput can be improved.

The TCP handling device according to the present invention is effective for improving the throughput of the test and performing the TCP test efficiently.

Claims (9)

A plurality of carrier tapes each having a plurality of TCPs are conveyed, the carrier tapes are pressed against contact parts electrically connected to the test head, and a plurality of TCP external terminals are brought into contact with the contact terminals of the contact parts. A TCP handling device capable of sequentially attaching the TCPs to the test,
It comprises an imaging device capable of recognizing a specific figure having a predetermined shape on the carrier tape and acquiring position information of the specific figure,
When specifying the position information of the TCP to be tested, if the image recognition of the first specific figure related to the TCP is tried and the image recognition of the first specific figure cannot be performed, the other information related to the TCP A TCP handling device characterized by trying image recognition of a specific figure.   The image recognition is sequentially tried for a plurality of specific figures related to the TCP so that any one of the specific figures can be recognized when the first specific figure cannot be recognized. Item 2. The TCP handling device according to Item 1.   The positional information of the specific figure is obtained by image recognition of the specific figure, the positional deviation information for the contact part of the TCP to be tested is specified based on the acquired positional information of the specific figure, and the specified positional deviation information The TCP handling apparatus according to claim 1, wherein a positional deviation correction with respect to the contact portion of the TCP is performed based on the TCP.   The TCP handling device further includes a tape moving device capable of minutely moving a carrier tape pressed against the contact portion and / or a contact portion moving device capable of minutely moving the contact portion. 4. The TCP handling device according to claim 3, wherein a displacement of the TCP with respect to the contact portion is corrected by a moving device and / or a contact portion moving device. A plurality of carrier tapes each having a plurality of TCPs are transported, the carrier tapes are pressed against contact parts electrically connected to the test head, and a plurality of TCP external terminals are brought into contact with the contact terminals of the contact parts. A TCP handling device capable of sequentially attaching the TCPs to the test,
It comprises an imaging device capable of recognizing a specific figure having a predetermined shape on the carrier tape and acquiring position information of the specific figure,
A TCP handling apparatus, wherein, when specifying the position information of a TCP to be tested, image recognition is tried for a plurality of specific figures related to the TCP so that two or more specific figures can be recognized.   Based on the image recognition of the specific figure, position information of two or more specific figures is acquired, an average value of the acquired position information of the two or more specific figures is calculated, and based on the calculated average value of the position information of the specific figure 6. The method according to claim 5, further comprising: identifying misalignment information for the TCP contact portion to be tested, and performing misalignment correction for the TCP contact portion based on the identified misalignment information. TCP handling device.   Position information of two or more specific figures is acquired by image recognition of the specific figure, and based on the acquired position information of the two or more specific figures, a positional deviation amount about the vertical axis with respect to the contact portion of the TCP to be tested The TCP handling apparatus according to claim 5, wherein the TCP is misaligned with respect to the contact portion based on the misalignment amount about the identified vertical axis.   The TCP handling device further includes a tape moving device capable of minutely moving a carrier tape pressed against the contact portion and / or a contact portion moving device capable of minutely moving the contact portion. 8. The TCP handling device according to claim 6, wherein a displacement of the TCP with respect to the contact portion is corrected by a moving device and / or a contact portion moving device. 9. When image recognition of two or more specific figures is not possible,
Without correcting the position of the TCP, the carrier tape is pressed against the contact part, the external terminal of the TCP is brought into contact with the contact terminal of the contact part,
6. The TCP handling apparatus according to claim 5, wherein a contact check is executed to confirm that all external terminals of the TCP are connected to corresponding contact terminals of the contact portion.

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