JPS635640B2 - - Google Patents
Info
- Publication number
- JPS635640B2 JPS635640B2 JP21317085A JP21317085A JPS635640B2 JP S635640 B2 JPS635640 B2 JP S635640B2 JP 21317085 A JP21317085 A JP 21317085A JP 21317085 A JP21317085 A JP 21317085A JP S635640 B2 JPS635640 B2 JP S635640B2
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- sliding
- crystal plate
- solid lubricant
- disulfide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 19
- 239000000843 powder Substances 0.000 claims description 14
- 239000000314 lubricant Substances 0.000 claims description 12
- 239000007787 solid Substances 0.000 claims description 12
- 238000003776 cleavage reaction Methods 0.000 claims description 11
- 230000007017 scission Effects 0.000 claims description 11
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical group S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 10
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 10
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 claims description 4
- ITRNXVSDJBHYNJ-UHFFFAOYSA-N tungsten disulfide Chemical group S=[W]=S ITRNXVSDJBHYNJ-UHFFFAOYSA-N 0.000 claims description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 10
- 229910052717 sulfur Inorganic materials 0.000 description 10
- 239000011593 sulfur Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 4
- 238000005461 lubrication Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16N—LUBRICATING
- F16N15/00—Lubrication with substances other than oil or grease; Lubrication characterised by the use of particular lubricants in particular apparatus or conditions
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Lubricants (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は高真空装置内等に用いられ、固体潤滑
手段を用いた摺動装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a sliding device that is used in a high vacuum device or the like and uses solid lubricating means.
［従来の技術］
真空装置内に用いられる２物体間の摺動面の潤
滑には、液体潤滑材を用いることができないた
め、従来二硫化モリブデン等の固体潤滑材の微粉
末を潤滑面に介在させるようにしている。[Prior art] Since liquid lubricants cannot be used to lubricate the sliding surfaces between two objects used in vacuum equipment, conventionally fine powder of solid lubricants such as molybdenum disulfide has been interposed on the lubricated surfaces. I try to let them do it.
第４図は、このような従来の摺動装置を説明す
るためのもので、図中１はアルミニウムより成る
固定体であり、図中２は固定体の上に配置された
アルミニウムより成る移動体である。固定体１及
び移動体２が配置される空間は図示外の真空ポン
プによる排気により高真空に維持されている。こ
れら両者の摺動面の間には二硫化モリブデンの微
粉末３ａ，３ｂ，３ｃ，３ｄ，３ｅ，３ｆ……が
無数配置されている。 FIG. 4 is for explaining such a conventional sliding device, in which 1 is a fixed body made of aluminum, and 2 in the figure is a movable body made of aluminum placed on the fixed body. It is. The space in which the fixed body 1 and the movable body 2 are arranged is maintained at a high vacuum level by being evacuated by a vacuum pump (not shown). A countless number of fine molybdenum disulfide powders 3a, 3b, 3c, 3d, 3e, 3f, . . . are arranged between these two sliding surfaces.
二硫化モリブデンは、一対の硫黄（Ｓ）の原子
層の間にモリブデン（Mo）の原子層が挟まれた
かたちで多数の層が重ねられて構成されており、
硫黄原子層と硫黄原子層と間の結合が弱いため、
常に硫黄原子層が表面に現われるかたちでの劈開
性を有している。第４図において符号Ｕは硫黄原
子面（劈開の方向）を示している。 Molybdenum disulfide is composed of many layers, with a molybdenum (Mo) atomic layer sandwiched between a pair of sulfur (S) atomic layers.
Because the bond between the sulfur atomic layers is weak,
It has cleavage properties such that a layer of sulfur atoms always appears on the surface. In FIG. 4, the symbol U indicates the sulfur atomic plane (cleavage direction).
このような従来装置により、移動体２を外力に
より固定体１に沿つて移動させると、微粉末３
ａ，３ｂ，３ｃ，……が潤滑材として働き、比較
的滑らかに移動体２を移動させることができる。 With such a conventional device, when the movable body 2 is moved along the fixed body 1 by external force, the fine powder 3
a, 3b, 3c, . . . act as lubricants, allowing the movable body 2 to move relatively smoothly.
ところで、このような潤滑を担うメカニズムは
以下のように分類される。 By the way, the mechanisms responsible for such lubrication are classified as follows.
第４図の微粉末３ｃのように微粉末の回転に
よるもの
第４図の微粉末３ａ，３ｄのように微粉末内
の硫黄原子面と硫黄原子面間のすべり（以下粒
内すべりと称す）によるもの
粒内すべりが更に進んだ劈開によるもの
第４図の微粉末３ｅ，３ｆ間のように粒と粒
の間のすべり（以下粒間すべりと称す）による
もの
さて、二硫化モリブデン等の固体潤滑材の硫黄
原子面（劈開面）は金属面に吸着し易い性質があ
るため、回転の結果、硫黄原子面が金属面に吸着
した状態のものが多くなる。その結果、従来装置
における潤滑は、粒間すべりも無いわけではない
が主に粒内すべりと劈開によつて担われる。 Slip between sulfur atomic planes within the fine powder (hereinafter referred to as intragranular slip) Due to cleavage due to further intragranular slippage Due to slippage between grains (hereinafter referred to as intergranular slippage) as shown between fine powders 3e and 3f in Figure 4 Now, solids such as molybdenum disulfide Since the sulfur atomic planes (cleavage planes) of the lubricant have the property of being easily adsorbed to metal surfaces, as a result of rotation, the sulfur atomic planes often become adsorbed to the metal surfaces. As a result, lubrication in conventional devices is primarily provided by intragranular slippage and cleavage, although intergranular slippage is not absent.
［発明が解決しようとする問題点］
そのため、従来の装置においては、潤滑面の動
摩擦係数は0.04〜0.05程度がせいぜいであり、充
分円滑に移動体２を固定体１に対して摺動させる
ことはできなかつた。[Problems to be Solved by the Invention] Therefore, in conventional devices, the coefficient of dynamic friction of the lubricated surface is at most about 0.04 to 0.05, and it is difficult to slide the movable body 2 against the fixed body 1 sufficiently smoothly. I couldn't.
更に又、移動体２が固定体１に対して摺動する
際に微粉末の一部が移動体２又は固定体１の摺動
面に擦れるため、これらの面に傷がつき、このよ
うな摺動面を有する装置の耐久年数を減じる結果
になつた。 Furthermore, when the movable body 2 slides against the fixed body 1, some of the fine powder rubs against the sliding surfaces of the movable body 2 or the fixed body 1, causing scratches on these surfaces. This resulted in a reduction in the lifespan of equipment having sliding surfaces.
本発明は、このような従来の欠点を解決し、摺
動面の円滑性を向上でき、摺動面への傷の発生も
低減できる摺動装置を提供することを目的として
いる。 SUMMARY OF THE INVENTION An object of the present invention is to provide a sliding device that can solve these conventional drawbacks, improve the smoothness of the sliding surface, and reduce the occurrence of scratches on the sliding surface.
［問題点を解決するための手段］
このような目的を達成するため、本発明は対向
面を摺動させて相対的に運動可能な第１、第２の
物体と、該第１、第２の物体間に介在する二硫化
物の固体潤滑材を備えた装置において、該第１の
物体の第２の物体に対向する面には劈開面を第２
の物体に対向させて該固体潤滑材の単結晶板が取
り付けられており、該第２の物体の第１の物体に
対向する面にはいずれも劈開面を第１の物体に対
向させて該固体潤滑材の微粉末あるいは単結晶板
が取り付けられていることを特徴としている。[Means for Solving the Problems] In order to achieve such an object, the present invention includes first and second objects that are movable relative to each other by sliding opposing surfaces; In a device including a disulfide solid lubricant interposed between objects, a cleavage plane is formed on a surface of the first object facing the second object.
A single crystal plate of the solid lubricant is attached to face the object, and the cleavage plane of the second object faces the first object. It is characterized by the attachment of fine powder or single crystal plates of solid lubricant.
［実施例］
以下、図面に基づき本発明の実施例を詳述す
る。[Example] Hereinafter, an example of the present invention will be described in detail based on the drawings.
第１図は本発明の一実施例を詳述するためのも
ので、図中第４図と同一の構成要素に対しては同
一番号が付されている。 FIG. 1 is for explaining in detail one embodiment of the present invention, and the same components as in FIG. 4 are given the same numbers.
第４図において示した従来と異なり、固定体１
の表面には、縦横５mmで厚さ50μｍに劈開した二
硫化モリブデンの単結晶板４ａが取り付けられて
いる。固定体１の上面図を示す第２図から明らか
なように、固定体１の移動体２側の表面には、単
結晶板４ａの他に単結晶板４ｂ，４ｃ，４ｄが取
り付けられている。前述したように、二硫化モリ
ブデンの劈開面は吸着性があるため、単結晶板４
等の取り付けは固定体１の表面をアセトンにより
拭いて清浄にし、単結晶板４等をこの面に押し付
けることによつて行なわれる。 Unlike the conventional one shown in Fig. 4, the fixed body 1
A molybdenum disulfide single crystal plate 4a, which has been cleaved to a size of 5 mm in length and width and 50 μm in thickness, is attached to the surface of the plate. As is clear from FIG. 2 showing a top view of the fixed body 1, on the surface of the fixed body 1 on the movable body 2 side, in addition to the single crystal plate 4a, single crystal plates 4b, 4c, and 4d are attached. . As mentioned above, the cleavage plane of molybdenum disulfide has adsorption properties, so the single crystal plate 4
The attachment is carried out by wiping the surface of the fixed body 1 clean with acetone and pressing the single crystal plate 4 etc. onto this surface.
一方、表面が酸化によつて影響を受けていない
劈開直後の二硫化モリブデンの単結晶板を用意
し、この単結晶板により移動体２の外側表面を擦
る。その結果、移動体２の表面には単結晶板より
はがれ落ちた二硫化モリブデンの微粉末５ａ，５
ｂ，５ｃ，５ｄ……が硫黄原子価を固定体１側に
向けて吸着される。 On the other hand, a single-crystal plate of molybdenum disulfide immediately after cleavage, the surface of which has not been affected by oxidation, is prepared, and the outer surface of the movable body 2 is rubbed with this single-crystal plate. As a result, the molybdenum disulfide fine powder 5a, 5 that has peeled off from the single crystal plate is on the surface of the moving body 2.
b, 5c, 5d... are adsorbed with their sulfur valences directed toward the fixed body 1 side.
このような構成において、固定体１と移動体２
が配置されている空間を高真空に排気し、移動体
２を固定体１上に載置すると、各微粉末５ａ，５
ｂ，５ｃ，５ｄ，……のいずれかの硫黄原子面と
単結晶板４の硫黄原子面が対向して接触し合う。
そこで、移動体２を移動させれば、微粉末５ａ，
５ｂ，５ｃ，５ｄ，……のいずれかの硫黄原子面
と単結晶板４の硫黄原子面間のすべりにより移動
体１が移動することになる。 In such a configuration, the fixed body 1 and the movable body 2
When the space where is placed is evacuated to a high vacuum and the movable body 2 is placed on the fixed body 1, each fine powder 5a, 5
The sulfur atomic plane of any one of b, 5c, 5d, . . . and the sulfur atomic plane of the single crystal plate 4 face each other and come into contact with each other.
Therefore, if the moving body 2 is moved, the fine powder 5a,
5b, 5c, 5d, . . . and the sulfur atomic plane of the single crystal plate 4, the moving body 1 moves.
ところで、前述した潤滑を担う各メカニズムの
うち、粒間すべりは最も低エネルギーで行なうこ
とができるが、上述した装置においてはこの粒間
すべりが支配的となるため、移動体２の移動に伴
う動摩擦係数を第３図に示すように0.027程度ま
で低減させることができ、潤滑性を向上させるこ
とができる。尚、第３図において、横軸は移動に
伴う時間を表わしている。 By the way, among the mechanisms responsible for lubrication mentioned above, intergranular sliding can be performed with the lowest energy, but in the above-mentioned device, this intergranular sliding is dominant, so the kinetic friction accompanying the movement of the moving body 2 The coefficient can be reduced to about 0.027 as shown in FIG. 3, and the lubricity can be improved. In FIG. 3, the horizontal axis represents time associated with movement.
又、微粉末の回転等が生ぜず、粒間すべりによ
る円滑な摺動が可能になるため、摺動面に生じる
傷を低減させることができ、装置の寿命を長くす
ることができる。 Further, since rotation of the fine powder does not occur and smooth sliding is possible due to intergranular sliding, scratches occurring on the sliding surface can be reduced and the life of the device can be extended.
尚、上述した実施例は本発明の一実施例に過ぎ
ず、幾多の他の態様で実施することができる。 It should be noted that the embodiment described above is only one embodiment of the present invention, and the present invention can be implemented in many other ways.
例えば、固定体に４個の単結晶板を取り付けた
が、この取り付け個数は必要に応じて適宜に増減
させて良い。 For example, although four single crystal plates are attached to the fixed body, the number of attached single crystal plates may be increased or decreased as necessary.
又、単結晶板を固定体の代わりに移動体に取り
付けるようにしても良い。 Furthermore, the single crystal plate may be attached to the movable body instead of the fixed body.
又、固定体に対する移動体のストロークが短く
てすむ場合には、移動体の表面にも微粉末の代り
に単結晶板を取り付けるようにしても良い。 Furthermore, if the stroke of the movable body relative to the fixed body is short, a single crystal plate may be attached to the surface of the movable body instead of the fine powder.
又、上述した実施例は、固定床に対して平行に
移動体を移動させる場合に本発明を適用した場合
について例示したが、固定体に対して移動体を回
転させる場合等にも本発明は同様に適用できる。 Furthermore, although the above-mentioned embodiments illustrate the case where the present invention is applied to the case where the movable body is moved parallel to the fixed bed, the present invention can also be applied to the case where the movable body is rotated with respect to the fixed bed. The same applies.
更に又、上述した実施例においては、固体潤滑
材として二硫化モリブデンを用いたが、二硫化タ
ングステン等を用いる場合にも本発明は同様に適
用できる。 Furthermore, in the above embodiments, molybdenum disulfide was used as the solid lubricant, but the present invention can be similarly applied to cases where tungsten disulfide or the like is used.
［発明の効果］
上述した説明から明らかなように、本発明に基
づく装置によれば、潤滑性を向上させることがで
きると共に、面が摺動する際の引掻き傷の発生を
押えることができる。[Effects of the Invention] As is clear from the above description, according to the device based on the present invention, it is possible to improve the lubricity and to suppress the occurrence of scratches when the surface slides.
第１図は本発明の一実施例を示すための図、第
２図は第１図の固定体の上面を示すための図、第
３図は本発明に基づく摺動装置の動摩擦係数の測
定結果を示すための図、第４図は従来装置を示す
ための図である。
１：固定体、２：移動体、３ａ，３ｂ，３ｃ，
３ｄ，３ｅ，……５ａ，５ｂ，５ｃ，５ｄ……：
微粉末、４ａ，４ｂ，４ｃ，４ｄ：単結晶板。
FIG. 1 is a diagram showing an embodiment of the present invention, FIG. 2 is a diagram showing the top surface of the fixed body in FIG. 1, and FIG. 3 is a measurement of the coefficient of dynamic friction of the sliding device based on the present invention. FIG. 4 is a diagram showing the results, and FIG. 4 is a diagram showing a conventional device. 1: Fixed body, 2: Moving body, 3a, 3b, 3c,
3d, 3e,...5a, 5b, 5c, 5d...:
Fine powder, 4a, 4b, 4c, 4d: single crystal plate.
Claims (1)
１、第２の物体と、該第１、第２の物体間に介在
する二硫化物の固体潤滑材を備えた装置におい
て、該第１の物体の第２の物体に対向する面には
劈開面を第２の物体に対向させて該固体潤滑材の
単結晶板が取り付けられており、該第２の物体の
第１の物体に対向する面にはいずれも劈開面を第
１の物体に対向させて該固体潤滑材の微粉末ある
いは単結晶板が取り付けられていることを特徴と
する摺動装置。 ２ 該二硫化物の固体潤滑材は二硫化モリブデン
である特許請求の範囲第１項記載の摺動装置。 ３ 該二硫化物の固体潤滑材は二硫化タングステ
ンである特許請求の範囲第１項記載の摺動装置。[Claims] 1. A device comprising first and second objects that are movable relative to each other by sliding opposing surfaces, and a disulfide solid lubricant interposed between the first and second objects. In the device, a single crystal plate of the solid lubricant is attached to a surface of the first object facing the second object with the cleavage plane facing the second object, and the second object A sliding device characterized in that a fine powder or a single crystal plate of the solid lubricant is attached to each surface facing the first object with the cleavage plane facing the first object. 2. The sliding device according to claim 1, wherein the disulfide solid lubricant is molybdenum disulfide. 3. The sliding device according to claim 1, wherein the disulfide solid lubricant is tungsten disulfide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21317085A JPS6272997A (en) | 1985-09-26 | 1985-09-26 | Slide device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21317085A JPS6272997A (en) | 1985-09-26 | 1985-09-26 | Slide device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6272997A JPS6272997A (en) | 1987-04-03 |
| JPS635640B2 true JPS635640B2 (en) | 1988-02-04 |
Family
ID=16634714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21317085A Granted JPS6272997A (en) | 1985-09-26 | 1985-09-26 | Slide device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6272997A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1411109A1 (en) | 2002-10-17 | 2004-04-21 | Juki Corporation | Solid lubricant on the basis of RBC powder |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04117806U (en) * | 1991-03-30 | 1992-10-21 | 極東開発工業株式会社 | Garbage pushing device for garbage collection vehicle |
| ITMN20050052A1 (en) * | 2005-08-10 | 2007-02-11 | Weightpack Srl | CAPPING HEAD |
-
1985
- 1985-09-26 JP JP21317085A patent/JPS6272997A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1411109A1 (en) | 2002-10-17 | 2004-04-21 | Juki Corporation | Solid lubricant on the basis of RBC powder |
| US7258926B2 (en) | 2002-10-17 | 2007-08-21 | Juki Corporation | Solid lubricant and sliding members |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6272997A (en) | 1987-04-03 |
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