JP2532426B2 - Solid lubrication bearing device - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid lubrication bearing device used in a special environment where lubrication by grease or introduction of gas or fluid is not possible.

2. Description of the Related Art In recent years, solid lubrication bearings have been widely used in various fields such as vacuum equipment, aerospace equipment, equipment used under high temperature or extremely low temperature conditions, and equipment used under clean atmosphere. In particular, semiconductor manufacturing equipment and peripheral equipment therefor tend to be used more and more in the future, and problems relating to the reliability of bearings are beginning to recur.

An example of the above-described conventional solid lubrication bearing will be described below with reference to the drawings.

FIG. 14 is a schematic partial sectional view of a conventional solid lubrication bearing,
FIG. 16 and FIG. 16 are sectional views of one ball bearing of a conventional solid lubrication bearing, and FIG. 17 is a partial perspective view of a cross roller bearing. In FIG. 14, 1 is a rolling element, 2 is a cage for arranging the rolling elements 1 in alignment, 3 is a guide for providing a rolling surface of the rolling element 1, 4 is a guide 3 between the guide 3 and the rolling element 1. It is a solid lubricant film formed by closely adhering to it. 15th
In FIG. 16 and FIG. 16, 5 is a ball, 6 and 7 are cages, and 8
Are screws for fastening the cages 6, 7, and 9 and 10 are an inner ring and an outer ring to which the solid lubricant coating 4 is attached. Further, in FIG. 17, 11 is a roller, 12 is a retainer, 13 and 14 are guides, and 15 is a rolling surface on which the solid lubricant coating 4 adheres and the roller 11 rolls.

The operation of the solid lubricating bearing configured as described above will be described below.

First, in FIG. 14, if there is no slippage when the rolling element 1 rotates in the A direction, the guide 3 relatively moves in the B direction. At that time, smooth movement is obtained by the action of the solid lubricant coating 4 between the rolling element 1 and the guide 3. This principle is also applied to the solid lubrication bearings shown in FIGS. 16 and 17, and the inner ring 9 or the outer ring 10 is C or D in FIG.
The guide 13 or guide in Fig. 17
14 slides linearly in the E or F direction.

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, in the above-mentioned configuration, the solid lubricant coating 4 is peeled and worn due to friction, and at that time, the re-adhesion property is deteriorated due to the solid lubricant falling out of the bearing. I woke up and developed into great wear of the guide 3, which is the base. Therefore, the distance G between the center of the rolling element 1 and the guide 3 shown in FIG. 14 is constantly reduced, and the accuracy cannot be maintained.

In view of the above problems, the present invention provides a solid lubrication bearing having improved lubricity and accompanying improvement in accuracy maintaining ability.

Means for Solving the Problems In order to achieve the above object, a solid lubrication bearing device of the present invention is a cylindrical rolling element that slides in contact with a solid lubricant pressed against an elastic body, and the rolling element. The guide is in line contact with the surface of the guide in line contact with the rolling element, and a groove filled with a solid lubricant is formed so as to converge in the moving direction of the rolling element.

Action The action of the present invention is to continuously supply the solid lubricant and the solid lubricant in the groove and the groove shape to generate a wedge effect due to the ductility and malleability of the solid lubricant, and further improve the lubricating performance. On the other hand, since the thick solid lubricating coating does not extend over the entire contact surface, the accuracy can be improved by contacting the hard surface via the always thin lubricating coating.

Example Hereinafter, a first example of the present invention will be described with reference to the drawings. FIG. 1 is a schematic partial cross-sectional view of a solid lubrication bearing of the first invention of the present invention, and FIGS. 2 and 3 are the first part of the present invention.
FIG. 4 is a cross-sectional view of a ball bearing as a solid lubrication bearing device of the above embodiment, FIG. 4 is a partial perspective view of a cross roller bearing of a second embodiment of the present invention, and FIGS. It is sectional drawing of a container. In FIG. 1, 16 is a rolling element that is a first object that performs relative motion, 17 is an elastic body, 18 is a solid lubricant that is pressed against the rolling element 16 by the elastic body 17, and 19 is a rolling element 16 and an elastic body. 17, a cage containing the solid lubricant 18, 20 is a guide that is the second object that provides the rolling surface of the rolling element 16 and performs relative movement, and 21 is the guide 20 and the rolling element 16
It is a solid lubricant film formed in close contact with and on the guide 20. In FIGS. 2 and 3, 22 is a ball which is a rolling element, 23 is a leaf spring which is an elastic body, 24 and 25 are retainers, 26 is a screw for fixing the retainers 24 and 25, and 27 is a retainer 24. , 25, screw 26
Fixed lubricant by 28, 28 is a guide groove formed by cages 24, 25, 29 is a solid lubricant pressed against ball 22 by leaf spring 23 along guide groove 28, and 30 and 31 are inner and outer rings. , 32 are solid lubricating coatings. 4, 5 and 6
In the figure, 33 is a roller which is a rolling element, 34 is a retainer, 3
5, 36 is a guide, 37 is a solid lubricant film, 38 is a rolling surface on which the solid lubricant film 37 is adhered and the roller 33 rolls, 39 is a leaf spring which is an elastic body, and 40 is a guide groove of the cage 34. , 41 is a guide plate having a guide groove 40, 42 is a cover, 43 is a fixed pin, 44 is a solid lubricant fixed by the fixed pin 43 in the guide groove 40 of the guide plate 41, and 45 is along the guide groove 40. Solid lubricant pressed against the roller 33 by the leaf spring 39, 46 is the guide plate 41
And a set screw for fixing the cover 42.

The operation of the solid lubrication bearing configured as described above will be described below.

First, in FIG. 1, when the rolling element 16 rotates in the H direction and the slip does not occur, the guide 20 relatively moves in the I direction. At that time, the solid lubricant 18 pressed by the elastic body 17
Are transferred to rolling elements 16 in small amounts, and as a result, rolling elements 16
The solid lubricant can be re-transferred and re-attached to the solid lubricant coating 21. The same applies when the rotation direction and the movement direction are opposite.

2 and 3, when the inner ring or the outer ring 31 is rotated in the J or K direction, the elastic force of the leaf spring 23 similarly presses the solid lubricant 27, 2 along the guide groove 28 against the ball 22.
A small amount of lubricant is continuously supplied from 9 to the ball 22, and re-transferred and re-attached to the solid lubricant film 32.

4 to 6 show a cross roller bearing according to a second embodiment of the present invention.

In FIGS. 4, 5, and 6, the guide 35 or 36 slides linearly in the L or M direction via the roller 33. At that time, the solid lubricant 44, 45 is pressed against the roller 33 along the guide groove 40 by the force of the leaf spring 39, so that the lubricant is continuously supplied to the rolling surface 38 via the roller 33. Done.

As described above, according to each of the above embodiments, the cages 19, 24,
Lubrication is provided by providing the elastic members 17 and the leaf springs 23, 39 with the function of pressing the rolling members 16 of the solid lubricants 18, 27, 29, 44, 45, such as the holes 22 and the rollers 33. The agent can be continuously supplied, the lubricant can be prevented from running out by exchanging the lubricant, and the solid lubricant coatings 21, 32, 37 can be protected from extreme wear.

Next, a third embodiment of the present invention will be described with reference to the drawings. FIG. 7 is a schematic partial sectional view of a solid lubrication bearing according to a third embodiment of the present invention, and FIG. 8 is a plan view of FIG. In FIGS. 7 and 8, 47 is a cylindrical rolling element which is a first object that performs relative motion, 48 is an elastic body, 49 is a cylindrical rolling element, 47 is a solid lubricant pressed by the elastic body 48, 50 Is a cage that contains the cylindrical rolling element 47, the elastic body 48, and the solid lubricant 49, 51 is a guide that is a second object that provides the rolling surface of the cylindrical rolling element 47 and performs relative movement, and 52 is a guide 51. Cylindrical rolling element 47
Between them, a groove is formed on the guide 51, 53 is a solid lubricant filled in the groove 52, and 54 is a hard film formed on a surface other than the groove.

The operation of the solid lubrication bearing configured as described above will be described below.

When the cylindrical rolling element 47 rotates in the N direction, the guide 51 relatively moves in the O direction unless slippage occurs. that time,
A small amount of the solid lubricant 49 pressed by the elastic body 48 is sequentially transferred to the cylindrical rolling element 47, and as a result, the solid lubricant 53 and the hard film 54 are retransferred by the cylindrical rolling element 47. Here, in the groove 52, an excessive amount of lubricant is pushed in the P direction with the movement of the cylindrical rolling element 47, so that a wedge effect is produced.

As described above, according to this embodiment, the retainer 50 has the elastic body 48.
The solid lubricant 49 has a function of pressing the solid lubricant 49 against the cylindrical rolling element 47, and on the other hand, a series V having a shape that converges on the rolling surface of the cylindrical rolling element 47 on the guide 51 in the traveling direction of the cylindrical rolling element 47. By filling the solid lubricant 53 in the V-shaped groove 52 and coating the hard film 54 on the surface other than the surface of the solid lubricant 53, the wedge effect of the groove 52 further improves the lubricity, and
The hard film 54 with high wear resistance allows the bearing accuracy, for example, the 7th
The value of Q in the figure can be maintained for a long period of time.

A third embodiment of the present invention will be described below with reference to the drawings. FIG. 9 is a schematic partial sectional view of a solid lubrication bearing according to a fourth embodiment of the present invention, FIG. 10 is a plan view of FIG.
FIG. 11 is a partial perspective view of a cross roller bearing which is an application example thereof, FIG. 12 is a view taken in the direction of arrow R in FIG. 11, and FIG. 13 is S in FIG.
It is a -S sectional view.

First, in FIGS. 9 and 10, 55 is a cylindrical rolling member, 56 is an elastic member, 57 is a solid lubricant pressed against the cylindrical rolling member 55 by the elastic member 56, 58 is a cylindrical rolling member 55, an elastic member 56, Solid lubricant
A holder containing 57, 59 is a guide, 60 is a groove formed on the guide 59, 61 is a solid lubricant filled in the groove 60, and 62 is a hard film formed on a surface other than the groove 60. . 11 and 12
In FIG. 13 and FIG. 13, 63 is a roller which is a cylindrical rolling element,
64 is a cage having a structure similar to that of FIGS. 5 and 6 of the second embodiment of the present invention, 65 and 66 are guides, 67 is a solid lubricant, 6
8 is a groove filled with the solid lubricant 67, and 69 is a hard film.

The operation is clear in the first, second and third embodiments of the present invention. However, in this embodiment, the groove
As a result of forming the shape of 68 into a rhombus or a square and disposing it as shown in FIG. 12, the roller 63 can rotate in the T direction or the U direction, and the guides 65 and 66 can also slide linearly in the V direction or the W direction.

The rolling elements 16 of the first and second embodiments of the present invention are balls.
Although 16 or the roller 33 is used, it may be a needle roller or a conical roller by changing the shape of the guide 20.

Similarly, the cylindrical rolling element 47 is used in the third and fourth embodiments, but a spherical or conical roller may be used by changing the shape of the guide 51.

EFFECTS OF THE INVENTION According to the present invention, in addition to the configuration of the first invention, by providing a groove filled with a solid lubricant in a shape converging in the movement direction on the contact surface of the guide that makes line contact with the rolling element, the wedge is formed. Due to the effect, the lubricity is further improved, while the accuracy maintaining ability can be improved.

Therefore, the bearing maintenance period is extended compared to conventional products.
The bearing can be used repeatedly for solid lubricant replacement, and accuracy is guaranteed for a relatively long period of time. In particular, it is most effective to apply the vacuum equipment to a place that requires precise low speed motion.

[Brief description of drawings]

FIG. 1 is a schematic partial sectional view of a solid lubrication bearing according to the first invention of the present invention, and FIGS. 2 and 3 show a ball bearing which is one of the solid lubrication bearing devices according to the first embodiment of the present invention. A sectional view, FIG. 4 is a partial perspective view of a cross roller bearing according to a second embodiment of the present invention, FIGS. 5 and 6 are sectional views of a cage of the cross roller bearing of FIG. 4, and FIG. FIG. 8 is a schematic partial sectional view of a solid lubricating bearing according to a third embodiment of the present invention, FIG. 8 is a plan view of FIG. 7, and FIG. 9 is a schematic partial sectional view of a solid lubricating bearing according to a fourth embodiment of the present invention. , FIG. 10 is a plan view of FIG. 9, FIG. 11 is a partial perspective view of a cross roller bearing of an application example, FIG. 12 is a view taken in the direction of arrow R of FIG.
12 is a sectional view taken along the line S--S in FIG. 12, FIG. 14 is a schematic partial sectional view of a conventional solid lubricating bearing, and FIGS. 15 and 16 are sectional views of one ball bearing of the conventional solid lubricating bearing. FIG. 17 is a partial perspective view of a conventional cross roller bearing. 16 ... Rolling element, 17 ... Elastic element, 18 ... Solid lubricant, 20 ...
… Guide, 52 …… Groove, 53 …… Solid lubricant.

Claims (1)

(57) [Claims] 1. A surface of a cylindrical rolling element that comes into contact with and slides against a solid lubricant pressed against an elastic body, and a guide that makes line contact with the rolling element, and a surface of the guide that makes linear contact with the rolling element. The solid lubricating bearing device is characterized in that a groove filled with a solid lubricant is formed in a shape that converges in the moving direction of the rolling element.