JPS63225718A - Plane bearing - Google Patents
Plane bearingInfo
- Publication number
- JPS63225718A JPS63225718A JP5647787A JP5647787A JPS63225718A JP S63225718 A JPS63225718 A JP S63225718A JP 5647787 A JP5647787 A JP 5647787A JP 5647787 A JP5647787 A JP 5647787A JP S63225718 A JPS63225718 A JP S63225718A
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- movable member
- support member
- magnetic fluid
- flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 26
- 239000000853 adhesive Substances 0.000 claims abstract description 11
- 230000001070 adhesive effect Effects 0.000 claims description 10
- 239000000314 lubricant Substances 0.000 claims description 9
- 239000002907 paramagnetic material Substances 0.000 claims description 6
- 239000000945 filler Substances 0.000 claims description 4
- 230000005298 paramagnetic effect Effects 0.000 claims 1
- 239000000428 dust Substances 0.000 abstract description 8
- 230000002093 peripheral effect Effects 0.000 abstract description 3
- 230000001050 lubricating effect Effects 0.000 abstract 1
- 230000003749 cleanliness Effects 0.000 description 6
- 230000032258 transport Effects 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000004519 grease Substances 0.000 description 4
- 230000005291 magnetic effect Effects 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 235000010446 mineral oil Nutrition 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
- F16C32/0633—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being retained in a gap
- F16C32/0637—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being retained in a gap by a magnetic field, e.g. ferrofluid bearings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、例えばクリーンルーム内でウェハや磁気ディ
スク等のワークを搬送するワーク搬送ユニットの直線案
内機構等に用いる平面ベアリングに関し、特に発塵量が
少なく高クリーン化を達成できる平面ベアリングに関す
る。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a flat bearing used in a linear guide mechanism of a workpiece conveyance unit that conveys a workpiece such as a wafer or a magnetic disk in a clean room, and in particular to Regarding flat bearings that can achieve high cleanliness with less noise.
従来のこの種の平面ベアリングは、第４図に示すように
、固定側のガイド部分としての支持部材１の摺動面に潤
滑剤としてグリース２を薄く塗布すると共に、この支持
部材１の摺動面に移動側の運動部分としての可動部材３
を載置して組み合わせ、上記支持部材１と可動部材３と
の摺動面間にグリース２を介在させた状態で、両者のす
べり接触により支持部材１の長手方向に沿って矢印Ａ。As shown in FIG. 4, in a conventional planar bearing of this type, a thin layer of grease 2 is applied as a lubricant to the sliding surface of a supporting member 1 serving as a guide portion on the fixed side, and the sliding surface of this supporting member 1 is Movable member 3 as a moving part on the moving side
are mounted and combined, and with the grease 2 interposed between the sliding surfaces of the support member 1 and the movable member 3, sliding contact between the two causes the support member 1 to move along the longitudinal direction of the arrow A.
Ｂ方向に可動部材３が直線運動するのを案内していた。The linear movement of the movable member 3 in the B direction was guided.
しかし、このような従来の平面ベアリングにおいては、
潤滑剤としてのグリース２が蒸発したり、可動部材３の
直線運動に伴って飛び散ったりして塵が発生するもので
あった。特に、温度が上昇すると上記グリース２が液状
となり、塵の発生量が多くなるものであった。従って、
クリーンルーム内のクリーン度を高くしておいても、ウ
ェハや磁気ディスク等のワークを所定箇所から他の所定
箇所へ搬送するワーク搬送ユニットの直線案内機構等の
平面ベアリングから上記のように塵が発生することによ
り、該クリーンルーム内のクリーン度が低下することが
あった。このことから、ワークに塵が付着して半導体製
品や磁気ディスク等の品質が低下すると共に、歩留まり
も低下するものであった。However, in such conventional flat bearings,
Grease 2 as a lubricant evaporates or scatters as the movable member 3 moves linearly, generating dust. In particular, when the temperature rose, the grease 2 became liquid and the amount of dust generated increased. Therefore,
Even if the cleanliness level in the clean room is kept high, dust is generated as described above from the flat bearings of the linear guide mechanism of the workpiece transport unit that transports workpieces such as wafers and magnetic disks from one place to another. As a result, the cleanliness within the clean room may deteriorate. As a result, dust adheres to the workpiece, deteriorating the quality of semiconductor products, magnetic disks, etc., and also decreasing the yield.
そこで１本発明は、発塵量が少なく高クリーン化を達成
することができる平面ベアリングを提供することを目的
とする。Therefore, one object of the present invention is to provide a flat bearing that generates less dust and can achieve high cleanliness.
上記の問題点を解決する本発明の手段は、固定側の支持
部材と移動側の可動部材とを組み合わせ、該両者の摺動
面間に潤滑剤を介在させ１両者のすべり接触により上記
支持部材の長手方向に沿う可動部材の直線運動を案内す
る平面ベアリングにおいて、上記可動部材または支持部
材のどちらか一方側の摺動面に゛は磁石を固定すると共
に、この磁石が相手側部材に接触する面を平面形成部材
で覆って平坦に仕上げ、かつ上記潤滑剤は磁性流体とし
た平面ベアリングによってなされる。The means of the present invention for solving the above problems is to combine a stationary support member and a movable member, interpose a lubricant between the sliding surfaces of the two, and bring the support member into sliding contact with each other. In a plane bearing that guides the linear motion of a movable member along the longitudinal direction, a magnet is fixed to the sliding surface on either side of the movable member or the support member, and this magnet contacts the other member. The surface is covered with a flat member to make it flat, and the lubricant is a flat bearing using magnetic fluid.
以下、本発明の実施例を添付図面に基づいて詳細に説明
する。Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
第１図は本発明による平面ベアリングの第一の実施例を
示す側面図である０図において、支持部材４は、例えば
クリーンルーム内でウェハや磁気ディスク等のワークを
所定・箇所から他の所定箇所へ搬送するワーク搬送ユニ
ットの直線案内機構等における固定側のガイド部分とな
るもので、所定箇所と他の所定箇所との間で例えばレー
ル状に形成されている。なお、この支持部材４は、アル
ミニウムなどの常磁性体でできている。そして、上記支
持部材４の上面の摺動面には、可動部材５が載置され組
み合わされている。この可動部材５は、例えば上記ワー
ク搬送ユニットの直線案内機構等における移動側の運動
部分となるもので、例えば適宜の大きさのブロック状に
形成されている。FIG. 1 is a side view showing a first embodiment of the flat bearing according to the present invention. In FIG. This serves as a fixed-side guide part in a linear guide mechanism of a workpiece transport unit that transports a workpiece to a workpiece, and is formed, for example, in the shape of a rail, between a predetermined location and another predetermined location. Note that this support member 4 is made of a paramagnetic material such as aluminum. A movable member 5 is mounted and assembled on the sliding surface of the upper surface of the support member 4. The movable member 5 serves as a moving part on the moving side in, for example, the linear guide mechanism of the workpiece transport unit, and is formed, for example, in the shape of a block of an appropriate size.
ここで１本発明においては、上記可動部材５の底面側に
て支持部材４の摺動面と対向する部分には、磁石６が接
着剤７にて固定されると共に、この磁石６の外周面は平
面形成部材８で覆われている。上記磁石６は、後述の磁
性流体１０を支持部材４の摺動面との間で可動部材５の
底面側に吸引するもので１例えば永久磁石から成る。ま
た、平面形成゛部材８は、上記可動部材５の底面と磁石
６との間の接着剤７の不均一や上記磁石６自体の寸法誤
差等のため平面精度が不十分な磁石６を覆ってその底面
を平坦に仕上げるもので１例えばアルミニウムなどの常
磁性体とエポキシ樹脂系の接着剤とを混合した接着充て
ん剤９から成る。そして。Here, in the present invention, a magnet 6 is fixed with an adhesive 7 to the bottom side of the movable member 5 facing the sliding surface of the support member 4, and the outer peripheral surface of the magnet 6 is covered with a plane forming member 8. The magnet 6 attracts a magnetic fluid 10, which will be described later, to the bottom side of the movable member 5 between it and the sliding surface of the support member 4, and is made of, for example, a permanent magnet. In addition, the plane forming member 8 covers the magnet 6 whose plane accuracy is insufficient due to non-uniformity of the adhesive 7 between the bottom surface of the movable member 5 and the magnet 6, dimensional errors of the magnet 6 itself, etc. The bottom surface is finished flat and is made of an adhesive filler 9 made of a mixture of a paramagnetic material such as aluminum and an epoxy resin adhesive. and.
この接着充てん剤９を上記磁石６の外周面に塗り付けて
被覆し、その後上記支持部材４の摺動面と接触する底面
を精密加工により寸法精度を出すと共に、平坦に仕上げ
る。なお、上記可動部材５は。This adhesive filler 9 is applied to the outer peripheral surface of the magnet 6 to cover it, and then the bottom surface that comes into contact with the sliding surface of the support member 4 is precision-machined to achieve dimensional accuracy and to be finished flat. Note that the movable member 5 is as follows.
磁石６に接する下部側５Ｑはアルミニウムなどの常磁性
体でできており、上部側５ｕは鉄などの強磁性体であっ
てもよい。The lower side 5Q in contact with the magnet 6 is made of a paramagnetic material such as aluminum, and the upper side 5u may be made of a ferromagnetic material such as iron.
さらに、上記支持部材４の摺動面と、可動部材５の底面
側の平面形成部材８の底面との間には、磁性流体１０が
介在されている。この磁性流体１０は、上記支持部材４
と可動部材５との摺動面間の潤滑剤となるもので、鉱物
油系で低蒸発率の合成油をキャリア液としその中に例え
ば酸化鉄の粉をコロイド状に分散させて成り、潤滑性能
と磁化性とを併有している。そして、上記磁性流体１０
は、支持部材４の摺動面の全長にねたって薄く塗布され
ており、可動部材５に固定された磁石６の底面において
は、第１図に黒く塗りつぶして示すように該磁石６に吸
引されて略三角形状となり、その略三角形の底辺部分が
磁石６側に付着し、頂点部分が支持部材４の摺動面に付
着する。Further, a magnetic fluid 10 is interposed between the sliding surface of the support member 4 and the bottom surface of the plane forming member 8 on the bottom side of the movable member 5. This magnetic fluid 10 is applied to the support member 4
This is a lubricant between the sliding surfaces of the movable member 5 and the sliding surface of the movable member 5. It is made of a mineral oil-based synthetic oil with a low evaporation rate as a carrier liquid, and in which iron oxide powder, for example, is dispersed in colloidal form. It has both performance and magnetizability. And the magnetic fluid 10
is applied thinly over the entire length of the sliding surface of the support member 4, and is attracted to the bottom surface of the magnet 6 fixed to the movable member 5, as shown in black in FIG. The base portion of the approximately triangular shape is attached to the magnet 6 side, and the apex portion is attached to the sliding surface of the support member 4.
このような状態で、上記支持部材４の摺動面と。In this state, the sliding surface of the support member 4.
可動部材５の底面側の平面形成部材８の底面に形成され
た摺動面とのすべり接触により、支持部材４の長手方向
に沿って可動部材５の矢印Ａ、Ｂ方向の直線運動が案内
される。このとき、上記可動部材５の底面においては、
上記のように略三角形状に吸引された磁性流体１０の流
体密度の低下した頂点部分で支持部材４と摺動すること
となり、摺動抵抗は小さくなる。また、可動部材５が例
えば矢印Ａ方向に前進するときは、該可動部材５の前進
に従って支持部材４の摺動面の前方側から磁性流体１０
が上記可動部材５の底面に順次補充されつつ磁石６によ
って吸引され、後方側には順次排出しながら前進して行
く。従って、上記可動部材５の直線運動において、支持
部材４との摺動面間を潤滑する磁性流体１０は磁石６に
より吸引されているので、その前進または後退運動によ
って磁性流体１０が飛び散るのを抑えることができる。Due to sliding contact with the sliding surface formed on the bottom surface of the plane forming member 8 on the bottom side of the movable member 5, the linear movement of the movable member 5 in the directions of arrows A and B is guided along the longitudinal direction of the support member 4. Ru. At this time, on the bottom surface of the movable member 5,
As described above, the magnetic fluid 10 drawn into the substantially triangular shape slides on the support member 4 at the apex portion where the fluid density is reduced, and the sliding resistance becomes small. Further, when the movable member 5 moves forward in the direction of arrow A, for example, the magnetic fluid 10
The movable member 5 is sequentially replenished onto the bottom surface of the movable member 5 and attracted by the magnet 6, and is sequentially discharged to the rear side as it moves forward. Therefore, during the linear movement of the movable member 5, the magnetic fluid 10 that lubricates the sliding surface with the support member 4 is attracted by the magnet 6, so that the magnetic fluid 10 is prevented from scattering due to its forward or backward movement. be able to.
また、上記磁性流体１０自身の特性として蒸発量も少な
い。Further, as a characteristic of the magnetic fluid 10 itself, the amount of evaporation is small.
第２図は本発明の第二の実施例を示す側面図である。こ
の実施例は、磁石６を支持部材４の上面側にて可動部材
５の摺動面と対向するようにその長手方向の全長にわた
って接着剤で多数個固定すると共に、これらの磁石６，
６．・・・の上面をアルミニウムなどの常磁性体で出来
た薄板１１から成る平面形成部材８で覆って平坦に仕上
げたものである。なお、上記薄板１１は、磁石６，６．
・・・の上面に接着剤で固定される。この実施例の場合
は。FIG. 2 is a side view showing a second embodiment of the invention. In this embodiment, a large number of magnets 6 are fixed with an adhesive over the entire length of the movable member 5 on the upper surface side of the support member 4 so as to face the sliding surface of the movable member 5, and these magnets 6,
6. . . . The upper surface is covered with a flat member 8 made of a thin plate 11 made of a paramagnetic material such as aluminum to make it flat. Note that the thin plate 11 is attached to the magnets 6, 6 .
It is fixed to the top surface of ... with adhesive. In this example.
支持部材４の上面側の平面形成部材８が摺動面となり、
この摺動面の全長にわたって磁性流体１０が磁石６，６
．・・・に吸引されて略三角形状に並び、その略三角形
状に吸引された磁性流体１ｏの頂点部分で可動部材５が
摺動するので、その可動部材５の矢印Ａ、Ｂ方向の直線
運動をより滑らかに案内することができる。また、上記
磁性流体１０は。The plane forming member 8 on the upper surface side of the support member 4 becomes a sliding surface,
The magnetic fluid 10 is applied to the magnets 6, 6 over the entire length of this sliding surface.
．． The movable member 5 slides at the apex of the magnetic fluid 1o which is attracted to the magnetic fluid 1o and arranged in a substantially triangular shape, so that the movable member 5 moves linearly in the directions of arrows A and B. can be guided more smoothly. Further, the magnetic fluid 10 is as follows.
常に支持部材４側の磁石６，６．・・・によって吸引さ
れているので、可動部材５の前進または後退運動によっ
て該磁性流体１０が飛び散るのをより強く抑えることが
できる。The magnets 6, 6. are always on the supporting member 4 side. ..., it is possible to more strongly prevent the magnetic fluid 10 from scattering due to the forward or backward movement of the movable member 5.
第３図は上記第二の実施例の変形例を示す側面図である
。この変形例は、第２図において磁石６゜６、・・・の
上面を覆う平面形成部材８を、第１図に示す第一の実施
例と同様に接着充てん剤９を塗り付けて被覆し、その後
その上面を精密加工により平坦に仕上げたものである。FIG. 3 is a side view showing a modification of the second embodiment. In this modification, the flat forming member 8 covering the upper surfaces of the magnets 6°6, . . . in FIG. The top surface was then precision-machined to make it flat.
この場合は、第２図に示す実施例と比べて、支持部材４
の上面側の平面形成部材８からなる摺動面の平坦度を精
度の高いものとすることができる。従って、可動部材５
の矢印Ａ、Ｂ方向の直線運動をさらに滑らかに案内する
ことができる。In this case, compared to the embodiment shown in FIG.
The flatness of the sliding surface made of the plane forming member 8 on the upper surface side can be made highly accurate. Therefore, the movable member 5
The linear motion in the directions of arrows A and B can be guided more smoothly.
本発明は以上説明したように、固定側の支持部材４と移
動側の可動部材５との摺動面間を潤滑する磁性流体１０
は、上記可動部材５または支持部材４のどちらか一方側
の摺動面に設けられた磁石６により吸引されているので
、可動部材５の矢印Ａ、Ｂ方向の直線運動によって上記
磁性流体１０が飛び散るのを抑えることができる。また
、その磁性流体１０自身の特性として蒸発量も少ない。As explained above, the present invention provides a magnetic fluid 10 that lubricates the sliding surfaces between the supporting member 4 on the stationary side and the movable member 5 on the movable side.
is attracted by the magnet 6 provided on the sliding surface of either the movable member 5 or the support member 4, so the linear movement of the movable member 5 in the directions of arrows A and B causes the magnetic fluid 10 to move. You can prevent it from scattering. Further, as a characteristic of the magnetic fluid 10 itself, the amount of evaporation is small.
従って１本発明によれば、潤滑剤としての磁性流体１０
からの発塵量が少ない平面ベアリングを提供することが
できる。このことから、本発明の平面ベアリングを、ク
リーンルーム内のワーク搬送ユニットの直線案内機構等
に用いた場合は、該クリーンルーム内のクリーン度を低
下させることなく、高クリーン化を達成することができ
る。従って、ワークに塵が付着するのを減少または防止
して、半導体製品や磁気ディスク等の品質を向上できる
と共に、歩留まりも向上することができる。Therefore, according to the invention, the magnetic fluid 10 as a lubricant
It is possible to provide a flat bearing that generates less dust from the bearing. Therefore, when the planar bearing of the present invention is used in a linear guide mechanism of a work transfer unit in a clean room, high cleanliness can be achieved without reducing the cleanliness in the clean room. Therefore, it is possible to reduce or prevent dust from adhering to the workpiece, thereby improving the quality of semiconductor products, magnetic disks, etc., and improving yield.
また、磁性流体１０が飛び散らないと共にほとんど蒸発
しないことから、潤滑剤の減り方が少なくなり、平面ベ
アリングを長寿命化することができる。Furthermore, since the magnetic fluid 10 does not scatter and hardly evaporates, the amount of lubricant decreases and the life of the plane bearing can be extended.
第１図は本発明による平面ベアリングの第一の実施例を
示す側面図、第２図は本発明の第二の実施例を示す側面
図、第３図は第二の実施例の変形例を示す側面図、第４
図は従来の平面ベアリングを示す側面図である。
４・・・支持部材、 ５・・・可動部材、 ６・・・磁
石。
７・・・接着剤、 ８・・・平面形成部材、 ９・・・
接着充てん剤、 １０・・・磁性流体、 １１・・・
常磁性体の薄板。
出願人 日立電子エンジニアリング株式会社第１図
第 ２ｍFIG. 1 is a side view showing a first embodiment of a flat bearing according to the present invention, FIG. 2 is a side view showing a second embodiment of the present invention, and FIG. 3 is a side view showing a modification of the second embodiment. Side view shown, 4th
The figure is a side view showing a conventional flat bearing. 4...Supporting member, 5...Movable member, 6...Magnet. 7...Adhesive, 8...Plane forming member, 9...
adhesive filler, 10... magnetic fluid, 11...
A thin plate of paramagnetic material. Applicant: Hitachi Electronic Engineering Co., Ltd. Figure 1, 2m
Claims (3)
わせ、該両者の摺動面間に潤滑剤を介在させ、両者のす
べり接触により上記支持部材の長手方向に沿う可動部材
の直線運動を案内する平面ベアリングにおいて、上記可
動部材または支持部材のどちらか一方側の摺動面には磁
石を固定すると共に、この磁石が相手側部材に接触する
面を平面形成部材で覆って平坦に仕上げ、かつ上記潤滑
剤は磁性流体としたことを特徴とする平面ベアリング。(1) A fixed support member and a moving movable member are combined, a lubricant is interposed between the sliding surfaces of the two, and sliding contact between the two allows linear movement of the movable member along the longitudinal direction of the support member. In a flat bearing that guides a magnet, a magnet is fixed to the sliding surface on either side of the movable member or the supporting member, and the surface where this magnet contacts the other member is covered with a flat forming member to make it flat. , and the lubricant is a magnetic fluid.
てん剤であることを特徴とする特許請求の範囲第１項記
載の平面ベアリング。(2) The planar bearing according to claim 1, wherein the planar forming member is an adhesive filler containing a paramagnetic material.
を特徴とする特許請求の範囲第１項記載の平面ベアリン
グ。(3) The plane bearing according to claim 1, wherein the plane forming member is a paramagnetic plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5647787A JPS63225718A (en) | 1987-03-13 | 1987-03-13 | Plane bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5647787A JPS63225718A (en) | 1987-03-13 | 1987-03-13 | Plane bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63225718A true JPS63225718A (en) | 1988-09-20 |
Family
ID=13028180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5647787A Pending JPS63225718A (en) | 1987-03-13 | 1987-03-13 | Plane bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63225718A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003071143A3 (en) * | 2002-02-19 | 2003-12-18 | Rockwell Scient Licensing Llc | Mechanical translator with ultra low friction ferrofluid bearings |
| US6768230B2 (en) | 2002-02-19 | 2004-07-27 | Rockwell Scientific Licensing, Llc | Multiple magnet transducer |
| US6798090B2 (en) | 2002-04-18 | 2004-09-28 | Rockwell Scientific Licensing, Llc | Electrical power generation by coupled magnets |
| US6812598B2 (en) | 2002-02-19 | 2004-11-02 | Rockwell Scientific Licensing, Llc | Multiple magnet transducer with differential magnetic strengths |
| US7288860B2 (en) | 2002-02-19 | 2007-10-30 | Teledyne Licensing, Inc. | Magnetic transducer with ferrofluid end bearings |
-
1987
- 1987-03-13 JP JP5647787A patent/JPS63225718A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003071143A3 (en) * | 2002-02-19 | 2003-12-18 | Rockwell Scient Licensing Llc | Mechanical translator with ultra low friction ferrofluid bearings |
| US6768230B2 (en) | 2002-02-19 | 2004-07-27 | Rockwell Scientific Licensing, Llc | Multiple magnet transducer |
| US6812598B2 (en) | 2002-02-19 | 2004-11-02 | Rockwell Scientific Licensing, Llc | Multiple magnet transducer with differential magnetic strengths |
| US6833780B2 (en) | 2002-02-19 | 2004-12-21 | Rockwell Scientific Licensing, Llc | Mechanical translator with ultra low friction ferrofluid bearings |
| US6917131B2 (en) | 2002-02-19 | 2005-07-12 | Rockwell Scientific Licensing, Llc | Transverse mechanical translator with ferrofluid support |
| CN1333177C (en) * | 2002-02-19 | 2007-08-22 | 洛克威尔科学许可有限公司 | Mechanical translator with ultra low friction ferrofluid bearings |
| US7288860B2 (en) | 2002-02-19 | 2007-10-30 | Teledyne Licensing, Inc. | Magnetic transducer with ferrofluid end bearings |
| USRE41626E1 (en) * | 2002-02-19 | 2010-09-07 | Teledyne Licensing, Llc | Multiple magnet transducer with differential magnetic strengths |
| US6798090B2 (en) | 2002-04-18 | 2004-09-28 | Rockwell Scientific Licensing, Llc | Electrical power generation by coupled magnets |
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