JPS6315815Y2 - - Google Patents
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- Publication number
- JPS6315815Y2 JPS6315815Y2 JP16669282U JP16669282U JPS6315815Y2 JP S6315815 Y2 JPS6315815 Y2 JP S6315815Y2 JP 16669282 U JP16669282 U JP 16669282U JP 16669282 U JP16669282 U JP 16669282U JP S6315815 Y2 JPS6315815 Y2 JP S6315815Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- laser beam
- axis
- reflecting mirror
- plane reflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 13
- 238000004020 luminiscence type Methods 0.000 claims description 12
- 230000007423 decrease Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000005204 segregation Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
【考案の詳細な説明】
この考案は光励起ルミネツセンス（無熱光又は
冷光）による分光分析装置において試料の一平面
内の物質の分布、偏析などを測定するために試料
平面をスキヤニングする装置に関する。[Detailed description of the invention] This invention relates to a device that scans a plane of a sample in order to measure the distribution, segregation, etc. of substances within one plane of the sample in a spectroscopic analyzer using optically excited luminescence (non-thermal light or cold light).
従来、半導体に用いられるシリコン材料等は高
純度を要求されるが、その試験研究その他におい
て僅かに含まれた不純物を検出するために、光励
起ルミネツセンスによる分光分析装置が用いられ
ている。その装置は極低温に保たれた試料にレー
ザ光線を照射し、そこに発する光励起ルミネツセ
ンスによる発光特性を光分析法によつて分析する
ことにより、不純物の質や量を検出するようにな
つている。従来の最も一般的な光励起ルミネツセ
ンスによる分光分析装置としては、第１図に示す
ような原理のものがある。同図において、１はレ
ーザ光線、２は測定する試料、３は集光レンズ、
４は分光器、５は検知器であり、光源１から出る
レーザ光線１ａは資料２に当てられ、そのレーザ
光線により励起されたルミネツセンス３０を集光
レンズ３により分光器４に導き、検知器５で検知
するようになつている。このほかに第２図及び第
３図に示すような構成のものもある。同図におい
て、３′は集光レンズ、６はハーフミラー、７は
レーザ光線の通過する細孔７ａを穿設した反射鏡
であり、第１図と同等部分は同一図面符号で示し
てある。これら第２図及び第３図のものは、第１
図の装置を改良した最近のものである。すなわ
ち、極低温測定のため、試料２は液体窒素又は液
体ヘリウムによる低温環境に保持されるために、
冷却液体の保冷、蒸発防止のため一般に真空容器
内に保持し、入射発光光線共に複数の透明ガラス
を通過することになる。従つて、第１図の装置で
は入射レーザ光線は通過するガラス表面における
反射損失、試料に対する投入角による損失が多
く、発光特性が減殺されるが、これをある程度改
良したのが第２図及び第３図に示す装置である。
第３図のものは第２図のものよりもハーフミラー
６の透過損失が改良されている点でより秀れてい
る。 Conventionally, silicon materials used in semiconductors are required to have high purity, and spectroscopic analyzers using photoexcited luminescence have been used in testing and research and other purposes to detect impurities contained in small amounts. The device detects the quality and quantity of impurities by irradiating a sample kept at an extremely low temperature with a laser beam and analyzing the luminescence characteristics of the photoexcited luminescence emitted there using optical analysis. . The most common conventional spectroscopic analyzer using photoexcited luminescence is one based on the principle shown in FIG. In the figure, 1 is a laser beam, 2 is a sample to be measured, 3 is a condensing lens,
4 is a spectroscope, and 5 is a detector. A laser beam 1a emitted from a light source 1 is applied to a material 2, and luminescence 30 excited by the laser beam is guided to a spectrometer 4 through a condensing lens 3, and a detector 5 It is now possible to detect In addition, there are also configurations as shown in FIGS. 2 and 3. In the figure, 3' is a condensing lens, 6 is a half mirror, and 7 is a reflecting mirror having a hole 7a through which the laser beam passes, and the same parts as in FIG. 1 are designated by the same reference numerals. The ones in these figures 2 and 3 are
This is a recent improvement on the device shown in the figure. That is, for cryogenic measurement, sample 2 is kept in a low-temperature environment using liquid nitrogen or liquid helium.
In order to keep the cooling liquid cool and prevent it from evaporating, it is generally kept in a vacuum container, and both the incident and emitted light beams pass through a plurality of transparent glasses. Therefore, in the apparatus shown in Fig. 1, the incident laser beam suffers a lot of reflection loss on the glass surface through which it passes, and loss due to the angle of incidence relative to the sample, which reduces the emission characteristics.However, the apparatus shown in Fig. 2 and Fig. This is the device shown in Figure 3.
The one shown in FIG. 3 is superior to the one shown in FIG. 2 in that the transmission loss of the half mirror 6 is improved.
しかしながら、このような従来の装置を、同一
試料の一平面内の物質の分布偏析を測定する面内
分布測定に適用しようとすると、かなり問題があ
る。そのような装置としては、試料２と、光源
１、集光レンズ３、分光器４、検知器５などのグ
ループとの相対位置を試料面に沿つて移動させる
構成となる。光源１その他の部分を夫々の関係位
置を保つたまま微動させることは困難であり、大
掛りな設備となる。また、試料２のみを移動させ
る構成とするならば、試料２が大気と遮断された
低温雰囲気内にあるため、これも容易なことでは
ない。低温槽と共に試料２を移動させる構成とす
るのが比較的容易なようであるが、低温槽は真空
ポンプとのパイプ連絡があつたり、槽内での試料
保持の不安定性等の難題がある。これは液体ヘリ
ウム又は液体窒素で冷却するには液体の蒸発損失
を少くするために冷却物体の熱容量を極力小さく
することが望まれるため試料の保持装置は極力簡
単にする必要があるからである。 However, when such a conventional device is applied to in-plane distribution measurement that measures the distribution and segregation of substances within one plane of the same sample, there are considerable problems. Such an apparatus has a configuration in which the relative position of the sample 2 and a group including the light source 1, condensing lens 3, spectrometer 4, detector 5, etc. is moved along the sample surface. It is difficult to slightly move the light source 1 and other parts while maintaining their relative positions, resulting in large-scale equipment. Furthermore, if the configuration is such that only the sample 2 is moved, this is also not easy because the sample 2 is in a low temperature atmosphere that is isolated from the atmosphere. Although it seems relatively easy to have a configuration in which the sample 2 is moved together with the cryostat, there are problems with the cryostat, such as the pipe connection with the vacuum pump and the instability of sample retention within the bath. This is because when cooling with liquid helium or liquid nitrogen, it is desirable to minimize the heat capacity of the cooling object in order to reduce evaporation loss of the liquid, so the sample holding device needs to be as simple as possible.
このようなことから、この考案は試料もしくは
試料保持部又はその他の装置全体を動かすことな
く、試料面を微細にスキヤニングすることができ
る分光分析装置におけるスキヤニング装置を提供
しようとするものである。 For this reason, the present invention aims to provide a scanning device for a spectroscopic analyzer that can finely scan a sample surface without moving the sample, the sample holder, or the entire device.
以下この考案を第３図に示す実施例に基いて説
明する。同図において、１は光源としてのレーザ
光線発射装置、２は測定すべき試料、３及び３′
は試料に当てられたレーザ光線により励起された
ルミネツセンスを分光器に導く集光レンズ、４は
分光器、５は検知器である。これらの各部は第
１，２，３図におけるものと同等である。７はレ
ーザ光線の通過する細孔７ａを穿設した平面反射
鏡で第３図のものと同等である。従来の装置と異
る主な点は、上記に付加して、スキヤニング装置
を構成する第１の平面反射鏡８と第２の平面反射
鏡９とを設けた点及びその設け方にある。 This invention will be explained below based on the embodiment shown in FIG. In the figure, 1 is a laser beam emitting device as a light source, 2 is a sample to be measured, 3 and 3'
4 is a condenser lens that guides the luminescence excited by the laser beam applied to the sample to a spectrometer; 4 is a spectrometer; and 5 is a detector. Each of these parts is the same as in FIGS. 1, 2, and 3. Reference numeral 7 denotes a flat reflecting mirror having a pore 7a through which the laser beam passes, and is the same as that shown in FIG. The main difference from the conventional device is that in addition to the above, a first plane reflecting mirror 8 and a second plane reflecting mirror 9 constituting the scanning device are provided and how they are provided.
第１の平面反射鏡８は、光源１から水平に発射
されるレーザ光線の光路２０を屈折させ垂直上方
へ向う光路２１とするように設けてある。 The first plane reflecting mirror 8 is provided so as to refract an optical path 20 of a laser beam emitted horizontally from the light source 1 to form an optical path 21 that goes vertically upward.
第２の平面反射鏡９は、光路２１をさらに水平
かつ上記光路２０に直角な方向に沿う方向に屈折
させて光路２２とするように設けてある。以下の
説明のために、第１の平面反射鏡８の表面中央部
を原点とするＸ，Ｙ，Ｚ軸に対応させて光路２
０，２１，２２を説明すると、光路２０をＸ軸に
一致させた場合、光路２１がＺ軸に、光路２２が
Ｙ軸に平行なY2軸に、対応する。 The second plane reflecting mirror 9 is provided to further refract the optical path 21 horizontally and in a direction perpendicular to the optical path 20 to form an optical path 22. For the following explanation, the optical path 2 is arranged in correspondence with the X, Y, and Z axes whose origin is at the center of the surface of the first plane reflecting mirror 8.
0, 21, and 22. When the optical path 20 is made to coincide with the X axis, the optical path 21 corresponds to the Z axis, and the optical path 22 corresponds to the Y2 axis parallel to the Y axis.
同図において、１０はレンズ３及び第２の平面
反射鏡９を取付けられ垂直にすなわちＺ軸方向に
上下移動する台、１１は台１０を上下移動させる
送りねじ１１ａの駆動装置、１２は台１０、駆動
装置１１及び第１の平面反射鏡８を取付けられ水
平方向すなわちＸ軸方向に移動する台、１３は台
１２を水平に移動させる送りねじ１３ａの駆動装
置、１４は台１２のガイドレール、１５はロング
パスフイルタ、Y1はＹ軸に平行な軸で図示のよ
うにY1軸上にレンズ３′、フイルタ１５、分光器
４、検知器５が設けられている。なお、試料２の
保持装置は図示していないが、試料２の被測定平
面がレンズ３からその焦点距離だけ離れた位置に
ありレンズ３側に向いかつY2軸に直交するよう
な位置関係で保持する構成とする。 In the figure, 10 is a table to which the lens 3 and the second plane reflecting mirror 9 are attached and moves up and down vertically, that is, in the Z-axis direction, 11 is a drive device for a feed screw 11a that moves the table 10 up and down, and 12 is a table 10. , a table to which the driving device 11 and the first plane reflecting mirror 8 are attached and moves in the horizontal direction, that is, in the X-axis direction; 13 is a driving device for a feed screw 13a that horizontally moves the table 12; 14 is a guide rail of the table 12; 15 is a long pass filter, Y1 is an axis parallel to the Y axis, and as shown in the figure, a lens 3', a filter 15, a spectroscope 4, and a detector 5 are provided on the Y1 axis. Although the holding device for the sample 2 is not shown, the plane to be measured of the sample 2 is located at a distance from the lens 3 by its focal length, faces toward the lens 3, and is perpendicular to the Y axis . The configuration is such that it is retained.
このように構成された分光分析装置では次のよ
うに分光分析が行われる。光源１より発射された
例えば直径1.5mmのレーザ光線はＸ軸に沿つて平
面反射鏡７の細孔７ａを通過し、第１の平面反射
鏡８によりＺ軸方向に直角に屈折反射され、第２
の平面反射鏡９によりさらにY2軸方向に屈折反
射され、レンズ３で集光されて試料２の面をシヤ
ープに照射する。試料面におけるレーザ光線の直
径は100μ程度である。レーザ光線の照射により
励起発光したルミネツセンスのイメージは、レン
ズ３により捕捉され、平行光線となつてY2軸に
沿つて進み、第２の平面反射鏡９によりＺ軸方向
に屈折され、第１の平面反射鏡８によりＸ軸方向
に屈折され、さらに平面反射鏡７によりY1軸方
向に屈折され、集光レンズ３′により集光され、
フイルタ１５によつて試料２の表面で反射された
レーザ光線及び周辺より侵入する可視光線を除去
されて分光器４に投入される。分光器に投入され
た光は光の波長別に分光されて夫々の波長の光量
を検知器により測定されることにより照射された
試料表面の各種原子特有の発光情報を提供する。 Spectroscopic analysis is performed in the spectroscopic analyzer configured as described above as follows. A laser beam with a diameter of, for example, 1.5 mm emitted from the light source 1 passes through the pore 7a of the plane reflecting mirror 7 along the X-axis, is refracted and reflected by the first plane reflecting mirror 8 at right angles to the Z-axis direction, and is reflected by the first plane reflecting mirror 8 at right angles to the Z-axis direction. 2
The light is further refracted and reflected in the Y2 axis direction by the plane reflecting mirror 9, and is focused by the lens 3 to sharply illuminate the surface of the sample 2. The diameter of the laser beam at the sample surface is approximately 100μ. The luminescence image excited and emitted by the laser beam irradiation is captured by the lens 3, becomes a parallel light beam, travels along the Y axis , is refracted by the second plane reflecting mirror 9 in the Z axis direction, and is reflected by the first It is refracted in the X-axis direction by the plane reflecting mirror 8, further refracted in the Y -1 axis direction by the plane reflecting mirror 7, and condensed by the condensing lens 3'.
A filter 15 removes the laser beam reflected from the surface of the sample 2 and the visible light that enters from the surrounding area, and the laser beam is input into the spectrometer 4 . The light input to the spectrometer is separated into wavelengths, and the amount of light at each wavelength is measured by a detector, thereby providing luminescence information specific to various atoms on the surface of the irradiated sample.
次にスキヤニング装置の作用を説明する。駆動
装置１１により台１０を上下に移動させると、
Y2軸が上下に移動し、レーザ光線は試料面を上
下にスキヤニングする。また、駆動装置１３によ
り台１２を水平方向に移動させると、第１、第２
の平面反射鏡８，９及びレンズ３が各々の位置関
係を保つたまま移動するので、Y2軸が水平に移
動し、レーザ光線は試料２を横方向にスキヤニン
グする。 Next, the operation of the scanning device will be explained. When the stand 10 is moved up and down by the drive device 11,
The Y2 axis moves up and down, and the laser beam scans the sample surface up and down. Further, when the table 12 is moved horizontally by the drive device 13, the first and second
Since the plane reflecting mirrors 8 and 9 and the lens 3 move while maintaining their respective positional relationships, the Y2 axis moves horizontally, and the laser beam scans the sample 2 in the lateral direction.
このように駆動装置１１，１３を適宜操作する
ことによりこのスキヤニング装置は試料２の表面
をレーザ光線によつてくまなくスキヤニングする
ことできると共に、そのレーザ光線による光励起
ルミネツセンスを分光器４へ導くことができる。 By appropriately operating the drive devices 11 and 13 in this way, this scanning device can scan the entire surface of the sample 2 with the laser beam, and can also guide the photoexcited luminescence caused by the laser beam to the spectrometer 4. can.
従つて、このスキヤニング装置によれば、試料
もしくは試料保持部又はその他の装置全体を動か
すことなく、試料面上をスキヤニングすることが
できる。なお、このスキヤニング装置では、平面
反射鏡７と第１の平面反射鏡８との間の距離及び
第１の平面反射鏡８と第２の平面反射鏡９との間
の距離が増減するが、その間の入射光、反射光共
平行光線であるから、光量は理論上増減しない。
又反射鏡間の空間が増減するため、光の通過空間
の媒体（空気）の増減による光量損失の増減は今
日要求されている試料の大きさ程度の移動量に対
しては測定精度に影響しない。 Therefore, according to this scanning device, it is possible to scan the sample surface without moving the sample, the sample holder, or the entire device. Note that in this scanning device, the distance between the plane reflecting mirror 7 and the first plane reflecting mirror 8 and the distance between the first plane reflecting mirror 8 and the second plane reflecting mirror 9 increase or decrease; Since both the incident light and the reflected light are parallel rays, the amount of light does not theoretically increase or decrease.
In addition, since the space between the reflecting mirrors increases or decreases, increases or decreases in light loss due to increases or decreases in the medium (air) in the space through which the light passes does not affect measurement accuracy for the amount of movement required today, which is about the size of the sample. .
上記実施例は第３図に示した従来の装置にスキ
ヤニング装置を設けたものであるが、場合によつ
ては、すなわち測定の範囲精度が許せば、細孔付
平面反射鏡７をハーフミラーに変更してもよい。
その場合は第２図に示した従来の装置にスキヤニ
ング装置を設けた構成となる。 In the above embodiment, a scanning device is installed in the conventional device shown in FIG. May be changed.
In that case, the configuration is such that the conventional device shown in FIG. 2 is provided with a scanning device.
上記実施例において、駆動装置１１，１３を手
動式のものとして図示したが、実用上はパルスモ
ータを使用し、コンピユータ制御すれば、微細に
精度よくスキヤニングすることができる。 In the above embodiment, the drive devices 11 and 13 are illustrated as manual drives, but in practice, if a pulse motor is used and controlled by a computer, fine and accurate scanning can be achieved.
上記実施例では試料２を水平方向に照射する構
成を示したが、冷却槽の構造により試料面が水平
になる場合は、台１２，１１等をそのままＸ軸の
周りに90度回転させた構成とすればよい。 In the above example, a configuration is shown in which the sample 2 is irradiated in a horizontal direction, but if the sample surface is horizontal due to the structure of the cooling tank, the configuration is such that the tables 12, 11, etc. are rotated 90 degrees around the X axis. And it is sufficient.
以上のように、この考案によれば、２枚の平面
反射鏡を設けて、その各々を移動させる簡単な構
成によつて、試料もしくは試料保持部又はこの他
の装置全体を動かすことなく、試料平面をスキヤ
ニングすることができる装置を提供できる。 As described above, according to this invention, a simple configuration in which two plane reflecting mirrors are provided and each of them is moved allows the sample to be sampled without moving the sample, the sample holder, or the entire device. A device capable of scanning a plane can be provided.
第１図、第２図、第３図は各々異る従来の光励
起ルミネツセンスによる分光分析装置の原理的説
明図、第４図はこの考案の実施例の概略の構成を
示す斜視図である。
１……レーザ光源、２……試料、３，３′……
集光レンズ、４……分光器、５……検知器、７…
…細孔付平面反射鏡、８……第１の平面反射鏡、
９……第２の平面反射鏡、１０……台、１１，１
３……駆動装置、１２……台、１４……ガイドレ
ール。
FIGS. 1, 2, and 3 are diagrams explaining the principles of different conventional spectroscopic analyzers using photoexcited luminescence, and FIG. 4 is a perspective view showing the general structure of an embodiment of this invention. 1... Laser light source, 2... Sample, 3, 3'...
Condensing lens, 4... Spectrometer, 5... Detector, 7...
...Planar reflecting mirror with pores, 8...First planar reflecting mirror,
9... Second plane reflecting mirror, 10... Stand, 11,1
3... Drive device, 12... Stand, 14... Guide rail.
Claims (1)
ミネツセンスを分光器に導く構成の分光分析装置
において、上記レーザ光線の光路の所定区間をＸ
軸に対応させてその光路をＸ軸に直角なＺ軸に沿
う方向に屈折させる第１の平面反射鏡をＸ軸に沿
う方向に移動操作可能な台に設け、第１の平面反
射鏡から反射するレーザ光線の光路をＸ軸及びＺ
軸に直角なＹ軸に沿う方向に屈折させる第２の平
面反射鏡をＺ軸に沿う方向に移動操作可能に上記
台に設け、第２の平面反射鏡から反射するレーザ
光線が上記試料の平面を直角に照射する位置関係
に試料支持部を設けたことを特徴とするスキヤニ
ング装置。 In a spectroscopic analyzer configured to irradiate a sample with a laser beam and guide the generated photoexcited luminescence to a spectrometer, a predetermined section of the optical path of the laser beam is
A first plane reflecting mirror that corresponds to the axis and refracts the optical path in a direction along the Z axis perpendicular to the X axis is provided on a stand that can be moved and operated in the direction along the The optical path of the laser beam to be
A second plane reflecting mirror that refracts the beam in the direction along the Y axis perpendicular to the axis is provided on the table so as to be movable in the direction along the Z axis, and the laser beam reflected from the second plane reflecting mirror is aligned with the plane of the sample. A scanning device characterized in that a sample support part is provided in a positional relationship that irradiates the sample at right angles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16669282U JPS5971157U (en) | 1982-11-02 | 1982-11-02 | Scanning device in spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16669282U JPS5971157U (en) | 1982-11-02 | 1982-11-02 | Scanning device in spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5971157U JPS5971157U (en) | 1984-05-15 |
| JPS6315815Y2 true JPS6315815Y2 (en) | 1988-05-06 |
Family
ID=30364874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16669282U Granted JPS5971157U (en) | 1982-11-02 | 1982-11-02 | Scanning device in spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5971157U (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100396954B1 (en) * | 2001-03-27 | 2003-09-03 | 임채헌 | Fiter box for analysing wave length of light and cell analysis device utilizing the same |
| JP2011013167A (en) * | 2009-07-06 | 2011-01-20 | Hitachi High-Technologies Corp | Spectrofluorometer and sample cell |
-
1982
- 1982-11-02 JP JP16669282U patent/JPS5971157U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5971157U (en) | 1984-05-15 |
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