JPS62187626U - - Google Patents
Info
- Publication number
- JPS62187626U JPS62187626U JP7465786U JP7465786U JPS62187626U JP S62187626 U JPS62187626 U JP S62187626U JP 7465786 U JP7465786 U JP 7465786U JP 7465786 U JP7465786 U JP 7465786U JP S62187626 U JPS62187626 U JP S62187626U
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- processing stage
- stage plate
- processed
- light emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- MUJOIMFVNIBMKC-UHFFFAOYSA-N fludioxonil Chemical compound C=12OC(F)(F)OC2=CC=CC=1C1=CNC=C1C#N MUJOIMFVNIBMKC-UHFFFAOYSA-N 0.000 claims 1
- 239000000395 magnesium oxide Substances 0.000 claims 1
- 239000012780 transparent material Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Control Of Resistance Heating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Furnace Details (AREA)
Description
図面は本考案実施例の断面図である。
1……処理ステージ板、2……第1ミラー、2
1……観測孔、3……ハーフミラー、4……温度
計、5……球面鏡、6……楕円鏡、7……ランプ
、71……発光部、9……冷却板。
The drawing is a sectional view of an embodiment of the present invention. 1... Processing stage plate, 2... First mirror, 2
1... Observation hole, 3... Half mirror, 4... Thermometer, 5... Spherical mirror, 6... Elliptical mirror, 7... Lamp, 71... Light emitting part, 9... Cooling plate.
Claims (1)
の透明な材質からなり、被処理物が載置される処
理ステージ板と、この処理ステージ板の下側に配
置され、被処理物観測孔を有する凹状の第1ミラ
ーと、該処理ステージ板と該第1ミラーとを一体
的に支持する可動型保持台と、処理ステージ板を
上側から取り囲む第2ミラーと、発光フイラメン
トもしくは発光プラズマが該第2ミラー内に位置
し、その放射光が第2ミラーに反射されて被処理
物に指向するランプとよりなることを特徴とする
ランプイメージフアーネス。 A processing stage plate made of a transparent material such as quartz glass, transparent magnesia, or saphire, on which the object to be processed is placed, and a concave first plate arranged under the processing stage plate and having an observation hole for the object to be processed. a movable holding table that integrally supports the mirror, the processing stage plate and the first mirror, a second mirror surrounding the processing stage plate from above, and a light emitting filament or light emitting plasma located within the second mirror. A lamp image furnace comprising: a lamp whose emitted light is reflected by a second mirror and directed toward an object to be processed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7465786U JPH0454823Y2 (en) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7465786U JPH0454823Y2 (en) | 1986-05-20 | 1986-05-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62187626U true JPS62187626U (en) | 1987-11-28 |
JPH0454823Y2 JPH0454823Y2 (en) | 1992-12-22 |
Family
ID=30920072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7465786U Expired JPH0454823Y2 (en) | 1986-05-20 | 1986-05-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0454823Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4738966B2 (en) * | 2005-10-07 | 2011-08-03 | 株式会社クリスタルシステム | Floating zone melting device |
-
1986
- 1986-05-20 JP JP7465786U patent/JPH0454823Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4738966B2 (en) * | 2005-10-07 | 2011-08-03 | 株式会社クリスタルシステム | Floating zone melting device |
Also Published As
Publication number | Publication date |
---|---|
JPH0454823Y2 (en) | 1992-12-22 |
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