JPS6211179A - Contact element of automatic selector for semiconductive integrated measure - Google Patents

Abstract

PURPOSE:To stably and accurately measure the electric characteristics of IC while lowering the impedance of elements, by providing an element transmitting an electric signal and a plate-shaped element of ground potential and enlarging the area of the element of ground potential. CONSTITUTION:A large number of signal elements 2 transmitting an electric signal are supported so as to be arranged on a pedestal 1 at constant intervals in parallel and pressed to the direction shown by an arrow to be contacted with the leads of IC3 to enable the measurement of the electric characteristics of IC3. In addition to the signal elements 2 contacted with the leads of ground potential of IC3, a plate-shaped element 4 of ground potential is mounted and this G plate 4 is contacted with the ground signal elements 2 to lower the impedance of the ground potential. The G plate 4 is bent in a C-shape at both end sides 4a, 4a thereof so as to be made narrower than the dimension of the pedestal 1 to impart spring effect to said plate 4 and the pedestal 1 is held between said end sides 4a, 4a to mount the G plate 4 to the pedestal 1 in a replaceable manner.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a contact element (hereinafter referred to as an electrode) of an automatic sorting device (hereinafter referred to as a handler) that measures the electrical characteristics of a semiconductor (hereinafter referred to as an IC). It is related to.

[Conventional technology]

Conventionally, in the electrodes of the measurement part of the handler, the electrodes at ground potential are in direct contact with the IC in a similar shape to other measurement bins, allowing for the electrical characteristics of the IC.

[Problem that the invention seeks to solve]

Due to the high integration and speed of recent ICs, their measurement is extremely difficult υ, and even the slightest impedance of an electrode at ground potential causes fluctuations in the ground potential, making measurement difficult. It lacks accuracy. Therefore, electrodes have been required to have electrical characteristics with stable ground potential.

By the way, in measurements using a ground potential electrode having a shape similar to that of a conventional measurement bottle, it has become impossible to perform accurate and stable measurements due to the slight impedance of the electrode. Furthermore, since the ground potential terminal differs depending on the IC, there are many drawbacks such as the need for an electrode for each IC.

An object of the present invention is to provide an electrode that has a stable ground potential and versatility for measuring stable electrical characteristics of an IC.

[Means for solving problems]

The present invention is a contact element for an automatic semiconductor integrated circuit sorting device, characterized by having an element for transmitting an electric signal and a plate-shaped element at ground potential.

〔Example〕

Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

In FIG. 1, a pedestal 1 supports a plurality of signal elements 2 that transmit electrical signals in parallel at regular intervals.By pushing the signal elements 2 in the direction of the arrow, they come into contact with the leads of an IC3, and It enables the measurement of physical characteristics.

In addition to the signal element 2 that contacts the lead at the ground potential of the IC 3, a plate-shaped element 4 at the ground potential (hereinafter referred to as a G plate) is provided, and the G plate 4 is brought into contact with the ground signal element 2. , lower the impedance of the ground potential. This G plate 4 is given a spring effect by bending both end sides 4α, 4α into a dogleg shape narrower than the dimensions of the pedestal 1, and the pedestal 1 is sandwiched between the end sides 4α, so that the G plate 4 is It is replaceable. This G plate 4 is replaced according to an IC whose terminal has a different ground potential.

FIG. 2 shows an embodiment in which the G plate 4 is connected to a device called an IC tester which measures the electrical characteristics of an IC. According to this embodiment, the signal element 2 of the pin to be measured is soldered to the pattern 6 of the connector 5, and is pushed into the socket 7 with the G plate 4 stacked on the opposite side of the connector 5.

Inside the socket 7, the contact 8 and the contact 9 are electrically insulated, and the contact 8 and the pattern 6 determine the potential of the pin to be measured, and the contact 9 and the G plate 4 determine the ground potential of the IC tester. This makes it possible to measure electrical characteristics. According to this embodiment, the ground potential electrode has a plate shape compared to the conventional electrode similar to the pin to be measured, so it has an area several tens of times larger, and the impedance can be lowered by that ratio. Therefore, the measurement of the electrical characteristics of the IC becomes stable and accurate.

Furthermore, it is possible to easily adapt to ICs with different ground potentials by simply replacing the G plate. [Effects of the Invention] As explained above, the present invention increases the area of the elements at ground potential. This has the effect that the impedance of the IC can be lowered and the electrical characteristics of the IC can be measured stably and accurately.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing an example of connection to a device for measuring the electrical characteristics of an IC of the present invention. 1... Pedestal, 2... Signal element, 4... Ground potential element

Claims (1)

[Claims] (1) A contact element for an automatic sorting device for measuring the electrical characteristics of semiconductor integrated circuits, characterized by having an element for transmitting an electric signal and a plate-shaped element at ground potential. element.