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JPS6473764A - Manufacture of image sensor - Google Patents

Manufacture of image sensor

Info

Publication number
JPS6473764A
JPS6473764A JP62231733A JP23173387A JPS6473764A JP S6473764 A JPS6473764 A JP S6473764A JP 62231733 A JP62231733 A JP 62231733A JP 23173387 A JP23173387 A JP 23173387A JP S6473764 A JPS6473764 A JP S6473764A
Authority
JP
Japan
Prior art keywords
sensors
sensor
optical
resistor film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62231733A
Other languages
Japanese (ja)
Inventor
Masakazu Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP62231733A priority Critical patent/JPS6473764A/en
Publication of JPS6473764A publication Critical patent/JPS6473764A/en
Pending legal-status Critical Current

Links

Landscapes

  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:To protect optical sensitivity and uniformity of SN ratio of an optical sensor arranged at the center of substrate by incorporating a simulated sensor which is in the same configuration as the optical sensor at the periphery of substrate where multiple photo-conductive sensors are arranged. CONSTITUTION:The left half of an image sensor 30 is the optical sensor as shown in figure. Multiple optical sensors 10 are arranged in up/down directions at the center of the optical sensor part and several simulated sensors 20 are arranged after the sensors 10 at the upper and lower peripheral parts. The sensor 30 is formed by allowing a high resistor film 2 and a low resistor film 3 to grow in sequence on a substrate 1 with electrically insulated properties and then electrode films 4 and 5 to be deposited for patterning. Plasma etching of the resistor film 3 with these electrode films as a mark is performed until the resistor film 2 is exposed and photovoltaic power is obtained from the electrode film body for the sensors 10 with the resistor film 2 as a sensitized body while the electrode film pair for the sensors 20 are insulated in terms of potential from the electrode film pair for the sensors 10. Thus, the optical sensitivity of sensor 10 and uniformity of SN ratio can be assured.
JP62231733A 1987-09-16 1987-09-16 Manufacture of image sensor Pending JPS6473764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62231733A JPS6473764A (en) 1987-09-16 1987-09-16 Manufacture of image sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62231733A JPS6473764A (en) 1987-09-16 1987-09-16 Manufacture of image sensor

Publications (1)

Publication Number Publication Date
JPS6473764A true JPS6473764A (en) 1989-03-20

Family

ID=16928181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62231733A Pending JPS6473764A (en) 1987-09-16 1987-09-16 Manufacture of image sensor

Country Status (1)

Country Link
JP (1) JPS6473764A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943568A (en) * 1982-09-02 1984-03-10 Canon Inc Photosensor array
JPS605106A (en) * 1983-06-22 1985-01-11 住友ベークライト株式会社 Attachment of decorative top plate and tab

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943568A (en) * 1982-09-02 1984-03-10 Canon Inc Photosensor array
JPS605106A (en) * 1983-06-22 1985-01-11 住友ベークライト株式会社 Attachment of decorative top plate and tab

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