Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
• Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
• Preparing Plates And Mask In Photomechanical Process (AREA)
• Drying Of Semiconductors (AREA)

Priority Applications (2)

Applications Claiming Priority (1)

Publications (2)

Family

ID=16692039

Family Applications (1)

Country Status (2)

Cited By (4)

Families Citing this family (1)

Citations (1)

• 1987
  • 1987-08-31 JP JP21666787A patent/JPS6459832A/ja active Granted
• 1988
  • 1988-08-30 KR KR1019880011034A patent/KR910010219B1/ko not_active IP Right Cessation

Patent Citations (1)

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