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JPS643382A - Fluid flow control valve - Google Patents

Fluid flow control valve

Info

Publication number
JPS643382A
JPS643382A JP15623187A JP15623187A JPS643382A JP S643382 A JPS643382 A JP S643382A JP 15623187 A JP15623187 A JP 15623187A JP 15623187 A JP15623187 A JP 15623187A JP S643382 A JPS643382 A JP S643382A
Authority
JP
Japan
Prior art keywords
tube
electric element
inside diameter
flow control
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15623187A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Watabe
Osamu Shimoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP15623187A priority Critical patent/JPS643382A/en
Publication of JPS643382A publication Critical patent/JPS643382A/en
Pending legal-status Critical Current

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  • Electrically Driven Valve-Operating Means (AREA)

Abstract

PURPOSE:To enable the fluid flow control valve to quickly cope with transient fluctuations in a primary and a secondary pressure by using a tubular piezo-electric element in which the inside diameter of a tube changes by applying a voltage. CONSTITUTION:A tubular piezo-electric element 1 is installed so as to divide the inside of a valve chest 16 into both sides, namely, an input side and an output side, and the perimeter of a tube is sealed by O-rings 4, etc. so that the gas flow from the primary side to the secondary side is carried out only in the inside of the tubular piezo-electric element 1. When a voltage is applied between electrodes 6, 7, the inside diameter of the tube is reduced. At this time, even if the pressure in the primary side transiently fluctuates, the inside diameter is difficult to be changed because the entire tube is highly rigid. Thus, a valve in which variations in fluid resistance are less relative to the pressure fluctuations in the primary side or the secondary side can be obtained.
JP15623187A 1987-06-23 1987-06-23 Fluid flow control valve Pending JPS643382A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15623187A JPS643382A (en) 1987-06-23 1987-06-23 Fluid flow control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15623187A JPS643382A (en) 1987-06-23 1987-06-23 Fluid flow control valve

Publications (1)

Publication Number Publication Date
JPS643382A true JPS643382A (en) 1989-01-09

Family

ID=15623234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15623187A Pending JPS643382A (en) 1987-06-23 1987-06-23 Fluid flow control valve

Country Status (1)

Country Link
JP (1) JPS643382A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH052428A (en) * 1991-06-25 1993-01-08 Ii & S:Kk Liquid discharge amount controller

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH052428A (en) * 1991-06-25 1993-01-08 Ii & S:Kk Liquid discharge amount controller

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