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JPS6418071A - Detecting apparatus for voltage - Google Patents

Detecting apparatus for voltage

Info

Publication number
JPS6418071A
JPS6418071A JP62174534A JP17453487A JPS6418071A JP S6418071 A JPS6418071 A JP S6418071A JP 62174534 A JP62174534 A JP 62174534A JP 17453487 A JP17453487 A JP 17453487A JP S6418071 A JPS6418071 A JP S6418071A
Authority
JP
Japan
Prior art keywords
light
voltage
substance
measuring
electrooptical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62174534A
Other languages
Japanese (ja)
Other versions
JP2582579B2 (en
Inventor
Hironori Takahashi
Shinichiro Aoshima
Yutaka Tsuchiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP62174534A priority Critical patent/JP2582579B2/en
Priority to EP88111142A priority patent/EP0299432B1/en
Priority to US07/217,790 priority patent/US4906922A/en
Priority to DE3889986T priority patent/DE3889986T2/en
Publication of JPS6418071A publication Critical patent/JPS6418071A/en
Priority to US07/460,645 priority patent/US5034683A/en
Application granted granted Critical
Publication of JP2582579B2 publication Critical patent/JP2582579B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To improve operability and spatial resolution and thereby to obtain a result of measurement of high precision, by making a light beam enter the parts of an electrooptical material corresponding to a plurality of measuring positions of a substance to be measured, so as to scan each part of the electrooptical material. CONSTITUTION:A light beam from a light source 53 enters an electrooptical material 2 through a polarizer 4, movable mirror 5, 6 and a beam splitter 7. The polarized state of the light incident on the material 2 is varied in accordance with a variation in a refractive index, and the light is reflected by a reflector 8, outputted as an emission light from the material 2 and given to a detector 10 through the splitter 7 and an analyzer 9. In the detector 10, a voltage at the measuring position of a substance 3 to be measured just below the part of the material located at the position of incidence of the beam is detected. In a computer 11, the detected voltage at the measuring position is subjected to a prescribed data processing and stored in a memory, and then a circuit 13 is controlled to drive the movable mirror 5 so as to detect a voltage at the measuring position of the substance 3 located at a subsequent scanning position of the material 2. Thereby the mirror 5 is moved in the direction of an X-axis line so that the incident light falls on the subsequent scanning position of the material 2.
JP62174534A 1987-07-13 1987-07-13 Voltage detector Expired - Lifetime JP2582579B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62174534A JP2582579B2 (en) 1987-07-13 1987-07-13 Voltage detector
EP88111142A EP0299432B1 (en) 1987-07-13 1988-07-12 A voltage detecting device
US07/217,790 US4906922A (en) 1987-07-13 1988-07-12 Voltage mapping device having fast time resolution
DE3889986T DE3889986T2 (en) 1987-07-13 1988-07-12 Arrangement of a voltage detector.
US07/460,645 US5034683A (en) 1987-07-13 1990-01-03 Voltage detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62174534A JP2582579B2 (en) 1987-07-13 1987-07-13 Voltage detector

Publications (2)

Publication Number Publication Date
JPS6418071A true JPS6418071A (en) 1989-01-20
JP2582579B2 JP2582579B2 (en) 1997-02-19

Family

ID=15980213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62174534A Expired - Lifetime JP2582579B2 (en) 1987-07-13 1987-07-13 Voltage detector

Country Status (1)

Country Link
JP (1) JP2582579B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01119778A (en) * 1987-07-31 1989-05-11 Schlumberger Ind Circuit testing apparatus
JPH0427843A (en) * 1989-08-02 1992-01-30 Hamamatsu Photonics Kk Low noise pulse light source using laser diode and voltage detector using the light source
JPH06213976A (en) * 1992-10-30 1994-08-05 Internatl Business Mach Corp <Ibm> Magneto-optical probe
EP0701140A2 (en) 1994-09-07 1996-03-13 Hamamatsu Photonics K.K. Checking apparatus for array electrode substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60253878A (en) * 1984-03-27 1985-12-14 ザ・ユニヴア−シテイ−・オブ・ロチエスタ− Measurement of electric signal having resolution of sub-picosecond
JPS6271158A (en) * 1985-09-25 1987-04-01 Rohm Co Ltd Analyzer for semiconductor device
JPS63138274A (en) * 1986-11-28 1988-06-10 Sumitomo Electric Ind Ltd Static electricity detecting device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60253878A (en) * 1984-03-27 1985-12-14 ザ・ユニヴア−シテイ−・オブ・ロチエスタ− Measurement of electric signal having resolution of sub-picosecond
JPS6271158A (en) * 1985-09-25 1987-04-01 Rohm Co Ltd Analyzer for semiconductor device
JPS63138274A (en) * 1986-11-28 1988-06-10 Sumitomo Electric Ind Ltd Static electricity detecting device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01119778A (en) * 1987-07-31 1989-05-11 Schlumberger Ind Circuit testing apparatus
JPH0427843A (en) * 1989-08-02 1992-01-30 Hamamatsu Photonics Kk Low noise pulse light source using laser diode and voltage detector using the light source
JPH06213976A (en) * 1992-10-30 1994-08-05 Internatl Business Mach Corp <Ibm> Magneto-optical probe
EP0701140A2 (en) 1994-09-07 1996-03-13 Hamamatsu Photonics K.K. Checking apparatus for array electrode substrate
US5621521A (en) * 1994-09-07 1997-04-15 Hamamatsu Photonics K.K. Checking apparatus for array electrode substrate

Also Published As

Publication number Publication date
JP2582579B2 (en) 1997-02-19

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