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JPS5345975A - Mask for exposure - Google Patents

Mask for exposure

Info

Publication number
JPS5345975A
JPS5345975A JP12060876A JP12060876A JPS5345975A JP S5345975 A JPS5345975 A JP S5345975A JP 12060876 A JP12060876 A JP 12060876A JP 12060876 A JP12060876 A JP 12060876A JP S5345975 A JPS5345975 A JP S5345975A
Authority
JP
Japan
Prior art keywords
mask
transparent plate
exposure
plate
supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12060876A
Other languages
Japanese (ja)
Inventor
Tadayoshi Mifune
Yasuaki Nakane
Iwao Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP12060876A priority Critical patent/JPS5345975A/en
Priority to CA287,526A priority patent/CA1070855A/en
Priority to GB40537/77A priority patent/GB1577479A/en
Priority to DE19772744837 priority patent/DE2744837A1/en
Priority to NL7710996A priority patent/NL7710996A/en
Publication of JPS5345975A publication Critical patent/JPS5345975A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: A small opening is provided to a supporting transparent plate and is made to reach the space formed of the transparent plate for a mask, elastic plate and supporting transparent plate, thereby making the adhesion and separation between the mask and wafer easy.
COPYRIGHT: (C)1978,JPO&Japio
JP12060876A 1976-10-07 1976-10-07 Mask for exposure Pending JPS5345975A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP12060876A JPS5345975A (en) 1976-10-07 1976-10-07 Mask for exposure
CA287,526A CA1070855A (en) 1976-10-07 1977-09-26 Mask for optical exposure
GB40537/77A GB1577479A (en) 1976-10-07 1977-09-29 Optical exposure apparatus
DE19772744837 DE2744837A1 (en) 1976-10-07 1977-10-05 MASK FOR OPTICAL EXPOSURE
NL7710996A NL7710996A (en) 1976-10-07 1977-10-06 MASK FOR OPTICAL LIGHTING.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12060876A JPS5345975A (en) 1976-10-07 1976-10-07 Mask for exposure

Publications (1)

Publication Number Publication Date
JPS5345975A true JPS5345975A (en) 1978-04-25

Family

ID=14790447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12060876A Pending JPS5345975A (en) 1976-10-07 1976-10-07 Mask for exposure

Country Status (1)

Country Link
JP (1) JPS5345975A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6389461U (en) * 1986-11-29 1988-06-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6389461U (en) * 1986-11-29 1988-06-10
JPH0517491Y2 (en) * 1986-11-29 1993-05-11

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