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JPS51120687A - Semiconductor pressure converter - Google Patents

Semiconductor pressure converter

Info

Publication number
JPS51120687A
JPS51120687A JP4522375A JP4522375A JPS51120687A JP S51120687 A JPS51120687 A JP S51120687A JP 4522375 A JP4522375 A JP 4522375A JP 4522375 A JP4522375 A JP 4522375A JP S51120687 A JPS51120687 A JP S51120687A
Authority
JP
Japan
Prior art keywords
pressure converter
semiconductor pressure
pressure
semiconductor
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4522375A
Other languages
Japanese (ja)
Inventor
Michitaka Shimazoe
Yasuo Matsushita
Satoshi Shimada
Kosuke Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4522375A priority Critical patent/JPS51120687A/en
Publication of JPS51120687A publication Critical patent/JPS51120687A/en
Pending legal-status Critical Current

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  • Pressure Sensors (AREA)

Abstract

PURPOSE: Pressure is added to a circular diaphragm with its perimeter fixed, thus permitting the semiconductor-pressure-converter with large resistancerate-of-change and small non-linear error.
COPYRIGHT: (C)1976,JPO&Japio
JP4522375A 1975-04-16 1975-04-16 Semiconductor pressure converter Pending JPS51120687A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4522375A JPS51120687A (en) 1975-04-16 1975-04-16 Semiconductor pressure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4522375A JPS51120687A (en) 1975-04-16 1975-04-16 Semiconductor pressure converter

Publications (1)

Publication Number Publication Date
JPS51120687A true JPS51120687A (en) 1976-10-22

Family

ID=12713258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4522375A Pending JPS51120687A (en) 1975-04-16 1975-04-16 Semiconductor pressure converter

Country Status (1)

Country Link
JP (1) JPS51120687A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5498584A (en) * 1978-01-20 1979-08-03 Yokogawa Hokushin Electric Corp Semiconductor pressure converter
JPS59217374A (en) * 1983-05-26 1984-12-07 Toyota Central Res & Dev Lab Inc Semiconductor strain converter

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5082987A (en) * 1973-10-09 1975-07-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5082987A (en) * 1973-10-09 1975-07-04

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5498584A (en) * 1978-01-20 1979-08-03 Yokogawa Hokushin Electric Corp Semiconductor pressure converter
JPS59217374A (en) * 1983-05-26 1984-12-07 Toyota Central Res & Dev Lab Inc Semiconductor strain converter

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