JPS53102792A - Simultaneous inspecting apparatus of inside and outside of body to be inspected - Google Patents
Simultaneous inspecting apparatus of inside and outside of body to be inspectedInfo
- Publication number
- JPS53102792A JPS53102792A JP1711777A JP1711777A JPS53102792A JP S53102792 A JPS53102792 A JP S53102792A JP 1711777 A JP1711777 A JP 1711777A JP 1711777 A JP1711777 A JP 1711777A JP S53102792 A JPS53102792 A JP S53102792A
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- outside
- simultaneous
- inspecting apparatus
- visual field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To observe the defect as synthesized image in the same visual field, providing the light irradiating mechanism, made dark visual field by irradiating different color light on the inside and outside of the body to be inspected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1711777A JPS53102792A (en) | 1977-02-21 | 1977-02-21 | Simultaneous inspecting apparatus of inside and outside of body to be inspected |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1711777A JPS53102792A (en) | 1977-02-21 | 1977-02-21 | Simultaneous inspecting apparatus of inside and outside of body to be inspected |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53102792A true JPS53102792A (en) | 1978-09-07 |
Family
ID=11935085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1711777A Pending JPS53102792A (en) | 1977-02-21 | 1977-02-21 | Simultaneous inspecting apparatus of inside and outside of body to be inspected |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53102792A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56121150U (en) * | 1980-02-18 | 1981-09-16 | ||
JPS5767844A (en) * | 1980-10-15 | 1982-04-24 | Nippon Kogaku Kk <Nikon> | Surface inspecting device |
JP2006194898A (en) * | 2005-01-13 | 2006-07-27 | Komag Inc | Method and device for reducing or removing stray light of optical test head |
JP2006220656A (en) * | 2005-01-13 | 2006-08-24 | Komag Inc | Test head for optically inspecting workpiece |
JP2014157085A (en) * | 2013-02-15 | 2014-08-28 | Dainippon Screen Mfg Co Ltd | Pattern inspection device |
-
1977
- 1977-02-21 JP JP1711777A patent/JPS53102792A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56121150U (en) * | 1980-02-18 | 1981-09-16 | ||
JPS5767844A (en) * | 1980-10-15 | 1982-04-24 | Nippon Kogaku Kk <Nikon> | Surface inspecting device |
JPS6321855B2 (en) * | 1980-10-15 | 1988-05-09 | Nippon Kogaku Kk | |
JP2006194898A (en) * | 2005-01-13 | 2006-07-27 | Komag Inc | Method and device for reducing or removing stray light of optical test head |
JP2006220656A (en) * | 2005-01-13 | 2006-08-24 | Komag Inc | Test head for optically inspecting workpiece |
JP2014157085A (en) * | 2013-02-15 | 2014-08-28 | Dainippon Screen Mfg Co Ltd | Pattern inspection device |
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