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JPS51120238A - Thickness measuring system for evaporated film - Google Patents

Thickness measuring system for evaporated film

Info

Publication number
JPS51120238A
JPS51120238A JP4478175A JP4478175A JPS51120238A JP S51120238 A JPS51120238 A JP S51120238A JP 4478175 A JP4478175 A JP 4478175A JP 4478175 A JP4478175 A JP 4478175A JP S51120238 A JPS51120238 A JP S51120238A
Authority
JP
Japan
Prior art keywords
measuring system
thickness measuring
evaporated film
film
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4478175A
Other languages
Japanese (ja)
Other versions
JPS5812336B2 (en
Inventor
Toshihiko Ono
Kenichi Imai
Kazuo Tanaka
Kuniaki Makabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50044781A priority Critical patent/JPS5812336B2/en
Publication of JPS51120238A publication Critical patent/JPS51120238A/en
Publication of JPS5812336B2 publication Critical patent/JPS5812336B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: Thickness measuring system for film of evaporated metal on base plate.
COPYRIGHT: (C)1976,JPO&Japio
JP50044781A 1975-04-15 1975-04-15 How to make a living Expired JPS5812336B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50044781A JPS5812336B2 (en) 1975-04-15 1975-04-15 How to make a living

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50044781A JPS5812336B2 (en) 1975-04-15 1975-04-15 How to make a living

Publications (2)

Publication Number Publication Date
JPS51120238A true JPS51120238A (en) 1976-10-21
JPS5812336B2 JPS5812336B2 (en) 1983-03-08

Family

ID=12700939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50044781A Expired JPS5812336B2 (en) 1975-04-15 1975-04-15 How to make a living

Country Status (1)

Country Link
JP (1) JPS5812336B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150806A (en) * 1982-03-03 1983-09-07 Canon Inc Film thickness inspecting method of electrophotographic sensitive substance
JPH01112405U (en) * 1988-01-22 1989-07-28
US7540922B2 (en) 2003-11-14 2009-06-02 Sharp Kabushiki Kaisha Thin film forming apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916686A (en) * 1972-06-09 1974-02-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916686A (en) * 1972-06-09 1974-02-14

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150806A (en) * 1982-03-03 1983-09-07 Canon Inc Film thickness inspecting method of electrophotographic sensitive substance
JPH01112405U (en) * 1988-01-22 1989-07-28
US7540922B2 (en) 2003-11-14 2009-06-02 Sharp Kabushiki Kaisha Thin film forming apparatus

Also Published As

Publication number Publication date
JPS5812336B2 (en) 1983-03-08

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