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JPS5276879A - Counting device for number of exposure times of electron beam exposure device - Google Patents

Counting device for number of exposure times of electron beam exposure device

Info

Publication number
JPS5276879A
JPS5276879A JP50152765A JP15276575A JPS5276879A JP S5276879 A JPS5276879 A JP S5276879A JP 50152765 A JP50152765 A JP 50152765A JP 15276575 A JP15276575 A JP 15276575A JP S5276879 A JPS5276879 A JP S5276879A
Authority
JP
Japan
Prior art keywords
exposure
electron beam
exposure times
counting
counting device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50152765A
Other languages
Japanese (ja)
Inventor
Junichi Ishii
Yoshihide Sugiura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50152765A priority Critical patent/JPS5276879A/en
Publication of JPS5276879A publication Critical patent/JPS5276879A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

PURPOSE: To find earlier existence of poor exposure by comparing number of data transferred to exposure device by counting the number of non-exposure times and that of actual exposure times.
COPYRIGHT: (C)1977,JPO&Japio
JP50152765A 1975-12-23 1975-12-23 Counting device for number of exposure times of electron beam exposure device Pending JPS5276879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50152765A JPS5276879A (en) 1975-12-23 1975-12-23 Counting device for number of exposure times of electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50152765A JPS5276879A (en) 1975-12-23 1975-12-23 Counting device for number of exposure times of electron beam exposure device

Publications (1)

Publication Number Publication Date
JPS5276879A true JPS5276879A (en) 1977-06-28

Family

ID=15547647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50152765A Pending JPS5276879A (en) 1975-12-23 1975-12-23 Counting device for number of exposure times of electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS5276879A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512722A (en) * 1978-07-12 1980-01-29 Jeol Ltd Exposure confirming device
JPS5795629A (en) * 1980-12-05 1982-06-14 Nippon Telegr & Teleph Corp <Ntt> Electron beam exposure device
JPH01102930A (en) * 1987-10-16 1989-04-20 Hitachi Ltd Electron-beam lithography apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512722A (en) * 1978-07-12 1980-01-29 Jeol Ltd Exposure confirming device
JPS5795629A (en) * 1980-12-05 1982-06-14 Nippon Telegr & Teleph Corp <Ntt> Electron beam exposure device
JPH01102930A (en) * 1987-10-16 1989-04-20 Hitachi Ltd Electron-beam lithography apparatus

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