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JPS50120966A - - Google Patents

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Publication number
JPS50120966A
JPS50120966A JP2578074A JP2578074A JPS50120966A JP S50120966 A JPS50120966 A JP S50120966A JP 2578074 A JP2578074 A JP 2578074A JP 2578074 A JP2578074 A JP 2578074A JP S50120966 A JPS50120966 A JP S50120966A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2578074A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2578074A priority Critical patent/JPS50120966A/ja
Publication of JPS50120966A publication Critical patent/JPS50120966A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP2578074A 1974-03-07 1974-03-07 Pending JPS50120966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2578074A JPS50120966A (en) 1974-03-07 1974-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2578074A JPS50120966A (en) 1974-03-07 1974-03-07

Publications (1)

Publication Number Publication Date
JPS50120966A true JPS50120966A (en) 1975-09-22

Family

ID=12175338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2578074A Pending JPS50120966A (en) 1974-03-07 1974-03-07

Country Status (1)

Country Link
JP (1) JPS50120966A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63190164A (en) * 1987-02-03 1988-08-05 Nissan Motor Co Ltd Vacuum deposition method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3386866A (en) * 1964-12-05 1968-06-04 Ibm Method of epitaxially growing a layer of silicon carbide on a seed by pyrolytic decomposition of hydrocarbons or mixtures of silanes and hydrocarbons
US3577285A (en) * 1968-03-28 1971-05-04 Ibm Method for epitaxially growing silicon carbide onto a crystalline substrate
US3767980A (en) * 1969-07-09 1973-10-23 Norton Co Silicon carbide junction diode

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3386866A (en) * 1964-12-05 1968-06-04 Ibm Method of epitaxially growing a layer of silicon carbide on a seed by pyrolytic decomposition of hydrocarbons or mixtures of silanes and hydrocarbons
US3577285A (en) * 1968-03-28 1971-05-04 Ibm Method for epitaxially growing silicon carbide onto a crystalline substrate
US3767980A (en) * 1969-07-09 1973-10-23 Norton Co Silicon carbide junction diode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63190164A (en) * 1987-02-03 1988-08-05 Nissan Motor Co Ltd Vacuum deposition method

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