JPS5989163A - Ink jet head - Google Patents

Abstract

PURPOSE:To provide an ink jet head of low cost and high reliability by such an arrangement wherein No.1 ceramic substrate on which ink flowing grooves are formed by embossing is provided and No.2 ceramic substrate on one side of which piezoelectric elements are pasted through electrodes is laminated to No.1 ceramic substrate. CONSTITUTION:Ink flow route grooves composed of a nozzle 2, pressure chamber 3 and supply route 4 are formed on one side of a green ceramic sheet by pressing a corresponding embossing mold 31 and by this, No. 1 ceramic substrate having ink flow route grooves is obtained. Next, on the surface of a substrate 5 made of green sheet of ceramic, gold paste is printed by screen printing and an electrode is formed by sintering the gold paste and piezoelectric elements are pasted to the substrate with epoxy resin, and this substrate is laminated to NO.1 substrate, and the titled ink jet head is obtained by pasting a spare ink chamber 21 to the laminated substrate with an adhesive.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to ink-on-demand type inkjet printing.

Ink-on-demand type inkjet heads that have been put to practical use include those in which a nozzle plate with holes formed in a metal plate is connected with screws or the like, or those in which photosensitive glass is photoetched. However, both are difficult to manufacture and expensive, and fC.

Therefore, an object of the present invention is to obtain an inexpensive inkjet head.

FIG. 1 shows an inkjet head according to an embodiment of the present invention. 1 is a substrate of 96 thialumina containing MgO and F3jo2, and a nozzle 2 with a depth of 50 μm, a pressure chamber 3 with a depth of 200 μm, and a pressure chamber 3 with a depth of Channels such as the 50 μm supply channel 4 are formed by continuous embossing. A second substrate 5 is made of the same material as the substrate 1 and has a thickness of 0.25 mm, which is laminated and pressed together with the substrate 1 in a raw sheet state, and then sintered at a high temperature to form an integrated head. Thereafter, the end face of the nozzle is cut with a dicing saw to eliminate the difference in level when assembling the substrates 1 and 5, and to make the nozzle end face flat. ζ et al. substrate 50
Screen-print gold paste on the surface and sinter it to create Denda 6.
Then, the piezoelectric element 7 is bonded with epoxy resin. It should be noted that a 6-electrode spa may be made in the evening, etc. Furthermore, the second
As shown in the figure, the ink preliminary chamber 21 is bonded with an inorganic adhesive. As shown in Fig. 2, nozzle 2, pressure chamber 3, (
II feeder path 4 is smoothly connected by slope portions 22 and 23. Note that in FIG. 1, the slope portions 22 and 23 are omitted from illustration.

Next VC#: See Hata et al. for details on the embossing of the road in Figure 3.
Mf? I will clarify. Reference numeral 31 is a push die corresponding to one flow path consisting of the nozzle 3, the pressure chamber 3, and the supply path 4, and is moved up and down. In synchronization with the vertical movement of the press die 31, the substrate 1 is fed at a constant pitch from left to right in FIG. 3, and a plurality of channels as shown in FIG. 1 are formed on the substrate 1.

As can be seen from the explanations of FIGS. 1, 2, and 3, according to the present invention, a green sheet of ceramic is stamped to form ink channels as grooves. By pressure bonding and then sintering, an inexpensive and highly reliable inkjet head can be obtained. In particular, as shown in Figure 3, mold production can be achieved by combining the vertical iM+ movement of 31 with the horizontal feed of the board 1, as shown in Figure 3. 11′i bank, and furthermore, if you try to emboss all the channels with a depth of ζ 200 μm on the substrate 1 at the same time, it will stop and a large embossing force will inevitably be generated. If the molding is performed each time, the pressing force can be small and inexpensive equipment can be used. In addition, since each flow path is made with one mold, there is less variation in the shape of each flow path (there is also less variation in injection from nozzle to another, resulting in better printing quality.Especially with a line-shaped head, the number of flow paths is 800 to 2000). In such cases, the effect is a big relief. Of course, depending on the rigidity of the embossing device or the finishing accuracy, it is possible to embossing multiple channels at the same time with the same mold.

Although the ink preliminary chamber 21 is bonded to the head using an inorganic adhesive in FIG. 2, it may also be bonded under pressure using a raw ceramic material and then sintered, similar to the bonding of the substrate.

FIG. 4 shows another embodiment of the invention. The difference between this example and the example shown in FIG. 1 is that in addition to the substrates 1 and 5, a fifth substrate 41 is used, and the pressure chamber 3 is not a groove but a through hole in the thickness direction. be.

The substrate 41 is a raw sheet made of the same material as the substrate 1.5 in FIG. 1, and has a hardness of 0.25 mm. In this example, since the pressure chamber 3 is a through hole, the embossing force can be much smaller than that shown in FIG. This is because the shearing energy at the outer periphery of the pressure chamber is much smaller than the energy required to reduce the volume of the entire pressure chamber.

Also, nozzle 2, supply path 4FO1 depth ζ 5oμ poison width 5oμ?
y+,, Since the length is small (100 μm), only a slight embossing force is required.Therefore, in the embodiment shown in Fig. 4, although the number of parts increases, the embossing force of the channel is small, and an inexpensive embossing device can be used. I can do it. In addition, the shape of the flow path portion of the nozzle 2, (II feed path 4#, where the influence of ink ejection is large) can be created with high precision.

As mentioned in page 1, according to the present invention, a flow path is created by stamping a raw sheet-like ceramic rift substrate, and a raw sheet-shaped ceramic rift substrate is placed on top of the channel. I] A low-cost and highly reliable inkless jet head can be obtained by bonding under pressure with J and then firing at a high temperature.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing one embodiment of the present invention, and FIG. 2 is a perspective view showing one embodiment of the present invention.
FIG. 5 is a schematic diagram showing a method of manufacturing the substrate of the embodiment shown in FIG. 1, and FIG. 4 is a diagram showing another embodiment of the present invention. 1... Board 2... Nozzle 3.
...Pressure chamber 4... Supply path 5...
... Substrate 6 ... Electrode 7 ...
Piezoelectric element and above Applicant Epson Corporation Figure 2

Claims (1)

[Claims] a first ceramic substrate having an ink channel groove formed by surface pressing on at least one surface;
An inkjet head comprising a t42 ceramic substrate and a pressure 1i5 element bonded to one of the first ceramic substrate or the second ceramic substrate via an electrode.