JPS59188184A - Method and device for measuring light emitting position in light emitting device - Google Patents

Abstract

PURPOSE:To enable to accurately and rapidly measure a light emtting position by moving a light emitting device along an optical axis to focus a light emitting unit on a screen of a video unit, automatically reading out X-Y coordinates of the light emitting unit, and detecting the displacement amount to the set value of the video device. CONSTITUTION:After a laser diode unit (a light emitting unit) 15 is secured to a holder 18 by aligning reference surface, a laser is oscillated, a stage 18 is then moved longitudinally along the optical axis direction of the laser light 5, the light emitting unit 25 of a light emitting element is clearly projected on the screen 24 of a monitor television 23, and the x-y coordinates of the unit 25 is automatically detected and displayed. Further, the position of Z-axis along the optical axis of the light 5 is from any set position in any degree of displacement is displayed on a display unit 29 of a counter 28. Then, an operator reads out the numeric values displayed on the display units 29, 26 of the counter 28 and the television 23, thereby knowing the light emitting position to the reference surfaces made of main surface and specific two sides of the stem 1.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical analysis] The present invention relates to an all-optical position measurement technique in a light emitting device, and a technique that is particularly effective when applied to the side 1 of a light emitting semiconductor device. The present invention relates to a technique that can be effectively used to measure the position of light emission in a light emitting semiconductor device that emits light (@light).

[, l te f11;te] As a light-emitting semiconductor device for an optical pickup of an optical video disk, the present applicant has incorporated a photosensor for laser light monitoring into the same vanocage, as shown in Agreement No. 11. Developed a laser diode device. This laser diode device has a structure in which a copper heat block 2 is fixed to the center of the upper surface (principal surface) of a 1Φ copper stem 1 with a solder material. A semiconductor laser tin (light emitting element; chip) 4 is fixed to one side of the heat block 2 by a sub mount 3. This chip 4 emits laser light 5 from its L end and -" end respectively. Also, on the upper surface of the stem 1, there is a light receiving element f for detecting the optical elasticity of the laser light 5 that is emitted downward. 6 is fixed to the stem 1.A predetermined number of reeds 7 are fixed to the stem 1 via a separator 8. A portion of the leads 7 are connected to the electric switches (not shown) of the chip 4 through wires 9.
A Q-shaped cap 12 is airtightly attached to the transparent glass (gold 1 with a 1 degree angle of 11 degrees), and a heat block 2, a chip 4, etc. are attached thereto. It's ox, Qi
The light-receiving element mounting surface 13 of the stem 1 on which the light-receiving element 6 is attached is slightly inclined and redistributed so that the laser light that is reflected on the surface of the light-receiving element 60 does not exit through the transparent window 1. Furthermore, mounting holes 4 are provided at both ends of the stem 1 exposed from the cap 12 to allow clearance during mounting.

When using such a laser diode device, it is necessary to know with certainty the position of the tip with respect to the base (for example, at a pain level of ±01). For this reason,
For example, the reference part is the two orthogonal and adjacent side surfaces of the rectangular stem 1 and the upper surface of the stem 1, and the light emitting part is set to the XYZ coordinates (approximately in the middle because it may become a spot).
It is necessary to mark the product and ship it as [3 PI marks].

As a means of detecting such a light emitting part (xyz), the applicant fully fixed a laser diode device on the stage in the tool microscope environment, and measured the position in the XY directions by measuring the entire deviation between the base point of the stem and the center of the chip. By doing this, the Z direction is determined by measuring the fish collection depth of the chip.

However, the inventor has found that this method is not IE accurate. In other words, since the tip (optical waveguide) that emits the laser beam is defined at the center of the top edge of the chip, the XY direction position detection is performed at all measurement points in the center of the chip, but in actual I-Festival, The measurement results cannot necessarily be said to be accurate due to the fact that the emitting part is not determined 41) 1, the size of the chip, and the deviation of the light emitting area from the chip.In addition, this method is subject to operator's subjectivity. The reliability of the measurement results is difficult because the judgment is made based on the information provided by the operator.Also, this work of operating the tool microscope takes a long time and has the drawback of low work efficiency.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a light emitting position measuring technique that can accurately and easily detect a light emitting position located inside a light emitting device.

The above and other objects and novel features of the present invention include:
It will become clear from the description herein and the accompanying drawings.

[Summary of the invention]

A brief summary of typical inventions disclosed in this application is as in Section F.

That is, after a light emitting device is held in a fixed state on a stage facing the imaging device, the stage or the imaging device is moved along the optical axis with the light emitting device emitting light, and the imaging device connected to the imaging device is moved. The light emitting part is imaged on the screen, the XY coordinates of the light emitting part are automatically read from the screen, and the amount of displacement relative to the set position of the stage or imaging device is measured using a length measuring device.
Directly detecting the light emitting part by detecting the position in two directions by detecting the light emitting part;
Accurate and rapid light emission position measurement is achieved through objective detection using an imaging device and a length measuring device.

Embodiment FIG. 2 is a schematic diagram of a light emitting position measuring device according to an embodiment of the present invention.

In this embodiment, a first laser diode device (shown in the figure) is used as the light emitting unit 4, and a method and its 3+ position for measuring the light emitting position of the light emitting element in this laser diode device will be explained.

The measuring device is the laser diode device (light emitting device i9).
) ] stage 16 supporting stage 5 and this stage 1
6 and machine stands 17 arranged in line with each other. One holder 18 is provided on the stage 16 to keep the light emitting device 15 in a fixed position a, and emits light "k 1@1.51'"
f: The laser beam 5 is held in the holder 18 so that it is oscillated in the horizontal direction. In the holder 18, the cap 12 of the stem 1 is attached to two predetermined adjacent sides around the stem 1. -L then signed the holder 18 and waited for a while. If this holding width is not measured accurately and reliably, the measurement results will be unreliable and may be misleading, so care must be taken.

Further, a socket 20 connected to a power source 19 for applying voltage is inserted into a predetermined lead 7 of the light emitting device 150 attached to the holder 18.

On the other hand, a lens system 21 and an imaging device (for example, a television camera) 22 are disposed on the machine stand 17, and the laser beam 5 emitted from the light emitting device 15 is imaged by the television camera 22 through the lens system 21. ing. In the television camera 22, the laser oscillation unit (
A video device (for example, a monitor television) that magnifies and captures the light emitting part) as a spot light and is connected to the television camera 22.
It is designed to be displayed on the screen 24 of 23. Screen 24
The reference XY axes are written on the screen, and the coordinates X and y of the light emitting section 25 can be read.

Therefore, if the origin of the XY axes is set at a position that is a predetermined distance 1ζ[f from the two reference side surfaces of the stem 1, the coordinates of the light emitting part 25 with respect to this reference point (origin) (the light emitting part is captured as a spot light) so the coordinates of its center)
X and y are mechanically detected and the coordinates thereof are displayed on the display section 26. The position of the light emitting section 25 can also be detected by visually observing the screen 24. According to this mechanism, the measurement accuracy can be set to 1 μm.

On the other hand, a length measuring device 27 is attached to the end of the machine 17, and detects the displacement of the holder 18, that is, the stage 16, with respect to the previously crushed position (measurement accuracy is ±1μ).
m). This displacement stitch is performed by the counter 28.
is displayed on the display section 29 of.

Next, a method of measuring the light emission position in the laser diode device 15 will be explained. After fixing the laser diode device (light emitting device) 15, which is the object to be measured, to the holder 18 with its reference surface aligned, the laser oscillates, and then the stage 16 is moved back and forth along the optical axis direction of the laser beam 5. A light emitting part 25 of a light emitting element is clearly displayed on a screen 24 of a light emitting element 23, and the xy coordinates of the light emitting part 25 are automatically detected and displayed. The display section 29 of the counter 28 still displays how much the position of the Z-axis relative to the optical axis of the laser beam 5 is displaced from the set position 14.

Therefore, the worker uses the counter 28 and the monitor television 23.
By reading the numerical values displayed on the display sections 29 and 26, it is possible to know the light emitting position with respect to each reference plane consisting of the main surface of the stem 1 and two specific sides.

〔effect〕

(1) According to the light emitting position measurement technique in the light emitting device of the present invention, since the light emitting part is detected in a state where it emits light, it is possible to accurately detect the light emitting position.

(2) According to the technology of the present invention, the light emitting position is enlarged and displayed on the screen of the imaging device, and the light emitting device is automatically detected, so the position in the XY directions along the main surface of the stem 1 is accurate. (with an accuracy of ±1 μm).

(3) According to the technology of the present invention, the stage supporting the light emitting device is moved relative to the imaging device to focus the image, and the displacement of the stage from the set position at this time is automatically measured using a length measuring device. Since the displacement of the light emitting position with respect to a predetermined height from the main surface of the stem 1 is detected as positive @ (+
It can be detected in the seminal phase of l tt771).

+41 'j, the technology of the present invention involves directly detecting the light emitting part in (1) above, detecting the light emitting part in (3) by magnifying it, and objectively detecting the light emitting part in (3), which does not include the operator's subjectivity. By using a conventional detection method, a synergistic effect can be obtained in that highly accurate light emission position measurement can be performed.

(5) Furthermore, according to the technology of the present invention, position detection is automatically performed except for the lobeing of the light emitting device, focusing by moving the unloading knob and stage, and reading the detected value. This simplifies the light emitting position detection work and improves work efficiency.

Although all the embodiments of the invention made by the present inventor have been described in detail above, the present invention is not limited to the above embodiments, and may be modified without departing from the gist thereof. Needless to say. For example, the same effect as in the above embodiment can be achieved by fixing the stage, moving the machine in the optical axis direction, and detecting the displacement of the machine. Further, the external appearance component of the object to be measured is not limited to the stem.

[Field of Application] In the above explanation, the invention made by the present inventor was mainly applied to a laser diode device, which is the field of application that formed the background of the invention, but the invention is not limited thereto. It can also be applied to Toshin's light emitting semiconductor devices. Furthermore, the present invention can also be applied to a light emitting device other than a light emitting semiconductor device that has a light emitting section inside and emits light to the outside of the device.

[Brief explanation of the drawing]

FIG. 1 is a partially sectional perspective view of a laser diode device already developed by the present applicant, and FIG. 2 is a mechanical diagram showing an outline of a light emitting position measuring device according to an embodiment of the present invention.

Claims (1)

[Claims] 1. A step of holding a light emitting device on a stage facing the imaging device) and moving the imaging device along the seven optical axes while the stage is in a state where the light emitting device is emitting light. a step of forming an image of the light emitting section on the screen of an imaging device connected to the imaging device; a step of detecting displacement of the stage or the imaging device with respect to a preset position; and a step of detecting the coordinates of the light emitting section on the screen. 1. A method for measuring a light emitting position in a light emitting device, comprising: detecting a position of a light emitting part with respect to a reference portion outside the light emitting device. 2. The light emitting device is a light emitting semiconductor device in which an end light element is fixed to the main surface side of a stem and is sealed with a cap having a transparent window.
Light-emitting part If in the light-emitting device described in Section 1: Ill standard method. 3. Consisting of a stage for holding the light emitting device in a fixed state, an imaging device disposed facing the stage and photographing the light emitting part of the light emitting device, and an imaging device connected to the image capturing device, The stage or illumination camera is controlled to move along the optical axis so that the light emitting part projected on the screen of the imaging device can be focused, and the displacement of this movement is detected by the amelioration device. A light emitting position measuring device for a light emitting device, characterized in that: 4. The stage holds a light emitting semiconductor device comprising a stem having a light emitting element fixed to the main surface thereof, and a cap fixed to the main surface of the stem and having a transparent window. A light emitting position measuring device in a light emitting device according to claim 3.