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JPS5788744A - Testing device for optical semiconductor element - Google Patents

Testing device for optical semiconductor element

Info

Publication number
JPS5788744A
JPS5788744A JP16433280A JP16433280A JPS5788744A JP S5788744 A JPS5788744 A JP S5788744A JP 16433280 A JP16433280 A JP 16433280A JP 16433280 A JP16433280 A JP 16433280A JP S5788744 A JPS5788744 A JP S5788744A
Authority
JP
Japan
Prior art keywords
luminous intensity
optical semiconductor
semiconductor element
quality
luminous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16433280A
Other languages
Japanese (ja)
Inventor
Yuji Nishimura
Michiyasu Tanji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP16433280A priority Critical patent/JPS5788744A/en
Publication of JPS5788744A publication Critical patent/JPS5788744A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Devices (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To determine the quality of an element to be tested by a method wherein the output of a two-dimensional image sensor obtained from the luminous intensity of the element is compared with the pattern of a reference optical semiconductor element and the luminous intensity of each part which are memorized beforehand. CONSTITUTION:The element 1 to be measured is projected on the two-dimensional image sensor 3, analyzed minutely (e.g. 500X500 approx.), converted into analog voltage in accordance with the luminous intensity of a corresponding part and subsequently memorized 5 through A/D conversion circuit 4, while the pattern and luminous intensity of the reference optical semiconductor element are also memorized beforehand, and the patterns and luminous intensity of two elements are compared with each other for determination 6' of the quality of the element 1. When there is a flaw 10 in a luminous segment, the luminous efficiency, as well as the expected output falls, which appears as abnormality. Thus, the quality can be determined on the basis of the absolute standard.
JP16433280A 1980-11-21 1980-11-21 Testing device for optical semiconductor element Pending JPS5788744A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16433280A JPS5788744A (en) 1980-11-21 1980-11-21 Testing device for optical semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16433280A JPS5788744A (en) 1980-11-21 1980-11-21 Testing device for optical semiconductor element

Publications (1)

Publication Number Publication Date
JPS5788744A true JPS5788744A (en) 1982-06-02

Family

ID=15791154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16433280A Pending JPS5788744A (en) 1980-11-21 1980-11-21 Testing device for optical semiconductor element

Country Status (1)

Country Link
JP (1) JPS5788744A (en)

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