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JPS5472076A - Method and apparatus for pattern inspection - Google Patents

Method and apparatus for pattern inspection

Info

Publication number
JPS5472076A
JPS5472076A JP13843277A JP13843277A JPS5472076A JP S5472076 A JPS5472076 A JP S5472076A JP 13843277 A JP13843277 A JP 13843277A JP 13843277 A JP13843277 A JP 13843277A JP S5472076 A JPS5472076 A JP S5472076A
Authority
JP
Japan
Prior art keywords
pattern
inspected
standard
standard pattern
similarity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13843277A
Other languages
Japanese (ja)
Other versions
JPS6342201B2 (en
Inventor
Michiaki Miyagawa
Masao Nito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP13843277A priority Critical patent/JPS5472076A/en
Publication of JPS5472076A publication Critical patent/JPS5472076A/en
Publication of JPS6342201B2 publication Critical patent/JPS6342201B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To discriminate patterns at high precision, by rewriting standard pattern with the pattern being inspected according to the result of similarity operation without securing the standard pattern, and subsequently using this pattern being inspected as the standard pattern.
CONSTITUTION: The object being measured 2 continuously moving on a carrier table 1 is momentarily illuminated by a strobe 3, and this momentary image is photographed by a television camera 4 to obtain a photoelectric converted output signal of the graphic pattern of the object 2, which is then supplied to a pattern inspection device 5. At this pattern inspection device 5, this signal is stored as the inspected pattern information, of which similarity with the standard pattern information is calculated in a pattern matching arithmetic circuit 18. When the similarity of the inspected pattern and the standard pattern is above the specified threshold value, the inspected pattern information is rewritten as the standard pattern information, and is used as the standard pattern in the subsequent judgements. Therefore, even if the output signal of television camera and others fluctuate with the time, high precision measurement may be performed.
COPYRIGHT: (C)1979,JPO&Japio
JP13843277A 1977-11-19 1977-11-19 Method and apparatus for pattern inspection Granted JPS5472076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13843277A JPS5472076A (en) 1977-11-19 1977-11-19 Method and apparatus for pattern inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13843277A JPS5472076A (en) 1977-11-19 1977-11-19 Method and apparatus for pattern inspection

Publications (2)

Publication Number Publication Date
JPS5472076A true JPS5472076A (en) 1979-06-09
JPS6342201B2 JPS6342201B2 (en) 1988-08-22

Family

ID=15221827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13843277A Granted JPS5472076A (en) 1977-11-19 1977-11-19 Method and apparatus for pattern inspection

Country Status (1)

Country Link
JP (1) JPS5472076A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073310A (en) * 1983-09-30 1985-04-25 Fujitsu Ltd pattern inspection equipment
JPS62242807A (en) * 1986-04-15 1987-10-23 Toshiba Corp Dimension measuring instrument
JP2011196728A (en) * 2010-03-17 2011-10-06 Nuflare Technology Inc Inspection device and inspection method
JP2011221264A (en) * 2010-04-09 2011-11-04 Nuflare Technology Inc Inspection method and inspection equipment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073310A (en) * 1983-09-30 1985-04-25 Fujitsu Ltd pattern inspection equipment
JPS62242807A (en) * 1986-04-15 1987-10-23 Toshiba Corp Dimension measuring instrument
JP2011196728A (en) * 2010-03-17 2011-10-06 Nuflare Technology Inc Inspection device and inspection method
JP2011221264A (en) * 2010-04-09 2011-11-04 Nuflare Technology Inc Inspection method and inspection equipment
US9036896B2 (en) 2010-04-09 2015-05-19 Nuflare Technology, Inc. Inspection system and method for inspecting line width and/or positional errors of a pattern
US9406117B2 (en) 2010-04-09 2016-08-02 Nuflare Technology, Inc. Inspection system and method for inspecting line width and/or positional errors of a pattern

Also Published As

Publication number Publication date
JPS6342201B2 (en) 1988-08-22

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