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JPS5753124A - Crystal resonator unit and its production - Google Patents

Crystal resonator unit and its production

Info

Publication number
JPS5753124A
JPS5753124A JP12879280A JP12879280A JPS5753124A JP S5753124 A JPS5753124 A JP S5753124A JP 12879280 A JP12879280 A JP 12879280A JP 12879280 A JP12879280 A JP 12879280A JP S5753124 A JPS5753124 A JP S5753124A
Authority
JP
Japan
Prior art keywords
stuck
layer
films
metallic
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12879280A
Other languages
Japanese (ja)
Inventor
Isao Shinoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP12879280A priority Critical patent/JPS5753124A/en
Publication of JPS5753124A publication Critical patent/JPS5753124A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To facilitate photoetching, by giving a three-layer metallize structure only to frame parts required for hermetical sealing of a crystal vibrator with a frame and a box-form vessel and by giving a two-layer metallize structure to the other part. CONSTITUTION:Metallic films 31a and 31b consisting of two layers of Cr and Au are stuck to a crystal plate 12 which is polished sufficiently smoothly and has the surface cleaned. Next, a sealing frame part required for hermetical sealing is formed on metallic films 31a and 31b by patterns of photo resistors 22a and 22b, and SiO2 23a and 23b are stuck. Next, photo resistors of the sealing frame pattern are exfoliated, and SiO2 films stuck onto photo resistors are exfoliated, and the metallic layer of the sealing frame part is etched after this metallic layer is exposed. Next, metallic films 23a and 32b consisting of three layers of Cr-Ni-Au or Cr-NiCr-Au are stuck, and SiO2 films are etched, thus obtaining a crystal plate where three-layer metallic films are stuck only to the sealing frame part.
JP12879280A 1980-09-17 1980-09-17 Crystal resonator unit and its production Pending JPS5753124A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12879280A JPS5753124A (en) 1980-09-17 1980-09-17 Crystal resonator unit and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12879280A JPS5753124A (en) 1980-09-17 1980-09-17 Crystal resonator unit and its production

Publications (1)

Publication Number Publication Date
JPS5753124A true JPS5753124A (en) 1982-03-30

Family

ID=14993559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12879280A Pending JPS5753124A (en) 1980-09-17 1980-09-17 Crystal resonator unit and its production

Country Status (1)

Country Link
JP (1) JPS5753124A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60100010U (en) * 1983-12-15 1985-07-08 三輪精機株式会社 line filter
JPH01135511A (en) * 1987-08-20 1989-05-29 Nkk Corp Apparatus for separating suspended solids
JPH0437210A (en) * 1990-05-31 1992-02-07 Kinseki Ltd Electrode structure of piezoelectric vibrator
JPH06252682A (en) * 1993-02-26 1994-09-09 Rohm Co Ltd Piezoelectric oscillator
JPH0722894A (en) * 1993-06-30 1995-01-24 Rohm Co Ltd Ceramic oscillation element and piezoelectric oscillator using the same
JP2007184859A (en) * 2006-01-10 2007-07-19 Epson Toyocom Corp Hermetically sealed structure, piezoelectric device and its manufacturing method
JP2011250390A (en) * 2010-04-27 2011-12-08 Nippon Dempa Kogyo Co Ltd Piezoelectric device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60100010U (en) * 1983-12-15 1985-07-08 三輪精機株式会社 line filter
JPH01135511A (en) * 1987-08-20 1989-05-29 Nkk Corp Apparatus for separating suspended solids
JPH0437210A (en) * 1990-05-31 1992-02-07 Kinseki Ltd Electrode structure of piezoelectric vibrator
JPH06252682A (en) * 1993-02-26 1994-09-09 Rohm Co Ltd Piezoelectric oscillator
JPH0722894A (en) * 1993-06-30 1995-01-24 Rohm Co Ltd Ceramic oscillation element and piezoelectric oscillator using the same
JP2007184859A (en) * 2006-01-10 2007-07-19 Epson Toyocom Corp Hermetically sealed structure, piezoelectric device and its manufacturing method
JP4665768B2 (en) * 2006-01-10 2011-04-06 エプソントヨコム株式会社 Hermetic sealing structure, piezoelectric device and manufacturing method thereof
JP2011250390A (en) * 2010-04-27 2011-12-08 Nippon Dempa Kogyo Co Ltd Piezoelectric device

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